CN104834024A - Double-elimination short-wave pass film system and color separation and color combination device - Google Patents
Double-elimination short-wave pass film system and color separation and color combination device Download PDFInfo
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- CN104834024A CN104834024A CN201510251260.0A CN201510251260A CN104834024A CN 104834024 A CN104834024 A CN 104834024A CN 201510251260 A CN201510251260 A CN 201510251260A CN 104834024 A CN104834024 A CN 104834024A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/26—Reflecting filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
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Abstract
The present invention discloses a double-elimination short-wave pass film system and a color separation and color combination device. The system comprises an admittance match film system, a first main film system and a second main film system arranged on a substrate in order. The admittance match film system is formed by alternating middle refractive index films and low refractive index films. The first main film system is formed by high refractive index films, middle refractive index films and low refractive index films. The second main film system is formed by alternate high refractive index films and low refractive index films. The high refractive index films are TiO2 films or Nb2O5 films, the middle refractive index films are Al2O3 or MgO films, and the low refractive index films are SiO2 films. The double-elimination short-wave pass film system is applied to an optical filter and the color separation and color combination device, short-wave pass residual reflection and s- and p- polarized light transition wavelengths can be eliminated, the brightness, sharpness and color saturation of a display image are improved.
Description
Technical field
The present invention relates to two short-pass optical filter field that disappears, be specifically related to a kind of two disappear short-pass film system and color-separation and color-recombination device.
Background technology
Short-pass optical filter is widely applied in optical engineering, and its function is transmission short-wavelength light and reflect long wavelength lights.For photoelectricity Projection Display, the application of this short-pass optical filter comprises three kinds of basic functions: decomposition of white light become three primary colours light, through ovennodulation three primary colours light compositing coloured image and isolation light source infrared light.
High brightness, high definition and color rendition are three technical indicators paid close attention to most in display technique, and therefore how improving the efficiency of light energy utilization and picture contrast and color saturation is the problem endeavouring for a long time to solve.But be now all the short-pass film system (0.5LH0.5L) of Bian in MacLeod's " optical thin film filter " with short-pass optical filter
pcarry out as underlying membrane architecture that thickness optimization obtains, wherein p is periodicity.The residual reflectivity of this short-pass optical filter not only in shortwave passband is high, and in trans-reflective zone of transition, the transition wave-length of s-polarized light, p-polarized light is separated very large.Its result, one is cause optical energy loss, reduces the efficiency of light energy utilization; Two is that a part of light lost becomes parasitic light by multiple reflections with after reflecting in system, causes image definition and contrast to decline; Three is that color saturation reduces, and coloured image is light and not gorgeous.
Application publication number is that the Chinese invention patent application of CN 103513314A (application number is 201310471073.4) discloses a kind of low-pass filter, comprise the first quartz crystal slice set gradually along optical path direction, quarter-wave plate, second quartz crystal slice, wherein, the light side surface of described first quartz crystal slice is coated with infrared cut coating, the light exit surface of described second quartz crystal slice is coated with suppressed wave length shift film, described infrared cut coating comprises alternatively distributed high refractive index layer and low-index layer, described high refractive index layer is Ti
3o
5layer, Nb
2o
5layer or ZnS layer, described low-index layer is SiO
2layer, described suppressed wave length shift film comprises the first coupling film system outwards set gradually from described second quartz crystal slice, main film system and the second coupling film system, and wherein, the first described coupling film system comprises alternatively distributed low-index layer SiO
2with high refractive index layer Ti
3o
5, described main film system comprises alternatively distributed low-index layer SiO
2with high refractive index layer Ti
3o
5, the second described coupling film system comprises alternatively distributed high refractive index layer Ti
3o
5with low-index layer SiO
2and be inserted in high refractive index layer Ti
3o
5with low-index layer SiO
2between intermediate-index layer Ta
2o
5or HfO
2.This low-pass filter mainly contains the function of three aspects: end near infrared light and ultraviolet light, stablize transmission-cut-off transition wave-length and eliminate Moire fringe, can be applicable in high element sensor, but, its infrared cut coating adopts alternatively distributed high refractive index layer and low-index layer, realize cut-off near infrared light and ultraviolet light, i.e. reflect near infrared light and ultraviolet light, this infrared cut coating is not suitable in photoelectricity Projection Display, image acquisition system and colored engineering.
Summary of the invention
The object of the invention is the defect overcoming prior art, provide a kind of two disappear short-pass film system and color-separation and color-recombination device, thus the brightness of raising display image, sharpness and color saturation.
For achieving the above object, the present inventor, on the basis of analytical calculation, proposes a kind of design of two short-pass film system that disappears first.Its ideation is, due to only with the existing short-pass film system (0.5LH0.5L) described in
ptwo object that disappears can not be realized as initial configuration, that fearness selects the membraneous material of more than three kinds also of no avail in optimizing process, therefore need implement as follows: the first step first designs the first main film system, require that the transition wave-length of s-, p-polarized light in its trans-reflective zone of transition is not almost separated, but due to only can not polarization separation be eliminated with two kinds of membraneous materials, therefore three kinds of membraneous materials need be selected; The main film system of second step bamboo product second, due to the first main film system realize depolarization be separated after, the reflection bandwidth of its long-wavelength region becomes very narrow, so must carry out its zone of reflections of broadening with the second main film system; 3rd step is design admittance coupling film system, the transition wave-length that first main film system has achieved s-, p-polarized light with the second main film system is not almost separated, and long wave has enough wide high reflectance zone, but now still have larger residual reflectivity in shortwave transmission bands, this is because the resultant admittance of the first main film system and the second main film system and substrate admittance are not mated and are caused, for this reason must between substrate and first and second the main film system bamboo product admittance coupling film system.
Specifically, the technical solution used in the present invention is:
A kind of two short-pass film system that disappears, comprises the admittance set gradually on the substrate and mates film system, the first main film system and the second main film system;
Described admittance coupling film system is alternately made up of middle refractive index film and low refractive index film;
Described first main film system is made up of high refractive index film, middle refractive index film and low refractive index film;
Described second main film system is alternately made up of high refractive index film and low refractive index film;
Described high refractive index film is TiO
2film or Nb
2o
5film, described middle refractive index film is Al
2o
3film or MgO membrane, described low refractive index film is SiO
2film.
In the present invention, the short-pass optical filter of this structure has two characteristic that disappears: the shortwave passband residual reflectivity that disappears is separated with s-, p-polarized light transition wave-length that disappears.
Further, described high refractive index film is TiO
2film, described middle refractive index film is Al
2o
3film, described low refractive index film is SiO
2film.
The material of namely described high refractive index film is TiO
2or Nb
2o
5, preferred TiO
2; The material of described middle refractive index is Al
2o
3or MgO, preferred Al
2o
3; The material of described low refractive index film is SiO
2.
Further, when the incident angle that described two short-pass optical filters that disappear use in atmosphere is 16 degree, total rete number is 68 layers, wherein, described admittance coupling film is 13 layers, and from substrate side, the thickness of outside each rete is followed successively by: 125.5,116.2,110.9,111.5,95.4,121.6,95.4,102.1,115.7,103.5,245.3,75.7,76.4, unit is nm;
Described first main film is 39 layers, is followed successively by: 19.7,165.8,34.5,121.6,41.2,35.4 from the thickness of the outside each rete of admittance coupling film system, 51.1,22.8,49.2,35.8,45.9,71.2,44.5,38.9,52.6,21.4,52.0,46.3,57.9,20.8,50.0,47.7,63.9,21.2,44.9,47.3,69.5,22.2,37.5,46.8,78.1,28.7,27.6,39.8,77.6,30.3,26.0,37.8,71.9, unit is nm;
In first main film system, the 1st, 3,6,8,10,14,16,18,20,22,24,26,28,30,32,34,36,38 layer is high refractive index film, and the 2nd, 4,12,31,39 layer is middle refractive index film, and all the other are low refractive index film;
Described second main film is 16 layers, and be followed successively by from the thickness of the first outside each rete of main film system: 88.5,117.2,78.1,119.8,76.5,122.9,76.9,125.2,78.4,127.8,85.9,80.1,9.8,31.4,72.5,75.5, unit is nm.This pair average residual reflectivity of short-pass optical filter within the scope of shortwave passband 400nm ~ 580nm that disappear is 0.036%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.1nm.
Further, when the incident angle that described two short-pass optical filters that disappear use in atmosphere is 45 degree, total rete number is 79 layers, wherein, described admittance coupling film is 6 layers, from substrate side, the thickness of outside each rete is followed successively by: 121.8,132.3,125.9,101.5,83.8,194.5, unit is nm;
Described first main film is 53 layers, be followed successively by from the thickness of the outside each rete of admittance coupling film system: 18.3, 217.2, 38.9, 46.0, 23.7, 46.1, 89.2, 95.2, 95.5, 135.0, 26.7, 52.5, 89.3, 48.9, 36.5, 55.7, 89.0, 51.4, 30.0, 75.7, 26.3, 43.2, 32.7, 40.7, 76.8, 32.8, 35.9, 43.1, 22.7, 78.2, 46.8, 44.3, 22.4, 80.2, 49.9, 47.3, 20.5, 77.3, 51.6, 52.2, 19.2, 71.6, 53.1, 51.9, 7.3, 17.0, 66.4, 53.7, 63.5, 17.1, 57.7, 56.9, 85.7, unit is nm,
In first main film system, 1st, 3,5,7,11,15,19,21,23,27,29,31,33,35,37,39,41,43,46,48,50,52 layers is high refractive index film, 8th, 10,13,17,25,45,53 layers is middle refractive index film, and all the other are low refractive index film;
Described second main film is 20 layers, is followed successively by: 14.9,40.0,52.9,80.9,14.8,40.1,60.7 from the thickness of the first outside each rete of main film system, 154.7,77.7,141.7,81.6,141.5,83.8,143.6,90.9,101.4,11.4,31.2,71.1,88.1, unit is nm.This pair average residual reflectivity of short-pass optical filter within the scope of shortwave passband 400nm ~ 580nm that disappear is 0.623%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.4nm.
A kind of two short-pass optical filter that disappears, the short-pass film system comprising substrate and arrange on the substrate, the two short-pass film systems that disappear described in described short-pass film system adopts.
A kind of Fei Lipu color-separation and color-recombination device, comprise along optical path direction arrange be instead popular in bluish-green prism, anti-indigo plant reveals the green prism and the prism that reveals the green, and described be instead popular in bluish-green prism and be provided with short-pass film system, described short-pass film system adopts two short-pass film system that disappears.
A kind of dull and stereotyped color-separation and color-recombination device, comprises anti-bluish-green flat board and the anti-indigo plant of being popular in arranged along optical path direction and to reveal the green flat board, described be instead popular in bluish-green flat board and be provided with short-pass film system, and described short-pass film system adopts two short-pass film system that disappears.
Compared with prior art, the invention has the beneficial effects as follows:
The incident angle used in atmosphere when wave filter is 16 degree, time namely for Fei Lipu color-separation and color-recombination device, with existing short-pass film system (0.5LH0.5L)
pas initial configuration optimization, the average residual reflectivity obtained within the scope of shortwave passband 400nm ~ 580nm is 0.561%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 3.1nm.And Bian film structure of the present invention, the average residual reflectivity obtained within the scope of shortwave passband 400nm ~ 580nm is 0.036%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.1nm.
The incident angle used in atmosphere when wave filter is 45 degree, time namely for dull and stereotyped color-separation and color-recombination device, with existing short-pass film system (0.5LH0.5L)
pas initial configuration optimization, the average residual reflectivity obtained within the scope of shortwave passband 400nm ~ 580nm is 1.33%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 15.5nm.And Bian film structure of the present invention, the average residual reflectivity obtained within the scope of shortwave passband 400nm ~ 580nm is 0.623%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.4nm.
The invention has the beneficial effects as follows, be first improve the efficiency of light energy utilization, thus improve display brightness.The raising of the efficiency of light energy utilization mainly comes from two aspects: 1, in shortwave passband, residual reflectivity reduces, transmissivity improves, to Fei Lipu system, the average residual coreflection of shortwave passband drops to 0.036% from existing 0.561%, and to flat-panel systems, average residual coreflection drops to 0.623% from existing 1.33%; 2, in trans-reflective zone of transition, the transition wave-length of s-, p-polarized light is separated minimizing, due to the product that the efficiency of light energy utilization that color-separation and color-recombination device is total is s-, p-polarized light transmission rate, this means that the luminous energy of the transition wave-length Disengagement zone between s-, p-polarization can cannot utilize and be lost, to Fei Lipu color-separation and color-recombination device, the transition wave-length of s-, p-polarized light is separated and drops to 0.1nm from existing 3.1nm, and to dull and stereotyped color-separation and color-recombination device, polarization separation drops to 0.4nm from existing 15.5nm.The display brightness of Here it is device of the present invention is apparently higher than the reason of existing device.
Next improves picture contrast, thus improves image definition.The raising of picture contrast mainly comes from the reduction of parasitic light in system, it is no matter the average residual reflectivity in shortwave passband, or the optical energy loss that s-, p-polarization separation causes, capital is passed through repeatedly to reflect and reflect in system, finally become parasitic light, cause contrast significantly to reduce, the contrast of Here it is device of the present invention is apparently higher than the reason of existing device.
Be finally improve pattern colour saturation degree, make color more gorgeous.The raising of pattern colour saturation degree mainly comes from the reduction of s-, p-polarization separation, because s-, p-polarization separation region is actually the superposition of two kinds of different colours, color saturation must be caused to reduce; In certain shortwave passband, the reduction of residual reflectivity also contributes to raising color saturation.The color saturation of Here it is device of the present invention is better than the reason of existing device.
Accompanying drawing explanation
Fig. 1 is the principle of work schematic diagram of Fei Lipu color-separation and color-recombination device.
Fig. 2 is the spectral transmission rate curve (incident angle 16 degree) of existing Fei Lipu color-separation and color-recombination device short-pass film system.
Fig. 3 is the amplification spectral transmission rate curve (incident angle 16 degree) of existing Fei Lipu color-separation and color-recombination device short-pass film system.
Fig. 4 is the thickness of every tunic and the corresponding relation figure (incident angle 16 degree) of refractive index of the two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention.
Fig. 5 is the spectral transmission rate curve (incident angle 16 degree) of the two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention.
Fig. 6 is the amplification spectral transmission rate curve (incident angle 16 degree) of the two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention.
Fig. 7 is the principle of work schematic diagram of dull and stereotyped color-separation and color-recombination device.
Fig. 8 is the spectral transmission rate curve (incident angle 45 degree) of existing use dull and stereotyped color-separation and color-recombination device short-pass film system.
Fig. 9 is the amplification spectral transmission rate curve (incident angle 45 degree) of existing use dull and stereotyped color-separation and color-recombination device short-pass film system.
Figure 10 is the thickness of every tunic and the corresponding relation figure (incident angle 45 degree) of refractive index of the two short-pass film system that disappears of the dull and stereotyped color-separation and color-recombination device of the present invention.
Figure 11 is the spectral transmission rate curve (incident angle 45 degree) of the two short-pass film system that disappears of the dull and stereotyped color-separation and color-recombination device of the present invention.
Figure 12 is the amplification spectral transmission rate curve (incident angle 45 degree) of the two short-pass film system that disappears of the dull and stereotyped color-separation and color-recombination device of the present invention.
Figure 13 is the film structure of two short-pass optical filter that disappears in the present invention.
Embodiment
Embodiment 1
Fig. 1 is the principle of work schematic diagram of Fei Lipu color-separation and color-recombination device.As shown in Figure 1, Fei Lipu color-separation and color-recombination device comprise instead be popular in bluish-green prism 1, anti-indigo plant reveals the green prism 4 and the prism 7 that reveals the green.Counter the second prism facets being popular in bluish-green prism 1 plates short-pass film system 2, incident white light can be made to be divided into the ruddiness of reflection and the blue green light of transmission.The film system 5 that anti-indigo plant reveals the green in the second prism facets of prism 4 can be divided into the blue light of reflection and the green glow of transmission the blue green light of incidence, so can realize red (R), green (G), blue (B) color separation or close look.In Fig. 1,3 and 6 is air-gaps.
Fig. 2 and Fig. 3 is the spectral transmission rate curve of existing Fei Lipu color-separation and color-recombination device short-pass film system (the short-pass film system 2 namely in Fig. 1), and wherein, Ts refers to the transmissivity of s-polarized light, Tp refers to the transmissivity of p-polarized light, Tav refers to average transmittance.In Fei Lipu color-separation and color-recombination device, although the incident angle in rete only 16 degree, can find out, now reach 0.561% with the shortwave passband residual reflectivity of short-pass film system, the transition wave-length of trans-reflective zone of transition s-, p-polarization is separated and reaches 3.1nm.By three steps design of the present invention: the transition wave-length that the first step first designs s-, p-polarized light in trans-reflective zone of transition does not almost have separative first main film system, owing to only polarization separation can not be eliminated with high and low two kinds of membraneous materials, therefore three kinds of membraneous materials need be selected: high index of refraction, middle refractive index and low-refraction, second step bamboo product goes out the second main film system of the broadening first main film system zone of reflections, the zone of reflections of the zone of reflections of the first main film system and the second main film system is made to meet the request for utilization of reflection bandwidth altogether, because the effect of the second main film system is only the broadening zone of reflections, so select high index of refraction and low-refraction bi-material, 3rd step is design admittance coupling film system, first main film system and the second main film system have achieved the high-reflection region of enough width, and make s-in trans-reflective zone of transition, the transition wave-length of p-polarized light is separated almost nil, but also have larger residual reflectivity in shortwave transmission bands, trace it to its cause, though be because the resultant admittance of the first main film system and the second main film system is comparatively mated with air admittance, but to mate with substrate admittance and cause not, the admittance coupling film system of a substrate-side must be designed to eliminate the residual reflectivity in shortwave passband for this reason, because the effect of this admittance coupling film system is similar to wide-band anti-reflection coating, therefore select low-refraction and middle refractive index bi-material.Above-described high-index material (H) optional TiO
2or Nb
2o
5, but the preferred TiO of the present embodiment
2; The optional Al of described middle refractive index material (M)
2o
3or MgO, the preferred Al of the present embodiment
2o
3; Described low-index material (L) selects SiO
2.The total rete number finally obtaining the two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device is 68 layers, wherein near K
9the admittance coupling film of glass substrate is 13 layers, and the first main film is 39 layers, and the second main film is 16 layers, and outermost is air.Fig. 4 is the thickness of every tunic and the corresponding relation figure of refractive index of the two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention, the refractive index (at wavelength 550nm) of each tunic and thickness as listed in table 1.
The refractive index of the two each tunic of short-pass film system that disappears of table 1. Fei Lipu color-separation and color-recombination device and thickness
(1). admittance coupling film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | M | L | M | L | M | L | M | L | M | L | M | L | M |
| Refractive index | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 |
| Thickness/nm | 125.5 | 116.2 | 110.9 | 111.5 | 95.4 | 121.6 | 95.4 | 102.1 | 115.7 | 103.5 | 245.3 | 75.7 | 76.4 |
(2). the first main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | H | M | H | M | L | H | L | H | L | H | L | M | L |
| Refractive index | 2.38 | 1.62 | 2.38 | 1.62 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 1.62 | 1.46 |
| Thickness/nm | 19.7 | 165.8 | 34.5 | 121.6 | 41.2 | 35.4 | 51.1 | 22.8 | 49.2 | 35.8 | 45.9 | 71.2 | 44.5 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 |
| Thickness/nm | 38.9 | 52.6 | 21.4 | 52.0 | 46.3 | 57.9 | 20.8 | 50.0 | 47.7 | 63.9 | 21.2 | 44.9 | 47.3 |
Continuous upper table
| Rete sequence number | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 |
| Material | L | H | L | H | M | H | L | H | L | H | L | H | M |
| Refractive index | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 |
| Thickness/nm | 69.5 | 22.2 | 37.5 | 46.8 | 78.1 | 28.7 | 27.6 | 39.8 | 77.6 | 30.3 | 26.0 | 37.8 | 71.9 |
(3). the second main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 |
| Thickness/nm | 88.5 | 117.2 | 78.1 | 119.8 | 76.5 | 122.9 | 76.9 | 125.2 | 78.4 | 127.8 | 85.9 | 80.1 | 9.8 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | Air |
| Material | L | H | L | Air |
| Refractive index | 1.46 | 2.38 | 1.46 | 1.0 |
| Thickness/nm | 31.4 | 72.5 | 75.5 |
Fig. 5 and Fig. 6 is the spectral transmission rate curve of the two short-pass film system that disappears of Fei Lipu color-separation and color-recombination device of the present invention, and in Fig. 5, Ts, Tp, Tav are overlapping.From Fig. 5 and Fig. 6, this pair average residual reflectivity of short-pass optical filter within the scope of shortwave passband 400nm ~ 580nm that disappear is 0.036%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.1nm.Compared to used Fei Lipu color-separation and color-recombination device short-pass optical filter, average residual reflectivity within the scope of shortwave passband 400nm ~ 580nm is 0.561%, in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 3.1nm, the present invention achieves breakthrough, wherein the coreflection of shortwave passband average residual have dropped 15 times, and polarization separation have dropped 31 times.
Embodiment 2
Fig. 7 is the principle of work schematic diagram of dull and stereotyped color-separation and color-recombination device.As shown in Figure 7, dull and stereotyped color-separation and color-recombination device by counter be popular in bluish-green dull and stereotyped 8 and anti-indigo plant reveal the green and dull and stereotyped 9 to form.Plate short-pass film system 10 counter being popular on the bluish-green first surface of dull and stereotyped 8, incident white light can be made to be divided into the ruddiness of reflection and the blue green light of transmission.Similarly, the film system 11 of revealing the green on the first surface of dull and stereotyped 9 in anti-indigo plant can be divided into the blue light of reflection and the green glow of transmission the blue green light of incidence.So red (R), green (G), blue (B) color separation can be realized or close look.
Fig. 8 and Fig. 9 is the spectral transmission rate curve of existing use dull and stereotyped color-separation and color-recombination device short-pass film system, and wherein, Ts refers to the transmissivity of s-polarized light, Tp refers to the transmissivity of p-polarized light, Tav refers to average transmittance.The structure of dull and stereotyped color-separation and color-recombination device is more simply too much than Fei Lipu prism, but because the incident angle inciding dull and stereotyped short-pass film system is 45 degree, so be that the residual reflectivity of shortwave passband or the transition wave-length of s-, p-polarization are separated all many greatly than Fei Lipu prism.As can be seen from Fig. 8 and Fig. 9, now reach 1.33% with the shortwave passband residual reflectivity of dull and stereotyped short-pass film system, and the transition wave-length separation of trans-reflective zone of transition s-, p-polarization reaches 15.5nm especially, this is to requiring that higher color separating and combining system does not apply application.By three steps design of the present invention, namely the transition wave-length that the first step first designs s-, p-polarized light in trans-reflective zone of transition does not almost have separative first main film system, needs to select high index of refraction, middle refractive index and low-refraction three kinds of membraneous materials in design; Second step bamboo product goes out the second main film system of the broadening first main film system zone of reflections, selects high index of refraction and low-refraction bi-material just can reach the object of the broadening zone of reflections; 3rd step is design admittance coupling film system, selects low-refraction and middle refractive index bi-material that the residual reflectivity in shortwave transmission bands is down to minimum.Equally, high-index material (H) optional TiO
2or Nb
2o
5, but the preferred TiO of the present embodiment
2; Middle refractive index material (M) optional Al
2o
3or MgO, the preferred Al of the present embodiment
2o
3; Low-index material (L) selects SiO
2.The total rete number finally obtaining the two short-pass film system that disappears of dull and stereotyped color-separation and color-recombination device is 79 layers, wherein near K
9the admittance coupling film of glass substrate is 6 layers, and the first main film is 53 layers, and the second main film is 20 layers, and outermost is air.Figure 10 is the thickness of every tunic and the corresponding relation figure of refractive index of the two short-pass film system that disappears of dull and stereotyped color-separation and color-recombination device of the present invention, the refractive index (at wavelength 550nm) of each tunic and thickness as listed in table 2.
The refractive index of the two each tunic of short-pass film system that disappears of table 2. dull and stereotyped color-separation and color-recombination device and thickness
(1). admittance coupling film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 |
| Material | M | L | M | L | M | L |
| Refractive index | 1.62 | 1.46 | 1.62 | 1.46 | 1.62 | 1.46 |
| Thickness/nm | 121.8 | 132.3 | 125.9 | 101.5 | 83.8 | 194.5 |
(2). the first main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | H | L | H | L | H | L | H | M | L | M | H | L | M |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 | 1.46 | 1.62 | 2.38 | 1.46 | 1.62 |
| Thickness/nm | 18.3 | 217.2 | 38.9 | 46.0 | 23.7 | 46.1 | 89.2 | 95.2 | 95.5 | 135.0 | 26.7 | 52.5 | 89.3 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 |
| Material | L | H | L | M | L | H | L | H | L | H | L | M | L |
| Refractive index | 1.46 | 2.38 | 1.46 | 1.62 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 1.62 | 1.46 |
| Thickness/nm | 48.9 | 36.5 | 55.7 | 89.0 | 51.4 | 30.0 | 75.7 | 26.3 | 43.2 | 32.7 | 40.7 | 76.8 | 32.8 |
Continuous upper table
| Rete sequence number | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H | L |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 |
| Thickness/nm | 35.9 | 43.1 | 22.7 | 78.2 | 46.8 | 44.3 | 22.4 | 80.2 | 49.9 | 47.3 | 20.5 | 77.3 | 51.6 | 52.2 |
Continuous upper table
| Rete sequence number | 41 | 42 | 43 | 44 | 45 | 46 | 47 | 48 | 49 | 50 | 51 | 52 | 53 |
| Material | H | L | H | L | M | H | L | H | L | H | L | H | M |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 1.62 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.62 |
| Thickness/nm | 19.2 | 71.6 | 53.1 | 51.9 | 7.3 | 17.0 | 66.4 | 53.7 | 63.5 | 17.1 | 57.7 | 56.9 | 85.7 |
(3). the second main film system table
| Rete sequence number | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
| Material | H | L | H | L | H | L | H | L | H | L | H | L | H |
| Refractive index | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 |
| Thickness/nm | 14.9 | 40.0 | 52.9 | 80.9 | 14.8 | 40.1 | 60.7 | 154.7 | 77.7 | 141.7 | 81.6 | 141.5 | 83.8 |
Continuous upper table
| Rete sequence number | 14 | 15 | 16 | 17 | 18 | 19 | 20 | Air |
| Material | L | H | L | H | L | H | L | Air |
| Refractive index | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 2.38 | 1.46 | 1.0 |
| Thickness/nm | 143.6 | 90.9 | 101.4 | 11.4 | 31.2 | 71.7 | 88.1 |
Figure 11 and Figure 12 is the spectral transmission rate curve of the two short-pass film system that disappears of the dull and stereotyped color-separation and color-recombination device of the present invention.From Figure 11 and Figure 12, this pair average residual reflectivity of short-pass optical filter within the scope of shortwave passband 400nm ~ 580nm that disappear is 0.623%, and in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 0.4nm.Compared to used dull and stereotyped color-separation and color-recombination device short-pass optical filter, average residual reflectivity within the scope of shortwave passband 400nm ~ 580nm is 1.33%, in trans-reflective zone of transition, transmissivity is that the transition wave-length of s-, p-polarized light at 50% place is separated into 15.5nm, the present invention achieves important breakthrough, and particularly polarization separation reduces about 39 times.
According to above two embodiments, Figure 13 sums up the film structure of two short-pass optical filter that disappears of the present invention: from substrate 12, comprise admittance coupling film system 13, first main film system 14 and the second main film system 15 successively; Wherein admittance coupling film system 13 is alternately made up of middle refractive index film (M) and low refractive index film (L), first main film system 14 is made up of high refractive index film (H), middle refractive index film (M) and low refractive index film (L), and the second main film system 15 is alternately made up of high refractive index film (H) and low refractive index film (L).
Claims (8)
1. two short-pass film system that disappears, is characterized in that, comprises the admittance set gradually on the substrate and mates film system, the first main film system and the second main film system;
Described admittance coupling film system is alternately made up of middle refractive index film and low refractive index film;
Described first main film system is made up of high refractive index film, middle refractive index film and low refractive index film;
Described second main film system is alternately made up of high refractive index film and low refractive index film;
Described high refractive index film is TiO
2film or Nb
2o
5film, described middle refractive index film is Al
2o
3film or MgO membrane, described low refractive index film is SiO
2film.
2. two short-pass film system that disappears according to claim 1, it is characterized in that, described high refractive index film is TiO
2film.
3. two short-pass film system that disappears according to claim 1, it is characterized in that, described middle refractive index film is Al
2o
3film.
4. two short-pass film system that disappears according to claim 1, it is characterized in that, described low refractive index film is SiO
2film.
5. two short-pass film system that disappears according to claim 1, is characterized in that, described admittance coupling film is 13 layers, from substrate side, the thickness of outside each rete is followed successively by: 125.5,116.2,110.9,111.5,95.4,121.6,95.4,102.1,115.7,103.5,245.3,75.7,76.4, unit is nm;
Described first main film is 39 layers, is followed successively by: 19.7,165.8,34.5,121.6,41.2,35.4 from the thickness of the outside each rete of admittance coupling film system, 51.1,22.8,49.2,35.8,45.9,71.2,44.5,38.9,52.6,21.4,52.0,46.3,57.9,20.8,50.0,47.7,63.9,21.2,44.9,47.3,69.5,22.2,37.5,46.8,78.1,28.7,27.6,39.8,77.6,30.3,26.0,37.8,71.9, unit is nm;
In first main film system, the 1st, 3,6,8,10,14,16,18,20,22,24,26,28,30,32,34,36,38 layer is high refractive index film, and the 2nd, 4,12,31,39 layer is middle refractive index film, and all the other are low refractive index film;
Described second main film is 16 layers, and be followed successively by from the thickness of the first outside each rete of main film system: 88.5,117.2,78.1,119.8,76.5,122.9,76.9,125.2,78.4,127.8,85.9,80.1,9.8,31.4,72.5,75.5, unit is nm.
6. two short-pass film system that disappears according to claim 1, is characterized in that, described admittance coupling film is 6 layers, and from substrate side, the thickness of outside each rete is followed successively by: 121.8,132.3,125.9,101.5,83.8,194.5, and unit is nm;
Described first main film is 53 layers, be followed successively by from the thickness of the outside each rete of admittance coupling film system: 18.3, 217.2, 38.9, 46.0, 23.7, 46.1, 89.2, 95.2, 95.5, 135.0, 26.7, 52.5, 89.3, 48.9, 36.5, 55.7, 89.0, 51.4, 30.0, 75.7, 26.3, 43.2, 32.7, 40.7, 76.8, 32.8, 35.9, 43.1, 22.7, 78.2, 46.8, 44.3, 22.4, 80.2, 49.9, 47.3, 20.5, 77.3, 51.6, 52.2, 19.2, 71.6, 53.1, 51.9, 7.3, 17.0, 66.4, 53.7, 63.5, 17.1, 57.7, 56.9, 85.7, unit is nm,
In first main film system, 1st, 3,5,7,11,15,19,21,23,27,29,31,33,35,37,39,41,43,46,48,50,52 layers is high refractive index film, 8th, 10,13,17,25,45,53 layers is middle refractive index film, and all the other are low refractive index film;
Described second main film is 20 layers, is followed successively by: 14.9,40.0,52.9,80.9,14.8,40.1,60.7 from the thickness of the first outside each rete of main film system, 154.7,77.7,141.7,81.6,141.5,83.8,143.6,90.9,101.4,11.4,31.2,71.1,88.1, unit is nm.
7. Yi Zhong Fei Lipu color-separation and color-recombination device, comprise along optical path direction arrange be instead popular in bluish-green prism, anti-indigo plant reveals the green prism and the prism that reveals the green, described be instead popular in bluish-green prism and be provided with short-pass film system, it is characterized in that, described short-pass film system adopts two short-pass film system that disappears according to claim 5.
8. a dull and stereotyped color-separation and color-recombination device, comprise anti-bluish-green flat board and the anti-indigo plant of being popular in arranged along optical path direction to reveal the green flat board, described be instead popular in bluish-green flat board and be provided with short-pass film system, it is characterized in that, described short-pass film system adopts two short-pass film system that disappears according to claim 6.
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| CN112764135A (en) * | 2021-01-04 | 2021-05-07 | 杭州科汀光学技术有限公司 | Narrow-band antireflection film with extremely low residual reflection |
| CN115097642A (en) * | 2022-07-28 | 2022-09-23 | 福建福特科光电股份有限公司 | Three-color laser color-combining and color-separating device and preparation method thereof |
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