CN104792744B - THz wave detection means - Google Patents
THz wave detection means Download PDFInfo
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- CN104792744B CN104792744B CN201510185887.0A CN201510185887A CN104792744B CN 104792744 B CN104792744 B CN 104792744B CN 201510185887 A CN201510185887 A CN 201510185887A CN 104792744 B CN104792744 B CN 104792744B
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Abstract
The invention provides a kind of THz wave focusing arrangement, auxiliary detects the composition of the micro liquid in micro-fluidic chip microchannel, including:Light source portion, for common THz wave to be introduced into this focusing arrangement;Focus portion, comprising:Condenser lens and the first wire;Portion to be measured, comprising:Micro-fluidic chip;Recovery portion, comprising:Recovery lens and the second wire for restoring THz wave;And collection portion, for collecting the THz wave being reconditioned, wherein, there is the first annular groove of at least two sub-wavelength dimensions on first wire, spacing between at least two first annular grooves is successively decreased along the direction of propagation of THz wave, there is second wire the direction of propagation of the spacing along THz wave between the second annular groove of the sub-wavelength dimensions corresponding with the quantity of first annular groove, at least two second annular grooves to be incremented by.The THz wave focusing arrangement of the present invention is realized carries out auxiliary detection to micro liquid in the specified single microchannel on micro-fluidic chip.
Description
Technical field
The invention belongs to detection technique field, and in particular to a kind of Terahertz for being used to detect the micro liquid in microchannel
Ripple detection means.
Background technology
THz wave is electromagnetic wave of the frequency in 0.1THz to 10THz scopes, because THz wave has energy low and not
Characteristic, the penetrability due to THz rays and the strong reflection characteristic to metal material such as easily absorbed, and THz high-frequency makes
The resolution ratio that must be imaged is higher, so, hiding article is can be readily seen that, in addition, with reference to THz material identification feature,
The very abundant physics and chemical information on material are accessed using THz wave detectable substance mass-energy, so utilizing Terahertz
Ripple carries out detection to material and had broad application prospects.
In the prior art, for some aqueous materials for quick detection, saving sample usage amount, generally using miniflow
Chip technology is controlled, because micro-fluidic chip can be realized from sample preparation, biological and chemical reaction, separation and the basic behaviour such as detection
Make integration to complete.But, existing spontaneous common THz wave it is with a tight waist too thick, general waist radius is grade
, and the width of microchannel in micro-fluidic chip and depth are typically all micron order, if carried out using common THz wave
Detection, then can cover all passages, it is impossible to realize and only cover a dedicated tunnel, so as to limit THz wave in detection miniflow
Control the application on chip.
The content of the invention
The present invention is carried out to solve above-mentioned problem, it is therefore intended that provide a kind of for detecting micro in microchannel
The THz wave detection means of liquid.
The invention provides a kind of THz wave detection means, aided in using common THz wave in detection microchannel
Micro liquid, it is characterised in that including:Light source portion, for producing THz wave;Focus portion, is located at the light path of THz wave
On, comprising:For the condenser lens and the first wire through the center of condenser lens being focused to THz wave;Treat
Survey portion, comprising:The micro-fluidic chip for the microchannel that THz wave after being focused provided with least one is passed through;Recovery portion, is used for
To being restored through the THz wave after micro-fluidic chip, comprising:Center is corresponding with the center of condenser lens to be used to restore
The recovery lens and the second wire through the center for restoring lens of THz wave;And test section, it is reconditioned for detecting
THz wave, wherein, on the first wire have multiple sub-wavelength dimensions structures first annular groove, at least two first rings
Spacing between shape groove is successively decreased along the direction of propagation of THz wave, and the second wire has corresponding with the quantity of first annular groove
Sub-wavelength dimensions structure the second annular groove, the direction of propagation of the spacing along THz wave between at least two second annular grooves
It is incremented by, THz wave is after condenser lens and the first wire are focused on, and through micro-fluidic chip, then THz wave is by second
Wire and recovery lens are restored, and test section is detected to the THz wave after recovery.
In the THz wave detection means that the present invention is provided, it is possible to have such feature, also include:Location division,
For positioning focus portion, portion to be measured and recovery portion, location division is included:Optical bench and moveable three are fastened on optical bench
Fixture block, wherein, graduation mark is uniformly provided with the side wall of optical bench, focus portion, portion to be measured and recovery portion are separately fixed at three
On fixture block, the position of fixture block is adjusted, the microchannel of micro-fluidic chip is at the waist radius of THz wave minimum.
In the THz wave detection means that the present invention is provided, it can also have the feature that:Wherein, fixture block is included:
Wherein, portion to be measured also includes mounting seat, and mounting seat makes micro-fluidic chip horizontally or vertically be arranged on fixture block.
In the THz wave detection means that the present invention is provided, it can also have the feature that:Wherein, mounting seat is included
The holder of hinge-type.
In the THz wave detection means that the present invention is provided, it can also have the feature that:Wherein, condenser lens and
It is all in hemispherical shape to restore lens, and the solid angle of the centre of sphere opening of condenser lens is provided with the center of condenser lens,
It is provided with restoring the solid angle of the centre of sphere opening of lens in the center for restoring lens.
In the THz wave detection means that the present invention is provided, it can also have the feature that:Wherein, body is also wrapped
Contain:Wherein, focus portion, which is also included, is used for the first support bar and telescopic first sleeve of fixed support condenser lens, first
Sleeve is fixed on fixture block, and first support bar is inserted in the first sleeve, and recovery portion, which also includes to be used to fix to support, restores lens
Second support bar and telescopic second sleeve, second sleeve are fixed on fixture block, in second support bar insertion second sleeve.
The effect of invention and effect
According to THz wave detection means involved in the present invention, because the condenser lens of focus portion is carried out to THz wave
Focus on, and the first annular groove for the sub-wavelength dimensions structure successively decreased by the spacing on the first wire so that THz wave
Realize and efficiently focus on, the THz wave after focusing passes through the micro-fluidic chip in portion to be measured, set the THz wave after focusing on only
A microchannel in covering micro-fluidic chip is so as to realize the transmission detection to fluid in microchannel, then, from micro-fluidic core
The THz wave that piece is passed passes through the incremental sub-wavelength dimensions structure of the spacing restored on lens and the second wire of recovery portion
The second annular groove restore, test section detects to the THz wave after recovery, so, THz wave detection of the invention is filled
Put realization and effective detection is carried out to micro liquid in the single microchannel on micro-fluidic chip.
Brief description of the drawings
Fig. 1 is the structural representation of THz wave detection means in embodiments of the invention;And
Fig. 2 is the flow chart of THz wave detection means in embodiments of the invention.
Case is embodied
In order that technological means, creation characteristic, reached purpose and effect that the present invention is realized are easy to understand, it is real below
Example combination accompanying drawing is applied to be specifically addressed the THz wave detection means of the present invention.
Fig. 1 is the structural representation of THz wave detection means in embodiments of the invention.
As shown in figure 1, in the present embodiment, THz wave detection means 100 is used to examine the fluid in microchannel
Survey, and only can carry out transmission detection in the specified microchannel of covering one.THz wave detection means 100 is included:Light source portion 10,
Focus portion 20, portion to be measured 30, recovery portion 40, location division 50 and test section 60.
Location division 50 is used to position focus portion 20, portion to be measured 30 and recovery portion 40, and location division 50 is included:Optical bench 51, card
Block 52, fixture block 53 and fixture block 54.Fixture block 52, fixture block 53 and fixture block 54 are movably fastened on optical bench 51.Focus portion 20, treat
Survey portion 30 and recovery portion 40 correspond be fixed on fixture block 52, fixture block 53 and fixture block 54 respectively.
Light source portion 10 be used for send THz wave, along the THz wave direction of propagation on focus portion 20 is set respectively, it is to be measured
Portion 30, recovery portion 40 and test section 60.
Focus portion 20 is used to be focused THz wave, reduces the waist radius of THz wave, focus portion 20 is included:
Condenser lens 21, first support bar 22, the first sleeve 23 and the first wire 24.First support bar 22 inserts the first sleeve 23
In, first support bar 22 is used to install condenser lens 21, and the first wire 24 passes through the center of condenser lens 21.
Condenser lens 21 is used for the THz wave that focused light source portion 10 is sent, and condenser lens 21 is in super-hemispherical, wherein poly-
A diameter of 110mm of the big disk of focus lens 21.The big disk of condenser lens 21 is placed towards light source portion 10, focused on saturating
The focal length of mirror 21 is continuously adjustabe in the range of 0.314um to 4.19um, by the curve for changing condenser lens 21
Realize and change focal length.In addition, there is the pyramid type towards the minute surface centre of sphere opening of condenser lens 21 to stand for the center of condenser lens 21
Body angle, i.e., with the direction in Fig. 1 from the point of view of, the opening of the pyramid type solid angle is towards the left side, and the pyramid type cube corner structures can
Auxiliary convergence THz wave so that the waist radius of THz wave further diminishes.In the bottom of condenser lens 21 close to great circle
The screwed hole for being used for being fixedly mounted on fixture block 52 is provided with plane, condenser lens 21 is to use silicon lens in the present embodiment.
First sleeve 23 is fixed on fixture block 52, and first support bar 22 is inserted in the first sleeve 23 and carried out by screw
Fixed, first support bar 22 is provided with the screw matched with the screwed hole of condenser lens 21, condenser lens 21 is passed through
Screw is fixed in first support bar 22, and by adjusting the length of the first sleeve 23 so as to adjust the vertical of condenser lens 21
The position in direction.
Multiple sub-wavelength dimensions knots are etched with the wire 24 of a diameter of 1mm of first wire 24, long 7.5cm, first
The first annular groove of structure, the plurality of first annular groove is closely adjacent to each other and between groove and groove with certain interval, first annular groove
Between spacing successively decrease along THz wave on the direction of propagation of the first wire 24, this structure makes the table of the first wire 24
The surface plasma excimer ripple and THz wave that face is produced produce resonance, so that THz wave to be effectively limited in local model
In enclosing, realize and efficiently focus on.The first wire 24 is copper wire in the present embodiment.
Portion 30 to be measured is located between focus portion 20 and recovery portion 40, and portion 30 to be measured is included:Micro-fluidic chip 31 and mounting seat
32.THz wave after the focusing of focus portion 20 passes through micro-fluidic chip 31.Mounting seat 32 make the level of micro-fluidic chip 31 or
Person places vertically.There are at least two microchannels of bonding inside micro-fluidic chip 31, fluid to be measured is in the microchannel
Flowing.Mounting seat 32 includes holder 32a, 3rd sleeve 32b.3rd sleeve 32b is fixed on fixture block 53, and holder 32a is inserted
Enter in 3rd sleeve 32b and fixed by screw.Holder 32a is hinge-type, is clamped by holder 32a hinge micro-
Fluidic chip 31 is simultaneously fixed by holder 32a trip bolt, and holder 32a can both make micro-fluidic chip 31 vertical
Place, the horizontal positioned of micro-fluidic chip 21 can also be made.
Recovery portion 40 is used to restore the waveform of the THz wave through micro-fluidic chip 31, and recovery portion 40 is included:
Restore lens 41, second support bar 42, the wire 44 of second sleeve 43 and second.Second support bar 42 inserts second sleeve 43
In, second support bar 42, which is used to install, restores lens 41, and the second wire 44 passes through the center for restoring lens 41.Restore lens 41
It is similar to the structure of condenser lens 42, associated description is omitted herein.The big disk backlight portion 10 for restoring lens 41 is put
Put, restoring lens 41 is used to restore the waveform of THz wave.Second sleeve 43 is fixed on fixture block 54, and second support bar 42 is inserted
Enter in second sleeve 43 and be fixed by screw, second support bar 42 is provided with the screwed hole phase with restoring lens 41
The screw matched somebody with somebody, enables recovery lens 41 to be fixed by screws in second support bar 42, and by adjusting second sleeve 43
Length so as to adjust restore lens 41 vertical direction position.
Multiple sub-wavelength dimensions knots are etched with the wire 44 of a diameter of 1mm of second wire 44, long 7.5cm, second
Second annular groove of structure, the plurality of second annular groove be closely adjacent to each other and the spacing between the second annular groove along THz wave
It is incremented by the direction of propagation of two wires 44, the second wire 44 produces surface plasmons when propagating THz wave and strengthened
The recovery of THz wave.The second wire 44 is copper wire in the present embodiment.
Graduation mark is uniformly provided with the side wall of the optical bench 51 of location division 50.Fixture block 52, fixture block 53 and fixture block 54 are distinguished
With mark pointer 52a, mark pointer 53a, mark pointer 54a.By adjust the position of fixture block 52, fixture block 53 and fixture block 54 from
And adjust condenser lens 21, micro-fluidic chip 31 and restore the distance between lens 41, make the microchannel of micro-fluidic chip 41 firm
Benefit realizes that THz wave passes through the microchannel specified at the waist radius minimum of the THz wave after focusing.In addition, passing through
The position that the graduation mark of mark pointer 52a, mark pointer 53a, mark pointer 54a on the side wall of optical bench 51 is pointed out, can essence
Really read condenser lens 21, micro-fluidic chip 31 and restore the distance between lens 41 relation, consequently facilitating regulation THz wave
Waist radius size.
Test section 60 is used for the THz wave for detecting the recovery after recovery portion 40, and the THz wave have passed through micro-fluidic
In chip 31 after the fluid of microchannel, 60 pairs of THz waves of test section carry out detection to be believed so as to obtain the physics and chemistry of fluid
Breath, in the present embodiment, test section 60 are terahertz time-domain system.
Fig. 2 is the flow chart of THz wave detection means in embodiments of the invention.
As shown in Fig. 2 the detection fluid of THz wave detection means 100 of the present embodiment, is comprised the following steps that:
Step S1, light source portion 10 sends THz wave, subsequently into step S2.
Step S2, focus portion 20 is focused to THz wave, is first adjusted condenser lens 21, micro-fluidic chip 31 and is restored
The distance between lens 41, make the microchannel of micro-fluidic chip 31 be at the waist radius of the THz wave after focusing on minimum,
Subsequently into step S3.
Step S3, the THz wave after focusing passes through the liquid that microchannel is specified in micro-fluidic chip 31, subsequently into step
Rapid S4.
Step S4,40 pairs of THz waves through micro-fluidic chip 31 of recovery portion restore, and THz wave passes through second
First trial waveform is restored to after wire 44 and recovery lens 41, the THz wave after recovery being capable of connecing by terahertz time-domain system
Receive device to receive, subsequently into step S5.
Step S5, the THz wave after 60 pairs of recoveries with sample message of test section is collected, the terahertz being collected into
Hereby wave energy is enough is received by the receiver of terahertz time-domain system, terahertz time-domain system by analyze pump light and detection light it
Between time difference, realize in micro-fluidic chip specify microchannel micro liquid detection, obtain the liquid physics and
Chemical information, subsequently into done state.
The waist radius of the THz wave focused on by focus portion 20 can reach micron order, so that THz wave only covers
One specified microchannel of lid, realizes that THz wave is used for the detection of micro-fluidic chip 31.
The effect of embodiment and effect
THz wave detection means according to involved by the present embodiment, because the condenser lens degree THz wave of focus portion enters
Line focusing, and the first annular groove for the sub-wavelength dimensions structure successively decreased by the spacing on the first wire so that Terahertz
Ripple realizes efficient focusing, and the THz wave after focusing passes through the micro-fluidic chip in portion to be measured, sets the THz wave after focusing on
Only a microchannel in covering micro-fluidic chip is so as to realizing the detection to micro liquid in microchannel, then, from micro-fluidic
The THz wave that chip is passed is answered by the second incremental annular groove of the spacing restored on lens and the second wire of recovery portion
Original, test section detects that therefore, the THz wave detection means of the present embodiment is realized to miniflow to the THz wave after recovery
Control fluid in the single microchannel on chip and carry out effective detection.
In the present embodiment, because condenser lens, micro-fluidic chip and recovery lens can be adjusted on optical bench, because
This, the present embodiment more easily can be focused to THz wave, and make it that the microchannel of micro-fluidic chip is in terahertz
Hereby at the waist radius minimum of ripple.
In the present embodiment, because the holder in portion to be measured can fix micro-fluidic chip in horizontal or vertical direction, because
This, the present embodiment is more easily detected to micro liquid sample in micro-fluidic chip.
In the present embodiment, because condenser lens and recovery lens have pyramid type solid angle, therefore, gather in the present embodiment
The pyramid type solid angle auxiliary convergence THz wave of focus lens, the pyramid type solid angle auxiliary for restoring lens restores THz wave ripple
Shape.
Above-mentioned embodiment is the preferred case of the present invention, is not intended to limit protection scope of the present invention.
The present invention can detect the micro liquid in portion to be measured, can also detect other materials, such as minimum gas.
Claims (6)
1. a kind of THz wave detection means, aids in detecting the micro liquid in microchannel using common THz wave, its
It is characterised by, including:
Light source portion, for producing the THz wave;
In focus portion, the light path for being located at the THz wave, comprising:Focusing for being focused to the THz wave is saturating
Mirror and the first wire through the center of the condenser lens;
Portion to be measured, comprising:The micro-fluidic core for the microchannel that the THz wave after being focused provided with least one is passed through
Piece;
Recovery portion, for being restored through the THz wave after the micro-fluidic chip, comprising:Gather with described at center
The centers of focus lens is corresponding be used to restoring the THz wave restore lens and through the center of the recovery lens the
Two wires;And
Test section, for detecting the THz wave being reconditioned,
Wherein, there is the first annular groove of multiple sub-wavelength dimensions structures on first wire, it is multiple described first annular
The direction of propagation of the spacing along the THz wave between groove is successively decreased,
Second wire has the second annular of the sub-wavelength dimensions structure corresponding with the quantity of the first annular groove
The direction of propagation of the spacing along the THz wave between groove, multiple second annular grooves is incremented by,
The THz wave is after the condenser lens and first wire are focused on, through the micro-fluidic chip, so
The THz wave is restored by second wire and the recovery lens afterwards, and the test section is to the terahertz after recovery
Hereby ripple is detected.
2. THz wave detection means according to claim 1, it is characterised in that also include:
Location division, for positioning the focus portion, the portion to be measured and the recovery portion, the location division is included:Optical bench,
And it is fastened on moveable three fixture blocks on the optical bench,
Wherein, graduation mark is uniformly provided with the side wall of the optical bench,
The focus portion, the portion to be measured and the recovery portion are separately fixed on three fixture blocks,
The position of the fixture block is adjusted, the microchannel of the micro-fluidic chip is in the waist radius minimum of the THz wave
Place.
3. THz wave detection means according to claim 2, it is characterised in that:
Wherein, the portion to be measured also includes mounting seat, and the mounting seat makes the micro-fluidic chip horizontally or vertically be arranged on
On the fixture block.
4. THz wave detection means according to claim 3, it is characterised in that:
Wherein, the mounting seat includes the holder of hinge-type.
5. THz wave detection means according to claim 1, it is characterised in that:
Wherein, the condenser lens and the recovery lens are all in hemispherical shape,
The solid angle of the centre of sphere opening of the condenser lens is provided with the center of the condenser lens,
The solid angle of the centre of sphere opening of the recovery lens is provided with the center of the recovery lens.
6. THz wave detection means according to claim 2, it is characterised in that:
Wherein, the focus portion, which is also included, is used for the first support bar and telescopic first of the fixed support condenser lens
Sleeve,
First sleeve is fixed on the fixture block, and the first support bar is inserted in first sleeve,
The recovery portion, which is also included, is used for the fixed support second support bar and telescopic second sleeve for restoring lens,
The second sleeve is fixed on the fixture block, and the second support bar is inserted in the second sleeve.
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CN106645015A (en) * | 2016-11-16 | 2017-05-10 | 上海理工大学 | TeraHertz wave super-resolution imaging system and method based on metal micro-nano structure |
CN113528343B (en) * | 2021-07-19 | 2022-08-02 | 中国科学院重庆绿色智能技术研究院 | Adherent cell culture device for terahertz wave irradiation |
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