CN104549589B - A kind of three substrate microballoon screening chip and usings method - Google Patents

A kind of three substrate microballoon screening chip and usings method Download PDF

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CN104549589B
CN104549589B CN201510027291.8A CN201510027291A CN104549589B CN 104549589 B CN104549589 B CN 104549589B CN 201510027291 A CN201510027291 A CN 201510027291A CN 104549589 B CN104549589 B CN 104549589B
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screening
chip
micro
port
passage
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CN104549589A (en
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徐文峰
廖晓玲
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Chongqing University of Science and Technology
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Chongqing University of Science and Technology
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Abstract

The invention provides a kind of three substrate microballoon screening chips, it is mainly by comprising three substrate hard sheets, two chip compositions up and down of three layer photoetching glue, it is characterized in that: have the screening passage of two zigzags, symmetrical 90-degree right-angle turning at upper chip, each of every bar grizzl(e)y gating road is processed with a micro-port of screening to the right angle place in passage. On lower chip, there are rectangular A collector unit, B collector unit, 3 collector units of C collector unit, respectively the micro-port of screening in 3 sections of passages in two bar grizzl(e)y gating roads of corresponding upper slice chip and 3 sections. Invention also provides the using method of chip of the present invention. Beneficial effect of the present invention be can be directly and automatic liquid adding device be used in conjunction, in liquid situation, screen, simple to operate, efficiency is high, easy to make simple, saves use cost.

Description

A kind of three substrate microballoon screening chip and usings method
Technical field
The present invention relates to a kind of novel microballoon screening chip, from using, is a kind of one three substrate microballoon screening chip and usings method of material screening.
Background technology
Microflow control technique is in the microscale experiment chamber technology growing up in recent years, is mainly used in the fields such as biomedical and chemical monitoring, apply in the preparation of materialogy and application aspect research seldom. At present, along with materialogy is being received the technical development in micro-field, materialogy to receive slight grain research and use more and morely, particularly other particulate preparation and screening of micro/nano level, is more concerned by people. In the synthetic preparation of many composite particles, be to utilize liquid as carrier mostly. The complex microsphere of synthetic micro/nano level is also to form in solution. So how screen rapidly the qualified microballoon of the size that meets the requirements in solution, be not only the problem that current material preparation process aspect need to solve. It is also simultaneously a direction of going in the engineering field of the microflow control technique preparation that applies to microballoon.
Therefore, need to develop a kind of microballoon screening chip of microflow control technique of specialty, for the preparation aspect of material engineering.
Summary of the invention
Technical scheme of the present invention is: a kind of three substrate microballoon screening chips, it is mainly by comprising three substrate hard sheets, two chip compositions up and down of three layer photoetching glue, it is characterized in that: the one end at upper chip has sample holes, one end, main channel of long 10mm is communicated with sample holes, the other end is divided into Liang Tiao subchannel, both sides, every subchannel, separately UNICOM one bar grizzl(e)y gating road. Continuously zigzag, the symmetrical 90-degree right-angle turning to the inside separately in two bar grizzl(e)y gating roads, finally import together at the medium line of main channel, and the passage of growing by 5mm is connected with sample outlet hole. The arrangement of passage is convenient in design.
Each of every bar grizzl(e)y gating road is processed with a micro-port of screening to the right angle place in passage, the micro-port of each screening connects a little collecting pit; Little collecting pit, communicates with the storage pool of lower chip by the vertical through hole at center, pond. On lower chip, there are rectangular A collector unit, B collector unit, 3 collector units of C collector unit, respectively the little collecting pit in 3 sections of passages in two bar grizzl(e)y gating roads of corresponding upper slice chip and 3 sections. Employing gravity flows, and collects the microballoon of screening. Each collector unit forms a pressure regulation cavity at upper and lower 2 layers of substrate hard sheet, and a breather pipe that penetrates into upper slice chip surface is installed at pressure regulation cavity center position. The purpose of design of pressure regulation cavity and breather pipe is to provide negative pressure or malleation.
The pressure regulation cavity both sides of A collector unit, B collector unit are processed with lower than pressure regulation cavity, the storage pool that takes the shape of the letter U under the little collecting pit in corresponding two bar grizzl(e)y gating roads, and the storage pool of each U-shaped is the centre bore of 2 little collecting pits then. The object of the storage pool of U-shaped is to dwindle storage pool, relatively expands pressure regulation cavity size ratio with it, is beneficial to pressure regulation, reduces memory space simultaneously, alleviates the pressure of storage pool sample output passage. There are respectively separately a storage pool sample output passage and storage pool to portal in the rectangle both sides of A collector unit, B collector unit. Be convenient to discharge fast screening microballoon, raise the efficiency, reduce passage circulating pressure. In the middle of the rectangle pressure regulation cavity of C collector unit, be one higher than the round platform of storage pool, round platform purpose of design is also relatively to expand pressure regulation cavity size ratio with it, is beneficial to pressure regulation, reduces memory space simultaneously, alleviates the pressure of storage pool sample output passage. Only there are a storage pool sample output passage and a storage pool to portal in rectangle one side.
In technique scheme, described upper slice chip is that photoresist that even 2mm is thick is after mask plate prints out passage, surface channel is counter being attached on a slice substrate hard sheet upward, and airtight a slice substrate hard sheet that is pasted with on photoresist seals up the passage of a chip. Design is like this to be convenient to reverse mould batch production upper slice chip. Substrate hard sheet has through hole, then attaches one deck photoresist in the above, the breather pipe on fixing hole and storage pool portal and sample outlet hole on tube connector. Object is to utilize photoresist elasticity, and sealed hair tubule is installed. Go up like this chip, just have bottom a slice substrate hard sheet, last layer is photoresist layer, then is a slice substrate hard sheet, then is one deck photoresist layer. Described lower chip is a slice substrate hard sheet, and last layer is photoresist layer. Thus, three substrate hard sheets of the present invention, two chip compositions up and down of three layer photoetching glue. Substrate hard sheet comprises silicon chip, sheet glass, sheet metal, plastics composite sheet.
In technique scheme, the each single channel of described screening passage has 14 90 ° of right-angle turnings above, in pairs, the long 6mm in turning, wide 2mm. Quantity and length, ensured the efficiency of screening. Screen before micro-port in each of screening passage, be all similar to the unequal obstruction wall of 5 length thicknesses of 45 ° of fan-shaped distributions; Stop the covering of the fan opening of wall towards the micro-port of screening, the other end concentrates on the right angle place outside passage of the screening passage on screening micro-port opposite; A, the b, c, d, the e5 bar that stop wall, a, d are the short obstruction walls of length, the micro-port of close screening distributes; B, c, e are the obstruction walls that length is long, these three obstruction walls remove e and are connected with screening channel side wall towards one end of the micro-port of screening, b, c, all keep the width of a micro-port size of screening, the other end, long b, c, e to stop the wall screening channel side wall of all ining succession with screening channel side wall; The opening that a, b, c, d, e stop between wall keeps a width that screens micro-port size. The reagent and the layout that stop wall, mainly play the object that causes disturbance laminar flow, is conducive to the screening of microballoon in fluid.
In technique scheme, described lower chip A collector unit, B collector unit, C collector unit be the size of the micro-port of screening of 3 sections of passages in two bar grizzl(e)y gating roads of corresponding upper slice chip respectively, in every section, be consistent unified, the micro-port size of screening difference between 3 sections, ascending arrangement; The width that screens micro-port has 3 specifications at each three substrate chips, and size is between 5 μ m ~ 300 μ m. For example: the micro-port dimensions of screening between 3 sections of two bar grizzl(e)y gating roads of three substrate chips: 300 μ m, 200 μ m, 100 μ m; Or 80 μ m, 50 μ m, 30 μ m; Or 20 μ m, 10 μ m, 5 μ m. The channel depth of each three substrate chips is consistent, so that the batch production of the present invention's three substrate chips.
In technique scheme, the using method of described a kind of three substrate microballoon screening chips, operating procedure is as follows: according to screening microspherulite diameter interval, select the chip of the dimensions of the micro-port of screening, mix into a different 2-3 chip portfolio, first use the large chip of the micro-port size of screening, according to the micro-port size of screening, chip is designated as chip one, is followed successively by chip two, chip three.
When use, first close whole storage pools and portal, open breather pipe air blowing pressurization, sample outlet hole is opened, and deionized water is squeezed into from sample holes, adjusts breather pipe blow gas pressure, until sample outlet hole has deionized water to flow out, close breather pipe and stop blowing, the deionized water of sample holes is replaced by sample solution to be screened, then open whole storage pools and portal, the flow velocity portalling according to storage pool, adjust again breather pipe blow gas pressure, keep flow velocity, uninterruptedly screen.
The storage pool garbled sample for the first time that portals repeats to screen 2 times again on this chip. Last storage pool between 3 sections of two bar grizzl(e)y gating roads portals and collects the microballoon obtaining, chip one is portalled and collects the microballoon of the interval particle diameter of difference obtaining from the storage pool between 3 sections, requirement between according to screening area, according to the method described above, on chip two, screen 3 times more respectively, on chip three, screen 3 times more successively; Finally obtain the microballoon in target grain size interval at the sample outlet hole 11 of chip three.
The technology of the present invention feature is that chip manufacturing is convenient, simple to operate, professional stronger.
Compared with existing screening, the present invention has following beneficial effect: (1) can be directly and automatic liquid adding device be used in conjunction, in liquid situation, screen; (2) simple to operate, efficiency is high; (2) easy to make simple, save use cost.
Brief description of the drawings
Fig. 1 is the schematic top plan view of upper slice chip of the present invention.
Fig. 2 is the schematic top plan view of lower chip of the present invention.
Fig. 3 is the local enlarged diagram that analyse and observe at fluctuating plate chip A-A of the present invention place.
Fig. 4 is the local enlarged diagram that the screening passage of upper slice chip of the present invention is overlooked.
Fig. 5 is that the bottom that the screening passage of upper slice chip of the present invention is analysed and observe stops wall schematic diagram.
Fig. 6 is 5 obstruction wall arrangement position schematic diagrames of upper slice chip of the present invention.
In figure: 1. go up a chip; 2. sample holes; 3. main channel; 4. subchannel; 5. screening passage; 6. little collecting pit; 7. the micro-port of screening; 8.A collector unit; 9. storage pool sample output passage; 10. storage pool portals; 11. sample outlet holes; 12.C collector unit; 13.B collector unit; 14. times sheet chips; 15. pressure regulation cavitys; 16. storage pools; 17. breather pipes; 18. stop wall.
Detailed description of the invention
Further the present invention is illustrated below in conjunction with drawings and Examples.
Embodiment mono-
Referring to figs. 1 through the shape and structure in Fig. 6, the chip one of combination, wall scroll screening passage has 7 pairs 90 ° of right-angle turnings, the long 6mm in turning, wide 2mm, dark 100 μ m. The micro-port dimensions of screening between 3 sections of two bar grizzl(e)y gating roads: 40 μ m, 30 μ m, 20 μ m.
Chip two, wall scroll screening passage has 7 pairs 90 ° of right-angle turnings, the long 6mm in turning, wide 2mm, dark 60 μ m. The micro-port dimensions of screening between 3 sections of two bar grizzl(e)y gating roads: 20 μ m, 10 μ m, 5 μ m.
Operating procedure is as follows: according to screening microspherulite diameter interval, select the chip of the dimensions of the micro-port 7 of the different screening of collocation. First use the chip one that size is large.
First close whole storage pools and portal 10, open breather pipe 17 air blowing pressurizations, sample outlet hole 11, open deionized water is squeezed into from sample holes 2, adjust breather pipe 17 blow gas pressure, until sample outlet hole 11 has deionized water to flow out, close breather pipe 17 and stop blowing, the deionized water of sample holes 2 is replaced by sample solution to be screened, then opens whole storage pools and portal 10. According to portal 10 flow velocity of storage pool, then adjust breather pipe 17 blow gas pressure, keep flow velocity, uninterruptedly screen.
The storage pool 10 garbled samples for the first time that portal repeat to screen 2 times again on this chip. 10 collections of portalling of last storage pool between 3 sections of two bar grizzl(e)y gating roads obtain the microballoon in target grain size interval. Chip one, from the microballoon of the interval particle diameter of difference that 10 collections obtain that portals of the storage pool between 3 sections, then according to requirement between screening area, according to the method described above, is screened 3 times respectively on chip two again.
Sample outlet hole 11 at chip two obtains: 20 μ m ~ 40 μ m, the microballoon of 20 μ m ~ 30 μ m particle size interval; Portal and 10 obtain at 3 sections of storage pools: below 20 μ m, below 10 μ m, the microballoon of the following particle size interval of 5 μ m.
Embodiment bis-
Referring to figs. 1 through the shape and structure in Fig. 6, the chip one of combination, wall scroll screening passage has 8 pairs 90 ° of right-angle turnings, the long 6mm in turning, wide 2mm, dark 0.80mm. The micro-port dimensions of screening between 3 sections of two bar grizzl(e)y gating roads: 300 μ m, 200 μ m, 100 μ m.
Chip two, wall scroll screening passage has 8 pairs 90 ° of right-angle turnings, the long 6mm in turning, wide 2mm, dark 0.50mm. The micro-port dimensions of screening between 3 sections of two bar grizzl(e)y gating roads: 100 μ m, 90 μ m, 80 μ m.
Method of operating is pressed embodiment mono-, obtains at the sample outlet hole 11 of chip two: 100 μ m ~ 300 μ m, the microballoon of 100 μ m ~ 200 μ m particle size interval.
Embodiment tri-
Referring to figs. 1 through the shape and structure in Fig. 6, the chip one of combination, wall scroll screening passage has 10 pairs 90 ° of right-angle turnings, the long 6mm in turning, wide 2mm, dark 150 μ m. The micro-port dimensions of screening between 3 sections of two bar grizzl(e)y gating roads: 50 μ m, 40 μ m, 30 μ m.
The chip one of combination, wall scroll screening passage has 10 pairs 90 ° of right-angle turnings, the long 6mm in turning, wide 2mm, dark 60 μ m. The micro-port dimensions of screening between 3 sections of two bar grizzl(e)y gating roads: 15 μ m, 10 μ m, 5 μ m.
Method of operating is pressed embodiment mono-, obtains at the sample outlet hole 11 of chip two: 15 μ m ~ 50 μ m, 15 μ m ~ 40 μ m, the microballoon of 15 μ m ~ 30 μ m particle size interval.

Claims (5)

1. three substrate microballoon screening chips, it is mainly by comprising three substrate hard sheets, two up and down of three layer photoetching glueChip composition, is characterized in that: have sample holes (2) in one end of upper chip (1), one end, main channel (3) of long 10mm andSample holes (2) is communicated with, and the other end is divided into Liang Tiao subchannel, both sides (4), and every subchannel (4) is UNICOM one bar grizzl(e)y gating road separately(5); Continuously zigzag, the symmetrical 90-degree right-angle turning to the inside separately in two bar grizzl(e)y gating roads (5), finally in main channel (3)Top-stitching imports together, and the passage of growing by 5mm is connected with sample outlet hole (11); Each of every bar grizzl(e)y gating road (5) is to passageInterior right angle place is all processed with a micro-port of screening (7), and the micro-port of each screening (7) connects a little collecting pit (6); LittleCollecting pit (6), communicates by the vertical through hole at center, pond and the storage pool (16) of lower chip (14); On lower chip (14)Have rectangular A collector unit (8), B collector unit (13), (12) 3 collector units of C collector unit, respectively corresponding upper sliceLittle collecting pit (6) in 3 sections of passages in two bar grizzl(e)y gating roads (5) of chip (1) and 3 sections; Each collector unit is at upper and lower 2 layers of baseEnd hard sheet forms a pressure regulation cavity (15), is provided with one penetrates into upper slice chip list in pressure regulation cavity (15) centreThe breather pipe (17) of face; Pressure regulation cavity (15) both sides of A collector unit (8), B collector unit (13), at corresponding two bar grizzl(e)y gatingsUnder the little collecting pit (6) in road (5), be processed with lower than pressure regulation cavity (15), the storage pool (16) that takes the shape of the letter U, each U-shapedStorage pool (16) is the centre bore of 2 little collecting pits (6) then; Rectangle both sides at A collector unit (8), B collector unit (13) are eachFrom having respectively a storage pool sample output passage (9) and storage pool portal (10); The rectangle pressure regulation cavity (15) of C collector unit (12)Centre be one higher than the round platform of storage pool (16), only have a storage pool sample output passage (9) and one in rectangle one sideStorage pool portal (10).
2. a kind of three substrate microballoon screening chips according to claim 1, is characterized in that: described upper slice chip (1)Above photoresist above a slice substrate hard sheet, airtight stickup has a slice substrate hard sheet of through hole, the substrate hard of sealingSheet attaches one deck photoresist in the above, the breather pipe (17) in fixing perforate; Substrate hard sheet comprises silicon chip, sheet glass, metalSheet, plastics composite sheet.
3. a kind of three substrate microballoon screening chips according to claim 1, is characterized in that: described screening passage (5)Each single channel has 7 pairs of above 90 ° of right-angle turnings, the long 6mm in turning, wide 2mm; In each screening of screening passage (5)Micro-port (7), is all similar to 45 ° of fan-shaped distribution unequal obstruction walls of 5 length thicknesses (18) above; Stop the covering of the fan of wall (18)Opening is towards the micro-port of screening (7), the other end concentrate on screening micro-port (7) opposite screening passage (5) outside passageRight angle place; Five of a, b, c, d, the e of obstruction wall (18), a, d are the short obstruction walls (18) of length, the micro-port of close screening (7)Distribute; B, c, e are the obstruction walls (18) that length is long, and these three obstruction walls (18) remove e and screening towards one end of the micro-port of screening (7)Passage (5) sidewall is connected, and b, c, all screens the width of micro-port (7) size with one of screening passage (5) sidewall maintenance, anotherEnd, long b, c, e obstruction wall (18) are all ined succession and are screened passage (5) sidewall; The opening that a, b, c, d, e stop between wall (18) is protectedHold the width of screening micro-port (7) size.
4. a kind of three substrate microballoon screening chips according to claim 1, is characterized in that: described lower chip (14) ACollector unit (8), B collector unit (13), C collector unit (12) be two bar grizzl(e)y gating roads (5) of corresponding upper slice chip (1) respectivelyThe size of the micro-port of screening (7) of 3 sections of passages, in every section, be consistent unified, the micro-port of screening (7) between 3 sectionsSize difference, ascending arrangement; The width that screens micro-port (7) has 3 specifications at each three substrate chips, size be 5 μ m ~Between 300 μ m; The channel depth of each three substrate chips is consistent.
5. according to the using method of a kind of three substrate microballoon screening chips described in claim 1-4 any one, its feature existsIn: operating procedure is as follows: according to screening microspherulite diameter interval, select the chip of the dimensions of the micro-port of screening (7), mix intoA different 2-3 chip portfolio, first uses the large chip of screening micro-port (7) size, is designated as chip one, is followed successively by chipTwo, chip three;
First close whole storage pools and portal (10), open breather pipe (17) air blowing pressurization, sample outlet hole (11) is opened, by deionized waterSqueeze into from sample holes (2), adjust breather pipe (17) blow gas pressure, until sample outlet hole (11) has deionized water to flow out, close ventilationPipe (17) stops blowing, and the deionized water of sample holes (2) is replaced by sample solution to be screened, then opens whole storage poolsPortal (10), according to the storage pool flow velocity of (10) that portals, then adjust breather pipe (17) blow gas pressure, keep flow velocity, between carrying out notDisconnected screening;
Storage pool (10) the garbled sample for the first time that portals repeats to screen 2 times again on this chip; Finally two screeningsStorage pool between 3 sections of passage portal (10) collect the microballoon obtaining, by chip one from the storage pool between 3 sections portal (10)The microballoon of the interval particle diameter of difference that collection obtains, then according to requirement between screening area, according to the method described above, respectively again on chip twoScreen 3 times, on chip three, screen 3 times more successively; Finally obtain the micro-of target grain size interval at the sample outlet hole (11) of chip threeBall.
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CN108753596B (en) * 2018-04-09 2022-05-17 暨南大学 Microchamber microfluidic system for detecting microorganism growth images
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CN1265199C (en) * 2004-07-13 2006-07-19 东南大学 Micro fluidic biological chip based on micro balls
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