CN104807486A - Pneumatic sensor - Google Patents
Pneumatic sensor Download PDFInfo
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- CN104807486A CN104807486A CN201510064646.0A CN201510064646A CN104807486A CN 104807486 A CN104807486 A CN 104807486A CN 201510064646 A CN201510064646 A CN 201510064646A CN 104807486 A CN104807486 A CN 104807486A
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Abstract
The invention discloses a pneumatic sensor, which comprises a shielding shell, an insulating layer arranged at part or all of the inner side surface of the shielding shell and at least one sensing unit, wherein the shielding shell is provided with at least two air vents, and an air flow passes through a part between the air vents; the sensing unit comprises at least one fixed layer and a free layer; the at least one fixed layer is fixedly arranged on the shielding layer; the free layer is provided with a fixed portion and a friction portion; the fixed portion of the free layer is fixedly connected with the at least one fixed layer or the shielding shell; the free layer is in friction with the at least one fixed layer and/or the shielding shell through the friction portion; and the at least one fixed layer and/or the shielding layer are/is a signal output end of the pneumatic sensor. The pneumatic sensor is low in manufacturing cost, great in output signal, low in requirement for an external signal processing circuit and reduces interference imposed on the pneumatic sensor by external vibration.
Description
Technical field
The present invention relates to sensor technical field, be specifically related to a kind of pneumatic transmitter.
Background technology
Along with development that is scientific and technological and people's life requirement, the many aspects of pneumatic transmitter in life are obtained for application.But existing pneumatic transmitter exists, and cost of manufacture is high, complex manufacturing technology, output signal are less than normal, require also higher problem to external signal processing circuit, but also is easy to the interference being subject to extraneous vibration.
Summary of the invention
Goal of the invention of the present invention is the defect for prior art, provides a kind of pneumatic transmitter, little for the output signal solving pneumatic transmitter of the prior art, high to external signal processing circuit requirement, to be subject to extraneous vibration interference problem.
The invention provides a kind of pneumatic transmitter, comprising: shielding case, the insulation course arranged at the part or all of inner surface of shielding case and at least one sensing unit; Shielding case offers at least two blow vents, air-flow passes through between blow vent; Sensing unit comprises: at least one deck fixed bed and one deck free layer; At least one deck fixed bed is installed on shielding case; Free layer has fixed part and friction part; The fixed part of free layer is with at least one deck fixed bed or shielding case are fixedly connected with; Free layer is by friction part and at least one deck fixed bed and/or shielding case friction; Wherein, at least one deck fixed bed and/or shielding case are the signal output part of pneumatic transmitter.
Further, the airintake direction of the air-flow airintake direction that is parallel at least one deck fixed bed place plane or air-flow is perpendicular at least one deck fixed bed place plane.
Further, sensing unit comprises: one deck fixed bed and one deck free layer; Fixed bed comprises electrode, and insulation course is arranged between electrode and shielding case inner surface; Free layer is by friction part and fixed bed and/or shielding case friction, and electrode and shielding case are the signal output part of pneumatic transmitter.
Further, fixed bed is electrode, or fixed bed is the high molecular polymer insulation course that surface, side is coated with electrode.
Further, at least one deck fixed bed is two-layer, is respectively the first fixed bed and the second fixed bed; First fixed bed is separated with the second fixed bed and is installed on shielding case, and free layer is between the first fixed bed and the second fixed bed; First fixed bed comprises the first electrode, and insulation course is arranged between the first electrode and shielding case inner surface; The fixed part of free layer is fixedly connected with the first fixed bed or the second fixed bed, and free layer is by friction part and the first fixed bed and/or the second fixed bed friction.
Further, the first fixed bed is the first electrode, or the first fixed bed is the first high molecular polymer insulation course that surface, side is coated with the first electrode.
Further, the second fixed bed is the second high molecular polymer insulation course, and the first electrode and shielding case are the signal output part of pneumatic transmitter.
Further, the second fixed bed comprises the second electrode, and the second electrode contacts with shielding case inner surface, and the first electrode and shielding case are the signal output part of pneumatic transmitter.
Further, the second fixed bed comprises the second electrode, and insulation course is also arranged between the second electrode and shielding case inner surface; First electrode and the second electrode are the signal output part of pneumatic transmitter.
Further, the second fixed bed is the second high molecular polymer insulation course, and the first electrode is made up of two interdigital electrodes, and two interdigital electrodes are the signal output part of pneumatic transmitter.
Further, the second fixed bed comprises the second electrode, and insulation course is also arranged between the second electrode and shielding case inner surface; First electrode is made up of two interdigital electrodes, and the second electrode is made up of two interdigital electrodes, and four interdigital electrodes are the signal output part of pneumatic transmitter.
Further, the collection air port relative with blow vent is offered in the middle of second fixed bed, first fixed bed with form two air outlets relative with blow vent between shielding case, free layer is made up of two parts of symmetry, and the fixed part of free layer is fixedly connected with described shielding case.
Further, the second fixed bed is the second electrode, or the second fixed bed is the second high molecular polymer insulation course that surface, side is coated with the second electrode.
Further, sensing unit is multiple, is also provided with at least one dividing plate in shielding case, and multiple sensing unit is separated by dividing plate, and multiple sensing unit is connected in parallel.
Further, sensing unit is multiple, and multiple sensing unit is separated by insulation course, and multiple sensing unit is connected in parallel.
Further, the fixed part of free layer by two pads and at least one deck fixed bed or diagonal angle be fixedly connected with, or the fixed part of free layer is fixedly connected with four angles of at least one deck fixed bed by four pads.
Further, the material of shielding case is metal material, shielding case ground connection.
Further, dividing plate is identical with the material of shielding case.
Further, arrange ventilative screen layer at the blow vent of shielding case, ventilative screen layer is the metal level of net-shaped metal layer or band hole.
Further, free layer, through pre-hot pressing and precuring process, makes free layer have warp architecture or bending structure at place windward.
Further, in the two-layer relative face of the frictional interface of pneumatic transmitter, at least one side is provided with micro-nano structure.
The invention provides another kind of pneumatic transmitter, comprising: shielding case, the insulation course arranged at the part or all of inner surface of shielding case and at least one sensing unit; Shielding case offers at least two blow vents, air-flow passes through between blow vent; Sensing unit comprises: free layer, and the surface, side of free layer is coated with electrode; Free layer has fixed part and friction part; The fixed part of free layer is fixedly connected with shielding case; Free layer does not have the surface of plated electrode by friction part and shielding case friction; Insulation course is arranged on the portion inboard surface that can be coated with the shielding case of the surface contact of electrode with free layer; Wherein, the electrode of free layer and/or shielding case are the signal output part of pneumatic transmitter.
The invention provides another kind of pneumatic transmitter, comprising: shielding case, the insulation course arranged at the part or all of inner surface of shielding case and at least one sensing unit; Shielding case offers at least two blow vents, air-flow passes through between blow vent; Sensing unit comprises: at least one deck fixed bed and free layer, and the surface, side of free layer is coated with electrode, and free layer has fixed part and friction part; At least one deck fixed bed is installed on shielding case; The fixed part of free layer and shielding case or at least one deck fixed bed are fixedly connected with, and free layer does not have the surface of plated electrode by friction part and fixed bed friction; Insulation course is arranged on the portion inboard surface that can be coated with the shielding case of the surface contact of electrode with free layer; Wherein, the electrode of free layer and/or shielding case are the signal output part of pneumatic transmitter.
The cost of manufacture of pneumatic transmitter provided by the invention is low, output signal is large, require low to external signal processing circuit, the circuit design of pneumatic transmitter can be easily passed through to distinguish the electric signal of air-flow and extraneous vibration interference generation, be provided with shielding case simultaneously, thus further reduce the interference of extraneous vibration to pneumatic transmitter, improve the accuracy of pneumatic transmitter work.
Accompanying drawing explanation
Fig. 1 a is the cross section structure schematic diagram of pneumatic transmitter embodiment one provided by the invention;
Fig. 1 b is the front elevation one of shielding case in pneumatic transmitter embodiment one provided by the invention;
Fig. 1 c is the front elevation two of shielding case in pneumatic transmitter embodiment one provided by the invention;
Fig. 1 d is the front elevation three of shielding case in pneumatic transmitter embodiment one provided by the invention;
Fig. 2 is free layer provided by the invention by the schematic diagram of pad and fixed bed fixed connection method one;
Fig. 3 is free layer provided by the invention by the schematic diagram of pad and fixed bed fixed connection method two;
Fig. 4 is free layer provided by the invention by the schematic diagram of pad and fixed bed fixed connection method three;
Fig. 5 is free layer provided by the invention by the schematic diagram of pad and fixed bed fixed connection method four;
Fig. 6 is free layer provided by the invention by the schematic diagram of pad and fixed bed fixed connection method five;
Fig. 7 is the cross section structure schematic diagram of pneumatic transmitter embodiment two provided by the invention;
Fig. 8 a is the cross section structure schematic diagram of pneumatic transmitter embodiment three provided by the invention;
Fig. 8 b is the front elevation one of shielding case in pneumatic transmitter embodiment three provided by the invention;
Fig. 8 c is the front elevation two of shielding case in pneumatic transmitter embodiment three provided by the invention;
Fig. 9 is the cross section structure schematic diagram of the embodiment four of pneumatic transmitter provided by the invention;
Figure 10 is the cross section structure schematic diagram of the embodiment five of pneumatic transmitter provided by the invention;
Figure 11 is the cross section structure schematic diagram of the embodiment six of pneumatic transmitter provided by the invention;
Figure 12 a is the cross section structure schematic diagram of the embodiment seven of pneumatic transmitter provided by the invention;
Figure 12 b be interdigital electrode figure is set;
Figure 13 is the cross section structure schematic diagram of the embodiment eight of pneumatic transmitter provided by the invention;
Figure 14 is the cross section structure schematic diagram of the embodiment nine of pneumatic transmitter provided by the invention;
Figure 15 is the Longitudinal cross section schematic of the second fixed bed of embodiment nine;
Figure 16 is the Longitudinal cross section schematic of the first fixed bed of embodiment nine;
Figure 17 is free layer structure one Longitudinal cross section schematic of embodiment nine;
Figure 18 is free layer structure two Longitudinal cross section schematic of embodiment nine;
Figure 19 is the cross section structure schematic diagram of the embodiment ten of pneumatic transmitter provided by the invention;
Figure 20 is the cross section structure schematic diagram of the embodiment 11 of pneumatic transmitter provided by the invention;
Figure 21 is the cross section structure schematic diagram of the embodiment 12 of pneumatic transmitter provided by the invention;
Figure 22 is the cross section structure schematic diagram of the embodiment 13 of pneumatic transmitter provided by the invention;
Figure 23 a is the schematic diagram of free layer structure one;
Figure 23 b is the schematic diagram of free layer structure two.
Embodiment
For fully understanding the object of the present invention, feature and effect, by following concrete embodiment, the present invention is elaborated, but the present invention is not restricted to this.
The invention provides a kind of pneumatic transmitter, this pneumatic transmitter comprises: shielding case, the insulation course arranged at the part or all of inner surface of shielding case and at least one sensing unit.Shielding case offers at least two blow vents, and air-flow passes through between blow vent.Sensing unit comprises: at least one deck fixed bed and one deck free layer.At least one deck fixed bed is installed on shielding case.Free layer has fixed part and friction part, and the fixed part of free layer is fixedly connected with at least one deck fixed bed or shielding case, and free layer is by friction part and at least one deck fixed bed and/or shielding case friction.Wherein, at least one deck fixed bed and/or shielding case are the signal output part of pneumatic transmitter.
Alternatively, the material of shielding case is metal material, in order to reduce the interference of extraneous vibration to pneumatic transmitter further, can by shielding case ground connection, thus filtering interference signals.The appearance profile of shielding case can set according to actual needs, and such as, the appearance profile of shielding case can be rectangular parallelepiped, and can be also right cylinder etc., the present invention be specifically limited the appearance profile of shielding case.In addition, can also arrange ventilative screen layer at the blow vent of shielding case, ventilative screen layer is the metal level of net-shaped metal layer or band hole.
Free layer, through pre-hot pressing and precuring process, has warp architecture or bending structure after making its cooling and shaping, in particular, arrange warp architecture or bending structure in the other parts of free layer except fixed part (as located windward).Specifically, free layer has warp architecture or bending structure at place windward, when there being airflow function, relative to airflow function on the free layer of planar structure, airflow function can bring larger acting force to free layer in knee or bending place, thus make free layer easier with airstream vibration, and then make the sensitivity of pneumatic transmitter higher.
In the present invention, pneumatic transmitter is mainly divided into parallel type pneumatic transmitter and vertical-type pneumatic transmitter two macrotaxonomy.Wherein, parallel type pneumatic transmitter refers to that the airintake direction of air-flow to be parallel in pneumatic transmitter at least one deck fixed bed place plane; Vertical-type pneumatic transmitter refers to that the airintake direction of air-flow is perpendicular at least one deck fixed bed place plane in pneumatic transmitter.Mainly utilize free layer to wave under airflow function due to pneumatic transmitter of the present invention and then rub with fixed bed and/or shielding case and produce electric signal, the sensitivity impact of the airflow direction therefore determined by vent locations on pneumatic transmitter is larger.In the present invention, by rationally arranging the position of blow vent, the airintake direction of air-flow being parallel to or perpendicular at least one deck fixed bed place plane, improving the sensitivity of pneumatic transmitter.
Below by following specific embodiment, pneumatic transmitter provided by the invention is described in detail.
The pneumatic transmitter of a type provided by the invention, wherein sensing unit comprises: one deck fixed bed and one deck free layer.Fixed bed comprises electrode, and insulation course is arranged between electrode and shielding case inner surface.The fixed part of free layer can be fixedly connected with fixed bed or shielding case, and free layer is by friction part and fixed bed and/or shielding case friction, and electrode and shielding case are the signal output part of pneumatic transmitter.Here, fixed bed comprises electrode and contains at least two kinds of structures, and a kind of structure is fixed bed is exactly one deck electrode, and another kind of structure is fixed bed is the high molecular polymer insulation course that surface, side is coated with electrode.When fixed bed is electrode, insulation course is arranged between electrode and shielding case inner surface, and free layer is by friction part and electrode and/or shielding case friction.When fixed bed be side surface be coated with the high molecular polymer insulation course of electrode time, insulation course is arranged on high molecular polymer insulation course and is coated with between a side surface of electrode and shielding case inner surface, and free layer does not have a side surface and/or the shielding case friction of plated electrode by friction part and high molecular polymer insulation course.Fig. 1 a, Fig. 7 and Fig. 8 belongs to such pneumatic transmitter below.
Fig. 1 a is the cross section structure schematic diagram of pneumatic transmitter embodiment one provided by the invention, as shown in Figure 1a, a blow vent is respectively offered in the middle of the left and right sides of shielding case 100, air-flow can enter from one of them blow vent, flow out from another blow vent, when the appearance profile of shielding case 100 is rectangular parallelepiped, as shown in Figure 1 b, wherein blow vent is rectangle to the front elevation of shielding case; When the appearance profile of shielding case 100 is right cylinder, the front elevation of shielding case is as shown in Fig. 1 c or Fig. 1 d, and wherein blow vent is respectively rectangle and both sides are the shape of arc.The sensing unit of this pneumatic transmitter comprises: one deck fixed bed and one deck free layer 204.Now, the airintake direction of air-flow is parallel to fixed bed place plane in pneumatic transmitter.Particularly, fixed bed is installed in the below inside shielding case 100.Fixed bed is the high molecular polymer insulation course 212 that surface, side is coated with electrode 211, and insulation course 300 is arranged on high molecular polymer insulation course 212 and is coated with between a side surface of electrode 211 and shielding case 100 inner surface.The fixed part of free layer 204 is fixedly connected with high molecular polymer insulation course 212 by pad 203, free layer 204 does not have a side surface of plated electrode 211 and/or shielding case 100 to rub by friction part and high molecular polymer insulation course 212, and electrode 211 and shielding case 100 are the signal output part of pneumatic transmitter.
Fig. 2-Fig. 6 is the schematic diagram of fixed part by pad and fixed bed fixed connection method of free layer provided by the invention, as shown in Fig. 2-Fig. 6, the fixed part of free layer is fixedly connected with by one side of two pads and fixed bed or diagonal angle, and the fixed part of free layer is also fixedly connected with four angles of fixed bed by four pads.Such as, free layer in pneumatic transmitter embodiment one can adopt the fixing means shown in Fig. 2 to be fixedly connected with high molecular polymer insulation course by pad.
Fig. 7 is the cross section structure schematic diagram of pneumatic transmitter embodiment two provided by the invention, as shown in Figure 7, in the middle of the left side of shielding case 100 and on the right of upside, respectively offer a blow vent, air-flow can enter by the blow vent in the middle of left side, and the blow vent on the right of upside flows out.The sensing unit of this pneumatic transmitter comprises: one deck fixed bed and one deck free layer.Now, the airintake direction of air-flow is parallel to fixed bed place plane in pneumatic transmitter.Particularly, fixed bed is installed in the below inside shielding case 100.Fixed bed is the high molecular polymer insulation course 212 that surface, side is coated with electrode 211, and insulation course 300 is arranged on high molecular polymer insulation course 212 and is coated with between a side surface of electrode 211 and shielding case 100 inner surface.The fixed part of free layer 204 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with high molecular polymer insulation course 212, free layer 204 does not have a side surface of plated electrode 211 and/or shielding case 100 to rub by friction part and high molecular polymer insulation course 212, and electrode 211 and shielding case 100 are the signal output part of pneumatic transmitter.
Fig. 8 a is the cross section structure schematic diagram of pneumatic transmitter embodiment three provided by the invention, as shown in Figure 8 a, a blow vent is respectively offered in the lower left side of shielding case 100 and upper right side, air-flow can enter from the blow vent of lower left side, flow out from the blow vent of upper right side, when the appearance profile of shielding case 100 is rectangular parallelepiped, as shown in Figure 8 b, wherein blow vent is rectangle to the front elevation of shielding case; When the appearance profile of shielding case 100 is right cylinder, as shown in Figure 8 c, wherein blow vent is the shape for arc to the front elevation of shielding case.The sensing unit of this pneumatic transmitter comprises: one deck fixed bed and one deck free layer 204.Now, the airintake direction of air-flow is perpendicular to fixed bed place plane in pneumatic transmitter.Particularly, fixed bed is installed in the right inside shielding case 100.Fixed bed is the high molecular polymer insulation course 212 that surface, side is coated with electrode 211, and insulation course 300 is arranged on high molecular polymer insulation course 212 and is coated with between a side surface of electrode 211 and shielding case 100 inner surface.The fixed part of free layer 204 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with high molecular polymer insulation course 212, free layer 204 does not have a side surface of plated electrode 211 and/or shielding case 100 to rub by friction part and high molecular polymer insulation course 212, and electrode 211 and shielding case 100 are the signal output part of pneumatic transmitter.
As the optional embodiment of another kind, the fixed bed in Fig. 1 a, Fig. 7 and Fig. 8 can also be directly electrode, and now free layer is by friction part and electrode and/or shielding case friction, and electrode and shielding case are the signal output part of pneumatic transmitter.
The pneumatic transmitter of another kind of type provided by the invention, at least one deck fixed bed of sensing unit is wherein two-layer, and now this two-layer fixed bed is respectively the first fixed bed and the second fixed bed.First fixed bed is separated with the second fixed bed and is installed on shielding case, and free layer is between the first fixed bed and the second fixed bed.First fixed bed comprises the first electrode, and insulation course is arranged between the first electrode and shielding case inner surface.Here, the first fixed bed comprises the first electrode and contains at least two kinds of structures, and a kind of structure is the first fixed bed is exactly one deck first electrode, and another kind of structure is the first fixed bed is the first high molecular polymer insulation course that surface, side is coated with the first electrode.The fixed part of free layer is fixedly connected with the first fixed bed or the second fixed bed, and free layer is by friction part and the first fixed bed and/or the second fixed bed friction.Fig. 9-Figure 14 belongs to such pneumatic transmitter below.
Fig. 9 is the cross section structure schematic diagram of the embodiment four of pneumatic transmitter provided by the invention, and as shown in Figure 9, in the middle of the left and right sides of shielding case, respectively offer a blow vent, air-flow can enter from one of them blow vent, flows out from another blow vent.The sensing unit of this pneumatic transmitter comprises: the first fixed bed, free layer 204 and the second fixed bed.Now, the airintake direction of air-flow is parallel to the first fixed bed and the second fixed bed place plane in pneumatic transmitter.Wherein, to be the first electrode 201, second fixed bed be the first fixed bed that the second high molecular polymer insulation course 205, first fixed bed is separated with the second fixed bed is installed on shielding case 100.Particularly, the first fixed bed is installed in the below inside shielding case 100, and the second fixed bed is installed in the top inside shielding case 100.In addition, insulation course 300 is arranged between the first electrode 201 and shielding case 100 inner surface.Free layer 204 is between the first fixed bed and the second fixed bed, and the fixed part of free layer 204 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the first fixed bed.Free layer 204 is by friction part and the first fixed bed and/or the second fixed bed friction.In this case, the first electrode 201 and shielding case 100 are the signal output part of pneumatic transmitter.
The first fixed bed in Fig. 9 also can be the first high molecular polymer insulation course that surface, side is coated with the first electrode, and free layer does not have surface and/or the second fixed bed friction of plating first electrode by friction part and this first high molecular polymer insulation course.
Figure 10 is the cross section structure schematic diagram of the embodiment five of pneumatic transmitter provided by the invention, as shown in Figure 10, in the middle of the left side of shielding case 100 and on the right of upside, respectively offer a blow vent, air-flow can enter by the blow vent in the middle of left side, and the blow vent on the right of upside flows out.The sensing unit of this pneumatic transmitter comprises: the first fixed bed, free layer 204 and the second fixed bed.Now, the airintake direction of air-flow is parallel to the first fixed bed and the second fixed bed place plane in pneumatic transmitter.Wherein, first fixed bed comprises the first electrode 201, second fixed bed comprises the second electrode 206, particularly, first fixed bed is surperficial the first high molecular polymer insulation course 202, second fixed bed being coated with the first electrode 201 in side is the second high molecular polymer insulation course 205 that surface, side is coated with the second electrode 206.First fixed bed is separated with the second fixed bed and is installed on shielding case 100.Particularly, the first fixed bed is installed in the below inside shielding case 100, and the second fixed bed is installed in the top inside shielding case 100, and the side surface that the second high molecular polymer insulation course 205 is coated with the second electrode 206 directly contacts with shielding case 100 inner surface.In addition, insulation course 300 is arranged on the first high molecular polymer insulation course 202 and is coated with between the surface of the first electrode 201 and shielding case 100 inner surface.Free layer 204 is between the first fixed bed and the second fixed bed, and the fixed part of free layer 204 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the first fixed bed.Free layer 204 is by friction part and the first fixed bed and/or the second fixed bed friction, and particularly, free layer 204 is rubbed by friction part and the first high molecular polymer insulation course 202 and/or the second high molecular polymer insulation course 205.In this case, because the second electrode 206 directly contacts with shielding case 100, shielding case 100 is metal material, so serve as the signal output part of pneumatic transmitter with the first electrode 201 after shielding case 100 and the second electrode 206 conducting.
In Figure 10, the first fixed bed also can be the first electrode (namely removing the structure of the first high molecular polymer insulation course in Figure 10), and free layer is by friction part and the first electrode and/or the second fixed bed friction.
In Figure 10, the second fixed bed also can be the second electrode (namely removing the structure of the second high molecular polymer insulation course in Figure 10), and free layer is by friction part and the first fixed bed and/or the second electrode friction.
Figure 11 is the cross section structure schematic diagram of the embodiment six of pneumatic transmitter provided by the invention, as shown in figure 11, respectively offer a blow vent in the lower left side of shielding case 100 and upper right side, air-flow can enter from the blow vent of lower left side, flows out from the blow vent of upper right side.The sensing unit of this pneumatic transmitter comprises: the first fixed bed, free layer 204 and the second fixed bed.Now, the airintake direction of air-flow is perpendicular to the first fixed bed in pneumatic transmitter and the second fixed bed place plane.Wherein, first fixed bed comprises the first electrode 201, second fixed bed comprises the second electrode 206, particularly, first fixed bed is surperficial the first high molecular polymer insulation course 202, second fixed bed being coated with the first electrode 201 in side is the second high molecular polymer insulation course 205 that surface, side is coated with the second electrode 206.First fixed bed is separated with the second fixed bed and is installed on shielding case 100.Particularly, the first fixed bed is installed in the right inside shielding case 100, and the second fixed bed is installed in the left inside shielding case 100.Insulation course 300 is arranged on the first high molecular polymer insulation course 202 and is coated with between the surface of the first electrode 201 and shielding case 100 inner surface, and be arranged on the second high molecular polymer insulation course 205 and be coated with between the surface of the second electrode 206 and shielding case 100 inner surface, be i.e. the first electrode 201 and be insulation between the second electrode 206 and shielding case 100.Free layer 204 is between the first fixed bed and the second fixed bed, and the fixed part of free layer 204 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the first fixed bed.Free layer 204 is by friction part and the first fixed bed and/or the second fixed bed friction, and particularly, free layer 204 is rubbed by friction part and the first high molecular polymer insulation course 202 and/or the second high molecular polymer insulation course 205.In this case, the first electrode 201 and the second electrode 206 are the signal output part of pneumatic transmitter.
In Figure 11, the first fixed bed also can be the first electrode (namely removing the structure of the first high molecular polymer insulation course in Figure 11), and free layer is by friction part and the first electrode and/or the second fixed bed friction.
In Figure 11, the second fixed bed also can be the second electrode (namely removing the structure of the second high molecular polymer insulation course in Figure 11), and free layer is by friction part and the first fixed bed and/or the second electrode friction.
Figure 12 a is the cross section structure schematic diagram of the embodiment seven of pneumatic transmitter provided by the invention, as figure 12 a shows, in the middle of the left and right sides of shielding case 100, respectively offer a blow vent, air-flow can enter from one of them blow vent, flows out from another blow vent.The sensing unit of this pneumatic transmitter comprises: the first fixed bed, free layer 204 and the second fixed bed.Now, the airintake direction of air-flow is parallel to the first fixed bed and the second fixed bed place plane in pneumatic transmitter.Wherein, the first fixed bed comprises the first electrode, and the second fixed bed is the second high molecular polymer insulation course 205, particularly, first fixed bed is the first high molecular polymer insulation course 202 that surface, side is coated with the first electrode, and wherein, the first electrode is made up of a pair interdigital electrode 201a and 201b.First fixed bed is separated with the second fixed bed and is installed on shielding case 100.Particularly, the first fixed bed is installed in the below inside shielding case 100, and the second fixed bed is installed in the top inside shielding case 100.Insulation course 300 is arranged on the first high molecular polymer insulation course 202 and is coated with between a side surface of the first electrode and shielding case 100 inner surface.Free layer 204 is between the first fixed bed and the second fixed bed, and the fixed part of free layer 201 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the first fixed bed.Free layer 204 is by friction part and the first fixed bed and/or the second fixed bed friction, and particularly, free layer 204 is rubbed by friction part and the first high molecular polymer insulation course 202 and/or the second high molecular polymer insulation course 205.In this case, interdigital electrode 201a and 201b is the signal output part of pneumatic transmitter.Wherein, the size of interdigital electrode 201a and 201b subregion can correspond to free layer 204 with wavelength during airstream vibration.Figure 12 b be interdigital electrode 201a and 201b figure is set.
Figure 13 is the cross section structure schematic diagram of the embodiment eight of pneumatic transmitter provided by the invention, and as shown in figure 13, in the middle of the left and right sides of shielding case 100, respectively offer a blow vent, air-flow can enter from one of them blow vent, flows out from another blow vent.The sensing unit of this pneumatic transmitter comprises: the first fixed bed, free layer 204 and the second fixed bed.Now, the airintake direction of air-flow is parallel to the first fixed bed and the second fixed bed place plane in pneumatic transmitter.Wherein, first fixed bed comprises the first electrode, second fixed bed comprises the second electrode, particularly, first fixed bed is surperficial the first high molecular polymer insulation course 202, second electrode being coated with the first electrode in side is the second high molecular polymer insulation course 205 that surface, side is coated with the second electrode, wherein, first electrode is made up of a pair interdigital electrode 201a and 201b, and the second electrode is also made up of a pair interdigital electrode 206a and 206b.First fixed bed is separated with the second fixed bed and is installed on shielding case 100.Particularly, the first fixed bed is installed in the below inside shielding case 100, and the second fixed bed is installed in the top inside shielding case 100.Insulation course 300 is arranged on the first high molecular polymer insulation course 202 and is coated with between a side surface of the first electrode and shielding case 100 inner surface, and is arranged on the second high molecular polymer insulation course 205 and is coated with between a side surface of the second electrode and shielding case 100 inner surface.Free layer 204 is between the first fixed bed and the second fixed bed, and the fixed part of free layer 204 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the first fixed bed.Free layer 204 is by friction part and the first fixed bed and/or the second fixed bed friction, and particularly, free layer 204 is rubbed by friction part and the first high molecular polymer insulation course 202 and/or the second high molecular polymer insulation course 205.In this case, these two pairs of interdigital electrodes are connected in parallel the signal output part into pneumatic transmitter, and such as, interdigital electrode 201a and 206a connects as a signal output part, and interdigital electrode 201b and 206b connects as another signal output part.Wherein, the size of interdigital electrode subregion can correspond to free layer 204 with wavelength during airstream vibration.
Even if because the charge amount distribution obtained by friction on same friction surface is also uneven, so have electric potential difference to a certain degree between same friction surface two location points, this electric potential difference is effectively utilized to export to obtain electric signal by rationally arranging interdigital electrode.Figure 12 a and Figure 13, based on this principle, utilizes interdigital electrode to obtain electric signal as output electrode and exports.
As the optional embodiment of another kind, the collection air port relative with blow vent can also be offered in the middle of the second fixed bed in pneumatic transmitter, first fixed bed with form two air outlets relative with blow vent between shielding case, free layer is made up of two parts of symmetry, and the fixed part of free layer is fixedly connected with shielding case.Figure 14 is the cross section structure schematic diagram of the embodiment nine of pneumatic transmitter provided by the invention, as shown in figure 14, in the middle of the left side of shielding case 100, upper right side and lower right side respectively offer a blow vent, air-flow can enter by the blow vent in the middle of left side, flows out from the blow vent of upper right side and lower right side.The sensing unit of this pneumatic transmitter comprises: the first fixed bed, free layer 204 and the second fixed bed.Wherein, the first fixed bed is the first high molecular polymer insulation course 202, second fixed bed that side is coated with the first electrode 201 is the second high molecular polymer insulation course 205.First fixed bed is separated with the second fixed bed and is installed on shielding case 100.Particularly, the first fixed bed is installed in the right inside shielding case 100, and the second fixed bed is installed in the left inside shielding case 100.Insulation course 300 is arranged on the first high molecular polymer insulation course 202 and is coated with between the surface of the first electrode 201 and shielding case 100 inner surface.The collection air port relative with blow vent is offered in the middle of second fixed bed, two air outlets relative with blow vent are formed between first fixed bed with shielding case 100, air-flow enters from collection air port, flow out from air outlet, drive the free layer 204 in pneumatic transmitter to vibrate along with air-flow, free layer 204 is when vibrating and the first fixed bed and/or the second fixed bed friction.In this case, the first electrode 201 and shielding case 100 are the signal output part of pneumatic transmitter.
When the appearance profile of shielding case is right cylinder, Figure 15 is the Longitudinal cross section schematic of the second fixed bed, as shown in figure 15, offers the collection air port 400 relative with blow vent in the middle of the second fixed bed, being provided with of air port 400 of collection is beneficial to focused airflow, strengthens pneumatic transmitter to the response of air-flow.Figure 16 is the Longitudinal cross section schematic of the first fixed bed, forms two air outlets 500 relative with blow vent between the first fixed bed with shielding case 100.Figure 17 and Figure 18 is the Longitudinal cross section schematic of free layer, as shown in Figure 17 and Figure 18, free layer 204 is made up of two parts of symmetry, one end of free layer 204 is installed in inside shielding case 100, the shape of free layer 204 can be the shape of the free layer 204 shown in Figure 17, also can be the shape with the first fixed bed identical radian measure that has shown in Figure 18.
Sensing unit in the pneumatic transmitter provided of the present invention can also for multiple, and now by being provided with at least one dividing plate thus making multiple sensing unit be separated by dividing plate in shielding case, multiple sensing unit is connected in parallel.Figure 19 is the cross section structure schematic diagram of the embodiment ten of pneumatic transmitter provided by the invention, and as shown in figure 19, in shielding case 100, be provided with a dividing plate 600, dividing plate 600 is identical with the material of shielding case 100.Each side offer two blow vents at shielding case 100, air-flow can enter from two blow vents of wherein side, flows out, thus make the sensing unit in this pneumatic transmitter be two and separated by dividing plate 600 from two blow vents of opposite side.Now, the airintake direction of air-flow to be parallel in pneumatic transmitter at least one deck fixed bed place plane.
Sensing unit on the upside of dividing plate comprises: the first fixed bed, the first free layer 213 and the second fixed bed.Wherein, the first fixed bed is surperficial the first high polymer layer 202, second fixed bed being coated with the first electrode 201 in side is that the second high polymer layer 205, first fixed bed is installed on shielding case 100, and the second fixed bed is installed on dividing plate 600.Particularly, the first fixed bed is installed in the top inside shielding case 100, and the second fixed bed is installed in the upside of dividing plate 600.In addition, insulation course 300 is arranged on the first high polymer layer 202 and is coated with between a side surface of the first electrode 201 and shielding case 100 inner surface.First free layer 213 is between the first fixed bed and the second fixed bed, and the fixed part of the first free layer 213 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the first fixed bed.First free layer 213 is by friction part and the first fixed bed and/or the second fixed bed friction.
Sensing unit on the downside of dividing plate comprises: the 3rd fixed bed, the second free layer 209 and the 4th fixed bed.Wherein, the 3rd fixed bed is surperficial third high molecular polymer layer the 208, four fixed bed being coated with the 3rd electrode 207 in side is the 4th high polymer layer 210, and the 3rd fixed bed is installed on shielding case 100, and the 4th fixed bed is installed on dividing plate 600.Particularly, the 3rd fixed bed is installed in the below inside shielding case 100, and the 4th fixed bed is installed in the downside of dividing plate 600.In addition, insulation course 300 is arranged on third high molecular polymer layer 208 and is coated with between a side surface of the 3rd electrode 207 and shielding case 100 inner surface.Second free layer 209 is between the 3rd fixed bed and the 4th fixed bed, and the fixed part of the second free layer 209 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the 3rd fixed bed.Second free layer 209 is by friction part and the 3rd fixed bed and/or the 4th fixed bed friction.Sensing unit on the downside of sensing unit on the upside of dividing plate 600 and dividing plate 600 is connected in parallel, and in this case, the first electrode 201, dividing plate 600 and the 3rd electrode 207 are the signal output part of pneumatic transmitter.
Multiple sensing units in the pneumatic transmitter provided of the present invention also separate by insulation course, and multiple sensing unit is connected in parallel.Figure 20 is the cross section structure schematic diagram of the embodiment 11 of pneumatic transmitter provided by the invention, as shown in figure 20, respectively offer two blow vents in the lower left side of shielding case 100 and lower right side, air-flow can enter from one of them blow vent, flows out from another blow vent.Now, the sensing unit in this pneumatic transmitter is two, and the airintake direction of air-flow is perpendicular at least one deck fixed bed place plane in pneumatic transmitter.
In shielding case 100, the sensing unit in left side comprises: the first fixed bed, the first free layer 213 and the second fixed bed.Wherein, to be the first high polymer layer 202, second fixed bed that surface, side is coated with the first electrode 201 be the first fixed bed that the second high polymer layer 205, first fixed bed is separated with the second fixed bed is installed on shielding case 100.Particularly, one end of the first fixed bed is installed in the middle part of the below inside shielding case 100, and the second fixed bed is installed in the left inside shielding case 100.In addition, insulation course 300 is arranged between the first fixed bed and shielding case 100 inner surface.First free layer is between the first fixed bed and the second fixed bed, and the fixed part of the first free layer 213 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the first fixed bed.First free layer 213 is by friction part and the first fixed bed and/or the second fixed bed friction.
In shielding case 100, the sensing unit on right side comprises: the 3rd fixed bed, the second free layer 209 and the 4th fixed bed.Wherein, the 3rd fixed bed is surperficial third high molecular polymer layer the 208, four fixed bed being coated with the 3rd electrode 207 in side is the 4th high polymer layer 210, and the 3rd fixed bed is separated with the 4th fixed bed and is installed on shielding case 100.Particularly, one end of the 3rd fixed bed is installed in the middle part of the below inside shielding case 100, and the 4th fixed bed is installed in the right inside shielding case 100.In addition, insulation course 300 is arranged between the 3rd fixed bed and shielding case 100 inner surface, between the first high polymer layer 202 is coated with a side surface that a side surface of the first electrode 201 and third high molecular polymer layer 208 be coated with the 3rd electrode 207, be also provided with insulation course 300, these two sensing units separate by this insulation course.Second free layer 209 is between the 3rd fixed bed and the 4th fixed bed, and the fixed part of the second free layer 209 is fixedly connected with (be specifically fixedly connected with mode can see Fig. 2-Fig. 6) by pad 203 with the 3rd fixed bed.Second free layer 209 is by friction part and the 3rd fixed bed and/or the 4th fixed bed friction.In shielding case 100, the sensing unit on left side and right side is connected in parallel, and in this case, the first electrode 201, shielding case 100 and the 3rd electrode 207 are the signal output part of pneumatic transmitter.
There is above the structure of each sensing unit inside separated above by dividing plate or insulation course can replace with the structure described by each embodiment of pneumatic transmitter of independent sensing unit, and be not limited only to structure shown in Figure 19 and Figure 20.
Present invention also offers the pneumatic transmitter of another kind of type, comprising: shielding case, the insulation course arranged at the part or all of inner surface of shielding case and at least one sensing unit.Shielding case offers at least two blow vents, air-flow passes through between blow vent.Sensing unit comprises: free layer, and the surface, side of this free layer is coated with electrode.Free layer has fixed part and friction part, and the fixed part of free layer is fixedly connected with shielding case; Free layer does not have the surface of plated electrode by friction part and shielding case friction; Insulation course is arranged on the portion inboard surface that can be coated with the shielding case of the surface contact of electrode with free layer.Wherein, the electrode of free layer and/or shielding case are the signal output part of pneumatic transmitter.
Sensing unit can also comprise at least one deck fixed bed, and at least one deck fixed bed is installed on shielding case.The fixed part of free layer and shielding case or at least one deck fixed bed are fixedly connected with, and free layer does not have the surface of plated electrode by friction part and fixed bed friction.If fixed bed comprises electrode, (this electrode directly can contact with shielding case and make both conductings; Or, between this electrode and shielding case, be provided with insulation course), then the electrode of free layer and the electrode of fixed bed are the signal output part of pneumatic transmitter; If fixed bed does not comprise electrode, then the electrode of free layer and shielding case are the signal output part of pneumatic transmitter.
Figure 21 is the cross section structure schematic diagram of the embodiment 12 of pneumatic transmitter provided by the invention, as shown in figure 21, in the middle of the left and right sides of shielding case 100, respectively offer a blow vent, air-flow can enter from one of them blow vent, flows out from another blow vent.The sensing unit of this pneumatic transmitter comprises: free layer 304, and the surface, side of this free layer 304 is coated with electrode 214.In order to maximally utilise air-flow, free layer 304 is provided with bending structure at place windward.Insulation course 300 is arranged on the portion inboard surface that can be coated with the shielding case 100 of the surface contact of electrode 214 with free layer 304.The fixed part of free layer 304 is fixedly connected with shielding case 100 by pad 203, and particularly, free layer 304 is installed in the below inside shielding case 100 by pad 203, and insulation course 300 is arranged on the below inside shielding case 100.Free layer 304 does not have the surface of plated electrode 214 to be rubbed by friction part and shielding case 100.Electrode 214 and the shielding case 100 of free layer 304 are the signal output part of pneumatic transmitter.
Figure 22 is the cross section structure schematic diagram of the embodiment 13 of pneumatic transmitter provided by the invention, as shown in figure 22, in the middle of the left and right sides of shielding case 100, respectively offer a blow vent, air-flow can enter from one of them blow vent, flows out from another blow vent.The sensing unit of this pneumatic transmitter comprises: free layer 304 and the second fixed bed, and wherein, it is the second high molecular polymer insulation course 205 that surface, side is coated with the second electrode 206 that the surface, side of free layer 304 is coated with the first electrode 215, second fixed bed.In order to maximally utilise air-flow, free layer 304 is provided with bending structure at place windward.Insulation course 300 is arranged on the portion inboard surface that can be coated with the shielding case 100 of the surface contact of the first electrode 215 with free layer 304, and be arranged on the second high molecular polymer insulation course 205 and be coated with between the surface of the second electrode 206 and shielding case 100 inner surface, be i.e. the first electrode 215 and be insulation between the second electrode 206 and shielding case 100.The fixed part of free layer 304 is fixedly connected with shielding case 100 by pad 203, and particularly, free layer 304 is installed in the below inside shielding case 100 by pad 203, and insulation course 300 is arranged on above and below inside shielding case 100.Free layer 304 does not have the surface of plating first electrode 215 to be rubbed by friction part and the second high molecular polymer insulation course 205.First electrode 215 of free layer 304 and the second electrode 206 are the signal output part of pneumatic transmitter.
In Figure 22, the second fixed bed also can be the second electrode (namely removing the structure of the second high molecular polymer insulation course in Figure 22), and free layer 304 does not have the surface of plating first electrode 215 by friction part and the second electrode friction.
In Figure 22 inside the second fixed bed and shielding case between the insulation course that arranges can remove, in this case, because the second electrode 206 directly contacts with shielding case 100, shielding case 100 is metal material, so serve as the signal output part of pneumatic transmitter with the first electrode 215 of free layer 304 after shielding case 100 and the second electrode 206 conducting.
In order to increase the response of little airflow to pneumatic transmitter, in above-mentioned pneumatic transmitter provided by the invention, the structure of free layer can also be set to Figure 23 a or 23b, now free layer by pad 203 and shielding case or at least one deck fixed bed be fixedly connected with.
In the above-mentioned pneumatic transmitter provided, in order to improve the sensitivity of pneumatic transmitter, in the two-layer relative face of frictional interface forming pneumatic transmitter, at least simultaneously micro-nano structure can be provided with.When free layer vibrates with air-flow, enable free layer by friction part and at least one deck fixed bed and/or shielding case contact friction better.
The cost of manufacture of above-mentioned pneumatic transmitter provided by the invention is low, output signal is large, require low to external signal processing circuit, due to the weak output signal that extraneous vibration causes, so the electric signal that the circuit design that can easily pass through pneumatic transmitter produces to distinguish air-flow and extraneous vibration interference, be provided with shielding case simultaneously, thus further reduce the interference of extraneous vibration to pneumatic transmitter, improve the accuracy of pneumatic transmitter work.
Finally; what enumerate it is to be noted that above is only specific embodiments of the invention; certain those skilled in the art can change and modification the present invention; if these amendments and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, protection scope of the present invention all should be thought.
Claims (23)
1. a pneumatic transmitter, is characterized in that, comprising: shielding case, the insulation course arranged at the part or all of inner surface of described shielding case and at least one sensing unit;
Described shielding case offers at least two blow vents, air-flow passes through between blow vent;
Described sensing unit comprises: at least one deck fixed bed and one deck free layer; Described at least one deck fixed bed is installed on described shielding case; Described free layer has fixed part and friction part; The fixed part of described free layer is fixedly connected with described at least one deck fixed bed or described shielding case; Described free layer is by friction part and described at least one deck fixed bed and/or described shielding case friction;
Wherein, described at least one deck fixed bed and/or described shielding case are the signal output part of described pneumatic transmitter.
2. pneumatic transmitter according to claim 1, is characterized in that, described in the airintake direction of air-flow is parallel at least the airintake direction of one deck fixed bed place plane or air-flow perpendicular to described at least one deck fixed bed place plane.
3. pneumatic transmitter according to claim 1 and 2, is characterized in that, described sensing unit comprises: one deck fixed bed and one deck free layer;
Described fixed bed comprises electrode, and described insulation course is arranged between described electrode and described shielding case inner surface;
Described free layer is by friction part and described fixed bed and/or described shielding case friction, and described electrode and described shielding case are the signal output part of described pneumatic transmitter.
4. pneumatic transmitter according to claim 3, is characterized in that, described fixed bed is electrode, or described fixed bed is the high molecular polymer insulation course that surface, side is coated with electrode.
5. pneumatic transmitter according to claim 1 and 2, is characterized in that, described at least one deck fixed bed is two-layer, is respectively the first fixed bed and the second fixed bed; Described first fixed bed is separated with described second fixed bed and is installed on described shielding case, and described free layer is between described first fixed bed and described second fixed bed;
Described first fixed bed comprises the first electrode, and described insulation course is arranged between described first electrode and described shielding case inner surface;
The fixed part of described free layer is fixedly connected with described first fixed bed or the second fixed bed, and described free layer is by friction part and described first fixed bed and/or described second fixed bed friction.
6. pneumatic transmitter according to claim 5, is characterized in that, described first fixed bed is the first electrode, or described first fixed bed is the first high molecular polymer insulation course that surface, side is coated with the first electrode.
7. pneumatic transmitter according to claim 6, is characterized in that, described second fixed bed is the second high molecular polymer insulation course, and described first electrode and described shielding case are the signal output part of described pneumatic transmitter.
8. pneumatic transmitter according to claim 6, it is characterized in that, described second fixed bed comprises the second electrode, and described second electrode contacts with described shielding case inner surface, and described first electrode and described shielding case are the signal output part of described pneumatic transmitter.
9. pneumatic transmitter according to claim 6, is characterized in that, described second fixed bed comprises the second electrode, and described insulation course is also arranged between described second electrode and described shielding case inner surface;
Described first electrode and described second electrode are the signal output part of described pneumatic transmitter.
10. pneumatic transmitter according to claim 6, it is characterized in that, described second fixed bed is the second high molecular polymer insulation course, and described first electrode is made up of two interdigital electrodes, and described two interdigital electrodes are the signal output part of described pneumatic transmitter.
11. pneumatic transmitters according to claim 6, is characterized in that, described second fixed bed comprises the second electrode, and described insulation course is also arranged between described second electrode and described shielding case inner surface;
Described first electrode is made up of two interdigital electrodes, and described second electrode is made up of two interdigital electrodes, and four interdigital electrodes are the signal output part of described pneumatic transmitter.
12. pneumatic transmitters according to claim 6, it is characterized in that, the collection air port relative with described blow vent is offered in the middle of described second fixed bed, described first fixed bed with form two air outlets relative with blow vent between described shielding case, described free layer is made up of two parts of symmetry, and the fixed part of free layer is fixedly connected with described shielding case.
13. according to Claim 8,9, pneumatic transmitter described in 11 or 12, it is characterized in that, described second fixed bed is the second electrode, or described second fixed bed is the second high molecular polymer insulation course that surface, side is coated with the second electrode.
14. pneumatic transmitters according to any one of claim 1-13, it is characterized in that, described sensing unit is multiple, is also provided with at least one dividing plate in described shielding case, and multiple sensing unit is separated by dividing plate, and described multiple sensing unit is connected in parallel.
15. pneumatic transmitters according to any one of claim 1-13, it is characterized in that, described sensing unit is multiple, and multiple sensing unit is separated by insulation course, and described multiple sensing unit is connected in parallel.
16. pneumatic transmitters according to claim 1, it is characterized in that, the fixed part of described free layer is fixedly connected with by one side of two pads and described at least one deck fixed bed or diagonal angle, or the fixed part of described free layer is fixedly connected with by four angles of four pads with described at least one deck fixed bed.
17. pneumatic transmitters according to claim 1, is characterized in that, the material of described shielding case is metal material, described shielding case ground connection.
18. pneumatic transmitters according to claim 14, is characterized in that, described dividing plate is identical with the material of described shielding case.
19. pneumatic transmitters according to claim 1, is characterized in that, arrange ventilative screen layer at the blow vent of described shielding case, and described ventilative screen layer is the metal level of net-shaped metal layer or band hole.
20. pneumatic transmitters according to claim 1, is characterized in that, described free layer, through pre-hot pressing and precuring process, makes described free layer have warp architecture or bending structure at place windward.
21. pneumatic transmitters according to claim 1, is characterized in that, are formed in the two-layer relative face of the frictional interface of described pneumatic transmitter and are at least simultaneously provided with micro-nano structure.
22. 1 kinds of pneumatic transmitters, is characterized in that, comprising: shielding case, the insulation course arranged at the part or all of inner surface of described shielding case and at least one sensing unit;
Described shielding case offers at least two blow vents, air-flow passes through between blow vent;
Described sensing unit comprises: free layer, and the surface, side of described free layer is coated with electrode; Described free layer has fixed part and friction part; The fixed part of described free layer is fixedly connected with described shielding case; Described free layer does not have the surface of plated electrode by friction part and described shielding case friction; Described insulation course is arranged on the portion inboard surface that can be coated with the described shielding case of the surface contact of electrode with described free layer;
Wherein, the electrode of described free layer and/or described shielding case are the signal output part of described pneumatic transmitter.
23. 1 kinds of pneumatic transmitters, is characterized in that, comprising: shielding case, the insulation course arranged at the part or all of inner surface of described shielding case and at least one sensing unit;
Described shielding case offers at least two blow vents, air-flow passes through between blow vent;
Described sensing unit comprises: at least one deck fixed bed and free layer, and the surface, side of described free layer is coated with electrode, and described free layer has fixed part and friction part; Described at least one deck fixed bed is installed on described shielding case; The fixed part of described free layer is fixedly connected with described shielding case or described at least one deck fixed bed, and described free layer does not have the surface of plated electrode by friction part and described fixed bed friction; Described insulation course is arranged on the portion inboard surface that can be coated with the described shielding case of the surface contact of electrode with described free layer;
Wherein, the electrode of described free layer and/or described shielding case are the signal output part of described pneumatic transmitter.
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