CN104732476B - A kind of low degree of overlapping three-dimensional splicing method of micro-structural based on optical non-destructive detection - Google Patents
A kind of low degree of overlapping three-dimensional splicing method of micro-structural based on optical non-destructive detection Download PDFInfo
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Abstract
A kind of low degree of overlapping three-dimensional splicing method of micro-structural based on optical non-destructive detection.It includes the overlapping region that architectural feature extraction region is limited in measurement process by the kinematic parameter based on mechanism for testing displacement platform in experiment；In the region, feature extraction is carried out by SURF algorithm；In the Feature Points Matching stage, according to the uncertainty of measuring system displacement platform it is further proposed that reducing the method for matching double points hunting zones to improve Feature Points Matching reliability and obtain characteristic matching point according to Euclidean distance nearest-neighbor method；Using the local continuity of overlapping region as foundation, correction matrix is calculated by STLS algorithms finally to be spliced.The present invention is not only applicable to the structure of feature rich, it is also applied for similarity height, the unconspicuous array type structure of feature, error hiding can effectively be eliminated, improve splicing precision, described low degree of overlapping can greatly reduce the considerable extra testing time brought by overlapping region, successfully realize large-range measuring.
Description
Technical field
The invention belongs to Microstructure Optics technical field of nondestructive testing, more particularly to a kind of based on optical non-destructive detection
The a wide range of joining method of micro-structural.
Background technology
Optical non-destructive detection technology is the important content of ultraprecise detection technique, Aero-Space, biotechnology, communication,
The leading-edge fields such as microelectronics are widely used.In recent years, although substantial amounts of new technology and new product are being continually pushed to answer
With, but with the development of precision processing technology, between the resolving power and measurement range, measurement efficiency of optical non-destructive detection technology
Contradiction becomes more prominent.Therefore, one just become with high resolution on a large scale in micro-structural measurement how is realized simultaneously
Major issue.
Because the high measurement efficiency and parameter of optical non-destructive detection are easy to set, so under normal conditions, horizontal big model
Enclosing measurement can realize by joining method.Main flow business equipment now typically requires that the overlapping region of adjacent structure is maintained at
10%-25%, relatively low degree of overlapping do not ensure that good splicing effect, but the additional measurement time that brings of high degree of overlapping
Increase is considerable when actually measuring.Also there is scientific research personnel to propose new scan mode for this problem in the world, but
It is that these methods are required for transforming the optical system and scanning moving mechanism of sweep mechanism, versatility is poor, and can not
Avoid the Bonding Problem in two-dimentional large-range measuring.Therefore, high robust, the joining method of low degree of overlapping are big to microstructure level
The measurement of scope three-dimensional precise still has higher researching value.
The content of the invention
In order to solve the above problems, it is an object of the invention to propose a kind of big model of the micro-structural based on optical non-destructive detection
Enclose joining method, successfully to realize large-range measuring, and by reduce degree of overlapping reduce in measurement process because overlap zone come volume
The increase of external pelivimetry time.
In order to achieve the above object, a wide range of joining method bag of the micro-structural provided by the invention based on optical non-destructive detection
Include the following steps carried out in order：
Step 1：According to the kinematic parameter of test system displacement platform in experiment, set characteristic matching region and adjacent wait to spell as two
The lap of binding structure；
Step 2：Architectural feature is extracted in the characteristic matching region set using SURF algorithm in described step 1；
Step 3：According to test system displacement platform uncertainty, characteristic matching point search scope is set, and according to European
Closest neighborhood method obtains characteristic matching point；
Step 4：Using the local continuity of overlapping region as foundation, correction matrix is calculated using STLS algorithms, is surveyed with correcting
The splicing construction changing of the relative positions that environmental perturbation is brought during amount, thus obtains final splicing result.
In step 1, the kinematic parameter according to test system displacement platform in experiment, set characteristic matching region as
The specific method of the lap of two adjacent structures to be spliced is：
According to the horizontal and vertical movement position for the article carrying platform that can be accurately obtained in optical precision nondestructive measurement system and
Relative displacement between adjacent structure, characteristic matching region delimited, to eliminate erroneous matching and improve calculating speed；Described is relative
Shown in displacement relation such as formula (1):
A1(x, y)+L=A2(x,y) (1)
Wherein, (x, y) is two adjacent structure overlapping region point midway coordinates to be spliced, A1、A2For two adjacent knots to be spliced
Structure；L is x or y directions displacement；
Shown in two adjacent neighbours structure degree of overlapping to be spliced and the relation such as formula (2) of relative displacement：
(P-L/p)/P=a (2)
Wherein, P is structure x directions pixel total number to be spliced, and p is pixel equivalent dimension, and a is two adjacent structures to be spliced
Degree of overlapping；Delimit structure A to be spliced1Middle matching area is that x directions P (1-a) is arranged to P row, delimits structure A to be spliced2In
It is that x directions the 1st are arranged to P (1-a) row, when not being integer using above-mentioned formula acquired results, to ensure lap with region
It is included, takes the integer value solution for making setting regions larger；
The measurement process in y directions is identical with above-mentioned measurement process.
In step 3, it is described according to test system displacement platform uncertainty, characteristic matching point search scope is set,
And the specific method that characteristic matching point is obtained according to Euclidean distance nearest-neighbor method is；
Shown in described matching double points range set such as formula (3) and formula (4)：
x1+Lx-rx≤x2≤x1+Lx+rx (3)
y1+Ly-ry≤y2≤y1+Ly+ry (4)
Wherein, (x1,y1) and (x2,y2) be one group and be belonging respectively to two adjacent structure A to be spliced1、A2In matching double points,
(Lx,Ly) it is respectively adjacent structure A to be spliced1、A2The relative displacement of x, y direction, (rx,ry) respectively define x, y direction character
The hunting zone of match point, its value are determined by measuring apparatus uncertainty.
In step 4, the local continuity using overlapping region calculates correction square as foundation using STLS algorithms
Battle array, the splicing construction changing of the relative positions come with environment disturbed belt in correction measurement process, thus obtain the specific method of final splicing result
It is：
Correct-by-construction is not related to dimensional variation and malformation in this step, provides the matrix in described STLS algorithms
Constraints, set shown in described correction matrix parameter such as formula (5)：
Wherein, shown in described B expression formula such as formula (6)：
Described B is three-dimensional orthogonal matrix and mould is 1, pi(i=4,8,12) denotation coordination origin is distinguished along x, y, z axle
Translational movement, pi(i ∈ [1,12] ∩ i ∈ Z) is optimal solution poptIn element, wherein popt∈R12×1。
The technical characterstic and effect of a wide range of joining method of micro-structural provided by the invention based on optical non-destructive detection：
The present invention avoids the feature phase of measurement structure by setting characteristic matching region and characteristic matching point search scope
Like or unobvious caused by matching double points find mistake and improve computational efficiency.Measured by calculating correction matrix recoverable
During splicing regions defect after the structure preliminary registration caused by ambient noise.Low degree of overlapping proposed by the invention is big
It is big reduce because repeated in original measuring method it is overlapping caused by considerable additional measurement time, therefore can effectively realize low
The a wide range of optical non-destructive detection of micro-structural under degree of overlapping.
Brief description of the drawings
Fig. 1 gives two adjacent structures to form schematic diagrames.
Fig. 2 gives multiple adjacent structure splicing schematic diagrames.
Fig. 3 gives the micro-structural a wide range of joining method flow chart of the invention based on optical non-destructive detection.
Fig. 4 gives measurement process schematic diagram.
Fig. 5 is given using the characteristic matching region obtained by the inventive method.
Fig. 6 gives match point region of search schematic diagram.
Fig. 7 gives characteristic matching result when not setting described Feature Points Matching region and match point region of search.
Fig. 8 gives the characteristic matching result after setting described Feature Points Matching region and match point region of search.
Fig. 9 (a) and Fig. 9 (b) sets forth preliminary registration structure and its contour line without matrix correction.
Figure 10 (a) and Figure 10 (b) sets forth final splicing construction and its contour line after matrix correction.
Embodiment
The present invention is described in further detail with embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, the two adjacent structure A1 and A2 to be spliced with certain overlapping region, pass through base provided by the invention
Splicing result A3 is obtained in a wide range of joining method of the micro-structural of optical non-destructive detection, to realize large-range measuring.Such as Fig. 2 institutes
Show, it is a wide range of using the micro-structural provided by the invention based on optical non-destructive detection on the basis of described splicing result A3
Joining method, the splicing A5-AN of multiple adjacent structures with overlapping region can be achieved.
As shown in figure 3, a wide range of joining method of the micro-structural provided by the invention based on optical non-destructive detection mainly includes
The following steps carried out in order：
Step 1：According to the kinematic parameter of test system displacement platform in experiment, set characteristic matching region and adjacent wait to spell as two
The lap of binding structure；
Setting described characteristic matching region can effectively be reduced in microscopic field of view as two adjacent structure laps to be spliced
In due to the high similitude of structure and caused by matching double points find mistake.Before feature extraction, according to optical precision nondestructive measurement
Relative displacement between the horizontal and vertical movement position and adjacent structure of the article carrying platform that can be accurately obtained in system, delimit feature
Matching area, to eliminate erroneous matching and improve calculating speed.Measurement process schematic diagram is given in Fig. 4, test sample A is entered
Row measurement, each x directions translational displacement is L.Shown in described relative displacement relation such as formula (1):
A1(x, y)+L=A2(x,y) (1)
Wherein, (x, y) is two adjacent structure overlapping region point midway coordinates to be spliced, A1、A2For two adjacent knots to be spliced
Structure.
Shown in two adjacent neighbours structure degree of overlapping to be spliced and the relation such as formula (2) of relative displacement：
(P-L/p)/P=a (2)
Wherein, P is structure x directions pixel total number to be spliced, and p is pixel equivalent dimension, and a is two adjacent structures to be spliced
Degree of overlapping.Delimit structure A to be spliced1Middle matching area is that x directions P (1-a) is arranged to P row, delimits structure A to be spliced2In
It is that x directions the 1st are arranged to P (1-a) row with region, what deserves to be explained is, when not being integer using above-mentioned formula acquired results, it is
Ensure that lap is included, the present invention takes the integer value solution for making setting regions larger.According to described characteristic matching region
Establishing method, set characteristic matching region as shown in Figure 5.Label 7 and 8 is two adjacent structure A1, A2 to be spliced respectively in Fig. 5
Two-dimensional top-down view, the overlapping region 9 and 10 of two adjacent structures is in the characteristic matching region set.
It is similar to described above-mentioned measurement process for the measurement process in y directions.
Step 2：The feature set using SURF (Speed Up Robust Features) algorithm in described step 1
Extraction architectural feature in matching area；
Step 3：According to test system displacement platform uncertainty, characteristic matching point search scope is set, is improving matching just
True rate and precision, avoid structural similarity too high or feature is not enriched and causes characteristic matching point to find mistake, and according to European
Closest neighborhood method obtains characteristic matching point；
Shown in described matching double points range set such as formula (3) and formula (4)：
x1+Lx-rx≤x2≤x1+Lx+rx (3)
y1+Ly-ry≤y2≤y1+Ly+ry (4)
Wherein, (x1,y1) and (x2,y2) be one group and be belonging respectively to two adjacent structure A to be spliced1、A2In matching double points,
(Lx,Ly) it is respectively adjacent structure A to be spliced1、A2The relative displacement of x, y direction, (rx,ry) respectively define x, y direction character
The hunting zone of match point, its value are determined by measuring apparatus uncertainty.Fig. 6 gives characteristic matching point search range set and shown
It is intended to, characteristic point 12 finds the characteristic point that matches in hunting zone 11, and obtains feature according to Euclidean distance nearest-neighbor method
Match point 13.It is as shown in fig. 7, acquired during to make not set described characteristic matching region and characteristic matching point search scope
Error characteristic matching double points are shown clearly, and proper characteristics match point has been omitted in the figure.As shown in figure 8, for by described in setting
Characteristic matching region 9,10 and characteristic matching point search scope acquired in correct matching double points.
Step 4：Using the local continuity of overlapping region as foundation, correction matrix is calculated using STLS algorithms, is surveyed with correcting
The splicing construction changing of the relative positions that environmental perturbation is brought during amount, thus obtains final splicing result.
The high accuracy of measuring mechanism makes it very sensitive to the environmental perturbation in test process, therefore structure is after preliminary registration
Splicing regions can be inevitably present defect.STLS (Scaled Total are passed through according to the local continuity of overlapping region
Least Squares) algorithm calculates correction matrix and eliminates this defect, and it is final to realize accurate splicing.In this step of the invention
Correct-by-construction is not related to dimensional variation and malformation, provides the matrix restraint condition in described STLS algorithms, sets institute
Shown in the correction matrix parameter such as formula (5) stated：
Wherein, shown in described B expression formula such as formula (6)：
Described B is three-dimensional orthogonal matrix and mould is 1, pi(i=4,8,12) denotation coordination origin is distinguished along x, y, z axle
Translational movement, pi(i ∈ [1,12] ∩ i ∈ Z) is optimal solution poptIn element, wherein popt∈R12×1。
Fig. 9 (a) and Fig. 9 (b) is the contour line of the preliminary align structures without matrix correction and black line mark part respectively,
Figure 10 (a) and Figure 10 (b) is respectively the contour line of the final splicing construction after matrix correction and black line mark part.The present invention
Used hardware device is all based on existing business equipment.
Claims (3)
1. a kind of low degree of overlapping three-dimensional splicing method of micro-structural based on optical non-destructive detection, it includes carrying out in order following
Step：
Step 1：According to the kinematic parameter of test system displacement platform in experiment, characteristic matching region is set as two adjacent knots to be spliced
The lap of structure；
Step 2：Architectural feature is extracted in the characteristic matching region set using SURF algorithm in described step 1；
Step 3：According to test system displacement platform uncertainty, characteristic matching point search scope is set, and according to Euclidean distance most
Neighbour's domain method obtains characteristic matching point；
Step 4：Using the local continuity of overlapping region as foundation, correction matrix is calculated using STLS algorithms, was measured with correction
The splicing construction changing of the relative positions that environment disturbed belt comes in journey, thus obtains final splicing result；
It is characterized in that：In step 1, the kinematic parameter according to test system displacement platform in experiment, feature is set
It is for the specific method of lap of two adjacent structures to be spliced with region：
According to the horizontal and vertical movement position for the article carrying platform that can be accurately obtained in optical precision nondestructive measurement system and adjacent
Interstructural relative displacement, characteristic matching region delimited, to eliminate erroneous matching and improve calculating speed；Described relative displacement
Shown in relation such as formula (1):
A1(x, y)+L=A2(x,y) (1)
Wherein, (x, y) is two adjacent structure overlapping region point midway coordinates to be spliced, A1、A2For two adjacent structures to be spliced；L
For x or y directions displacement；
Shown in two adjacent structure degrees of overlapping to be spliced and the relation such as formula (2) of relative displacement：
(P-L/p)/P=a (2)
Wherein, P is structure x directions pixel total number to be spliced, and p is pixel equivalent dimension, and a is that two adjacent structures to be spliced are overlapping
Degree；Delimit structure A to be spliced1Middle matching area is that x directions P (1-a) is arranged to P row, delimits structure A to be spliced2Middle Matching band
Domain is that x directions the 1st arrange to P (a) and arranged, when using above-mentioned formula (2) acquired results not being integer, to ensure that lap includes
Inside, the integer value solution for making setting regions larger is taken；
The measurement process in y directions is identical with above-mentioned measurement process.
2. the low degree of overlapping three-dimensional splicing method of the micro-structural according to claim 1 based on optical non-destructive detection, its feature
It is：In step 3, it is described according to test system displacement platform uncertainty, set characteristic matching point search scope, and according to
The specific method that Euclidean distance nearest-neighbor method obtains characteristic matching point is；
Shown in described matching double points range set such as formula (3) and formula (4)：
x1+Lx-rx≤x2≤x1+Lx+rx (3)
y1+Ly-ry≤y2≤y1+Ly+ry (4)
Wherein, (x1,y1) and (x2,y2) be one group and be belonging respectively to two adjacent structure A to be spliced1、A2In matching double points, (Lx,Ly)
Respectively adjacent structure A to be spliced1、A2The relative displacement of x, y direction, (rx,ry) respectively define x, y direction character match point
Hunting zone, its value determines by measuring apparatus uncertainty.
3. the low degree of overlapping three-dimensional splicing method of the micro-structural according to claim 1 based on optical non-destructive detection, its feature
It is：In step 4, the local continuity using overlapping region calculates correction matrix as foundation using STLS algorithms, with
The splicing construction changing of the relative positions that environment disturbed belt comes in correction measurement process, thus obtaining the specific method of final splicing result is：
The splicing construction changing of the relative positions that environment disturbed belt comes in correction measurement process in this step is not related to dimensional variation and become with structure
Shape, the matrix restraint condition in described STLS algorithms is provided, set shown in described correction matrix parameter such as formula (5)：
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<mn>0</mn>
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<mn>0</mn>
</mtd>
<mtd>
<mn>1</mn>
</mtd>
</mtr>
</mtable>
</mfenced>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>5</mn>
<mo>)</mo>
</mrow>
</mrow>
Wherein, shown in described B expression formula such as formula (6)：
<mrow>
<mi>B</mi>
<mo>=</mo>
<mfenced open = "[" close = "]">
<mtable>
<mtr>
<mtd>
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<mi>p</mi>
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</msub>
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Described B is three-dimensional orthogonal matrix and mould is 1, pi(i=4,8,12) translation of the denotation coordination origin along x, y, z axle respectively
Amount, pi(i ∈ [1,12] ∩ i ∈ Z) is optimal solution poptIn element, wherein popt∈R12×1。
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| CN108111746A (en) * | 2016-11-25 | 2018-06-01 | 努比亚技术有限公司 | A kind of method and apparatus for realizing pan-shot |
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| CN101499166A (en) * | 2009-03-16 | 2009-08-05 | 北京中星微电子有限公司 | Image splicing method and apparatus |
| CN102202159A (en) * | 2011-03-29 | 2011-09-28 | 段连飞 | Digital splicing method for unmanned aerial photographic photos |
| CN104282005A (en) * | 2014-09-19 | 2015-01-14 | 天津航天中为数据系统科技有限公司 | Video image splicing method and device |
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| WO2002090496A2 (en) * | 2001-05-03 | 2002-11-14 | Rensselaer Polytechnic Institute | Novel methods of directed evolution |
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|---|---|---|---|---|
| CN101499166A (en) * | 2009-03-16 | 2009-08-05 | 北京中星微电子有限公司 | Image splicing method and apparatus |
| CN102202159A (en) * | 2011-03-29 | 2011-09-28 | 段连飞 | Digital splicing method for unmanned aerial photographic photos |
| CN104282005A (en) * | 2014-09-19 | 2015-01-14 | 天津航天中为数据系统科技有限公司 | Video image splicing method and device |
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| A基于特征点匹配的电子稳像技术;吉淑娇;《中国光学》;20131231;第6卷(第6期);841-849 * |
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