CN104668256A - Descaling method for etching machine - Google Patents
Descaling method for etching machine Download PDFInfo
- Publication number
- CN104668256A CN104668256A CN201510100043.1A CN201510100043A CN104668256A CN 104668256 A CN104668256 A CN 104668256A CN 201510100043 A CN201510100043 A CN 201510100043A CN 104668256 A CN104668256 A CN 104668256A
- Authority
- CN
- China
- Prior art keywords
- descaling
- acid
- soak
- liquor
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000002253 acid Substances 0.000 claims abstract description 28
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 14
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000011010 flushing procedure Methods 0.000 claims abstract description 13
- 239000003513 alkali Substances 0.000 claims abstract description 9
- 238000002791 soaking Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 6
- 239000000203 mixture Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 8
- 238000007654 immersion Methods 0.000 claims description 6
- 239000002585 base Substances 0.000 claims description 3
- 238000007598 dipping method Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 5
- 239000008399 tap water Substances 0.000 abstract 3
- 235000020679 tap water Nutrition 0.000 abstract 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- 239000011575 calcium Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- MPPQGYCZBNURDG-UHFFFAOYSA-N 2-propionyl-6-dimethylaminonaphthalene Chemical compound C1=C(N(C)C)C=CC2=CC(C(=O)CC)=CC=C21 MPPQGYCZBNURDG-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Surface Treatment Of Glass (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to a descaling method for an etching machine. The descaling method comprises the following steps: 1, soaking a descaling part into mixed acid liquor consisting of 9-26 percent hydrochloric acid and 10-38 percent sulfuric acid at the temperature 20-25 DEG C for 0.5 hour, flushing with tap water for the first time, and cleaning till the pH is 6-9; 2, soaking the descaling part into a 10-35 percent strong alkali solution at the temperature 25-30 DEG C for 2 hours, flushing with tap water for the second time, and cleaning till the pH is 6-9; 3, soaking the descaling part into the mixed acid liquor in the step I at the temperature 20-25 DEG C for 0.5 hour, flushing with tap water for the third time, and cleaning till the pH is 6-9. The descaling method has the advantages that the descaling time is as short as 3.5 hours, and the descaling efficiency from about 65 percent to over 95 percent. Damage to pipelines and equipment components in contact with the acid liquor is avoided in a descaling process, and the etching speed and etching quality of glass are well improved.
Description
Technical field
The present invention relates to electron trade glass thinning technical field, particularly relate to a kind of etching machine descaling method.
Background technology
Etching machine is one of necessaries of current thinning glass substrate.Along with recycling of etching solution, the fluosilicic acid (H generated during etching glass
2siF
6) concentration constantly raises, the many kinds of metal ions (Na be dissolved with in etching solution
+, K
+, Ca
2+) just can with H
2siF
6form corresponding fluosilicate (as prodan, potassium fluosilicate, calcium fluosilicate etc.) indissoluble thing, confuse other acid non-soluble substances in the lump in each part of appliance surface fouling that etching machine contacts with acid solution, form the white dirt layer of hard and compact.This off-white color dirt thing often can be blocked in pipeline, the import and export of pump and nozzle exit, reduces pipeline operation efficiency, has a strong impact on spraying effect, cause etching machine production capacity to decline, production cost is raised.
At present, the fouling of etching machine inside to be dredged and method that scale removal is conventional is the certain density strong acid solution periodic cleaning of preparation, and then carry out clear water flushing with giant.But this descaling method is unsatisfactory, each cleaning is consuming time longer and can not dispose fouling thoroughly, along with the carrying out produced also can be more long-pending thicker.
Summary of the invention
Object of the present invention is exactly to overcome the time length of existing etching machine scale removal existence, a difficult problem for weak effect, a kind of etching machine descaling method provided.
Technical scheme of the present invention is:
A kind of etching machine descaling method, is characterized in that it comprises following steps:
1), mix acid liquor soaks, and mix acid liquor is hydrochloric acid and the 10 %-38 % sulfuric acid 1:2 proportions by volume of 5 %-26 % by mass percent, and temperature controls between 20-25 DEG C, adopts machinery or pump circulation acid solution in acid soak process; Acid soak terminates rear running water and carries out first time flushing, cleans between pH=6-9;
2), alkali soaks, the strong base solution of alkali lye to be mass percent be 15 %-35 %, and temperature controls between 25-30 DEG C, soak 2 hours, adopt machinery or pump circulation alkali liquor in dipping by lye process, dipping by lye terminates rear running water and carries out second time flushing, cleans between pH=6-9;
3), again soak with the mix acid liquor of step one, between soaking temperature control 20-25 DEG C, soak 0.5 hour under pump circulates effect, acid soak terminates rear running water and carries out third time flushing, cleans between pH=6-9.
The invention has the advantages that, the scale removal time is short, and total time generally needs 3.5 hours.Compared to other descaling methods, there is very large reduction the time.Descale effect rises to 95 more than % by about 65 % before.And soak to pipeline and it and acid solution contact arrangement parts not damaged in scale removal process, there is good raising to the etching speed of glass and etching quality.
Detailed description of the invention
Embodiment 1
Step one: preparation mass percent concentration is respectively the mix acid liquor of the hydrochloric acid solution of 18 % and the sulfuric acid solution of 25 %, the 1:2 mixing by volume of hydrochloric acid solution and sulfuric acid solution, scale removal part is soaked in mix acid liquor, between soaking temperature control 20-25 DEG C, soak 0.5 hour under pump circulates effect.Acid soak terminates rear running water and carries out first time flushing, cleans between pH=6-9.
Step 2: then soak scale removal part with the sodium hydroxide solution that mass percent concentration is 24 %, between soaking temperature control 25-30 DEG C, soak 2 hours under pump circulates effect.Alkali immersion terminates rear running water and carries out second time flushing, cleans between pH=6-9.
Step 3: last again with the mix acid liquor immersion scale removal part that step one is prepared, between soaking temperature control 20-25 DEG C, soaks 0.5 hour under pump circulates effect.Acid soak terminates rear running water and carries out third time flushing, cleans between pH=6-9.Removal of deposit rate reaches 95%.
Embodiment 2:
Operate equally by embodiment 1, only change the mass percent concentration of mixed acid and the percent concentration of alkali: percent concentration is respectively hydrochloric acid 9 %, sulfuric acid 10 %; NaOH percent concentration 10 %.Do same test, removal of deposit rate about 70%.
Embodiment 3:
Operate equally by embodiment 1, only change the mass percent concentration of mixed acid and the percent concentration of alkali: percent concentration is respectively hydrochloric acid 26 %, sulfuric acid 37 %; NaOH percent concentration 33 %, does same test, removal of deposit rate 95 about %.
Claims (1)
1. an etching machine descaling method, is characterized in that it comprises following steps:
1), mix acid liquor soaks, mix acid liquor is hydrochloric acid and the 10 %-38 % sulfuric acid of 9 %-26 % by mass percent, 1:2 ratio mixed preparing composition by volume, scale removal part is soaked in mix acid liquor, temperature controls between 20-25 DEG C, soaks 0.5 hour, adopts machinery or pump circulation acid solution in immersion process, acid soak terminates rear running water and carries out first time flushing, cleans between pH=6-9;
2), dipping by lye, the strong base solution of alkali lye to be mass percent be 10 %-35 %, scale removal part is soaked in strong base solution, temperature controls between 25-30 DEG C, soak 2 hours, adopt machinery or pump circulation alkali liquor in immersion process, immersion terminates rear running water and carries out second time flushing, cleans between pH=6-9;
3), again soak scale removal part with the mix acid liquor of step one, between soaking temperature control 20-25 DEG C, soak 0.5 hour under pump circulates effect, immersion terminates rear running water and carries out third time flushing, cleans between pH=6-9.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510100043.1A CN104668256B (en) | 2015-03-07 | 2015-03-07 | Descaling method for etching machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510100043.1A CN104668256B (en) | 2015-03-07 | 2015-03-07 | Descaling method for etching machine |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104668256A true CN104668256A (en) | 2015-06-03 |
CN104668256B CN104668256B (en) | 2017-05-03 |
Family
ID=53304138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201510100043.1A Expired - Fee Related CN104668256B (en) | 2015-03-07 | 2015-03-07 | Descaling method for etching machine |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0753271B2 (en) * | 1991-12-28 | 1995-06-07 | 政幸 上江田 | Cleaning method |
CN102519301A (en) * | 2011-12-09 | 2012-06-27 | 贵州开磷(集团)有限责任公司 | Method for washing scales formed on tube of graphite heat exchanger |
CN102519302A (en) * | 2011-12-14 | 2012-06-27 | 无锡中彩科技有限公司 | Cleaning method for heat exchanger |
CN103042009A (en) * | 2012-12-31 | 2013-04-17 | 江西赛维Ldk光伏硅科技有限公司 | Method for cleaning an electrode shield for polysilicon production reduction furnaces |
CN103512421A (en) * | 2013-10-08 | 2014-01-15 | 中国铝业股份有限公司 | Method for cleaning scales of heat exchanger |
-
2015
- 2015-03-07 CN CN201510100043.1A patent/CN104668256B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0753271B2 (en) * | 1991-12-28 | 1995-06-07 | 政幸 上江田 | Cleaning method |
CN102519301A (en) * | 2011-12-09 | 2012-06-27 | 贵州开磷(集团)有限责任公司 | Method for washing scales formed on tube of graphite heat exchanger |
CN102519302A (en) * | 2011-12-14 | 2012-06-27 | 无锡中彩科技有限公司 | Cleaning method for heat exchanger |
CN103042009A (en) * | 2012-12-31 | 2013-04-17 | 江西赛维Ldk光伏硅科技有限公司 | Method for cleaning an electrode shield for polysilicon production reduction furnaces |
CN103512421A (en) * | 2013-10-08 | 2014-01-15 | 中国铝业股份有限公司 | Method for cleaning scales of heat exchanger |
Also Published As
Publication number | Publication date |
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CN104668256B (en) | 2017-05-03 |
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Granted publication date: 20170503 |