CN104515466A - Wave surface reference source capable of enlarging detection range of optical fiber diffraction interferometer - Google Patents
Wave surface reference source capable of enlarging detection range of optical fiber diffraction interferometer Download PDFInfo
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- CN104515466A CN104515466A CN201410787550.2A CN201410787550A CN104515466A CN 104515466 A CN104515466 A CN 104515466A CN 201410787550 A CN201410787550 A CN 201410787550A CN 104515466 A CN104515466 A CN 104515466A
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- optical fiber
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Abstract
The invention relates to a wave surface reference source capable of enlarging detection range of an optical fiber diffraction interferometer. The wave surface reference source comprises an optical fiber, an XY displacement table, a collimation lens, a two-layer density disk, a pentaprism, a photoelectric detector, a focusing objective lens and a micropore reflector. During optical detection, diffraction spherical waves of the optical fiber are diffracted by the collimation lens, the focusing object lens and the micropore reflector and can be used for test and as reference spherical waves of the optical fiber diffraction interferometer, so that the advantages of the optical fiber are reserved and the detection range of the optical fiber diffraction interferometer is enlarged. The optical fiber diffraction interferometer can be used in extreme-ultraviolet optical detection.
Description
Technical field
The present invention relates to and belong to optical precision detection field, particularly a kind of corrugated reference source that can improve optical fiber point-diffraction interferometer sensing range.
Background technology
Extreme ultraviolet lithography is considered to the Next Generation Lithography of most potentiality, and it uses the extreme ultraviolet of 13.5nm the graphic projection on mask to be imaged on to be coated with on the silicon chip of photoresist.In order to realize the resolution of projection optical system diffraction limit, according to Marachel criterion, the system wave aberration of requirement is less than λ/14, i.e. 1nmRMS.For the projection optical system of six catoptron compositions, this interferometer precision for detecting optical component side shape and wave aberration that the wave aberration that each optical element causes is assigned to proposes very high requirement.The approximate test spherical wave that point-diffraction interferometer uses pinhole difiration to produce, as with reference to spherical wave, avoids the dependence of conventional dry interferometer to reference element surface figure accuracy, can meet the requirement of extreme ultraviolet photolithographic to optical detection precision.
The thought of the point-diffraction interferometer that first Raymond N.Smartt and J.Strong in 1972 propose, its standard ball ground roll adopting micropore diffraction to produce is as reference spherical wave, substantially increase the precision of interfering and detecting, but because being difficult to of existing of early stage micropore point-diffraction interferometer adds phase shifting equipment and be difficult to realize the shortcoming of micropore fine registration, greatly limit its development.Along with development and the maturation of optic fibre manufacturing technology, it is very thin that the fibre core of optical fiber can do by people, possessed the condition realizing some diffraction with optical fiber.Optical fiber add the dirigibility adding light path, be more prone to realize Beam Control, but due to optical fiber cable core can not do as so little in micro-pore diameter, all the time in micron dimension, which limits the NA of optical fiber diffraction spherical wave, and then limit the sensing range of optical component surface shape or optical system wavefront aberration, which has limited its use in large NA optical system such as extreme ultraviolet photolithographic projection optical system.
Summary of the invention
The present invention will solve the technical matters that in prior art, the sensing range of optical fiber point-diffraction interferometer is too small, provides a kind of corrugated reference source that can improve optical fiber point-diffraction interferometer sensing range.
In order to solve the problems of the technologies described above, technical scheme of the present invention is specific as follows:
A corrugated reference source for optical fiber point-diffraction interferometer sensing range can be improved, optical path direction comprises successively: optical fiber, XY displacement platform, collimation camera lens, dual-layer density dish, pentaprism, photodetector, focusing objective len and micro-voided reflective mirror;
On described micro-voided reflective mirror, the aligning of micropore is by XY displacement platform;
On described dual-layer density dish: ground floor density dish is provided with quarter wave plate and grating line direction becomes two blocks of gratings of 0 ° and 90 ° respectively with runner radial direction; Second layer density dish is provided with two polaroids, and the direction that thoroughly shakes is at 45 ° with quarter wave plate quick shaft direction respectively, and the direction that thoroughly shakes of two polaroids is vertical;
The diffractive spherical ripple that optical fiber sends can be parallel beam through collimation camera lens collimation, and focusing on the micropore of micro-voided reflective mirror through focusing objective len, diffraction goes out the approximate test spherical wave of larger NA.
In technique scheme, the interface of itself and optical fiber connector is standard FC-PC interface.
The present invention has following beneficial effect:
The corrugated reference source that can improve optical fiber point-diffraction interferometer sensing range of the present invention, micropore point diffraction advantage effectively joins in optical fiber point-diffraction interferometer by whole corrugated reference source.
The corrugated reference source that can improve optical fiber point-diffraction interferometer sensing range of the present invention, the interface of whole corrugated reference source and optical fiber connector is standard interface, and whole device has portability.
The corrugated reference source that can improve optical fiber point-diffraction interferometer sensing range of the present invention, Polarization Detection system is added in the reference source of corrugated, polarization control system is formed with the Polarization Controller on optical fiber, effectively can improve intetference-fit strengthening, and Polarization Detection system can shift out light path after having detected, namely extra error is not produced to light path.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is optical fiber point-diffraction interferometer corrugated reference source schematic diagram.
Fig. 2 is wave plate scheme of installation on dual-layer density dish.
Fig. 3 is micro-voided reflective mirror intention.
Reference numeral in figure is expressed as:
1. optical fiber; 2.XY displacement platform; 3. collimate camera lens; 4. dual-layer density dish; 5. pentaprism; 6. photodetector; 7. focusing objective len; 8. micro-voided reflective mirror; 9. through hole+through hole; 10. through hole+through hole; 11.1/4 wave plate+polaroid; 12. gratings+through hole; 13. gratings+through hole; 14.1/4 wave plate+polaroid; 16. rectangular windows; 17. micropores.
Embodiment
Invention thought of the present invention is: technical conceive of the present invention is through collimating, focusing on the standard ball ground roll being diffracted into larger NA again by the less NA spherical wave of optical fiber diffraction, and add the device that light polarization is detected wherein, to coordinate, light polarization is controlled, improve the contrast of interference fringe.
A kind of corrugated reference source that can improve optical fiber point-diffraction interferometer sensing range, first optical fiber diffraction spherical wave is collimated as parallel beam through collimation camera lens, focusing on the micropore of micro-voided reflective mirror through high-quality focusing objective len, diffraction goes out the higher approximate test spherical wave of NA.
Between the collimation camera lens and focusing objective len of above-mentioned corrugated reference source, add light beam polarization detection system, be made up of the wave plate combined on dual-layer density dish, pentaprism, photodetector.
On the micro-voided reflective mirror of above-mentioned corrugated reference source, the aligning of micropore is made up of the grating on XY displacement platform, dual-layer density dish and precision three-dimensional adjustment platform.
The interface of this corrugated reference source and optical fiber is standard FC-PC interface, and its final effect is to produce the approximate test spherical wave larger than optical fiber diffraction NA.
Below in conjunction with accompanying drawing, the present invention is described in detail.
As shown in Figure 1, optical fiber point-diffraction interferometer corrugated of the present invention reference source comprises: optical fiber 1, XY displacement platform 2, collimation camera lens 3, dual-layer density dish 4, pentaprism 5, photodetector 6, focusing objective len 7 and micro-voided reflective mirror 8.After Polarization Control and micropore alignment stage complete, dual-layer density dish 4 is reverted to through hole state, pentaprism 5 shifts out light path, optical fiber diffraction spherical wave is through collimating, focusing on the approximate test spherical wave being diffracted to larger NA again, after constructing two same corrugated reference sources, just respectively as the reference of optical fiber point-diffraction interferometer and test corrugated reference source, can detect for high-precision optical.Introduce concrete Polarization Control and micropore alignment procedures below respectively.
The wave plate scheme of installation of dual-layer density dish 4 as shown in Figure 2, what ground floor density dish was installed is that quarter wave plate and grating line direction become two blocks of gratings of 0 ° and 90 ° respectively with runner radial direction, two polaroids installed by second layer density dish, the direction that thoroughly shakes is at 45 ° with quarter wave plate quick shaft direction respectively, and the direction that thoroughly shakes of two polaroids is vertical, is realized the detection of circularly polarized light and linearly polarized light by the combination of two-layer wave plate.Array mode specific to Fig. 2: through hole+through hole 9 and through hole+through hole 10 represent respectively first and second layer of density dish is through hole; What quarter wave plate+polaroid 11 represented that ground floor density dish installs is quarter wave plate, this wave plate quick shaft direction and runner radial direction overlap, second layer density dish installs thoroughly shake direction and quarter wave plate quick shaft direction polaroid at 45 °, and thoroughly shakes direction on the right of quarter wave plate quick shaft direction; Grating+through hole 12 represent the grating line direction that ground floor density dish is installed and runner radial direction in 90 °, second layer density dish is through hole; Grating+through hole 13 represents that the grating line direction that ground floor density dish is installed becomes 0 ° with runner radial direction, and second layer density dish is through hole; The ground floor wave plate of quarter wave plate+polaroid 14 is installed identical with quarter wave plate+polaroid 11, second layer polaroid thoroughly shake direction and quarter wave plate quick shaft direction also at 45 °, but the direction that thoroughly shakes is on the quarter wave plate quick shaft direction left side.In the Polarization Control stage, the single shaft displacement platform under pentaprism 5 is used to be moved into light path, such light beam deviation after pentaprism 5 90 ° on photodetector, forward the hole that turns of dual-layer density dish 4 to detect polarization state state, to detect circular polarization state, the state of wave plate is quarter wave plate+polaroid 11, polaroid thoroughly shake direction and quarter wave plate quick shaft direction at 45 °, adjustment Polarization Controller is when there is delustring in photodetector 6, and the polarization state of light beam is circular polarization state.
Micro-voided reflective mirror 8 schematic diagram as shown in Figure 3, has the central. set quadrate of four rectangular windows, 16, four rectangular windows respectively in the surrounding of micropore 17.After the Polarization Control stage completes, pentaprism 5 is shifted out light path, collimated light beam focuses on micro-voided reflective mirror 8 through focusing objective len 7, forward dual-layer density dish 4 turns of holes to collimated light beam by grating and through hole, the selection of screen periods needs to make collimated light beam 0 order diffraction light after grating be positioned at micropore after focusing on, and ± 1 order diffraction light beam is positioned at rectangular window position after focusing objective len 7.By the light intensity after microscopic examination micropore, precision three-dimensional adjustment platform below mobile micro-voided reflective mirror 8, when the rectangular window on micro-voided reflective mirror 8 has light beam, fine setting three-dimensional adjustment platform, until middle micropore place has light beam to pass through, adjustment defocusing amount, observe until light intensity is the strongest with CCD, now micropore has been aimed at.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among the protection domain of the invention.
Claims (2)
1. can improve a corrugated reference source for optical fiber point-diffraction interferometer sensing range, it is characterized in that,
Optical path direction comprises successively: optical fiber (1), XY displacement platform (2), collimation camera lens (3), dual-layer density dish (4), pentaprism (5), photodetector (6), focusing objective len (7) and micro-voided reflective mirror (8);
The aligning of the upper micropore of described micro-voided reflective mirror (8) is by XY displacement platform (2);
Upper described dual-layer density dish (4): ground floor density dish is provided with quarter wave plate and grating line direction becomes two blocks of gratings of 0 ° and 90 ° respectively with runner radial direction; Second layer density dish is provided with two polaroids, and the direction that thoroughly shakes is at 45 ° with quarter wave plate quick shaft direction respectively, and the direction that thoroughly shakes of two polaroids is vertical;
The diffractive spherical ripple that optical fiber (1) sends can be parallel beam through collimation camera lens (3) collimation, focusing on the micropore of micro-voided reflective mirror (8) through focusing objective len (7), diffraction goes out the approximate test spherical wave of larger NA.
2. corrugated according to claim 1 reference source, is characterized in that, the interface of itself and optical fiber connector is standard FC-PC interface.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107589551A (en) * | 2017-07-24 | 2018-01-16 | 西安电子科技大学 | A kind of multiple aperture polarization imaging device and system |
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| WO2003098194A1 (en) * | 2002-05-03 | 2003-11-27 | Korea Advanced Institute Of Science And Technology | Point diffraction interferometer using inclined-section optical fiber light source and its measuring method |
| CN101183042B (en) * | 2007-12-13 | 2011-10-12 | 上海微电子装备有限公司 | Point diffraction interferometer |
| CN102288105A (en) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | Structure and detection method of optical fiber point-diffraction interferometer |
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| WO2003098194A1 (en) * | 2002-05-03 | 2003-11-27 | Korea Advanced Institute Of Science And Technology | Point diffraction interferometer using inclined-section optical fiber light source and its measuring method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107589551A (en) * | 2017-07-24 | 2018-01-16 | 西安电子科技大学 | A kind of multiple aperture polarization imaging device and system |
| CN107589551B (en) * | 2017-07-24 | 2019-07-16 | 西安电子科技大学 | A kind of multiple aperture polarization imaging device and system |
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Application publication date: 20150415 |