CN104760039B - Parallel connection platform vibration detection based on laser displacement sensor controls apparatus and method - Google Patents
Parallel connection platform vibration detection based on laser displacement sensor controls apparatus and method Download PDFInfo
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Abstract
The invention discloses a kind of parallel connection platform vibration detection based on laser displacement sensor and control apparatus and method, device includes parallel connection platform body unit, vibration detecting unit and vibration control unit, parallel connection platform body unit includes a moving platform, a silent flatform and three parallel branch, and each parallel branch includes the motor, driving lever and the driven rods that are sequentially connected.Driven rods is pasted with multi-disc piezoelectric ceramic piece driver, three laser acquisition heads are installed around silent flatform, in order to detect moving platform translation displacements in the horizontal direction and rotational angle.After motor drives driving lever and driven rods to make moving platform navigate to target location, moving platform has residual oscillation, laser acquisition head detects the vibration signal of moving platform, by vibration control unit, controlled quentity controlled variable is applied in piezoelectric ceramic piece driver, it is achieved the purpose that parallel connection platform residual oscillation is actively controlled.There is certainty of measurement height, sample frequency is high, dynamic response is fast advantage.
Description
Technical field
The present invention relates to flexible parallel connection platform location vibration detection and control research field, particularly relating to a kind of parallel connection platform vibration detection based on laser displacement sensor and control apparatus and method.
Background technology
Parallel robot is the robot comprising parallel institution, and parallel institution is that several degree of freedom end effectors are connected by two or more self-movement side chain with fixed pedestal.Parallel robot comprises two platforms, i.e. moving platform and silent flatform (also referred to as fixed platform), and silent flatform is fixed on pedestal or is connected on the end effector of another robot, the relative silent flatform motion of moving platform.It is connected by two or more side chain between two platforms.It has two or more degree of freedom, and driver is typically distributed across on the one end being connected with silent flatform (driving with parallel way).Parallel robot have big rigidity, in high precision, the advantage such as high bearing capacity, be mainly used in strong rigidity, precision is high, movement velocity is fast, dynamic characteristic good, operation is dexterous, the occasion that work space requirement is little, such as Aero-Space, manufactures equipment, accurate measurement and precision positioning field.In order to improve industrial productivity, save the energy, modern mechanical constantly develops to directions such as lightweight, low energy consumption and high efficiency, light-duty, at a high speed, high acceleration, high-precision flexible coding system start to obtain the concern of many researcheres and engineer.When system motion, owing to the impact of the factors such as inertia force causes the flexible member generation elastic deformation of Low rigidity, elastic deformation drastically influence the performance of machinery, and after mechanism kinematic positions, also have residual oscillation, vibrate the motion positions degree of accuracy of meeting influential system and extend positioning time, different control strategies should be designed hence for different application and detect and control vibration.
In order to control the residual oscillation of parallel robot moving platform, firstly the need of detecting vibratory output, and prior art is generally adopted touch sensor to its measurement, such as use the detection of installing type acceleration transducer, or use adhesive type piezoelectric ceramic piece detection etc., flexibility all can be produced additional mass by lever or moving platform by these methods, system structure characteristic can be changed, the measurement noise of acceleration transducer is relatively large simultaneously, this needs to be filtered vibration signal processing, and piezoceramic material is fragile material, the intensity of material and fatigue life are affected by ambient temperature etc., so application is subject to certain restrictions.
Therefore, study a kind of parallel connection platform vibration detection control apparatus and method not increasing structure additional mass, not change structure feature and certainty of measurement high and there is important research meaning.
Summary of the invention
Present invention is primarily targeted at the shortcoming overcoming prior art with not enough, a kind of parallel connection platform vibration detection based on laser displacement sensor is provided to control device, this device adopts laser displacement sensor to measure the vibration of moving platform, it it is non-contact measurement, do not increase structure additional mass, not change structure feature, has certainty of measurement height, sample frequency is high, dynamic response is a fast advantage.
Another object of the present invention is to provide a kind of control method controlling device based on above-mentioned parallel connection platform vibration detection, the method utilizes laser displacement sensor to gather vibration information, certainty of measurement is high, and by piezoelectric ceramic piece driver, the residual oscillation of moving platform can be carried out actively control, make parallel robot motion more accurate.
The purpose of the present invention is realized by following technical scheme: the parallel connection platform vibration detection based on laser displacement sensor controls device, including parallel connection platform body unit, vibration detecting unit and vibration control unit, wherein:
Described parallel connection platform body unit includes a moving platform, a silent flatform and three parallel branch, and described moving platform is equilateral triangle, and each edge is equipped with rotating shaft；Each parallel branch includes the motor, driving lever and the driven rods that are sequentially connected, and wherein motor is arranged on the edge of silent flatform, and driven rods is connected with moving platform by rotating shaft；Motor drives driving lever and driven rods to make moving platform to determine attitude running fix to target location；
Described vibration detecting unit includes several Laser Detecting Set and laser displacement sensing controlers in order to detect moving platform translation displacements in the horizontal direction and rotational angle, each Laser Detecting Set includes laser acquisition head and positioner, laser acquisition head is arranged on the positioning device, it is arranged on around silent flatform, the luminous point that laser acquisition hair is penetrated all falls within the side of moving platform, and the luminous point of two of which laser acquisition head drops on the same of moving platform；Each laser acquisition head is connected with laser displacement sensing controler respectively；
Described vibration control unit includes data processing unit, Piezoelectric Driving amplifies power supply and piezoelectric ceramic piece driver, described data processing unit amplifies power supply with laser displacement sensing controler and Piezoelectric Driving respectively and is connected, and Piezoelectric Driving is amplified power supply and is connected with piezoelectric ceramic piece driver；Described piezoelectric ceramic piece driver is arranged in every driven rods.
Preferably, piezoelectric ceramic piece driver in described every driven rods all includes the first piezoelectric ceramic piece driver and the second piezoelectric ceramic piece driver, first piezoelectric ceramic piece driver and the second piezoelectric ceramic piece driver are separately positioned on the two ends of driven rods, and in end with attitude angle for 0 ° of symmetrical stickup.
Preferably, described vibration detecting unit includes three laser acquisition heads, wherein the second laser acquisition head and the 3rd laser acquisition head correspond to same one side of moving platform and are parallel to silent flatform placement, distance moving platform edge gauged distance is 200-500mm, first laser acquisition head is corresponding to moving platform another side and is parallel to silent flatform placement, and distance moving platform edge gauged distance is 200-500mm.
Further, described positioner includes horizontal stand, vertical rack, magnetic bases and micrometer, vertical rack is arranged on magnetic bases, horizontal stand is arranged on vertical rack, laser acquisition head is fixed on one end of horizontal stand, its position is adjustable on horizontal stand, and the shift value of adjustment is detected by micrometer.Laser acquisition head for different model, it has different gauged distances from moving platform, and this distance can be realized by the adjustment of the movement of magnetic bases and micrometer, the luminous point that laser acquisition hair is penetrated can also be adjusted by the movement of magnetic bases and horizontal stand in the position at moving platform edge.
A kind of control method controlling device based on above-mentioned parallel connection platform vibration detection, including step:
(1) motor drives driving lever and driven rods to make moving platform to determine attitude running fix to target location；
(2) laser acquisition head detection moving platform translation displacements in the horizontal direction and rotational angle, be then sent to laser displacement sensing controler by detection signal, be input to data processing unit by A/D data collecting card；
(3) data processing unit calculates control signal according to above-mentioned detection signal, after then passing through D/A transition card and Piezoelectric Driving amplification power supply, control signal is delivered to piezoelectric ceramic piece driver, driven rods is produced control power effect, counteracting moving platform vibrates, it is achieved the real-time Active Vibration Control to moving platform.
Concrete, in described step (2), the computational methods of moving platform translation displacements in the horizontal direction and rotational angle are:
It is provided with three laser acquisition heads, wherein the second laser acquisition head and the 3rd laser acquisition head correspond to same one side of moving platform and are parallel to silent flatform placement, first laser acquisition head is corresponding to moving platform another side and is parallel to silent flatform placement, a rectangular coordinate system, y is set up by the first laser acquisition head, the second laser acquisition head and the 3rd laser acquisition head1、x2、x3Representing the first laser acquisition head, the second laser acquisition head, the 3rd laser acquisition head distance from zero respectively, d represents the distance between the second laser acquisition head and the 3rd laser acquisition head, and a represents the length of side of moving platform, and 60 ° is the interior angle value of moving platform, x1And x10Represent the distance value from moving platform edge that the first laser acquisition head detects at current sample time and previous sampling instant, y respectively2And y20Represent the distance value from moving platform edge that the second laser acquisition head detects at current sample time and previous sampling instant, y respectively3And y30Represent the distance value from moving platform edge that the 3rd laser acquisition head detects at current sample time and previous sampling instant respectively；
Then obtaining, the angle of rotation angle value of moving platform is:
Wherein, if Δ α is more than zero, represent that moving platform rotates clockwise, if Δ α is less than zero, represent that moving platform rotates counterclockwise；
Moving platform translation displacements value in the x-direction is:
Wherein, If Δ x is more than zero, represent that moving platform translation in the x-direction is away from the second laser acquisition head and the 3rd laser acquisition head, if Δ x is less than zero, represent that moving platform translation in the x-direction is near the second laser acquisition head and the 3rd laser acquisition head；
Moving platform translation displacements value in the y-direction is:
Wherein, If Δ y is more than zero, represent that moving platform translation in the y-direction is away from the first laser acquisition head, if Δ y is less than zero, represent that moving platform translation in the y-direction is near the first laser acquisition head.
The present invention compared with prior art, has the advantage that and beneficial effect:
(1) present invention utilizes the moving platform vibration of laser displacement sensor detection flexible parallel mechanism, it it is non-contact measurement, have do not increase structure additional mass, not change structure feature, certainty of measurement is high, dynamic response is fast advantage, be both suitable for low frequency vibration measurement and be also suitable for dither and measure.
(2) present invention proposes a kind of positioner, including horizontal stand, vertical rack, magnetic bases and micrometer, can manually adjust laser acquisition head position easily by this device, and then measure the vibration displacement of moving platform easily.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present embodiment device.
Fig. 2 is the top view of Fig. 1 shown device.
Fig. 3 is the structural representation at driven rods place in the present embodiment.
Fig. 4 is the schematic diagram calculation of the present embodiment moving platform rotational angle.
Fig. 5 is the schematic diagram calculation of the present embodiment moving platform translation displacements in the horizontal direction and rotational angle.
Shown in figure: 1 motor, 2 driving levers, 3 driven rods, 4 moving platforms, 5 first piezoelectric ceramic piece drivers, 6 piezoelectric ceramic piece sensors, 7 second piezoelectric ceramic piece drivers, 8 silent flatforms, 9 first laser acquisition heads, 10 micrometers, 11 horizontal stands, 12 vertical racks, 13 magnetic bases, 14 second laser acquisition heads, 15 the 3rd laser acquisition heads.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the present invention is described in further detail, but embodiments of the present invention are not limited to this.
Embodiment 1
The structure of device is controlled referring to Fig. 1 based on the parallel connection platform vibration detection of laser displacement sensor described in the present embodiment, described device includes parallel connection platform body unit, vibration detecting unit and vibration control unit, below in conjunction with figure, above-mentioned each unit is specifically described.
Described parallel connection platform body unit includes moving platform 4, silent flatform 8 and three parallel branch, and described moving platform 4 is equilateral triangle.Each parallel branch includes motor 1, driving lever 2 and driven rods 3, the present embodiment motor 1 is peace river servomotor, it is separately mounted to the edge of silent flatform 8, every motor shaft end connects a driving lever 2, every driving lever 2 other end connects a driven rods 3 by rotating shaft, and every driven rods 3 other end connects moving platform 4 by rotating shaft.Motor 1 drives driving lever 2 and driven rods 3 to make moving platform 4 to determine attitude running fix to target location.
In the present embodiment, described vibration detecting unit includes three laser acquisition heads, referring to Fig. 1,2.Each laser acquisition head is arranged on a positioner, positioner is arranged on silent flatform 8 around, described positioner includes horizontal stand 11, vertical rack 12, magnetic bases 13 and micrometer 10, vertical rack 12 is arranged on magnetic bases 13, horizontal stand 11 is arranged on vertical rack 12, laser acquisition head is fixed on one end of horizontal stand 11, and its position is adjustable on horizontal stand 11, and the shift value of adjustment is detected by micrometer 10.
Second laser acquisition 14 and the 3rd laser acquisition 15 are corresponding to same one side of moving platform 4 and be parallel to silent flatform 8 and place, distance moving platform 4 edge gauged distance is 400mm, first laser acquisition 9 is corresponding to moving platform 4 another side and is parallel to silent flatform 8 and places, and distance moving platform 4 edge gauged distance is 400mm.Each laser acquisition head is connected with laser displacement sensing controler respectively.Distance between each laser acquisition head and moving platform 4 can be realized by the adjustment of the movement of magnetic bases 13 and micrometer 10, the luminous point that laser acquisition hair is penetrated can be adjusted by the movement of magnetic bases 13 and horizontal stand 11 in the position (as shown in phantom in Figure 2, representing that laser acquisition head injects to the laser at moving platform edge) at moving platform edge.In the present embodiment, laser acquisition head selects the LK-G400 model of Keyemce.
In the present embodiment, it is possible not only to adopt laser acquisition head to detect, it is also possible in every driven rods 3, increase piezoelectric ceramic piece sensor 6 detect, referring to Fig. 3.Such that it is able to the moving platform vibration of flexible parallel mechanism is carried out Research on Identification by multi-sensor information fusion, utilize laser displacement sensor can the measured value of dynamic calibration piezoelectric ceramic piece sensor 6, utilize this device can well realize the moving platform vibration detection of flexible parallel mechanism and control research.
The structure of described vibration control unit, referring to Fig. 1, amplifies power supply and piezoelectric ceramic piece driver including data processing unit, Piezoelectric Driving, and wherein data processing unit can adopt general computer, microprocessor etc. to have the equipment of information processing capability.Described data processing unit is connected with laser displacement sensing controler by A/D data collecting card, amplifies power supply by D/A transition card with Piezoelectric Driving and is connected, and Piezoelectric Driving is amplified power supply and is connected with piezoelectric ceramic piece driver.
In the present embodiment, piezoelectric ceramic piece driver is arranged in every driven rods 3, concrete structure is referring to Fig. 3, piezoelectric ceramic piece driver includes the first piezoelectric ceramic piece driver 5 and the second piezoelectric ceramic piece driver 7, first piezoelectric ceramic piece driver 5 is pasted onto driven rods 3 two sides before and after fixing end root 5mm position, and attitude angle is 0 ° of symmetrical stickup；Second piezoelectric ceramic piece driver 7 is pasted onto driven rods 3 two sides before and after another fixing end root 5mm position, and attitude angle is 0 ° of symmetrical stickup.
Give piezoelectric ceramic piece vane due to the present embodiment simultaneously and detect this function, be used for demarcating or studying.Therefore the present embodiment vibration control unit also includes charge amplifier, piezoelectric ceramic piece sensor 6 detects the vibration of driven rods 3, the vibration signal of its detection, after charge amplifier amplifies, is input in data processing unit by A/D data collecting card and processes.In every driven rods 3, piezoelectric ceramic piece sensor 6 is pasted onto the driven rods 3 longitudinal midline position of distance the first piezoelectric ceramic piece driver 5 or the second about 5mm position of piezoelectric ceramic piece driver 7, and one side is pasted.
A kind of control method controlling device based on above-mentioned parallel connection platform vibration detection of the present embodiment, including step:
(1), after motor 1 receives driving angle signal, after making moving platform 4 navigate to target location by driving lever 2 and driven rods 3, moving platform 4 has residual oscillation.
(2) laser acquisition head detection moving platform 4 translation displacements in the horizontal direction and rotational angle, be then sent to laser displacement sensing controler by detection signal, be input to data processing unit by A/D data collecting card.
The angle of rotation angle value of moving platform 4 isSee Figure of description 4, if Δ α is more than zero, represent that moving platform 4 rotates clockwise, if Δ α is less than zero, represent that moving platform 4 rotates counterclockwise.
Moving platform 4 translation displacements value in the x-direction is:
See Figure of description 5, wherein If Δ x is more than zero, represent that moving platform 4 translation in the x-direction is away from the second laser acquisition 14 and the 3rd laser acquisition 15, if Δ x is less than zero, represent that moving platform 4 translation in the x-direction is near the second laser acquisition 14 and the 3rd laser acquisition 15.
Moving platform 4 translation displacements value in the y-direction is:
See Figure of description 5, wherein If Δ y is more than zero, represent that moving platform 4 translation in the y-direction is away from the first laser acquisition 9, if Δ y is less than zero, represent that moving platform 4 translation in the y-direction is near the first laser acquisition 9；
In formula, set up x-y rectangular coordinate system by first laser acquisition the 9, second laser acquisition 14 and the 3rd laser acquisition 15, see Figure of description 5, put A (x1,y1) and A0(x10,y1) represent first laser acquisition the 9 test point coordinate in current sample time and previous sampling instant respectively, put B (x2,y2) and B0(x2,y20) represent second laser acquisition the 14 test point coordinate in current sample time and previous sampling instant respectively, put C (x3,y3) and C0(x3,y30) represent the 3rd laser acquisition the 15 test point coordinate in current sample time and previous sampling instant respectively, put D (x4,y4) and D0(x40,y40) represent the moving platform 4 apex coordinate at current sample time and previous sampling instant respectively, put E and E0Represent the moving platform 4 geometric center point with previous sampling instant at current sample time, k respectively2And k20Represent straight line DE and D respectively0E0Slope, k1And k10Represent straight line AD and A respectively0D0Slope, k and k0Represent straight line BC and B respectively0C0Slope, y1、x2、x3Representing that first laser acquisition the 9, second laser acquisition the 14, the 3rd laser acquisition 15 is from zero distance respectively, d represents the spacing of the second laser acquisition 14 and the 3rd laser acquisition 15, and a represents the length of side of the moving platform 4 of equilateral triangle, 60°For the interior angle value of moving platform 4, x1And x10Represent the distance value from moving platform 4 edge that the first laser acquisition 9 detects at current sample time and previous sampling instant, y respectively2And y20Represent the distance value from moving platform 4 edge that the second laser acquisition 14 detects at current sample time and previous sampling instant, y respectively3And y30Represent the distance value from moving platform 4 edge that the 3rd laser acquisition 15 detects at current sample time and previous sampling instant respectively.
The present embodiment it is also mentioned that arrange piezoelectric ceramic piece sensor 6 in driven rods 3, the vibration of driven rods 3 is detected by piezoelectric ceramic piece sensor 6, the vibration signal of its detection, after charge amplifier amplifies, is input in data processing unit by A/D data collecting card and processes.
(3) data processing unit calculates control signal according to above-mentioned detection signal, after then passing through D/A transition card and Piezoelectric Driving amplification power supply, control signal is delivered to piezoelectric ceramic piece driver, driven rods 3 is produced control power effect, counteracting moving platform vibrates, it is achieved the real-time Active Vibration Control to moving platform.
In the present embodiment, can additional mass on moving platform 4, for equilateral triangle, the length of side is 220mm, and thickness is 20mm, and the dimensional parameters of driven rods 3 is: 252mm × 25mm × 3mm, the dimensional parameters of driving lever 2 is: 254mm × 25mm × 10mm, driving lever 2, driven rods 3 and moving platform 4 are aluminium alloy, for making rod member surface insulation, it are carried out oxidation processes.
The present embodiment, laser acquisition head and laser displacement sensing controler select the LK-G series laser displacement transducer that Keyemce company of Japan produces, laser acquisition head dummy number is LK-G400, the scattered reflection type of triangulation is installed, red color visible semiconductor laser, wavelength is 655nm, reference distance is 400mm, measurement scope is-100mm to+100mm, measuring repeatability is 2 μm, rectilinearity is the F.S. (F.S.=± 100mm) of ± 0.05%, and the sampling period is 20/50/100/200/500/1000 μ s (can select in 6 grades).Laser displacement sensing controler model is LK-G3001V, analog voltage output area is-10V to+10V, having two laser acquisition head synchro measure functions, operating function, average function, filtering functions, calibration function, auto zero function, sampling rate such as arrange at the function.
The present embodiment, the first piezoelectric ceramic piece driver 5 and the second piezoelectric ceramic piece driver 7 substantially piezoelectric ceramic piece, physical dimension is 50mm × 25mm × 2mm.Piezoelectric ceramic piece sensor 6 essence is also piezoelectric ceramic piece, and physical dimension is 30mm × 15mm × 1mm.The elastic modelling quantity of piezoceramic material is Ep=63Gpa, d31=-166pm/V.
The present embodiment, peace river servomotor SGMAV-10ADA61 and servo-driver SGDV-120A selected by motor 1, and 20 encoders can provide sufficiently accurate position to feed back, and the output torque of 3.18N.m and the rated power of 1kW have been enough to the driving of platform high-speed motion.Piezoelectric Driving is amplified power supply and be can be selected for the DW-D201-100-AC type high-voltage suppling power that Tianjin Dongwen High Voltage Power Supply Factory produces.Charge amplifier can be selected for the YE5850 type charge amplifier of Jiangsu Lian Neng Electronics Co., Ltd..The model of A/D data collecting card is the PCL-818HD that Taiwan Advantech company limited produces.D/A transition card can be selected for the PCL-727 type transition card that Taiwan Advantech company limited produces.The data processing unit CPU model selected is PentiumG6202.6GHz, internal memory 4G.
Above-described embodiment is the present invention preferably embodiment; but embodiments of the present invention are also not restricted to the described embodiments; the change made under other any spirit without departing from the present invention and principle, modification, replacement, combination, simplification; all should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (6)
1. control device based on the parallel connection platform vibration detection of laser displacement sensor, it is characterised in that include parallel connection platform body unit, vibration detecting unit and vibration control unit, wherein:
Described parallel connection platform body unit includes a moving platform, a silent flatform and three parallel branch, and described moving platform is equilateral triangle, and each edge is equipped with rotating shaft；Each parallel branch includes the motor, driving lever and the driven rods that are sequentially connected, and wherein motor is arranged on the edge of silent flatform, and driven rods is connected with moving platform by rotating shaft；Motor drives driving lever and driven rods to make moving platform to determine attitude running fix to target location；
Described vibration detecting unit includes several Laser Detecting Set and laser displacement sensing controlers in order to detect moving platform translation displacements in the horizontal direction and rotational angle, each Laser Detecting Set includes laser acquisition head and positioner, laser acquisition head is arranged on the positioning device, it is arranged on around silent flatform, the luminous point that laser acquisition hair is penetrated all falls within the side of moving platform, and the luminous point of two of which laser acquisition head drops on the same of moving platform；Each laser acquisition head is connected with laser displacement sensing controler respectively；
Described vibration control unit includes data processing unit, Piezoelectric Driving amplifies power supply and piezoelectric ceramic piece driver, described data processing unit amplifies power supply with laser displacement sensing controler and Piezoelectric Driving respectively and is connected, and Piezoelectric Driving is amplified power supply and is connected with piezoelectric ceramic piece driver；Described piezoelectric ceramic piece driver is arranged in every driven rods.
2. the parallel connection platform vibration detection based on laser displacement sensor according to claim 1 controls device, it is characterized in that, piezoelectric ceramic piece driver in every driven rods all includes the first piezoelectric ceramic piece driver and the second piezoelectric ceramic piece driver, first piezoelectric ceramic piece driver and the second piezoelectric ceramic piece driver are separately positioned on the two ends of driven rods, and in end with attitude angle for 0 ° of symmetrical stickup.
3. the parallel connection platform vibration detection based on laser displacement sensor according to claim 1 controls device, it is characterized in that, described vibration detecting unit includes three laser acquisition heads, wherein the second laser acquisition head and the 3rd laser acquisition head correspond to same one side of moving platform and are parallel to silent flatform placement, distance moving platform edge gauged distance is 200-500mm, first laser acquisition head is corresponding to moving platform another side and is parallel to silent flatform placement, and distance moving platform edge gauged distance is 200-500mm.
4. the parallel connection platform vibration detection based on laser displacement sensor according to claim 3 controls device, it is characterized in that, described positioner includes horizontal stand, vertical rack, magnetic bases and micrometer, vertical rack is arranged on magnetic bases, horizontal stand is arranged on vertical rack, laser acquisition head is fixed on one end of horizontal stand, and its position is adjustable on horizontal stand, and the shift value of adjustment is detected by micrometer.
5. the control method controlling device based on the parallel connection platform vibration detection described in any one of claim 1-4, it is characterised in that include step:
(1) motor drives driving lever and driven rods to make moving platform to determine attitude running fix to target location；
(2) laser acquisition head detection moving platform translation displacements in the horizontal direction and rotational angle, be then sent to laser displacement sensing controler by detection signal, be input to data processing unit by A/D data collecting card；
(3) data processing unit calculates control signal according to above-mentioned detection signal, after then passing through D/A transition card and Piezoelectric Driving amplification power supply, control signal is delivered to piezoelectric ceramic piece driver, driven rods is produced control power effect, counteracting moving platform vibrates, it is achieved the real-time Active Vibration Control to moving platform.
6. control method according to claim 5, it is characterised in that in described step (2), the computational methods of moving platform translation displacements in the horizontal direction and rotational angle are:
It is provided with three laser acquisition heads, wherein the second laser acquisition head and the 3rd laser acquisition head correspond to same one side of moving platform and are parallel to silent flatform placement, first laser acquisition head is corresponding to moving platform another side and is parallel to silent flatform placement, a rectangular coordinate system, y is set up by the first laser acquisition head, the second laser acquisition head and the 3rd laser acquisition head1、x2、x3Representing the first laser acquisition head, the second laser acquisition head, the 3rd laser acquisition head distance from zero respectively, d represents the distance between the second laser acquisition head and the 3rd laser acquisition head, and a represents the length of side of moving platform, and 60 ° is the interior angle value of moving platform, x1And x10Represent the distance value from moving platform edge that the first laser acquisition head detects at current sample time and previous sampling instant, y respectively2And y20Represent the distance value from moving platform edge that the second laser acquisition head detects at current sample time and previous sampling instant, y respectively3And y30Represent the distance value from moving platform edge that the 3rd laser acquisition head detects at current sample time and previous sampling instant respectively；
Then obtaining, the angle of rotation angle value of moving platform is:
Wherein, if Δ α is more than zero, represent that moving platform rotates clockwise, if Δ α is less than zero, represent that moving platform rotates counterclockwise；
Moving platform translation displacements value in the x-direction is:
Wherein, If Δ x is more than zero, represent that moving platform translation in the x-direction is away from the second laser acquisition head and the 3rd laser acquisition head, if Δ x is less than zero, represent that moving platform translation in the x-direction is near the second laser acquisition head and the 3rd laser acquisition head；
Moving platform translation displacements value in the y-direction is:
Wherein, If Δ y is more than zero, represent that moving platform translation in the y-direction is away from the first laser acquisition head, if Δ y is less than zero, represent that moving platform translation in the y-direction is near the first laser acquisition head.
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| CN103323163B (en) * | 2013-06-14 | 2015-11-04 | 中国科学院自动化研究所 | A kind of Active Compensation based on force feedback presses down vibrating system |
| CN103273480B (en) * | 2013-06-14 | 2015-04-22 | 中国科学院自动化研究所 | Vibration simulation, active compensation and vibration restraining system based on force feedback |
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| CN106556347A (en) * | 2016-11-10 | 2017-04-05 | 中南大学 | A kind of optoelectronic packaging flexible parallel connection platform end pose detecting system and method |
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