CN104655735A - Supersonic wave scanning tool - Google Patents
Supersonic wave scanning tool Download PDFInfo
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- CN104655735A CN104655735A CN201310593123.6A CN201310593123A CN104655735A CN 104655735 A CN104655735 A CN 104655735A CN 201310593123 A CN201310593123 A CN 201310593123A CN 104655735 A CN104655735 A CN 104655735A
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- frock
- ultrasonic scanning
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- scanning
- rhone
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention discloses a supersonic wave scanning tool. The supersonic wave scanning tool comprises a base, a hole for receiving a scanning object is arranged on the base, and a drainage channel is formed around the hole. Through use of the drainage channel, medium water produced in a scanning process can be effectively dredged so that large-area accumulation of the medium water on the tool surface and a position around a scanning object is prevented, tool draining performances are improved, and the influence produced by the medium water on the scanning object is reduced. The supersonic wave scanning tool is especially suitable for supersonic wave scanning of an IGBT module.
Description
Technical field
The present invention relates to frock field, particularly relate to the frock for ultrasonic scanning.
Background technology
Ultrasonic scanning microscope is a kind of nondestructive detecting instrument, and it detects material under can be implemented in the prerequisite not destroying material electric property and holding structure integrality.Can check: 1, crystalline network, impurity particle, snotter, the sediment of material internal; 2, underbead crack; 3, lamination defect; 4, cavity, bubble etc.
Because ultrasonic scanning microscope has these good characteristics above-mentioned, so in recent years, ultrasonic scanning microscope has been successfully applied in electronics industry, especially among semiconductor packaging industry.Insulated gate bipolar transistor (Insulated Gate Bipolar Transistor is called for short IGBT) module is as the core devices of power electronic system, and its performance parameter directly decides the Performance And Reliability of power electronic system.And the DBC substrate of IGBT module and the welding quality of base plate have important impact to the heat dispersion of IGBT module and reliability, therefore, in IGBT module encapsulation process, in order to make the welding voidage of product remain in a more stable scope, the monitoring of ultrasonic scanning microscope to IGBT module welding quality is used to seem most important.
Ultrasonic scanning microscope has two kinds of mode of operations: based on Ultrasonic Pulse-Echo mode of operation and transmissive mode of operation.Reflective-mode is main mode of operation, and its feature is that resolution is high, to the not restriction of testing sample thickness; Transmission mode is only used as device screening in Semiconductor enterprises.
Existing use ultrasonic scanning microscope is based in reflective mode operation, ultrasound wave via transmitter, pulse producer by camera lens WATER AS FLOW MEDIUM auxiliary under scan at IGBT module backplate surface, finally obtained the scan image in the layer cavity between subelement and base plate by sensor, signal amplifier.In this scanning process, IGBT module is in base plate internal components state placement down upward, its tool structure used (be below a working procedure survey 4 IGBT module be example), as shown in Figure 1, Figure 2 and Figure 3, comprise pedestal 3 ', pedestal 3 ' is above provided with the hole 1 ' for accommodating IGBT module.When using this frock to carry out ultrasonic scanning, easy accumulation medium water near frock surface and IGBT module bottom edge, particularly arrange in the space in length and breadth that formed by IGBT module base plate, although use vacuum suction to stop WATER AS FLOW MEDIUM to contact with IGBT module core component with frock by the mode that O-ring seal 2 ' is combined closely IGBT module base plate, but through long scanning work, the WATER AS FLOW MEDIUM that part is piled up also can be inhaled in vacuum cavity from IGBT module bottom edge, contact with IGBT module chip, finally cause secondary pollution, affect the performance of IGBT module.
Therefore, need to design a kind of frock for IGBT module ultrasonic scanning newly, effectively can prevent the accumulation of scanning process medium water.
Summary of the invention
The problem that the present invention solves is the frock proposing a kind of new ultrasonic scanning, effectively can prevent the accumulation of scanning process medium water.
For solving the problem, present invention is disclosed a kind of ultrasonic scanning frock, comprising pedestal, described pedestal being provided with the hole for accommodating sweep object, around described hole, being surrounded with rhone.
Preferably, described rhone has the gradient, and the domatic of the described gradient declines with the edge of the center of described frock to described frock.
Preferably, described rhone comprises longitudinal drainage groove and transverse row tank, and described longitudinal drainage groove and cross drainage grooved ring are around in described hole.
Preferably, the gradient of described longitudinal drainage groove is greater than the gradient of described transverse row tank.
Preferably, the tail end of described rhone is provided with manger board.
Preferably, described hole protrudes from described pedestal.
Preferably, the edge of described hole is provided with O-ring seal.
Compared with prior art, the present invention has the following advantages: disclosed ultrasonic scanning frock, comprises pedestal, described pedestal being provided with the hole for accommodating sweep object, being surrounded with rhone around described hole.Disclosed ultrasonic scanning frock, by being provided with rhone, the WATER AS FLOW MEDIUM produced in scanning process can be carried out water conservancy diversion effectively, prevent WATER AS FLOW MEDIUM on frock surface and formed bulk deposition by near sweep object, improve the drainage performance of frock, thus reduce the impact that WATER AS FLOW MEDIUM produces sweep object, be specially adapted to the ultrasonic scanning of IGBT module.
Accompanying drawing explanation
Fig. 1 is the front view of existing ultrasonic scanning frock;
Fig. 2 is the right view of existing ultrasonic scanning frock;
Fig. 3 is the rear view of existing ultrasonic scanning frock;
Fig. 4 is the front view of disclosed ultrasonic scanning frock;
Fig. 5 is the right view of disclosed ultrasonic scanning frock;
Fig. 6 is the rear view of disclosed ultrasonic scanning frock.
Embodiment
As shown in Figure 1, Figure 2 and Figure 3, existing ultrasonic scanning frock comprises pedestal 3 ', and pedestal 3 ' is above provided with the hole 1 ' for accommodating IGBT module.When using this frock to carry out ultrasonic scanning, easy accumulation medium water near frock surface and IGBT module bottom edge, particularly arrange in the space in length and breadth that formed by IGBT module base plate, although use vacuum suction to stop WATER AS FLOW MEDIUM to contact with IGBT module core component with frock by the mode that O-ring seal 2 ' is combined closely IGBT module base plate, but through long scanning work, the WATER AS FLOW MEDIUM that part is piled up also can be inhaled in vacuum cavity from IGBT module bottom edge, contact with IGBT module chip, finally cause secondary pollution, affect the performance of IGBT module.
In view of the above-mentioned problems in the prior art, present invention is disclosed a kind of ultrasonic scanning frock, comprise pedestal, described pedestal being provided with the hole for accommodating sweep object, around described hole, being surrounded with rhone.
Preferably, described rhone has the gradient, and the domatic of the described gradient declines with the edge of the center of described frock to described frock.
Preferably, described rhone comprises longitudinal drainage groove and transverse row tank, and described longitudinal drainage groove and cross drainage grooved ring are around in described hole.
Preferably, the gradient of described longitudinal drainage groove is greater than the gradient of described transverse row tank.
Preferably, the tail end of described rhone is provided with manger board.
Preferably, described hole protrudes from described pedestal.
Preferably, the edge of described hole is provided with O-ring seal.
Below in conjunction with accompanying drawing, the technical scheme in the embodiment of the present invention is described in detail.In a preferred embodiment of the invention, sweep object is for IGBT module, and a working procedure surveys 4 modules.
As shown in Figures 4 to 6, disclosed ultrasonic scanning frock, comprises pedestal 3, pedestal 3 being provided with the hole 1 for accommodating sweep object, being surrounded with rhone 5 around hole 1.During use, by IGBT module base plate upward, internal components is contained in hole 1 down, then carries out ultrasonic scanning to IGBT module.By arranging rhone 5, can prevent the WATER AS FLOW MEDIUM in scanning process near frock surface and IGBT module, forming bulk deposition, thus the WATER AS FLOW MEDIUM preventing part from piling up is inhaled in vacuum cavity from IGBT module bottom edge in long scanning work process, avoid WATER AS FLOW MEDIUM to contact with IGBT module chip and the secondary pollution caused, thus avoid the performance affecting IGBT module.
In a preferred embodiment of the invention, rhone 5 has the gradient, and the domatic of the gradient declines with the edge of the center of frock to frock, and namely, high rim is low.Setting like this, bootable WATER AS FLOW MEDIUM flows to the edge of frock under gravity.
Further, rhone 5 comprises longitudinal drainage groove 51 and transverse row tank 52, and longitudinal drainage groove 51 and transverse row tank 52 are surrounded on hole 1.
Further, the gradient of longitudinal drainage groove 51 is greater than the gradient of transverse row tank 52.Because in scanning process, probe often completes the scanning of a module, and the action frequency of transversal scanning will far more than the action frequency of longitudinal direction, so WATER AS FLOW MEDIUM mainly can be piled up in longitudinal space.In a preferred embodiment of the invention, the slope design of longitudinal drainage groove 51 must be greater than the gradient of transverse row tank 52, make the gradient of longitudinal drainage groove 51 comparatively large, more can fast, intensively WATER AS FLOW MEDIUM be drained; And the less transverse row tank 52 of the gradient can play being used as of drainage.
In addition, the tail end of rhone 5 is provided with manger board 6.Manger board 6 can make current break-in, thus effectively to prevent in the process of draining because current are excessive the pollution that in equipment, other devices bring.In order to increase the water conservancy diversion effect of rhone 5, hole 1 protrudes from pedestal 3, makes whole frock form an island shape.
For making hole 1 have good sealing property, the edge of hole 1 is provided with O-ring seal 2.
Disclosed ultrasonic scanning frock, comprises pedestal 3, pedestal 3 being provided with the hole 1 for accommodating sweep object, being surrounded with rhone 5 around hole 1.Disclosed ultrasonic scanning frock, by being provided with rhone 5, the WATER AS FLOW MEDIUM produced in scanning process can be carried out water conservancy diversion effectively, prevent WATER AS FLOW MEDIUM on frock surface and formed bulk deposition by near sweep object, improve the drainage performance of frock, thus reduce the impact that WATER AS FLOW MEDIUM produces sweep object, be specially adapted to the ultrasonic scanning of IGBT module.
Disclosed ultrasonic scanning frock, structure is simple, cheap for manufacturing cost.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (7)
1. a ultrasonic scanning frock, comprises pedestal, described pedestal being provided with the hole for accommodating sweep object, it is characterized in that: be surrounded with rhone around described hole.
2. ultrasonic scanning frock according to claim 1, is characterized in that: described rhone has the gradient, and the domatic of the described gradient declines with the edge of the center of described frock to described frock.
3. ultrasonic scanning frock according to claim 2, is characterized in that: described rhone comprises longitudinal drainage groove and transverse row tank, and described longitudinal drainage groove and cross drainage grooved ring are around in described hole.
4. ultrasonic scanning frock according to claim 3, is characterized in that: the gradient of described longitudinal drainage groove is greater than the gradient of described transverse row tank.
5. ultrasonic scanning frock according to claim 2, is characterized in that: the tail end of described rhone is provided with manger board.
6. ultrasonic scanning frock according to claim 1, is characterized in that: described hole protrudes from described pedestal.
7. ultrasonic scanning frock according to claim 1, is characterized in that: the edge of described hole is provided with O-ring seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310593123.6A CN104655735A (en) | 2013-11-20 | 2013-11-20 | Supersonic wave scanning tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310593123.6A CN104655735A (en) | 2013-11-20 | 2013-11-20 | Supersonic wave scanning tool |
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| Publication Number | Publication Date |
|---|---|
| CN104655735A true CN104655735A (en) | 2015-05-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310593123.6A Pending CN104655735A (en) | 2013-11-20 | 2013-11-20 | Supersonic wave scanning tool |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760879A (en) * | 2018-03-30 | 2018-11-06 | 中国航空综合技术研究所 | A kind of quick position detecting system of scanning acoustic microscope hydrodynamic force absorption |
| CN109406626A (en) * | 2018-09-10 | 2019-03-01 | 中国电子科技集团公司第五十五研究所 | Ultrasonic scanning detection device and the method that sample to be tested is fixed using it |
| CN112946068A (en) * | 2019-11-26 | 2021-06-11 | 芯恩（青岛）集成电路有限公司 | Tool for ultrasonic scanning of IGBT module and detection method |
| CN113379165A (en) * | 2021-07-19 | 2021-09-10 | 株洲中车时代电气股份有限公司 | Service life prediction method and system based on IGBT module welding spot degradation state |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6357136B1 (en) * | 2000-10-12 | 2002-03-19 | Sonoscan, Inc. | Scanning acoustic microscope system and method for handling small parts |
| US6460414B1 (en) * | 2000-11-17 | 2002-10-08 | Sonoscan, Inc. | Automated acoustic micro imaging system and method |
| US20120125109A1 (en) * | 2010-11-23 | 2012-05-24 | Kessler Lawrence W | Scanning acoustic microscope with an inverted transducer and bubbler functionality |
| CN102854254A (en) * | 2012-10-11 | 2013-01-02 | 西安永电电气有限责任公司 | Insulated gate bipolar translator (IGBT) ultrasonic detection tool |
-
2013
- 2013-11-20 CN CN201310593123.6A patent/CN104655735A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6357136B1 (en) * | 2000-10-12 | 2002-03-19 | Sonoscan, Inc. | Scanning acoustic microscope system and method for handling small parts |
| US6460414B1 (en) * | 2000-11-17 | 2002-10-08 | Sonoscan, Inc. | Automated acoustic micro imaging system and method |
| US20120125109A1 (en) * | 2010-11-23 | 2012-05-24 | Kessler Lawrence W | Scanning acoustic microscope with an inverted transducer and bubbler functionality |
| CN102854254A (en) * | 2012-10-11 | 2013-01-02 | 西安永电电气有限责任公司 | Insulated gate bipolar translator (IGBT) ultrasonic detection tool |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760879A (en) * | 2018-03-30 | 2018-11-06 | 中国航空综合技术研究所 | A kind of quick position detecting system of scanning acoustic microscope hydrodynamic force absorption |
| CN109406626A (en) * | 2018-09-10 | 2019-03-01 | 中国电子科技集团公司第五十五研究所 | Ultrasonic scanning detection device and the method that sample to be tested is fixed using it |
| CN112946068A (en) * | 2019-11-26 | 2021-06-11 | 芯恩（青岛）集成电路有限公司 | Tool for ultrasonic scanning of IGBT module and detection method |
| CN113379165A (en) * | 2021-07-19 | 2021-09-10 | 株洲中车时代电气股份有限公司 | Service life prediction method and system based on IGBT module welding spot degradation state |
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Application publication date: 20150527 |