CN104645914B - A kind of self-purifying system for confined reaction room - Google Patents
A kind of self-purifying system for confined reaction room Download PDFInfo
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- CN104645914B CN104645914B CN201510018754.4A CN201510018754A CN104645914B CN 104645914 B CN104645914 B CN 104645914B CN 201510018754 A CN201510018754 A CN 201510018754A CN 104645914 B CN104645914 B CN 104645914B
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- air
- upper cavity
- lower chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2267/00—Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
- B01D2267/60—Vertical arrangement
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- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
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Abstract
The present invention discloses a kind of self-purifying system for confined reaction room, and confined reaction room includes opening up upper cavity and lower chamber in a main box, main box, and upper cavity is separated with lower chamber by a dividing plate, and an air vent is opened up on dividing plate；Air outlet and suction opeing are opened up on the outside of main box；Self-purifying system includes control cabinet, Rose Box, blower fan, air-supply flange, exhausting flange and electric control air valve；Assembling is docked in dividing plate lower edge and with air vent, and Rose Box is respectively mounted with lower chamber bottom at the top of the upper cavity of main box；Flange of blowing is arranged on the air outlet of main box, and an electric control air valve built in exhausting flange, exhausting flange is arranged on the suction opeing of main box；Control cabinet is arranged on outside main box；Blower fan and electric control air valve are electrically connected with frequency-variable controller；The present invention is applied to the confined reaction room of silicon carbide epitaxial growth, and the fine particle that can fast and effectively clear up in reactor chamber improves production efficiency.
Description
Technical field
The present invention relates to confined reaction equipment technical field, more particularly to a kind of auto purification system for confined reaction room
System.
Background technology
Due to the special chemical and physical features of carborundum, its epitaxy technique require reative cell must be in it is a kind of it is closed,
In anaerobic, the particular surroundings of nitrogen-free, during silicon carbide epitaxial growth, it can constantly produce and tiny particle occur, these are thin
Little particle is deposited on reactor chamber bottom, will be close if can not timely and effectively disposing for these tiny particles
Constantly gathered in the cavity closed, the silicon carbide wafer epitaxial growth in a large amount of great cycles by under the influence of of fine particle causes
The increase of silicon carbide wafer defect.
Although current silicon carbide epitaxial growth reative cell has certain self-purification capacity, and it purifies institute
The time of cost is excessively very long, low to the cleaning efficiency of fine particle, far can not meet the demand of silicon carbide epitaxy technique, directly
Connect and had influence on production efficiency.
Therefore the present inventor's especial manufacture go out it is a kind of can speed effectively in cleaning confined reaction room fine particle self-cleaning
Thus change system, this case produces.
The content of the invention
It is an object of the invention to provide a kind of self-purifying system for confined reaction room, it is applied to silicon carbide epitaxy
The confined reaction room of growth, the fine particle that can fast and effectively clear up in reactor chamber improves production efficiency.
To achieve these goals, technical scheme is as follows：
A kind of self-purifying system for confined reaction room, confined reaction room includes opening up in a main box, main box
Upper cavity and lower chamber, upper cavity are separated with lower chamber by a dividing plate, and an air vent is opened up on dividing plate；Opened up on the outside of main box
Air outlet and suction opeing；Self-purifying system includes control cabinet, Rose Box, blower fan, air-supply flange, exhausting flange and electric control air valve；
Assembling is docked in dividing plate lower edge and with air vent, and Rose Box is respectively mounted with lower chamber bottom at the top of the upper cavity of main box；
Flange of blowing is arranged on the air outlet of main box, and an electric control air valve built in exhausting flange, exhausting flange is arranged on taking out for main box
Air port, air-supply flange is corresponding with the Rose Box at the top of upper cavity, and exhausting flange is corresponding with the Rose Box of lower chamber bottom, exhausting method
It is blue to be connected with air-supply flange by a pipeline；It is provided with and frequency-variable controller outside a frequency-variable controller built in control cabinet, control cabinet
Electrical connection power supply indicator, blower fan work indicator lamp and valve working indicator lamp, control cabinet be arranged on main box outside；Wind
Machine and electric control air valve are electrically connected with frequency-variable controller.
It is additionally provided with outside the control cabinet and is electrically connected with the controller gear operating switch.
High efficiency filter case is installed, medium air filtration case is installed in lower chamber bottom at the top of the upper cavity.
The main box side also opens up maintenance door and lower maintenance door, and upper maintenance door is corresponding with upper cavity, lower maintenance door
It is corresponding with lower chamber.
After such scheme, the present invention in confined reaction room by setting blower fan, setting and blow outside upper cavity
Mouthful and suction opeing is set outside lower chamber, start blower fan and open after electric control air valve, the gas in confined reaction room is by upper cavity
Lower chamber is flow to, then the Rose Box of bottom is entered by lower chamber, while intracavity gas flowing drive accumulates in upper cavity bottom
Enter Rose Box with the fine particle of lower chamber bottom, the gas after filtering is entering reative cell from air-supply flange, into epicoele
The gas of body will pass through top filtration case, so as to further filter out fine particle, realize the cleaning of confined reaction room, above-mentioned mistake
Cheng Fengji and electric control air valve ON/OFF carry out Automated condtrol by control cabinet；The self-purifying system of the present invention can be to closed anti-
Fine particle that should be indoor carries out quick effectively cleaning, and simple to operate, liquidation procedures is efficiently, with low cost.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the dimensional structure diagram of the present invention；
Fig. 2 is front view of the present invention；
Fig. 3 is side view of the present invention；
Fig. 4 is side view of the present invention.
Label declaration
Main box 1, upper cavity 11, lower chamber 12, dividing plate 13, air outlet 14, suction opeing 15, control cabinet 2, power supply indicator
21, blower fan work indicator lamp 22, valve working indicator lamp 23, gear operating switch 24, flange 3 of blowing, exhausting flange 4 is automatically controlled
Air-valve 5, upper maintenance door 61, lower maintenance door 62, high efficiency filter case 71, medium air filtration case 72, blower fan 8.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
As shown in Figures 1 to 4, a kind of self-purifying system for confined reaction room that the present invention is disclosed, confined reaction room
Including a main box 1, upper cavity 11 and lower chamber 12 are opened up in main box 1, upper cavity 11 passes through a dividing plate with lower chamber 12
13 are separated, and an air vent is opened up on dividing plate 13；Air outlet 13 and suction opeing 14 are opened up on the outside of main box；Self-purifying system includes control
Case 2 processed, Rose Box, blower fan 8, air-supply flange 3, exhausting flange 4 and electric control air valve 5；Blower fan 8 is arranged on the lower edge of dividing plate 13 and with leading to
Air holes is docked, and the top of upper cavity 11 of main box 1 is respectively mounted the Rose Box of Rose Box, wherein upper cavity 11 with the bottom of lower chamber 12
For high efficiency filter case 71, the Rose Box of lower chamber 12 is medium air filtration case 72；Flange 3 of blowing is arranged on the air outlet of main box 1,
An electric control air valve 5 built in exhausting flange 4, exhausting flange 4 is arranged on the suction opeing of main box 1, and air-supply flange 3 is pushed up with upper cavity 11
The Rose Box correspondence in portion, exhausting flange 4 is corresponding with the Rose Box of the bottom of lower chamber 12, and exhausting flange 4 passes through one with air-supply flange 3
Pipeline (not provided in figure) is connected；A frequency-variable controller (not provided in figure) built in control cabinet 2, the outside of control cabinet 2 is provided with and change
Power supply indicator 21, blower fan work indicator lamp 22 and the valve working indicator lamp 23 of the electrical connection of frequency controller, control cabinet 2 are installed
Outside main box 1；Blower fan 8 and electric control air valve 5 are electrically connected with frequency-variable controller.
It is additionally provided with outside control cabinet 2 and is electrically connected with the controller gear operating switch, rely on this to switch, the present invention can be according to need
Switch different gears.
The side of main box 1 also opens up maintenance door 61 and lower maintenance door 62, upper maintenance door 61 corresponding with upper cavity 11, lower inspection
Repair that door 62 is corresponding with lower chamber 12, open up maintenance door and be easy to check the accumulated amount of fine particle and cleaning situation in cavity, according to
Situation in the cavity of acquisition, implements corresponding instruction to self-cleaning system.
The present invention is operationally：
After the gear operating switch 24 for opening control cabinet 2, when gear is high gear, blower fan 8 is started working and told
Operating, electric control air valve 5 is opened, and power supply indicator 21, blower fan work indicator lamp 22 and valve working indicator lamp 24 are lighted, epicoele
The gas of body 11 drives the fine particle of the bottom of upper cavity 11 to enter lower chamber 12, then the gas together with lower chamber 12 and its top
The fine particle in portion is come out after medium air filtration case 72 by exhausting flange 4, and other after first pass filtering are passed through again by pipeline
Flange 3 of blowing enters upper cavity 11, and gas passes through the filtering of high efficiency filter case 71 during upper cavity 11 is entered, and this shelves is
Wind speed is most fast, and filtration time is most short；When gear is adjusted to low gear, blower fan low-speed running, gas circulation filter process is ibid
High gear is stated, but speed is slower.
High gear is used when gathering a large amount of fine particles in confined reaction room, realizes fast purification, low gear is then
Used when can be reacted in reative cell, do not interfere with physical-chemical reaction (the extension life of such as carborundum in reative cell
Long reaction).
The present invention is used for the self-purifying system of confined reaction room, realizes miscellaneous in the cleaning confined reaction room of high efficiency smart
Matter, meets reative cell each working condition, can be timely and effectively clear during confined reaction room applied to silicon carbide epitaxial growth
Reason falls the fine particle produced in the epitaxy technique production process in airtight cavity, it is to avoid the silicon carbide epitaxy subsequently carried out is given birth to
The influence of long chip quality, also improves production efficiency.
Above-described embodiment and schema and non-limiting product form of the invention and style, any art it is common
Appropriate change or modification that technical staff is done to it, all should be regarded as not departing from the patent category of the present invention.
Claims (3)
1. a kind of self-purifying system for confined reaction room, it is characterised in that：Confined reaction room includes a main box, main tank
Upper cavity and lower chamber are opened up in vivo, upper cavity is separated with lower chamber by a dividing plate, and an air vent is opened up on dividing plate；Main box
Outside opens up air outlet and suction opeing；Self-purifying system includes control cabinet, Rose Box, blower fan, air-supply flange, exhausting flange and electricity
Control air-valve；Assembling is docked in dividing plate lower edge and with air vent, is respectively mounted at the top of the upper cavity of main box with lower chamber bottom
Rose Box；Flange of blowing is arranged on the air outlet of main box, and an electric control air valve built in exhausting flange, exhausting flange is arranged on main tank
The suction opeing of body, air-supply flange is corresponding with the Rose Box at the top of upper cavity, and exhausting flange is corresponding with the Rose Box of lower chamber bottom,
Exhausting flange is connected with air-supply flange by a pipeline；It is provided with and frequency conversion outside a frequency-variable controller built in control cabinet, control cabinet
Power supply indicator, blower fan work indicator lamp and the valve working indicator lamp of the electrical connection of controller, control cabinet are arranged on main box
It is additionally provided with outside outside, control cabinet and is electrically connected with the controller gear operating switch, the gear operating switch includes high gear
And low gear；Blower fan and electric control air valve are electrically connected with frequency-variable controller.
2. a kind of self-purifying system for confined reaction room as claimed in claim 1, it is characterised in that：The upper cavity top
High efficiency filter case is installed in portion, and medium air filtration case is installed in lower chamber bottom.
3. a kind of self-purifying system for confined reaction room as claimed in claim 1, it is characterised in that：The main box one
Side also opens up maintenance door and lower maintenance door, and upper maintenance door is corresponding with upper cavity, and lower maintenance door is corresponding with lower chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510018754.4A CN104645914B (en) | 2015-01-14 | 2015-01-14 | A kind of self-purifying system for confined reaction room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510018754.4A CN104645914B (en) | 2015-01-14 | 2015-01-14 | A kind of self-purifying system for confined reaction room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104645914A CN104645914A (en) | 2015-05-27 |
| CN104645914B true CN104645914B (en) | 2017-10-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510018754.4A Active CN104645914B (en) | 2015-01-14 | 2015-01-14 | A kind of self-purifying system for confined reaction room |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105268255A (en) * | 2015-11-30 | 2016-01-27 | 济南金强激光数控设备有限公司 | Smoke filter |
| CN105536363A (en) * | 2015-12-29 | 2016-05-04 | 广东尚高科技有限公司 | Filter-element type polishing dust suction system |
| CN108236814B (en) * | 2017-11-07 | 2020-03-24 | 苏州市凯利勋实验室设备有限公司 | Active carbon formula harmful gas rose box |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102203222B (en) * | 2009-12-25 | 2013-03-20 | 航天长征化学工程股份有限公司 | Highly efficient and clean gasification apparatus for carbonaceous dry powder and method thereof |
| CN203370406U (en) * | 2013-07-24 | 2014-01-01 | 中国化学工程第十四建设有限公司 | Air filter with multiple filter layers |
| CN204485825U (en) * | 2015-01-14 | 2015-07-22 | 瀚天天成电子科技（厦门）有限公司 | A kind of self-purifying system for confined reaction room |
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| CN104645914A (en) | 2015-05-27 |
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Address after: 361000 first floor, building B, Jianye Building, No. 96, Xiangxing Road, Xiamen Torch High tech Zone (Xiang'an) Industrial Zone, Xiamen, Fujian Patentee after: EPIWORLD INTERNATIONAL CO.,LTD. Address before: 361000 room 425, entrepreneurship building, entrepreneurship Park, Xiamen Torch High tech Zone, Huli District, Xiamen City, Fujian Province Patentee before: EPIWORLD INTERNATIONAL CO.,LTD. |
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Address after: 361000 first floor, building B, Jianye Building, No. 96, Xiangxing Road, Xiamen Torch High tech Zone (Xiang'an) Industrial Zone, Xiamen, Fujian Patentee after: Hantiantiancheng Electronic Technology (Xiamen) Co.,Ltd. Address before: 361000 first floor, building B, Jianye Building, No. 96, Xiangxing Road, Xiamen Torch High tech Zone (Xiang'an) Industrial Zone, Xiamen, Fujian Patentee before: EPIWORLD INTERNATIONAL CO.,LTD. |