CN104634111B - A kind of oven body device - Google Patents
A kind of oven body device Download PDFInfo
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- CN104634111B CN104634111B CN201510057014.1A CN201510057014A CN104634111B CN 104634111 B CN104634111 B CN 104634111B CN 201510057014 A CN201510057014 A CN 201510057014A CN 104634111 B CN104634111 B CN 104634111B
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- heater
- oven body
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Abstract
The present invention relates to semiconductor manufacturing equipment technical field, provide a kind of oven body device, the side of casing connects main road, its opposite side is provided with at least two branch road, each described branch circuit parallel connection is on main road, main road is provided with for electric connection terminal, the end of branch road is respectively equipped with an output wiring terminal, output wiring terminal is for connecting the access binding post of body of heater, power controller it is equipped with on branch road, each power controller is simultaneously connected with power control unit, and power control unit sends identical or different control signal for the power controller on each branch road.This oven body device configures multiple output wiring terminals, break the feature of the single output wiring terminal of conventional apparatus, can reach body of heater on the same stage divides multistage baking or the purpose simultaneously toasted multiple stage polytypic body of heater so that work efficiency and range of application are all significantly improved and expand.
Description
Technical field
The present invention relates to semiconductor manufacturing equipment technical field, particularly relate to a kind of in body of heater manufacturing process
Use can be to the oven body device of body of heater segmentation baking.
Background technology
For the body of heater using the heat-insulation layer containing hardening agent to make, before body of heater uses, be to heat-insulation layer
Carry out high-temperature baking process, thus heat-insulation layer be purified, at present, to the baking temperature of body of heater many
More than 800 DEG C, and some high-temperature furnace body, owing to heat-insulation layer is thicker, need higher temperature to enter heat-insulation layer
Row purification.
Traditional oven body device carries out the resistance wire that the heating source of baking purification is body of heater self to body of heater,
Owing to baking process having the gas overflowing such as carbide, sulfide, this baking be typically not in
Carry out on board, and for the body of heater of some high value, use the baking temperature of traditional oven body device
Degree does not often reach temperature required, it is necessary to individually toast body of heater segmentation.
Existing oven body device is generally of single output wiring terminal, along with furnace insulation layer material is many
How the development of sample, and the insulating layer of furnace body for different-thickness, carry out segmentation baking to body of heater,
Become the technical barrier that those skilled in the art are urgently to be resolved hurrily.
Summary of the invention
It is an object of the present invention to provide a kind of in body of heater manufacturing process use body of heater segmentation baking can be baked
Body of heater device.
To achieve these goals, the invention provides a kind of oven body device, including for toasting body of heater
Casing, the side of described casing connects main road, and its opposite side is provided with at least two branch road, each described
Road is parallel on described main road, and described main road is provided with for electric connection terminal, and the end of described branch road is respectively
Being provided with an output wiring terminal, described output wiring terminal is used for connecting the access binding post of body of heater,
Being equipped with power controller on described branch road, each described power controller is simultaneously connected with described power and controls single
Unit, described power control unit sends identical or different control for the power controller on each branch road
Signal.
Preferably, described power control unit is connected to detect the temperature measurement system of furnace body temperature, institute
Stating temperature measurement system and the temperature value of measurement feeds back to described power control unit, described power controls single
The temperature value of measurement is analyzed contrast with the temperature value preset by unit, and sends a control signal to each power
Controller.
Preferably, described temperature measurement system includes at least two temperature test point, described temperature test point
For detecting the temperature of the body of heater position corresponding to described branch road.
Preferably, described branch road being equipped with time-delay relay, each described time-delay relay arranges different
Delay parameter, during electrifying startup, each branch road is started successively by corresponding delay parameter.
Preferably, described main road is provided with main road overcurrent protector.
Preferably, described branch road is equipped with branch road overcurrent protector.
Preferably, described branch road is equipped with outfan circuit work light.
Preferably, described casing is additionally provided with body of heater cooling water control unit, this body of heater cooling water control
Unit includes supplying water into the draining water receiving mouth of pipe, water-inflow and drain valve door and water route flow meter.
Preferably, the top of described casing is provided with trouble lamp.
Preferably, described casing is provided with control panel, and described control panel is provided with scram button, merit
Rate control unit display screen, parameters of electric power set panel and device work light.
Preferably, described parameters of electric power set panel be provided with the operated key of at least two power controller with
And display screen.
Preferably, the side of described casing is provided with ground connection terminals.
Preferably, the bottom of described casing is provided with the castor for moving in parallel, and the top of described casing sets
There is the hoisting ring for handling.
The present invention provides oven body device multiple branch roads in parallel on the main road of power supply circuits, each branch road
End is respectively provided with an output wiring terminal, described output wiring terminal respectively with every section by oven body
Terminals connect, and provide electric power for body of heater, to realize carrying out body of heater segmentation baking, or described output
Binding post terminals with multiple stage body of heater respectively are connected, to realize toasting multiple stage body of heater simultaneously.
This oven body device, it is not necessary to arrange transformator, configures multiple output wiring terminal, has broken traditional dress
Put the feature of single output wiring terminal, can reach body of heater on the same stage divides multistage toast or many to multiple stage
The purpose that model body of heater toasts simultaneously so that work efficiency and range of application are all significantly improved and open up
Exhibition.
Accompanying drawing explanation
Fig. 1 is that the left view stereochemical structure of a kind of detailed description of the invention of oven body device provided by the present invention is shown
It is intended to；
Fig. 2 is that in Fig. 1, the right side of oven body device regards perspective view；
Fig. 3 is the upper electrical schematic diagram of oven body device in Fig. 1；
Fig. 4 is the power control principle figure of oven body device in Fig. 1.
Wherein, in Fig. 1～Fig. 4:
1, casing；2, castor；3, output wiring terminal；31, the first output wiring terminal；32、
Second output wiring terminal；33, the 3rd output wiring terminal；34, the 4th output wiring terminal；35、
5th output wiring terminal；4, supply water into draining adapter mouth；5, inlet valve；6, water supply discharge
Table；7, water discharging valve；8, trouble lamp；9, hoisting ring；10, outfan circuit work light；
11, grounding terminal；12, for electric connecting terminals；13, device upper electrical switch；14, scram button；15、
Power control unit；151, temperature measurement system；16, device work light；18, parameters of electric power sets
Panel；181, power controller；182, time-delay relay；183, branch road overcurrent protector；184、
Main road overcurrent protector；U1, body of heater first paragraph access binding post；U2, body of heater second segment access wiring
Terminal；U3, body of heater the 3rd section accesses binding post；U4, body of heater the 4th section accesses binding post；U5、
Body of heater the 5th section accesses binding post；F, body of heater.
Detailed description of the invention
For making present disclosure more clear understandable, below in conjunction with Figure of description, in the present invention
Appearance is described further.Certainly the invention is not limited in this specific embodiment, the technology people in this area
General replacement known to Yuan is also covered by within the scope of the present invention.Secondly, the present invention utilizes signal
Figure has carried out detailed statement, describe in detail present example time, for convenience of description, schematic diagram not according to
General ratio partial enlargement, should be in this, as limitation of the invention.
It should be noted that in following embodiment, utilize the structural representation of Fig. 1～4 to by this
Bright oven body device has carried out detailed statement.When describing embodiments of the present invention in detail, for the ease of saying
Bright, partial enlargement is not drawn and carried out to each schematic diagram according to general ratio and omission processes, therefore, and should
Avoid in this, as limitation of the invention.
Refer to Fig. 1～Fig. 4, Fig. 1 is oven body device one detailed description of the invention provided by the present invention
Left view perspective view；Fig. 2 is that in Fig. 1, the right side of oven body device regards perspective view；
Fig. 3 is the upper electrical schematic diagram of oven body device in Fig. 1；Fig. 4 is the power control of oven body device in Fig. 1
Schematic diagram processed.
As shown in FIG. 1 to 3, the oven body device that the present invention provides, including for toasting body of heater f's
Casing 1, the side of casing connects main road, and its opposite side is provided with at least two branch road, and each described branch road is also
Being coupled on main road, main road is provided with for electric connection terminal 12, and the end of branch road is respectively equipped with an output and connects
Line terminals 3, output wiring terminal 3, for connecting the access binding post of body of heater f, branch road is equipped with
Power controller 181, each power controller 181 is simultaneously connected with power control unit 15, and power controls single
Unit 15 sends identical or different control signal for the power controller 181 on each branch road.
In concrete scheme, casing 1 can be arranged on for electric connecting terminals 12 and grounding terminal 11
One side, is used to be connected with Factory Building power supply for electric connecting terminals 12, at home, and commercial power Factory Building electricity
Source is 380V.
Preferably in scheme, main road is provided with upper electrical switch 13, for controlling the switch of main road circuit,
For the ease of operation, upper electrical switch 13 can be arranged on the side of casing.
In the present embodiment, at the end face and unilateral copulation of casing, it is provided with the control panel of inclination, at this
Scram button 14 it is provided with on panel, when being used for occurring emergency, timely to device correlation function
Power-off and do not damage device.
The present invention provides oven body device multiple branch roads in parallel on the main road of power supply circuits, each branch road
End is respectively provided with an output wiring terminal 3, described output wiring terminal 3 respectively with every section by oven
The terminals of body connect, and provide electric power for body of heater, to realize body of heater is carried out segmentation baking or described
Output wiring terminal terminals with multiple stage body of heater respectively are connected, to realize drying multiple stage body of heater simultaneously
Roasting.This oven body device, it is not necessary to arrange transformator, configures multiple output wiring terminal, has broken biography
Bulk cargo puts the feature of single output wiring terminal, can reach body of heater on the same stage to divide multistage baking or to many
The purpose that platform polytypic body of heater toasts simultaneously so that work efficiency and range of application are all significantly improved
And expansion.
In specific embodiment, as it is shown on figure 3, the output that the oven body device that the present embodiment provides provides
The quantity of binding post 3 is five, respectively first output wiring terminal the 31, second output wiring terminal
32, the 3rd output wiring terminal the 33, the 4th output wiring terminal the 34, the 5th output wiring terminal 35,
(body of heater f first paragraph accesses wiring with five binding posts of same oven respectively for five output lead terminals
Terminal U1, body of heater f second segment access binding post U2, body of heater f the 3rd section access binding post U3,
Body of heater f the 4th section accesses binding post U4, body of heater f the 5th section and accesses binding post U5) connect, can
To understand, the quantity of the output lead terminal of the oven body device that the present invention provides is not limited to five, this
Skilled person can the most arbitrarily be arranged under the design of the present invention.
As shown in Figure 4, the power control unit 15 in this utility model is used for setting the heating curve of body of heater,
Wherein, the control such as line programming rate, target temperature and target temperature retention time parameter can be according to reality
Needing to set, the control signal outfan of described power control unit 15 is connected in described branch road respectively
On the control signal input of power controller 181, power control unit 15 is to each power controller
181 send control information, to control the duty of each branch road.
In concrete scheme, above-mentioned control panel is also provided with parameters of electric power and sets panel 18,
Each power controller 181 can be arranged on described parameters of electric power and set in panel 18, in further scheme,
Near parameters of electric power setting panel 18, position can also arrange device work light 16.
Preferably in scheme, the detection signal receiving end of described power control unit 18 and temperature measurement system
The temperature test point of 151 connects, and described temperature test point 151 is for detecting the stove corresponding to described branch road
The temperature of body position, the temperature value of measurement is fed back to power control unit 15 by temperature measurement system 151,
Power control unit 15 processes and with the temperature value preset, the temperature value of measurement is analyzed contrast, sends control
Signal processed is to each power controller 181.
In order to protect whole circuit, prevent excessive equipment fault or the accident of causing of electric current in main road, described master
Road is provided with main road overcurrent protector 184, and main road overcurrent protector 184 can be arranged on upper electrical switch 13
Downstream position.
Additionally, in order to protect each branch road, described branch road is equipped with branch road overcurrent protector 183.
Concrete, in the present embodiment, when circuit loads more bigger time, in the moment of electrifying startup,
Can produce bigger electric current in circuit, be prone to accidents damage equipment, in order to prevent such situation from going out
Existing, described branch road is equipped with time-delay relay 182, each described time-delay relay 182 arranges different
Delay parameter, during electrifying startup, each branch road starts successively according to corresponding delay parameter.So, upper
After electricity, each branch road can't be also turned on, but can in turn switch under the effect of time-delay relay,
It is possible to prevent the moment of electrifying startup, circuit occurs bigger electric current.
Additionally, be equipped with outfan circuit work light on described branch road, casing 1 is additionally provided with meanwhile
Body of heater cooling water control unit, for body of heater is carried out water cooling, this body of heater cooling water control unit includes
Supply water into the draining water receiving mouth of pipe 4, inlet valve 5, water discharging valve 7 and water route flow meter 6.
It is also preferred that the left the bottom of described casing is provided with the castor 2 for moving in parallel, the top of described casing
It is provided with the hoisting ring 9 for handling.
In sum, the present invention provides oven body device multiple branch roads in parallel on the main road of power supply circuits,
The end of each branch road is respectively provided with an output wiring terminal, described output wiring terminal respectively with every section
Connected by the terminals of oven body, provide electric power for body of heater, to realize body of heater is carried out segmentation baking, or
The terminals with multiple stage body of heater respectively of output wiring terminal described in person are connected, to realize to multiple stage body of heater simultaneously
Toast.This oven body device, it is not necessary to arrange transformator, configures multiple output wiring terminal, beats
Broken the feature of the single output wiring terminal of conventional apparatus, can reach body of heater on the same stage is divided multistage baking or
The purpose that multiple stage polytypic body of heater is toasted by person simultaneously so that work efficiency and range of application all obtain significantly
Raising and expansion.
The above is only the description of the preferred implementation invented, it is noted that due to literal expression
Finiteness, and objectively there is unlimited concrete structure, for those skilled in the art
For, under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications, these change
Enter and retouch and also should be regarded as protection scope of the present invention.Any simple modification, equivalent variations and modification,
All still fall within the range of technical solution of the present invention protection.
Claims (13)
1. an oven body device, including the casing for toasting body of heater, it is characterised in that described casing
Side connect main road, its opposite side is provided with at least two branch road, and each described branch circuit parallel connection is in described main road
On, described main road is provided with for electric connection terminal, and the end of described branch road is respectively equipped with an output connection
Terminal, described output wiring terminal, for connecting the access binding post of body of heater, described branch road is equipped with
Power controller, each described power controller is simultaneously connected with power control unit, described power control unit
Identical or different control signal is sent for the power controller on each branch road.
Oven body device the most according to claim 1, it is characterised in that described power control unit
It is connected to detect the temperature measurement system of furnace body temperature, the temperature value that described temperature measurement system will be measured
Feeding back to described power control unit, described power control unit is by the temperature value measured and the temperature preset
Value is analyzed contrast, and sends a control signal to each power controller.
Oven body device the most according to claim 2, it is characterised in that described temperature measurement system
Including at least two temperature test point, described temperature test point is for detecting the body of heater corresponding to described branch road
The temperature of position.
4. according to the oven body device described in any one of claims 1 to 3, it is characterised in that described
Being equipped with time-delay relay on road, each described time-delay relay arranges different delay parameters, electrifying startup
Time, each branch road is started successively by corresponding delay parameter.
5. according to the oven body device described in any one of claims 1 to 3, it is characterised in that described master
Road is provided with main road overcurrent protector.
6. according to the oven body device described in any one of claims 1 to 3, it is characterised in that described
Branch road overcurrent protector it is equipped with on road.
Oven body device the most according to claim 1, it is characterised in that be equipped with on described branch road
Outfan circuit work light.
Oven body device the most according to claim 1, it is characterised in that also set up on described casing
Have body of heater cooling water control unit, this body of heater cooling water control unit include supplying water into the draining water receiving mouth of pipe,
Water-inflow and drain valve door and water route flow meter.
Oven body device the most according to claim 1, it is characterised in that the top of described casing sets
Faulty alarm lamp.
Oven body device the most according to claim 1, it is characterised in that described casing is provided with control
Panel processed, described control panel is provided with scram button, power control unit display screen, parameters of electric power set
Determine panel and device work light.
11. oven body devices according to claim 10, it is characterised in that described parameters of electric power sets
Determine panel and be provided with operated key and the display screen of at least two power controller.
12. oven body devices according to claim 1, it is characterised in that the side of described casing sets
There are ground connection terminals.
13. oven body devices according to claim 1, it is characterised in that the bottom of described casing sets
The castor for moving in parallel, the top of described casing is had to be provided with the hoisting ring for handling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510057014.1A CN104634111B (en) | 2015-02-04 | 2015-02-04 | A kind of oven body device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510057014.1A CN104634111B (en) | 2015-02-04 | 2015-02-04 | A kind of oven body device |
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| Publication Number | Publication Date |
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| CN104634111A CN104634111A (en) | 2015-05-20 |
| CN104634111B true CN104634111B (en) | 2016-11-23 |
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|---|---|---|---|
| CN201510057014.1A Active CN104634111B (en) | 2015-02-04 | 2015-02-04 | A kind of oven body device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111488013B (en) * | 2020-04-24 | 2021-10-01 | 中国船舶工业综合技术经济研究院 | Temperature control circuit of electronic equipment |
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| CN102269530A (en) * | 2011-08-26 | 2011-12-07 | 西南铝业（集团）有限责任公司 | Furnace temperature control method and furnace temperature control device |
| CN202229589U (en) * | 2011-09-28 | 2012-05-23 | 张君 | Electric heating baking oven device |
| CN102721050A (en) * | 2012-07-11 | 2012-10-10 | 曲大伟 | Plasma ignition kiln drying device for anthracite kiln |
| CN102788508A (en) * | 2011-07-21 | 2012-11-21 | 宁波连通设备制造有限公司 | Furnace drying method of industrial furnace module and furnace drying device for industrial furnace module |
| CN202630710U (en) * | 2012-03-28 | 2012-12-26 | 曲大伟 | Plasma baking furnace and ignition temperature automatic control system for rotary kiln |
| CN202747796U (en) * | 2012-09-17 | 2013-02-20 | 秦瑞发 | Drier for furnace body of medium-frequency furnace |
| CN204478820U (en) * | 2015-02-04 | 2015-07-15 | 北京七星华创电子股份有限公司 | Baking oven body device |
-
2015
- 2015-02-04 CN CN201510057014.1A patent/CN104634111B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2372324Y (en) * | 1999-04-13 | 2000-04-05 | 汪敉 | Compact-type baking oven equipment for silica brick hot air furnace |
| CN102788508A (en) * | 2011-07-21 | 2012-11-21 | 宁波连通设备制造有限公司 | Furnace drying method of industrial furnace module and furnace drying device for industrial furnace module |
| CN102269530A (en) * | 2011-08-26 | 2011-12-07 | 西南铝业（集团）有限责任公司 | Furnace temperature control method and furnace temperature control device |
| CN202229589U (en) * | 2011-09-28 | 2012-05-23 | 张君 | Electric heating baking oven device |
| CN202630710U (en) * | 2012-03-28 | 2012-12-26 | 曲大伟 | Plasma baking furnace and ignition temperature automatic control system for rotary kiln |
| CN102721050A (en) * | 2012-07-11 | 2012-10-10 | 曲大伟 | Plasma ignition kiln drying device for anthracite kiln |
| CN202747796U (en) * | 2012-09-17 | 2013-02-20 | 秦瑞发 | Drier for furnace body of medium-frequency furnace |
| CN204478820U (en) * | 2015-02-04 | 2015-07-15 | 北京七星华创电子股份有限公司 | Baking oven body device |
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| CN104634111A (en) | 2015-05-20 |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180202 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
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