CN104645914A - Self-purification system for sealed reaction chamber - Google Patents

Self-purification system for sealed reaction chamber Download PDF

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Publication number
CN104645914A
CN104645914A CN201510018754.4A CN201510018754A CN104645914A CN 104645914 A CN104645914 A CN 104645914A CN 201510018754 A CN201510018754 A CN 201510018754A CN 104645914 A CN104645914 A CN 104645914A
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CN
China
Prior art keywords
main box
air
cavity
flange
self
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Granted
Application number
CN201510018754.4A
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Chinese (zh)
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CN104645914B (en
Inventor
吕立平
冯淦
赵建辉
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Ever Become Electronic Technology (xiamen) Co Ltd
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Ever Become Electronic Technology (xiamen) Co Ltd
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Priority to CN201510018754.4A priority Critical patent/CN104645914B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters, i.e. particle separators or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0019Filters, i.e. particle separators or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
    • B01D46/0023Filters, i.e. particle separators or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2267/00Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
    • B01D2267/60Vertical arrangement

Abstract

The invention discloses a self-purification system for a sealed reaction chamber. The sealed reaction chamber comprises a main box body, wherein an upper cavity and a lower cavity are formed in the main box body, and are partitioned through a partition plate; an air hole is formed in the partition plate; an air supply outlet and a suction opening are formed in the outer side of the main box body; the self-purification system comprises a control box, filter tanks, a fan, an air supply flange, a suction flange and an electrically controlled air valve; the fan is arranged on the lower edge of the partition plate and is in butted connection with the air hole; the filter tanks are arranged at the top of the upper cavity and the bottom of the lower cavity of the main box body; the air supply flange is arranged on the air supply outlet of the main box body; the electrically controlled air valve is arranged in the suction flange; the suction flange is arranged at the suction opening of the main box body; the control box is arranged outside the main box body; the fan and the electrically controlled fan both are electrically connected with a variable-frequency controller. The self-purification system is applied to the sealed reaction chamber for silicon carbide epitaxial growth; fine particles in the cavities of the reaction chamber can be rapidly and effectively cleaned; and the production efficiency is improved.

Description

A kind of self-purifying system for confined reaction room
Technical field
The present invention relates to confined reaction equipment technical field, particularly a kind of self-purifying system for confined reaction room.
Background technology
The chemistry special due to carborundum and physical property, its epitaxy technique requires that reative cell must be in a kind of airtight, anaerobic, without in the particular surroundings of nitrogen, in silicon carbide epitaxial growth process, constantly can produce and occur tiny particle, these fine particles are deposited on bottom reactor chamber, if can not disposing timely and effectively of these tiny particles, constantly will gather in airtight cavity, having in a large number of fine particle will affect the silicon carbide wafer epitaxial growth in next cycle, cause the increase of silicon carbide wafer defect.
Although current silicon carbide epitaxial growth reative cell has and has certain self-purification capacity, but and the time that its purification spends is too very long, low to the cleaning efficiency of fine particle, the demand of silicon carbide epitaxy technique can not be met far away, directly had influence on production efficiency.
Therefore the present inventor's especial manufacture goes out a kind ofly speed can effectively clear up the self-purifying system of the indoor fine particle of confined reaction, and this case produces thus.
Summary of the invention
The object of the present invention is to provide a kind of self-purifying system for confined reaction room, it is applied to the confined reaction room of silicon carbide epitaxial growth, can clear up the fine particle in reactor chamber fast and effectively, enhance productivity.
To achieve these goals, technical scheme of the present invention is as follows:
For a self-purifying system for confined reaction room, confined reaction room comprises a main box, offers upper cavity and lower chamber in main box, and upper cavity and lower chamber are separated by a dividing plate, dividing plate are offered an air vent; Air outlet and suction opeing is offered outside main box; Self-purifying system comprises control cabinet, Rose Box, blower fan, air-supply flange, exhausting flange and electric control air valve; Assembling under dividing plate along and dock with air vent, all Rose Box is installed bottom the upper cavity top of main box and lower chamber; Air-supply flange is arranged on the air outlet of main box, the built-in electric control air valve of exhausting flange, exhausting flange is arranged on the suction opeing of main box, air-supply flange is corresponding with the Rose Box at upper cavity top, exhausting flange is corresponding with the Rose Box bottom lower chamber, and exhausting flange is connected by a pipeline with air-supply flange; The built-in frequency-variable controller of control cabinet, control cabinet outside is provided with and the power supply indicator of the electrical connection of frequency-variable controller, blower fan relay indicating light and valve working indicator lamp, and control cabinet is arranged on main box outside; Blower fan and electric control air valve are all electrically connected with frequency-variable controller.
Described control cabinet outside is also provided with and is electrically connected gear operating switch with controller.
High efficiency filter case is installed at described upper cavity top, installs medium air filtration case bottom lower chamber.
Access door and lower access door are also offered in described main box side, and upper access door is corresponding with upper cavity, and lower access door is corresponding with lower chamber.
After adopting such scheme, the present invention is by arranging blower fan in confined reaction indoor, at upper cavity outer setting air outlet and at lower chamber outer setting suction opeing, after electric control air valve opened by startup blower fan, the gas of confined reaction indoor flow to lower chamber by upper cavity, the Rose Box of bottom is entered again by lower chamber, simultaneously intracavity gas flowing drives and accumulates in bottom upper cavity and fine particle bottom lower chamber enters Rose Box, gas after filtration is entering reative cell from air-supply flange, the gas entering upper cavity will through top filtration case, thus filter out fine particle further, realize the cleaning of confined reaction room, said process blower fan and electric control air valve ON/OFF all carry out Automated condtrol by control cabinet, self-purifying system of the present invention can carry out fast effectively cleaning to the fine particle of confined reaction indoor, and simple to operate, liquidation procedures is efficient, with low cost.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is perspective view of the present invention;
Fig. 2 is front view of the present invention;
Fig. 3 is side view of the present invention;
Fig. 4 is side view of the present invention.
Label declaration
Main box 1, upper cavity 11, lower chamber 12, dividing plate 13, air outlet 14, suction opeing 15, control cabinet 2, power supply indicator 21, blower fan relay indicating light 22, valve working indicator lamp 23, gear operating switch 24, air-supply flange 3, exhausting flange 4, electric control air valve 5, upper access door 61, lower access door 62, high efficiency filter case 71, medium air filtration case 72, blower fan 8.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figures 1 to 4, a kind of self-purifying system for confined reaction room that the present invention discloses, confined reaction room comprises a main box 1, offers upper cavity 11 and lower chamber 12 in main box 1, upper cavity 11 and lower chamber 12 are separated by a dividing plate 13, dividing plate 13 are offered an air vent; Air outlet 13 and suction opeing 14 is offered outside main box; Self-purifying system comprises control cabinet 2, Rose Box, blower fan 8, air-supply flange 3, exhausting flange 4 and electric control air valve 5; Blower fan 8 is arranged on dividing plate 13 times edges and docks with air vent, all installs Rose Box bottom upper cavity 11 top of main box 1 and lower chamber 12, and wherein the Rose Box of upper cavity 11 is high efficiency filter case 71, and the Rose Box of lower chamber 12 is medium air filtration case 72; Air-supply flange 3 is arranged on the air outlet of main box 1, the built-in electric control air valve 5 of exhausting flange 4, exhausting flange 4 is arranged on the suction opeing of main box 1, air-supply flange 3 is corresponding with the Rose Box at upper cavity 11 top, exhausting flange 4 is corresponding with the Rose Box bottom lower chamber 12, and exhausting flange 4 is connected by a pipeline (not providing in figure) with air-supply flange 3; The built-in frequency-variable controller (not providing in figure) of control cabinet 2, control cabinet 2 outside is provided with and the power supply indicator 21 of the electrical connection of frequency-variable controller, blower fan relay indicating light 22 and valve working indicator lamp 23, and it is outside that control cabinet 2 is arranged on main box 1; Blower fan 8 and electric control air valve 5 are all electrically connected with frequency-variable controller.
Control cabinet 2 outside is also provided with and is electrically connected gear operating switch with controller, relies on this switch, and the present invention can switch different gears as required.
Access door 61 and lower access door 62 are also offered in main box 1 side, upper access door 61 corresponding with upper cavity 11, lower access door 62 is corresponding with lower chamber 12, offer accumulated amount and cleaning situation that access door is convenient to check fine particle in cavity, according to the situation in the cavity obtained, to the corresponding instruction of self-cleaning System Implementation.
The present invention is operationally:
After opening the gear operating switch 24 of control cabinet 2, when gear is high gear, blower fan 8 is started working and is told running, electric control air valve 5 is opened, power supply indicator 21, blower fan relay indicating light 22 and valve working indicator lamp 24 all light, the gas of upper cavity 11 drives the fine particle bottom upper cavity 11 to enter lower chamber 12, then together with the gas of lower chamber 12 and the fine particle at top thereof after medium air filtration case 72 by exhausting flange 4 out, other after first pass filters enter upper cavity 11 through air-supply flange 3 again by pipeline, in the process entering upper cavity 11, gas is through the filtration of high efficiency filter case 71, these shelves are that wind speed is the fastest, filtration time is the shortest, when gear is adjusted to low gear, blower fan low-speed running, gas circulating filtration process is with above-mentioned high gear, but speed is slower.
High gear uses when a large amount of fine particle is gathered in confined reaction indoor, realize fast purification, use when low gear then can be reacted in reative cell, the physical-chemical reaction (epitaxial growth reaction of such as carborundum) in reative cell can not be affected.
The present invention is used for the self-purifying system of confined reaction room, realize the impurity in the cleaning confined reaction room of high efficiency smart, meet reative cell working condition separately, when being applied to the confined reaction room of silicon carbide epitaxial growth, the fine particle produced in the epitaxy technique production process in airtight cavity can be cleaned out timely and effectively, avoid, on the impact of follow-up silicon carbide epitaxial growth wafer quality of carrying out, also improving production efficiency.
Above-described embodiment and graphic and non-limiting product form of the present invention and style, any person of an ordinary skill in the technical field, to its suitable change done or modification, all should be considered as not departing from patent category of the present invention.

Claims (4)

1. for a self-purifying system for confined reaction room, it is characterized in that: confined reaction room comprises a main box, offers upper cavity and lower chamber in main box, upper cavity and lower chamber are separated by a dividing plate, dividing plate are offered an air vent; Air outlet and suction opeing is offered outside main box; Self-purifying system comprises control cabinet, Rose Box, blower fan, air-supply flange, exhausting flange and electric control air valve; Assembling under dividing plate along and dock with air vent, all Rose Box is installed bottom the upper cavity top of main box and lower chamber; Air-supply flange is arranged on the air outlet of main box, the built-in electric control air valve of exhausting flange, exhausting flange is arranged on the suction opeing of main box, air-supply flange is corresponding with the Rose Box at upper cavity top, exhausting flange is corresponding with the Rose Box bottom lower chamber, and exhausting flange is connected by a pipeline with air-supply flange; The built-in frequency-variable controller of control cabinet, control cabinet outside is provided with and the power supply indicator of the electrical connection of frequency-variable controller, blower fan relay indicating light and valve working indicator lamp, and control cabinet is arranged on main box outside; Blower fan and electric control air valve are all electrically connected with frequency-variable controller.
2. a kind of self-purifying system for confined reaction room as claimed in claim 1, is characterized in that: described control cabinet outside is also provided with and is electrically connected gear operating switch with controller.
3. a kind of self-purifying system for confined reaction room as claimed in claim 1, is characterized in that: high efficiency filter case is installed at described upper cavity top, installs medium air filtration case bottom lower chamber.
4. a kind of self-purifying system for confined reaction room as claimed in claim 1, is characterized in that: access door and lower access door are also offered in described main box side, and upper access door is corresponding with upper cavity, and lower access door is corresponding with lower chamber.
CN201510018754.4A 2015-01-14 2015-01-14 A kind of self-purifying system for confined reaction room Active CN104645914B (en)

Priority Applications (1)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105268255A (en) * 2015-11-30 2016-01-27 济南金强激光数控设备有限公司 Smoke filter
CN105536363A (en) * 2015-12-29 2016-05-04 广东尚高科技有限公司 Filter-element type polishing dust suction system
CN108236814A (en) * 2017-11-07 2018-07-03 苏州市凯利勋实验室设备有限公司 A kind of activated carbon formula pernicious gas Rose Box

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130192501A1 (en) * 2009-12-25 2013-08-01 Zhengtao Lu Highly efficient, clean and pressurized gasification apparatus for dry powder of carbonaceous material and method thereof
CN203370406U (en) * 2013-07-24 2014-01-01 中国化学工程第十四建设有限公司 Air filter with multiple filter layers
CN204485825U (en) * 2015-01-14 2015-07-22 瀚天天成电子科技(厦门)有限公司 A kind of self-purifying system for confined reaction room

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130192501A1 (en) * 2009-12-25 2013-08-01 Zhengtao Lu Highly efficient, clean and pressurized gasification apparatus for dry powder of carbonaceous material and method thereof
CN203370406U (en) * 2013-07-24 2014-01-01 中国化学工程第十四建设有限公司 Air filter with multiple filter layers
CN204485825U (en) * 2015-01-14 2015-07-22 瀚天天成电子科技(厦门)有限公司 A kind of self-purifying system for confined reaction room

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105268255A (en) * 2015-11-30 2016-01-27 济南金强激光数控设备有限公司 Smoke filter
CN105536363A (en) * 2015-12-29 2016-05-04 广东尚高科技有限公司 Filter-element type polishing dust suction system
CN108236814A (en) * 2017-11-07 2018-07-03 苏州市凯利勋实验室设备有限公司 A kind of activated carbon formula pernicious gas Rose Box

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