CN104656174B - Sub-wavelength photon screen compound eye - Google Patents

Sub-wavelength photon screen compound eye Download PDF

Info

Publication number
CN104656174B
CN104656174B CN201510103547.9A CN201510103547A CN104656174B CN 104656174 B CN104656174 B CN 104656174B CN 201510103547 A CN201510103547 A CN 201510103547A CN 104656174 B CN104656174 B CN 104656174B
Authority
CN
China
Prior art keywords
sub
photon screen
wavelength photon
wavelength
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510103547.9A
Other languages
Chinese (zh)
Other versions
CN104656174A (en
Inventor
蒋文波
徐毅非
卜云
宋潇潇
张晓华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xihua University
Original Assignee
Xihua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xihua University filed Critical Xihua University
Priority to CN201510103547.9A priority Critical patent/CN104656174B/en
Publication of CN104656174A publication Critical patent/CN104656174A/en
Application granted granted Critical
Publication of CN104656174B publication Critical patent/CN104656174B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1876Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/188Plurality of such optical elements formed in or on a supporting substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Telescopes (AREA)

Abstract

The present invention relates to a kind of optical imaging device, specially sub-wavelength photon screen compound eye, including incident light source, M sub-wavelength photon screen, metal level, substrate, focal plane;Described substrate one hemisphere of formation, has metal level outside described substrate, described focal plane is located at the hemispheroidal centre of sphere of substrate, described M sub-wavelength photon screen distribution is on the metal layer, the incident ray of described incident light source is respectively from each sub-wavelength photon screen vertical incidence, and incident ray is focused on focal plane simultaneously.The sub-wavelength photon screen compound eye that the present invention is provided, both there is high resolution, capacity usage ratio can be improved again, expand sensitive volume, it is played a driving role in the practical of field such as high resolution microscope, lightweight astronomical telescope, weapon visions, is with a wide range of applications.

Description

Sub-wavelength photon screen compound eye
Technical field
The present invention relates to a kind of optical imaging device, specially sub-wavelength photon screen compound eye.
Background technology
2001, German L.Kipp professors published an article on Nature periodicals, propose that photon sieves are general first Read, after be translated as " photon screen ".Photon screen is a kind of new diffraction optics image device, and it is with being randomly dispersed in light penetrating ring band On aperture replace formed by the light penetrating ring band of Fresnel structure, hole diameter is more than correspondence light penetrating ring bandwidth, focusing Energy plays actively impact.By optimization design, it can effectively suppress secondary and Advanced Diffraction, so as to improve the contrast of imaging And resolving power, it might even be possible to break traditions the diffraction imaging limit, realizes that super-resolution is imaged.
But, the aperture focusing energy being distributed only on light penetrating ring band plays actively impact, and other regions, such as light tight The presence in the region on annulus, light penetrating ring band between aperture etc. will weaken focus energy, negative influence be produced, so as to cause to spread out The drastically decline of efficiency or capacity usage ratio is penetrated, most energy of light source are wasted.According to foreign literature report and theory Analysis is understood, even in completely ideally, the capacity usage ratio of plain edition photon screen also only 10% or so, and this is that it is difficult to Practical fatal part.
In order to overcome this problem, domestic and foreign scholars propose multi-wavelength photon screen and mixed type photon sieve structure.Such as:1) Univ Florida USA Chung et al. devises dual wavelength and multi-wavelength photon screen, and traditional photon screen is carried out into region point Cut, one wavelength of each region correspondence weakens wavelength sensitivity of the photon screen to incident light, but due to the segmentation in region, make Capacity usage ratio natively very low photon screen further off-energy.At the same time, due to photon screen in different zones Structure it is different, bring no small difficulty to manufacturing process;2) evergreen seminar is thanked to by Chinese Academy of Sciences Microelectronics Institute, in The Hu Song seminars of photoelectric technology research institute of the academy of sciences of state, wait proposition mixed type photon screen, combine Fresnel zone plate and light The structure of son sieve, designs printing opacity aperture only on partial light permeability annulus, and not all light penetrating ring band is all distributed printing opacity aperture, passes through Optimization design, the structure improves capacity usage ratio to a certain extent, but unobvious.
Existing photon sieve structure is difficult to increase substantially capacity usage ratio, how to design a kind of new photon screen knot Structure, while high resolution is retained, also has the advantages that the high and photosensitive angular region of capacity usage ratio is wide, it has also become industry is badly in need of The key issue of solution.
The content of the invention
For above-mentioned technical problem, the present invention provides a kind of sub-wavelength photon screen compound eye structural, is retaining high resolution Meanwhile, also have the advantages that the high and photosensitive angular region of capacity usage ratio is wide, specific technical scheme is:
Sub-wavelength photon screen compound eye, including incident light source, M sub-wavelength photon screen, metal level, substrate, focal plane;Described Has metal level outside substrate one hemisphere of formation, described substrate, described focal plane is located at the hemispheroidal centre of sphere of substrate, described The distribution of M sub-wavelength photon screen on the metal layer, the incident ray of described incident light source is respectively from each sub-wavelength photon Vertical incidence is sieved, incident ray is focused on focal plane simultaneously.
Equivalent to one ommatidium of each sub-wavelength photon screen, M sub-wavelength photon screen constitutes a compound eye structural.
Angle between adjacent sub-wavelength photon screen incident ray is to be followed successively by θ1、θ2、……、θM-1, sub-wavelength photon screen The incident ray scope that compound eye receives is θ=θ12+……+θM-1.Angle between adjacent sub-wavelength photon screen incident ray can Set according to actual needs, equal angular can be taken, different angles can also be taken, but each other can not be overlapping.
Region between adjacent sub-wavelength photon screen is lighttight, therefore is ensureing that adjacent sub-wavelength photon screen is nonoverlapping Under the premise of, gap should be as small as possible between adjacent sub-wavelength photon screen.
The incident light source that all sub-wavelength photon screens are used is co-wavelength light source, can be realized by simple geometrical light-path.
Sub-wavelength photon screen is made up of a series of printing opacity apertures, and sub-wavelength photon screen is distributed on the metal layer, metal level It is plated on substrate, metal layer thickness is about tens microns, sub-wavelength photon screen is close on the sphere of substrate and metal level formation, Approximately tangent with sphere, spherical radius is the focal length of sub-wavelength photon screen.Metal layer material is light-proof material, generally chromium, Gold, aluminium, copper etc.;Backing material is light transmissive material, generally common quartz glass, lucite, vitreous silica etc..
The optimized method of structural parameters of sub-wavelength photon screen is:
(1) according to design needs, hemispheroidal spherical radius, ball where sub-wavelength photon screen compound eye size and substrate are determined Radius surface is the focal length f of sub-wavelength photon screen;
(2) according to the principle not overlapped each other between adjacent sub-wavelength photon screen, determine sub-wavelength photon screen quantity M and Entrance pupil bore D;
(3) by designed central wavelength λ, entrance pupil bore D, focal length f, sub-wavelength photon sieve structure parameter is determined, sub- ripple is calculated Long photon screen annulus number N:
The appropriate window function of selection, optimization determines the quantity of distribution printing opacity aperture and hole on each annulus of sub-wavelength photon screen Footpath size.
The sub-wavelength photon screen compound eye that the present invention is provided, is inspired, the vision of compound eye insect by compound eye insect visual system System is made up of multiple independent ommatidiums, and quantity is individual from several to tens of thousands of, and each ommatidium is independently photosensitive and is imaged, greatly Improve sensitive volume, it might even be possible to three-dimensional imaging, such as:Fly, dragonfly etc..The Asia designed similar to Compound Eye of Insects, the present invention Wavelength photons sieve compound eye, both with high resolution, and capacity usage ratio can be improved again, expand sensitive volume, to it in high-resolution The practical of field such as force microscope, lightweight astronomical telescope, weapon vision play a driving role, and are with a wide range of applications.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention;
Fig. 2 is photon screen compound eye and common photon screen performance comparision.
Embodiment
The embodiment of the present invention is described with reference to the drawings, as shown in Figure 1:Sub-wavelength photon screen compound eye, including incidence Light source 1, M sub-wavelength photon screen 2, metal level 3, substrate 4, focal plane 5;Described one hemisphere of formation of substrate 4, described lining Bottom 4 is outer to have metal level 3, and described focal plane 5 is located at the hemispheroidal centre of sphere of substrate 4, and M described sub-wavelength photon screen 2 is distributed On metal level 3, the incident ray of described incident light source 1 is respectively from each vertical incidence of sub-wavelength photon screen 2, incident ray It is focused on simultaneously on focal plane 5.
The design requirement of the embodiment is:Compound eye is semi-spherical shape, radius of a ball r=200mm, the number of sub-wavelength photon screen 2 The angle measured between M=5, the adjacent incident ray of sub-wavelength photon screen 2 takes identical numerical value, θ012345= 30 °, you can receive angular range, theta=θ of light1234=120 °.
The light transmissive material of substrate 4 is quartz glass, and the material of metal level 3 is chromium;
The parameter of sub-wavelength photon screen is:Designed central wavelength λ=635nm, focal length f=200mm, entrance pupil bore D= 50mm;
By designed central wavelength λ, entrance pupil bore D, focal length f, the structural parameters of sub-wavelength photon screen 2 are determined, sub-wavelength is calculated Photon screen annulus number N:
Connes window functions are selected to optimize the quantity and pore size of printing opacity aperture on each annulus.
In order to which focusing performance and capacity usage ratio to sub-wavelength photon screen compound eye and common photon screen carry out detailed pair Than analysis, Fig. 2 is the normalized distribution of radial direction light intensity on focal plane, and dotted line represents common photon screen, and solid line represents photon screen and answered Eye, ordinate is normalized intensity, dimensionless, and abscissa is radial distance, unit for μm.Figure it is seen that photon screen is multiple The focusing performance of eye and common photon screen has no significant difference, but the normalized intensity of photon screen compound eye is significantly greater than common photon Sieve, because photon screen compound eye has widened photosensitive angular region, is subjected to the incident light of greater angle scope, has been superimposed 5 sons The energy of eye, improves capacity usage ratio.

Claims (1)

1. sub-wavelength photon screen compound eye, it is characterised in that:Including incident light source (1), M sub-wavelength photon screen (2), metal level (3), substrate (4), focal plane (5);Described substrate (4) one hemisphere of formation, described substrate (4) has metal level (3) outside, Described focal plane (5) is located at substrate (4) hemispheroidal centre of sphere, and M described sub-wavelength photon screen (2) is distributed in metal level (3) On, the incident ray of described incident light source (1) is respectively from each sub-wavelength photon screen (2) vertical incidence, and incident ray is simultaneously Be focused on focal plane (5), adjacent sub-wavelength photon screen incident ray each other can not be overlapping, adjacent sub-wavelength photon screen it Between region be lighttight;
The optimized method of structural parameters of sub-wavelength photon screen is:
(1) according to design needs, hemispheroidal spherical radius where sub-wavelength photon screen compound eye size and substrate, sphere half are determined Footpath is the focal length f of sub-wavelength photon screen;
(2) according to the principle not overlapped each other between adjacent sub-wavelength photon screen, the quantity M and entrance pupil of sub-wavelength photon screen are determined Bore D;
(3) by designed central wavelength λ, entrance pupil bore D, focal length f, sub-wavelength photon sieve structure parameter is determined, sub-wavelength light is calculated Son sieve annulus number N:
<mrow> <mi>N</mi> <mo>&amp;ap;</mo> <mfrac> <msup> <mi>D</mi> <mn>2</mn> </msup> <mrow> <mn>4</mn> <mi>&amp;lambda;</mi> <mi>f</mi> </mrow> </mfrac> </mrow>
The appropriate window function of selection, optimization determines that the quantity of distribution printing opacity aperture and aperture are big on each annulus of sub-wavelength photon screen It is small.
CN201510103547.9A 2015-03-10 2015-03-10 Sub-wavelength photon screen compound eye Active CN104656174B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510103547.9A CN104656174B (en) 2015-03-10 2015-03-10 Sub-wavelength photon screen compound eye

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510103547.9A CN104656174B (en) 2015-03-10 2015-03-10 Sub-wavelength photon screen compound eye

Publications (2)

Publication Number Publication Date
CN104656174A CN104656174A (en) 2015-05-27
CN104656174B true CN104656174B (en) 2017-08-29

Family

ID=53247521

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510103547.9A Active CN104656174B (en) 2015-03-10 2015-03-10 Sub-wavelength photon screen compound eye

Country Status (1)

Country Link
CN (1) CN104656174B (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6720936B1 (en) * 2002-05-09 2004-04-13 Bbnt Solutions Llc Adaptive antenna system
US6954310B2 (en) * 2003-09-25 2005-10-11 University Of Florida Research Foundation, Inc. High resolution multi-lens imaging device
US7986113B2 (en) * 2006-05-05 2011-07-26 Virgin Islands Microsystems, Inc. Selectable frequency light emitter
US10042091B2 (en) * 2012-09-29 2018-08-07 Purdue Research Foundation Holey optical device
CN104034517B (en) * 2014-07-04 2016-07-06 西华大学 A kind of sub-wavelength photon screen focusing performance detection method
CN104199135B (en) * 2014-09-18 2016-09-21 中国科学院光电技术研究所 Long-focus deep sector partition photon sieve for laser direct writing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"光子筛及其优化设计";胡百泉 等;《激光与光电子学进展》;20101231(第1期);第012302-1至012302-6页 *

Also Published As

Publication number Publication date
CN104656174A (en) 2015-05-27

Similar Documents

Publication Publication Date Title
US3704055A (en) Projection screen
US6660988B2 (en) Detector selective FPA architecture for ultra-high FPA operability and fabrication method
WO2015040822A1 (en) Display device and manufacturing method therefor
JPH05134109A (en) Manufacture of color filter
US8736812B2 (en) Projection-type photolithography system using composite photon sieve
US7851251B2 (en) Portable optical detection chip and manufacturing method thereof
CN110260186B (en) Large-area clear and uniform inclined projection lighting device
CN105093486A (en) Panoramic imaging lens with dual-light-path system
CN110087065A (en) Semiconductor device and its manufacturing method
CN100463194C (en) Image sensor and manufacturing method of image sensor
CN109521551A (en) The vehicle-mounted optical system of object lens of large relative aperture zero temp shift and imaging method
CN104656174B (en) Sub-wavelength photon screen compound eye
CN102998002B (en) Infrared focal plane array and manufacturing method thereof
TW201017322A (en) Projection screen
JPS58220106A (en) Solid-state image pickup device
CN103293677B (en) Light homogenizer and manufacturing method thereof
CN104849787B (en) Multi-wavelength photon screen compound eye
JPH07176708A (en) Solid-state image pickup device
CN113267837A (en) Micro-lens array with dual optical path isolation and preparation method thereof
CN104034282A (en) High-precision surface acquiring method in in-situ liquid shaping manufacturing of an optical micro lens
CN110164892A (en) Imaging sensor and forming method thereof
CN104199136A (en) Long-focal-depth photon sieve
JPH03190169A (en) Solid-state image sensing device and manufacture thereof
CN107845584A (en) For detecting the devices, systems, and methods of substrate surface defects
CN204007539U (en) High-precision surface shape acquisition device in the manufacture of in-situ liquid shaping optical microlens

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant