CN104506076B - A kind of plate-like ultrasound electric machine with two degrees of freedom - Google Patents
A kind of plate-like ultrasound electric machine with two degrees of freedom Download PDFInfo
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- CN104506076B CN104506076B CN201410700051.5A CN201410700051A CN104506076B CN 104506076 B CN104506076 B CN 104506076B CN 201410700051 A CN201410700051 A CN 201410700051A CN 104506076 B CN104506076 B CN 104506076B
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Abstract
The invention discloses a kind of plate-like ultrasound electric machine with two degrees of freedom, including upper mounting plate, friction plate, guide rail fixed plate, lower shoe and motor oscillator and precompression bringing device thereof；This ultrasound electric machine also includes Y-direction cross roller guide rail and X-direction cross roller guide rail；Described guide rail fixed plate and upper mounting plate are connected by Y-direction cross roller guide rail, it is achieved Y-direction guide effect；Described guide rail fixed plate and lower shoe are connected by X-direction cross roller guide rail, it is achieved X-direction guide effect；The upper end of described motor oscillator and precompression bringing device thereof is provided with friction plate, is withstood on friction plate by precompression；Described friction plate is bonded on upper mounting plate.By applying different pumping signals, plate-like ultrasound electric machine with two degrees of freedom oscillator can drive platform to move on X Y plane.Present invention achieves single ultrasound electric machine and be accurately positioned use on two degrees of freedom workbench.
Description
Technical field
The present invention relates to a kind of plate-like ultrasound electric machine with two degrees of freedom, belong to Precision Piezoelectric actuation technology field.
Background technology
Ultrasound electric machine utilizes the inverse piezoelectric effect of piezoelectric to convert electrical energy into mechanical energy.The generally elastic composites of the given shape that the stator of ultrasound electric machine is made up of piezoelectric ceramics and metal elastic gonosome.Piezoelectric ceramics uses the AC signal of supersonic frequency to encourage, and then motivates the mechanical vibration of same frequency in stator elastomeric, and stator output end face particle amplitude can reach several microns to tens microns even tens microns.The particle being superimposed upon on stator output end face by vibration mode produces the movement locus needed, generally elliptical orbit.Rotor (or mover) applies village by precompression and is pressed on stator, is coupled by friction, and the microcosmic elliptic motion on stator is converted into the macroscopic motion output of rotor (or mover).
Ultrasound electric machine flexible structure is various, develop into occur in that hundred kinds of different types of prototypes and product now, forms of motion according to mover divides, and can be divided into single-degree-of-freedom electric rotating machine, single-degree-of-freedom linear electric motors, rotate freely motor and many free linear electric motors more.Multivariant linear motor is studied less at present at present, it is 200710134000.0 " a kind of ultrasound electric machine with two degrees of freedom " being previously mentioned by retrieval request number, just mainly realize both direction, adverse movement, compared with this motor, the motor oscillator part of a kind of plate-like ultrasound electric machine with two degrees of freedom that the present invention is previously mentioned is thinner, it is easier to miniaturization, and only use monolithic piezoelectric ceramic sheet to excite second order to bend the vibration shape, just realize both direction, adverse movement, use scale grating and grating reading head to realize position feedback simultaneously, pass through closed loop control, improve the control accuracy of motor, it is easier to apply in accurate control field.
Summary of the invention
Technical problem to be solved:
It is contemplated that develop that a kind of volume is little, simple in construction, be easily achieved, fast response time, the single stator structure ultrasound electric machine with two degrees of freedom in accurate control field can be applied.
Technical scheme:
In order to realize function above, the invention provides a kind of plate-like ultrasound electric machine with two degrees of freedom, including upper mounting plate 3, friction plate 5, guide rail fixed plate 6, lower shoe 7 and motor oscillator and precompression bringing device 8 thereof；
Being provided with guide rail fixed plate 6 between described upper mounting plate 3 and lower shoe 7, the centre position of guide rail fixed plate 6 is a chamber, and described ultrasonic motor oscillator and precompression bringing device 8 thereof are an entirety, are arranged in this chamber, and are arranged on lower shoe 7；
It is characterized in that: this ultrasound electric machine also includes Y-direction cross roller guide rail 4 and X-direction cross roller guide rail 9；Described guide rail fixed plate 6 and upper mounting plate 3 are connected by Y-direction cross roller guide rail 4, it is achieved Y-direction guide effect；Described guide rail fixed plate 6 and lower shoe 7 are connected by X-direction cross roller guide rail 9, it is achieved X-direction guide effect；The upper end of described motor oscillator and precompression bringing device 8 thereof is provided with friction plate 5, is withstood on friction plate 5 by precompression；Described friction plate 5 is bonded on upper mounting plate 3.
Further, described motor oscillator and precompression bringing device 8 thereof include motor oscillator matrix 10, piezoelectric ceramic piece 11, fixing nut 12, precompression plate 13, guide pillar 14, base 15, precompression nut 16, precompression post 17, precompression spring 18 and Ceramic Balls 19；The center of described motor oscillator matrix 10 upper surface is provided with a cylindrical boss, fluted on boss, places a Ceramic Balls 9 in groove；Described piezoelectric ceramic piece 11 is bonded on motor oscillator matrix 10, and both deads in line；
Described guide pillar 14 top is less than lower outer diameter, and its top is threadedly connected through the edge of motor oscillator matrix 10 with motor oscillator matrix 10；Matched in clearance between guide pillar 14 and precompression plate 13, its top is fixed together with precompression plate 13 by fixing nut 12, and is interference fits between the bottom of guide pillar 14 and base 15；
Described precompression post 17 is threadedly connected between base 15, is provided with precompression nut 16 on bottom, and and precompression plate 13 between linked together by precompression spring 18.
Further, described piezoelectric ceramic piece 11 is an entirety, and is bonded on motor oscillator matrix 10, and its exposed surface is uniformly divided into four independent electrode zones, and in each electrode zone, polarised direction is identical, and polarised direction is piezoelectric ceramic piece 11 axis direction.
Described Ceramic Balls 19 is bonded on motor oscillator matrix 10, and when two electrode zones that piezoelectric ceramic piece 11 is relative apply the sinusoidal excitation signal that phase contrast is 90 °, Ceramic Balls 19 produces the elliptic motion of respective direction；When Ceramic Balls 19 produces elliptic motion in X direction, by the guide effect of X-direction cross roller guide rail 9, upper mounting plate 3 is promoted to move in X direction；When Ceramic Balls 19 produces the elliptic motion along Y-direction, by the guide effect of Y-direction decussation guide rail 4, promote upper mounting plate 3 to produce and move along Y-direction.
Preferred as one, between described upper mounting plate 3 and guide rail fixed plate 6, it is provided with scale grating 1 and grating reading head 2, feeds back for position；Described scale grating 1 is bonded on upper mounting plate 3；Described grating reading head 2 is fixed in guide rail fixed plate 6；Grating reading head 2 can move, when motor movement on scale grating 1 length direction, it is provided that position is fed back.
Further, precompression is transmitted by precompression spring 18 between described precompression post 17 and motor oscillator matrix 10；Owing to being interference fits between guide pillar 14 and base 15, for threadeding between base 15 with precompression post 17, by rotating the precompression nut 16 on precompression post 17, change the distance between precompression post 17 and motor oscillator matrix 10, and change the decrement compressing precompression spring 18, and then change the size of precompression.
Beneficial effect:
By the present invention in that and achieve with a kind of plate-like ultrasound electric machine with two degrees of freedom:
1. the forward and reverse motion of the both direction of motor, compact conformation, more easily miniaturization so that motor has broader practice space is realized by the single stator structure of use；
2. by monolithic piezoelectric ceramic sheet identical for polarised direction is divided into four homogeneous electrode regions, second order is utilized to bend the vibration shape, obtain the elliptic motion of driving head, it is to avoid require, in single ceramic sheet, the problem that polarised direction is different so that motor is substantially reduced for the requirement of piezoelectric ceramic piece；
3., by motor oscillator and precompression bringing device thereof, utilize precompression spring to realize the adjustment of precompression, it is ensured that between motor stator and mover, to have certain precompression；
4. utilize scale grating and grating reading head, it is achieved the position feedback of motor, by the closed loop control of motor, be more favorable for being accurately positioned of motor so that motor has wide application space in precision positioning field.
Accompanying drawing explanation
The present invention is further described with embodiment below in conjunction with the accompanying drawings:
Fig. 1 is a kind of plate-like ultrasound electric machine with two degrees of freedom structural representation；
Fig. 2 is motor oscillator and precompression bringing device structural representation thereof；
Fig. 3 is that piezoelectric ceramic piece electrode zone splits schematic diagram；
Fig. 4 is a kind of plate-like ultrasound electric machine with two degrees of freedom structural representation；
Fig. 5 is a kind of plate-like ultrasound electric machine with two degrees of freedom side view；
Fig. 6 is a kind of plate-like ultrasound electric machine with two degrees of freedom upward view.
In figure: 1-scale grating, 2-grating reading head, 3-upper mounting plate, 4-Y direction cross roller guide rail, 5-friction plate, 6-guide rail fixed plate, 7-lower shoe, 8-motor oscillator and precompression bringing device thereof, 9-X direction cross roller guide rail, 10-motor oscillator matrix, 11-piezoelectric ceramic piece, 12-fixes nut, 13-precompression plate, 14-guide pillar, 15-base, 16-precompression nut, 17-precompression post, 18-precompression spring, 19-Ceramic Balls.
Detailed description of the invention
The plate-like ultrasound electric machine with two degrees of freedom that the present invention provides, for making the purpose of the present invention, technical scheme and effect are clearer, clearly, and referring to the drawings and give an actual example that the present invention is described in more detail.Should be appreciated that described herein being embodied as, only in order to explain the present invention, is not intended to limit the present invention.
Embodiment 1
As it is shown in figure 1, the ultrasound electric machine with two degrees of freedom of the present invention is made up of upper mounting plate 3, Y-direction cross roller guide rail 4, friction plate 5, guide rail fixed plate 6, lower shoe 7 and motor oscillator and precompression bringing device 8 thereof；Described motor oscillator and precompression bringing device 8 thereof are fixed by screws on lower shoe 7, are withstood on friction plate 5 by precompression, and friction plate 5 is bonded on upper mounting plate 3；It is connected between upper mounting plate 3 with guide rail fixed plate 6 and has Y-direction cross roller guide rail 4, when motor produces Y-direction driving force, realized the Y-direction guiding movement of motor by Y-direction cross roller guide rail 4；It is connected between lower shoe 7 with guide rail fixed plate 6 and has X-direction cross roller guide rail 9, when motor produces X-direction driving force, realized the X-direction guiding movement of motor by X-direction cross roller guide rail 9.
As shown in Figure 2, motor oscillator and precompression bringing device 8 thereof by, motor oscillator matrix 10, piezoelectric ceramic piece 11, fixing nut 12, precompression plate 13, guide pillar 14, base 15, precompression nut 16, precompression post 17, precompression spring 18, Ceramic Balls 19 form；Being bonded with Ceramic Balls 19 in groove on described motor oscillator matrix 10 boss, its bottom surface is bonded with the dead in line of piezoelectric ceramic piece 11, the axis of piezoelectric ceramic piece 11 and motor oscillator matrix 10；Described guide pillar 14 is a multidiameter, it is threaded connection between its top and motor oscillator matrix 10, and by fixing nut 12, precompression plate 13 is fixed together, it it is matched in clearance between guide pillar 14 and precompression plate 13, being interference fits between guide pillar 14 and base 15, guide pillar 14 is uniformly distributed along base 15 circumferencial direction by 120 ° of intervals；Transmitting precompression by precompression spring 18 between described precompression post 17 and precompression plate 18, precompression post 17 bottom is provided with precompression nut 16, and and base 15 between be threaded connection.
As shown in Figure 2, when described precompression nut 16 is rotated by external force, due to threaded motion transmission effect, precompression post 17 is made to produce linear motion, cause precompression post 17 to produce change with the spacing of pressure plare 13, and then precompression spring 18 is deformed, according to Hooke's law, the precompression that precompression spring 18 produces is deformed into direct ratio with precompression spring 18 generation, be can be obtained by the size of applied precompression by this deflection；Described guide pillar 14 mainly plays guide effect during precompression applies.
As shown in Figure 3, the polarised direction of described piezoelectric ceramic piece 11 is normal orientation, its surface is evenly divided into four electrode zones, wherein relative to two electrode zones be one group, piezoelectric ceramic piece 11 is bonded on motor oscillator matrix 10 by installation direction and direction of motion angle at 45 ° mode.
As shown in Figure 3, when piezoelectric ceramic piece 11 applies between electrode zone 1 and electrode zone 3 the high-frequency and high-voltage sinusoidal excitation signal that phase contrast is 90 °, the Ceramic Balls 19 being bonded on motor oscillator matrix 10 can produce the elliptic motion in xoz plane, under the effect of precompression, the friction plate 5 being bonded on upper mounting plate 3 is produced X-direction driving force, under the guide effect of X-direction cross roller guide rail 9, motor moves in X direction；When applying the high-frequency and high-voltage sinusoidal excitation signal that phase contrast is-90 ° between electrode zone 1 and electrode zone 3, motor is by adverse movement in the X direction.
As shown in Figure 3, when piezoelectric ceramic piece 11 applies between electrode zone 2 and electrode zone 4 the high-frequency and high-voltage sinusoidal excitation signal that phase contrast is 90 °, the Ceramic Balls 19 being bonded on motor oscillator matrix 10 can produce the elliptic motion in yoz plane, under the effect of precompression, the friction plate 5 being bonded on upper mounting plate 3 is produced Y-direction driving force, in the Y direction under the guide effect of cross roller guide rail 4, motor moves along Y-direction；When applying the high-frequency and high-voltage sinusoidal excitation signal that phase contrast is-90 ° between electrode zone 2 and electrode zone 4, motor is by adverse movement in the Y direction.
Embodiment 2
As shown in Fig. 4, Fig. 5, Fig. 6, the present embodiment is with the difference of embodiment 1, and present embodiment also includes scale grating 1, grating reading head 2；Described scale grating 1 is bonded on upper mounting plate 3, and its installation direction is identical with Y motion direction, and grating reading head 2 is fixed in guide rail fixed plate 6, when motor movement, grating reading head 2 moves along scale grating 1, obtains current motor positions information, for realizing the closed loop control of motor.
It is understood that for those of ordinary skills, can be according to technical scheme and inventive concept thereof in addition equivalent or change, and all these change or replace the protection domain that all should belong to appended claims of the invention.
Claims (6)
1. a plate-like ultrasound electric machine with two degrees of freedom, including upper mounting plate (3), friction plate (5), guide rail fixed plate (6), lower shoe (7) and motor oscillator and precompression bringing device (8) thereof；
Guide rail fixed plate (6) it is provided with between described upper mounting plate (3) and lower shoe (7), the centre position of guide rail fixed plate (6) is a chamber, described ultrasonic motor oscillator and precompression bringing device (8) thereof are an entirety, are arranged in this chamber, and are arranged on lower shoe (7)；
It is characterized in that: this ultrasound electric machine also includes Y-direction cross roller guide rail (4) and X-direction cross roller guide rail (9)；Described guide rail fixed plate (6) and upper mounting plate (3) are connected by Y-direction cross roller guide rail (4), it is achieved Y-direction guide effect；Described guide rail fixed plate (6) and lower shoe (7) are connected by X-direction cross roller guide rail (9), it is achieved X-direction guide effect；The upper end of described motor oscillator and precompression bringing device (8) thereof is provided with friction plate (5), is withstood on friction plate (5) by precompression；Described friction plate (5) is bonded on upper mounting plate (3).
A kind of plate-like ultrasound electric machine with two degrees of freedom the most according to claim 1, it is characterised in that: described motor oscillator and precompression bringing device (8) thereof include motor oscillator matrix (10), piezoelectric ceramic piece (11), fixing nut (12), precompression plate (13), guide pillar (14), base (15), precompression nut (16), precompression post (17), precompression spring (18) and Ceramic Balls (19)；The center of described motor oscillator matrix (10) upper surface is provided with a cylindrical boss, fluted on boss, places a Ceramic Balls (19) in groove；Described piezoelectric ceramic piece (11) is bonded on motor oscillator matrix (10), and both deads in line；
Described guide pillar (14) top is less than lower outer diameter, and its top is threadedly connected through the edge of motor oscillator matrix (10) with motor oscillator matrix (10)；Matched in clearance between guide pillar (14) and precompression plate (13), its top is fixed together with precompression plate (13) by fixing nut (12), and is interference fits between the bottom of guide pillar (14) and base (15)；
Described precompression post (17) is threadedly connected between base (15), is provided with precompression nut (16) on bottom, and and precompression plate (13) between linked together by precompression spring (18).
A kind of plate-like ultrasound electric machine with two degrees of freedom the most according to claim 2, it is characterized in that: described piezoelectric ceramic piece (11) is an entirety, and be bonded on motor oscillator matrix (10), its exposed surface is uniformly divided into four independent electrode zones, in each electrode zone, polarised direction is identical, and polarised direction is piezoelectric ceramic piece (11) axis direction.
A kind of plate-like ultrasound electric machine with two degrees of freedom the most according to claim 3, it is characterized in that: described Ceramic Balls (19) is bonded on motor oscillator matrix (10), when two electrode zones that piezoelectric ceramic piece (11) is relative apply the sinusoidal excitation signal that phase contrast is 90 °, Ceramic Balls (19) produces the elliptic motion of respective direction；When Ceramic Balls (19) produces elliptic motion in X direction, by the guide effect of X-direction cross roller guide rail (9), upper mounting plate (3) is promoted to move in X direction；When Ceramic Balls (19) produces the elliptic motion along Y-direction, by the guide effect of Y-direction decussation guide rail (4), promote upper mounting plate (3) to produce and move along Y-direction.
5. according to any one plate-like ultrasound electric machine with two degrees of freedom described in Claims 1-4, it is characterised in that: between described upper mounting plate (3) and guide rail fixed plate (6), it is provided with scale grating (1) and grating reading head (2), feeds back for position；Described scale grating (1) is bonded on upper mounting plate (3)；Described grating reading head (2) is fixed in guide rail fixed plate (6)；Grating reading head (2) can move, when motor movement on scale grating (1) length direction, it is provided that position is fed back.
A kind of plate-like ultrasound electric machine with two degrees of freedom the most according to claim 2, it is characterised in that: transmit precompression by precompression spring (18) between described precompression post (17) and motor oscillator matrix (10)；Owing to being interference fits between guide pillar (14) and base (15), for threadeding between base (15) with precompression post (17), by rotating the precompression nut (16) on precompression post (17), change the distance between precompression post (17) and motor oscillator matrix (10), and change the decrement compressing precompression spring (18), and then change the size of precompression.
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Effective date of registration: 20170329 Address after: 211106 general road, Jiangning Development Zone, Jiangsu, Nanjing, China, No. 29 Patentee after: Nanjing Airlines super Control Technology Co., Ltd. Address before: Yudaojie Qinhuai District of Nanjing City, Jiangsu Province, No. 29 210016 Patentee before: Nanjing University of Aeronautics and Astronautics |
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Address after: 211106 general road, Jiangning Development Zone, Jiangsu, Nanjing, China, No. 29 Patentee after: Nanjing Hangda override Technology Co., Ltd Address before: 211106 general road, Jiangning Development Zone, Jiangsu, Nanjing, China, No. 29 Patentee before: NUAA SUPER CONTROL TECHNOLOGY Co.,Ltd. |
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