CN104777330A - Single-island multi-electrode quartz accelerometer - Google Patents

Single-island multi-electrode quartz accelerometer Download PDF

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CN104777330A
CN104777330A CN201410014008.3A CN201410014008A CN104777330A CN 104777330 A CN104777330 A CN 104777330A CN 201410014008 A CN201410014008 A CN 201410014008A CN 104777330 A CN104777330 A CN 104777330A
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island
single island
electrode
pedestal
screw
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CN104777330B (en
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田文杰
朴林华
朱嘉林
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Beijing Information Science and Technology University
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Abstract

本发明单岛多电极石英加速度计属于利用多电极石英力敏谐振器为敏感核心元件进行线加速度测量的领域。这种加速度计将加速运动时所产生的惯性力作用到多电极石英力敏谐振器,通过检测谐振器谐振频率的变化量得到对应的待测加速度。这种加速度计由底座、外壳、电路板、敏感元件及航空插座组成。底座与外壳构成密闭腔体,敏感元件安装在底座上,电路板安装在敏感元件上,插座安装在外壳上。敏感元件的单岛基座和密封罩紧密配合构成密封腔体,腔体内中央单岛的两则安装多电极石英力敏谐振器,单岛基座及中央单岛由一体加工而成,单岛基座上装有限位螺钉。该加速度计测量范围为10-4g~102g,可用于飞行器、车辆、舰船等的检测控制系统。

The single-island multi-electrode quartz accelerometer of the invention belongs to the field of linear acceleration measurement using multi-electrode quartz force-sensitive resonators as sensitive core components. This kind of accelerometer acts the inertial force generated during the accelerated motion to the multi-electrode quartz force-sensitive resonator, and obtains the corresponding acceleration to be measured by detecting the variation of the resonant frequency of the resonator. This accelerometer consists of a base, a casing, a circuit board, sensitive components and an aviation socket. The base and the shell form a closed cavity, the sensitive element is mounted on the base, the circuit board is mounted on the sensitive element, and the socket is mounted on the shell. The single-island base of the sensitive element and the sealing cover are closely matched to form a sealed cavity. The two central single-islands in the cavity are equipped with multi-electrode quartz force-sensitive resonators. The single-island base and the central single-island are processed in one piece. The single-island Set screws are mounted on the base. The accelerometer has a measurement range of 10 -4 g to 10 2 g and can be used in detection and control systems for aircraft, vehicles, and ships.

Description

单岛多电极石英加速度计Single Island Multi-Electrode Quartz Accelerometer

技术领域technical field

本发明单岛多电极石英加速度计属于利用多电极石英力敏谐振器作为敏感核心元件进行线加速度测量的领域。这种加速度计由底座、外壳、电路板、敏感元件及插座组成,可用于飞行器、车辆、舰船、工业自动化领域等的检测控制系统。The single-island multi-electrode quartz accelerometer of the invention belongs to the field of linear acceleration measurement using a multi-electrode quartz force-sensitive resonator as a sensitive core element. This kind of accelerometer consists of a base, a shell, a circuit board, a sensitive element and a socket, and can be used in detection and control systems for aircraft, vehicles, ships, and industrial automation fields.

背景技术Background technique

石英晶体有良好的物理、化学稳定性,其具有的压电效应在力、应力检测方面得到了广泛的应用,特别是在数字式检测控制领域,石英元件因其具有较强的优势而一直受到人们的持久关注。例如,石英晶体的压电效应在应用到加速度检测方面,美国Kearfott公司采用双质量块和双谐振器研制的战略级石英加速度计能敏感出由于月球\太阳潮汐变化引起的重力变化,美国陆军导弹司令部和Allied Singal Aerospace Instunment System公司采用双质量、频率差动结构的大加速度高性能石英晶体加速度计,测量范围1200g,比例系数1.1Hz/g。美国专利5578755和美国专利5962786等都公开了不同结构的石英加速度计方案。法国国家宇航研究公司(ONERA)采用振梁结构研制的石英加速度计(VIA),已用于战术导弹的姿态控制。这些石英加速度计在结构上普遍复杂。Quartz crystal has good physical and chemical stability, and its piezoelectric effect has been widely used in force and stress detection, especially in the field of digital detection and control. people's constant attention. For example, the piezoelectric effect of quartz crystals is applied to acceleration detection. The strategic-grade quartz accelerometer developed by Kearfott Company of the United States uses double masses and double resonators. The headquarters and Allied Singal Aerospace Instunment System Company adopt a high-acceleration high-performance quartz crystal accelerometer with double mass and frequency differential structure, with a measuring range of 1200g and a proportionality factor of 1.1Hz/g. US Patent No. 5,578,755 and US Patent No. 5,962,786 all disclose solutions of quartz accelerometers with different structures. The quartz accelerometer (VIA) developed by the French National Aerospace Research Corporation (ONERA) with a vibrating beam structure has been used for attitude control of tactical missiles. These quartz accelerometers are generally complex in structure.

发明内容Contents of the invention

本发明的目的是为了解决石英加速度计的应用过程中温度等环境因素对加速度计性能的影响,提供一种稳定性高、抗干扰能力强、结构简单的单岛多电极石英加速度计。The purpose of the present invention is to solve the influence of temperature and other environmental factors on the performance of the accelerometer in the application process of the quartz accelerometer, and provide a single-island multi-electrode quartz accelerometer with high stability, strong anti-interference ability and simple structure.

本发明一种单岛多电极石英加速度计,这种加速度计由底座、外壳、电路板、敏感元件及插座组成。起支撑作用的底座与外壳由螺钉紧密配合装配成腔体,检测用的敏感元件用螺钉安装在底座上,电路板由电路板支撑螺柱及连接螺钉紧固于敏感元件上,航空插座由螺钉安装在外壳上,电源及信号由电缆从航空插座进出。其特征是:(一)敏感元件由单岛基座、中央单岛、限位螺钉、多电极石英力敏谐振器及密封罩构成;(二)单岛基座与密封罩由螺钉紧固构成密封腔体,单岛基座及中央单岛由一体加工而成;(三)作为核心元件的力敏谐振器为多电极石英晶体力敏谐振器,其电极对数为两对或两对以上。The invention discloses a single-island multi-electrode quartz accelerometer, which is composed of a base, a shell, a circuit board, a sensitive element and a socket. The supporting base and the shell are assembled into a cavity by screws. The sensitive components for detection are installed on the base with screws. The circuit board is fastened to the sensitive components by the circuit board support studs and connecting screws. Installed on the shell, the power supply and signal enter and exit from the aviation socket through the cable. Its characteristics are: (1) the sensitive element is composed of a single-island base, a central single-island, a limit screw, a multi-electrode quartz force sensitive resonator and a sealing cover; (2) the single-island base and the sealing cover are fastened by screws The sealed cavity, the single-island base and the central single-island are processed in one piece; (3) The force-sensitive resonator as the core component is a multi-electrode quartz crystal force-sensitive resonator, and the number of electrode pairs is two or more .

附图说明Description of drawings

图1单岛多电极石英加速度计结构剖视图Figure 1 Structural cross-sectional view of single-island multi-electrode quartz accelerometer

1-底座                        2-外壳1-Base 2-Shell

3-敏感元件                    4-航空插座3-Sensitive components 4-Aerial socket

5-电路板                      6-电路板支撑螺柱(共4个)5-circuit board 6-circuit board support studs (4 in total)

7-电路板螺钉(共4个)           8-插座螺钉(共4个)7-circuit board screws (4 in total) 8-socket screws (4 in total)

9-外壳螺钉(共4个)             10-底座螺钉(共2个)9-shell screws (4 in total) 10-base screws (2 in total)

图2敏感元件结构示意图Figure 2 Schematic diagram of the structure of the sensitive element

11-单岛基座                   12-1、12-2-限位螺钉11-Single island base 12-1, 12-2-Limit screw

13-1、13-2-多电极力敏谐振器   14-中央单岛13-1, 13-2-multi-electrode force sensitive resonator 14-central single island

15-1、15-2(未画出)-紧定螺钉   16-密封罩15-1, 15-2 (not shown) - set screw 16 - sealing cover

17-密封螺钉(共8个)17 - sealing screw (total 8)

图3单岛基座及中央单岛结构示意图Figure 3 Schematic diagram of the base of the single island and the structure of the central single island

11-单岛基座                   11-1、11-2-单岛基座谐振器支撑平台11-Single-island base         11-1, 11-2-Single-island base resonator support platform

11-3、11-4-限位螺母孔         11-5-电极引线孔(共4个)11-3, 11-4-limit nut holes 11-5-electrode lead holes (4 in total)

11-6-安装螺母孔(共2个)        11-7-引线槽11-6- Mounting nut holes (2 in total) 11-7- Lead groove

11-8-密封罩紧定螺母孔         14-中央单岛11-8-Sealing cover set nut hole 14-Central single island

14-1-柔性连接                 14-2、14-3-中央单岛谐振器支撑平台14-1-flexible connection 14-2, 14-3-central single-island resonator support platform

14-4-惯性质量块14-4-Inertial mass block

图4密封罩结构示意图Figure 4 Schematic diagram of the structure of the sealing cover

16-密封罩                     16-1-密封沉头螺钉孔(共8个)16-Sealing cover 16-1-Sealing countersunk screw holes (total 8)

16-2-电路板安装螺母孔(共4个)16-2-Board mounting nut holes (total 4)

实施方式Implementation

下面结合附图对本发明单岛多电极石英加速度计作如下叙述。The single-island multi-electrode quartz accelerometer of the present invention is described below in conjunction with the accompanying drawings.

单岛多电极石英加速度计的结构如图1所示,它由起支撑作用的底座1与外壳2由螺钉9紧密配合装配成腔体,检测用的敏感元件3用螺钉10安装在底座1上,电路板5由电路板螺柱6支撑,并由电路板螺钉7紧固于敏感元件3上,航空插座4由插座螺钉8安装在外壳2上,电源及信号由电缆从航空插座4进出;敏感元件3的结构如图2所示,它由单岛基座11、中央单岛14、两个限位螺钉12-1及12-2、两个多电极力敏谐振器13-1及13-2、密封罩16构成。The structure of the single-island multi-electrode quartz accelerometer is shown in Figure 1. It consists of a supporting base 1 and a housing 2 that are tightly fitted with screws 9 to form a cavity. Sensitive elements 3 for detection are installed on the base 1 with screws 10. , the circuit board 5 is supported by the circuit board stud 6, and is fastened on the sensitive element 3 by the circuit board screw 7, the aviation socket 4 is installed on the shell 2 by the socket screw 8, and the power supply and signal are entered and exited from the aviation socket 4 by the cable; The structure of the sensitive element 3 is shown in Figure 2, it consists of a single-island base 11, a central single-island 14, two limit screws 12-1 and 12-2, two multi-electrode force-sensitive resonators 13-1 and 13 -2. The sealing cover 16 is formed.

敏感元件3的单岛基座11和密封罩16由密封螺钉17紧固构成密封腔体,腔体内有中央单岛14,单岛基座11与中央单岛14由一体加工而成,结构如图3所示,中央单岛14将敏感元件的腔体分为对称的左右两个小腔体,两个多电极力敏谐振器13-1及13-2对称地镶嵌在中央单岛14两侧的两个小腔体中,多电极力敏谐振器13-1或13-2的一边与中央单岛14中部的支撑平台14-2或14-3焊接,另一边与单岛基座11中部的支撑平台11-1或11-2焊接,在单岛基座11上部的左右两端与中央单岛14上部的惯性质量块14-4对应位置处有限位螺钉12-1和12-2,限位螺钉12-1和12-2安装在单岛基座11上部对应的限位螺母孔11-3和11-4内,并由紧定螺钉15-1和15-2(未画出)紧定。The single-island base 11 and sealing cover 16 of the sensitive element 3 are fastened by sealing screws 17 to form a sealed cavity. There is a central single-island 14 in the cavity. The single-island base 11 and the central single-island 14 are integrally processed, and the structure is as follows: As shown in Figure 3, the central single island 14 divides the cavity of the sensitive element into two symmetrical left and right small cavities, and two multi-electrode force-sensitive resonators 13-1 and 13-2 are symmetrically embedded on both sides of the central single island 14. In the two small cavities on the side, one side of the multi-electrode force sensitive resonator 13-1 or 13-2 is welded to the support platform 14-2 or 14-3 in the middle of the central single island 14, and the other side is welded to the single island base 11 The support platform 11-1 or 11-2 in the middle is welded, and limit screws 12-1 and 12-2 are placed at the corresponding positions of the left and right ends of the upper part of the single island base 11 and the inertial mass block 14-4 on the upper part of the central single island 14 , the limit screws 12-1 and 12-2 are installed in the limit nut holes 11-3 and 11-4 corresponding to the top of the single island base 11, and set screws 15-1 and 15-2 (not shown ) tight.

图2所示的敏感元件3的单岛基座11及中央单岛14,其结构如图3所示,单岛基座11与中央单岛14由一体加工而成,中央单岛14的下部与单岛基座11的连接处14-1为柔性连接,中央单岛14的中部左右两侧有镶嵌多电极力敏谐振器13-1和13-2的对称支撑平台14-2和14-3,中央单岛14的上部为惯性质量块14-4;单岛基座11的底部有电极引线孔11-5(共4个)、安装螺母孔11-6(共2个)、引线槽11-7,单岛基座11的中部左右两侧有镶嵌多电极力敏谐振器13-1或13-2的对称支撑平台11-1和11-2,单岛基座11的上部左右两侧有安装限位螺钉12-1或12-2的螺母孔11-3和11-4,单岛基座11的左右两侧有用于安装密封罩16的紧定螺母孔11-8(共8个)。The single-island base 11 and the central single-island 14 of the sensitive element 3 shown in Fig. 2, its structure is as shown in Fig. The connection 14-1 with the single-island base 11 is a flexible connection, and the left and right sides of the middle of the central single-island 14 have symmetrical support platforms 14-2 and 14-2 embedded with multi-electrode force-sensitive resonators 13-1 and 13-2. 3. The upper part of the central single island 14 is an inertial mass block 14-4; the bottom of the single island base 11 has electrode lead holes 11-5 (4 in total), mounting nut holes 11-6 (2 in total), and lead grooves 11-7, there are symmetrical support platforms 11-1 and 11-2 inlaid with multi-electrode force-sensitive resonators 13-1 or 13-2 on the left and right sides of the middle part of the single-island base 11, and the left and right sides of the upper part of the single-island base 11 There are nut holes 11-3 and 11-4 for installing limit screws 12-1 or 12-2 on the side, and there are set nut holes 11-8 for installing sealing cover 16 on the left and right sides of the single island base 11 (total 8 indivual).

图2所示的敏感元件3的多电极力敏谐振器13-1或13-2,它的基片为石英晶体圆薄片,同一个基片上的电极对数为两对或两对以上,电极位置在基片上的分布可以是对称分布或非对称分布;本实施例中所示为三对电极的石英力敏谐振器。The multi-electrode force-sensitive resonator 13-1 or 13-2 of the sensitive element 3 shown in Fig. 2, its substrate is a quartz crystal disc, and the number of electrode pairs on the same substrate is two pairs or more than two pairs. The distribution of positions on the substrate can be symmetrical or asymmetrical; in this embodiment, a quartz force sensitive resonator with three pairs of electrodes is shown.

图2所示的敏感元件3的密封罩16,其结构如图4所示,在密封罩16的两则有用于安装密封螺钉用的沉头螺钉孔16-1(共8个),在四个边角附近有用于安装电路板支撑柱6的支撑安装螺母孔16-2(共4个)。The sealing cover 16 of sensitive element 3 shown in Fig. 2, its structure as shown in Figure 4, there are countersunk screw holes 16-1 (8 in total) that are used for installing sealing screw at two of sealing cover 16, in four There are support mounting nut holes 16-2 (total 4) for installing circuit board support columns 6 near the corners.

本发明单岛多电极石英加速度计分辨率<10-4g,非线性度<0.1%,测量范围为10-4g~102g,有结构简单,数字输出,可靠性高等优点。该加速度计可用于飞行器、车辆、舰船、工业自动化等的检测控制系统。The single-island multi-electrode quartz accelerometer of the invention has a resolution of less than 10 -4 g, a non-linearity of less than 0.1%, a measurement range of 10 -4 g to 10 2 g, and has the advantages of simple structure, digital output and high reliability. The accelerometer can be used in detection and control systems of aircraft, vehicles, ships, industrial automation, etc.

Claims (4)

1. a Zhong Dan island multi-electrode quartz accelerometer, to be closely cooperated by screw (9) by passive base (1) and shell (2) and be assembled into cavity, the sensitive element (3) detected is arranged on base (1) with screw (10), circuit board (5) is supported by board support stud (6), and be anchored on sensitive element (3) by circuit board screw (7), aviation socket (4) is arranged on shell (2) by screw (8), and power supply and signal are passed in and out from aviation socket (4) by cable; Sensitive element (3) is made up of single island pedestal (11), central single island (14), stop screw (12-1,12-2), the quick resonator of multi-electrode power (13-1,13-2) and seal closure (16).
2. single island multi-electrode quartz accelerometer described in claim 1, the architectural feature of its sensitive element (3) is: single island pedestal (11) and seal closure (16) form seal chamber by sealing screw (17) is fastening, central single island (14) and two quick resonators of multi-electrode power (13-1) are had in cavity, (13-2), single island pedestal (11) and central authorities' list island (14) are by integrally processing, the cavity of sensitive element is divided into the symmetrical little cavity in two, left and right by central authorities single island (14), two quick resonators of multi-electrode power (13-1), (13-2) be embedded in symmetrically in two little cavitys of central single island (14) both sides, the quick resonator of multi-electrode power (13-1) or (13-2) while weld with the support platform (14-2) at central authorities single island (14) middle parts or (14-3), another side welds with the support platform (11-1) in the middle part of single island pedestal (11) or (11-2), the two ends, left and right limited location screw (12-1) on single pedestal (11) top, island, (12-2), stop screw (12-1), (12-2) the stop nut hole (11-3) that pedestal (11) top, single island is corresponding is embedded in, (11-4) in, and by holding screw (15-1), (15-2) (not shown) tightening.
3. single island multi-electrode quartz accelerometer described in claim 1, single island pedestal (11) of its sensitive element (3) and the architectural feature on central single island (14) are: single island pedestal (11) and central authorities' list island (14) are by integrally processing, the bottom of central authorities single island (14) and the junction (14-1) on single island pedestal (11) are for flexibly connecting, there are the symmetric support platform (14-2) and (14-3) of inlaying the quick resonator of multi-electrode power (13-1) or (13-2) in the left and right sides, middle part of central authorities single island (14), the top of central authorities single island (14) is inertial mass (14-4), electrode lead hole (11-5) (totally 4) is arranged at the bottom of single island pedestal (11), mounting nuts hole (11-6) (totally 2), wire lead slot (11-7), there are the symmetric support platform (11-1) and (11-2) of inlaying the quick resonator of multi-electrode power (13-1) or (13-2) in the left and right sides, middle part of single island pedestal (11), there are stop nut hole (11-3) and (11-4) of mounting limit screw (12-1) or (12-2) in the left and right sides, top of single island pedestal (11), there is the locknut hole (11-8) (totally 8) of installation seal closure (16) left and right sides of single island pedestal (11).
4. single island multi-electrode quartz accelerometer described in claim 1, the quick resonator of multi-electrode power (13-1) of its sensitive element (3) or the architectural feature of (13-2) are: the substrate of the quick resonator of multi-electrode power (13-1,13-2) is quartz crystal circle sheet, same on-chip electrode logarithm is two pairs or more, and electrode position can be symmetrical or asymmetric distribution in on-chip distribution.
CN201410014008.3A 2014-01-14 2014-01-14 Single Island Multi-Electrode Quartz Accelerometer Expired - Fee Related CN104777330B (en)

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Publication number Priority date Publication date Assignee Title
CN110441550A (en) * 2019-09-06 2019-11-12 北京信息科技大学 A kind of embedded 12 electrode quartz accelerometer of circuit

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CN110441550A (en) * 2019-09-06 2019-11-12 北京信息科技大学 A kind of embedded 12 electrode quartz accelerometer of circuit
CN110441550B (en) * 2019-09-06 2024-06-25 北京信息科技大学 Circuit embedded 12-electrode quartz accelerometer

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