CN104697497B - A kind of digital obliquity sensor and its nonlinear temperature compensation method - Google Patents

A kind of digital obliquity sensor and its nonlinear temperature compensation method Download PDF

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CN104697497B
CN104697497B CN201510091289.7A CN201510091289A CN104697497B CN 104697497 B CN104697497 B CN 104697497B CN 201510091289 A CN201510091289 A CN 201510091289A CN 104697497 B CN104697497 B CN 104697497B
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temperature
module
nonlinearity
temperature compensation
coefficient
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CN104697497A (en
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何昱
张朝阳
廖良斌
谭国华
袁天亮
邱耀明
李颖
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Hubei Sanjiang Aerospace Hongfeng Control Co Ltd
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Hubei Sanjiang Aerospace Hongfeng Control Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02Details

Abstract

The invention discloses a kind of digital obliquity sensor and its nonlinear temperature compensation method;Digital obliquity sensor includes MEMS sensor, filtration module, microprocessor, reference power supply module, communication module and power module of voltage regulation;Wherein microprocessor includes A/D conversion module, temperature compensation module and nonlinearity compensation module.The filtered module of analog voltage signal containing obliquity information for the MEMS sensor output inputs to A/D conversion module, goes back output temperature digital signal to temperature compensation module simultaneously.In the microprocessor, the output of A/D conversion module and temperature compensation module exports measurement of dip angle value digital signal after nonlinearity compensation module synthesis.The nonlinear temperature compensation technique that temperature compensation module and nonlinearity compensation module are adopted compensate for that temperature compensation error in existing similar technique is big, the obvious shortcoming of nonlinearity erron.The present invention has the advantages that low cost, certainty of measurement height, anti-vibrating and impact, is applied to wide temperature harsh and unforgiving environments.

Description

A kind of digital obliquity sensor and its nonlinear temperature compensation method
Technical field
The present invention relates to obliquity sensor, more particularly, to a kind of digital obliquity sensor and its nonlinear temperature Compensation method.
Background technology
Obliquity sensor is usually used in the occasion of the bad environments such as operational motion is frequent, outdoor, therefore in response speed, reliability Property, volume, stability, service life with become present aspect require very high.Traditional mechanical type and electromagnetic type obliquity sensor equipment Volume is big, precision is low, measurement time delay is long, is affected greatly by ambient temperature etc..Obliquity sensor based on MEMS acceleration transducer Using small volume, low in energy consumption, fast response time and highly reliable sensing element it is adaptable to engineering machinery field.
But the easy temperature influence of MEMS sensor, temperature compensation model adopts an order polynomial, the party seen in existing document Though method calculates simply, not accurate;Existing document calculates the arcsine method that adopts during measurement of dip angle value simultaneously, and the method is ignored Quadratic nonlinearity error, compensation to cubic non-linearity error is also not accurate.
Content of the invention
Disadvantages described above for prior art or Improvement requirement, the invention provides a kind of digital obliquity sensor and its Nonlinear temperature compensation method is asked it is intended to solve the existing obliquity sensor technology inaccurate to nonlinear temperature error compensation Topic.
The invention provides a kind of digital obliquity sensor, comprise MEMS sensor, filtration module, microprocessor, lead to Letter module, reference power supply module and power module of voltage regulation;Microprocessor includes temperature compensation module, A/D conversion module and non- Linear compensation module;The power input of MEMS sensor, the power input of filtration module, the power input of microprocessor The power input of end, reference power supply module and described communication module is all connected with power module of voltage regulation;Temperature compensation module Input connects to the first outfan of MEMS sensor, and the signal input part of filtration module connects to the second of MEMS sensor Outfan, the first input end of A/D conversion module connects to the outfan of filtration module, the second input of A/D conversion module Connect to the outfan of reference power supply module, the first input end of nonlinearity compensation module connects to the output of temperature compensation module End, the second input of nonlinearity compensation module connects to the outfan of A/D conversion module, the input of communication module connect to The outfan of nonlinearity compensation module.
Further, during work, temperature digital signal that the first outfan of described MEMS sensor exports is given described Temperature compensation module carries out temperature-compensating calculating, calculates gained and is obtained by nonlinearity compensation module;The second of MEMS sensor is defeated Go out to hold the analog voltage signal containing obliquity information of output after filtering through described filtration module, to be transferred to described A/D and become die change Block, the voltage digital signal that conversion gained contains obliquity information is obtained by nonlinearity compensation module;Described nonlinearity compensation module profit With the temperature compensation parameter that described temperature compensation module calculates, nonlinear compensation is carried out to the voltage digital signal containing obliquity information, and will Measurement of dip angle value digital signal after compensation exports and is exported to user by described communication module to communication module.
Further, microprocessor adopts the single-chip microcomputer of model ADuC845.
Present invention also offers a kind of nonlinear temperature compensation method based on above-mentioned digital obliquity sensor, including Following step:
S1:Several test temperatures point T is uniformly chosen within the scope of full temperature to be measuredi, adjacent temperature spot interval should be not more than 10 DEG C, in each test temperature point TiUnder, temperature control turntable the temperature inside the box should be incubated the sufficiently long time so that obliquity sensor fills Put internal and external temperature in a basic balance;
S2:In each test temperature point TiUnder, uniformly choose several measurement of dip angle point θ in the range of -8 °~8 ° inclination anglesj, Adjacent measurement of dip angle point angle interval should be not more than 1 °;
S3:In each test temperature point TiUnder, after temperature control turntable case inside holding is long-time enough, control turntable to rotate to every Individual measurement of dip angle point θj, the voltage digital containing obliquity information that now in collection inclination angle sensor device, A/D conversion module exports Signal V (Tij) and temperature digital signal TEMP (Ti);
S4:In each temperature spot Ti, using least square fitting gathered digital voltage V (Tij) and inclination angle thetajThree Order polynomial, obtains each temperature spot TiUnder zero measurement value V0(Ti) and sensitivity measure value Sc(Ti), and according to described zero Position measured value V0(Ti) and described sensitivity measure value Sc(Ti) obtain each temperature spot, each demarcate angle under accelerometer Calculation value
S5:Using least square fitting each temperature spot TiUnder inclination value θjWith acceleration calculation value a (Tij) Three relations, obtain each temperature spot TiUnder quadratic nonlinearity co-efficient measurements C2(Ti), cubic non-linearity co-efficient measurements C3 (Ti);
S6:Using least square fitting zero-bit V0(Ti), sensitivity Sc(Ti), quadratic nonlinearity coefficient C2(Ti), three times Nonlinear factor C3(Ti) and described digital temperature signal value TEMP (Ti) polynomial function relation, obtain penalty coefficient p0,V0、 p1,V0、p2,V0、p3,V0、p0,Sc、p1,Sc、p2,Sc、p3,Sc、p0,C2、p1,C2、p0,C3、p1,C3
Wherein p0,V0、p0,Sc、p0,C2、p0,C3Represent respectively the zero-bit of benchmark, sensitivity, quadratic nonlinearity coefficient, three times non- Linear coefficient;p1,V0、p1,Sc、p1,C2、p1,C3Represent zero-bit, sensitivity, quadratic nonlinearity coefficient, cubic non-linearity coefficient respectively Temperature change coefficient of first order;p2,V0、p2,ScRepresent zero-bit, the temperature change quadratic coefficients of sensitivity;p3,V0、p3,ScRepresent zero Position, temperature change three ordered coefficients of sensitivity;
S7:Obtain zero-bit V of digital obliquity sensor according to above-mentioned penalty coefficient0, sensitivity Sc, quadratic nonlinearity system Number C2With cubic non-linearity coefficient C3Temperature compensation value.
Further, in step s 4 according to formula V (Tij)=V0(Ti)+B1(Ti)·θj+B2(Ti)·θj 2+B3 (Ti)·θj 3VCarry out least square fitting;Wherein, V0(Ti) it is temperature spot TiUnder zero-bit, B1(Ti)、B2(Ti)、B3(Ti) It is respectively temperature spot TiUnder angle once, secondary and cubic term coefficient, εVFor voltage regression criterion.
By Sc(Ti)=B1(Ti) 180/ π (unit:V/g, π are pi) temperature spot T can be calculatediUnder sensitivity Sc(Ti).
Further, press formula in step s 5Carry out Least square fitting;Wherein, C2(Ti)、C3(Ti) represent each temperature spot T respectivelyiUnder quadratic nonlinearity co-efficient measurements and Cubic non-linearity co-efficient measurements;εθRepresent angle calculation regression criterion.
Further, in step s 6, carry out least square fitting according to following formula,
Sc(Ti)=p0,Sc+p1,Sc·[TEMP(Ti)]+p2,Sc·[TEMP(Ti)]2+p3,Sc·[TEMP(Ti)]3Sc
Wherein p0,V0、p0,Sc、p0,C2、p0,C3Represent benchmark (referring to when 0 DEG C) zero-bit, sensitivity, quadratic nonlinearity system respectively Number, cubic non-linearity coefficient;p1,V0、p1,Sc、p1,C2、p1,C3Respectively represent zero-bit, sensitivity, quadratic nonlinearity coefficient, three times non- The temperature change coefficient of first order of linear coefficient;p2,V0、p2,ScRepresent zero-bit, the temperature change quadratic coefficients of sensitivity respectively; p3,V0、p3,ScRepresent zero-bit, temperature change three ordered coefficients of sensitivity respectively;For temperature compensation parameter fitting residual error, whereinAnd εScBe impact temperature compensation after angle error principal element,Impact temperature consistency, εScThen affect angle agreement.
In the present invention, the nonlinear temperature compensation technique that temperature compensation module and nonlinearity compensation module are adopted compensate for In existing similar technique, temperature compensation error is big, the obvious shortcoming of nonlinearity erron;Because the present invention is not limited to the biography of sinusoidal form Sensor sensitive acceleration and the relation (i.e. a=g sin (θ π/180)) at inclination angle, analyze the two of notable presence therein Secondary nonlinearity erron and cubic non-linearity error, consider the appreciable impact on MEMS for the temperature simultaneously, and this are proposed Specifically exercisable nonlinear temperature compensation method, the therefore present invention is more accurate to nonlinear temperature error compensation.Simultaneously this The bright system that reduces to greatest extent on the premise of assurance function forms.Obliquity sensor of the present invention has low cost, survey Accuracy of measurement height, anti-vibrating and impact, it is applied to the advantage of wide temperature harsh and unforgiving environments, be particularly suited for the survey of high speed railway track superelevation Amount.
Brief description
The comprising modules structural representation of the digital tilt angle sensor that Fig. 1 provides for the present invention;
The temperature compensation that the digital tilt angle sensor that Fig. 2 provides by the present invention is adopted implement flow chart;
Fig. 3 be the non-linear compensation method that adopted of digital tilt angle sensor that the present invention provides implement flow process Figure.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with drawings and Examples, right The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only in order to explain the present invention, and It is not used in the restriction present invention.As long as additionally, involved technical characteristic in each embodiment of invention described below The conflict of not constituting each other just can be mutually combined.
Obliquity sensor of the present invention has low cost, certainty of measurement height, anti-vibrating and impact, is applied to wide warm harsh ring The advantage in border, is particularly suited for the measurement of high speed railway track superelevation.As shown in figure 1, a kind of compensate skill using nonlinear temperature The high-precision digital obliquity sensor of art includes power module of voltage regulation 101, MEMS sensor 102, filtration module 103, Wei Chu Reason device 104, reference power supply module 105 and communication module 106, wherein microprocessor includes temperature compensation module 104-1, A/D Conversion module 104-2 and nonlinearity compensation module 104-3.Power module of voltage regulation 101 provides for other modules 102~106 above-mentioned Stable power supply, and adapt to the external power input of wide scope, protect the positive and negative reversal connection of power supply;The first of MEMS sensor 102 is defeated Go out to hold the temperature digital signal exporting to carry out temperature-compensating calculating to temperature compensation module 104-1 of microprocessor 104, calculate institute Obtain and 104-3 is obtained by nonlinearity compensation module;The simulation containing obliquity information of the second outfan output of MEMS sensor 102 It is transferred to the A/D conversion module 104-2 of microprocessor 104, conversion gained contains and inclines after filtered module 103 filtering of voltage signal The voltage digital signal of angle information is obtained by nonlinearity compensation module 104-3;Nonlinearity compensation module 104- of microprocessor 104 3 carry out nonlinear compensation using the temperature compensation parameter that temperature compensation module 104-1 calculates to the voltage digital signal containing obliquity information, And export the measurement of dip angle value digital signal after compensating to communication module 106;Communication module 106 is measurement of dip angle value numeral letter Number export and to provide form conversion and interface to user;Reference power supply module 105 is A/D conversion module 104-2 in microprocessor 104 Carrying out A/D conversion provides accurate reference voltage.
In the present invention, MEMS sensor 102 can adopt the micro sensing chip of model SCA103T.Remodeling micro sensing Chip resolution is high, good stability.Microprocessor 104 can adopt the single-chip microcomputer of model ADuC845;This model single-chip microcomputer collection Become 24 high-resolution sigma-delta types ADC and some functions corresponding in one, the composition of measuring circuit has been greatly reduced, has Beneficial to the volume reducing sensor, therefore this type single-chip microcomputer is particularly suitable for accurate measurement.Reference power supply module 105 can adopt The high accuracy of model ADR4525, ultra-low noise reference voltage source, its initial output voltage error maximum only ± 0.02%, defeated Go out voltage noise only 1.25 μ Vp-p, temperature coefficient is less than 2ppm/ DEG C.Power module of voltage regulation 101 can adopt model LT1962 Low-dropout regulator.Communication module 106 can adopt the RS-232 driving chip of model MAX232, and this chip is by microprocessor The UART TTL signal of device 104 output is converted to the output of serial RS-232 form.
In embodiments of the present invention, operation principle of the present invention is as follows:It is the voltage stabilizing of core by low noise low-dropout regulator Power module 101 provides stable power supply for other modules of digital tilt angle sensor it is ensured that in the case of various power input The optimal electrical characteristic of MEMS sensor 102 other modules of grade;MEMS sensor 102 carries temperature sensor, reduces system Composition, and ensure that the sensitive temperature of temperature sensor presses close to measurement temperature most;Using being integrated with 24 high-resolution sigma-delta types A/ The microprocessor 104 of D conversion module 104-2 improves Measurement Resolution to greatest extent, reduces adjunct circuit noise;Base simultaneously Quasi- power module 105 has high accuracy and ultra-low noise it is ensured that A/D conversion module 104-2 work is accurate, stable.Communication mould Block 106 exports for the measurement of dip angle value digital signal that microprocessor 104 exports and provides form conversion and interface to user.
The present invention is a kind of high accuracy number inclination angle sensor device of employing nonlinear temperature compensation technique;This device bag Include MEMS sensor, filtration module, microprocessor, communication module, reference power supply module and power module of voltage regulation;Wherein micro- place Reason device includes A/D conversion module, temperature compensation module and nonlinearity compensation module.
Power module of voltage regulation provides stable electricity for other modules above-mentioned;The simulation containing obliquity information for the MEMS sensor output Voltage signal and temperature digital signal, the A/D conversion module of analog voltage signal filtered module input microprocessor, temperature number The temperature compensation module of word signal input microprocessor, in the microprocessor, the output of A/D conversion module and temperature compensation module Measurement of dip angle value digital signal is exported after nonlinearity compensation module synthesis;Reference power supply module is the A/D conversion of microprocessor Precision reference power supply is provided;Described communication module exports for the measurement of dip angle value digital signal that microprocessor exports and provides to user Form conversion and interface.
As one embodiment of the present of invention, MEMS sensor output contains analog voltage signal and the temperature letter of obliquity information The temperature digital signal of breath, the A/D conversion module of analog voltage signal filtered module input microprocessor, temperature digital signal The temperature compensation module of input microprocessor, in the microprocessor, the output of A/D conversion module and temperature compensation module is through non-thread Property compensating module synthesis after output there is high-resolution, high precision dip measured value digital signal;Described communication module is micro- The measurement of dip angle value digital signal of processor output exports provides form conversion and interface to user;Reference power supply module is micro- place The A/D conversion of reason device provides Precision reference power supply;Power module of voltage regulation adapts to the externally fed of wide scope, carries for other modules For stable supply voltage, and protect the positive and negative reversal connection of externally fed.
Wherein MEMS sensor module can adopt the micro sensing chip of model SCA103T.Microprocessor adopts model Single-chip microcomputer for ADuC845.This model single-chip microcomputer be integrated with 24 high-resolution sigma-delta types ADC and some functions corresponding in Integrally, the composition of measuring circuit is greatly reduced, is conducive to reducing the volume of sensor, therefore this type single-chip microcomputer is particularly suitable for Accurate measurement.
Accurate reference power supply module adopts the high accuracy of model ADR4525, low noise reference voltage source;It initially exports Voltage error maximum only ± 0.02%, output voltage noise only 1.25 μ Vp-p, temperature coefficient is less than 2ppm/ DEG C.Regulated power supply mould Block adopts the low-dropout regulator of model LT1962.Output interface and communication module adopt the RS-232 of model MAX232 to drive Dynamic chip.
In embodiments of the present invention, the temperature compensation step that integrated temperature compensation module in microprocessor is adopted As follows:
(1) temperature of micro compensating module gathers the temperature digital signal of MEMS sensor module output, and smoothed, Filtering obtains sensor temperature ST;
(2) calculate MEMS sensor zero-bit respectively by following polynomial equation (1)~(4) with regard to sensor temperature ST V0, sensitivity Sc, quadratic nonlinearity coefficient C2, cubic non-linearity coefficient C3Offset at temperature ST;
V0=p0,V0+p1,V0·ST+p2,V0·ST2+p3,V0·ST3(1)
Sc=p0,Sc+p1,Sc·ST+p2,Sc·ST2+p3,Sc·ST3(2)
C2=p0,C2+p1,C2·ST (3)
C3=p0,C3+p1,C3·ST (4)
In formula (1)~(4), p0,V0、p0,Sc、p0,C2、p0,C3Respectively represent benchmark (referring to when 0 DEG C) zero-bit, sensitivity, Quadratic nonlinearity coefficient, cubic non-linearity coefficient;p1,V0、p1,Sc、p1,C2、p1,C3Represent zero-bit, sensitivity, secondary non-thread respectively Property coefficient, the temperature change coefficient of first order of cubic non-linearity coefficient;p2,V0、p2,ScRepresent zero-bit, the temperature change of sensitivity respectively Quadratic coefficients;p3,V0、p3,ScRepresent zero-bit, temperature change three ordered coefficients of sensitivity respectively.
In embodiments of the present invention, the non-linear compensation method that integrated nonlinearity compensation module in microprocessor is adopted Step is as follows:
(1) microprocessor nonlinearity compensation module gathers the digital voltage containing obliquity information of A/D conversion module output Signal, this signal obtains the magnitude of voltage SV containing obliquity information after microprocessor digital filtering, smoothing processing;
(2) nonlinearity compensation module obtains MEMS sensor zero-bit V of temperature compensation module output0, sensitivity Sc, secondary Nonlinear factor C2, cubic non-linearity coefficient C3, (5)~(6) calculating measurement of dip angle value θ as followsSurvey(unit:Degree)
Wherein π is pi;G is local gravitational acceleration;A is intermediate quantity.
The present invention provide a kind of nonlinear temperature compensation method of digital obliquity sensor implement step such as Under:
(1) temperature control horizontal precision turntable will be arranged on without the inclination angle sensor device of overcompensation, obliquity sensor is energized, The voltage digital signal containing obliquity information of setting inclination angle sensor device output described A/D conversion module output and described temperature Digital signal supplies computer or host computer collection;
(2) uniformly choose several test temperatures point T within the scope of full temperature to be measuredi, adjacent temperature spot interval should be not more than 10 DEG C, in each test temperature point TiUnder, temperature control turntable the temperature inside the box should be incubated the sufficiently long time, so that obliquity sensor dress Put internal and external temperature in a basic balance;
(3) in each test temperature point TiUnder, uniformly choose several measurement of dip angle point θ in the range of -8~8 ° of inclination anglesj, Adjacent measurement of dip angle point angle interval should be not more than 1 °;
(4) in each test temperature point TiUnder, after the insulation of turntable incubator is long-time enough, controls turntable to rotate and incline to each Angular measurement point θj;Now gather the described voltage digital signal value V (T containing obliquity informationij) and described digital temperature signal value TEMP(Ti);
(5) in each temperature spot Ti, by following formula (7) using least square fitting gathered digital voltage V (Ti, θj) and inclination angle thetajCubic polynomial:
V(Tij)=V0(Ti)+B1(Ti)·θj+B2(Ti)·θj 2+B3(Ti)·θj 3V(7)
Each temperature spot T can be obtainediUnder zero measurement value V0(Ti) and sensitivity measure value Sc(Ti) (=B1(Ti)·180/ π, unit:V/g), so can calculate each temperature spot, each demarcate angle under acceleration calculation value a (Tij), calculate public Formula is as follows:
ε in formula (7)VRepresent voltage regression criterion.
(6) adopt method of least square each temperature spot of matching T as followsiUnder inclination value θjWith acceleration calculation value a (Tij) three relations:
Each temperature spot T can be obtainediUnder quadratic nonlinearity co-efficient measurements C2(Ti), cubic non-linearity co-efficient measurements C3 (Ti).ε in formula (9)θRepresent angle calculation regression criterion.
(7) adopt method of least square (10)~(13) matching zero-bit V as follows0(Ti), sensitivity Sc(Ti), secondary Nonlinear factor C2(Ti), cubic non-linearity coefficient C3(Ti) and gathered digital temperature TEMP (Ti) polynomial function relation:
Sc(Ti)=p0,Sc+p1,Sc·[TEMP(Ti)]+p2,Sc·[TEMP(Ti)]2+p3,Sc·[TEMP(Ti)]3Sc(11)
In above formula (10)~(13)For temperature compensation parameter fitting residual error, whereinAnd εScIt is survey after impact temperature compensation The principal element of angle error,Impact temperature consistency, εScThen affect angle agreement.
(8) above-mentioned steps (1)~(7) provide penalty coefficient on the right of equation in acquisition temperature-compensating formula (1)~(4) (include p0,V0、p1,V0、p2,V0、p3,V0、p0,Sc、p1,Sc、p2,Sc、p3,Sc、p0,C2、p1,C2、p0,C3、p1,C3) one kind of numerical value has efficacious prescriptions Method;
(9) modification microprocessor in temperature compensation module program so that microprocessor as follows step calculate MEMS Transducer zeroing V0, sensitivity Sc, quadratic nonlinearity coefficient C2, cubic non-linearity coefficient C3Temperature compensation value:
(9-1) temperature of micro compensating module gathers the temperature digital signal smoothed of MEMS sensor module output Sensor temperature smooth value ST is obtained after Filtering Processing;
(9-2) press polynomial equation (14)~(17) below in relation to sensor temperature smooth value ST and calculate MEMS biography respectively Sensor zero-bit V0, sensitivity Sc, quadratic nonlinearity coefficient C2, cubic non-linearity coefficient C3Offset at temperature ST;
V0=p0,V0+p1,V0·ST+p2,V0·ST2+p3,V0·ST3(14)
Sc=p0,Sc+p1,Sc·ST+p2,Sc·ST2+p3,Sc·ST3(15)
C2=p0,C2+p1,C2·ST (16)
C3=p0,C3+p1,C3·ST (17)
P in formula (14)~(17)0,V0、p0,Sc、p0,C2、p0,C3Respectively represent benchmark (referring to when 0 DEG C) zero-bit, sensitivity, Quadratic nonlinearity coefficient, cubic non-linearity coefficient;p1,V0、p1,Sc、p1,C2、p1,C3Represent zero-bit, sensitivity, secondary non-thread respectively Property coefficient, the temperature change coefficient of first order of cubic non-linearity coefficient;p2,V0、p2,ScRepresent zero-bit, the temperature change of sensitivity respectively Quadratic coefficients;p3,V0、p3,ScRepresent zero-bit, temperature change three ordered coefficients of sensitivity respectively;These coefficients above-mentioned are by described step Suddenly (1)~(8) obtain.
(10) modification microprocessor in nonlinearity compensation module program so that microprocessor as follows step calculate incline Angle measurement:
(10-1) microprocessor nonlinearity compensation module gathers the numeral electricity containing obliquity information of A/D conversion module output Pressure signal, this signal obtains the magnitude of voltage SV containing obliquity information after microprocessor digital filtering, smoothing processing;
(10-2) nonlinearity compensation module obtains MEMS sensor zero-bit V of temperature compensation module output0, sensitivity Sc, two Secondary nonlinear factor C2, cubic non-linearity coefficient C3, (18)~(19) calculating measurement of dip angle value θ as followsSurvey(unit:Degree)
Using the affiliated technical scheme of the present invention, produced beneficial effect is to improve warm angle measurement accuracy entirely, reduces former Rationality nonlinearity erron.The present invention can achieve that warm angle measurement accuracy is better than 0.005 ° entirely, and nonlinearity erron is less than 0.04% FS.
By the present invention, zero-bit V is calculated using formula (14) methods described0Offset than with an order polynomial compensation method The angle error causing because of Zero Drift of Temperature can be effectively reduced.
By the present invention, using formula (15) methods described meter sensitivity ScOffset than using SCA103T chip handss Compensation formula provided in volume can effectively reduce the angle error causing because of sensitivity temperature drift.
By the present invention, using formula (16)~(19) described non-linear compensation method than directly using the calculating of arcsine formula Measurement of dip angle value (i.e. θSurvey=(arcsina) * 180/ π) carry out effectively reducing non-linear angle error.
In the present invention, the nonlinear temperature compensation technique that temperature compensation module and nonlinearity compensation module are adopted compensate for In existing similar technique, temperature compensation error is big, the obvious shortcoming of nonlinearity erron;More accurate to nonlinear temperature error compensation.Simultaneously The present invention reduces system composition on the premise of assurance function to greatest extent.Obliquity sensor of the present invention has cost Low, certainty of measurement is high, anti-vibrating and impact, be applied to the advantage of wide temperature harsh and unforgiving environments, is particularly suited for high speed railway track superelevation Measurement.
In embodiments of the present invention, temperature compensation module 104-1 operation principle is as follows:
(201-1)~(201-7) obtains temperature compensation coefficient (inclusion p to S201 first in the steps below0,V0、p1,V0、p2,V0、 p3,V0、p0,Sc、p1,Sc、p2,Sc、p3,Sc、p0,C2、p1,C2、p0,C3、p1,C3), and it is written into temperature compensation module in microprocessor.
(201-1) temperature control horizontal precision turntable, obliquity sensor will be arranged on without the inclination angle sensor device of overcompensation Energising, the voltage digital signal containing obliquity information of setting inclination angle sensor device output described A/D conversion module output and institute State temperature digital signal and supply computer or host computer collection;
(201-2) uniformly choose several test temperatures point T within the scope of full temperature to be measuredi, adjacent temperature spot interval should not More than 10 DEG C, in each test temperature point TiUnder, temperature control turntable the temperature inside the box should be incubated the sufficiently long time, so that inclination angle sensing Device device internal and external temperature is in a basic balance;
(201-3) in each test temperature point TiUnder, uniformly choose several measurement of dip angle in the range of -8~8 ° of inclination angles Point θj, adjacent measurement of dip angle point angle interval should be not more than 1 °;
(201-4) in each test temperature point TiUnder, after the insulation of turntable incubator is long-time enough, control turntable to rotate to every Individual measurement of dip angle point θj;Now gather the described voltage digital signal value V (T containing obliquity informationij) and described digital temperature letter Number value TEMP (Ti);
(201-5) in each temperature spot Ti, by following formula (7) using least square fitting gathered digital voltage V (Tij) and inclination angle thetajCubic polynomial:
V(Tij)=V0(Ti)+B1(Ti)·θj+B2(Ti)·θj 2+B3(Ti)·θj 3V(20)
Each temperature spot T can be obtainediUnder zero measurement value V0(Ti) and sensitivity measure value Sc(Ti) (=B1(Ti)·180/ π, unit:V/g), so can calculate each temperature spot, each demarcate angle under acceleration calculation value a (Tij), calculate public Formula is as follows:
ε in formula (20)VRepresent voltage regression criterion.According to test of many times result, generally | εV|<0.15mV.
(201-6) adopt method of least square each temperature spot of matching T as followsiUnder inclination value θjWith accelerometer Calculation value a (Tij) three relations:
Each temperature spot T can be obtainediUnder quadratic nonlinearity co-efficient measurements C2(Ti), cubic non-linearity co-efficient measurements C3 (Ti).ε in formula (9)θRepresent angle calculation regression criterion.According to test of many times result, generally | εθ|≤0.0005°.
(201-7) adopt method of least square (10)~(13) matching zero-bit V as follows0(Ti), sensitivity Sc(Ti)、 Quadratic nonlinearity coefficient C2(Ti), cubic non-linearity coefficient C3(Ti) and gathered digital temperature TEMP (Ti) polynomial function close System:
Sc(Ti)=p0,Sc+p1,Sc·[TEMP(Ti)]+p2,Sc·[TEMP(Ti)]2+p3,Sc·[TEMP(Ti)]3Sc(24)
In above formula (10)~(13)For temperature compensation parameter fitting residual error, whereinAnd εScIt is survey after impact temperature compensation The principal element of angle error,Impact temperature consistency, εScThen affect angle agreement.
The temperature digital signal of S202 temperature of micro compensating module collection MEMS sensor module output is simultaneously smoothed Sensor temperature smooth value ST is obtained after Filtering Processing;
Polynomial equation (27)~(30) that S203 presses below in relation to sensor temperature smooth value ST calculate MEMS respectively and pass Sensor zero-bit V0, sensitivity Sc, quadratic nonlinearity coefficient C2, cubic non-linearity coefficient C3Offset at temperature ST;
V0=p0,V0+p1,V0·ST+p2,V0·ST2+p3,V0·ST3(27)
Sc=p0,Sc+p1,Sc·ST+p2,Sc·ST2+p3,Sc·ST3(28)
C2=p0,C2+p1,C2·ST (29)
C3=p0,C3+p1,C3·ST (30)
The temperature compensation that temperature compensation module adopts utilizes three rank multinomials (27)~(28) to calculate MEMS sensor Zero-bit V0, sensitivity Sc, closest to MEMS sensor self-characteristic.Using accurate temperature control turntable, inclination angle sensor device is implemented Temperature compensation parameter demarcates the accuracy that ensure that measurement;Using least square fitting technology (formula (20), (22)~(26)) Calculate unbiasedness and the optimality that compensating parameter ensure that parameter estimation.
In embodiments of the present invention, nonlinearity compensation module 104-1 operation principle is as follows:
S301 microprocessor nonlinearity compensation module gathers the digital voltage containing obliquity information of A/D conversion module output Signal, makees digital filtering, obtains the magnitude of voltage SV containing obliquity information after smoothing processing to this signal;
S302 nonlinearity compensation module obtains MEMS sensor zero-bit V of temperature compensation module output0, sensitivity Sc, secondary Nonlinear factor C2, cubic non-linearity coefficient C3
(18)~(19) calculate measurement of dip angle value θ to S303 as followsSurvey(unit:Degree)
Three rank multinomials (32) that nonlinearity compensation module 104-3 adopts compensate to Nonlinear Error of Transducer, examine Consider the quadratic nonlinearity error of sensor, the accurate calculating of cubic non-linearity error, than in existing document, patent more anyway The method that string trigonometric function method calculates inclination angle can greatly reduce nonlinearity erron.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, not in order to Limit the present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc., all should comprise Within protection scope of the present invention.

Claims (6)

1. a kind of nonlinear temperature compensation method based on digital obliquity sensor, described digital obliquity sensor comprises MEMS sensor (102), filtration module (103), microprocessor (104), communication module (106), reference power supply module (105) with And power module of voltage regulation (101);Described microprocessor (104) includes temperature compensation module (104-1), A/D conversion module (104- 2) and nonlinearity compensation module (104-3);The power input of described MEMS sensor (102), described filtration module (103) Power input, the power input of described microprocessor (104), described reference power supply module (105) and described communication mould The power input of block (106) is all connected with power module of voltage regulation (101);The input of described temperature compensation module (104-1) is even It is connected to the first outfan of described MEMS sensor (102), the signal input part of described filtration module (103) connects to described Second outfan of MEMS sensor (102), the first input end of described A/D conversion module (104-2) connects to described filtering The outfan of module (103), the second input of described A/D conversion module (104-2) connects to described reference power supply module (105) outfan, the first input end of described nonlinearity compensation module (104-3) connects to described temperature compensation module (104-1) outfan, the second input of described nonlinearity compensation module (104-3) connects to described A/D conversion module (104-2) outfan, the input of described communication module (106) connects defeated to described nonlinearity compensation module (104-3) Go out end;It is characterized in that, described nonlinear temperature compensation method comprises the steps:
S1:Several test temperatures point T is uniformly chosen within the scope of full temperature to be measuredi, adjacent temperature spot interval should be not more than 10 DEG C, In each test temperature point TiUnder, temperature control turntable the temperature inside the box should be incubated the sufficiently long time so that inside and outside inclination angle sensor device Temperature is in a basic balance;
S2:In each test temperature point TiUnder, uniformly choose several measurement of dip angle point θ in the range of -8 °~8 ° inclination anglesj, adjacent Measurement of dip angle point angle interval should be not more than 1 °;
S3:In each test temperature point TiUnder, after temperature control turntable case inside holding is long-time enough, controls turntable to rotate and incline to each Angular measurement point θj, the voltage digital signal V containing obliquity information that now in collection inclination angle sensor device, A/D conversion module exports (Tij) and temperature digital signal TEMP (Ti);
S4:In each temperature spot Ti, using least square fitting gathered digital voltage V (Tij) and inclination angle thetajMore than three times Item formula, obtains each temperature spot TiUnder zero measurement value V0(Ti) and sensitivity measure value Sc(Ti), and surveyed according to described zero-bit Value V0(Ti) and described sensitivity measure value Sc(Ti) obtain each temperature spot, each demarcate angle under acceleration calculation value
S5:Using least square fitting each temperature spot TiUnder inclination value θjWith acceleration calculation value a (Tij) three times pass System, obtains each temperature spot TiUnder quadratic nonlinearity co-efficient measurements C2(Ti), cubic non-linearity co-efficient measurements C3(Ti);
S6:Using least square fitting zero-bit V0(Ti), sensitivity Sc(Ti), quadratic nonlinearity coefficient C2(Ti), three non-thread Property coefficient C3(Ti) and described temperature digital signal value TEMP (Ti) polynomial function relation, obtain penalty coefficient p0,V0、p1,V0、 p2,V0、p3,V0、p0,Sc、p1,Sc、p2,Sc、p3,Sc、p0,C2、p1,C2、p0,C3、p1,C3
Wherein p0,V0、p0,Sc、p0,C2、p0,C3The zero-bit of expression benchmark, sensitivity, quadratic nonlinearity coefficient, cubic non-linearity respectively Coefficient;p1,V0、p1,Sc、p1,C2、p1,C3Represent zero-bit, sensitivity, quadratic nonlinearity coefficient, the temperature of cubic non-linearity coefficient respectively Degree change coefficient of first order;p2,V0、p2,ScRepresent zero-bit, the temperature change quadratic coefficients of sensitivity;p3,V0、p3,ScRepresent zero-bit, spirit Temperature change three ordered coefficients of sensitivity;
S7:Obtain zero-bit V of digital obliquity sensor according to above-mentioned penalty coefficient0, sensitivity Sc, quadratic nonlinearity coefficient C2 With cubic non-linearity coefficient C3Temperature compensation value.
2. nonlinear temperature compensation method as claimed in claim 1 is it is characterised in that in step s 4 according to formula V (Ti, θj)=V0(Ti)+B1(Ti)·θj+B2(Ti)·θj 2+B3(Ti)·θj 3VCarry out least square fitting;Wherein, V0(Ti) it is temperature Degree point TiUnder zero-bit, B1(Ti)、B2(Ti)、B3(Ti) it is respectively temperature spot TiUnder angle once, secondary and cubic term coefficient, εVFor voltage regression criterion.
3. nonlinear temperature compensation method as claimed in claim 1 is it is characterised in that press formula in step s 5Carry out least square fitting;Wherein, C2(Ti)、C3(Ti) respectively Represent each temperature spot TiUnder quadratic nonlinearity co-efficient measurements and cubic non-linearity co-efficient measurements;εθRepresent angle calculation Regression criterion.
4. nonlinear temperature compensation method as claimed in claim 1 it is characterised in that in step s 6, is carried out according to following formula Little square law matching,
Sc(Ti)=p0,Sc+p1,Sc·[TEMP(Ti)]+p2,Sc·[TEMP(Ti)]2+p3,Sc·[TEMP(Ti)]3Sc
C 2 ( T i ) = p 0 , C 2 + p 1 , C 2 &CenterDot; &lsqb; T E M P ( T i ) &rsqb; + &epsiv; C 2 ;
Wherein p1,V0、p1,Sc、p1,C2、p1,C3Represent zero-bit, spirit respectively Sensitivity, quadratic nonlinearity coefficient, the temperature change coefficient of first order of cubic non-linearity coefficient;p2,V0、p2,ScRepresent zero-bit, spirit respectively The temperature change quadratic coefficients of sensitivity;p3,V0、p3,ScRepresent zero-bit, temperature change three ordered coefficients of sensitivity respectively; For temperature compensation parameter fitting residual error, whereinAnd εScBe impact temperature compensation after angle error principal element,Impact temperature is consistent Property, εScThen affect angle agreement.
5. nonlinear temperature compensation method as claimed in claim 1 it is characterised in that described MEMS sensor (102) The temperature digital signal that one outfan exports carries out temperature-compensating calculating to described temperature compensation module (104-1), calculates gained Obtained by nonlinearity compensation module (104-3);What the second outfan of described MEMS sensor (102) exported contains obliquity information Analog voltage signal be transferred to described A/D conversion module (104-2) after described filtration module (103) filtering, convert gained Voltage digital signal containing obliquity information is obtained by nonlinearity compensation module (104-3);Described nonlinearity compensation module (104-3) Using the temperature compensation parameter that described temperature compensation module (104-1) calculates, the voltage digital signal containing obliquity information is carried out non-linear Compensate, and the measurement of dip angle value digital signal after compensating is exported to communication module (106) by described communication module (106) output To user.
6. nonlinear temperature compensation method as claimed in claim 1 is it is characterised in that described microprocessor (104) adopts type Number for ADuC845 single-chip microcomputer.
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