CN104729580A - Multisensory Detector - Google Patents
Multisensory Detector Download PDFInfo
- Publication number
- CN104729580A CN104729580A CN201410806546.6A CN201410806546A CN104729580A CN 104729580 A CN104729580 A CN 104729580A CN 201410806546 A CN201410806546 A CN 201410806546A CN 104729580 A CN104729580 A CN 104729580A
- Authority
- CN
- China
- Prior art keywords
- substrate
- detection branch
- pad
- branch
- metering circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R17/00—Measuring arrangements involving comparison with a reference value, e.g. bridge
- G01R17/10—AC or DC measuring bridges
- G01R17/105—AC or DC measuring bridges for measuring impedance or resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/0206—Three-component magnetometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Pressure Sensors (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Micromachines (AREA)
Abstract
The invention relates to a measuring circuit for a multisensory detector characterized in that it comprises: a plurality of detection branches mounted in parallel, with each one comprising at least two dipoles mounted in series, and, at least one reference branch, comprising a polarizing source and at least two dipoles mounted in series. The reference branch are connected in parallel to at least two detection branches among the plurality of branches, so as to form a Wheatstone bridge with each one of the detection branches among the plurality of detection branches.
Description
Technical field
The present invention relates to microelectronic industry, it covers microelectric technique and Nanoelectronic Technology.More specifically, the present invention relates to a kind of many Sensitive Detector for MEMS (micro electro mechanical system) (MEMS) or nano electromechanical systems (NEMS).
Background technology
Many Sensitive Detector, such as the direction of the consumer market of triaxial accelerometer, three axle magnetometers, three-axis gyroscope and pressure detector type normally towards the reduced size of parts to realize competitive cost.
Therefore, for nine axis detector, it comprises the silicon of MEMS (micro electro mechanical system) (MEMS) type, the soft copy of its signal transacting comprises the integrated circuit (" application-specific integrated circuit " for application program, acronym is " ASIC ") and wrapper, the stock size of this nine axis detector is 4 × 4mm
2(mm=millimeter), and will 3 × 3mm be reached very soon
2.Under such dimensional requirement, independent silicon is of a size of about 4mm
2.When space is limited to very much, if the structure of MEMS comprise 6,9 or or even 10 measure axle (or measured object), and it is mutual to need the pad of important number (pad) to come with the reading soft copy of each axle, and this MEMS structure can not be made in some cases.In fact, the size of parts is by being greater than the space of placing needed for MEMS structure in this case, thus needs too high manufacturing cost.
Usually, be considered to responsive element and occupy less than 25% of total size of silicon.The wire of most surfaces is used for signal (power supply, detection) to route to pad, and chip is connected to external component (ASIC) by this pad, also for signal being routed to sealing serial connection attachment base to form over cap.
Such as, in six axle detector for measuring (such as, comprising the detecting device of triaxial accelerometer and three-axis gyroscope), each axle is detected by Wheatstone bridge (Wheatstone bridge).Three Wheatstone bridges needed for accelerometer are connected to different power supplys; Three Wheatstone bridges needed for gyroscope are also like this.In order to eliminate the impact of the parasitic dipoles of electric bridge outside, in the terminal place measuring voltage of each electric bridge.For each gyroscope adds two pads for activating and control inertial mass, and to test oneself pad for accelerometer interpolation.Such system needs minimum 4 pads to be used for power supply, the voltage that 12 pads are supplied for the terminal measured to each electric bridge, 12 pads are for measuring the imbalance of each electric bridge, and 6 pads are used for activating and controlling gyrostatic inertial mass, and 1 pad is used for testing oneself of accelerometer.Therefore reach the minimum sum of 35 pads, owing to producing constraint, these pads are distributed in the both sides of chip usually.For 200 microns (μm=micron=10
-6rice), the typical pitch between this pad, minimum in the size of chip is 3.6 millimeters.For the minimum dimension on the other directions of about 1.5 millimeters to 2 millimeters, the minimum dimension of chip is 5.4mm
2to 7.2mm
2, and the size with the current enabled production of the detection of capacity type is less than 5mm
2and trend is towards even less size.Therefore the production of pad become the limiting factor reducing MEMS component size.
Also need to limit power consumption, power consumption is very high in the current equipment using Wheatstone bridge.
The object of this invention is to provide a kind of many Sensitive Detector, with optimize connect and particularly with the size of limiting part.
Especially advantageously, the present invention is also intended to the energy consumption reducing such detecting device.
Summary of the invention
The present invention relates to a kind of metering circuit for many Sensitive Detector, it comprises:
The multiple detection branch be installed in parallel, each detection branch comprises at least two dipoles be installed in series; And
At least one is with reference to branch road, the road of described reference comprises polarization source and at least two dipoles be installed in series, describedly be connected at least two detection branch in described multiple detection branch with reference to branch circuit parallel connection, thus form Hui Sidun with each of described at least two detection branch and to be energized bridge.
The invention still further relates to and a kind ofly comprise at least one many Sensitive Detector according to metering circuit of the present invention.
The so-called many electric bridges of the invention process are installed, and are connected to multiple detection branch to share identical polarization source (polarizing source) with reference to branch road, and thus reduce energy consumption.
Mount scheme proposed by the invention also proposed the solution reducing pad (pads) number that MEMS (micro electro mechanical system) exists.Pad is the access means of the impedance variation can measuring dipole.Such solution depends on different detection branch sharing access pad, and different detection branch comprises dipole (each dipole comprises a measured object).Preferably, the substrate of the system comprising MEMS type or NEMS type is performed to the interconnection of detection branch.
Accompanying drawing explanation
According to passing through the following drawings illustrated embodiment, and detailed description afterwards, other features of the present invention, object and advantage will be disclosed better, in accompanying drawing:
Fig. 1 is the schematic diagram of the many Sensitive Detector according to prior art, and it needs and the as many polarization source of measured object.Each detection branch comprises dipole, and its impedance changes according to the differentiation of measured object.
Fig. 2 is the schematic diagram of the many Sensitive Detector according to prior art, and it needs and the as many polarization source of measured object.Each detection branch comprises two dipoles, and its impedance changes according to the differentiation of measured object.
Fig. 3 is the schematic diagram according to many Sensitive Detector of the present invention, and it needs the polarization source for multiple measured object.Measured object associates with each detection branch.
Fig. 4 to Fig. 6 shows the schematic diagram according to many Sensitive Detector of the present invention, and it needs for multiple measured object polarization source.Measured with measurement pad associate with each detection branch.
Fig. 7 is the schematic diagram according to many Sensitive Detector of the present invention, and it needs the polarization source for multiple measured object.In such embodiments, additional (or access) pad of measuring is positioned on attachment base.
Fig. 8 has two many Sensitive Detector of measured object.In this case, five pads are positioned on attachment base.
The accompanying drawing provided herein exemplarily, and unrestricted the present invention.These are schematic diagram, are intended to be convenient to understand the present invention, are not requisite in real world applications.
Embodiment
Before the detailed discussion carrying out embodiments of the invention, first list can in conjunction with or alternatively solution use optional feature.
Advantageously, circuit comprises at least one dipole with variableimpedance, and this impedance changes along with the differentiation of measured object.
Directly or by the first pad and the second polarization pad detection branch is connected to reference to branch road.
Especially advantageously, pad is measured by least one central authorities that each detection branch is connected between the dipole of described detection branch in the midpoint of detection branch.
Two additional pads of measuring preferably are installed in parallel and the polarizing voltage being configured to control detection branch.
Many Sensitive Detector especially advantageously at least comprise metering circuit.
Advantageously, metering circuit is formed on first substrate and second substrate at least partly, and described substrate is assembled to form cavity.
When being connected in parallel to detection branch with reference to branch road by means of the first pad and the second polarization pad, described measurement pad, central authorities' measurement pad and at least one measurement in pad additional are measured pad and are advantageously located on first substrate and/or second substrate.
Advantageously, be positioned on first substrate at least partly with reference to branch road and/or be positioned at least partly on second substrate.
Preferably, each detection branch is positioned on first substrate at least partly.
Advantageously, each detection branch is connected at least one central authorities and detects pad, and described measurement pad is positioned on second substrate or first substrate.
According to specifically favourable embodiment, detecting device comprises MEMS (micro electro mechanical system) and/or nano electromechanical systems.
Advantageously, MEMS (micro electro mechanical system) and/or nano electromechanical systems are positioned at cavity.
Preferably, MEMS (micro electro mechanical system) and/or nano electromechanical systems comprise at least one mobile storage (mass).
According to a preferred embodiment, MEMS (micro electro mechanical system) and/or nano electromechanical systems manufacture on the first substrate.
Advantageously, first substrate and/or second substrate comprise interconnecting lead.
Fig. 1 shows traditional circuit relevant to detecting device, and this detecting device has two measured objects.Measured to liking a kind of input physical quantity, it is transformed into another and exports physical quantity or electric signal.The type of this physical quantity can be, (electric current, voltage, electric charge, impedance, dielectric), (magnetic field) of magnetic, (visible ray, X ray, the microwave) of radiation of (displacement, power, quality, the stream) of such as machinery, (temperature, thermal capacity, the hot-fluid) of heat, electricity, or (humidity, the gas) of (biology) chemistry.According to such embodiment, metering circuit comprises some with reference to branch road 100.Each at least two dipoles 25 comprising polarization source 10 with reference to branch road 100 and be installed in series.Circuit also comprises detection branch 200.Each detection branch 200 comprises at least two dipoles 25 be installed in series.For each measured object, associate to form Wheatstone bridge with detection branch 200 with reference to branch road 100.
In this case, each dipole in the dipole 25 of detection branch 200 represents passive transducer, namely has the dipole of variableimpedance, and variableimpedance can be resistance-type, capacitive or inductance type.The number of the pad 55 that each measured object is implemented is that the two: first pad 55 is configured to injecting and polarizing electric current, and the second pad 55 is configured to extract polarization current.
In this case, if n measured object, then the number reading the pad 55 needed for each preferred passive transducer 25 equals 2 × n.Such as, for the detecting device with 10 axles (i.e. 10 measured objects), it needs 20 to connect pad 55.
Wheatstone bridge mounting means can be used to read dipole 25 from Vm output voltage.The reference branch road 100 generated with reference to electromotive force is manufactured on substrate 300 outside completely in such exemplary configuration.Advantageously, substrate 300 comprises the chip of MEMS (micro electro mechanical system) (acronym of MEMS (micro electro mechanical system) is MEMS) type.The detection branch 200 of half is only had to represent on the substrate 300.
Fig. 2 diagram comprises the circuit of detecting device, and wherein, the preferred passive transducer 25 of each detection branch 200 is for relative measured object.This different inspection policies is normally preferred, because it makes it possible to the consistent change advantageously using Wheatstone bridge to eliminate the impedance caused by influence amount (such as temperature).
When detecting device having two preferred passive transducers 25, implementing each number measuring pad 50,55 used is that the three: first pad 55 is configured to injecting and polarizing electric current, second pad 55 is configured to extract current polarizing, and the imbalance that pad 50 is configured to read electric bridge is measured by the 3rd central authorities.
In this situation, if n measured object, then the number realizing the pad 50,55 required for reading of each passive transducer 25 is 3 × n.Such as, for the detecting device with 10 axles, i.e. 10 measured objects, need 30 pads 50,55.
Wheatstone bridge mounting means can be used to read dipole 25 from output voltage Vm.In such exemplary configuration, generate making in substrate 300 outside completely with reference to branch road 100 with reference to electromotive force.On the contrary, detection branch 200 is made in substrate 300.
According to the mounting means of Fig. 1 and Fig. 2 of prior art, wherein with reference to branch road 100 and measured object as many, thus also with detection branch 200 as many.
The assembling of preferred passive transducer 25 must be polarized to realize continuous read mode simultaneously, and electric current is through all reference branch roads 100.Due to power consumption be about polarization after the increasing function of number with reference to branch road 100 (assuming that such branch road has identical dipole 25, usually, make it can be responsive for identical influence amount owing to preferably using identical transducing dipole), The present invention reduces the number with reference to branch road 100.
According to exemplary embodiment, for the electric current of generation 100 microamperes (μ A) and 4000 ohm of (Ω) dipoles, amount to 40 microwatts (μ W) by the energy of Joule effect loss.Therefore the Typical solutions discussed in above paragraph needs the power of 80 μ W to polarize to measured object.
Fig. 3 to Fig. 8 shows according to embodiments of the invention.
Fig. 3 shows the schematic diagram of many electric bridges type mounting means, and it interconnects according to Wheatstone bridge and comprises multiple detection branch 200 of at least one passive transducer 25, makes multiple detection branch 200 share the public polarization source 10 of reference branch road 100.
The measuring-signal Vm of each measured object corresponds to the voltage difference between the so-called mid point with reference to branch road 100 (to measured sensitivity or insensitive impedance, or the impedance to influence amount sensitivity) and the mid point of detection branch 200; Described branch road 200 is provided with and measured at least one passive transducer 25 associated.One of them solution of the present invention is, shares the identical Vo reference electromotive force used to generate all detection branch 200 with reference to branch road 100.
This causes particularly, and compared with can introducing the solution of reference branch road 100 (namely polarize source 10) as many with measured object (i.e. detection branch 200), the drain current in polarization source 10 is lowered.
When measured object number increases, therefore the power consumption of this mounting means lowers 1/2nd.According to non-limiting example of the present invention, for the equipment with two measured objects, only need three branch roads polarized (namely with reference to branch road 100 and two detection branch 200), and be no longer four branch roads 100,200 required for mounting means of the prior art.For the equipment with seven measured objects, mounting means of the present invention only needs eight polarization branch roads (namely with reference to branch road 100 and seven detection branch 200), and is no longer 14 branch roads 100,200 required in prior art.
Fig. 4 illustrates sharing of the polarization pad 55 of detecting device, and each detecting device has two advantageously passive transducers 25.Fig. 4 more specifically illustrates the location of advantageously passive transducer 25 and multiple pad 50,55.Two pads 55 in multiple pad 50,55 can polarize to the detection branch 200 associated with each detection axis.Two pads 55 so are advantageously connected to polarization source 10.The measuring-signal Vm of each measured object is based upon in the electric potential difference between the mid point of each detection branch 200 and the mid point of reference branch road 100.The midpoint that therefore pad 50 is positioned at each detection branch 200 is measured by central authorities, to extract the measured object of each detection branch 200.Under this configuration mode, carry out the interconnection of detection branch on the substrate 300.Therefore the number of the pad 50,55 needed for being connected with external apparatus interface for substrate 300 i.e. MEMS (micro electro mechanical system) equals n+2, and wherein n is measured object number.
When each detection branch 200 only exists a transducer 25, different measured objects only can share a pad in two pads 55.This makes it possible to by the decreased number of pad 50,55 to n+1 (wherein n is measured object number), but not the 2xn of the known solution of prior art.Advantageously, such equipment causes reducing by n-1 pad 50,55.According to the example of configuration, for the equipment with 10 measured objects, advantageously only need 11 pads 50,55 according to the present invention, and need 20 pads 50,55 according to prior art.When each detection axis exists two transducers, two pads 55 can be shared for each detection branches 200 wherein.Therefore, this makes it possible to by the decreased number of pad 50,55 to n+2 (wherein n is measured object number), but not the 3xn of the known solution of prior art, this causes advantageously reducing the individual pad 50,55 of 2x (n-1).According to the example of configuration, for having 10 measured object-based devices, only needing 12 pads 50,55 according to the present invention, and needing 30 pads 50,55 according to prior art.
In both cases, according to the number of polarization pad 55 and the number of central authorities' measurement pad 50, can especially advantageously obtain significant gain, when the measured object number especially on the substrate 300 preferably including MEMS (micro electro mechanical system) (MEMS) becomes very important.The invention is not restricted to MEMS (micro electro mechanical system), nano electromechanical systems (NEMS) can also be applied to.
Fig. 5 illustrates according to equipment of the present invention, is wherein integrated in substrate 300, i.e. MEMS (micro electro mechanical system) with reference to branch road 100.Advantageously powered by identical pad 55 with detection branch 200 with reference to branch road 100.Additional center is needed to measure pad 50 to arrive the mid point with reference to branch road 100 generated with reference to electromotive force.Therefore the number of required pad 50,55 equals n+3 in the present embodiment, and wherein n is measured object number.
Make it possible to copy the electromotive force with the detection branch 200 of each measured object association when measured object is idle with reference to branch road 100.Be integrated into and comprise being therefore oriented near different detecting device with reference to branch road 100 in the substrate 300 of MEMS (micro electro mechanical system).According to a kind of specifically favourable embodiment, such electrical lead can be used to be connected to the remainder of equipment with reference to branch road 100, this electrical lead such as on the substrate 300, advantageously in MEMS (micro electro mechanical system).
Such configuration has some advantages.The advantageously passive transducer 25 identical with detection branch 200 advantageously can be manufactured with reference to branch road 100.With reference to branch road 100, therefore advantageously there is in influence amount similar with detection branch 200 or even identical performance.In addition, the wire associated with the middle electric bridge electromotive force with reference to branch road 100 with the middle electric bridge electromotive force of detection branch 200 can advantageously be retained as close to each other.Being positioned with like this is beneficial to the susceptibility etc. of reduction for electromagnetic interference (EMI), the differential mode (such as loop inductance, capacitive couplings, inductance type coupling etc.) of electromagnetic interference influence measuring-signal.
When there is extra electric bridge dipole (parasitic dipoles) to the advantageously access of passive transducer, therefore the middle electric bridge electromotive force with reference to branch road 100 is especially advantageously modified to the Vm electromotive force of detection branch 200.
In most embodiments, responsive to the measured object of in the measured object of many Sensitive Detector with reference to branch road 100.According to the present invention, especially advantageously can consider to make reference branch road 100 responsive to deduct so measured object from another measured object for the measured object of in measured object.Such as, move on the detecting device of (i.e. 6 axis detector: 3 axle accelerometers and 3 axle magnetometers, so-called " 3A3M ") in three-dimensional accelerometer motion and magnetometer, detection branch 200 can be responsive for the combination α xa+B in acceleration and magnetic field, wherein a is measured, and B is the value in magnetic field.If be designed to for acceleration alpha xa responsive with reference to branch road 100, then Vm measuring-signal only can obtain the value of magnetic field B.Similarly, can consider from such configuration, wherein, responsive for measured a with reference to branch road 100, detection branch 200 is responsive for measured a, and the measuring-signal Vm produced is responsive for measured object Vm=2a.But, in both cases, obtain from the combination of detection branch 200 with reference to the signal that branch road 100 exists.When all detection branch 200 are subject to so measured object influences similarly, such embodiment is especially favourable.
Fig. 6 illustrates a kind of embodiment, and wherein two additional pads 56 of measuring have been added into equipment with the Vp polarizing voltage controlling detection branch 200.Being preferably located in additional measurement pad 56 on substrate 300 advantageously can measuring bridge voltage and therefore provide the correction to Vm measuring-signal.In fact, the ratio between two such signals makes it possible to the impact eliminating extra electric bridge dipole.Additional measurement access pad 56 like this can comprise unstable dipole 35 (such as resistance) or/and have important value, those values such as between bi-material, such as produced during gold (Au) seals with the eutectic of silicon (Si).Its impact is all negligible, because the input impedance in voltage measurement stage is very high.
Different detection branch 200 in equipment can influence each other in some cases.If dipole 25 is not balanced admirably in each detection branch 200, and/or has identical susceptibility, then can tamper detection branch road 200 and the overall impedance of assembly with reference to branch road 100.Such effect can affect the overall impedance of many electric bridges equipment subsequently, and wherein the impedance parallel connection of detection branch 200 is placed.This causes the change of the actual polarizing voltage applied to the terminal of detection branch 200.The solution provided can solve such problem.As for electric power, the interference that each detection branch 200 detects with wherein additionally dipole 35 to revise the interference of the polarizing voltage that many electric bridges are equipped identical.
Fig. 7 is the schematic diagram of the circuit forming detector for measuring according to part of the present invention.Advantageously, be positioned on first substrate 300, preferably to form MEMS (micro electro mechanical system) with reference to branch road 100 and detection branch 200.According to another embodiment, pad 50,55,56 is positioned on first substrate 300 and/or second substrate 350.According to a kind of especially favourable embodiment, pad 50,55,56 is only positioned on second substrate 350.Advantageously, first substrate 300 and second substrate 350 are made up of semiconductor material.Substrate 300,350 can such as based on silicon.
The dipole advantageously passive transducer 25 being connected to substrate 300 forms electric bridge endoparasitism dipole 45.In order to solve resistance problems, electric bridge endoparasitism dipole 45 should be reduced as far as possible.If the value of such dipole is no more than 1% of the impedance of advantageously passive transducer 25, then can think that the such operation of dipole on detecting device has insignificant impact.If such as confirm the stability of such parasitic dipoles at 1% place, then such value is acceptable.Therefore, the global disturbs produced in detection branch 200 is 100/1000000ths of the resistance value of transducer 25.Such interference level must be less than the minimum change being expected to be useful in such transducer 25.
According to this favourable but non-limiting example of the present invention, it is outside that extra electric bridge parasitic dipoles 65,76 is all positioned at many electric bridges equipment.When dipole in electric bridge 45 remains on advantageously between passive transducer 25, be integrated in the impedance of advantageously passive transducer 25 the performance that advantageously passive transducer 25 can be relevant with influence amount when it is consistent.
In this case, the polarizing voltage of two interconnecting nodes being applied to branch road 100,200 can be changed by so extra electric bridge parasitic dipoles 65,75.
In addition, manufacture method can generate high parasitic interconnect dipole 65.When needing the metal sealing of eutectic (gold silicon (Au-Si), aluminium germanium (Al-Ge), golden tin (Au-Sn) etc.) type to make conductor be connected to second substrate 350 from first substrate 300, like this is exactly.The value of the parasitic dipoles 65 of such sealing may be very high.Under these circumstances, the parasitic dipoles 65 of seal must be preferably located in Wheatstone bridge outside, between first substrate 300 and second substrate 350, such as, meet place of boundary, and second substrate is different from first substrate and comprises Wheatstone bridge.Therefore the advantageously passive transducer 25 of electric bridge should interconnect in the downstream of parasitic dipoles 65 relative to polarization pad 55 and/or additional pad 56 of measuring.According to exemplary embodiment, this can obtain by means of the successive layers of conductive material.Such layer such as can be made up of doped silicon and metal (such as aluminium).In fact, have by using the dipole that good conductive of material can reduce the wire between two transducers 25 efficiently, this is the suitable dimension due to wire.Such as, the wire that impedance is less than 1 ohm can manufacture with the layer of Silicified breccias, and can ignore compared with the advantageously passive transducer 25 being about 2000 ohm with impedance.The dipole that therefore configuration provided solves the very high or unstable properties of wherein contact value may appear at the problem on its pad 50,55,56 when sealing first substrate 300 and second substrate 350.Therefore the uncontinuity between the conductor of first substrate 300 and the conductor of second substrate 350 is obtained.
In the figure of Fig. 7, if dipole as compared to the input impedance in Vp with Vm voltage measurement stage very little, then the parasitic dipoles 65 that the value of metal sealing is very high is positioned at electric bridge outside, and is not included in metering circuit.
Fig. 8 is the schematic diagram of detecting device.First substrate 300 preferably includes the MEMS (micro electro mechanical system) at least formed by circuit, interconnecting lead 600 and meter 700.First substrate 300 advantageously comprises interconnecting lead 600, and interconnecting lead 600 is configured to from a pad 50,55,56 to another pad routing iinformation (such as physical quantity, electric signal).Second substrate 350 is advantageously sealed to first substrate 300 by means of interconnecting lead 600, to form the cavity of at least accommodating meter 700.Meter 700 is pressure resistance type meter according to preferred embodiment.Such as, by meter detecting device, first the elastic deformation of measuring sensor is converted to the change of the resistance accumulated, to generate the electrical output signal of wheatstone bridge circuits subsequently.Advantageously, circuit comprises at least one mobile storage.According to a kind of especially favourable embodiment, pad 50,55,56 is positioned on second substrate 350.
Fig. 8 illustrates two measured object detector.In this case, 5 pads 50,55,56 are positioned on second substrate 350, namely measure pad 50 for the pad 55,1 polarized for the central authorities with reference to branch road 100 for 2, from 2 measurement pads 50 of 2 measured objects that two detection branch 200 are extracted.
Form below compares number substrate 300 producing the pad 5,55,56 required for various configuration.In this exemplary embodiment, each detection branch 200 exist two advantageously passive transducers 25.The each configuration mentioned in form can solve some problems (such as relevant with the uneven branch road 200, parasitic dipoles 45,65,75 etc. of Wheatstone bridge problem) that in fact may occur when location survey is equipped.Especially advantageously achieve the gain (namely reducing) of the number of pad 50,55,56 in often kind of situation according to equipment of the present invention, no matter measured object number n is how many, especially for more than 1 quantity n.
Share polarization source 10 by all detection branch 200, make the polarized state that can not control advantageously passive transducer 25 an a measured object measured object.When polarization source 10 is activated, all transducers 25 are polarized, and vice versa.Polarizing voltage can be activated intermittently with high frequency (103 to 104kHz), low dutycycle (being such as less than the dutycycle of 0.2).
More specifically can consider two kinds of methods.First method comprises n Signal Regulation stage, and n Signal Regulation stage can be integrated in the specific integrated circuit of application (acronym " ASIC " of " special IC "), so that each parts of addressing simultaneously.But this solution may need important resource (such as about taking up room, energy consumption etc.) for reading electronic equipment.Second method relates to use impact damper (such as the impact damper of sampling thief type) for each measured object, makes it possible to keep middle bridge voltage for adjustment subsequently.Therefore this solution needs an only analog/digital conversion stage, or even only Simulation scale-up stage.
The invention is not restricted to previously mentioned embodiment, but be applicable to any embodiment that claim covers.In addition, metering circuit does not get rid of other parts existed except independently Wheatstone bridge.
Claims (17)
1. for a metering circuit for many Sensitive Detector, it is characterized in that, comprising:
The multiple detection branch (200) be installed in parallel, each detection branch comprises at least two dipoles (25) be installed in series; With
At least one is with reference to branch road (100), described at least two dipoles (25) comprising polarization source (10) with reference to branch road and be installed in series, at least one reference branch road (100) described is connected in parallel with at least two detection branch (200) in described multiple detection branch, to form Wheatstone bridge with each detection branch in described at least two detection branch (200) in described multiple detection branch (200).
2. metering circuit according to claim 1, described metering circuit comprises at least one dipole with variableimpedance (25) at least one detection branch (200), and at least one dipole (25) with variableimpedance described develops and impedance variation according to measured object.
3. metering circuit according to claim 1, wherein, at least two detection branch (200) described at least one reference branch road (100) described is connected to by the first polarization pad and the second polarization pad (55).
4. metering circuit according to claim 1, wherein, each detection branch in described at least two detection branch (200) is connected at least one central authorities in the midpoint of described at least two detection branch (200) and measures pad (50), between described at least two dipoles (25) of at least two detection branch described at least one central authorities' measurement pad (50) described are positioned at.
5. metering circuit according to claim 1, comprises two additional measurements pad (56) be installed in parallel, described two additional polarizing voltages measured pads and be configured at least two detection branch (200) described in control.
6. a Sensitive Detector more than, comprises at least one metering circuit according to claim 1.
7. detecting device according to claim 6, wherein, described metering circuit is formed on first substrate (300) and second substrate (350) at least partly, and described first substrate (300) and described second substrate (350) are assembled to form cavity.
8. detecting device according to claim 7, wherein, at least two detection branch described at least one reference branch road described is connected to by the first polarization pad and the second polarization pad, each detection branch in described at least two detection branch is connected at least one central authorities in the midpoint of described at least two detection branch and measures pad, pad is measured described in described at least two detection branch between at least two dipoles by least one central authorities described, two additional pads of measuring are installed in parallel and the polarizing voltage being configured at least two detection branch described in control, at least two detection branch (200) described at least one reference branch road (100) described is connected in parallel to by described first polarization pad and described second polarization pad (55), pad (50) is measured by least one central authorities described and described two additional pads (56) and described first polarization pad and described second polarization pad (55) measured are positioned on described first substrate (300) and/or described second substrate (350).
9. detecting device according to claim 7, wherein, at least one reference branch road (100) described is positioned on described first substrate (300) at least partly.
10. detecting device according to claim 7, wherein, at least one reference branch road (100) described is positioned on described second substrate (350) at least partly.
11. detecting devices according to claim 7, wherein, each detection branch in described at least two detection branch (200) is positioned on described first substrate (300) at least partly.
12. detecting devices according to claim 7, wherein, each detection branch in described two detection branch (200) is connected at least one central authorities and measures pad (50), and at least one central authorities described measure pad (50) and are positioned on the upper or described first substrate (300) of described second substrate (350).
13. detecting devices according to claim 7, comprise MEMS (micro electro mechanical system) and/or nano electromechanical systems.
14. detecting devices according to claim 13, wherein, described metering circuit is formed on first substrate and second substrate at least partly, and described first substrate and described second substrate are assembled to form cavity, and described MEMS (micro electro mechanical system) and/or described nano electromechanical systems are positioned at described cavity.
15. detecting devices according to claim 13, wherein, described metering circuit is formed on first substrate and second substrate at least partly, described first substrate and described second substrate are assembled to form cavity, and described MEMS (micro electro mechanical system) and/or described nano electromechanical systems comprise at least one mobile storage.
16. detecting devices according to claim 13, wherein, described metering circuit is formed on first substrate and second substrate at least partly, described first substrate and described second substrate are assembled to form cavity, and described MEMS (micro electro mechanical system) and/or described nano electromechanical systems are arranged on described first substrate (300).
17. detecting devices according to claim 13, wherein, described metering circuit is formed on first substrate and second substrate at least partly, and described first substrate and described second substrate are assembled to form cavity, and described first substrate (300) comprises interconnecting lead (600).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR13/63189 | 2013-12-20 | ||
| FR1363189A FR3015688B1 (en) | 2013-12-20 | 2013-12-20 | MULTI-SENSORY SENSOR |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104729580A true CN104729580A (en) | 2015-06-24 |
| CN104729580B CN104729580B (en) | 2019-06-28 |
Family
ID=50624699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410806546.6A Active CN104729580B (en) | 2013-12-20 | 2014-12-22 | More Sensitive Detectors |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10126333B2 (en) |
| EP (1) | EP2887086B1 (en) |
| CN (1) | CN104729580B (en) |
| FR (1) | FR3015688B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114858124A (en) * | 2022-04-14 | 2022-08-05 | 广东省水利水电科学研究院 | Dam surface deformation monitoring system and method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10704969B2 (en) * | 2017-11-21 | 2020-07-07 | The Boeing Company | Stress sensor |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6422088B1 (en) * | 1999-09-24 | 2002-07-23 | Denso Corporation | Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus |
| US20070267708A1 (en) * | 2006-05-22 | 2007-11-22 | Cardiomems, Inc. | Methods and apparatus having an integrated circuit attached to fused silica |
| US20080012558A1 (en) * | 2006-07-12 | 2008-01-17 | Werner Rossler | Magnetic field sensor device |
| EP2065713A1 (en) * | 2007-11-30 | 2009-06-03 | Commissariat A L'energie Atomique | Detection device with a hanging piezoresistive strain gauge comprising a strain amplification cell |
| CN101512369A (en) * | 2006-08-30 | 2009-08-19 | 阿尔卑斯电气株式会社 | Magnetic detector |
| CN102401884A (en) * | 2010-09-09 | 2012-04-04 | 意法半导体股份有限公司 | Reading Circuit For Magnetic Field Sensor And Reading Method Thereof |
| US20130002244A1 (en) * | 2011-06-30 | 2013-01-03 | Quevy Emmanuel P | Mems-based magnetic sensor with a lorentz force actuator used as force feedback |
| US20130087863A1 (en) * | 2011-10-07 | 2013-04-11 | Continental Automotive Systems, Inc. | Differential pressure sensor device |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3784906A (en) * | 1971-11-01 | 1974-01-08 | Biddle Co J | Bridge having multiple nulls |
| US6701296B1 (en) * | 1988-10-14 | 2004-03-02 | James F. Kramer | Strain-sensing goniometers, systems, and recognition algorithms |
| US7112951B2 (en) * | 2004-06-07 | 2006-09-26 | General Electric Company | MEMS based current sensor using magnetic-to-mechanical conversion and reference components |
| GB2418989A (en) * | 2004-10-06 | 2006-04-12 | Autoliv Dev | Vehicle deformation crash sensor |
| DE102007029817B9 (en) * | 2007-06-28 | 2017-01-12 | Infineon Technologies Ag | Magnetic field sensor and method for calibrating a magnetic field sensor |
| FR2942316B1 (en) * | 2009-02-13 | 2011-07-22 | Commissariat Energie Atomique | CONTACT FORCE SENSOR |
| FR2951826B1 (en) | 2009-10-23 | 2012-06-15 | Commissariat Energie Atomique | SENSOR WITH PIEZORESISTIVE DETECTION IN THE PLAN |
| JP5419923B2 (en) * | 2011-05-09 | 2014-02-19 | 三菱電機株式会社 | Sensor element |
| FR2977319B1 (en) | 2011-07-01 | 2014-03-14 | Commissariat Energie Atomique | OPTIMIZED SENSIBLITY PRESSURE MEASURING DEVICE |
| US9470710B2 (en) * | 2013-02-27 | 2016-10-18 | Texas Instruments Incorporated | Capacitive MEMS sensor devices |
| US9650237B2 (en) * | 2013-04-19 | 2017-05-16 | Agency For Science, Technology And Research | Electromechanical device including a suspended structure and method of fabricating the same |
| EP2806258B1 (en) * | 2013-05-20 | 2018-09-12 | ams international AG | Differential pressure sensor |
-
2013
- 2013-12-20 FR FR1363189A patent/FR3015688B1/en not_active Expired - Fee Related
-
2014
- 2014-12-18 EP EP14198979.8A patent/EP2887086B1/en active Active
- 2014-12-19 US US14/576,991 patent/US10126333B2/en active Active
- 2014-12-22 CN CN201410806546.6A patent/CN104729580B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6422088B1 (en) * | 1999-09-24 | 2002-07-23 | Denso Corporation | Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus |
| US20070267708A1 (en) * | 2006-05-22 | 2007-11-22 | Cardiomems, Inc. | Methods and apparatus having an integrated circuit attached to fused silica |
| US20080012558A1 (en) * | 2006-07-12 | 2008-01-17 | Werner Rossler | Magnetic field sensor device |
| CN101512369A (en) * | 2006-08-30 | 2009-08-19 | 阿尔卑斯电气株式会社 | Magnetic detector |
| EP2065713A1 (en) * | 2007-11-30 | 2009-06-03 | Commissariat A L'energie Atomique | Detection device with a hanging piezoresistive strain gauge comprising a strain amplification cell |
| CN102401884A (en) * | 2010-09-09 | 2012-04-04 | 意法半导体股份有限公司 | Reading Circuit For Magnetic Field Sensor And Reading Method Thereof |
| US20130002244A1 (en) * | 2011-06-30 | 2013-01-03 | Quevy Emmanuel P | Mems-based magnetic sensor with a lorentz force actuator used as force feedback |
| US20130087863A1 (en) * | 2011-10-07 | 2013-04-11 | Continental Automotive Systems, Inc. | Differential pressure sensor device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114858124A (en) * | 2022-04-14 | 2022-08-05 | 广东省水利水电科学研究院 | Dam surface deformation monitoring system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2887086B1 (en) | 2017-08-23 |
| US10126333B2 (en) | 2018-11-13 |
| FR3015688B1 (en) | 2016-01-08 |
| FR3015688A1 (en) | 2015-06-26 |
| CN104729580B (en) | 2019-06-28 |
| EP2887086A1 (en) | 2015-06-24 |
| US20150177281A1 (en) | 2015-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6438959B2 (en) | Single chip Z-axis linear magnetoresistive sensor | |
| CN103528578B (en) | Mems | |
| US10031156B2 (en) | Three-axis microelectromechanical systems devices | |
| CN206348355U (en) | Mems sensor device | |
| EP2682771B1 (en) | Push-pull bridge magnetoresistance sensor | |
| US20110234218A1 (en) | Integrated multi-axis hybrid magnetic field sensor | |
| CN208847381U (en) | Micro-electro-mechanical transducer | |
| CN102483443A (en) | Magnetic field sensor | |
| CN106298704B (en) | A kind of band is heat sink and the MEMS package of magnetic screen and preparation method thereof | |
| US10197590B2 (en) | Combined magnetometer accelerometer MEMS devices and methods | |
| JP2016517952A (en) | Magnetic sensing device, magnetic induction method and manufacturing process thereof | |
| JP2007240530A (en) | Motion sensor | |
| CN104729580A (en) | Multisensory Detector | |
| Alandry et al. | A CMOS-MEMS inertial measurement unit | |
| Dong et al. | Monolithic-integrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure | |
| Yan et al. | A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer | |
| CN207488514U (en) | A kind of three-component gravimeter probe and borehole gravimeter system | |
| CN104155620A (en) | Magnetic sensing device and sensing method and preparation technology thereof | |
| JP2002529684A (en) | Strain measuring instrument | |
| KR101103772B1 (en) | One-body type 6-axis sensor for motion capturing and method for producing the same | |
| US20160091526A1 (en) | Sensor | |
| Narasimhan et al. | Monolithic CMOS-MEMS integration for high-g accelerometers | |
| CN104483637B (en) | Improve the Magnetic Sensor and its preparation process of triaxial induction ability | |
| Liu et al. | A Full 3D Printing Method for Monolithic Integration of an Accelerometer and a Force Sensor | |
| CN105527589B (en) | Magnetometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |