CN104730116A - Compound gas sensor - Google Patents
Compound gas sensor Download PDFInfo
- Publication number
- CN104730116A CN104730116A CN201510086084.XA CN201510086084A CN104730116A CN 104730116 A CN104730116 A CN 104730116A CN 201510086084 A CN201510086084 A CN 201510086084A CN 104730116 A CN104730116 A CN 104730116A
- Authority
- CN
- China
- Prior art keywords
- detection module
- mos
- ndir
- gas
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
The invention discloses a compound gas sensor, comprising an MOS (Metal Oxide Semiconductor) detection module, an NDIR (Non-Dispersive Infra-Red) detection module and a control unit. The MOS detection module is used for detecting toxic and harmful gas and combustible and explosive gas; the MOS detection module is composed of one or more detection layers, the detection layer comprises a sensitive layer, an insulating layer, a heater and a substrate, and the MOS detection module is heated to be in a special temperature range by the heater so as to detect a special gas. The NDIR detection module is used for detecting toxic and harmful gas and combustible and explosive gas; and the NDIR detection module is composed of an infrared source, a light room and an infrared receiver. The controller is composed of a signal processing subunit and a microprocessor subunit. In the compound gas sensor, the heater is shared by the MOS detection module and the NDIR detection module, is used as a heating element for the MOS detection module, and also used as the infrared source of the NDIR detection module, and is modulated by the control unit.
Description
Technical field
Patent of the present invention relates to gas sensor domain, particularly can detect the sensor field of multicomponent gas simultaneously, specifically refers to a kind of compound gas sensor that simultaneously can detect multicomponent gas.
Background technology
Gas sensor is mainly for detection of toxic and harmful and flammable explosive gas.Conventional gas sensor has electrochemical sensor, catalytic combustion sensor, metal-oxide semiconductor (MOS) (MOS) sensor, NDIR (Non-Dispersive Infrared) (NDIR) sensor.
Electrochemical sensor by with object gas generation electrochemical reaction, and to produce the current signal that is directly proportional to gas concentration and carry out work.Typical electrochemical sensor is made up of sensing electrode, counter electrode, electrolyte, and the gas that diffusion is come in and sensing electrode react, and sensing electrode can adopt oxidation mechanism or reduction mechanism.These reactions carry out catalysis by the electrode material designed for object gas.Therefore, specific electrochemical sensor can only detect specific gas targetedly.In addition, electrolyte is the carrier that electrochemical reaction occurs, if electrolyte evaporation is too rapid, sensor signal can weaken.Therefore be generally 1-2 the serviceable life of electrochemical sensor, and its zero point and sensitivity drift are comparatively large, need regular calibration, otherwise can have a strong impact on measuring accuracy.
Catalytic combustion sensor is based on Wheatstone bridge target gas concentration.Under sensor is in clean air or zero compression ring border, Wheatstone bridge is in equilibrium state, and output voltage is zero.When object gas enters in sensor, and under the effect of catalyzer, catalyst combustion reaction occurs, Wheatstone bridge is unbalance, exports the voltage signal be directly proportional to target gas levels.All can there is catalyst combustion reaction in most flammable explosive gas, therefore, the voltage signal that catalytic combustion sensor exports is the general performance of these flammable explosive gas reaction, but can not pick out the concentration of gas composition and correspondence thereof under the effect of catalyzer.
Mos sensor demonstrates different response characteristics within the scope of different temperatures, and therefore sensor adopts heating element to regulate temperature.When having gas to occur, the metal oxide in mos sensor resolves into charged ion gas or causes the compound of electro transfer, and the resistance of sensor is changed.Metal oxide materials can be heated to the operating temperature range of the most applicable object gas reaction by built-in well heater, and this well heater carries out regulation and control by specialized circuitry.Conventional mos sensor only has individual layer, also just can only modulate a working temperature, which limits the measurement gas kind of sensor.
NDIR sensor is based on Lambert-Bill law target gas concentration, is made up of infrared light supply, light room and infrared remote receiver.If target gas molecules is non-polar molecule, then can absorb the infrared light of specific wavelength, and absorption intensity meets Lambert-Bill law, the infrared light intensity of this wavelength is died down, filtered out the infrared light of this wavelength by narrow band pass filter, then by infrared remote receiver, light signal is converted to electric signal output.Therefore, the kind of NDIR sensor measurement gas is determined by narrow band pass filter.Conventional NDIR sensor integration binary channels narrow band pass filter, passage is as with reference to passage, and another passage is as object gas Measurement channel, therefore it can only measure a kind of gas.
Because the electrochemical sensor of routine, catalytic combustion sensor, mos sensor and NDIR sensor can not detect multicomponent gas simultaneously, and sensor specification is different.Detect to realize multicomponent gas simultaneously, then need to configure multiple or multiple conventional gas sensors, not only affect the miniaturization of instrument, also can increase cost of development and the development difficulty of instrument.
In addition, Work places or living environment operating mode complexity, mostly there is multiple gases in environment, single gas control instrument can not meet the detection demand of complex environment.Compound gas sensor can detect multicomponent gas simultaneously, and the digital signal of outputting standard, and solving the problem of the miniaturization of instrument, cost of development and development difficulty, is the development trend of gas sensor.
Summary of the invention
In order to solve the problems of the technologies described above, the invention provides comprehensively a kind of and improving NDIR (Non-Dispersive Infrared) detection technique and metal-oxide semiconductor (MOS) detection technique, multicomponent gas can be detected simultaneously, and the compound gas sensor that volume is little, low in energy consumption.
To achieve these goals, compound gas sensor of the present invention comprises: MOS detection module, for detecting toxic and harmful and flammable explosive gas.Described MOS detection module is made up of one or more layers detection layers, and described detection layers comprises sensitive layer, insulation course, well heater, substrate, is heated to specific range of temperatures by described well heater, detects specific gas.NDIR detection module, for detecting toxic and harmful and flammable explosive gas.Described NDIR detection module is made up of infrared light supply, light room, infrared remote receiver.Control module, is made up of signal transacting subelement and microprocessor subelement.In this compound gas sensor, described well heater is the total parts of described MOS detection module and NDIR detection module, not only as the heating element of described MOS detection module, also as the infrared light supply of described NDIR detection module, and modulated by described control module.
In this compound gas sensor, described sensitive layer adopts metal oxide material, and vacuum moulding machine is to substrate surface.Described well heater can be platinum filament, platinum alloy silk, resistive metal oxides or deposition platinum thin layer etc.Described light chamber internal surface is covered with Gold plated Layer or platinum plating layer gold.
Infrared remote receiver described in this compound gas sensor is pyroelectric infrared detector.Described pyroelectric infrared detector is multi-channel heat release electric infrared eye.The window of described multi-channel heat release electric infrared eye is provided with optical filter, and described optical filter is the narrow band pass filter of multicoating.
In this compound gas sensor, described signal transacting subelement comprises sensor matching circuit, signal amplification circuit and signal amplification output circuit.Described MOS detection module and NDIR detection module are sequentially connected to described microprocessor subelement by described sensor matching circuit, signal amplification circuit and signal amplification output circuit.
In this compound gas sensor, described microprocessor subelement comprises microprocessor, analog to digital conversion circuit, temperature-compensation circuit and data-carrier store, and described analog-to-digital conversion circuit, temperature-compensation circuit and data-carrier store are all connected to described microprocessor.The simulating signal that described microprocessor is exported by described analog to digital conversion circuit collection signal process subelement, after treatment, outputting standard digital signal.Described temperature-compensation circuit is for revising the measuring error caused by temperature.Described data storage subunit operable is Electrically Erasable Read Only Memory.
In this compound gas sensor, comprise housing, housing upper bottom portion is wire netting, lower bottom part is encapsulating part, enclosure interior arranges MOS detection module, NDIR detection module and control module, described control module is fixed on encapsulating part by the contact pin on its circuit board, and described MOS detection module and NDIR detection module are fixed on the circuit board of control module by pin; Described light room is hollow columnar structures, and its one end and infrared remote receiver are fixed, and the other end and MOS detection module are fixed, and the workplace of MOS detection module is towards light chamber interior.
Compared with prior art, compound gas sensor can detect multicomponent gas simultaneously, and the digital signal of outputting standard, and solving the problem of the miniaturization of instrument, cost of development and development difficulty, is the development trend of gas sensor.The beneficial effect that the present invention has is:
1., because the present invention is comprehensive and improve NDIR (Non-Dispersive Infrared) detection technique and metal-oxide semiconductor (MOS) detection technique, multicomponent gas can be detected simultaneously.
2., because the well heater in the present invention is not only as the heating element in MOS detection module, also as the infrared light supply in NDIR detection module, reduce the space structure of sensor, reduce cost of development.
3., because the present invention is based on NDIR (Non-Dispersive Infrared) detection technique and metal-oxide semiconductor (MOS) detection technique, therefore, serviceable life and the scalar period of sensor are long, reduce replacement cost and maintenance cost.
4. due to the present invention's output is standardized digital signal, can be connected directly in instrument, and without the need to secondary treating, so reduce the development difficulty of instrument.
Accompanying drawing explanation
Fig. 1 is the basic module structural representation of the compound gas sensor of the present invention.
Fig. 2 is the modular structure schematic diagram that the present invention's compound gas sensor embodiment 1 uses double-deck detection layers, binary channels infrared remote receiver.
Fig. 3 is the present invention's compound gas sensor embodiment 1 structural representation.
Fig. 4 is the present invention's compound gas sensor embodiment 1 detection layers structural representation.
Fig. 5 is the modular structure schematic diagram that the compound gas sensor embodiment 2 of the present invention uses three layers of detection layers, triple channel infrared remote receiver.
In figure: 1: housing 2:MOS detection module 21: detection layers 22: pin 3:NDIR detection module 31: infrared light supply 32: light room 33: infrared remote receiver 34: optical filter 35: pin 4: control module 41: contact pin 5: encapsulating part 6: wire netting 21: detection layers 211: sensitive layer 212: insulation course 213: well heater 214: substrate 215: sensitive layer pin 216: well heater pin.
Embodiment
Below by embodiment by reference to the accompanying drawings, the present invention will be further described.
Embodiment 1.
As shown in Figure 1, the compound gas sensor that the present embodiment describes comprises MOS detection module, NDIR detection module and control module.
Described MOS detection module, for detecting toxic and harmful and flammable explosive gas, is made up of multilayer detection layers.Described every one deck detection layers includes sensitive layer, insulation course, well heater, substrate.Described well heater is the total parts of described MOS detection module and NDIR detection module, not only as the heating element of MOS detection module, also as the infrared light supply of NDIR detection module, is modulated by described control module; Described sensitive layer adopts metal oxide material, and vacuum moulding machine is to substrate surface.
Described NDIR detection module, for detecting toxic and harmful and flammable explosive gas, is made up of infrared light supply, light room, hyperchannel infrared remote receiver.Described infrared light supply is the well heater in described MOS detection module; Described light room adopts special coating process, and inside surface is covered with Gold plated Layer or platinum plating layer gold; Described hyperchannel infrared remote receiver is multi-channel heat release electric infrared eye, and described multi-channel heat release electric infrared eye comprises reference channel and Measurement channel, the window of described reference channel and Measurement channel is arranged the narrow band pass filter of multicoating.
Described control module is made up of signal transacting subelement and microprocessor subelement.
MOS detection module is as described in Figure 2 made up of detection layers 1 and detection layers 2.Described detection layers 1 is carbon monoxide (CO) detection layers, comprises sensitive layer, insulation course, well heater and substrate, and described sensitive layer adopts tin oxide (SnO
2) material, described well heater is platinum (Pt) thin layer, and described substrate adopts aluminium oxide (Al
2o
3) material, the sequentially vacuum moulding machine of described well heater, insulation course, sensitive layer is at described substrate surface.Described well heater is heated to the specified temp of applicable CO reaction described sensitive layer; Described detection layers 2 is formaldehyde (CH
2o) detection layers, comprises sensitive layer, insulation course, well heater and substrate, and described sensitive layer adopts tin oxide (SnO
2) material, described well heater is platinum (Pt) thin layer, and described substrate adopts aluminium oxide (Al
2o
3) material, the sequentially vacuum moulding machine of described well heater, insulation course, sensitive layer is at described substrate surface.Described well heater is heated to applicable CH described sensitive layer
2the specified temp of O reaction.
Described NDIR detection module is made up of infrared light supply, light room and binary channels infrared remote receiver.Described infrared light supply is the well heater in described MOS detection module; The inside surface of described smooth room adopts special coating process, is covered with gold-plated film; Described binary channels infrared remote receiver is binary channels pyroelectric infrared detector.Described binary channels pyroelectric infrared detector comprises reference channel and methane (CH
4) Measurement channel.The window of described reference channel is provided with the narrow band pass filter of multicoating, and the centre wavelength of described narrow band pass filter is 4.0 μm.Described CH
4the window of Measurement channel is provided with the narrow band pass filter of multicoating, and the centre wavelength of described optical filter is 3.4 μm.
Described control module is made up of signal transacting subelement and microprocessor subelement.Described signal transacting subelement comprises sensor matching circuit, signal amplification circuit and signal amplification output circuit.MOS detection module and NDIR detection module are sequentially connected to described microprocessor subelement by described sensor matching circuit, signal amplification circuit and signal amplification output circuit; Described microprocessor subelement comprises microprocessor, analog to digital conversion circuit, temperature-compensation circuit and data-carrier store, and described analog-to-digital conversion circuit, temperature-compensation circuit and data-carrier store are all connected to described microprocessor.The simulating signal that described microprocessor is exported by analog to digital conversion circuit collection signal process subelement, after treatment, outputting standard digital signal.Described temperature-compensation circuit is for revising the measuring error caused by temperature.Described data storage subunit operable is Electrically Erasable Read Only Memory.
As shown in Figure 3-4, compound gas sensor comprises: housing 1, encapsulating part 5, wire netting 6, the MOS detection module 2 be arranged in described housing, NDIR detection module 3, control module 4.MOS detection module 2 comprises: detection layers 21 and pin 22, and described detection layers can be 1 layer or multilayer, and inner structure is shown in Fig. 2.Detection layers is made up of sensitive layer 211, insulation course 212, well heater 213 and substrate 214, and described sensitive layer 211 also comprises pin 215; Well heater is not only as the heating element of MOS detection module, and also as the infrared light supply 31 of NDIR detection module, described well heater also comprises pin 216.Described pin 215 and pin 216, mate with described pin 22.NDIR detection module 3 comprises: infrared light supply 31, light room 32, infrared remote receiver 33, the window of described infrared remote receiver is provided with optical filter 34, and infrared remote receiver also comprises pin 35.MOS detection module 2 and infrared remote receiver 33 are packaged together by light room.Control module 4 comprises: signal transacting submodule and microprocessor submodule, and control module 4 is powered and outputting standard digital signal by contact pin 41, and described contact pin 41 comprises 2 power pins and 2 numbers reportedly defeated contact pin.Wire netting 6 is fixed on directly over housing 1.Encapsulating part 5 is fixed on bottom housing 1, and forms enclosure space with housing 1.MOS detection module 2, NDIR detection module 3, control module 4 are encapsulated in enclosure space.Described encapsulating part 5 has through hole, and position, the size and number of through hole are mated with contact pin 41.
The compound gas sensor of the present embodiment is utilized to carry out gas concentration testing process as described below (with multicomponent gas CO, CH
2o, CH
4for example):
One, MOS detection module measures CO and CH in multicomponent gas
2o concentration
Multicomponent gas (CO, CH
2o, CH
4) diffuse into the light room of compound gas sensor, and then contact with the detection layers in MOS detection module.
Sensitive layer in detection layers 1 has been heated to the specified temp that applicable CO reacts, and reacts, cause the resistance of sensitive layer to change, and resistance change is relevant with CO concentration after the CO in multicomponent gas contacts with sensitive layer.Calculate the resistance value of sensitive layer in multicomponent gas environment by basic test loop, and then obtain CO concentration in multicomponent gas.
Sensitive layer in detection layers 2 has been heated to applicable CH
2the specified temp of O reaction, the CH in multicomponent gas
2o reacts after contacting with sensitive layer, causes the resistance of sensitive layer to change, and resistance change and CH
2o concentration is relevant.Calculate the resistance value of sensitive layer in multicomponent gas environment by basic test loop, and then obtain CH in multicomponent gas
2o concentration.
Two, NDIR detection module measures CH in multicomponent gas
4concentration
Multicomponent gas (CO, CH
2o, CH
4) diffuse into the light room of compound gas sensor, when infrared light is through light room, CH
4gas will absorbing wavelength be the infrared light of 3.4 μm, and absorption intensity and CH
4gas concentration is relevant, meets Lambert-Bill law.
Binary channels pyroelectric infrared detector is entered after infrared light is absorbed.CH
4the window of Measurement channel there is one piece of centre wavelength be the narrow band pass filter of 3.4 μm, the centre wavelength of this optical filter and CH
4the absorbing wavelength of gas is consistent, only has the infrared light of this wavelength could be through, and the infrared light of other wavelength can not be through.Wavelength is received by pyroelectric detector after the infrared light optical filter of 3.4 μm, is converted into electric signal; The window of reference channel has one piece of centre wavelength be the narrow band pass filter of 4.0 μm, the infrared light of this wavelength is hardly by any gas absorption.Wavelength be the infrared light of 4.0 μm by being received by pyroelectric detector after optical filter, be converted into electric signal.
Obtain the electric signal on Measurement channel and reference channel, the CH in multicomponent gas can be calculated based on Lambert-Beer Absorption Formula
4gas concentration.
Three, temperature compensation, linear compensation and concentration signal export
Control module gathers raw electrical signal, and carries out complicated temperature compensation and linear compensation process to it, finally obtains gas concentration value accurately, and external outputting standard digital signal.
Embodiment 2.
As shown in Figure 3, the compound gas sensor that the present embodiment describes comprises MOS detection module, NDIR detection module and control module.
Described MOS detection module is made up of detection layers 1, detection layers 2 and detection layers 3.Described detection layers 1 is carbon monoxide (CO) detection layers, comprises sensitive layer, insulation course, well heater and substrate, and described sensitive layer adopts tin oxide (SnO
2) material, described well heater is platinum (Pt) thin layer, and described substrate adopts aluminium oxide (Al
2o
3) material, the sequentially vacuum moulding machine of described well heater, insulation course, sensitive layer is at described substrate surface.Described well heater is heated to the specified temp of applicable CO reaction described sensitive layer; Described detection layers 2 is formaldehyde (CH
2o) detection layers, comprises sensitive layer, insulation course, well heater and substrate, and described sensitive layer adopts tin oxide (SnO
2) material, described well heater is platinum (Pt) thin layer, and described substrate adopts aluminium oxide (Al
2o
3) material, the sequentially vacuum moulding machine of described well heater, insulation course, sensitive layer is at described substrate surface.Described well heater is heated to applicable CH described sensitive layer
2the specified temp of O reaction; Described detection layers 3 is nitrogen dioxide (NO
2) detection layers, comprise sensitive layer, insulation course, well heater and substrate, described sensitive layer adopts tin oxide (SnO
2) material, described well heater is platinum (Pt) thin layer, and described substrate adopts aluminium oxide (Al
2o
3) material, the sequentially vacuum moulding machine of described well heater, insulation course, sensitive layer is at described substrate surface.Described well heater is heated to applicable NO described sensitive layer
2the specified temp of reaction.
Described NDIR detection module is made up of infrared light supply, light room and triple channel infrared remote receiver.Described infrared light supply is the well heater in described MOS detection module; Described light chamber internal surface adopts special coating process, is covered with gold-plated film; Described triple channel infrared remote receiver is triple channel pyroelectric infrared detector.Described triple channel pyroelectric infrared detector comprises reference channel, methane (CH
4) Measurement channel and carbon dioxide (CO
2) Measurement channel.The window of described reference channel is provided with the narrow band pass filter of multicoating, and the centre wavelength of described narrow band pass filter is 4.0 μm.Described CH
4the window of Measurement channel is provided with the narrow band pass filter of multicoating, and the centre wavelength of described optical filter is 3.4 μm.Described CO
2the window of Measurement channel is provided with the narrow band pass filter of multicoating, and the centre wavelength of described optical filter is 4.26 μm.
Described control module is made up of signal transacting subelement and microprocessor subelement.Described signal transacting subelement comprises sensor matching circuit, signal amplification circuit and signal amplification output circuit.MOS detection module and NDIR detection module are sequentially connected to described microprocessor subelement by described sensor matching circuit, signal amplification circuit and signal amplification output circuit; Described microprocessor subelement comprises microprocessor, analog to digital conversion circuit, temperature-compensation circuit and data-carrier store, and described analog-to-digital conversion circuit, temperature-compensation circuit and data-carrier store are all connected to described microprocessor.The simulating signal that described microprocessor is exported by analog to digital conversion circuit collection signal process subelement, after treatment, outputting standard digital signal.Described temperature-compensation circuit is for revising the measuring error caused by temperature.Described data storage subunit operable is Electrically Erasable Read Only Memory.
The compound gas sensor of the present embodiment is utilized to carry out gas concentration testing process as described below (with multicomponent gas CO, CH
2o, NO
2, CH
4, CO
2for example):
One, MOS detection module measures CO, the CH in multicomponent gas
2o, NO
2concentration
Multicomponent gas (CO, CH
2o, NO
2, CH
4, CO
2) diffuse into the light room of compound gas sensor, and then contact with the detection layers in MOS detection module.
Sensitive layer in detection layers 1 has been heated to the specified temp that applicable CO reacts, and reacts, cause the resistance of sensitive layer to change, and resistance change is relevant with CO concentration after the CO in multicomponent gas contacts with sensitive layer.Calculate the resistance value of sensitive layer in multicomponent gas environment by basic test loop, and then obtain CO concentration in multicomponent gas.
Sensitive layer in detection layers 2 has been heated to applicable CH
2the specified temp of O reaction, the CH in multicomponent gas
2o reacts after contacting with sensitive layer, causes the resistance of sensitive layer to change, and resistance change and CH
2o concentration is relevant.Calculate the resistance value of sensitive layer in multicomponent gas environment by basic test loop, and then obtain CH in multicomponent gas
2o concentration.
Sensitive layer in detection layers 3 has been heated to applicable NO
2the specified temp of reaction, the NO in multicomponent gas
2react after contacting with sensitive layer, cause the resistance of sensitive layer to change, and resistance change and NO
2concentration is relevant.Calculate the resistance value of sensitive layer in multicomponent gas environment by basic test loop, and then obtain NO in multicomponent gas
2concentration.
Two, NDIR detection module measures the CH in multicomponent gas
4, CO
2concentration
Multicomponent gas (CO, CH
2o, NO
2, CH
4, CO
2) diffuse into the light room of compound gas sensor, when infrared light is through light room, CH
4gas will absorbing wavelength be the infrared light of 3.4 μm, CO
2gas will absorbing wavelength be the infrared light of 4.26 μm, and absorption intensity is relevant with gas concentration, meets Lambert-Bill law.
Triple channel pyroelectric infrared detector is entered after infrared light is absorbed.CH
4the window of Measurement channel is provided with the narrow band pass filter that one piece of centre wavelength is 3.4 μm, the centre wavelength of this optical filter and CH
4the absorbing wavelength of gas is consistent, only has the infrared light of this wavelength could be through, and the infrared light of other wavelength can not be through.Wavelength is received by pyroelectric detector after the infrared light optical filter of 3.4 μm, is converted into electric signal; CO
2the window of Measurement channel is provided with the narrow band pass filter that one piece of centre wavelength is 4.26 μm, the centre wavelength of this optical filter and CO
2the absorbing wavelength of gas is consistent, only has the infrared light of this wavelength could be through, and the infrared light of other wavelength can not be through.Wavelength is received by pyroelectric detector after the infrared light optical filter of 4.26 μm, is converted into electric signal; The window of reference channel is provided with the narrow band pass filter that one piece of centre wavelength is 4.0 μm, and the infrared light of this wavelength is hardly by any gas absorption.Wavelength be the infrared light of 4.0 μm by being received by pyroelectric detector after optical filter, be converted into electric signal.
Obtain the electric signal on Measurement channel and reference channel, the CH in multicomponent gas can be calculated based on Lambert-Beer Absorption Formula
4and CO
2gas concentration.
Three, temperature compensation, linear compensation and concentration signal export
Control module gathers raw electrical signal, and carries out complicated temperature compensation and linear compensation process to it, finally obtains gas concentration value accurately, and external outputting standard digital signal.
Claims (6)
1. a compound gas sensor, comprise MOS detection module, NDIR detection module and control module, it is characterized in that: described MOS detection module is made up of one or more layers detection layers, described detection layers comprises sensitive layer, insulation course, well heater, substrate, be heated to specific range of temperatures by described well heater, detect specific gas; Described NDIR detection module is made up of infrared light supply, light room, infrared remote receiver; Described control module is made up of signal transacting subelement and microprocessor subelement; Described well heater is the total parts of described MOS detection module and NDIR detection module, not only as the heating element of described MOS detection module, also as the infrared light supply of described NDIR detection module, and is modulated by described control module.
2. compound gas sensor according to claim 1, is characterized in that: described sensitive layer adopts metal oxide material, and vacuum moulding machine is to substrate surface; Described well heater is platinum filament or platinum alloy silk or resistive metal oxides or deposits platinum thin layer.
3. compound gas sensor according to claim 1, it is characterized in that: described light chamber internal surface is covered with Gold plated Layer or platinum plating layer gold, described infrared remote receiver is pyroelectric infrared detector, described pyroelectric infrared detector is multi-channel heat release electric infrared eye, its window is provided with optical filter, and described optical filter is the narrow band pass filter of multicoating.
4. compound gas sensor according to claim 1, it is characterized in that: described signal transacting subelement comprises sensor matching circuit, signal amplification circuit and signal amplification output circuit, described MOS detection module and NDIR detection module are sequentially connected to described microprocessor subelement by described sensor matching circuit, signal amplification circuit and signal amplification output circuit.
5. compound gas sensor according to claim 1, it is characterized in that: described microprocessor subelement comprises microprocessor, analog to digital conversion circuit, temperature-compensation circuit and data-carrier store, described analog-to-digital conversion circuit, temperature-compensation circuit and data-carrier store are all connected to described microprocessor, the simulating signal that described microprocessor is exported by described analog to digital conversion circuit collection signal process subelement, after treatment, outputting standard digital signal, described temperature-compensation circuit is for revising the measuring error caused by temperature, described data storage subunit operable is Electrically Erasable Read Only Memory.
6. compound gas sensor according to claim 1, it is characterized in that: comprise housing, housing upper bottom portion is wire netting, lower bottom part is encapsulating part, enclosure interior arranges MOS detection module, NDIR detection module and control module, described control module is fixed on encapsulating part by the contact pin on its circuit board, and described MOS detection module and NDIR detection module are fixed on the circuit board of control module by pin; Described light room is hollow columnar structures, and its one end and infrared remote receiver are fixed, and the other end and MOS detection module are fixed, and the workplace of MOS detection module is towards light chamber interior.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510086084.XA CN104730116A (en) | 2015-02-17 | 2015-02-17 | Compound gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510086084.XA CN104730116A (en) | 2015-02-17 | 2015-02-17 | Compound gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104730116A true CN104730116A (en) | 2015-06-24 |
Family
ID=53454216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510086084.XA Pending CN104730116A (en) | 2015-02-17 | 2015-02-17 | Compound gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104730116A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108732212A (en) * | 2018-05-23 | 2018-11-02 | 重庆海士测控技术有限公司 | A kind of manufacturing method, sensor and its application of manifold effect detection integrated gas sensors manufacturing method |
| US10473607B2 (en) | 2017-02-13 | 2019-11-12 | Winbond Electronics Corp. | Gas sensor |
| CN116818699A (en) * | 2023-06-07 | 2023-09-29 | 南京信息工程大学 | Non-spectroscopic infrared gas sensor and calibration measurement method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201222035Y (en) * | 2008-06-18 | 2009-04-15 | 上海安誉智能科技有限公司 | Detection sensor for infrared gas |
| CN101587068A (en) * | 2009-05-27 | 2009-11-25 | 陈小英 | Multi-sensor gas analyzer |
| CN102608064A (en) * | 2012-04-10 | 2012-07-25 | 河南汉威电子股份有限公司 | Three-channel infrared gas sensor for CO gas high-precision detection |
| CN203324179U (en) * | 2013-05-20 | 2013-12-04 | 安徽大学 | High-sensitivity portable gas detection instrument based on NDIR (Non-Dispersive Infra-Red) principle |
| CN103926210A (en) * | 2014-04-23 | 2014-07-16 | 南车二七车辆有限公司 | Device for detecting species of gases |
| CN203870018U (en) * | 2014-04-23 | 2014-10-08 | 南车二七车辆有限公司 | Detecting device for various kinds of gas |
| CN204705609U (en) * | 2015-02-17 | 2015-10-14 | 杭州麦德乐传感科技有限公司 | Compound gas sensor |
-
2015
- 2015-02-17 CN CN201510086084.XA patent/CN104730116A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201222035Y (en) * | 2008-06-18 | 2009-04-15 | 上海安誉智能科技有限公司 | Detection sensor for infrared gas |
| CN101587068A (en) * | 2009-05-27 | 2009-11-25 | 陈小英 | Multi-sensor gas analyzer |
| CN102608064A (en) * | 2012-04-10 | 2012-07-25 | 河南汉威电子股份有限公司 | Three-channel infrared gas sensor for CO gas high-precision detection |
| CN203324179U (en) * | 2013-05-20 | 2013-12-04 | 安徽大学 | High-sensitivity portable gas detection instrument based on NDIR (Non-Dispersive Infra-Red) principle |
| CN103926210A (en) * | 2014-04-23 | 2014-07-16 | 南车二七车辆有限公司 | Device for detecting species of gases |
| CN203870018U (en) * | 2014-04-23 | 2014-10-08 | 南车二七车辆有限公司 | Detecting device for various kinds of gas |
| CN204705609U (en) * | 2015-02-17 | 2015-10-14 | 杭州麦德乐传感科技有限公司 | Compound gas sensor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10473607B2 (en) | 2017-02-13 | 2019-11-12 | Winbond Electronics Corp. | Gas sensor |
| CN108732212A (en) * | 2018-05-23 | 2018-11-02 | 重庆海士测控技术有限公司 | A kind of manufacturing method, sensor and its application of manifold effect detection integrated gas sensors manufacturing method |
| CN108732212B (en) * | 2018-05-23 | 2020-12-15 | 哈尔滨工程大学 | Manufacturing method of multi-effect detection integrated gas sensor, sensor and application of sensor |
| CN116818699A (en) * | 2023-06-07 | 2023-09-29 | 南京信息工程大学 | Non-spectroscopic infrared gas sensor and calibration measurement method thereof |
| CN116818699B (en) * | 2023-06-07 | 2024-03-12 | 南京信息工程大学 | Non-spectroscopic infrared gas sensor and calibration measurement method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI588481B (en) | Metal oxide gas sensor array devices, systems, and associated methods | |
| CN207601552U (en) | air quality integrated detecting device | |
| GB201018418D0 (en) | Temperature calibration methods and apparatus for optical absorption gas sensors, and optical absorption gas sensors thereby calibrated | |
| CN201909754U (en) | Optical gas sensor | |
| CN206725432U (en) | A kind of non-spectral formula infrared gas sensor for how regional and more gasmetries | |
| CN109564180A (en) | Environment sensor system | |
| CN104730116A (en) | Compound gas sensor | |
| CN106990065A (en) | A kind of non-spectral formula infrared gas sensor for how regional and many gasmetries | |
| CN204705609U (en) | Compound gas sensor | |
| CN105973831A (en) | Four-path gas component measurement pyroelectric infrared detector | |
| CN103278489A (en) | Fluorescent oxygen sensor | |
| JP2004239611A (en) | Co sensor | |
| Valt et al. | Design and validation of a novel operando spectroscopy reaction chamber for chemoresistive gas sensors | |
| CN203324188U (en) | Fluorescent oxygen sensor | |
| US8665424B2 (en) | Optical absorption gas analyser | |
| CN105424904A (en) | Gunpowder gas ingredient testing system | |
| Kocache | Gas sensors | |
| CN111141683A (en) | Infrared thermal conductivity gas sensor and infrared gas detection method | |
| KR101614034B1 (en) | Integrated sensor | |
| KR20200049142A (en) | Air quality measuring device | |
| CN102243195A (en) | A resistance-type nitrogen dioxide gas sensor, and an apparatus manufactured with the sensor | |
| CN202049126U (en) | Resistance type nitrogen dioxide sensor and instrument manufactured by same | |
| CN201434836Y (en) | Optical and digital integrated dual-mode intelligent methane detector | |
| Zuliani et al. | Flow compensated gas sensing array for improved performances in breath-analysis applications | |
| CN206862880U (en) | A kind of gas molecule detection means |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20161027 Address after: Hangzhou City, Zhejiang province 311188 Yuhang economic and Technological Development Zone (Qianjiang Development Zone) Applicant after: Multi IR Optoelectronics Co., Ltd. Address before: 311188 Xingguo Road, Qianjiang Economic Development Zone, Zhejiang, Hangzhou, 503-3-503 Applicant before: Hangzhou Mai Dele sensing Science and Technology Ltd. |
|
| CB02 | Change of applicant information |
Address after: Hangzhou City, Zhejiang province 311188 Yuhang economic and Technological Development Zone (Qianjiang Development Zone) Applicant after: Hangzhou Mai peak Polytron Technologies Inc Address before: Hangzhou City, Zhejiang province 311188 Yuhang economic and Technological Development Zone (Qianjiang Development Zone) Applicant before: Multi IR Optoelectronics Co., Ltd. |
|
| COR | Change of bibliographic data | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150624 |
|
| RJ01 | Rejection of invention patent application after publication |