CN104777330A - Single-island multi-electrode quartz accelerometer - Google Patents
Single-island multi-electrode quartz accelerometer Download PDFInfo
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- CN104777330A CN104777330A CN201410014008.3A CN201410014008A CN104777330A CN 104777330 A CN104777330 A CN 104777330A CN 201410014008 A CN201410014008 A CN 201410014008A CN 104777330 A CN104777330 A CN 104777330A
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Abstract
A single-island multi-electrode quartz accelerometer of the invention belongs to the field of linear acceleration measurement by using a multi-electrode quartz force-sensitive resonator as a sensitive core component. The accelerometer acts the inertial force generated during accelerated movement on the multi-electrode quartz force-sensitive resonator, and detects the amount of change of the resonant frequency of the resonator to obtain a corresponding acceleration to be detected. The accelerometer is composed of a base, a shell, a circuit board, a sensitive element, and an aerial socket. The base and the shell constitute a closed cavity, the sensitive element is mounted on the base, the circuit board is mounted on the sensitive element, and the socket is mounted on the shell. A single-island base and a sealing cover of the sensitive element are matched to form a sealed cavity, multi-electrode quartz force-sensitive resonators are installed at the two sides of a central single island in the cavity, the single-island base and the central single island are integrally machined, and the single-island base is equipped with limiting screws. The measuring range of the accelerometer is from 10<-4>g to 10<2>g. The accelerometer can be used in detection control systems of aircrafts, vehicles, ships, and the like.
Description
Technical field
List island of the present invention multi-electrode quartz accelerometer belongs to the field utilizing the quick resonator of multi-electrode quartz power to carry out linear acceleration measurement as sensitive core element.This accelerometer is made up of base, shell, circuit board, sensitive element and socket, can be used for the detecting and controlling system of aircraft, vehicle, naval vessel, industrial automation etc.
Background technology
Quartz crystal has good physics, chemical stability, its piezoelectric effect had is widely used in power, stress mornitoring, particularly in digital detection control field, quartz element receives the lasting concern of people always because it has stronger advantage.Such as, the piezoelectric effect of quartz crystal is being applied in acceleration detection, the strategic level quartz accelerometer energy sensitivity that Kearfott company of the U.S. adopts double quality blocks and double resonator to develop goes out the Gravity changer because Yue Qiu sun tidal fluctuations causes, U.S.Army Missile Command and Allied Singal Aerospace Instunment System company adopt the high acceleration high-performance quartz crystal accelerometer of two quality, frequency difference structure, measurement range 1200g, scale-up factor 1.1Hz/g.United States Patent (USP) 5578755 and United States Patent (USP) 5962786 etc. all disclose the quartz accelerometer scheme of different structure.National Aerospace research company of France (ONERA) adopts the quartz accelerometer (VIA) of girder construction development of shaking, for the gesture stability of tactical missile.These quartz accelerometers are structurally general complicated.
Summary of the invention
To the object of the invention is in the application process in order to solve quartz accelerometer the environmental factor such as temperature to the impact of accelerometer performance, providing that a kind of stability is high, antijamming capability is strong, structure simple single island multi-electrode quartz accelerometer.
A kind of single island of the present invention multi-electrode quartz accelerometer, this accelerometer is made up of base, shell, circuit board, sensitive element and socket.Passive base and shell are closely cooperated by screw and are assembled into cavity, the sensitive element screw detected is arranged on base, circuit board is anchored on sensitive element by board support stud and attachment screw, aviation socket is arranged on shell by screw, and power supply and signal are passed in and out from aviation socket by cable.It is characterized in that: (one) sensitive element is made up of single island pedestal, central single island, stop screw, the quick resonator of multi-electrode quartz power and seal closure; (2) single island pedestal and seal closure form seal chamber by screw fastening, and single island pedestal and central single island are by integrally processing; (3) the quick resonator of power as core parts is the quick resonator of multi-electrode quartz crystal power, and its electrode logarithm is two pairs or more.
Accompanying drawing explanation
Tu1Dan island multi-electrode quartz arrangements of accelerometers cut-open view
1-base 2-shell
3-sensitive element 4-aviation socket
5-circuit board 6-board support stud (totally 4)
7-circuit board screw (totally 4) 8-socket screws (totally 4)
9-casing screws (totally 4) 10-base screw (totally 2)
Fig. 2 sensitive element structural representation
11-mono-island pedestal 12-1,12-2-stop screw
The single island of 13-1,13-2-multi-electrode power quick resonator 14-central authorities
15-1,15-2 (not shown)-holding screw 16-seal closure
17-sealing screw (totally 8)
Tu3Dan island pedestal and central single island structure schematic diagram
Pedestal 11-1,11-2-mono-island, 11-mono-island pedestal resonator support platform
11-3,11-4-stop nut hole 11-5-electrode lead hole (totally 4)
11-6-mounting nuts hole (totally 2) 11-7-wire lead slot
The single island of 11-8-seal closure locknut hole 14-central authorities
14-1-flexibly connects 14-2,14-3-central authorities single island resonator support platform
14-4-inertial mass
Fig. 4 seal closure structural representation
16-seal closure 16-1-seals countersunk screw hole (totally 8)
16-2-circuit board mounting nuts hole (totally 4)
Embodiment
Below in conjunction with accompanying drawing, following describing is done to list island of the present invention multi-electrode quartz accelerometer.
The structure of single island multi-electrode quartz accelerometer as shown in Figure 1, it to be closely cooperated by screw 9 by passive base 1 and shell 2 and is assembled into cavity, the sensitive element 3 detected is arranged on base 1 with screw 10, circuit board 5 is supported by circuit board stud 6, and be anchored on sensitive element 3 by circuit board screw 7, aviation socket 4 is arranged on shell 2 by socket screws 8, and power supply and signal are passed in and out from aviation socket 4 by cable; As shown in Figure 2, it is made up of single island pedestal 11, central 14, two stop screw 12-1 and 12-2 in single island, two quick resonator 13-1 and 13-2 of multi-electrode power, seal closures 16 structure of sensitive element 3.
Single island pedestal 11 of sensitive element 3 and seal closure 16 form seal chamber by sealing screw 17 is fastening, central single island 14 is had in cavity, single island pedestal 11 and central authorities' list island 14 are by integrally processing, structure as shown in Figure 3, the cavity of sensitive element is divided into the symmetrical little cavity in two, left and right by the single island 14 of central authorities, two the quick resonator of multi-electrode power 13-1 and 13-2 are embedded in two little cavitys of both sides, central single island 14 symmetrically, the quick resonator of multi-electrode power 13-1's or 13-2 while weld with the support platform 14-2 in the middle part of central authorities single islands 14 or 14-3, another side welds with the support platform 11-1 in the middle part of single island pedestal 11 or 11-2, at inertial mass 14-4 corresponding position limited location screw 12-1 and 12-2 on the single top, island 14 in two ends, left and right and central authorities on pedestal 11 top, single island, stop screw 12-1 and 12-2 is arranged in stop nut hole 11-3 and 11-4 corresponding to pedestal 11 top, single island, and by holding screw 15-1 and the tightening of 15-2 (not shown).
Single island pedestal 11 of the sensitive element 3 shown in Fig. 2 and central single island 14, its structure as shown in Figure 3, single island pedestal 11 and central authorities' list island 14 are by integrally processing, the bottom on the single island 14 of central authorities and the junction 14-1 of single island pedestal 11 are for flexibly connecting, there is symmetric support platform 14-2 and 14-3 inlaying quick resonator 13-1 and 13-2 of multi-electrode power the left and right sides, middle part on the single island 14 of central authorities, and the top on central single island 14 is inertial mass 14-4; Electrode lead hole 11-5 (totally 4), mounting nuts hole 11-6 (totally 2), wire lead slot 11-7 are arranged at the bottom of single island pedestal 11, there is symmetric support platform 11-1 and 11-2 inlaying quick resonator 13-1 or 13-2 of multi-electrode power the left and right sides, middle part of single island pedestal 11, there are nut bore 11-3 and the 11-4 of mounting limit screw 12-1 or 12-2 in the left and right sides, top of single island pedestal 11, and there is the locknut hole 11-8 (totally 8) for installing seal closure 16 left and right sides of single island pedestal 11.
Quick resonator 13-1 or 13-2 of multi-electrode power of the sensitive element 3 shown in Fig. 2, its substrate is quartz crystal circle sheet, same on-chip electrode logarithm is two pairs or more, and electrode position can be symmetrical or asymmetric distribution in on-chip distribution; It is the quick resonator of Quartz Force of three pairs of electrodes shown in the present embodiment.
The seal closure 16 of the sensitive element 3 shown in Fig. 2, its structure as shown in Figure 4, there is the countersunk screw hole 16-1 (totally 8) for installing sealing screw two of seal closure 16, having the support mounting nuts hole 16-2 (totally 4) for mounting circuit boards support column 6 at four adjacent corners.
List island multi-electrode quartz accelerometer resolution < 10 of the present invention
-4g, nonlinearity < 0.1%, measurement range is 10
-4g ~ 10
2g, have structure simple, numeral exports, high reliability.This accelerometer can be used for the detecting and controlling system of aircraft, vehicle, naval vessel, industrial automation etc.
Claims (4)
1. a Zhong Dan island multi-electrode quartz accelerometer, to be closely cooperated by screw (9) by passive base (1) and shell (2) and be assembled into cavity, the sensitive element (3) detected is arranged on base (1) with screw (10), circuit board (5) is supported by board support stud (6), and be anchored on sensitive element (3) by circuit board screw (7), aviation socket (4) is arranged on shell (2) by screw (8), and power supply and signal are passed in and out from aviation socket (4) by cable; Sensitive element (3) is made up of single island pedestal (11), central single island (14), stop screw (12-1,12-2), the quick resonator of multi-electrode power (13-1,13-2) and seal closure (16).
2. single island multi-electrode quartz accelerometer described in claim 1, the architectural feature of its sensitive element (3) is: single island pedestal (11) and seal closure (16) form seal chamber by sealing screw (17) is fastening, central single island (14) and two quick resonators of multi-electrode power (13-1) are had in cavity, (13-2), single island pedestal (11) and central authorities' list island (14) are by integrally processing, the cavity of sensitive element is divided into the symmetrical little cavity in two, left and right by central authorities single island (14), two quick resonators of multi-electrode power (13-1), (13-2) be embedded in symmetrically in two little cavitys of central single island (14) both sides, the quick resonator of multi-electrode power (13-1) or (13-2) while weld with the support platform (14-2) at central authorities single island (14) middle parts or (14-3), another side welds with the support platform (11-1) in the middle part of single island pedestal (11) or (11-2), the two ends, left and right limited location screw (12-1) on single pedestal (11) top, island, (12-2), stop screw (12-1), (12-2) the stop nut hole (11-3) that pedestal (11) top, single island is corresponding is embedded in, (11-4) in, and by holding screw (15-1), (15-2) (not shown) tightening.
3. single island multi-electrode quartz accelerometer described in claim 1, single island pedestal (11) of its sensitive element (3) and the architectural feature on central single island (14) are: single island pedestal (11) and central authorities' list island (14) are by integrally processing, the bottom of central authorities single island (14) and the junction (14-1) on single island pedestal (11) are for flexibly connecting, there are the symmetric support platform (14-2) and (14-3) of inlaying the quick resonator of multi-electrode power (13-1) or (13-2) in the left and right sides, middle part of central authorities single island (14), the top of central authorities single island (14) is inertial mass (14-4), electrode lead hole (11-5) (totally 4) is arranged at the bottom of single island pedestal (11), mounting nuts hole (11-6) (totally 2), wire lead slot (11-7), there are the symmetric support platform (11-1) and (11-2) of inlaying the quick resonator of multi-electrode power (13-1) or (13-2) in the left and right sides, middle part of single island pedestal (11), there are stop nut hole (11-3) and (11-4) of mounting limit screw (12-1) or (12-2) in the left and right sides, top of single island pedestal (11), there is the locknut hole (11-8) (totally 8) of installation seal closure (16) left and right sides of single island pedestal (11).
4. single island multi-electrode quartz accelerometer described in claim 1, the quick resonator of multi-electrode power (13-1) of its sensitive element (3) or the architectural feature of (13-2) are: the substrate of the quick resonator of multi-electrode power (13-1,13-2) is quartz crystal circle sheet, same on-chip electrode logarithm is two pairs or more, and electrode position can be symmetrical or asymmetric distribution in on-chip distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410014008.3A CN104777330B (en) | 2014-01-14 | 2014-01-14 | Single island multi-electrode quartz accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410014008.3A CN104777330B (en) | 2014-01-14 | 2014-01-14 | Single island multi-electrode quartz accelerometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104777330A true CN104777330A (en) | 2015-07-15 |
| CN104777330B CN104777330B (en) | 2018-04-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410014008.3A Expired - Fee Related CN104777330B (en) | 2014-01-14 | 2014-01-14 | Single island multi-electrode quartz accelerometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110441550A (en) * | 2019-09-06 | 2019-11-12 | 北京信息科技大学 | A kind of embedded 12 electrode quartz accelerometer of circuit |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3569749A (en) * | 1968-11-06 | 1971-03-09 | List Hans | Piezoelectric accelerometer with an internal spherical bearing |
| CN101082630A (en) * | 2007-07-09 | 2007-12-05 | 北京信息工程学院 | Novel piezoelectric quartz accelerameter |
| CN101082487A (en) * | 2007-07-09 | 2007-12-05 | 北京信息工程学院 | Novel piezoelectric quartz horizontal attitude sensor |
-
2014
- 2014-01-14 CN CN201410014008.3A patent/CN104777330B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3569749A (en) * | 1968-11-06 | 1971-03-09 | List Hans | Piezoelectric accelerometer with an internal spherical bearing |
| CN101082630A (en) * | 2007-07-09 | 2007-12-05 | 北京信息工程学院 | Novel piezoelectric quartz accelerameter |
| CN101082487A (en) * | 2007-07-09 | 2007-12-05 | 北京信息工程学院 | Novel piezoelectric quartz horizontal attitude sensor |
Non-Patent Citations (1)
| Title |
|---|
| 鄂然: "单基多电极式石英加速度计的研究", 《万方数据库》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110441550A (en) * | 2019-09-06 | 2019-11-12 | 北京信息科技大学 | A kind of embedded 12 electrode quartz accelerometer of circuit |
| CN110441550B (en) * | 2019-09-06 | 2024-06-25 | 北京信息科技大学 | Circuit embedded 12-electrode quartz accelerometer |
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| Publication number | Publication date |
|---|---|
| CN104777330B (en) | 2018-04-10 |
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Granted publication date: 20180410 Termination date: 20190114 |