CN104716951B - Interface circuit and the measuring apparatus comprising interface circuit - Google Patents
Interface circuit and the measuring apparatus comprising interface circuit Download PDFInfo
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- CN104716951B CN104716951B CN201510159154.XA CN201510159154A CN104716951B CN 104716951 B CN104716951 B CN 104716951B CN 201510159154 A CN201510159154 A CN 201510159154A CN 104716951 B CN104716951 B CN 104716951B
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Abstract
Measuring apparatus the present invention relates to interface circuit and comprising interface circuit.A kind of interface circuit includes:The a plurality of input lead extended in a first direction;Along a plurality of output lead of second direction extension intersected with first direction;The optocoupler array that multiple optocouplers are formed, the multiple optocoupler are separately positioned on a plurality of input lead near the crossover location of a plurality of output lead, adjacent input lead to be connected to adjacent output lead;And controller, for controlling the turn-on and turn-off of the multiple optocoupler.
Description
Technical field
Present invention relates in general to measuring apparatus, more specifically it relates to a kind of interface circuit with switch arrays, energy
Enough vary depending on the connection relation between input and output and the measuring apparatus comprising the interface circuit.
Background technology
Survey is defined by the determining F76-86 standards of American society for testing and materials (ASTM) (ratifying version again in 2002)
The method for measuring the resistivity and Hall coefficient of material, the side including Van der Pauw and for parallelepiped or bridge type sample
Method.Fig. 1 is the schematic diagram of Van der Pauw, and Fig. 2 is the schematic diagram of the method for eight contact parallelepipeds or bridge type sample,
Fig. 3 is the schematic diagram of the method for six contact parallelepipeds or bridge type sample.
As shown in Figure 1, be connected to by switch enclosure 12 on vanderburg sample 11 four of current source 13 and voltmeter 14 touch
On point 1 to 4.Vanderburg sample can have arbitrary shape, but should have uniform thickness, and surface should be simply connected
, without hole.Switch enclosure 12 includes switch S1, S2, S3 and S4.By the connection circuit of deft design, S1, S2, S3 are switched
Gear can consistently be changed with S4, so as to fulfill 6 kinds of different position of the switch.Specifically, the chart institute on the right side of Fig. 1
Show, current source 13 may be coupled to (1,2), (2,3), (3,4) and (4,1) contact position, while voltmeter 14 is connected respectively to
(3,4), (4,1), (1,2) and (2,3) contact position is to measure, so as to obtain resistivity.Then, current source 13 can connect
It is connected on a pair of non-conterminous contact, such as (1,3) and (2,4) contact position, while voltmeter 14 is connected respectively to another pair
On non-conterminous contact, such as (4,2) and (1,3) contact position, measure the voltage under the action of the magnetic field B perpendicular to sample
Variation, thus obtains the physical parameters such as Hall coefficient and carrier concentration, hall mobility.
However, there are shortcomings for the system of Fig. 1.First, the design comparison of above-mentioned switch enclosure 12 is complicated, and can only be directed to
Specific position of the switch requirement, is adapted to specific sample, i.e. vanderburg sample.If the position of the switch requirement hair needed for measuring
It is raw to change, that is, it needs to measure different samples, such as eight contact shown in Fig. 2 parallelepiped or bridge type sample 22 or Fig. 3 institutes
The six contact parallelepipeds or bridge type sample 32 shown are then needed to redesign switch enclosure 12, be included for example, by using shown in Fig. 2
Switch the switch enclosure 22 of S5 and S5 or the switch enclosure 32 shown in Fig. 3 for including switch S7 and S8.Therefore, shown in Fig. 1, Fig. 2 and Fig. 3
Each measuring system applicable sample scope it is all very narrow.In view of Fig. 2 and measuring method shown in Fig. 3 belong to existing skill
Art, so the detailed description no longer repeated here to it.
On the other hand, switch enclosure 12,22 and 32 is required for being manually operated, and measurement efficiency is relatively low.
In another aspect, when using that for example voltmeter 14 measures voltage, even using the nanovoltmeter of full accuracy, also not
Can avoid there are system driftings.In order to eliminate system drifting, need to exchange the positive and negative anodes of the lead of voltmeter 14.If by this
Point considers to bring into the resistivity of above-mentioned measurement material and the method for Hall coefficient, then can generate more one times of the position of the switch,
So as to which more complicated switch enclosure be needed to design.Also, the manual operation in measurement process is more complicated, causes measurement efficiency low.
Therefore, it is necessary to a kind of improved measuring systems, can overcome one or more in drawbacks described above.
Invention content
One aspect of the present invention is to provide a kind of interface circuit, can vary depending on its input and export
Between connection relation.
It is another aspect of the invention to provide a kind of measuring apparatus for including the interface circuit, the measuring apparatus energy
The physical parameter for measuring various types of samples is enough in, the physical parameter includes resistance, resistivity, magneto-resistor, Hall system
Number, carrier concentration and hall mobility.
According to an embodiment, a kind of interface circuit includes:The a plurality of input lead extended in a first direction;Edge and first party
The a plurality of output lead extended to the second direction of intersection;The optocoupler array that multiple optocouplers are formed, the multiple optical coupler
Part is separately positioned on a plurality of input lead near the crossover location of a plurality of output lead, adjacent input is drawn
Line is connected to adjacent output lead;And controller, for controlling the turn-on and turn-off of the multiple optocoupler.
In one example, the number of a plurality of output lead is greater than or equal to the number of a plurality of input lead.
In one example, the first direction is line direction, the column direction during second direction.The interface circuit at runtime, is often gone
Only there are one optocouplers in optocoupler to be connected, and at most only there are one optocouplers in each column optocoupler to be connected.Show one
In example, multiple modes of operation is pre-programmed in the controller, to realize a plurality of input lead and a plurality of output
A variety of connection modes between lead.
According to another embodiment, a kind of measuring apparatus includes:Above-mentioned interface circuit, wherein a plurality of input lead is used for
Current source and voltmeter are connected to, a plurality of output lead is used for the contact being selectively connected thereto on sample to be tested;Processing is single
Member, for receiving the current data from current source and the voltage data from voltmeter, and according to the electric current number received
According to the physical parameter that sample to be tested is calculated with voltage data;And output unit, for exporting the physical parameter.
In one example, the physical parameter includes resistance, resistivity, magneto-resistor, Hall coefficient, carrier concentration and suddenly
It is one or more in your mobility.In one example, the measuring apparatus further includes:For receive the thickness of sample to be tested,
The device of length and width;For selecting the device of the shape type of sample to be tested;And for selecting physics to be measured
The device of parameter.In one example, the processing unit is according to the shape type of selected sample to be tested and to be measured
Physical parameter determines the operation mode of the interface circuit.In one example, it is compiled in advance in the controller of the interface circuit
Journey is there are many operation mode, to realize a variety of connection modes between a plurality of input lead and a plurality of output lead.
In one example, the interface circuit includes 4 input leads and 6 output leads.
Description of the drawings
Fig. 1 shows to measure the resistivity of vanderburg sample and the schematic circuit of Hall coefficient.
Fig. 2 shows measure eight contact parallelepipeds or the resistivity of bridge type sample and the illustrative circuitry of Hall coefficient
Figure.
Fig. 3 shows to measure six contact parallelepipeds or the resistivity of bridge type sample and the illustrative circuitry of Hall coefficient
Figure.
Fig. 4 shows the circuit diagram of interface circuit according to an embodiment of the invention.
Fig. 5 shows the circuit diagram of the optocoupler available for interface circuit shown in Fig. 4.
Fig. 6 shows the schematic circuit of measuring system according to an embodiment of the invention.
Fig. 7 shows the schematic diagram of the sample for four-wire method measuring resistance.
Specific embodiment
Fig. 4 shows the circuit diagram of interface circuit 100 according to an embodiment of the invention.As shown in the figure, interface circuit 100 wraps
It includes along the first direction, such as horizontal direction, a plurality of input lead of extension and along the second direction intersected with first direction,
Such as vertical direction, a plurality of output lead of extension.According to one embodiment of the invention, the number of output lead can be more than or wait
In the number of input lead.As will be understood that through the following description, the number of output lead is more than the number of input lead
Mesh is conducive to for input lead to be connected to different output leads, and so as to fulfill different connection modes, advantage also will be under
The detailed description in face and become apparent.For example, in the example depicted in fig. 4, it is defeated that interface circuit 100 includes first to fourth
Enter lead IN_1, IN_2, IN_3 and IN_4, can hereinafter be commonly referred to as the outputs of input lead IN and first to the 6th
Lead OUT_1, OUT_2, OUT_3, OUT_4, OUT_5 and OUT_6 can hereinafter be commonly referred to as output lead OUT.
Multiple optocouplers 110 are arranged near the crossover location of each input lead and each output lead, by phase
Adjacent input lead is connected to adjacent output lead.For example, in the example depicted in fig. 4, interface circuit 100 includes optical coupler
6 × 4 arrays of part 110 are separately positioned on first to fourth input lead IN_1, IN_2, IN_3 and IN_4 and first to
It, will be adjacent near each crossover location between six output lead OUT_1, OUT_2, OUT_3, OUT_4, OUT_5 and OUT_6
Input lead be connected to adjacent output lead.
Specifically, each optocoupler 110 may include photophore 112 and light-receiving device 114, it is encapsulated in same shell
It is interior.Photophore 112 generally can be such as infrared light-emitting diode, and the light of infrared wavelength is emitted when being applied with voltage.By
Light device 114 for example can be light-sensitive device, being connected when irradiating in the light emitted by photophore 112, otherwise just cut
Only.One end of light-receiving device 114 is connected to input lead IN, and the other end is connected to output lead OUT.One end of photophore 112 connects
Power circuit Vcc is connected to, the other end is connected to controller 120.So as to, when controller 120 controls photophore 112 to shine, by
Input lead IN can be connected to output lead OUT by light device 114.It should be noted that two connection terminals of light-receiving device 114 are not
It is point positive and negative, without polarity.That is, can the first terminal of light-receiving device 114 be connected to high voltage, Second terminal is connected to
The first terminal of light-receiving device 114 can also be connected to low-voltage by low-voltage, and Second terminal is connected to high voltage.Fig. 4 is not to have
The phototriode of polarity shows light-receiving device 114, but this is only illustrative.The concrete structure of light-receiving device 114 will be below
It is described with reference to Fig. 5.
With continued reference to Fig. 4, controller 120 can control the turn-on and turn-off of each optocoupler 110, by first to
Four input lead IN_1, IN_2, IN_3 and IN_4 are connected to first to the 6th output lead OUT_1, OUT_2, OUT_3, OUT_
4th, the selected lead in OUT_5 and OUT_6.Controller 120 can be previously programmed conducting and pass to control optocoupler 110
Disconnected, controller 120 can also receive external control signal.Particularly, controller 120 can cause the battle array in optocoupler 110
In row, one and only one optocoupler 110 is connected in every a line, to ensure every input lead IN being connected only to accordingly
One output lead OUT;It is at most only connected in each row there are one optocoupler 110, to ensure that every output lead OUT is most
It is connected solely to an input lead IN.Because the number of output lead OUT can be more than the number of input lead IN, having can
Certain output lead OUT of energy is at a time not already connected to any bar input lead IN.As described above, in controller 120
Under control, thus it is possible to vary the on off operating mode of each optocoupler in the array of optocoupler 110, so as to fulfill different connection sides
Formula.
It is that switch control signal can be come from controller 120 using an important advantage of optocoupler 110
Signal, with test signal, i.e., the signal flowed between input lead IN and output lead OUT, the two is kept apart.In this way,
Control signal does not interfere with the signal flowed between input lead IN and output lead OUT completely, such as describe below
Test signal, so as to improve measuring accuracy.
Fig. 5 shows the circuit diagram of optocoupler 200, and optocoupler 200 shown in fig. 5 can be used as interface electricity shown in Fig. 4
Optocoupler 110 in road 100.
With reference to Fig. 5, optocoupler 200 includes photophore 210 and light-receiving device 220, is encapsulated in same shell.Photophore
210 generally can be such as infrared light-emitting diode, and the light of infrared wavelength is emitted when being applied with voltage.Photophore 210
Power supply terminal may be coupled to power source voltage Vcc, and control terminal may be coupled to controller 120.Light-receiving device 220 for example can be
Light-sensitive device, including two metal-oxide-semiconductors 230 and 240 that reverse phase is connected in series with, preferably NMOS tube and two 250 Hes of diode
260.As shown in figure 5, NMOS tube 230 and 240 reverse phase of NMOS tube are connected in series with, that is, the drain electrode of NMOS tube 230 is connected to input and draws
Line IN, the source level of NMOS tube 230 are connected to the source level of NMOS tube 240, and the drain electrode of NMOS tube 240 is connected to output lead OUT, and
And the photosensitive control grid of NMOS tube 230 and NMOS tube 240 can be connected to each other, i.e., with same potential.Diode 250 it is defeated
Enter the source level that terminal is connected to both NMOS tube 230 and PMOS tube 240, the leading-out terminal of diode 250 is connected to NMOS tube 230
Drain electrode, and then to input lead IN.The input terminal of diode 260 is connected similarly to both NMOS tube 230 and PMOS tube 240
Source level, the leading-out terminal of diode 260 is connected to the drain electrode of NMOS tube 240, and then to output lead OUT.
The operation of optocoupler 200 is described below.When photophore 210 does not shine, NMOS tube 230 and NMOS tube 240
Control gate extremely low potential, therefore NMOS tube 230 and NMOS tube 240 are in cut-off state, input lead IN and output lead
OUT is disconnected from each other.When photophore 210 shines, the control gate extremely high potential of NMOS tube 230 and NMOS tube 240.At this point,
NMOS in NMOS tube 230 and NMOS tube 240 positioned at high voltage side will be connected, and another is due to being in reversal connection state,
Therefore it still keeps ending.For example, when the current potential on input lead IN is higher than the current potential on output lead OUT, NMOS tube 230 is led
Logical, electric current flows to output lead OUT from input lead IN through NMOS tube 230 and diode 260;And when the electricity on input lead IN
When position is less than the current potential on output lead OUT, NMOS tube 240 is connected, and electric current is from output lead OUT through 240 and two pole of NMOS tube
Pipe 250 flows to input lead IN.Thus, it will be seen that optocoupler 200 can be not only used for DC circuit, and can use
In alternating current circuit.In other words, optocoupler 200 for electric current flow through its direction there is no limit, allow bidirectional current pass through.
Fig. 6 shows measuring apparatus 300 according to an embodiment of the invention, connects including such as previous embodiment is described
Mouth circuit.As it is following it is specifically described, measuring apparatus 300 can be used for measure sample various physical parameters, including
Resistance, resistivity, magneto-resistor, Hall coefficient, carrier concentration and hall mobility etc..Specifically, it as shown in fig. 6, measures
Equipment 300 includes current source 310, voltmeter 320, interface circuit 330, processing unit 340 and output unit 350 and input unit
360。
Interface circuit 330 can be interface circuit 100 for example shown in Fig. 4.Specifically, interface circuit 330 includes the
One to the 4th input terminal I1, I2, I3 and I4, be commonly referred to as below input terminal I and first to the 6th leading-out terminal O1, O2,
O3, O4, O5 and O6 are commonly referred to as leading-out terminal O below.In the example shown in Fig. 6, the first and second input terminal I1 and I2 connect
Current source 310 is connected to, the third and fourth input terminal I3 and I4 is connected to voltmeter 320.First to the 6th leading-out terminal O1,
Some or all of O2, O3, O4, O5 and O6 can be selectively connected thereto the contact on sample to be tested, and specific connection is depending on treating
Depending on the type of sample and number of contacts thereon.Interface circuit 330 can include identical with controller 120 shown in Fig. 4
Or similar controller (not shown), multiple modes of operation can be pre-programmed in the controller, with realize input lead with
A variety of connection modes between output lead, this will be better understood in specific descriptions below in relation to operation.
Input unit 360 can receive various user's inputs.For example, input unit 360 can be including to be measured for receiving
The thickness of sample, the device of length and width.These parameters are by for calculating the physical parameter of the required measurement of sample, such as below
As describing.Input unit 360 can also be including for the device for selecting the shape type of sample to be tested and for selecting
The device of physical parameter to be measured.According to the shape type of sample to be tested and physical parameter to be measured, processing unit
340 can determine the connection mode that interface circuit 330 will use.Moreover, processing unit 340 can be inputted and be surveyed according to user
Data are measured to calculate required physical parameter.
Processing unit 340 can send control terminal C of the control signal to interface circuit 330, and the control signal is for example
It may include the connection mode that the interface circuit 330 according to determined by inputting user of processing unit 340 should use.Interface circuit 330
Control terminal C on received signal can be provided to the controller (not shown) in interface circuit 330 with control interface electricity
Connection between the input terminal I on road 330 and leading-out terminal O.Current source 310 is applied a current to by interface circuit 330 and treated
On two contacts of sample, voltmeter 320 measures the electricity between two contacts on sample to be tested by interface circuit 330
Pressure.Processing unit 340 goes back the data on collected current source 310 and voltmeter 320, and the physics ginseng of test sample is thus calculated
Number, and calculated physical parameter is exported by output unit 350.Output unit 350 can also export other data, such as electricity
The current value in stream source 310, voltage value of voltmeter 320 etc..Output unit 350 can be display or printer etc..
Measuring apparatus 300 is described below for measuring the example of sample resistance.Fig. 7 shows the example of sample, for example, long
Bar samples 41.Leading-out terminal O1, O2, O3 and O4 of interface circuit 330 can be connected respectively to touching on sample 41 by user
Point 1,2,3 and 4.User can also be that is, long using the input unit 360 of measuring apparatus 300 come the shape type of designated samples 41
Bar samples, and user can also using input unit 360 come the thickness t of input sample 41, width w and contact 3 and 4 it
Between distance L.L should make full use of greatly the whole length of sample 41 as possible.In addition, user can also utilize input unit
360 want the physical parameter of measurement, such as resistance and/or resistivity to specify.
Processing unit 340 determines the operation mode of interface circuit 330, referred to herein as operation mode 1 according to user's input.
In this mode, at the first time, input terminal I1, I2, I3 and I4 of interface circuit 330 are connected respectively to leading-out terminal
O1, O2, O3 and O4, and the voltage value U1 between metering contact 3 and 4;In the second time, by the input terminal of interface circuit 330
Sub- I3 and I4 is connected respectively to leading-out terminal O4 and O3, and the connection mode of remaining terminal is constant, measures voltage value U2.U1 can be taken
Average value with U2, to offset the system drifting of voltmeter 320, improves measurement accuracy as voltage.The current value of current source 310
I is remained unchanged.Resistance R=(U1+U2)/2I of sample 41 is calculated using measured value for processing unit 340, and can be into one
Step calculates the electricalresistivityρ of sample 41=(R × w × t)/L using user input data.
Although it is not shown, measuring apparatus 300 can also include magnetic field applicator, can apply vertical magnetic field to
Sample 41, so as to measure the magneto-resistor of sample 41.
It is measured below in conjunction with the sample 11,21 and 31 shown in Fig. 1,2 and 3 to describe the Hall effect of test equipment 300.
Sample 11 is vanderburg pattern product, four contacts 1,2,3 and 4 with irregular shape and thereon.It therefore, can be by output terminal
Sub- O1, O2, O3 and O4 are connected respectively to four contacts on sample 11.Similar with the embodiment for combining Fig. 7 descriptions, user can be with
Using input unit 360 come designated samples shape type and the physical parameter of required measurement, and input sample thickness t.Processing
Unit 340 determines the operation mode of interface circuit 330, referred to herein as operation mode 2 according to user's input.In operation mode 2
In, the controller (being not shown, similar to control 120 shown in Fig. 4) of interface circuit 330 can control optocoupler array to realize
Connection mode shown in following table 1.
Table 1
Number | I1 | I2 | I3 | I4 |
1 | O1 | O2 | O3 | O4 |
2 | O2 | O3 | O4 | O1 |
3 | O3 | O4 | O1 | O2 |
4 | O4 | O1 | O2 | O3 |
5 | O1 | O3 | O4 | O2 |
6 | O2 | O4 | O1 | O3 |
As shown in table 1, in the first time of number 1, input terminal I1 and I2 that current source 310 is connected to can distinguish
Be connected to leading-out terminal O1 and O2, voltmeter 320 be connected to input terminal I3 and I4 can be connected respectively to leading-out terminal
O3 and O4, to measure voltage under this state.Then, the controller in interface circuit 330 can shift gears, that is, using volume
Connection mode shown in number 2-6, and measured under the connection mode shown in each number (when needing, also apply magnetic field,
As described in the F76-86 standards of ASTM).Then, processing unit 340 utilizes measurement data and input data t, according to ASTM's
Formula given by F76-86 standards calculates the physics such as resistivity, Hall coefficient, carrier concentration, the hall mobility of sample 11
Parameter.As can be seen that test process can be automatically completed using the measuring apparatus 300 of the present invention, without manual operations
Switch enclosure 12 changes connection status to measure, therefore substantially increase measurement efficiency.
As previously mentioned, although it is not shown, magnetic field applicator is further included in measuring apparatus 300 to apply when needed
Add on the magnetic field to test sample of predetermined amount.Magnetic field applicator and relevant measuring process for those skilled in the art and
Speech is well known, therefore details are not described herein again.
In another embodiment, such as in each connection mode of number 1-6, voltmeter 320, i.e. input terminal I3 and
I4 can be first attached according to table 1, measured the first voltage value, then exchanged the connection of the two each other, measure second voltage
Value, using the average value of the first voltage value and second voltage value as the measurement voltage value during number.For example, for number 1,
I3 and I4 measures voltage when being connected respectively to O3 and O4, then measure voltage when I3 and I4 are connected respectively to O4 and O3, take two
The average value that side measures.As previously mentioned, the system drifting of voltmeter 320 can be offseted in this way, more accurately voltage value is obtained, into
And obtain more accurate physical parameter.Using the interface circuit 330 of the present invention, it can very easily be automatically performed above-mentioned measured
Journey substantially increases measurement efficiency.
For eight contact shown in Fig. 2 parallelepiped or bridge type sample 21, then can by leading-out terminal O1, O2, O3,
O4, O5 and O6 are connected respectively to the contact 1,2,4,5,6 and 7 on sample 21.It can be compiled in advance in the controller of interface circuit 330
Journey has the connection mode shown in following table 2, can be described as operation mode 3.
Table 2
Number | I1 | I2 | I3 | I4 |
1 | O1 | O2 | O3 | O5 |
2 | O1 | O2 | O5 | O4 |
3 | O1 | O2 | O4 | O6 |
Similarly, by the operation of interface circuit 330, the operation to test sample 21 can be automatically completed, and will
Test result is shown on display 350.
For six contact shown in Fig. 3 parallelepiped or bridge type sample 31, then can by leading-out terminal O1, O2, O3,
O4, O5 and O6 are connected respectively to the contact 1,2,3,4,5 and 6 on sample 31.It can be compiled in advance in the controller of interface circuit 330
Journey has the connection mode shown in following table 3, can be described as operation mode 4.
Table 3
Number | I1 | I2 | I3 | I4 |
1 | O1 | O2 | O4 | O6 |
2 | O1 | O2 | O6 | O5 |
3 | O1 | O2 | O3 | O5 |
4 | O1 | O2 | O4 | O3 |
Similarly, by the operation of interface circuit 330, the operation to test sample 31 can be automatically completed, and will
Test result is shown on display 350.
As previously mentioned, in test, tester can be first according to the shape type of test sample, e.g. strip
Sample, vanderburg sample, eight contact parallelepipeds or bridge type sample or six contact parallelepipeds or bridge type sample come
Selectively leading-out terminal O1-O6 is connected on the contact of sample.Then, tester can input to test equipment 300
Some necessary parameters, for example, the shape type of test sample, thickness, length, width, required measurement physical parameter etc..Place
Managing unit 340 can be all to operate as described above pattern 1,2,3,4 etc. according to input come selection operation pattern, and operation mode is referred to
Show to interface circuit 330.Controller in interface circuit 330 can be pre-programmed with multiple modes of operation, and controller can
Corresponding operation mode is selected with the instruction according to processing unit 340, connection in control interface 330;Another
In one example, processing unit 340 can issue corresponding link order to interface circuit directly according to identified operation mode
Controller in 330, and by controller according to link order come the connection in control interface 330, in other words,
In such case, connection mode corresponding with operation mode can be previously programmed in processing unit 340 rather than in interface
In the controller of circuit 330.Current source 310 and voltmeter 320 measure under various connections, and by current data
Processing unit 340 is sent to voltage data.Processing unit 340 is according to the data being manually entered before and the electricity received at this time
Flow data and voltage data include it on display 350 the required physical parameter of sample is calculated.These objects
It can be resistance, resistivity, magneto-resistor, Hall coefficient, carrier concentration and hall mobility of sample etc. to manage parameter.
It is although parallel with strip sample, vanderburg sample, eight contact parallelepipeds or bridge type sample, six contacts above
The present invention is illustrated for hexahedron or bridge type sample, it will be appreciated, however, by one skilled in the art that the present invention is not restricted to these is special
Fixed sample type.But the present invention is to provide a kind of general test system, it can be adapted for various types of samples
Product.When for different types of sample, it may be necessary to carry out the modification in some forms or details to specific example above.
It should be understood that under the above-mentioned introduction of the present invention, these forms and details are all apparent to those skilled in the art
's.Therefore, the scope of the present invention is not limited to the above embodiments, and should be limited only as defined in the following claims and the equivalents thereto.
Claims (7)
1. a kind of measuring apparatus, including:
Interface circuit, including:
The a plurality of input lead extended in a first direction;
Along a plurality of output lead of second direction extension intersected with first direction;
The optocoupler array that multiple optocouplers are formed, the multiple optocoupler are separately positioned on a plurality of input lead and institute
Near the crossover location for stating a plurality of output lead, adjacent input lead is connected to adjacent output lead;And
Controller, for controlling the turn-on and turn-off of the multiple optocoupler, wherein a plurality of input lead is used to connect
To current source and voltmeter, a plurality of output lead is used for the contact being selectively connected thereto on sample to be tested;
Processing unit, for receiving the current data from current source and the voltage data from voltmeter, and according to being connect
The current data and voltage data of receipts calculate the physical parameter of sample to be tested;And
Output unit, for exporting the physical parameter,
Wherein, the number of a plurality of output lead is greater than or equal to the number of a plurality of input lead,
Wherein, the first direction is line direction, the column direction during second direction, and
Wherein, at runtime, often only there are one optocouplers in row optocoupler to be connected the interface circuit, each column optocoupler
In at most only there are one optocoupler be connected.
2. measuring apparatus as described in claim 1, wherein multiple modes of operation is pre-programmed in the controller, to realize
A variety of connection modes between a plurality of input lead and a plurality of output lead.
3. measuring apparatus as described in claim 1, wherein the physical parameter includes resistance, resistivity, magneto-resistor, Hall system
It is one or more in number, carrier concentration and hall mobility.
4. measuring apparatus as described in claim 1, further includes:
For receiving the device of the thickness of sample to be tested, length and width;
For selecting the device of the shape type of sample to be tested;And
For selecting the device of physical parameter to be measured.
5. measuring apparatus as claimed in claim 4, wherein shape class of the processing unit according to selected sample to be tested
Type and physical parameter to be measured determine the operation mode of the interface circuit.
6. measuring apparatus as claimed in claim 5, wherein there are many operate for preprogramming in the controller of the interface circuit
Pattern, to realize a variety of connection modes between a plurality of input lead and a plurality of output lead.
7. measuring apparatus as described in claim 1, wherein the interface circuit includes 4 input leads and 6 output leads.
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