CN104834024B - A kind of double; two disappear short-pass film system and color-separation and color-recombination device - Google Patents
A kind of double; two disappear short-pass film system and color-separation and color-recombination device Download PDFInfo
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Abstract
The invention discloses a kind of double; two short-pass film system and color-separation and color-recombination device of disappearing, a kind of double; two short-pass film systems that disappear, including the admittance coupling film system, the first main film system and the second main film system that set gradually on the substrate；Admittance is mated film system and is alternately made up of middle refractive index film and low refractive index film；First main film system is made up of high refractive index film, middle refractive index film and low refractive index film；Second main film system is alternately made up of high refractive index film and low refractive index film；High refractive index film is TiO2Film or Nb2O5Film, middle refractive index film is Al2O3Film or MgO membrane, low refractive index film is SiO2Film。Double; two short-pass film systems that disappear are applied on optical filter and color-separation and color-recombination device, it is possible to disappear shortwave passband residual reflectivity and separate with s-, p-polarized light transition wave-length that disappears, and improve the display brightness of image, definition and color saturation。
Description
Technical field
The present invention relates to double; two short-pass optical filter field that disappears, be specifically related to a kind of double; two disappear short-pass film system and color-separation and color-recombination device。
Background technology
Short-pass optical filter is widely used in optical engineering, and its function is transmission short-wavelength light and reflects long wavelength light。For photoelectricity Projection Display, the application of this short-pass optical filter includes three kinds of basic functions: decomposition of white light become three primary colours light, through ovennodulation three primary colours light compositing coloured image and isolation light source infrared light。
High brightness, fine definition and color rendition are three technical specifications paid close attention to most in Display Technique, therefore how to improve the efficiency of light energy utilization and picture contrast and color saturation is the problem endeavouring for a long time to solve。But existing is all by short-pass film system (0.5LH0.5L) in MacLeod's " optical thin film filter " with short-pass optical filterpCarrying out what thickness optimization obtained as underlying membrane architecture, wherein p is periodicity。Residual reflectivity in this short-pass optical filter not only shortwave passband is high, and the transition wave-length of s-polarized light in trans-reflective transition region, p-polarized light separates very big。Its result, one is cause optical energy loss, reduces the efficiency of light energy utilization；Two is become veiling glare after that a part of light of loss passes through multiple reflections and refraction in system, causes that image definition and contrast decline；Three is that color saturation reduces, and coloured image is light and not gorgeous。
The Chinese invention patent application that application publication number is CN103513314A (application number is 201310471073.4) discloses a kind of low pass filter, including the first quartz crystal slice set gradually along optical path direction, quarter-wave plate, second quartz crystal slice, wherein, the light side surface of described first quartz crystal slice is coated with infrared cut coating, the light exit surface of described second quartz crystal slice is coated with suppressed wave length shift film, described infrared cut coating includes alternatively distributed high refractive index layer and low-index layer, described high refractive index layer is Ti3O5Layer, Nb2O5Layer or ZnS layer, described low-index layer is SiO2Layer, described suppressed wave length shift film includes from the first coupling film system that described second quartz crystal slice outwards sets gradually, main film system and the second coupling film system, and wherein, the first described coupling film system includes alternatively distributed low-index layer SiO2With high refractive index layer Ti3O5, described main film system includes alternatively distributed low-index layer SiO2With high refractive index layer Ti3O5, the second described coupling film system includes alternatively distributed high refractive index layer Ti3O5With low-index layer SiO2And it is inserted in high refractive index layer Ti3O5With low-index layer SiO2Between intermediate-index layer Ta2O5Or HfO2。This low pass filter mainly has the function of three aspects: ends near infrared light and ultraviolet light, stablize transmission-cut-off transition wave-length and eliminates Moire fringe, can be applicable in high element sensor, but, its infrared cut coating adopts alternatively distributed high refractive index layer and low-index layer, realize cut-off near infrared light and ultraviolet light, i.e. reflection near infrared light and ultraviolet light, this infrared cut coating is not suitable in photoelectricity Projection Display, image acquisition system and colored engineering。
Summary of the invention
It is an object of the invention to overcome the defect of prior art, it is provided that a kind of double; two disappear short-pass film system and color-separation and color-recombination devices, thus improving the display brightness of image, definition and color saturation。
For achieving the above object, the present inventor, on the basis of analytical calculation, proposes the design of a kind of double; two short-pass film system that disappears first。Its ideation is, due to only with described existing short-pass film system (0.5LH0.5L)pDouble; two purpose that disappears can not be realized as initiating structure, that is afraid of that the thin-film material selecting more than three kinds in optimization process is also of no avail, therefore need to implement as follows: the first step first designs the first main film system, require that in its trans-reflective transition region, the transition wave-length of s-, p-polarized light is almost without separation, but owing to only polarization separation can not be eliminated with two kinds of thin-film materials, therefore three kinds of thin-film materials need to be selected；Second step redesigns the second main film system, and after realizing depolarization separation due to the first main film system, the reflection bandwidth of its long-wavelength region becomes very narrow, so its zone of reflections of broadening must be carried out with the second main film system；3rd step is that film system is mated in design admittance, first main film system and the second main film system have been achieved with the transition wave-length of s-, p-polarized light almost without separation, and long wave has sufficiently wide high reflectance zone, but now shortwave transmission bands still has bigger residual reflectivity, this is because the resultant admittance of the first main film system and the second main film system is not mated with substrate admittance and caused, an admittance coupling film system must be redesigned between the main film system of substrate and first and second for this。
Specifically, the technical solution used in the present invention is:
A kind of double; two short-pass film system that disappears, including the admittance coupling film system, the first main film system and the second main film system that set gradually on the substrate；
Described admittance is mated film system and is alternately made up of middle refractive index film and low refractive index film；
The first described main film system is made up of high refractive index film, middle refractive index film and low refractive index film；
The second described main film system is alternately made up of high refractive index film and low refractive index film；
Described high refractive index film is TiO2Film or Nb2O5Film, described middle refractive index film is Al2O3Film or MgO membrane, described low refractive index film is SiO2Film。
In the present invention, the short-pass optical filter of this structure has double; two characteristic that disappears: disappears shortwave passband residual reflectivity and separates with s-, p-polarized light transition wave-length that disappears。
Further, described high refractive index film is TiO2Film, described middle refractive index film is Al2O3Film, described low refractive index film is SiO2Film。
The material of namely described high refractive index film is TiO2Or Nb2O5, preferred TiO2；The material of described middle refractive index is Al2O3Or MgO, preferred Al2O3；The material of described low refractive index film is SiO2。
Further, when the angle of incidence that described double; two short-pass optical filters that disappear use in atmosphere is 16 degree, total rete number is 68 layers, wherein, it is 13 layers that film system is mated in described admittance, and from substrate side, the thickness of outside each rete is followed successively by: 125.5,116.2,110.9,111.5,95.4,121.6,95.4,102.1,115.7,103.5,245.3,75.7,76.4, unit is nm；
The first described main film system is 39 layers, and the thickness mating the outside each rete of film system from admittance is followed successively by: 19.7,165.8,34.5,121.6,41.2,35.4,51.1,22.8,49.2,35.8,45.9,71.2,44.5,38.9,52.6,21.4,52.0,46.3,57.9,20.8,50.0,47.7,63.9,21.2,44.9,47.3,69.5,22.2,37.5,46.8,78.1,28.7,27.6,39.8,77.6,30.3,26.0,37.8,71.9, unit is nm；
In first main film system, the 1st, 3,6,8,10,14,16,18,20,22,24,26,28,30,32,34,36,38 layers is high refractive index film, and the 2nd, 4,12,31,39 layers is middle refractive index film, and all the other are low refractive index film；
The second described main film system is 16 layers, is followed successively by from the thickness of the first outside each rete of main film system: 88.5,117.2,78.1,119.8,76.5,122.9,76.9,125.2,78.4,127.8,85.9,80.1,9.8,31.4,72.5,75.5, and unit is nm。This pair short-pass optical filter average residual reflectivity within the scope of shortwave passband 400nm～580nm that disappears is 0.036%, and in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.1nm。
Further, when the angle of incidence that described double; two short-pass optical filters that disappear use in atmosphere is 45 degree, total rete number is 79 layers, wherein, it is 6 layers that film system is mated in described admittance, from substrate side, the thickness of outside each rete is followed successively by: 121.8,132.3,125.9,101.5,83.8,194.5, unit is nm；
The first described main film system is 53 layers, the thickness mating the outside each rete of film system from admittance is followed successively by: 18.3, 217.2, 38.9, 46.0, 23.7, 46.1, 89.2, 95.2, 95.5, 135.0, 26.7, 52.5, 89.3, 48.9, 36.5, 55.7, 89.0, 51.4, 30.0, 75.7, 26.3, 43.2, 32.7, 40.7, 76.8, 32.8, 35.9, 43.1, 22.7, 78.2, 46.8, 44.3, 22.4, 80.2, 49.9, 47.3, 20.5, 77.3, 51.6, 52.2, 19.2, 71.6, 53.1, 51.9, 7.3, 17.0, 66.4, 53.7, 63.5, 17.1, 57.7, 56.9, 85.7, unit is nm；
In first main film system, 1st, 3,5,7,11,15,19,21,23,27,29,31,33,35,37,39,41,43,46,48,50,52 layers is high refractive index film, 8th, 10,13,17,25,45,53 layers is middle refractive index film, and all the other are low refractive index film；
The second described main film system is 20 layers, is followed successively by from the thickness of the first outside each rete of main film system: 14.9,40.0,52.9,80.9,14.8,40.1,60.7,154.7,77.7,141.7,81.6,141.5,83.8,143.6,90.9,101.4,11.4,31.2,71.1,88.1, unit is nm。This pair short-pass optical filter average residual reflectivity within the scope of shortwave passband 400nm～580nm that disappears is 0.623%, and in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.4nm。
A kind of double; two short-pass optical filter that disappears, including substrate and arrange short-pass film system on the substrate, described short-pass film system adopts described double; two short-pass film system that disappears。
A kind of Fei Lipu color-separation and color-recombination device, including arranges along optical path direction counter be popular in bluish-green prism, anti-indigo plant reveals the green prism and the prism that reveals the green, and described counter be popular in bluish-green prism and be provided with short-pass film system, described short-pass film system adopts the short-pass film system that pair disappears。
A kind of flat board color-separation and color-recombination device, counter is popular in bluish-green flat board and anti-indigo plant reveals the green flat board including what arranges along optical path direction, described counter be popular in bluish-green flat board and be provided with short-pass film system, and described short-pass film system adopts the short-pass film system that pair disappears。
Compared with prior art, the invention has the beneficial effects as follows:
The angle of incidence used in atmosphere when wave filter is 16 degree, time namely for Fei Lipu color-separation and color-recombination device, with existing short-pass film system (0.5LH0.5L)pAs initiating structure optimization, obtaining the average residual reflectivity within the scope of shortwave passband 400nm～580nm is 0.561%, and in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 3.1nm。And with the film structure of the present invention, obtaining the average residual reflectivity within the scope of shortwave passband 400nm～580nm is 0.036%, in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.1nm。
The angle of incidence used in atmosphere when wave filter is 45 degree, time namely for flat board color-separation and color-recombination device, with existing short-pass film system (0.5LH0.5L)pAs initiating structure optimization, obtaining the average residual reflectivity within the scope of shortwave passband 400nm～580nm is 1.33%, and in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 15.5nm。And with the film structure of the present invention, obtaining the average residual reflectivity within the scope of shortwave passband 400nm～580nm is 0.623%, in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.4nm。
The invention has the beneficial effects as follows, be first improve the efficiency of light energy utilization, thus improve display brightness。The raising of the efficiency of light energy utilization is mostly derived from two aspects: 1, in shortwave passband, residual reflectivity reduces, absorbance improves, to Fei Lipu system, the average residual coreflection of shortwave passband drops to 0.036% from existing 0.561%, and to flat-panel systems, average residual coreflection drops to 0.623% from existing 1.33%；2, in trans-reflective transition region, the transition wave-length of s-, p-polarized light separates minimizing, due to the product that the efficiency of light energy utilization is s-, p-polarized light transmission rate that color-separation and color-recombination device is total, this means that the light energy of the transition wave-length Disengagement zone between s-, p-polarization can cannot utilize and be lost, to Fei Lipu color-separation and color-recombination device, the transition wave-length of s-, p-polarized light separates and drops to 0.1nm from existing 3.1nm, and to flat board color-separation and color-recombination device, polarization separation drops to 0.4nm from existing 15.5nm。Here it is the display brightness of device of the present invention is apparently higher than the reason of existing device。
Next to that improve picture contrast, thus improve image definition。The reduction that the raising of picture contrast is mostly derived from system veiling glare, no matter it is the average residual reflectivity in shortwave passband, or the optical energy loss that s-, p-polarization separation causes, capital is passed through repeatedly to reflect and reflect in system, ultimately become veiling glare, cause that contrast is greatly reduced, here it is the contrast of device of the present invention is apparently higher than the reason of existing device。
It is finally improve pattern colour saturation, makes color more gorgeous。The raising of pattern colour saturation is mostly derived from the reduction of s-, p-polarization separation, because s-, p-polarization separation region is actually two different colors of superposition, necessarily causes that color saturation reduces；In certain shortwave passband, the reduction of residual reflectivity also contributes to improve color saturation。Here it is the color saturation of device of the present invention is better than the reason of existing device。
Accompanying drawing explanation
Fig. 1 is the operation principle schematic diagram of Fei Lipu color-separation and color-recombination device。
Fig. 2 is the spectral transmission rate curve (angle of incidence 16 degree) of existing Fei Lipu color-separation and color-recombination device short-pass film system。
Fig. 3 is the amplification spectral transmission rate curve (angle of incidence 16 degree) of existing Fei Lipu color-separation and color-recombination device short-pass film system。
Fig. 4 is the corresponding relation figure (angle of incidence 16 degree) of the thickness of every tunic of the double; two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention and refractive index。
Fig. 5 is the spectral transmission rate curve (angle of incidence 16 degree) of the double; two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention。
Fig. 6 is the amplification spectral transmission rate curve (angle of incidence 16 degree) of the double; two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention。
Fig. 7 is the operation principle schematic diagram of flat board color-separation and color-recombination device。
Fig. 8 is the spectral transmission rate curve (angle of incidence 45 degree) of existing flat board color-separation and color-recombination device short-pass film system。
Fig. 9 is the amplification spectral transmission rate curve (angle of incidence 45 degree) of existing flat board color-separation and color-recombination device short-pass film system。
Figure 10 is the corresponding relation figure (angle of incidence 45 degree) of the thickness of every tunic of the double; two short-pass film system that disappears of flat board color-separation and color-recombination device of the present invention and refractive index。
Figure 11 is the spectral transmission rate curve (angle of incidence 45 degree) of the double; two short-pass film system that disappears of flat board color-separation and color-recombination device of the present invention。
Figure 12 is the amplification spectral transmission rate curve (angle of incidence 45 degree) of the double; two short-pass film system that disappears of flat board color-separation and color-recombination device of the present invention。
Figure 13 is the film structure of double; two short-pass optical filters that disappear in the present invention。
Detailed description of the invention
Embodiment 1
Fig. 1 is the operation principle schematic diagram of Fei Lipu color-separation and color-recombination device。As it is shown in figure 1, Fei Lipu color-separation and color-recombination device includes counter being popular in bluish-green prism 1, anti-indigo plant reveals the green prism 4 and the prism 7 that reveals the green。Counter the second prism facets being popular in bluish-green prism 1 plates short-pass film system 2, the white light of incidence can be made to be divided into the HONGGUANG of reflection and the blue green light of transmission。Anti-indigo plant reveal the green prism 4 the second prism facets on film system 5 incident blue green light can be divided into the blue light of reflection and the green glow of transmission, then can realize red (R), green (G), blue (B) color separation or close color。In Fig. 1,3 and 6 is air-gap。
Fig. 2 and Fig. 3 is the spectral transmission rate curve of existing Fei Lipu color-separation and color-recombination device short-pass film system (i.e. short-pass film system 2 in Fig. 1), and wherein, Ts refers to that the absorbance of s-polarized light, Tp refer to that the absorbance of p-polarized light, Tav refer to average transmittance。In Fei Lipu color-separation and color-recombination device, although the angle of incidence in rete only 16 degree, it can be seen that the existing shortwave passband residual reflectivity with short-pass film system reaches 0.561%, the transition wave-length of trans-reflective transition region s-, p-polarization separates and reaches 3.1nm。Designed by the three of the present invention steps: the first step first designs in trans-reflective transition region the transition wave-length of s-, p-polarized light almost without the first main film system separated, owing to only polarization separation can not be eliminated with high and low two kinds of thin-film materials, therefore three kinds of thin-film materials need to be selected: high index of refraction, middle refractive index and low-refraction；Second step redesigns out the second main film system of the broadening first main film system zone of reflections, the zone of reflections of the first main film system and the zone of reflections of the second main film system is made to meet the instructions for use of reflection bandwidth altogether, owing to the effect of the second main film system is only the broadening zone of reflections, so selecting high index of refraction and low-refraction bi-material；3rd step is that film system is mated in design admittance, first main film system and the second main film system have been achieved with the high-reflection region of enough width, and make s-in trans-reflective transition region, the transition wave-length of p-polarized light separates almost nil, but shortwave transmission bands also has bigger residual reflectivity, trace it to its cause, though the resultant admittance being because the first main film system and the second main film system is relatively mated with air admittance, but mate with substrate admittance and to cause not, film system is mated to eliminate the residual reflectivity in shortwave passband for this admittance that must design a substrate-side, due to this admittance mate film system effect be similar to wide-band anti-reflection coating, therefore select low-refraction and middle refractive index bi-material。Above-described high-index material (H) optional TiO2Or Nb2O5, but the preferred TiO of the present embodiment2；The optional Al of described middle refractive index material (M)2O3Or MgO, the preferred Al of the present embodiment2O3；Described low-index material (L) selects SiO2。Finally giving the double; two total rete number disappearing short-pass film system of Fei Lipu color-separation and color-recombination device is 68 layers, wherein against K9It is 13 layers that film system is mated in the admittance of glass substrate, and the first main film system is 39 layers, and the second main film system is 16 layers, and outermost is air。Fig. 4 is the corresponding relation figure of the thickness of every tunic of the double; two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention and refractive index, the refractive index (at wavelength 550nm) of each tunic and thickness is as listed in table 1。
The refractive index of the double; two each tunic of short-pass film system that disappears of table 1. Fei Lipu color-separation and color-recombination device and thickness
(1). film system table is mated in admittance
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | M | L | M | L | M | L | M | L | M | L | M | L | M |
| Refractive index | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 |
| Thickness/nm | 125.5 | 116.2 | 110.9 | 111.5 | 95.4 | 121.6 | 95.4 | 102.1 | 115.7 | 103.5 | 245.3 | 75.7 | 76.4 |
(2). the first main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | H | M | H | M | L | H | L | H | L | H | L | M | L |
| Refractive index | 2.38 | 1.62 | 2.38 | 1.62 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 1.62 | 1.46 |
| Thickness/nm | 19.7 | 165.8 | 34.5 | 121.6 | 41.2 | 35.4 | 51.1 | 22.8 | 49.2 | 35.8 | 45.9 | 71.2 | 44.5 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 |
| Thickness/nm | 38.9 | 52.6 | 21.4 | 52.0 | 46.3 | 57.9 | 20.8 | 50.0 | 47.7 | 63.9 | 21.2 | 44.9 | 47.3 |
Continuous upper table
| Rete sequence number | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 |
| Material | L | H | L | H | M | H | L | H | L | H | L | H | M |
| Refractive index | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 |
| Thickness/nm | 69.5 | 22.2 | 37.5 | 46.8 | 78.1 | 28.7 | 27.6 | 39.8 | 77.6 | 30.3 | 26.0 | 37.8 | 71.9 |
(3). the second main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 5 --> |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 |
| Thickness/nm | 88.5 | 117.2 | 78.1 | 119.8 | 76.5 | 122.9 | 76.9 | 125.2 | 78.4 | 127.8 | 85.9 | 80.1 | 9.8 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | Air |
| Material | L | H | L | Air |
| Refractive index | 1.46 | 2.38 | 1.46 | 1.0 |
| Thickness/nm | 31.4 | 72.5 | 75.5 |
Fig. 5 and Fig. 6 is the spectral transmission rate curve of the double; two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention, and in Fig. 5, Ts, Tp, Tav are overlapping。From Fig. 5 and Fig. 6 it can be seen that this pair disappears, the short-pass optical filter average residual reflectivity within the scope of shortwave passband 400nm～580nm is 0.036%, and in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.1nm。Compared to used Fei Lipu color-separation and color-recombination device short-pass optical filter, average residual reflectivity within the scope of shortwave passband 400nm～580nm is 0.561%, in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 3.1nm, the present invention achieves breakthrough, wherein the coreflection of shortwave passband average residual have dropped 15 times, and polarization separation have dropped 31 times。
Embodiment 2
Fig. 7 is the operation principle schematic diagram of flat board color-separation and color-recombination device。As it is shown in fig. 7, flat board color-separation and color-recombination device is popular in bluish-green flat board 8 and the anti-indigo plant flat board 9 that reveals the green forms by counter。Counter be popular in bluish-green flat board 8 first plates short-pass film system 10, the white light of incidence can be made to be divided into the HONGGUANG of reflection and the blue green light of transmission。Similarly, incident blue green light can be divided into the blue light of reflection and the green glow of transmission in the anti-indigo plant film system 11 on first of flat board 9 of revealing the green。Then can realize red (R), green (G), blue (B) color separation or close color。
Fig. 8 and Fig. 9 is the spectral transmission rate curve of existing flat board color-separation and color-recombination device short-pass film system, and wherein, Ts refers to that the absorbance of s-polarized light, Tp refer to that the absorbance of p-polarized light, Tav refer to average transmittance。The structure of flat board color-separation and color-recombination device is more simply too much than Fei Lipu prism, but be 45 degree owing to inciding the angle of incidence of flat board short-pass film system, thus be no matter the residual reflectivity of shortwave passband or the transition wave-length of s-, p-polarization separate will be more many greatly than Fei Lipu prism。Can be seen that from Fig. 8 and Fig. 9, now reach 1.33% with the shortwave passband residual reflectivity of flat board short-pass film system, and the transition wave-length of trans-reflective transition region s-, p-polarization separates and reached 15.5nm especially, this is to requiring that higher color separating and combining system is not apply application。Being designed by the three of the present invention steps, namely the first step first designs the transition wave-length of s-, p-polarized light in trans-reflective transition region, almost without the first main film system separated, needs in design to select high index of refraction, middle refractive index and three kinds of thin-film materials of low-refraction；Second step redesigns out the second main film system of the broadening first main film system zone of reflections, selects high index of refraction and low-refraction bi-material just can reach the purpose of the broadening zone of reflections；3rd step is that film system is mated in design admittance, selects low-refraction and middle refractive index bi-material to make the residual reflectivity in shortwave transmission bands be minimized。Equally, high-index material (H) optional TiO2Or Nb2O5, but the preferred TiO of the present embodiment2；Middle refractive index material (M) optional Al2O3Or MgO, the preferred Al of the present embodiment2O3；Low-index material (L) selects SiO2。Finally giving the double; two total rete number disappearing short-pass film system of flat board color-separation and color-recombination device is 79 layers, wherein against K9It is 6 layers that film system is mated in the admittance of glass substrate, and the first main film system is 53 layers, and the second main film system is 20 layers, and outermost is air。Figure 10 is the corresponding relation figure of the thickness of every tunic of the double; two short-pass film system that disappears of the flat board color-separation and color-recombination device of the present invention and refractive index, the refractive index (at wavelength 550nm) of each tunic and thickness is as listed in table 2。
The refractive index of the double; two each tunic of short-pass film system that disappears of table 2. flat board color-separation and color-recombination device and thickness
(1). film system table is mated in admittance
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 |
| Material | M | L | M | L | M | L |
| Refractive index | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 |
| Thickness/nm | 121.8 | 132.3 | 125.9 | 101.5 | 83.8 | 194.5 |
(2). the first main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | H | L | H | L | H | L | H | M | L | M | H | L | M |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 | 1.46 | 1.62 | 2.38 | 1.46 | 1.62 |
| Thickness/nm | 18.3 | 217.2 | 38.9 | 46.0 | 23.7 | 46.1 | 89.2 | 95.2 | 95.5 | 135.0 | 26.7 | 52.5 | 89.3 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 |
| Material | L | H | L | M | L | H | L | H | L | H | L | M | L |
| Refractive index | 1.46 | 2.38 | 1.46 | 1.62 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 1.62 | 1.46 |
| Thickness/nm | 48.9 | 36.5 | 55.7 | 89.0 | 51.4 | 30.0 | 75.7 | 26.3 | 43.2 | 32.7 | 40.7 | 76.8 | 32.8 |
Continuous upper table
| Rete sequence number | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H | L |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 |
| Thickness/nm | 35.9 | 43.1 | 22.7 | 78.2 | 46.8 | 44.3 | 22.4 | 80.2 | 49.9 | 47.3 | 20.5 | 77.3 | 51.6 | 52.2 |
Continuous upper table
| Rete sequence number | 41 | 42 | 43 | 44 | 45 | 46 | 47 | 48 | 49 | 50 | 51 | 52 | 53 |
| Material | H | L | H | L | M | H | L | H | L | H | L | H | M |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 1.62 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 |
| Thickness/nm | 19.2 | 71.6 | 53.1 | 51.9 | 7.3 | 17.0 | 66.4 | 53.7 | 63.5 | 17.1 | 57.7 | 56.9 | 85.7 |
(3). the second main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 |
| Thickness/nm | 14.9 | 40.0 | 52.9 | 80.9 | 14.8 | 40.1 | 60.7 | 154.7 | 77.7 | 141.7 | 81.6 | 141.5 | 83.8 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | 17 | 18 | 19 | 20 | Air |
| Material | L | H | L | H | L | H | L | Air |
| Refractive index | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 1.0 |
| Thickness/nm | 143.6 | 90.9 | 101.4 | 11.4 | 31.2 | 71.7 | 88.1 |
Figure 11 and Figure 12 is the spectral transmission rate curve of the double; two short-pass film system that disappears of flat board color-separation and color-recombination device of the present invention。From Figure 11 and Figure 12 it can be seen that this pair disappears, the short-pass optical filter average residual reflectivity within the scope of shortwave passband 400nm～580nm is 0.623%, and in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.4nm。Compared to used flat board color-separation and color-recombination device short-pass optical filter, average residual reflectivity within the scope of shortwave passband 400nm～580nm is 1.33%, in trans-reflective transition region, absorbance is that the transition wave-length of s-, p-polarized light at 50% place is separated into 15.5nm, the present invention achieves important breakthrough, and particularly polarization separation reduces about 39 times。
According to both examples above, Figure 13 sums up the film structure of double; two short-pass optical filters that disappear of the present invention: starts to include admittance successively from substrate 12 and mates the 13, first main film system 14 and the second main film system 15 of film system；Wherein admittance coupling film system 13 is alternately made up of middle refractive index film (M) and low refractive index film (L), first main film system 14 is made up of high refractive index film (H), middle refractive index film (M) and low refractive index film (L), and the second main film system 15 is alternately made up of high refractive index film (H) and low refractive index film (L)。
Claims (5)
1. double; two short-pass film system that disappears, it is characterised in that admittance coupling film system, the first main film system and the second main film system including being successively set on substrate；
Described admittance is mated film system and is alternately made up of middle refractive index film and low refractive index film；
The first described main film system is made up of high refractive index film, middle refractive index film and low refractive index film；
The second described main film system is alternately made up of high refractive index film and low refractive index film；
Described high refractive index film is TiO2Film or Nb2O5Film, described middle refractive index film is Al2O3Film or MgO membrane, described low refractive index film is SiO2Film；
Described double; two short-pass film system as Fei Lipu color-separation and color-recombination device of the short-pass film system that disappears, described admittance coupling film system is 13 layers, and from substrate side, the thickness of outside each rete is followed successively by: 125.5,116.2,110.9,111.5,95.4,121.6,95.4,102.1,115.7,103.5,245.3,75.7,76.4, unit is nm；
The first described main film system is 39 layers, and the thickness mating the outside each rete of film system from admittance is followed successively by: 19.7,165.8,34.5,121.6,41.2,35.4,51.1,22.8,49.2,35.8,45.9,71.2,44.5,38.9,52.6,21.4,52.0,46.3,57.9,20.8,50.0,47.7,63.9,21.2,44.9,47.3,69.5,22.2,37.5,46.8,78.1,28.7,27.6,39.8,77.6,30.3,26.0,37.8,71.9, unit is nm；
In first main film system, the 1st, 3,6,8,10,14,16,18,20,22,24,26,28,30,32,34,36,38 layers is high refractive index film, and the 2nd, 4,12,31,39 layers is middle refractive index film, and all the other are low refractive index film；
The second described main film system is 16 layers, is followed successively by from the thickness of the first outside each rete of main film system: 88.5,117.2,78.1,119.8,76.5,122.9,76.9,125.2,78.4,127.8,85.9,80.1,9.8,31.4,72.5,75.5, and unit is nm；
Or, described double; two short-pass film systems as flat board color-separation and color-recombination device of the short-pass film system that disappear, described admittance coupling film system is 6 layers, and from substrate side, the thickness of outside each rete is followed successively by: 121.8,132.3,125.9,101.5,83.8,194.5, unit is nm；
The first described main film system is 53 layers, the thickness mating the outside each rete of film system from admittance is followed successively by: 18.3, 217.2, 38.9, 46.0, 23.7, 46.1, 89.2, 95.2, 95.5, 135.0, 26.7, 52.5, 89.3, 48.9, 36.5, 55.7, 89.0, 51.4, 30.0, 75.7, 26.3, 43.2, 32.7, 40.7, 76.8, 32.8, 35.9, 43.1, 22.7, 78.2, 46.8, 44.3, 22.4, 80.2, 49.9, 47.3, 20.5, 77.3, 51.6, 52.2, 19.2, 71.6, 53.1, 51.9, 7.3, 17.0, 66.4, 53.7, 63.5, 17.1, 57.7, 56.9, 85.7, unit is nm；
In first main film system, 1st, 3,5,7,11,15,19,21,23,27,29,31,33,35,37,39,41,43,46,48,50,52 layers is high refractive index film, 8th, 10,13,17,25,45,53 layers is middle refractive index film, and all the other are low refractive index film；
The second described main film system is 20 layers, is followed successively by from the thickness of the first outside each rete of main film system: 14.9,40.0,52.9,80.9,14.8,40.1,60.7,154.7,77.7,141.7,81.6,141.5,83.8,143.6,90.9,101.4,11.4,31.2,71.1,88.1, unit is nm。
2. double; two short-pass film system that disappears according to claim 1, it is characterised in that described high refractive index film is TiO2Film。
3. double; two short-pass film system that disappears according to claim 1, it is characterised in that described middle refractive index film is Al2O3Film。
4. Yi Zhong Fei Lipu color-separation and color-recombination device, including arrange along optical path direction counter be popular in bluish-green prism, anti-indigo plant reveals the green prism and the prism that reveals the green, described counter it be popular in bluish-green prism and be provided with short-pass film system, it is characterised in that double; two short-pass film systems that disappear that described short-pass film system adopts described in claim 1。
5. a flat board color-separation and color-recombination device, counter it is popular in bluish-green flat board and anti-indigo plant reveals the green flat board including what arrange along optical path direction, described counter it be popular in bluish-green flat board and be provided with short-pass film system, it is characterised in that double; two short-pass film systems that disappear that described short-pass film system adopts described in claim 1。
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| CN105717564B (en) * | 2016-04-12 | 2017-07-07 | 三明福特科光电有限公司 | Depolarization pentagonal prism and preparation method thereof |
| CN110749950B (en) * | 2019-11-29 | 2021-11-12 | 沈阳仪表科学研究院有限公司 | Refractive index matched depolarized film system |
| CN112764135B (en) * | 2021-01-04 | 2023-08-18 | 杭州科汀光学技术有限公司 | Narrow-band antireflection film with extremely low residual reflection |
| CN115097642B (en) * | 2022-07-28 | 2023-08-22 | 福建福特科光电股份有限公司 | Trichromatic laser color combining and separating device and preparation method thereof |
| CN115921863B (en) * | 2022-12-12 | 2023-10-27 | 巨玻固能(苏州)薄膜材料有限公司 | Coating material, composite oxide film, preparation method and optical product |
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