CN104777330A - Single-island multi-electrode quartz accelerometer - Google Patents

Abstract

The single-island multi-electrode quartz accelerometer of the invention belongs to the field of linear acceleration measurement using multi-electrode quartz force-sensitive resonators as sensitive core components. This kind of accelerometer acts the inertial force generated during the accelerated motion to the multi-electrode quartz force-sensitive resonator, and obtains the corresponding acceleration to be measured by detecting the variation of the resonant frequency of the resonator. This accelerometer consists of a base, a casing, a circuit board, sensitive components and an aviation socket. The base and the shell form a closed cavity, the sensitive element is mounted on the base, the circuit board is mounted on the sensitive element, and the socket is mounted on the shell. The single-island base of the sensitive element and the sealing cover are closely matched to form a sealed cavity. The two central single-islands in the cavity are equipped with multi-electrode quartz force-sensitive resonators. The single-island base and the central single-island are processed in one piece. The single-island Set screws are mounted on the base. The accelerometer has a measurement range of 10 ^-4 g to 10 ² g and can be used in detection and control systems for aircraft, vehicles, and ships.

Description

Single Island Multi-Electrode Quartz Accelerometer

technical field

The single-island multi-electrode quartz accelerometer of the invention belongs to the field of linear acceleration measurement using a multi-electrode quartz force-sensitive resonator as a sensitive core element. This kind of accelerometer consists of a base, a shell, a circuit board, a sensitive element and a socket, and can be used in detection and control systems for aircraft, vehicles, ships, and industrial automation fields.

Background technique

Quartz crystal has good physical and chemical stability, and its piezoelectric effect has been widely used in force and stress detection, especially in the field of digital detection and control. people's constant attention. For example, the piezoelectric effect of quartz crystals is applied to acceleration detection. The strategic-grade quartz accelerometer developed by Kearfott Company of the United States uses double masses and double resonators. The headquarters and Allied Singal Aerospace Instunment System Company adopt a high-acceleration high-performance quartz crystal accelerometer with double mass and frequency differential structure, with a measuring range of 1200g and a proportionality factor of 1.1Hz/g. US Patent No. 5,578,755 and US Patent No. 5,962,786 all disclose solutions of quartz accelerometers with different structures. The quartz accelerometer (VIA) developed by the French National Aerospace Research Corporation (ONERA) with a vibrating beam structure has been used for attitude control of tactical missiles. These quartz accelerometers are generally complex in structure.

Contents of the invention

The purpose of the present invention is to solve the influence of temperature and other environmental factors on the performance of the accelerometer in the application process of the quartz accelerometer, and provide a single-island multi-electrode quartz accelerometer with high stability, strong anti-interference ability and simple structure.

The invention discloses a single-island multi-electrode quartz accelerometer, which is composed of a base, a shell, a circuit board, a sensitive element and a socket. The supporting base and the shell are assembled into a cavity by screws. The sensitive components for detection are installed on the base with screws. The circuit board is fastened to the sensitive components by the circuit board support studs and connecting screws. Installed on the shell, the power supply and signal enter and exit from the aviation socket through the cable. Its characteristics are: (1) the sensitive element is composed of a single-island base, a central single-island, a limit screw, a multi-electrode quartz force sensitive resonator and a sealing cover; (2) the single-island base and the sealing cover are fastened by screws The sealed cavity, the single-island base and the central single-island are processed in one piece; (3) The force-sensitive resonator as the core component is a multi-electrode quartz crystal force-sensitive resonator, and the number of electrode pairs is two or more .

Description of drawings

Figure 1 Structural cross-sectional view of single-island multi-electrode quartz accelerometer

1-Base 2-Shell

3-Sensitive components 4-Aerial socket

5-circuit board 6-circuit board support studs (4 in total)

7-circuit board screws (4 in total) 8-socket screws (4 in total)

9-shell screws (4 in total) 10-base screws (2 in total)

Figure 2 Schematic diagram of the structure of the sensitive element

11-Single island base 12-1, 12-2-Limit screw

13-1, 13-2-multi-electrode force sensitive resonator 14-central single island

15-1, 15-2 (not shown) - set screw 16 - sealing cover

17 - sealing screw (total 8)

Figure 3 Schematic diagram of the base of the single island and the structure of the central single island

11-Single-island base         11-1, 11-2-Single-island base resonator support platform

11-3, 11-4-limit nut holes 11-5-electrode lead holes (4 in total)

11-6- Mounting nut holes (2 in total) 11-7- Lead groove

11-8-Sealing cover set nut hole 14-Central single island

14-1-flexible connection 14-2, 14-3-central single-island resonator support platform

14-4-Inertial mass block

Figure 4 Schematic diagram of the structure of the sealing cover

16-Sealing cover 16-1-Sealing countersunk screw holes (total 8)

16-2-Board mounting nut holes (total 4)

Implementation

The single-island multi-electrode quartz accelerometer of the present invention is described below in conjunction with the accompanying drawings.

The structure of the single-island multi-electrode quartz accelerometer is shown in Figure 1. It consists of a supporting base 1 and a housing 2 that are tightly fitted with screws 9 to form a cavity. Sensitive elements 3 for detection are installed on the base 1 with screws 10. , the circuit board 5 is supported by the circuit board stud 6, and is fastened on the sensitive element 3 by the circuit board screw 7, the aviation socket 4 is installed on the shell 2 by the socket screw 8, and the power supply and signal are entered and exited from the aviation socket 4 by the cable; The structure of the sensitive element 3 is shown in Figure 2, it consists of a single-island base 11, a central single-island 14, two limit screws 12-1 and 12-2, two multi-electrode force-sensitive resonators 13-1 and 13 -2. The sealing cover 16 is formed.

The single-island base 11 and sealing cover 16 of the sensitive element 3 are fastened by sealing screws 17 to form a sealed cavity. There is a central single-island 14 in the cavity. The single-island base 11 and the central single-island 14 are integrally processed, and the structure is as follows: As shown in Figure 3, the central single island 14 divides the cavity of the sensitive element into two symmetrical left and right small cavities, and two multi-electrode force-sensitive resonators 13-1 and 13-2 are symmetrically embedded on both sides of the central single island 14. In the two small cavities on the side, one side of the multi-electrode force sensitive resonator 13-1 or 13-2 is welded to the support platform 14-2 or 14-3 in the middle of the central single island 14, and the other side is welded to the single island base 11 The support platform 11-1 or 11-2 in the middle is welded, and limit screws 12-1 and 12-2 are placed at the corresponding positions of the left and right ends of the upper part of the single island base 11 and the inertial mass block 14-4 on the upper part of the central single island 14 , the limit screws 12-1 and 12-2 are installed in the limit nut holes 11-3 and 11-4 corresponding to the top of the single island base 11, and set screws 15-1 and 15-2 (not shown ) tight.

The single-island base 11 and the central single-island 14 of the sensitive element 3 shown in Fig. 2, its structure is as shown in Fig. The connection 14-1 with the single-island base 11 is a flexible connection, and the left and right sides of the middle of the central single-island 14 have symmetrical support platforms 14-2 and 14-2 embedded with multi-electrode force-sensitive resonators 13-1 and 13-2. 3. The upper part of the central single island 14 is an inertial mass block 14-4; the bottom of the single island base 11 has electrode lead holes 11-5 (4 in total), mounting nut holes 11-6 (2 in total), and lead grooves 11-7, there are symmetrical support platforms 11-1 and 11-2 inlaid with multi-electrode force-sensitive resonators 13-1 or 13-2 on the left and right sides of the middle part of the single-island base 11, and the left and right sides of the upper part of the single-island base 11 There are nut holes 11-3 and 11-4 for installing limit screws 12-1 or 12-2 on the side, and there are set nut holes 11-8 for installing sealing cover 16 on the left and right sides of the single island base 11 (total 8 indivual).

The multi-electrode force-sensitive resonator 13-1 or 13-2 of the sensitive element 3 shown in Fig. 2, its substrate is a quartz crystal disc, and the number of electrode pairs on the same substrate is two pairs or more than two pairs. The distribution of positions on the substrate can be symmetrical or asymmetrical; in this embodiment, a quartz force sensitive resonator with three pairs of electrodes is shown.

The sealing cover 16 of sensitive element 3 shown in Fig. 2, its structure as shown in Figure 4, there are countersunk screw holes 16-1 (8 in total) that are used for installing sealing screw at two of sealing cover 16, in four There are support mounting nut holes 16-2 (total 4) for installing circuit board support columns 6 near the corners.

The single-island multi-electrode quartz accelerometer of the invention has a resolution of less than 10 ^-4 g, a non-linearity of less than 0.1%, a measurement range of 10 ^-4 g to 10 ² g, and has the advantages of simple structure, digital output and high reliability. The accelerometer can be used in detection and control systems of aircraft, vehicles, ships, industrial automation, etc.

Claims (4)

1. a Zhong Dan island multi-electrode quartz accelerometer, to be closely cooperated by screw (9) by passive base (1) and shell (2) and be assembled into cavity, the sensitive element (3) detected is arranged on base (1) with screw (10), circuit board (5) is supported by board support stud (6), and be anchored on sensitive element (3) by circuit board screw (7), aviation socket (4) is arranged on shell (2) by screw (8), and power supply and signal are passed in and out from aviation socket (4) by cable; Sensitive element (3) is made up of single island pedestal (11), central single island (14), stop screw (12-1,12-2), the quick resonator of multi-electrode power (13-1,13-2) and seal closure (16).

2. single island multi-electrode quartz accelerometer described in claim 1, the architectural feature of its sensitive element (3) is: single island pedestal (11) and seal closure (16) form seal chamber by sealing screw (17) is fastening, central single island (14) and two quick resonators of multi-electrode power (13-1) are had in cavity, (13-2), single island pedestal (11) and central authorities' list island (14) are by integrally processing, the cavity of sensitive element is divided into the symmetrical little cavity in two, left and right by central authorities single island (14), two quick resonators of multi-electrode power (13-1), (13-2) be embedded in symmetrically in two little cavitys of central single island (14) both sides, the quick resonator of multi-electrode power (13-1) or (13-2) while weld with the support platform (14-2) at central authorities single island (14) middle parts or (14-3), another side welds with the support platform (11-1) in the middle part of single island pedestal (11) or (11-2), the two ends, left and right limited location screw (12-1) on single pedestal (11) top, island, (12-2), stop screw (12-1), (12-2) the stop nut hole (11-3) that pedestal (11) top, single island is corresponding is embedded in, (11-4) in, and by holding screw (15-1), (15-2) (not shown) tightening.

3. single island multi-electrode quartz accelerometer described in claim 1, single island pedestal (11) of its sensitive element (3) and the architectural feature on central single island (14) are: single island pedestal (11) and central authorities' list island (14) are by integrally processing, the bottom of central authorities single island (14) and the junction (14-1) on single island pedestal (11) are for flexibly connecting, there are the symmetric support platform (14-2) and (14-3) of inlaying the quick resonator of multi-electrode power (13-1) or (13-2) in the left and right sides, middle part of central authorities single island (14), the top of central authorities single island (14) is inertial mass (14-4), electrode lead hole (11-5) (totally 4) is arranged at the bottom of single island pedestal (11), mounting nuts hole (11-6) (totally 2), wire lead slot (11-7), there are the symmetric support platform (11-1) and (11-2) of inlaying the quick resonator of multi-electrode power (13-1) or (13-2) in the left and right sides, middle part of single island pedestal (11), there are stop nut hole (11-3) and (11-4) of mounting limit screw (12-1) or (12-2) in the left and right sides, top of single island pedestal (11), there is the locknut hole (11-8) (totally 8) of installation seal closure (16) left and right sides of single island pedestal (11).

4. single island multi-electrode quartz accelerometer described in claim 1, the quick resonator of multi-electrode power (13-1) of its sensitive element (3) or the architectural feature of (13-2) are: the substrate of the quick resonator of multi-electrode power (13-1,13-2) is quartz crystal circle sheet, same on-chip electrode logarithm is two pairs or more, and electrode position can be symmetrical or asymmetric distribution in on-chip distribution.