CN104677295B - Laser interference nonlinearity erron method of self compensation and device - Google Patents
Laser interference nonlinearity erron method of self compensation and device Download PDFInfo
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Abstract
The present invention relates to a kind of laser interference nonlinearity erron method of self compensation and device, belong to laser interference Technology of Precision Measurement field.Apparatus of the present invention include interferometry module, optical demodulation module, frequency modulation control module, control and message output module.Nonlinear error compensation for solving the problems, such as existing laser interference system, overcoming usual laser interference nonlinear error compensation needs the problem of fineness of adjustment and the stepping of physical displacement is required, structure is relatively easy, and the characteristic with compared with high-adaptability and synchro measure interference system error, can be under conditions of without physical displacement, arbitrfary point interferometric phase nonlinearity erron is completed during measuring to compensate automatically, improves the degree of accuracy of interferometer measuration system.
Description
Technical field
The present invention relates to a kind of laser interference nonlinearity erron method of self compensation and device, belong to laser interference accurate measurement
Technical field.
Background technology
Laser interferometry is widely used in Technology of Precision Measurement field, is the important hand of current high-acruracy survey
Section, is of great significance to linear measure longimetry field tool.Laser interferometry is due to the optics and electric device of application
The combined influence of the factors such as part can cause the nonlinearity erron of its measurement result, and this error has periodic feature, its week
Phase is with the integral point starting of interference fringe and terminated, and can be usually reached several or more than ten nanometer varying degree.In length
When measuring the measurement of high accuracy requirement, when particularly measurement error requirement is less than 10nm, interferometry nonlinearity erron turns into shadow
Ring the key factor of the measurement result degree of accuracy.The method for the nonlinearity erron amendment applied at present utilize precision displacement table production more
Raw displacement, interferometer synchro measure obtains the redundant data of one group of interferometry phase, passes through the method solution contradiction such as least square
Equation obtains optimal solution, completes nonlinearity erron amendment, and this method implements system complex, during introduce displacement platform motion
Error, influences the precision of final non-liner revision, particularly especially prominent at the big flex point of nonlinearity erron.Therefore from principle
The nonlinear error compensation problem for how reducing interferometry is to lift one of key technology of accurate measurement level.
The content of the invention
Deposited the invention aims to the nonlinearity erron for solving existing laser interference system using physical displacement modulation
The problem of there is provided a kind of laser interference nonlinearity erron method of self compensation and device.The present apparatus is with compared with high-adaptability and together
The characteristic of pacing amount interference system error, can under conditions of without physical displacement, by automatically adjust the frequency of laser come
Determine the difference of interferometer measurement phase and theoretical value and then realize the nonlinear error compensation of interference system.
The purpose of the present invention is achieved through the following technical solutions.
A kind of laser interference nonlinearity erron self-compensating device, it is characterised in that：It includes：Interferometry module (1), light
Learn demodulation module (2), frequency modulation control module (3), control and message output module (4).
Control and the effect of message output module (4) are：1. optical frequency control signal is produced, and is sent to frequency modulation control module
(3).2. the interference signal that optical demodulation module (2) is exported is handled, obtains the current location measured value of measurand.
The interference signal includes the integer level and decimal level of interference signal.3. according to the current location measured value meter of measurand
Calculate the theoretical value for obtaining interference signal decimal level.4. the decimal level of the interference signal obtained according to measurement and calculating are obtained
Interference signal decimal level theoretical value between relation, the nonlinearity erron of interferometry module (1) is compensated.
The effect of frequency modulation control module (3) is：The optical frequency sent according to control and message output module (4) controls letter
Number, the laser of optical frequency control signal assigned frequency is exported, and output this to interferometry module (1).
The effect of interferometry module (1) is：The laser pair for the assigned frequency come in is inputted using frequency modulation control module (3)
The change in displacement of measurand is measured, and obtains mutually orthogonal the first sinusoidal signal and the second sinusoidal signal, and its is defeated
Go out to optical demodulation module (2).
The effect of optical demodulation module (2) is：Mutually orthogonal first sent to interferometry module (1) is sinusoidal
Signal and the second sinusoidal signal are handled, and obtain the interference signal of the current location of measurand, and send it to control
And message output module (4).
The annexation of each module is：
The output end of control and message output module (4) is connected with the input of frequency modulation control module (3)；Frequency modulation control mould
The output end of block (3) is connected with the input of interferometry module (1)；The output end and Optical Demodulation of interferometry module (1)
The input connection of molding block (2)；The output end of optical demodulation module (2) and control and the input of message output module (4)
End connection.
The self-compensating side of laser interference nonlinearity erron is carried out using the laser interference nonlinearity erron self-compensating device
Method, it is characterised in that：Its concrete operation step is：
Step 1: obtaining the non-linear mapping table by mistake of laser interference.
Step 1.1：The relative position of fixed measurand and interferometry module (1).It is defeated externally to control and information
Go out the frequency range [F that module (4) inputs optical frequency control signal1,F2]；Frequency step is concurrently set, is represented with symbol Δ f.It is described
Frequency range [F1,F2], it is to obtain the frequency range needed for the nonlinearity erron of an interference periods internal interference signal measurements,
F1∈ [0,4G], F2∈[0,4G]。
Step 1.2：I is set as a variable, and sets its initial value as 0.
Step 1.3：Control and message output module (4) produce i-th of optical frequency control signal, its frequency symbol specified
fiRepresent.If i=0, fiFor [F1,F2] in the range of any one frequency values；Otherwise, fi=fi-1+Δf。
Step 1.4：Control and message output module (4) judge fi≤F2Whether set up, if set up, by i-th of optical frequency
Control signal is sent to frequency modulation control module (3)；Otherwise, the manufacturing process of the non-linear mapping table by mistake of laser interference is completed, is performed
The operation of step 2.
Step 1.5：I-th of optical frequency that frequency modulation control module (3) is sent according to control and message output module (4) is controlled
Signal, output frequency is fiLaser, and output this to interferometry module (1).
Step 1.6：The frequency that interferometry module (1) is come in using frequency modulation control module (3) input is fiLaser pair
The change in displacement of measurand is measured, and obtains i-th group of mutually orthogonal first sinusoidal signal and the second sinusoidal signal, and will
It is output to optical demodulation module (2).
Step 1.7：Sent to interferometry module (1) i-th group mutually orthogonal first of optical demodulation module (2)
Sinusoidal signal and the second sinusoidal signal are handled, and obtain the interference signal of measurand, and send it to control and information
Output module (4).Use symbol NiRepresent the integer level of the interference signal of measurand；Use symbol εiRepresent the dry of measurand
Relate to the decimal level of signal.
Step 1.8：If i=0, message output module (4) judges now εiWhether it is 0；If εi=0, then perform step
Rapid 1.9 operation；If εi≠ 0, then by adjusting f0Value, make f0Value be closest to F1, and make optical demodulation module
(2) the decimal level ε of the interference signal obtainediValue be 0；Then the operation of step 1.9 is performed.If i ≠ 0, directly perform
The operation of step 1.10.
Step 1.9：Work as i=0, the interference signal that message output module (4) is obtained using optical demodulation module (2) it is whole
Several levels time Ni, the displacement variable (being represented with symbol L) of measurand is calculated by formula (1), now, due to optical demodulation
The decimal level ε for the interference signal that module (2) is obtainediFor 0, therefore calculate the displacement variable L of obtained measurand and do not deposit
In error.Then, make i value from increasing 1, repeat step 1.3 to the operation of step 1.12.
Wherein, λiFor current measurement optical maser wavelength, it can be obtained by formula (2).
Wherein, c is the light velocity in vacuum.
Step 1.10：When i ≠ 0, message output module (4) calculates the interference signal for obtaining measurand by formula (3)
Theoretical value, use symbol MiRepresent；Then by MiThe theoretical value of the interference signal decimal level of measurand is obtained (with symbol ε 'i
Represent), ε 'iAs MiFractional part.
Step 1.11：Message output module (4) calculates the non-linear mistake for obtaining interference signal measured value by formula (4)
Difference, with symbol Δ εiRepresent.
Δεi=ε 'i-εi (4)
Step 1.12：The interference signal for the measurand that message output module (4) measures optical demodulation module (2)
Decimal level εiAnd the nonlinearity erron Δ ε of interference signal measured valueiPreserve into the non-linear mapping table by mistake of laser interference；So
Make i value from increasing 1 afterwards, repeat step 1.3 to the operation of step 1.12.
By the operation of step one, the dry of measurand in an interference periods is obtained by the measuring method of laser frequency
Relate to the decimal level ε of signaliWith the nonlinearity erron Δ ε of interference signal measured valueiCorresponding relation, and be stored in laser interference
Non-linear mapping table by mistake.
Step 2: carrying out self compensation to the laser interference nonlinearity erron that measuring phases are produced.
On the basis of step one operation, self compensation is carried out to the laser interference nonlinearity erron that measuring phases are produced.Tool
Body is：
Step 2.1：Retighten the position of measurand；Externally to control and message output module (4) input optical frequency
The frequency of control signal, is represented with symbol f.
Step 2.2：Control and message output module (4) produce optical frequency control signal, and its frequency specified is f；And by its
Send to frequency modulation control module (3).
Step 2.3：The optical frequency control signal that frequency modulation control module (3) is sent according to control and message output module (4),
Output frequency is f laser, and outputs this to interferometry module (1).
Step 2.4：The frequency that interferometry module (1) is come in using frequency modulation control module (3) input is f laser to quilt
The change in displacement for surveying object is measured, and obtains mutually orthogonal the first sinusoidal signal and the second sinusoidal signal, and output it
To optical demodulation module (2).
Step 2.5：Mutually orthogonal first that optical demodulation module (2) is sent to interferometry module (1) is sinusoidal
Signal and the second sinusoidal signal are handled, and obtain the interference signal of measurand, and send it to control and information output
Module (4).The integer level of the interference signal of measuring phases measurand is represented with symbol N；Measuring phases quilt is represented with symbol ε
Survey the decimal level of the interference signal of object.
Step 2.6：The measurand that control and message output module (4) are preserved in the non-linear mapping table by mistake of laser interference
Interference signal decimal level εiMiddle lookup ε, if finding εp=ε, wherein εp∈{εi, then ε is carried out by formula (5)
Amendment, obtains ε correction value, is represented with symbol ε '.If do not found, interference corresponding with ε is obtained by interpolation method and believed
The nonlinearity erron of number measured value, with symbol Δ ε 'pRepresent, ε correction value ε ' is then obtained by formula (6).
ε '=ε+Δ εp(5)
ε '=ε+Δ ε 'p(6)
Step 2.7：Control and message output module (4) calculate the current displacement change for obtaining measurand by formula (7)
Change amount (is represented) with symbol L ', and exports the current displacement variable L ' of measurand.
Wherein, λ is current measurement optical maser wavelength, can be obtained by formula (8).
By the operation of above-mentioned steps, complete to carry out self compensation to the laser interference nonlinearity erron that measuring phases are produced,
Obtain the current displacement variable L ' of accurate measurand.
The self-compensating method of laser interference nonlinearity erron, it is characterised in that：Can be by reducing step one step 1.1
Described in frequency step Δ f value, improve the self-compensating precision of laser interference nonlinearity erron.
Beneficial effect
Laser interference nonlinearity erron method of self compensation and device proposed by the present invention, compared with the prior art compared with having
Advantages below：The method of the laser interference nonlinear error compensation of use overcomes usual laser interference nonlinear error compensation and needed
The problem of fineness of adjustment and the stepping of physical displacement is required is wanted, structure is relatively easy, it is easy to which done with high accuracy interferes non-thread
Property error compensation realize.Nonlinearity erron in interference periods is traceable to by light wave using frequency modulating method exactly in implementation
The problem of matrix fitting calculating and the linear difference that existing interference nonlinear error compensation is used are overcome in wavelength, principle, it is real
Showed the function of arbitrfary point phase measurement, can the effectively accurate amendment of the local flex point of specific aim measurement nonlinearity erron difficulty
Topic, improves the compensation level of current interference nonlinear error, and up time can be carried out during measuring and compensate automatically comprehensively,
Improve the degree of accuracy of interferometer measuration system.
Brief description of the drawings
Fig. 1 is the structural representation of laser interference nonlinearity erron self-compensating device in the specific embodiment of the invention；
Wherein, 1- interferometries module, 2- optical frequencies demodulation module, 3- frequency modulation controls module, 4- controls and information output
Module, 5- measurands.
Embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
Laser interference nonlinearity erron self-compensating device in the present embodiment, its structure as shown in figure 1, including：Interferometry
Module 1, optical demodulation module 2, frequency modulation control module 3, control and message output module 4.
Control and the effect of message output module 4 are：1. optical frequency control signal is produced, and is sent to frequency modulation control module 3.
2. the interference signal that optical demodulation module 2 is exported is handled, obtains the current location measured value of measurand.It is described dry
Relating to signal includes the integer level and decimal level of interference signal.3. calculated and obtained according to the current location measured value of measurand
The theoretical value of interference signal decimal level.4. the interference that the decimal level of the interference signal obtained according to measurement and calculating are obtained
Relation between the theoretical value of signal decimal level, is compensated to the nonlinearity erron of interferometry module 1.
The effect of frequency modulation control module 3 is：The optical frequency control signal sent according to control and message output module 4, it is defeated
Go out the laser of optical frequency control signal assigned frequency, and output this to interferometry module 1.
The effect of interferometry module 1 is：The laser for the assigned frequency come in is inputted to tested using frequency modulation control module 3
The change in displacement of object is measured, and obtains mutually orthogonal the first sinusoidal signal and the second sinusoidal signal, and be output to
Optical demodulation module 2.
The effect of optical demodulation module 2 is：The the first mutually orthogonal sinusoidal signal sent to interferometry module 1
Handled with the second sinusoidal signal, obtain the interference signal of the current location of measurand, and sent it to control and believe
Cease output module 4.
The annexation of each module is：
The output end of control and message output module 4 is connected with the input of frequency modulation control module 3；Frequency modulation control module 3
Output end be connected with the input of interferometry module 1；The output end of interferometry module 1 and optical demodulation module 2
Input is connected；The output end of optical demodulation module 2 is connected with the input of control and message output module 4.
The self-compensating side of laser interference nonlinearity erron is carried out using the laser interference nonlinearity erron self-compensating device
Method, its concrete operation step is：
Step 1: obtaining the non-linear mapping table by mistake of laser interference.
Step 1.1：The relative position of fixed measurand and interferometry module 1.Externally to control and information output
Module 4 inputs the frequency range [F of optical frequency control signal1,F2],F1=0, F2=1.2G；Concurrently set frequency step Δ f=
100M.Frequency range [the F1,F2], be obtain an interference periods internal interference signal measurements nonlinearity erron needed for
Frequency range.
Step 1.2：I is set as a variable, and sets its initial value as 0.
Step 1.3：Control and message output module 4 produce i-th of optical frequency control signal, its frequency specified symbol fi
Represent.If i=0, fiFor [F1,F2] in the range of any one frequency values；Otherwise, fi=fi-1+Δf。
Step 1.4：Control and message output module 4 judge fi≤F2Whether set up, if set up, by i-th of optical frequency control
Signal processed is sent to frequency modulation control module 3；Otherwise, the manufacturing process of the non-linear mapping table by mistake of laser interference is completed, step is performed
Two operation.
Step 1.5：I-th of optical frequency that frequency modulation control module 3 is sent according to control and message output module 4 controls to believe
Number, output frequency is fiLaser, and output this to interferometry module 1.Laser is produced by the adjustable frequency lasers of 650nm,
Optical maser wavelength is 632.89142nm.
Step 1.6：It is f that interferometry module 1, which inputs the frequency come in using frequency modulation control module 3,iLaser to tested
The change in displacement of object is measured, and obtains i-th group of mutually orthogonal first sinusoidal signal and the second sinusoidal signal, and its is defeated
Go out to optical demodulation module 2.
Step 1.7：I-th group of first mutually orthogonal sine that optical demodulation module 2 is sent to interferometry module 1
Signal and the second sinusoidal signal are handled, and obtain the interference signal of measurand, and send it to control and information output
Module 4.Use symbol NiRepresent the integer level of the interference signal of measurand；Use symbol εiRepresent the interference signal of measurand
Decimal level.
Step 1.8：If i=0, message output module 4 judges now εiWhether it is 0；If εi=0, then perform step
1.9 operation；If εi≠ 0, then by adjusting f0Value, make f0Value be closest to F1, and make optical demodulation module 2
The decimal level ε of obtained interference signaliValue be 0；Then the operation of step 9 is performed.If i ≠ 0, step is directly performed
1.10 operation.
Step 1.9：Work as i=0, the integer level for the interference signal that message output module 4 is obtained using optical demodulation module 2
Secondary Ni, the displacement variable L of measurand, now, the interference obtained due to optical demodulation module 2 are calculated by formula (1)
The decimal level ε of signaliFor 0, therefore calculate the displacement variable L of obtained measurand error is not present.Then, make i's
Value repeats step 1.3 to the operation of step 1.12 from increasing 1.
Step 1.10：When i ≠ 0, message output module 4 obtains the interference signal of measurand by formula (3) calculating
Theoretical value, uses symbol MiRepresent；Then by MiObtain the theoretical value ε ' of the interference signal decimal level of measurandi, ε 'iAs Mi
Fractional part.
Step 1.11：Message output module 4 calculates the nonlinearity erron Δ for obtaining interference signal measured value by formula (4)
εi。
Step 1.12：The decimal of the interference signal for the measurand that message output module 4 measures optical demodulation module 2
Level εiAnd the nonlinearity erron Δ ε of interference signal measured valueiPreserve into the non-linear mapping table by mistake of laser interference；Then i is made
Value from increase 1, repeat step 1.3 to the operation of step 1.12.
By the operation of step one, by the measuring method of laser frequency obtained an interference periods inner modulation frequency with
The corresponding relation of the nonlinearity erron of interference signal measured value, and the non-linear mapping table by mistake of laser interference is stored in, such as the institute of table 1
Show.
The non-linear mapping table by mistake of the laser interference of table 1
| Sequence number | εi | Δεi |
| 1 | 0.0100 | 0.0074 |
| 2 | 0.0200 | -0.0001 |
| 3 | 0.0300 | -0.0042 |
| 4 | 0.0400 | -0.0055 |
| 5 | 0.0500 | -0.0049 |
| 6 | 0.0600 | -0.0041 |
| 7 | 0.0700 | -0.0005 |
| 8 | 0.0800 | 0.0015 |
| 9 | 0.0900 | 0.0027 |
| 10 | 0.1000 | 0.0029 |
| 11 | 0.1100 | 0.0027 |
| 12 | 0.1200 | 0.0031 |
| 13 | 0.1300 | 0.0015 |
| 14 | 0.1400 | -0.0007 |
| 15 | 0.1500 | -0.0030 |
| 16 | 0.1600 | -0.0009 |
| 17 | 0.1700 | 0.0037 |
| 18 | 0.1800 | 0.0057 |
| 19 | 0.1900 | 0.0048 |
| … | … | … |
| 91 | 0.9100 | -0.0007 |
| 92 | 0.9200 | 0.0045 |
| 93 | 0.9300 | 0.0019 |
| 94 | 0.9400 | -0.0025 |
| 95 | 0.9500 | 0.0042 |
| 96 | 0.9600 | 0.0009 |
| 97 | 0.9700 | -0.0009 |
| 98 | 0.9800 | 0.0006 |
| 99 | 0.9900 | 0.0013 |
Step 2: carrying out self compensation to the laser interference nonlinearity erron that measuring phases are produced.
On the basis of step one operation, self compensation is carried out to the laser interference nonlinearity erron that measuring phases are produced.Tool
Body is：
Step 2.1：Retighten the position of measurand；Externally to control and the input optical frequency control of message output module 4
The frequency f of signal processed.
Step 2.2：Control and message output module 4 produce optical frequency control signal, and its frequency specified is f；And sent out
Deliver to frequency modulation control module 3.
Step 2.3：The optical frequency control signal that frequency modulation control module 3 is sent according to control and message output module 4, output
Frequency is f laser, and outputs this to interferometry module 1.
Step 2.4：The laser that the frequency that interferometry module 1 is come in using the input of frequency modulation control module 3 is f is to tested pair
The change in displacement of elephant is measured, and obtains mutually orthogonal the first sinusoidal signal and the second sinusoidal signal, and be output to light
Learn demodulation module 2.
Step 2.5：The first mutually orthogonal sinusoidal signal that optical demodulation module 2 is sent to interferometry module 1
Handled with the second sinusoidal signal, obtain the interference signal of measurand, and send it to control and message output module
4.The integer level of the interference signal of measuring phases measurand is represented with symbol N；Measuring phases measurand is represented with symbol ε
Interference signal decimal level.
Step 2.6：The measurand that control and message output module 4 are preserved in the non-linear mapping table by mistake of laser interference
The decimal level ε of interference signaliMiddle lookup ε, if finding εp=ε, wherein εp∈{εi, then ε is repaiied by formula (5)
Just, ε correction value ε ' is obtained.If do not found, the non-thread of interference signal measured value corresponding with ε is obtained by interpolation method
Property error delta epsilon 'p, ε correction value ε ' is then obtained by formula (6).
Step 2.7：Control and message output module 4 calculate the current change in displacement for obtaining measurand by formula (7)
L ' is measured, and exports the current displacement variable L ' of measurand.
By the operation of above-mentioned steps, complete to carry out self compensation to the laser interference nonlinearity erron that measuring phases are produced,
Obtain the current displacement variable L ' of accurate measurand.
Described above is presently preferred embodiments of the present invention, and the present invention should not be limited to the embodiment and accompanying drawing institute is public
The content opened.It is every not depart from the lower equivalent or modification completed of spirit disclosed in this invention, both fall within the model that the present invention is protected
Enclose.
Claims (5)
1. a kind of laser interference nonlinearity erron self-compensating device, it is characterised in that：It includes：Interferometry module (1), optics
Demodulation module (2), frequency modulation control module (3), control and message output module (4)；
Control and the effect of message output module (4) are：1. optical frequency control signal is produced, and is sent to frequency modulation control module (3)；
2. the interference signal that optical demodulation module (2) is exported is handled, obtains the current location measured value of measurand；It is described
Interference signal includes the integer level and decimal level of interference signal；3. calculated according to the current location measured value of measurand
To the theoretical value of interference signal decimal level；4. it is dry that the decimal level of the interference signal obtained according to measurement and calculating are obtained
The relation between the theoretical value of signal decimal level is related to, the nonlinearity erron of interferometry module (1) is compensated；
The effect of frequency modulation control module (3) is：The optical frequency control signal sent according to control and message output module (4), it is defeated
Go out the laser of optical frequency control signal assigned frequency, and output this to interferometry module (1)；
The effect of interferometry module (1) is：The laser for the assigned frequency come in is inputted to tested using frequency modulation control module (3)
The change in displacement of object is measured, and obtains mutually orthogonal the first sinusoidal signal and the second sinusoidal signal, and be output to
Optical demodulation module (2)；
The effect of optical demodulation module (2) is：The the first mutually orthogonal sinusoidal signal sent to interferometry module (1)
Handled with the second sinusoidal signal, obtain the interference signal of the current location of measurand, and sent it to control and believe
Cease output module (4)；
The annexation of each module is：
The output end of control and message output module (4) is connected with the input of frequency modulation control module (3)；Frequency modulation control module
(3) output end is connected with the input of interferometry module (1)；The output end and optical demodulation of interferometry module (1)
The input connection of module (2)；The output end of optical demodulation module (2) and control and the input of message output module (4)
Connection.
2. a kind of self-compensating method of laser interference nonlinearity erron, it is characterised in that：Its concrete operation step is：
Step 1: obtaining the non-linear mapping table by mistake of laser interference；
The decimal level ε of the interference signal of measurand in an interference periods is obtained by the measuring method of laser frequencyiWith doing
Relate to the nonlinearity erron Δ ε of signal measurementsiCorresponding relation, and be stored in laser interference it is non-linear by mistake mapping table；
Step 2: carrying out self compensation to the laser interference nonlinearity erron that measuring phases are produced；
On the basis of step one operation, self compensation is carried out to the laser interference nonlinearity erron that measuring phases are produced；
The non-linear concrete operation step of mapping table by mistake of laser interference is obtained described in step one is：
Step 1.1：The relative position of fixed measurand and interferometry module (1)；Externally to control and information output mould
Block (4) inputs the frequency range [F of optical frequency control signal1,F2]；Frequency step is concurrently set, is represented with symbol Δ f；
Step 1.2：I is set as a variable, and sets its initial value as 0；
Step 1.3：Control and message output module (4) produce i-th of optical frequency control signal, its frequency specified symbol fiTable
Show；If i=0, fiFor [F1,F2] in the range of any one frequency values；Otherwise, fi=fi-1+Δf；
Step 1.4：Control and message output module (4) judge fi≤F2Whether set up, if set up, i-th of optical frequency is controlled
Signal is sent to frequency modulation control module (3)；Otherwise, the manufacturing process of the non-linear mapping table by mistake of laser interference is completed, step is performed
Two operation；
Step 1.5：I-th of optical frequency that frequency modulation control module (3) is sent according to control and message output module (4) controls to believe
Number, output frequency is fiLaser, and output this to interferometry module (1)；
Step 1.6：The frequency that interferometry module (1) is come in using frequency modulation control module (3) input is fiLaser to tested pair
The change in displacement of elephant is measured, and obtains i-th group of mutually orthogonal first sinusoidal signal and the second sinusoidal signal, and output it
To optical demodulation module (2)；
Step 1.7：I-th group of first mutually orthogonal sine that optical demodulation module (2) is sent to interferometry module (1)
Signal and the second sinusoidal signal are handled, and obtain the interference signal of measurand, and send it to control and information output
Module (4)；Use symbol NiRepresent the integer level of the interference signal of measurand；Use symbol εiRepresent the interference letter of measurand
Number decimal level；
Step 1.8：If i=0, control and message output module (4) judge now εiWhether it is 0；If εi=0, then perform
The operation of step 1.9；If εi≠ 0, then by adjusting f0Value, make f0Value be closest to F1, and make Optical Demodulation molding
The decimal level ε for the interference signal that block (2) is obtainediValue be 0；Then the operation of step 1.9 is performed；If i ≠ 0, directly hold
The operation of row step 1.10；
Step 1.9：Work as i=0, the interference signal that control and message output module (4) are obtained using optical demodulation module (2)
Integer level Ni, the displacement variable L of measurand is calculated by formula (1), now, because optical demodulation module (2) is obtained
The decimal level ε of the interference signal arrivediFor 0, therefore calculate the displacement variable L of obtained measurand error is not present；So
Afterwards, make i value from increasing 1, repeat step 1.3 to the operation of step 1.12；
<mrow>
<mi>L</mi>
<mo>=</mo>
<mfrac>
<msub>
<mi>&lambda;</mi>
<mi>i</mi>
</msub>
<mn>2</mn>
</mfrac>
<mo>&times;</mo>
<msub>
<mi>N</mi>
<mi>i</mi>
</msub>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>1</mn>
<mo>)</mo>
</mrow>
</mrow>
Wherein, λiFor current measurement optical maser wavelength, it can be obtained by formula (2)；
<mrow>
<msub>
<mi>&lambda;</mi>
<mi>i</mi>
</msub>
<mo>=</mo>
<mfrac>
<mi>c</mi>
<msub>
<mi>f</mi>
<mi>i</mi>
</msub>
</mfrac>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>2</mn>
<mo>)</mo>
</mrow>
</mrow>
Wherein, c is the light velocity in vacuum；
Step 1.10：When i ≠ 0, control and message output module (4) calculate the interference letter for obtaining measurand by formula (3)
Number theoretical value, use symbol MiRepresent；Then by MiObtain the theoretical value ε ' of the interference signal decimal level of measurandi, ε 'i
As MiFractional part；
<mrow>
<mi>L</mi>
<mo>=</mo>
<mfrac>
<msub>
<mi>&lambda;</mi>
<mi>i</mi>
</msub>
<mn>2</mn>
</mfrac>
<mo>&times;</mo>
<msub>
<mi>M</mi>
<mi>i</mi>
</msub>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>3</mn>
<mo>)</mo>
</mrow>
</mrow>
Step 1.11：Control and message output module (4) calculate the non-linear mistake for obtaining interference signal measured value by formula (4)
Difference, with symbol Δ εiRepresent；
Δεi=ε 'i-εi (4)
Step 1.12：The interference signal for the measurand that control and message output module (4) measure optical demodulation module (2)
Decimal level εiAnd the nonlinearity erron Δ ε of interference signal measured valueiPreserve into the non-linear mapping table by mistake of laser interference；
Then make i value from increasing 1, repeat step 1.3 to the operation of step 1.12.
3. a kind of self-compensating method of laser interference nonlinearity erron as claimed in claim 2, it is characterised in that：In step 2
The laser interference nonlinearity erron to measuring phases generation carries out self-compensating concrete operation step：
Step 2.1：Retighten the position of measurand；Externally to control and message output module (4) input optical frequency control
The frequency of signal, is represented with symbol f；
Step 2.2：Control and message output module (4) produce optical frequency control signal, and its frequency specified is f；And be sent to
To frequency modulation control module (3)；
Step 2.3：The optical frequency control signal that frequency modulation control module (3) is sent according to control and message output module (4), output
Frequency is f laser, and outputs this to interferometry module (1)；
Step 2.4：The laser that the frequency that interferometry module (1) is come in using frequency modulation control module (3) input is f is to tested pair
The change in displacement of elephant is measured, and obtains mutually orthogonal the first sinusoidal signal and the second sinusoidal signal, and be output to light
Learn demodulation module (2)；
Step 2.5：The first mutually orthogonal sinusoidal signal that optical demodulation module (2) is sent to interferometry module (1)
Handled with the second sinusoidal signal, obtain the interference signal of measurand, and send it to control and message output module
(4)；The integer level of the interference signal of measuring phases measurand is represented with symbol N；Tested pair of measuring phases are represented with symbol ε
The decimal level of the interference signal of elephant；
Step 2.6：Control and message output module (4) are in the dry of the non-linear measurand preserved in mapping table of laser interference by mistake
Relate to the decimal level ε of signaliMiddle lookup ε, if finding εp=ε, wherein εp∈{εi, then ε is modified by formula (5),
ε correction value is obtained, is represented with symbol ε '；If do not found, interference signal corresponding with ε is obtained by interpolation method and measured
The nonlinearity erron of value, with symbol Δ ε 'pRepresent, ε correction value ε ' is then obtained by formula (6)；
ε '=ε+Δ εp (5)
ε '=ε+Δ ε 'p (6)
Step 2.7：Control and message output module (4) calculate the current displacement variable for obtaining measurand by formula (7)
L ', and export the current displacement variable L ' of measurand；
<mrow>
<msup>
<mi>L</mi>
<mo>&prime;</mo>
</msup>
<mo>=</mo>
<mfrac>
<mi>&lambda;</mi>
<mn>2</mn>
</mfrac>
<mo>&times;</mo>
<mrow>
<mo>(</mo>
<mi>N</mi>
<mo>+</mo>
<msup>
<mi>&epsiv;</mi>
<mo>&prime;</mo>
</msup>
<mo>)</mo>
</mrow>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>7</mn>
<mo>)</mo>
</mrow>
</mrow>
Wherein, λ is current measurement optical maser wavelength, can be obtained by formula (8)；
<mrow>
<mi>&lambda;</mi>
<mo>=</mo>
<mfrac>
<mi>c</mi>
<mi>f</mi>
</mfrac>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>8</mn>
<mo>)</mo>
</mrow>
</mrow>
By the operation of above-mentioned steps, complete to carry out self compensation to the laser interference nonlinearity erron that measuring phases are produced, obtain
The current displacement variable L ' of accurate measurand.
4. a kind of self-compensating method of laser interference nonlinearity erron as claimed in claim 2 or claim 3, it is characterised in that：Step
Frequency range [F described in one step 1.11,F2], it is the nonlinearity erron for obtaining an interference periods internal interference signal measurements
Required frequency range, F1∈ [0,4G], F2∈[0,4G]。
5. a kind of self-compensating method of laser interference nonlinearity erron as claimed in claim 2 or claim 3, it is characterised in that：It can lead to
Frequency step Δ f value described in small step one step 1.1 of over-subtraction, improves the self-compensating precision of laser interference nonlinearity erron.
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