CN104579225A - Vibrating element, vibrator, oscillator, electronic apparatus, and moving object - Google Patents
Vibrating element, vibrator, oscillator, electronic apparatus, and moving object Download PDFInfo
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- CN104579225A CN104579225A CN201410584193.XA CN201410584193A CN104579225A CN 104579225 A CN104579225 A CN 104579225A CN 201410584193 A CN201410584193 A CN 201410584193A CN 104579225 A CN104579225 A CN 104579225A
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
- H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/028—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only of generators comprising piezoelectric resonators
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Abstract
A vibrating element, a vibrator, an oscillator, an electronic apparatus, and a moving object are provided. The vibrating element and the vibrator can inhibit degradation of frequency, and other characteristics caused by temperature changes. The oscillator, the electronic device and the moving object have high reliability. The vibrating element is characterized in that: the vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode; and in frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta DEG C, a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb DEG C, and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc DEG C, Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc.
Description
Technical field
The present invention relates to a kind of vibrating elements, oscillator, oscillator, electronic equipment and moving body.
Background technology
As vibrating elements, this truck position of such as known a kind of Body Control be used in vehicle, auto-navigation system is detected, the vibration control correction (so-called hand shaking correction) etc. of digital camera or video camera etc., and to the transducer that the physical quantity such as angular speed, acceleration detects.As transducer such as known a kind of angular-rate sensor (vibrating gyrosensor) (for example, referring to patent documentation 1).
Such as, the armite that the vibrating gyrosensor recorded in patent documentation 1 possesses base portion, extend from base portion, the actuating arm extended from the leading section of armite and the detection arm of extending from base portion.This vibrating gyrosensor is under the state making actuating arm carry out flexural vibrations, and when bearing the angular speed of predetermined direction, Coriolis force will act on actuating arm, and with this, detection arm will carry out flexural vibrations.By detecting the flexural vibrations of this detection arm thus can detecting angular speed.
The base portion of this vibrating gyrosensor and actuating arm are such as formed by piezoelectrics material.And, by use photoetching technique or etching technique, piezoelectrics material is processed, thus form base portion and actuating arm.
In addition, in patent documentation 2, record the piezoelectric vibration type yaw rate sensor (oscillator) possessing multiple detecting pattern (the first detection vibration mode and the second detection vibration mode).This transducer by making the resonance frequency under the resonance frequency under the first detection vibration mode and the second detection vibration mode close, and makes the amplitude of detection arm increase, thus improves the sensitivity of transducer.
But, although describe the relation of frequency in the transducer (oscillator) described in patent documentation 2, and reckon without the relation of temperature and frequency, therefore suppress the characteristics such as the frequency characteristic that caused by variations in temperature deteriorated in have difficulties.
The object of the invention is to, a kind of vibrating elements that can suppress the deterioration of the characteristics such as the sensitivity produced along with the frequency change caused by variations in temperature and oscillator are provided, and oscillator, electronic equipment and the moving body that a kind of reliability is higher is provided.
Patent documentation 1: Japanese Unexamined Patent Publication 2006-105614 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2012-98091 publication
Summary of the invention
The present invention is the invention completed at least partially in order to solve in above-mentioned problem, can realize as following application examples.
Application examples 1
The feature of vibrating elements of the present invention is, there is drive pattern and on the direction orthogonal with the direction of vibration under this drive pattern, carry out the first detecting pattern of vibrating and the second detecting pattern, when transverse axis being set to atmosphere temperature and the longitudinal axis being set to the change of frequency, in the frequency-temperature characteristic curve of the change of the frequency that the expression under each pattern described is caused by the change of temperature, the summit temperature of the described frequency-temperature characteristic curve under described drive pattern is set to Ta [DEG C], the summit temperature of the described frequency-temperature characteristic curve under described first detecting pattern is set to Tb [DEG C], and when the summit temperature of the described frequency-temperature characteristic curve under described second detecting pattern is set to Tc [DEG C], described Ta is lower than described Tb and described Tc, or, described Ta is higher than described Tb and described Tc.
According to this vibrating elements, can suppress the deterioration of the characteristics such as the sensitivity produced along with the frequency change caused by variations in temperature.
Application examples 2
Vibrating elements of the present invention is preferably, resonance frequency under described drive pattern is being set to fa, resonance frequency under described first detecting pattern is set to fb, and when the resonance frequency under described second detecting pattern is set to fc, described fa is between described fb and described fc.
Thereby, it is possible to suppress the deterioration of the characteristics such as the sensitivity produced along with the frequency change caused by variations in temperature, and sensitivity is promoted further.
Application examples 3
Vibrating elements of the present invention possesses: base portion; A pair driving shaker arm, it extends from described base portion; A pair detection shaker arm, it extends from described base portion to the direction contrary with described a pair driving shaker arm.
Thereby, it is possible to provide the deterioration in characteristics such as a kind of sensitivity to producing along with the frequency change caused by variations in temperature to suppress, and the vibrating elements of the higher H type of reliability.
Application examples 4
The feature of oscillator of the present invention is to possess: vibrating elements of the present invention; Packaging part, it is accommodated with described vibrating elements.
Thereby, it is possible to provide the oscillator with excellent vibration characteristics.
Application examples 5
The feature of oscillator of the present invention is to possess: vibrating elements of the present invention; Oscillating circuit, it is electrically connected with described vibrating elements.
Thereby, it is possible to provide the oscillator that a kind of reliability is higher.
Application examples 6
The feature of electronic equipment of the present invention is, possesses vibrating elements of the present invention.
Thereby, it is possible to provide the electronic equipment that a kind of reliability is higher.
Application examples 7
The feature of moving body of the present invention is, possesses vibrating elements of the present invention.
Thereby, it is possible to provide the moving body that a kind of reliability is higher.
Accompanying drawing explanation
Fig. 1 be medelling represent the cutaway view of the Sketch of the oscillator of the execution mode possessing vibrating elements of the present invention.
Fig. 2 is the vertical view of the oscillator shown in Fig. 1.
Fig. 3 is for representing the vertical view of the vibrating elements that the oscillator shown in Fig. 1 possesses.
The amplification plan view of the driving shaker arm that Fig. 4 (a) is the vibrating elements shown in Fig. 3, Fig. 4 (b) is the cutaway view of the driving shaker arm shown in Fig. 4 (a).
The amplification plan view of the detection shaker arm that Fig. 5 (a) is the vibrating elements shown in Fig. 3, Fig. 5 (b) is the cutaway view of the detection shaker arm shown in Fig. 5 (a).
The amplification plan view of the adjustment shaker arm that Fig. 6 (a) is the vibrating elements shown in Fig. 3, Fig. 6 (b) is the cutaway view of the adjustment shaker arm shown in Fig. 6 (a).
Fig. 7 is for representing the figure of the connection status of detection electrode in the vibrating elements shown in Fig. 3 and electrode for adjusting.
Fig. 8 is the figure for being described the action of the vibrating reed shown in Fig. 3.
Fig. 9 is the figure for being described the action of the vibrating reed shown in Fig. 3.
Figure 10 is the curve chart of the frequency-temperature characteristic curve under each pattern of expression.
Figure 11 (a) is for representing the figure that the leakage of the detection electrode shown in Fig. 5 exports, and Figure 11 (b) is for representing the figure of the output of the electrode for adjusting shown in Fig. 6 and Fig. 7.
Figure 12 be medelling represent the cutaway view of the Sketch of the oscillator of the execution mode possessing vibrating elements of the present invention.
Figure 13 represents the stereogram possessing the structure of the personal computer of the pocket (or notebook type) of vibrating elements of the present invention.
Figure 14 represents the stereogram possessing the structure of the mobile phone (also comprising PHS) of vibrating elements of the present invention.
Figure 15 represents the stereogram possessing the structure of the digital camera of vibrating elements of the present invention.
Figure 16 represents the stereogram as the structure of the automobile of an example of moving body of the present invention.
Embodiment
Below, the preferred implementation with reference to the accompanying drawings, the present invention will be described in detail.
Oscillator
Next, the oscillator of the execution mode possessing vibrating reed of the present invention is described.
Fig. 1 represents the pattern cutaway view possessing the Sketch of the oscillator of the execution mode of vibrating elements of the present invention, Fig. 2 is the vertical view of the oscillator shown in Fig. 1, Fig. 3 is for representing the vertical view of the vibrating elements that the oscillator shown in Fig. 1 possesses, the amplification plan view of the driving shaker arm that Fig. 4 (a) is the vibrating reed shown in Fig. 3, Fig. 4 (b) is the cutaway view of the driving shaker arm shown in Fig. 4 (a), the amplification plan view of the detection shaker arm that Fig. 5 (a) is the vibrating elements shown in Fig. 3, Fig. 5 (b) is the cutaway view of the detection shaker arm shown in Fig. 5 (a), the amplification plan view of the adjustment shaker arm that Fig. 6 (a) is the vibrating reed shown in Fig. 3, Fig. 6 (b) is the cutaway view of the adjustment shaker arm shown in Fig. 6 (a), Fig. 7 is for representing the figure of the connection status of detection electrode in the vibrating elements shown in Fig. 3 and electrode for adjusting, Fig. 8, Fig. 9 is the figure for being described the action of the vibrating elements shown in Fig. 3, Figure 10 is the curve chart of the frequency-temperature characteristic curve under each pattern of expression, Figure 11 (a) is for representing the figure that the leakage of the detection electrode shown in Fig. 5 exports, Figure 11 (b) is for representing the figure of the output of the electrode for adjusting shown in Fig. 6 and Fig. 7.
In addition, below for convenience of explanation, in Fig. 1 to Fig. 6, Fig. 8, x-axis, y-axis and z-axis is illustrated as mutually orthogonal three axles, and the direction parallel with x-axis is called in " x-axis direction ", the direction parallel with y-axis is called in " y-axis direction ", the direction parallel with z-axis is called in " z-axis direction ".In addition, general+z-axis side is also called " on ", and general-z-axis side is also called D score.
Oscillator 1 shown in Fig. 1 and Fig. 2 is the gyrosensor detected the angular speed as physical quantity.
Such oscillator 1 such as can be used in the hand shaking correction of picture pick-up device, or employs in the attitude detection, gesture stability etc. of vehicle in the mobile-body navigation system of GPS (Global Positioning System: global positioning system) satellite-signal etc.
As shown in Figures 1 and 2, this oscillator 1 packaging part 4 of there is vibrating elements 2, IC chip 3 and vibrating elements 2 and IC chip 3 being received.
Below, the various piece forming oscillator 1 is described successively.
Vibrating elements
Vibrating elements 2 is the gyrosensor element that the angular speed of an opposing connection axle carries out detecting.
As shown in Figure 3, this vibrating elements 2 has vibrating reed 58, described vibrating reed 58 possess base portion 21, a pair driving shaker arm 221,222, a pair detection shaker arm 231,232, a pair adjustment shaker arm (shaker arm) 241,242, support (framework) 25, four linking parts 261,262,263,264, driving electrode group 51,52, detection electrode group 53,54 and electrode for adjusting group 55,56.
In the present embodiment, vibrating reed 58 is integrally formed by piezoelectrics material.Although be not particularly limited as this piezoelectrics material, preferably use crystal.Thereby, it is possible to optimize the characteristic of vibrating elements 2.
Crystal has mutually orthogonal X-axis (electric axis), Y-axis (mechanical axis) and Z axis (optic axis).Base portion 21, a pair driving shaker arm 221,222, a pair detection shaker arm 231,232, a pair adjustment shaker arm 241,242, support and four linking parts 261,262,263,264 such as can by to be in by Z axis on thickness direction and the substrate that the crystal with the plate face parallel with X-axis and Y-axis is formed carries out etching and processing and formed.The thickness of involved substrate is set properly according to the frequency of oscillation (resonance frequency), overall dimension, processability etc. of vibrating elements 2.In addition, below, by base portion 21, a pair driving shaker arm 221,222, a pair detection shaker arm 231,232, a pair adjustment shaker arm 241,242, support and four linking parts 261,262,263,264 situation about being integrally made up of crystal is exemplarily described.
Vibrating reed
As mentioned above, vibrating reed 58 possess base portion 21, a pair driving shaker arm 221,222, a pair detection shaker arm 231,232, a pair adjustment shaker arm (shaker arm) 241,242, support (framework) 25, four linking parts 261,262,263,264, driving electrode group 51,52, detection electrode group 53,54 and electrode for adjusting group 55,56.
Wherein, base portion 21 is supported on support 25 via four linking parts 261,262,263,264.Four linking parts 261,262,263,264 elongated shape respectively, and one end and base portion 21 link, the other end and support 25 link.
Driving shaker arm 221,222 extends in y-axis direction (+y direction) respectively from base portion 21.In addition, driving shaker arm 221,222 extends along the Y-axis of crystal respectively.And the cross section of driving shaker arm 221,222 is respectively in the rectangle be made up of an opposite side parallel with x-axis and an opposite side parallel with z-axis.
And, driving shaker arm 221 is provided with driving electrode group 51, similarly, driving shaker arm 222 is provided with driving electrode group 52.
Below, with driving electrode group 51 for representative is described.In addition, because driving electrode group 52 is identical with driving electrode group 51, therefore the description thereof will be omitted.
As shown in Fig. 4 (a), (b), driving electrode group 51 is made up of with the driving electrode 514 be arranged on another (right side in Fig. 4) side of driving shaker arm 221 driving electrode 511 on the upper surface being arranged at driving shaker arm 221, the driving electrode 512 be arranged on the lower surface of driving shaker arm 221, the driving electrode 513 be arranged on (left side in Fig. 4) side for driving shaker arm 221.
Driving electrode 511 and driving electrode 512 are electrically connected to each other by not shown distribution, so that same current potential each other.In addition, driving electrode 513 and driving electrode 514 are electrically connected to each other by not shown distribution, so that same current potential each other.This driving electrode 511,512 is electrically connected with the terminal 57a be arranged on support 25 shown in Fig. 3 by not shown distribution.In addition, driving electrode 513,514 is electrically connected with the terminal 57b be arranged on support 25 shown in Fig. 3 by not shown distribution.
Detection shaker arm 231,232 extends in y-axis direction (-y direction) respectively from base portion 21.In addition, detection shaker arm 231,232 extends along the Y-axis of crystal respectively.And the cross section of detection shaker arm 231,232 is respectively in the rectangle be made up of an opposite side parallel with x-axis and an opposite side parallel with z-axis.
This detection shaker arm 231,232 is respectively according to being applied in the physical quantity on driving shaker arm 221,222 and vibrating.
And, detection shaker arm 231 is provided with detection electrode group 53, similarly, detection shaker arm 232 is provided with detection electrode group 54.So, by being provided with detection electrode group 53,54 on the detection shaker arm 231,232 arranged with driving shaker arm 221,222 split, thus the electrode area (playing the area of the part of function as electrode) of the detection electrode of detection electrode group 53,54 can be increased.Therefore, it is possible to make the detection sensitivity of vibrating elements 2 improve.At this, detection shaker arm 231 and detection electrode group 53 form test section.Similarly, detection shaker arm 232 and detection electrode group 54 form test section.
Below, to detect with electrode group 53 as representative is described.In addition, because detection electrode group 54 is identical with detection electrode group 53, therefore the description thereof will be omitted.
As shown in Fig. 5 (a), (b), detection electrode group 53 is made up of the detection electrode 531,532 on the upper surface being arranged at detection shaker arm 231 and the detection electrode 533,534 be arranged on the lower surface of detection shaker arm 231.At this, detection electrode 531,533 is arranged at the side (left side in Fig. 5) on the Width of detection shaker arm 231 respectively, in addition, detection electrode 532,534 is arranged at the opposite side (right side in Fig. 5) on the Width of detection shaker arm 231 respectively.
Detection electrode 531 and detection electrode 534 are electrically connected to each other by not shown distribution, so that same current potential each other.In addition, detection electrode 532 and detection electrode 533 are electrically connected to each other by not shown distribution, so that same current potential each other.At this, detection electrode 531,534 and detection electrode 532,533 paired.
This detection electrode 531,534 is electrically connected with the terminal 57c be arranged on support 25 shown in Fig. 3 by not shown distribution.In addition, detection electrode 532,533 is electrically connected with terminal 57d, the 57f be arranged on support 25 shown in Fig. 3 by not shown distribution.
Adjustment vibration section 241,242 extends in the y-axis direction respectively from base portion 21.In addition, adjustment shaker arm 241,242 extends along the Y-axis of crystal respectively.And the cross section of adjustment shaker arm 241,242 is respectively in the rectangle be made up of an opposite side parallel with x-axis and an opposite side parallel with z-axis.Adjustment shaker arm 241,242 is respectively rectangle, and the side that there is surface (first surface), the back side (the second face) and surface and the back side are linked.
This adjustment shaker arm 241,242 with previously described driving shaker arm 221,222 parallel modes and being set up.That is, driving shaker arm 221,222 and adjustment shaker arm 241,242 extend in directions that are parallel to one another.Thus, when being made up of driving shaker arm 221,222 and adjustment shaker arm 241,242 etc. crystal, by driving shaker arm 221,222 and adjustment shaker arm 241,242 with respectively along the Y-axis of crystal and the mode extended formed, thus driving shaker arm 221,222 can be made to vibrate efficiently, and utilize simple structure and make the electrode for adjusting 551 ~ 554 described hereinafter produce electric charge.
And, adjustment shaker arm 241 is provided with electrode for adjusting group 55, similarly, adjustment shaker arm 242 is provided with electrode for adjusting group 56.
Below, with electrode for adjusting group 55 for representative is described.In addition, because electrode for adjusting group 56 is identical with electrode for adjusting group 55, therefore the description thereof will be omitted.
As shown in Fig. 6 (a), (b), electrode for adjusting group 55 is made up of with the electrode for adjusting 554 be arranged on another (right side in Fig. 6) side of adjustment shaker arm 241 electrode for adjusting 551 on the upper surface being arranged at adjustment shaker arm 241, the electrode for adjusting 552 be arranged on the lower surface of adjustment shaker arm 241, the electrode for adjusting (side electrode) 553 be arranged on (left side in Fig. 6) side for adjustment shaker arm 241.
Electrode for adjusting 551 and electrode for adjusting 552 are formed in the overlapped mode when top view.That is, electrode for adjusting 551 and electrode for adjusting 552 are formed in the mode that profile is consistent each other when top view.
Electrode for adjusting 551 and electrode for adjusting 552 are electrically connected to each other by not shown distribution, so that same current potential each other.In addition, electrode for adjusting 553 and electrode for adjusting 554 are electrically connected to each other by not shown distribution, so that same current potential each other.At this, electrode for adjusting 551,552 and electrode for adjusting 553,554 paired.
This electrode for adjusting 553,554 is electrically connected with the terminal 57e be arranged on support 25 shown in Fig. 3 together with previously described detection electrode 532,533 by not shown distribution.In addition, electrode for adjusting 551,552 is electrically connected with the terminal 57c be arranged on support 25 shown in Fig. 3 together with previously described detection electrode 531,534 by not shown distribution.In addition, electrode for adjusting group 56 is electrically connected with terminal 57d, the 57f be arranged on support 25 shown in Fig. 3 together with previously described detection electrode group 56 by not shown distribution.
As shown in Figure 7, in the vibrating elements 2 with this electrode for adjusting 551 ~ 554, the quantity of electric charge after the quantity of electric charge produced in detection electrode 531,534 and detection electrode 532,533 can being added with the quantity of electric charge produced in electrode for adjusting 551,552 and electrode for adjusting 553,554 exports (following as transducer, referred to as " transducer output "), and export from terminal 57c, 57e.
At this, because the electric charge produced in electrode for adjusting 551,552 and electrode for adjusting 553,554 and the electric charge that produces in detection electrode 531,534 and detection electrode 532,533 are opposite polarity, therefore by least partially counteracting of detection with the electric charge of generation in electrode 531,534 and detection electrode 532,533.
By removing a part for this electrode for adjusting 551,552, thus the adjustment to transducer output can be implemented.That is, by removing a part for electrode for adjusting 551,552, thus the quantity of electric charge between electrode for adjusting 551,552 and electrode for adjusting 553,554 can be reduced, transducer being exported regulate thus.Such as, in the mode making the transducer output (following, to be also called " offset output ") be not applied under the state of vibrating elements 2 in physical quantity become zero, transducer can be exported and regulates (correction).Thus, the higher vibrating elements of sensitivity 2 can be obtained.
Vibrating elements 2 formed by this way possesses drive pattern, the first detecting pattern and the second detecting pattern.
In the drive mode, by applying drive singal between terminal 57a and terminal 57b, thus as shown in Figure 8, driving shaker arm 221 and driving shaker arm 222 with close to each other, away from mode carry out flexural vibrations (drive and vibrate).Namely, driving shaker arm 221 bends to the direction of the arrow mark A1 shown in Fig. 8 and driving shaker arm 222 state bending to the direction of the arrow mark A2 shown in Fig. 8, and driving shaker arm 221 bends to the direction of the arrow mark B1 shown in Fig. 8 and driving shaker arm 222 replaces repeatedly to the state that the direction of the arrow mark B2 shown in Fig. 8 is bending.
When under making driving shaker arm 221,222 carry out the state driving vibration by this way, when applying the angular velocity omega around y-axis to vibrating elements 2, driving shaker arm 221,222 carries out flexural vibrations to the opposition side in z-axis direction mutually by by Coriolis force.Be accompanied by this, detection shaker arm 231,232 is mutual in the z-axis direction carries out flexural vibrations (detecting vibration) to opposition side.Namely, detection shaker arm 231 bends to the direction of the arrow mark C1 shown in Fig. 8 and detection shaker arm 232 state bending to the direction of the arrow mark C2 shown in Fig. 8, and detection shaker arm 231 bends to the direction of the arrow mark D1 shown in Fig. 8 and detection shaker arm 232 replaces repeatedly to the state that the direction of the arrow mark D2 shown in Fig. 8 is bending.
The electric charge produced in detection electrode group 53,54 by vibrating the detection by this detection shaker arm 231,232 detects, thus can obtain the angular velocity omega applied to vibrating elements 2.
Now, adjustment shaker arm 241,242 also along with the driving vibration of driving shaker arm 221,222 with mutual close, away from the mode of direction enterprising line bend vibration excited.Thus, owing to producing electric charge in electrode for adjusting 551,552 and electrode for adjusting 553,554, therefore by regulating this quantity of electric charge, thus can by the counteracting at least partially of the electric charge of generation in detection electrode 531,534 and detection electrode 532,533.
As shown in Fig. 9 (A), under the first detecting pattern, drive with shaker arm 221,222 in the Z-axis direction, relative to Coriolis force action direction and with anti-phase, and mutually carry out flexural vibrations round about.Thus, detection is with shaker arm 231,232 with in the Z-axis direction, and adjacent shaker arm each other round about and carry out flexural vibrations with driving shaker arm 221,222 anti-phase modes.
As shown in Fig. 9 (B), under the second detecting pattern, drive with shaker arm 221,222 in the Z-axis direction, relative to Coriolis force action direction and with homophase, and mutually carry out flexural vibrations round about.Thus, detection is with shaker arm 231,232 with in the Z-axis direction, and adjacent shaker arm each other round about and carry out flexural vibrations with the mode of driving shaker arm 221,222 homophase.
So, vibrating elements 2 possesses drive pattern, the first detecting pattern and the second detecting pattern, and its result is, each shaker arm of vibrating elements 2 carries out flexural vibrations in overlap under the vibration mode of the first detecting pattern and the second detecting pattern.Each driving shaker arm 221,222 carries out flexural vibrations with anti-phase respectively in the first detecting pattern and the second detecting pattern.Relative to this, because each detection shaker arm 231,232 carries out flexural vibrations with homophase respectively in the first detecting pattern and the second detecting pattern, therefore, compared with the situation of only carrying out with any one pattern in the first detecting pattern or the second detecting pattern vibrating, add power of shaking and to increase and amplitude becomes large.Therefore, be no matter which in detection shaker arm 231,232, all can obtain the more high-tension signal of telecommunication from detection electrode group 53,54, thus obtain the rotation and angular speed etc. of vibrating elements 2 with higher detection sensitivity.
Vibrating elements 2 is formed in such a way, namely, when transverse axis being set to atmosphere temperature and the longitudinal axis being set to the change of frequency, in the frequency-temperature characteristic curve of the change of the frequency that the expression under each pattern is caused by the change of temperature, the summit temperature of the described frequency-temperature characteristic curve under described drive pattern is set to Ta [DEG C], the summit temperature of the described frequency-temperature characteristic curve under described first detecting pattern is set to Tb [DEG C], and when the summit temperature of the described frequency-temperature characteristic curve under described second detecting pattern is set to Tc [DEG C], Ta lower than Tb and Tc (such as, Figure 10 (a)), or, Ta higher than Tb and Tc (such as, Figure 10 (b)).
By being set to such structure, thus can suppress the deterioration of the characteristic produced along with the frequency change caused by variations in temperature.Namely, by being set to such structure, thus resonance frequency under the resonance frequency made because of variations in temperature under drive pattern and the first detecting pattern close when, sensitivity improves, and leakage of vibration also increases, meanwhile, the resonance frequency under resonance frequency in the drive mode and the second detecting pattern away from when, sensitivity declines, and leakage of vibration also reduces.Its result is, that can suppress to be caused by variations in temperature, sensitivity and leakage of vibration increase, minimizing, thus the deterioration of suppression characteristic.
In addition be preferably, the resonance frequency under drive pattern is being set to fa, the resonance frequency under the first detecting pattern is set to fb, and when the resonance frequency under the second detecting pattern is set to fc, fa be between fb and fc.Thereby, it is possible to suppress the deterioration of the characteristics such as the sensitivity produced along with the frequency change caused by variations in temperature, thus sensitivity is improved further.
In addition, in involved vibrating elements 2, suppose when making the shape of cross section of driving shaker arm 221,222 do not formed according to design because of deviation when manufacturing, although physical quantity is not applied on vibrating elements 2, when making driving shaker arm 221,222 vibrate by being energized, as shown in Figure 11 (a), also can produce the electric charge becoming and leak and export S between detection electrode 531,534 and detection electrode 532,533.
In addition, in vibrating elements 2, physical quantity no matter whether is had to be applied on vibrating elements 2, under make driving shaker arm 221,222 carry out the state vibrated by being energized, as shown in Figure 11 (b), all can produce between electrode for adjusting 551,552 and electrode for adjusting 553,554 and become the electric charge that adjustment exports T.
Export S owing to leaking and regulate with exporting T opposite polarity each other, the absolute value therefore by adjustment being exported T is set to equal with leaking the absolute value exporting S, thus the offset output of vibrating elements 2 can be set to zero.
Relative to this, although as mentioned above, can regulate transducer output by removing a part for electrode for adjusting 551,552, but if the absolute value leaking and export S now cannot be estimated exactly, so certainly the offset output of vibrating elements 2 cannot be set to zero.Therefore, in the present invention, by possessing the additional vibrating reed 59 described hereinafter, thus this leakage output S can be estimated exactly.
Above, although be illustrated oscillator 1 and vibrating elements 2, but the form of the vibrating reed 58 of above-mentioned vibrating elements 2 is not defined to the form of so-called H type tuning fork, such as, also can be the various forms such as double-T shaped, double-legged tuning fork, tripod tuning fork, interdigitated electrode structure, orthogonal type, prismatic.
In addition, the number of driving shaker arm, detection shaker arm and adjustment shaker arm also can be respectively more than 1 or 3.In addition, driving shaker arm also can double as detection shaker arm.
In addition, also adjustment shaker arm can not be set.
In addition, as long as driving shaker arm can be made to vibrate by being energized, then the number, position, shape, size etc. of driving electrode are not defined to previously described execution mode.
In addition, as long as can carry out electro-detection to the vibration of the driving shaker arm caused because being applied with physical quantity, then the number, position, shape, size etc. of detection electrode are not defined to previously described execution mode.
In addition, as long as the electric charge that can produce the driving vibration along with adjustment shaker arm exports, then the number, position, shape, size etc. of electrode for adjusting are not defined to previously described execution mode.
IC chip
IC chip 3 shown in Fig. 1 and Fig. 2 is for having the function that drives previously described vibrating elements 2 and the electronic unit to the function that the output (transducer output) from vibrating elements 2 detects.
Although not shown, this IC chip 3 possesses the drive circuit driven vibrating elements 2 and the testing circuit detected the output from vibrating elements 2.
In addition, IC chip 3 is provided with multiple splicing ear 31.
Packaging part
As shown in Figures 1 and 2, packaging part 4 possesses: base component 41 (pedestal), and it has recess open upward; Cover 42 (lid), it is set to the recess covering this base component 41.Thus, between base component 41 and cover 42, be formed with the inner space of receiving vibrating elements 2 and IC chip 3.
Base component 41 is made up of flat plate body 411 (plate portion) and the framework 412 (frame portion) that engages with the peripheral part of the upper surface of plate body 411.
This base component 41 is such as made up of aluminum oxide sintered body, crystal, glass etc.
As shown in Figure 1, on the upper surface (surface of the side that tegmentum parts 42 cover) of base component 41, by such as comprising the such attachment 81 of adhesive that epoxy resin, acrylic resin etc. form, and be bonded to the support 25 of previously described vibrating elements 2.Thus, vibrating elements 2 is supported relative to base component 41, is fixed.
In addition, on the upper surface of base component 41, by such as comprising the such attachment 82 of adhesive that epoxy resin, acrylic resin etc. form, and previously described IC chip 3 is bonded to.Thus, IC chip 3 is supported relative to base component 41, is fixed.
And, as shown in Figures 1 and 2, the upper surface of base component 41 is provided with multiple internal terminal 71 and multiple internal terminal 72.
Multiple internal terminal 71 is electrically connected with the terminal 57a ~ 57f of previously described vibrating elements 2 by the distribution be such as made up of closing line.
The plurality of internal terminal 71 is electrically connected with multiple internal terminal 72 by not shown distribution.
In addition, multiple internal terminal 72 is electrically connected with multiple splicing ears 31 of previously described IC chip 3 by the distribution be such as made up of closing line.
On the other hand, as shown in Figure 1, the lower surface (bottom surface of packaging part 4) of base component 41 is provided with, implements the multiple outside terminals 73 used when installing to the equipment (external equipment) being assembled with oscillator 1.
The plurality of outside terminal 73 is electrically connected with previously described internal terminal 72 by not shown inside distribution.Thus, IC chip 3 is electrically connected with multiple outside terminal 73.
Each internal terminal 71,72 like this and each outside terminal 73 are formed by such as the tunicle of nickel (Ni), gold (Au) etc. being laminated to the metal tunicle that the metal layers such as tungsten (W) are formed by galvanoplastic etc. respectively.
This base component 41 is bonded to cover 42 airtightly.Thus, be hermetically sealed in packaging part 4.
This cover 42 such as by the material identical with base component 41, or, be made up of metals such as Kovar alloy (kovar), 42 alloys, stainless steels.
Joint method as base component 41 and cover 42 is not particularly limited, and such as, can use the adhesive by being made up of solder, cured resin etc. and the joint method implemented, the welding methods such as seam weldering, laser welding.
Involved joint by under reduced pressure or under inert gas atmosphere implementing, thus can will remain decompression state or inert gas inclosure state in packaging part 4.
The vibrating elements 2 that oscillator 1 involved by execution mode as described above possesses, can play excellent detection sensitivity simply and reliably.
In addition, according to the oscillator 1 possessing vibrating elements 2 as above, there is excellent detection sensitivity.
Oscillator 1 (vibrating elements 2) as described above can be assembled in various electronic equipment and use.
According to this electronic equipment, can make excellent in reliability.
< oscillator >
Next, the oscillator possessing vibrating elements of the present invention is described.
Figure 12 represents the medelling cutaway view possessing the Sketch of the oscillator of the execution mode of vibrating elements of the present invention.
The packaging part 4 that oscillator 1A has the vibrating elements 2 shown in Fig. 3 and receives this vibrating elements 2.
Packaging part 4 possesses: base component 41 (pedestal), and it has recess open upward; Cover 42 (lid), it is set to the recess covering this base component 41.Thus, between base component 41 and cover 42, be formed with the inner space of receiving vibrating elements 2.
Base component 41 is made up of flat plate body 411 (plate portion) and the framework 412 (frame portion) that engages with the peripheral part of the upper surface of plate body 411.
As shown in figure 12, on the upper surface (surface of the side that tegmentum parts 42 cover) of base component 41, by such as comprising the such attachment 81 of adhesive that epoxy resin, acrylic resin etc. form, and be bonded to the support 25 of vibrating elements 2 mentioned above.Thus, vibrating elements 2 is supported relative to base component 41, is fixed.
And, the upper surface of base component 41 is provided with multiple internal terminal 71 and multiple internal terminal 72.
Multiple internal terminal 71 is electrically connected with the terminal 57a ~ 57f of previously described vibrating elements 2 by the distribution be such as made up of closing line.
The plurality of internal terminal 71 is electrically connected with multiple internal terminal 72 by not shown distribution.
According to the oscillator 1A possessing vibrating elements 2 as described above, can suppress the deterioration of the characteristics such as the sensitivity produced along with the frequency change caused by variations in temperature, and sensitivity can be made to improve further.
Electronic equipment
At this, according to Figure 13 to Figure 15, an example of the electronic equipment possessing vibrating elements of the present invention is described in detail.
Figure 13 represents the stereogram possessing the structure of the personal computer of the pocket (or notebook type) of vibrating elements of the present invention.
In the figure, personal computer 1100 is made up of with the display unit 1106 possessing display part 100 main part 1104 possessing keyboard 1102, and display unit 1106 is can be supported relative to the mode that main part 1104 carries out rotating by hinge arrangement portion.
The previously described oscillator 1 playing function as gyrosensor is built-in with in such personal computer 1100.
Figure 14 represents the stereogram possessing the structure of the mobile phone (also comprising PHS:Personal Handy-phone System, personal handyphone system) of vibrating elements of the present invention.
In the figure, mobile phone 1200 possesses multiple action button 1202, receiver 1204 and microphone 1206, and is configured with display part 100 between action button 1202 and receiver 1204.
The previously described oscillator 1 playing function as gyrosensor is built-in with in such mobile phone 1200.
Figure 15 represents the stereogram possessing the structure of the digital camera of vibrating elements of the present invention.In addition, the connection between external equipment is also illustrated in the figure simply.
At this, common camera makes silver salt photographic film photosensitive by the optical imagery of subject, relative to this, digital camera 1300 carries out opto-electronic conversion by imaging apparatuss such as CCD (Charge Coupled Device: charge coupled device) to the optical imagery of subject, thus generates image pickup signal (picture signal).
The back side of the housing (main body) 1302 of digital camera 1300 is provided with display part, and the structure that the image pickup signal become according to CCD and carrying out shows, display part plays function as subject is shown as the view finder of electronic image.
In addition, the face side (in figure rear side) of housing 1302 is provided with the light receiving unit 1304 comprising optical mirror slip (image pickup optical system) and CCD etc.
When cameraman confirms the subject image be displayed on display part, and when pressing shutter release button 1306, the image pickup signal of the CCD on this time point will be transmitted and will be stored in memory 1308.
In addition, in this digital camera 1300, the input and output terminal 1314 of signal of video signal lead-out terminal 1312 and data communication is provided with in the side of housing 1302.And, as shown in the figure, on signal of video signal lead-out terminal 1312, be connected with video monitor 1430 as required, data communication with input and output terminal 1314 on connect personal computer 1440.And, become following structure, that is, according to predetermined operation, thus the image pickup signal be stored in memory 1308 is exported to video monitor 1430 or personal computer 1440.
The previously described oscillator 1 (vibrating elements 2) playing function as gyrosensor is built-in with in such digital camera 1300.
In addition, electronic equipment of the present invention is except being applied to the personal computer (portable personal computer) of Figure 13, the mobile phone of Figure 14, beyond in the digital camera of Figure 15, can also be applied to according to the kind of electronic equipment in following device, such as, body gesture checkout gear, positioner, head mounted display, ink jet type blowoff (such as, ink-jet printer), laptop PC, television set, video camera, video tape recorder, guider, beep-pager, electronic notebook (also comprising the product being accompanied with communication function), electronic dictionary, desk-top electronic calculator, electronic game station, game console, word processor, work station, video telephone, prevent usurping video-frequency monitor, electronics binoculars, POS (Point of Sale: point of sale) terminal, Medical Devices (such as, electrothermometer, sphygmomanometer, blood-glucose meter, detecting ECG device, diagnostic ultrasound equipment, fujinon electronic video endoscope), fish finder, various sensing equipment, metrical instrument class (such as, Che Liang, aircraft, the metrical instrument class of boats and ships), flight simulator etc.
Moving body
Figure 16 represents the stereogram as the structure of the automobile of an example of moving body of the present invention.
In the figure, in the electronic control unit 2108 that tire 2109 is controlled, be built-in with oscillator 1 (vibrating elements 2), and be equipped in vehicle body 2107.
The oscillator possessing vibrating reed involved in the present invention or oscillator is equipped with in automobile 2106, and intelligent keyless entry can be widely used in, engine anti-theft locking system, auto-navigation system, air conditioning for automobiles, anti-lock braking system (ABS:Antilock Brake System), air bag, system for monitoring pressure in tyre (TPMS:Tire Pressure Monitoring System), engine controller, the battery monitor of hybrid vehicle or electric automobile, in the electronic control unit (ECU:electronic control unit) 2108 of body gesture control system etc.
According to moving body as described above, there is excellent reliability.
Be illustrated vibrating elements of the present invention, oscillator, oscillator, electronic equipment and moving body according to illustrated execution mode although above, the present invention is not defined to this.
In addition, in vibrating elements of the present invention, oscillator, oscillator, electronic equipment and moving body, the structure of various piece can be replaced into the arbitrary structure with said function, and also can add arbitrary structure.
In addition, the arbitrary structure of each execution mode previously described also can combine by vibrating elements of the present invention, oscillator, oscillator, electronic equipment and moving body each other.
Symbol description
1 ... oscillator; 1A ... oscillator; 2 ... vibrating elements; 3 ... IC chip; 4 ... packaging part; 9 ... wafer; 21 ... base portion; 25 ... support; 31 ... splicing ear; 41 ... base component; 42 ... cover; 51 ... driving electrode group; 52 ... driving electrode group; 53 ... detection electrode group; 54 ... detection electrode group; 55 ... electrode for adjusting group; 56 ... electrode for adjusting group; 57a ... terminal; 57b ... terminal; 57c ... terminal; 57d ... terminal; 57e ... terminal; 57f ... terminal; 58 ... vibrating reed; 71 ... internal terminal; 72 ... internal terminal; 73 ... outside terminal; 81 ... attachment; 82 ... attachment; 100 ... display part; 221 ... driving shaker arm; 222 ... driving shaker arm; 231 ... detection shaker arm; 232 ... detection shaker arm; 241 ... adjustment shaker arm; 242 ... adjustment shaker arm; 261,262,263,264 ... linking part; 411 ... plate body; 412 ... framework; 511 ... driving electrode; 512 ... driving electrode; 513 ... driving electrode; 514 ... driving electrode; 531 ... detection electrode; 532 ... detection electrode; 533 ... detection electrode; 534 ... detection electrode; 551 ... electrode for adjusting; 552 ... electrode for adjusting; 553 ... electrode for adjusting; 554 ... electrode for adjusting; 591 ... driving electrode; 592 ... driving electrode; 593 ... driving electrode; 594 ... detection electrode; 595 ... detection electrode; 1100 ... personal computer; 1102 ... keyboard; 1104 ... main part; 1106 ... display unit; 1200 ... mobile phone; 1202 ... action button; 1204 ... receiver; 1206 ... microphone; 1300 ... digital camera; 1302 ... housing; 1304 ... light receiving unit; 1306 ... shutter release button; 1308 ... memory; 1312 ... signal of video signal lead-out terminal; 1314 ... input and output terminal; 1430 ... video monitor; 1440 ... personal computer; 2106 ... automobile; 2107 ... vehicle body; 2108 ... electronic control unit; 2109 ... tire; A1 ... arrow mark; A2 ... arrow mark; B1 ... arrow mark; B2 ... arrow mark; C1 ... arrow mark; C2 ... arrow mark; D1 ... arrow mark; D2 ... arrow mark; S ... leak and export; T ... adjustment exports.
Claims (7)
1. a vibrating elements, is characterized in that,
There is drive pattern, on the direction orthogonal with the direction of vibration under this drive pattern, carry out the first detecting pattern of vibrating and the second detecting pattern,
When transverse axis being set to atmosphere temperature and the longitudinal axis being set to the change of frequency, in the frequency-temperature characteristic curve of the change of the frequency that the expression under each pattern described is caused by the change of temperature, the summit temperature of the described frequency-temperature characteristic curve under described drive pattern is set to Ta [DEG C], the summit temperature of the described frequency-temperature characteristic curve under described first detecting pattern is set to Tb [DEG C], and when the summit temperature of the described frequency-temperature characteristic curve under described second detecting pattern is set to Tc [DEG C], described Ta is lower than described Tb and described Tc, or, described Ta is higher than described Tb and described Tc.
2. vibrating elements as claimed in claim 1, wherein,
Resonance frequency under described drive pattern is being set to fa, the resonance frequency under described first detecting pattern is set to fb, and when the resonance frequency under described second detecting pattern is set to fc, described fa is between described fb and described fc.
3. vibrating elements as claimed in claim 1 or 2, possesses:
Base portion;
A pair driving shaker arm, it extends from described base portion;
A pair detection shaker arm, it extends from described base portion to the direction contrary with described a pair driving shaker arm.
4. an oscillator, is characterized in that, possesses:
Vibrating elements as claimed any one in claims 1 to 3;
Packaging part, it is accommodated with described vibrating elements.
5. an oscillator, is characterized in that, possesses:
Vibrating elements as claimed any one in claims 1 to 3;
Oscillating circuit, it is electrically connected with described vibrating elements.
6. an electronic equipment, is characterized in that,
Possesses the vibrating elements according to any one of claims 1 to 3.
7. a moving body, is characterized in that,
Possesses the vibrating elements according to any one of claims 1 to 3.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2013224053A JP6264839B2 (en) | 2013-10-29 | 2013-10-29 | Vibration element, vibrator, oscillator, electronic device, and moving object |
| JP2013-224053 | 2013-10-29 |
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| JP6292229B2 (en) * | 2013-05-13 | 2018-03-14 | 株式会社村田製作所 | Vibration device |
| SG11201508861WA (en) | 2013-05-13 | 2015-11-27 | Murata Manufacturing Co | Vibrating device |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6264839B2 (en) | 2018-01-24 |
| CN104579225B (en) | 2018-05-15 |
| JP2015087148A (en) | 2015-05-07 |
| US9246470B2 (en) | 2016-01-26 |
| US20150116050A1 (en) | 2015-04-30 |
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