CN104716554A - Frequency-selecting 355nm ultraviolet laser in optical fiber end face pumping Brewster angle cavity - Google Patents
Frequency-selecting 355nm ultraviolet laser in optical fiber end face pumping Brewster angle cavity Download PDFInfo
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Abstract
The invention relates to a frequency-selecting 355nm ultraviolet laser in an optical fiber end face pumping Brewster angle cavity. A 808nm semiconductor laser generates pumping laser, the pumping laser is guided into a coupling head through a 808nm guiding out optical fiber to be focused, the focused 808nm pumping laser enters a plano-convex resonant cavity through a plano-convex front reflecting mirror, YVO4 crystal is stimulated to generate 1064nm laser, the 1064nm laser continuously simulates and oscillates in the plano-convex resonant cavity to generate mixed laser, the mixed laser exits an Brewster angle of third harmonic generation LBO crystal and is divided into light beams of different deflection angles, 355nm laser enters a power attenuator after being filtered by a substrate, the 355nm laser enters a beam expander after the power is adjusted, the 355nm laser is output through an output window after the spot diameter and an divergence angle are adjusted, and non-355nm useless light can enter a useless light recycling station through a deflecting prism. The frequency-selecting 355nm ultraviolet laser is ingenious in structure and reasonable in design, can keep temperatures of all modules in the laser constant and can stabilize the laser output power and the optical quality.
Description
Technical field
The present invention relates to a kind of ultraviolet laser, specifically frequency-selecting 355nm ultraviolet laser in a kind of fiber end face pumping Brewster's angle chamber, belongs to ultraviolet light generating means technical field.
Background technology
Laser is one of invention of great significance in modern science technology, and wherein, the using value of 355nm Ultra-Violet Laser in nonmetal and Precision Machining is especially outstanding.The whole world increases day by day to the demand of the cold light source laser of high-quality, and application constantly expands.Acquisition beam quality is excellent, and frequency is single, the Ultra-Violet Laser of the long-acting stable operation of energy, to precision machining industry and nonmetal processing industry, significant.From laser industry development and economic benefit, it is also trend of the times.
Ultra-Violet Laser belongs to short wavelength, cold light source, the effect of processing passes through short wavelength laser, directly by the molecule of material or Atomic absorption, interrupt the strand of material, make it come off, or change its molecule attribute, thus reach the different processing effect such as cutting, etching, mark, extremely low to the thermal impact of institute's rapidoprint.Being different from long wavelength laser makes material produce high temperature, and the process of entry material gasification, the material of laser facula annex, has stronger thermal impact.Nearly all material is all high to the absorptivity of Ultra-Violet Laser, compares with infrared laser, and it is unexpected that Ultra-Violet Laser removes copper material, and the material being applicable to processing is more extensive.355nm ultraviolet laser, output wave length, concentration of energy, Laser Focusing hot spot is minimum, and focus point may diminish to several micron number magnitude, and 355nm wavelength thermal effect is little in addition, mechanical deformation and the heat damage of machined material can be reduced to a great extent, at precise materials micro Process, ultra-violet curing, the fields such as photoetching have wide practical use.
Power stability, optical quality is high, and the processed edge of Ultra-Violet Laser could embody by ultraviolet laser that frequency is single completely, and the ultraviolet laser of bad greatly limit the application of Ultra-Violet Laser.The generation of Ultra-Violet Laser, mainly by infrared laser longer for wavelength, is obtained by the repeatedly non-linear conversion of frequency-doubling crystal.Absorb at interior nearly all material because 355nm laser can be included optics, easily damage optics; The conversion efficiency of nonlinear crystal, very easily by influence of temperature change, causes laser power unstable; In addition 808nm is had, the laser of the multi-wavelengths such as 1064nm, 532nm, 355nm in whole laser light path, if during the Laser output of 355nm wavelength, be doped with other more wavelength lasers, laser processing effect can be caused not good.So will obtain power stability, optical quality is high, the Ultra-Violet Laser that frequency is pure, very high to the requirement of the optics of ultraviolet laser, calorifics, the comprehensive Design such as electricity and machinery.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, there is provided frequency-selecting 355nm ultraviolet laser in a kind of fiber end face pumping Brewster's angle chamber, its structure is ingenious, reasonable in design, can the temperature of the inner each module of constant laser device, the power output of stabilized lasers and optical quality.
According to technical scheme provided by the invention: frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber, it is characterized in that: comprise the Laser Power Devices interface be fixedly mounted in laser housing, control signal aviation plug, 808nm semiconductor laser, Q switching driver, 808nm derives optical fiber, rear anti-mirror, coupling head, frequency tripling lbo crystal, anti-mirror before plano-convex, YVO4 crystal, acoustooptic Q-switching, turning mirror, rubbish light recycle bin, substrate, power attenuator, beam expanding lens, output window mouth mirror, deflecting prism, two frequency multiplication lbo crystals and radiofrequency signal adapter, the power access end of described 808nm semiconductor laser connects Laser Power Devices interface, and Laser Power Devices interface is fixed on laser housing, and the incoming end of Laser Power Devices interface exposes outside laser housing, described control signal aviation plug is fixedly mounted on laser housing, and the incoming end of control signal aviation plug exposes outside laser housing, described 808nm derives optical fiber one end and is connected with the exit end of 808nm semiconductor laser, 808nm derives optical fiber other end butt coupling head, the pumping laser that 808nm semiconductor laser produces is derived optical fiber by 808nm and is imported coupling head focusing, the 808nm pumping laser focused on, by coupling head outgoing, enters plane convex resonator, described plane convex resonator is mainly made up of anti-mirror, YVO4 crystal, acoustooptic Q-switching, turning mirror and two frequency multiplication lbo crystals before rear anti-mirror, frequency tripling lbo crystal, plano-convex, before described plano-convex, anti-mirror, YVO4 crystal, acoustooptic Q-switching and turning mirror are arranged from back to front in turn along the exit direction of 808nm pumping laser, 808nm pumping laser is entered by mirror anti-before plano-convex and excites YVO4 crystal, produces 1064nm laser, 1064nm laser enters turning mirror through acoustooptic Q-switching, catadioptric outgoing after turning mirror, and acoustooptic Q-switching is connected with Q switching actuator electrical through radiofrequency signal adapter, described frequency tripling lbo crystal is arranged on the front through the 1064nm laser emitting direction of the catadioptric outgoing of turning mirror, 1064nm laser outgoing after the refraction of frequency tripling lbo crystal of the catadioptric outgoing of turning mirror, described two frequency multiplication lbo crystals and rear anti-mirror are arranged on the front in the 1064nm laser emitting direction through frequency tripling lbo crystal refraction injection in turn, Fan Jingbingyuan road reflection after the 1064nm laser of frequency tripling lbo crystal outgoing enters after two frequency multiplication lbo crystals, the 1064nm laser that rear anti-mirror reflects, through two frequency multiplication lbo crystals, is partly become 532nm laser by non-linear conversion, 532nm laser and 1064nm laser are through frequency tripling lbo crystal, and non-linear conversion becomes 355nm Ultra-Violet Laser, the hybrid laser that 1064nm laser, 532nm laser and 355nm laser form is from the Brewster's angle outgoing of frequency tripling lbo crystal, and this hybrid laser outgoing beam is divided into the light beam of different deflection angle by refractive index difference, described substrate, power attenuator and beam expanding lens are arranged on the outgoing route of 355nm laser in hybrid laser outgoing beam from back to front in turn, 355nm laser in hybrid laser outgoing beam enters power attenuator after substrate filters, after power attenuator Modulating Power, enter beam expanding lens, export through the output window mouth mirror be arranged on laser housing after beam expanding lens adjustment spot diameter and the angle of divergence, described deflecting prism is arranged on the outgoing route of non-355nm laser in hybrid laser outgoing beam, the outgoing after deflecting prism turnover of non-355nm laser in hybrid laser outgoing beam, be provided with rubbish light recycle bin in the front of this emergent light exit direction, the laser of non-355nm enters rubbish light recycle bin after deflecting prism refraction.
As a further improvement on the present invention, bottom described laser housing, the position of corresponding 808nm semiconductor laser installing position is provided with the first heat exchange module groove, bottom laser housing, the position of corresponding frequency tripling lbo crystal and two frequency multiplication lbo crystal installation sites is provided with the second heat exchange module groove, is all fixedly installed heat exchange module in the second heat exchange module groove and the first heat exchange module groove.
As a further improvement on the present invention, 808nm pump laser heat accumulation substrate and 808nm pump laser TEC cooling piece is disposed with below described 808nm semiconductor laser, 808nm semiconductor laser is fixed on 808nm pump laser heat accumulation substrate, 808nm pump laser heat accumulation substrate is fixed on the bottom surface of laser housing, the top of 808nm pump laser TEC cooling piece contacts with the bottom of 808nm pump laser heat accumulation substrate, the top contact of the heat exchange module in the bottom of 808nm pump laser TEC cooling piece and the first heat exchange module groove, frequency tripling lbo crystal TEC cooling piece is provided with below described frequency tripling lbo crystal, be provided with two frequency multiplication lbo crystal TEC cooling pieces below described two frequency multiplication lbo crystals, frequency tripling lbo crystal TEC cooling piece and two frequency multiplication lbo crystal TEC cooling pieces are fixed on ante-chamber bottom interior surface, frequency tripling lbo crystal TEC cooling piece, two frequency multiplication lbo crystal TEC cooling pieces and 808nm pump laser TEC cooling piece are all electrically connected with TEC power supply temperature control drive plate, TEC power supply temperature control drive plate is electrically connected with control signal aviation plug, and control signal aviation plug provides power supply and communication interface to TEC power supply temperature control drive plate, TEC power supply temperature control drive plate, by being arranged on electric transition terminal closed loop double-direction control two frequency multiplication lbo crystal TEC cooling piece, frequency tripling lbo crystal TEC cooling piece and the 808nm pump laser TEC cooling piece on dividing plate, ensures constant temperature in frequency tripling lbo crystal, two frequency multiplication lbo crystals and the 808nm semiconductor laser course of work.
As a further improvement on the present invention, described heat exchange module comprises water-cooled block and water cooled pipeline, and the arrival end of described water cooled pipeline connects into water nozzle, and the port of export of water cooled pipeline connects faucet.
As a further improvement on the present invention, water nozzle is entered described in and faucet is all positioned at laser housing afterbody.
As a further improvement on the present invention, laser instruction ruddiness generator is also installed in described laser housing, described laser instruction ruddiness generator is electrically connected with control signal aviation plug, and control signal aviation plug provides power supply and communication interface to laser instruction ruddiness generator; Laser indicates the output direction of ruddiness exit direction towards ultraviolet laser of ruddiness generator, the outgoing head of laser instruction ruddiness generator installs instruction ruddiness window mirror, and laser instruction ruddiness generator is used for providing ruddiness to indicate to the output of ultraviolet laser.
As a further improvement on the present invention, the inner space of described laser housing is divided into ante-chamber, back cavity and chamber, side three part, be provided with dividing plate between ante-chamber and back cavity, the end face in ante-chamber, back cavity and chamber, side is equipped with opening, and correspondence is fitted with ante-chamber chamber lid, chamber, Gai Hece chamber, back cavity chamber lid respectively; Described 808nm semiconductor laser and Q switching driver are fixedly mounted in back cavity; Described Laser Power Devices interface, control signal aviation plug are fixedly mounted on the rear end sidewall of back cavity; Described electric transition terminal, laser instruction ruddiness generator, coupling head and radiofrequency signal adapter are fixedly mounted on dividing plate, the two ends of electric transition terminal, laser instruction ruddiness generator and radiofrequency signal adapter lay respectively in ante-chamber and back cavity, the incidence end of coupling head is positioned at back cavity, and the exit end of coupling head is positioned at ante-chamber; Before described rear anti-mirror, frequency tripling lbo crystal, plano-convex, anti-mirror, YVO4 crystal, acoustooptic Q-switching, turning mirror, rubbish light recycle bin, substrate, power attenuator, beam expanding lens, deflecting prism and two frequency multiplication lbo crystals are fixedly mounted in ante-chamber; Described output window mouth mirror is arranged in the front end side wall of ante-chamber; Described TEC power supply temperature control drive plate is fixedly mounted in chamber, side.
As a further improvement on the present invention, described first heat exchange module groove is arranged on back cavity bottom interior surface, and described second heat exchange module groove is arranged on ante-chamber bottom outer surface, and the second heat exchange module groove is fitted with heat exchange module groove cover plate.
As a further improvement on the present invention, in described ante-chamber, be provided with drier division board, for putting into drier in drier division board, to ensure that ante-chamber is inner dry.
As a further improvement on the present invention, anti-torsion lower margin is provided with bottom described laser housing.
compared with prior art, tool has the following advantages in the present invention:
(1), fundamental frequency light path of the present invention adopts semiconductor optical fibre coupled end face pumping structure, and relative to lamp pump and profile pump mode, electrical efficiency is higher, and optical mode is better, and optical quality is higher.
(2), the present invention adopts the intracavity frequency doubling light path design of optimization, improves the electro-optical efficiency of system.
(3), the present invention adopts folded optical path, guarantees resonant cavity optical path length, and ensure laser beam quality, stability, reduces laser complete machine volume simultaneously.
(4), the present invention adopts the direct Brewster's angle light splitting of lbo crystal, guarantees single-frequency Laser output, reduces the threshold requirement of optics plated film simultaneously, improves stability and the useful life of complete machine.
(5) each optical module, in the present invention and electrical module all have autonomous intelligence temperature control, integrated design, and are reserved with the mounting hole site of galvanometer or focusing system, application are more simplified, safety, transport more convenient.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 be Fig. 1 look up an innings cutaway view.
Description of reference numerals: 1-Laser Power Devices interface, 2-control signal aviation plug, 3-enters water nozzle, 4-faucet, 5-808nm semiconductor laser, 6-Q switch driver, the electric transition terminal of 7-, 8-laser instruction ruddiness generator, 9-808nm derives optical fiber, anti-mirror after 10-, 11-coupling head, 12-frequency tripling lbo crystal, anti-mirror before 13-plano-convex, 14-YVO4 crystal, 15-acoustooptic Q-switching, the anti-torsion lower margin of 16-, 17-turning mirror, 18-rubbish light recycle bin, 19-substrate, 20-power attenuator, 21-beam expanding lens, 22-output window mouth mirror, chamber, 23-side, 24-deflecting prism, 25-drier division board, 26-frequency tripling lbo crystal TEC cooling piece, 27-bis-frequency multiplication lbo crystal, 28-bis-frequency multiplication lbo crystal TEC cooling piece, 29-indicates ruddiness window mirror, 30-radiofrequency signal adapter, 31-808nm pump laser heat accumulation substrate, 32-heat exchange module, 33-808nm pump laser TEC cooling piece, 34-back cavity, 35-back cavity chamber is covered, 36-ante-chamber, 37-ante-chamber chamber is covered, 38-second heat exchange module groove cover plate, 39-TEC power supply temperature control drive plate, chamber, chamber, 40-side is covered, 41-laser housing, 42-first heat exchange module groove, 43-second heat exchange module groove.
Embodiment
Below in conjunction with concrete drawings and Examples, the invention will be further described.
As shown in the figure: in the fiber end face pumping Brewster's angle chamber in embodiment, frequency-selecting 355nm ultraviolet laser is mainly by the Laser Power Devices interface (1) be arranged in laser housing (41), control signal aviation plug (2), enter water nozzle (3), faucet (4), 808nm semiconductor laser (5), Q switching driver (6), electric transition terminal (7), laser instruction ruddiness generator (8), 808nm derives optical fiber (9), rear anti-mirror (10), coupling head (11), frequency tripling lbo crystal (12), anti-mirror (13) before plano-convex, YVO4 crystal (14), acoustooptic Q-switching (15), anti-torsion lower margin (16), turning mirror (17), rubbish light recycle bin (18), substrate (19), power attenuator (20), beam expanding lens (21), output window mouth mirror (22), deflecting prism (24), drier division board (25), frequency tripling lbo crystal TEC cooling piece (26), two frequency multiplication lbo crystals (27), two frequency multiplication lbo crystal TEC cooling piece (28), instruction ruddiness window mirror (29), radiofrequency signal adapter (30), 808nm pump laser heat accumulation substrate (31), heat exchange module (32), 808nm pump laser TEC cooling piece (33), back cavity chamber lid (35), ante-chamber chamber lid (37), second heat exchange module groove cover plate (38), TEC power supply temperature control drive plate (39) and chamber, chamber, side composition such as parts such as lid (40) and laser housing (41) etc.
As shown in Figure 1 and Figure 2, in the embodiment of the present invention, the inner space of described laser housing (41) is divided into ante-chamber (36), back cavity (34) and chamber, side (23) three part, dividing plate is provided with between ante-chamber (36) and back cavity (34), the end face of ante-chamber (36), back cavity (34) and chamber, side (23) is equipped with opening, and correspondence is fitted with ante-chamber chamber lid (37), back cavity chamber lid (35) and chamber, chamber, side lid (40) respectively, ante-chamber chamber lid (37), back cavity chamber lid (35) and chamber, chamber, side lid (40) are all furnished with O-ring seal.Like this, dust-proof, the damp proof environment of vacuum is just defined in laser housing (41), wherein ante-chamber (36) has seven faces, the overall mechanical machine-shaping in six faces wherein, drier division board (25) is provided with in ante-chamber (36), for putting into drier in drier division board (25), to ensure that ante-chamber (36) is inner dry.Laser housing (41) is provided with three and with the anti-torsion lower margin (16) of fixed laser, is out of shape to prevent laser housing (41) for supporting.
As shown in Figure 1 and Figure 2, described 808nm semiconductor laser (5) and Q switching driver (6) are fixedly mounted in back cavity (34), the power access end of 808nm semiconductor laser (5) connects Laser Power Devices interface (1), Laser Power Devices interface (1) is fixed on the rear end sidewall of back cavity (34), and the incoming end of Laser Power Devices interface (1) exposes at laser housing (41) outward; Described control signal aviation plug (2) is fixedly mounted on the rear end sidewall of back cavity (34), and the incoming end of control signal aviation plug (2) exposes at laser housing (41) outward.
As shown in Figure 1 and Figure 2, described 808nm derives optical fiber (9) one end and is connected with the exit end of 808nm semiconductor laser (5), 808nm derives optical fiber (9) other end butt coupling head (11), coupling head (11) is fixedly mounted on dividing plate, the incidence end of coupling head (11) is positioned at back cavity (34), and the exit end of coupling head (11) is positioned at ante-chamber (36); The pumping laser that 808nm semiconductor laser (5) produces is derived optical fiber (9) by 808nm and is imported coupling head (11) focusing, and the 808nm pumping laser of focusing, by coupling head (11) outgoing, enters plane convex resonator.
As shown in Figure 1 and Figure 2, described plane convex resonator is mainly made up of anti-mirror (13), YVO4 crystal (14), acoustooptic Q-switching (15), turning mirror (17) and two frequency multiplication lbo crystals (27) before rear anti-mirror (10), frequency tripling lbo crystal (12), plano-convex, and each parts in plane convex resonator are all fixedly mounted in ante-chamber (36); Before described plano-convex, anti-mirror (13), YVO4 crystal (14), acoustooptic Q-switching (15) and turning mirror (17) are arranged from back to front in turn along the exit direction of 808nm pumping laser, 808nm pumping laser is entered by anti-mirror (13) before plano-convex and is excited YVO4 crystal (14), produces 1064nm laser; 1064nm laser enters turning mirror (17) through acoustooptic Q-switching (15), catadioptric outgoing after turning mirror (17), acoustooptic Q-switching (15) is electrically connected with Q switching driver (6) through radiofrequency signal adapter (30), radiofrequency signal adapter (30) is fixedly mounted on dividing plate, and the two ends of radiofrequency signal adapter (30) lay respectively in ante-chamber (36) and back cavity (34); Described frequency tripling lbo crystal (12) is arranged on the front through the 1064nm laser emitting direction of turning mirror (17) catadioptric outgoing, 1064nm laser outgoing after frequency tripling lbo crystal (12) refraction of turning mirror (17) catadioptric outgoing; Described two frequency multiplication lbo crystals (27) and rear anti-mirror (10) are arranged on the front in the 1064nm laser emitting direction through frequency tripling lbo crystal (12) refraction injection in turn, the 1064nm laser of frequency tripling lbo crystal (12) outgoing enters rear anti-mirror (10) and the reflection of former road after two frequency multiplication lbo crystals (27), the 1064nm laser that rear anti-mirror (10) reflects is when two frequency multiplication lbo crystal (27), and part is become 532nm laser by non-linear conversion; 532nm laser and 1064nm laser are when frequency tripling lbo crystal (12), and non-linear conversion becomes 355nm Ultra-Violet Laser; The hybrid laser that 1064nm laser, 532nm laser and 355nm laser form is from the Brewster's angle outgoing of frequency tripling lbo crystal (12), because the refractive index of wavelength laser each in hybrid laser is different, the hybrid laser outgoing beam after frequency tripling lbo crystal (12) can be divided into the light beam of different deflection angle by refractive index difference.
As shown in Figure 1 and Figure 2, described substrate (19), power attenuator (20) and beam expanding lens (21) are arranged on the outgoing route of 355nm laser in hybrid laser outgoing beam from back to front in turn, 355nm laser in hybrid laser outgoing beam enters power attenuator (20) after substrate (19) filters, after power attenuator (20) Modulating Power, enter beam expanding lens (21), export through the output window mouth mirror (22) be arranged on laser housing (41) after beam expanding lens (21) adjustment spot diameter and the angle of divergence; Described deflecting prism (24) is arranged on the outgoing route of non-355nm laser in hybrid laser outgoing beam, the outgoing after deflecting prism (24) turnover of non-355nm laser in hybrid laser outgoing beam, be provided with rubbish light recycle bin (18) in the front of this emergent light exit direction, the laser of non-355nm enters rubbish light recycle bin (18) after deflecting prism (24) refraction.In the embodiment of the present invention, described rubbish light recycle bin (18), substrate (19), power attenuator (20), beam expanding lens (21), deflecting prism (24) are fixedly mounted in ante-chamber (36); Described output window mouth mirror (22) is arranged in the front end side wall of ante-chamber (36).
As shown in Figure 1 and Figure 2, the position of corresponding 808nm semiconductor laser (5) installation site, described laser housing (41) bottom is provided with the first heat exchange module groove (42), the position of laser housing (41) the corresponding frequency tripling lbo crystal (12) in bottom and two frequency multiplication lbo crystal (27) installation sites is provided with the second heat exchange module groove (43), is all fixedly installed heat exchange module (32) in the second heat exchange module groove (43) and the first heat exchange module groove (42).In the embodiment of the present invention, described first heat exchange module groove (42) is arranged on back cavity (34) bottom interior surface, described second heat exchange module groove (43) is arranged on ante-chamber (36) bottom outer surface, and the second heat exchange module groove (43) is fitted with the second heat exchange module groove cover plate (38).Described heat exchange module (32) can adopt conventional products of the prior art, embodiment provides a kind of heat exchange module (32) formed primarily of water-cooled block and water cooled pipeline, the arrival end of described water cooled pipeline connects into water nozzle (3), port of export connection faucet (4) of water cooled pipeline, enters water nozzle (3) and faucet (4) is all positioned at laser housing (41) afterbody.During work, recirculated water sends into heat exchange module (32) each heat exchange module groove from entering water nozzle (3), for giving laser housing (41), optical module and electrical module temperature control, guarantee optical module and the work of electrical module normal table, long stable effect exports high-quality Ultra-Violet Laser, and recirculated water finally exports from faucet (4).
As Fig. 1, shown in Fig. 2, described 808nm semiconductor laser (5) below is disposed with 808nm pump laser heat accumulation substrate (31) and 808nm pump laser TEC cooling piece (33), 808nm semiconductor laser (5) is screwed on 808nm pump laser heat accumulation substrate (31), 808nm pump laser heat accumulation substrate (31) is screwed on the bottom surface of laser housing (41), the top of 808nm pump laser TEC cooling piece (33) contacts with the bottom of 808nm pump laser heat accumulation substrate (31), the top contact of the heat exchange module (32) in the bottom of 808nm pump laser TEC cooling piece (33) and the first heat exchange module groove (42), described frequency tripling lbo crystal (12) below is provided with frequency tripling lbo crystal TEC cooling piece (26), described two frequency multiplication lbo crystal (27) belows are provided with two frequency multiplication lbo crystal TEC cooling piece (28), and frequency tripling lbo crystal TEC cooling piece (26) and two frequency multiplication lbo crystal TEC cooling piece (28) is screwed on ante-chamber (36) bottom interior surface, frequency tripling lbo crystal TEC cooling piece (26), two frequency multiplication lbo crystal TEC cooling piece (28) and 808nm pump laser TEC cooling piece (33) are all electrically connected with TEC power supply temperature control drive plate (39), TEC power supply temperature control drive plate (39) is screwed and is arranged in chamber, side (23), TEC power supply temperature control drive plate (39) is electrically connected with control signal aviation plug (2), and control signal aviation plug (2) provides power supply and communication interface to TEC power supply temperature control drive plate (39), TEC power supply temperature control drive plate (39) is by electric transition terminal (7) closed loop double-direction control two frequency multiplication lbo crystal TEC cooling piece (28), frequency tripling lbo crystal TEC cooling piece (26) and 808nm pump laser TEC cooling piece (33), ensure constant temperature in frequency tripling lbo crystal (12), two frequency multiplication lbo crystals (27) and 808nm semiconductor laser (5) course of work, described electric transition terminal (7) is fixedly mounted on dividing plate, and electric transition terminal (7) two ends lay respectively in ante-chamber (36) and back cavity (34).
As shown in Figure 1, laser instruction ruddiness generator (8) is also installed in described laser housing (41), laser instruction ruddiness generator (8) in illustrated embodiment is arranged on dividing plate, and laser instruction ruddiness generator (8) two ends lay respectively in ante-chamber (36) and back cavity (34); Laser instruction ruddiness generator (8) is electrically connected with control signal aviation plug (2), and control signal aviation plug (2) provides power supply and communication interface to laser instruction ruddiness generator (8); Laser indicates the output direction of ruddiness exit direction towards the ultraviolet laser of ante-chamber (36) of ruddiness generator (8), the outgoing head of laser instruction ruddiness generator (8) installs instruction ruddiness window mirror (29), and laser instruction ruddiness generator (8) provides ruddiness to indicate for giving the output of ultraviolet laser.
The course of work of the present invention and operation principle as follows:
Laser Power Devices provide power supply by Laser Power Devices interface (1) to 808nm semiconductor laser (5); The pumping laser that 808nm semiconductor laser (5) produces is derived optical fiber (9) importing coupling head (11) by 808nm and is focused on; The 808nm pumping laser focused on, by anti-mirror (13) before plano-convex, enters plane convex resonator; Excite YVO4 crystal (14), produce 1064nm laser; Continue to excite vibration in the 1064nm laser plane convex resonator that anti-mirror (13), YVO4 crystal (14), acoustooptic Q-switching (15), turning mirror (17), frequency tripling lbo crystal (12), two frequency multiplication lbo crystals (27), rear anti-mirror (10) form before by plano-convex, by control acoustooptic Q-switching (15) frequency and pulsewidth, in chamber, produce higher, the superior in quality 1064nm laser of peak value; The 1064nm laser that rear anti-mirror (10) reflects is when two frequency multiplication lbo crystal (27), and part is become 532nm laser by non-linear conversion; 532nm laser and 1064nm laser are when frequency tripling lbo crystal (12), and non-linear conversion becomes 355nm laser; 1064nm laser, 532nm laser and 355nm laser are from left to right from the Brewster's angle outgoing of frequency tripling lbo crystal (12), because refractive index is different, the light beam of different deflection angle can be divided into, wherein 355nm laser enters power attenuator (20) after substrate (19) filters, and the rubbish light of non-355nm enters rubbish light recycle bin (18) through deflecting prism (24); 355nm Ultra-Violet Laser, after power attenuator (20) Modulating Power, exports through output window mouth mirror (22) after entering beam expanding lens (21) adjustment spot diameter and the angle of divergence.
Claims (10)
1. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber, it is characterized in that: comprise the Laser Power Devices interface (1) be fixedly mounted in laser housing (41), control signal aviation plug (2), 808nm semiconductor laser (5), Q switching driver (6), 808nm derives optical fiber (9), rear anti-mirror (10), coupling head (11), frequency tripling lbo crystal (12), anti-mirror (13) before plano-convex, YVO4 crystal (14), acoustooptic Q-switching (15), turning mirror (17), rubbish light recycle bin (18), substrate (19), power attenuator (20), beam expanding lens (21), output window mouth mirror (22), deflecting prism (24), two frequency multiplication lbo crystals (27) and radiofrequency signal adapter (30), the power access end of described 808nm semiconductor laser (5) connects Laser Power Devices interface (1), and Laser Power Devices interface (1) is fixed on laser housing (41), and the incoming end of Laser Power Devices interface (1) exposes at laser housing (41) outward, described control signal aviation plug (2) is fixedly mounted on laser housing (41), and the incoming end of control signal aviation plug (2) exposes at laser housing (41) outward, described 808nm derives optical fiber (9) one end and is connected with the exit end of 808nm semiconductor laser (5), 808nm derives optical fiber (9) other end butt coupling head (11), the pumping laser that 808nm semiconductor laser (5) produces is derived optical fiber (9) by 808nm and is imported coupling head (11) focusing, the 808nm pumping laser focused on, by coupling head (11) outgoing, enters plane convex resonator, described plane convex resonator is mainly made up of anti-mirror (13), YVO4 crystal (14), acoustooptic Q-switching (15), turning mirror (17) and two frequency multiplication lbo crystals (27) before rear anti-mirror (10), frequency tripling lbo crystal (12), plano-convex, before described plano-convex, anti-mirror (13), YVO4 crystal (14), acoustooptic Q-switching (15) and turning mirror (17) are arranged from back to front in turn along the exit direction of 808nm pumping laser, 808nm pumping laser is entered by anti-mirror (13) before plano-convex and is excited YVO4 crystal (14), produces 1064nm laser, 1064nm laser enters turning mirror (17) through acoustooptic Q-switching (15), catadioptric outgoing after turning mirror (17), and acoustooptic Q-switching (15) is electrically connected with Q switching driver (6) through radiofrequency signal adapter (30), described frequency tripling lbo crystal (12) is arranged on the front through the 1064nm laser emitting direction of turning mirror (17) catadioptric outgoing, 1064nm laser outgoing after frequency tripling lbo crystal (12) refraction of turning mirror (17) catadioptric outgoing, described two frequency multiplication lbo crystals (27) and rear anti-mirror (10) are arranged on the front in the 1064nm laser emitting direction through frequency tripling lbo crystal (12) refraction injection in turn, the 1064nm laser of frequency tripling lbo crystal (12) outgoing enters rear anti-mirror (10) and the reflection of former road after two frequency multiplication lbo crystals (27), the 1064nm laser that rear anti-mirror (10) reflects is when two frequency multiplication lbo crystal (27), and part is become 532nm laser by non-linear conversion, 532nm laser and 1064nm laser are when frequency tripling lbo crystal (12), and non-linear conversion becomes 355nm Ultra-Violet Laser, the hybrid laser that 1064nm laser, 532nm laser and 355nm laser form is from the Brewster's angle outgoing of frequency tripling lbo crystal (12), and this hybrid laser outgoing beam is divided into the light beam of different deflection angle by refractive index difference, described substrate (19), power attenuator (20) and beam expanding lens (21) are arranged on the outgoing route of 355nm laser in hybrid laser outgoing beam from back to front in turn, 355nm laser in hybrid laser outgoing beam enters power attenuator (20) after substrate (19) filters, after power attenuator (20) Modulating Power, enter beam expanding lens (21), export through the output window mouth mirror (22) be arranged on laser housing (41) after beam expanding lens (21) adjustment spot diameter and the angle of divergence, described deflecting prism (24) is arranged on the outgoing route of non-355nm laser in hybrid laser outgoing beam, the outgoing after deflecting prism (24) turnover of non-355nm laser in hybrid laser outgoing beam, be provided with rubbish light recycle bin (18) in the front of this emergent light exit direction, the laser of non-355nm enters rubbish light recycle bin (18) after deflecting prism (24) refraction.
2. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 1, it is characterized in that: the position of corresponding 808nm semiconductor laser (5) installation site, described laser housing (41) bottom is provided with the first heat exchange module groove (42), the position of laser housing (41) the corresponding frequency tripling lbo crystal (12) in bottom and two frequency multiplication lbo crystal (27) installation sites is provided with the second heat exchange module groove (43), heat exchange module (32) is all fixedly installed in second heat exchange module groove (43) and the first heat exchange module groove (42).
3. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 2, it is characterized in that: described 808nm semiconductor laser (5) below is disposed with 808nm pump laser heat accumulation substrate (31) and 808nm pump laser TEC cooling piece (33), 808nm semiconductor laser (5) is fixed on 808nm pump laser heat accumulation substrate (31), 808nm pump laser heat accumulation substrate (31) is fixed on the bottom surface of laser housing (41), the top of 808nm pump laser TEC cooling piece (33) contacts with the bottom of 808nm pump laser heat accumulation substrate (31), the top contact of the heat exchange module (32) in the bottom of 808nm pump laser TEC cooling piece (33) and the first heat exchange module groove (42), described frequency tripling lbo crystal (12) below is provided with frequency tripling lbo crystal TEC cooling piece (26), described two frequency multiplication lbo crystal (27) belows are provided with two frequency multiplication lbo crystal TEC cooling piece (28), and frequency tripling lbo crystal TEC cooling piece (26) and two frequency multiplication lbo crystal TEC cooling piece (28) is fixed on ante-chamber (36) bottom interior surface, frequency tripling lbo crystal TEC cooling piece (26), two frequency multiplication lbo crystal TEC cooling piece (28) and 808nm pump laser TEC cooling piece (33) are all electrically connected with TEC power supply temperature control drive plate (39), TEC power supply temperature control drive plate (39) is electrically connected with control signal aviation plug (2), and control signal aviation plug (2) provides power supply and communication interface to TEC power supply temperature control drive plate (39), TEC power supply temperature control drive plate (39), by being arranged on electric transition terminal (7) closed loop double-direction control two frequency multiplication lbo crystal TEC cooling piece (28), frequency tripling lbo crystal TEC cooling piece (26) and 808nm pump laser TEC cooling piece (33) on dividing plate, ensures constant temperature in frequency tripling lbo crystal (12), two frequency multiplication lbo crystals (27) and 808nm semiconductor laser (5) course of work.
4. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 2, it is characterized in that: described heat exchange module (32) comprises water-cooled block and water cooled pipeline, the arrival end of described water cooled pipeline connects into water nozzle (3), and the port of export of water cooled pipeline connects faucet (4).
5. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 4, is characterized in that: described in enter water nozzle (3) and faucet (4) is all positioned at laser housing (41) afterbody.
6. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 3, it is characterized in that: laser instruction ruddiness generator (8) is also installed in described laser housing (41), described laser instruction ruddiness generator (8) is electrically connected with control signal aviation plug (2), and control signal aviation plug (2) provides power supply and communication interface to laser instruction ruddiness generator (8); Laser indicates the output direction of ruddiness exit direction towards ultraviolet laser of ruddiness generator (8), the outgoing head of laser instruction ruddiness generator (8) installs instruction ruddiness window mirror (29), and laser instruction ruddiness generator (8) provides ruddiness to indicate for giving the output of ultraviolet laser.
7. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 6, it is characterized in that: the inner space of described laser housing (41) is divided into ante-chamber (36), back cavity (34) and chamber, side (23) three part, dividing plate is provided with between ante-chamber (36) and back cavity (34), the end face of ante-chamber (36), back cavity (34) and chamber, side (23) is equipped with opening, and correspondence is fitted with ante-chamber chamber lid (37), back cavity chamber lid (35) and chamber, chamber, side and covers (40) respectively; Described 808nm semiconductor laser (5) and Q switching driver (6) are fixedly mounted in back cavity (34); Described Laser Power Devices interface (1), control signal aviation plug (2) are fixedly mounted on the rear end sidewall of back cavity (34); Described electric transition terminal (7), laser instruction ruddiness generator (8), coupling head (11) and radiofrequency signal adapter (30) are fixedly mounted on dividing plate, the two ends of electric transition terminal (7), laser instruction ruddiness generator (8) and radiofrequency signal adapter (30) lay respectively in ante-chamber (36) and back cavity (34), the incidence end of coupling head (11) is positioned at back cavity (34), and the exit end of coupling head (11) is positioned at ante-chamber (36); Before described rear anti-mirror (10), frequency tripling lbo crystal (12), plano-convex, anti-mirror (13), YVO4 crystal (14), acoustooptic Q-switching (15), turning mirror (17), rubbish light recycle bin (18), substrate (19), power attenuator (20), beam expanding lens (21), deflecting prism (24) and two frequency multiplication lbo crystals (27) are fixedly mounted in ante-chamber (36); Described output window mouth mirror (22) is arranged in the front end side wall of ante-chamber (36); Described TEC power supply temperature control drive plate (39) is fixedly mounted in chamber, side (23).
8. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 2, it is characterized in that: described first heat exchange module groove (42) is arranged on back cavity (34) bottom interior surface, described second heat exchange module groove (43) is arranged on ante-chamber (36) bottom outer surface, and the second heat exchange module groove (43) is fitted with the second heat exchange module groove cover plate (38).
9. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 7, it is characterized in that: in described ante-chamber (36), be provided with drier division board (25), for putting into drier in drier division board (25), to ensure that ante-chamber (36) is inner dry.
10. frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber as claimed in claim 1, is characterized in that: described laser housing (41) bottom is provided with anti-torsion lower margin (16).
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| CN201510145483.9A CN104716554B (en) | 2015-03-31 | 2015-03-31 | Fiber end face pumps Brewster's angle intracavitary frequency-selecting 355nm ultraviolet lasers |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6366596B1 (en) * | 2000-01-21 | 2002-04-02 | Photonics Industries International, Inc. | High power laser |
| CN101383476A (en) * | 2007-09-07 | 2009-03-11 | 深圳市大族激光科技股份有限公司 | Frequency tripling solid laser device |
| CN204012180U (en) * | 2014-08-20 | 2014-12-10 | 南京海锐特激光设备有限公司 | A kind of diode end-pumped all-solid-state ultraviolet laser |
| CN204633120U (en) * | 2015-03-31 | 2015-09-09 | 无锡庆源激光科技有限公司 | Frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber |
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2015
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6366596B1 (en) * | 2000-01-21 | 2002-04-02 | Photonics Industries International, Inc. | High power laser |
| CN101383476A (en) * | 2007-09-07 | 2009-03-11 | 深圳市大族激光科技股份有限公司 | Frequency tripling solid laser device |
| CN204012180U (en) * | 2014-08-20 | 2014-12-10 | 南京海锐特激光设备有限公司 | A kind of diode end-pumped all-solid-state ultraviolet laser |
| CN204633120U (en) * | 2015-03-31 | 2015-09-09 | 无锡庆源激光科技有限公司 | Frequency-selecting 355nm ultraviolet laser in fiber end face pumping Brewster's angle chamber |
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