CN104502636B - Suspended power supply for integrated circuit testing - Google Patents
Suspended power supply for integrated circuit testing Download PDFInfo
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- CN104502636B CN104502636B CN201410842821.XA CN201410842821A CN104502636B CN 104502636 B CN104502636 B CN 104502636B CN 201410842821 A CN201410842821 A CN 201410842821A CN 104502636 B CN104502636 B CN 104502636B
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- power supply
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- suspended
- generating unit
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Abstract
The invention discloses a kind of suspended power supply for integrated circuit testing, including control unit, power supply generating unit, isolated location and power supply unit.By the way that control unit is isolated with power supply generating unit, cause power supply unit in the way of isolating as both above-mentioned power supplies simultaneously, so that power supply and the power supply of test machine and other equipment that integrated circuit to be tested chip is applied in integrated circuit testing are completely isolated, so as to improve the isolation in test, reduce electrical Interference, improve test accuracy.
Description
Technical field
The present invention relates to tester for semiconductor devices field, and in particular to a kind of suspension electricity for integrated circuit testing
Source.
Background technology
Integrated circuit testing is the important step in integrated circuit production, is all by loading in Multi-station parallel test
Common power supply is tested, and there is electrical link between power supply, therefore there is certain electrical Interference.Particularly surveying parallel
During the wafer circuit that examination earth signal links together, this electrical Interference can be more serious.
The content of the invention
In view of this, the present invention provides a kind of suspended power supply for integrated circuit testing, to improve the isolation in test
Degree, reduces electrical Interference, improves test accuracy.
First aspect there is provided a kind of suspended power supply for integrated circuit testing, including：
Control unit, occurs list for generating power control signal according to external digital control signal and being sent to power supply
Member, and the detection signal of power supply signal is converted into detected value transmitted to external equipment；
Power supply generating unit, for generating the power supply signal according to the power control signal, and detects the power supply
Signal is to obtain the detection signal；
Isolated location, is connected between described control unit and the power supply generating unit, for being passed in the way of isolation
The defeated power control signal and the detection signal；
Power supply unit, for being respectively that described control unit and the power supply generating unit are powered in the way of isolation.
Preferably, described control unit includes：
Telecommunication circuit, for receiving the external digital control signal and transmitting the detected value；
D/A converting circuit, believes for the external digital control signal received to be converted into the power supply
Number；
Analog to digital conversion circuit, controller is sent to for the detection signal to be converted into the detected value
Controller, is connected with the telecommunication circuit, D/A converting circuit and analog to digital conversion circuit.
Preferably, the power supply generating unit includes：
Power amplification circuit, for generating the power supply signal according to the power control signal；
Sample circuit, for carrying out the sampling output detection signal to the power supply signal；
Feedback circuit, for feeding back the detection signal to the power amplification circuit.
Preferably, the power supply signal includes voltage source signal and current source signal；
The power supply generating unit also includes：
Output switching circuit, for exporting the voltage source signal or current source letter according to the power supply signal type
Number；
Signal switching circuit is detected, for detecting that signal or current source detection are believed according to the detection signal output voltage source
Number；
The feedback circuit is used to feed back the voltage source detection to the power amplification circuit according to the detection signal
Signal or current source detection signal.
Preferably, described control unit includes clamp setting circuit, for being sent out by the isolated location to the power supply
Raw unit transmission clamp setting signal；
The power supply generating unit includes clamp circuit, for protecting the power supply to occur according to the clamp setting signal
Unit.
Preferably, the power supply signal includes voltage source signal and current source signal
The clamp circuit is used to carry out voltage clamp or current clamp to the power supply according to the power supply signal type
Generating unit is protected.
Preferably, the isolated location includes multiple linear isolation operational amplifiers.
Preferably, said supply unit includes mutually isolated the first power supply subelement and the second power supply subelement.
Preferably, it is described first power supply subelement and it is described second power supply subelement be isolation type DC-DC converter or every
Release AC-DC converter.
By the way that control unit is isolated with power supply generating unit, while so that power supply unit in the way of isolating as above-mentioned two
Person is powered so that the power supply of integrated circuit to be tested chip and test machine and miscellaneous equipment are applied in integrated circuit testing
Power supply is completely isolated, so as to improve the isolation in test, reduces electrical Interference, improves test accuracy.
Brief description of the drawings
By description referring to the drawings to the embodiment of the present invention, above-mentioned and other purpose of the invention, feature and
Advantage will be apparent from, in the accompanying drawings：
Fig. 1 is the structured flowchart of the suspended power supply of first embodiment of the invention；
Fig. 2 is the structured flowchart of the control unit in the suspended power supply of first embodiment of the invention；
Fig. 3 is the structured flowchart of the power supply generating unit in the suspended power supply of first embodiment of the invention；
Fig. 4 is the structured flowchart of the power supply generating unit in the suspended power supply of second embodiment of the invention.
Embodiment
Below based on embodiment, present invention is described, but the present invention is not restricted to these embodiments.Under
Text is detailed to describe some specific detail sections in the detailed description of the present invention.Do not have for a person skilled in the art
The description of these detail sections can also understand the present invention completely.In order to avoid obscuring the essence of the present invention, known method, mistake
Journey, flow, element and circuit do not have detailed narration.
In addition, it should be understood by one skilled in the art that provided herein accompanying drawing be provided to explanation purpose, and
What accompanying drawing was not necessarily drawn to scale.
In the description of the invention, it is to be understood that term " first ", " second " etc. be only used for describe purpose, without
It is understood that to indicate or imply relative importance.
Fig. 1 is the structured flowchart of the suspended power supply of the embodiment of the present invention.As shown in figure 1, the embodiment of the present invention be used for collect
Suspended power supply into circuit test includes control unit 1, power supply generating unit 2, isolated location 3 and power supply unit 4.
Wherein, control unit 1 is used to generate power control signal S according to external digital control signal CTR and is sent to electricity
Source generating unit 2, and the detection signal D of power supply signal is converted into detected value SAM transmitted to external equipment.In the present embodiment
In, external equipment is ic tester, and it exports the control suspended power supply output of external digital control signal to control unit
Power supply signal numerical value, meanwhile, receive power supply signal detected value SAM, monitor suspended power supply state.
In embodiments of the present invention, control unit 1 can utilize field programmable gate array (Field-
Programmable Gate Array, FPGA) realize.
Fig. 2 is the structured flowchart of the control unit in the suspended power supply of the embodiment of the present invention.As shown in Fig. 2 control unit 1
Including telecommunication circuit 11, high-precision D/A converting circuit 12 and high precision analogue change-over circuit 13 and controller 14.
Telecommunication circuit 11 is used to receive external digital control signal CTR and transmission detected value SAM.
D/A converting circuit 12 is used to external digital control signal CTR being converted to power control signal S.
Analog to digital conversion circuit 13 is used to detect that signal D is converted to detected value SAM and is sent to controller 14.
Controller 14 is connected with telecommunication circuit 11, D/A converting circuit 12 and analog to digital conversion circuit 13.
Power supply generating unit 2 be used for according to power control signal S generate power supply signal V/I, and detect power supply signal V/I with
Obtain detection signal D.In the present embodiment, if integrated circuit to be tested is using constant voltage as power supply, power supply signal V/I is
Voltage source signal, if integrated circuit to be tested is using constant current as power supply, power supply signal V/I is current source signal.
Fig. 3 is the structured flowchart of the power supply generating unit in the suspended power supply of the embodiment of the present invention.As shown in figure 3, power supply
Generating unit 2 includes power amplification circuit 21, sample circuit 22 and feedback circuit 23.
Power amplification circuit 21 is used to generate power supply signal V/I according to power control signal S.Sample circuit 22 is used for electricity
Source signal V/I carries out sampling output detection signal D.Feedback circuit 23 is used for the feedback detection signal D of power amplification circuit 21, with
Enable power amplification circuit 21 to adjust inherent parameters according to the detection signal D of feedback, export stable power supply signal.
Preferably, clamp circuit 24 can also be set in power supply generating unit 2 in the present embodiment, it is used for according to pincers
Clamp voltage or clamp current protection power supply generating unit 2 that position setting signal SET is pre-set.Accordingly, in control unit 1
In be provided with clamp circuit 15 be set, it is used for by isolated location 3 to the transmission clamp of power supply generating unit 2 setting signal SET.
Clamp sets circuit 15 specifically to use the D/A converting circuit of low precision to realize, it will have number from controller 14
The setting signal CLA of word signal form is converted to the clamp setting signal SET transmission with analog signal form.
Clamp circuit 24 can according to default clamp current or clamp voltage (by clamp setting signal SET set) come
Power amplification circuit is protected, overvoltage or excessively stream infringement is prevented.
Isolated location 3 is connected between control unit 1 and power supply generating unit 2, for transmitting power supply in the way of isolation
Control signal S and detection signal D.
Specifically, isolated location 3 includes multiple linear isolation operational amplifiers., can by linear isolation operational amplifier
While signal transmission is ensured, preferably to realize the electrical isolation between control unit 1 and power supply generating unit 2.
In embodiments of the present invention, because the precision of power control signal and detection signal determines the essence of suspended power supply
Degree, therefore, the D/A converting circuit 12 for generating power control signal S needs to use high-precision D/A converting circuit, is used for
Processing detection signal D analog to digital conversion circuit 13 needs to use high precision analogue change-over circuit, for isolating transmission power supply
Signal S and detection signal D isolating device are required to use high-precision linear isolation operational amplifier.
Power supply unit 4 is used to be respectively that control unit 1 and power supply generating unit 2 are powered in the way of isolation.
Specifically, power supply unit 4 includes the first mutually isolated power supply power supply subelement 42 of subelement 41 and second.First
Power supply subelement 41 is used to power for control unit 1, and it can utilize external equipment, the power supply of such as ic tester,
Meanwhile, the second power supply power supply electrical isolation of subelement 41 of subelement 42 and first, for being powered for power supply generating unit 2.Second
Power supply subelement 42 realizes that the isolated converter for example using transformer or comprising transformer is carried out by electromagnetic isolation technology
The conversion of voltage/current.First power supply subelement 41 and second power supply subelement 42 can for isolation type DC-DC converter or every
Release AC-DC converter.
Thus, by the way that control unit is isolated with power supply generating unit, while so that power supply unit is in the way of isolating
Both above-mentioned power supplies so that the power supply of integrated circuit to be tested chip and test machine are applied in integrated circuit testing and other
The power supply of equipment is completely isolated, so as to improve the isolation in test, reduces electrical Interference, improves test accuracy.
Fig. 4 is the structured flowchart of the power supply generating unit of the suspended power supply of second embodiment.As shown in figure 4, suspended power supply
Power supply generating unit 2 ' include power amplification circuit 21 ', sample circuit 22 ', feedback circuit 23 ', clamp circuit 24 ' and inspection
Survey signal switching circuit 25 ' and output switching circuit 26 '.
In the present embodiment, power supply generating unit 2 ' can generate voltage source signal V or current source signal I as needed.
Thus, the output of power supply signal, feedback and detection are required to set correspondingly, can be switched between two kinds of unlike signals
Circuit.
Wherein, power amplification circuit 21 ' is configured as that output voltage source signal can be controlled according to power control signal CTR
V or current source signal I.
Sample circuit 22 ' can obtain detection signal D to voltage source signal V or current source signal I samplings.
Output switching circuit 26 ' is used for according to power supply signal type output voltage source signal V or current source signal I.
Detect that signal switching circuit 25 ' is used to detect according to detection signal D output voltage sources detection signal Dv or current source
Signal Di.
In the present embodiment, feedback circuit 23 ' is used to be examined to the feedback voltage source of power amplification circuit 21 according to detection signal D
Signal Dv or current source detection signal Di is surveyed, thus, to cause power amplification circuit 21 ' can be according to the detection signal Dv of feedback
Or Di adjustment inherent parameters, export stable power supply signal.
Clamp circuit 24 ' is used to carry out voltage clamp according to power supply signal type or current clamp is entered to power supply generating unit
Row protection.Clamp circuit can protect work(according to default clamp current or clamp voltage (by clamp setting signal is set)
Rate amplifying circuit, prevents overvoltage or excessively stream infringement.
Thus, the suspended power supply of the present embodiment can be used according to power control signal as voltage source or current source, its
With more preferable versatility.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for those skilled in the art
For, the present invention can have various changes and change.It is all any modifications made within spirit and principles of the present invention, equivalent
Replace, improve etc., it should be included in the scope of the protection.
Claims (9)
1. a kind of suspended power supply for integrated circuit testing, including：
Control unit, for generating power control signal according to external digital control signal and being sent to power supply generating unit, and
The detection signal of power supply signal is converted into detected value to transmit to external equipment, the external equipment exports described control unit
The external digital control signal；
Power supply generating unit, for generating the power supply signal according to the power control signal, and detects the power supply signal
To obtain the detection signal；
Isolated location, is connected between described control unit and the power supply generating unit, for transmitting institute in the way of isolation
State power control signal and the detection signal；
Power supply unit, for being respectively that described control unit and the power supply generating unit are powered in the way of isolation.
2. suspended power supply according to claim 1, it is characterised in that described control unit includes：
Telecommunication circuit, for receiving the external digital control signal and transmitting the detected value；
D/A converting circuit, for the external digital control signal received to be converted into the power control signal；
Analog to digital conversion circuit, controller is sent to for the detection signal to be converted into the detected value
Controller, is connected with the telecommunication circuit, D/A converting circuit and analog to digital conversion circuit.
3. suspended power supply according to claim 1, it is characterised in that the power supply generating unit includes：
Power amplification circuit, for generating the power supply signal according to the power control signal；
Sample circuit, for carrying out the sampling output detection signal to the power supply signal；
Feedback circuit, for feeding back the detection signal to the power amplification circuit.
4. suspended power supply according to claim 3, it is characterised in that the power supply signal includes voltage source signal and electric current
Source signal；
The power supply generating unit also includes：
Output switching circuit, for exporting the voltage source signal or the current source signal according to the power supply signal type；
Signal switching circuit is detected, for detecting that signal or current source detect signal according to the detection signal output voltage source；
The feedback circuit is used to feed back the voltage source detection signal to the power amplification circuit according to the detection signal
Or current source detection signal.
5. suspended power supply according to claim 3, it is characterised in that described control unit includes clamp and sets circuit, uses
Setting signal is clamped in being transmitted by the isolated location to the power supply generating unit；
The power supply generating unit includes clamp circuit, single for protecting the power supply to occur according to the clamp setting signal
Member.
6. suspended power supply according to claim 5, it is characterised in that the power supply signal includes voltage source signal and electric current
Source signal；
The clamp circuit is used to carry out voltage clamp according to the power supply signal type or the power supply occurs current clamp
Unit is protected.
7. suspended power supply according to claim 1, it is characterised in that the isolated location includes multiple linear isolation computings
Amplifier.
8. suspended power supply according to claim 1, it is characterised in that said supply unit includes mutually isolated first and supplied
Electronic unit and the second power supply subelement.
9. suspended power supply according to claim 8, it is characterised in that the first power supply subelement and second power supply
Subelement is isolation type DC-DC converter or isolated form AC-DC converter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410842821.XA CN104502636B (en) | 2014-12-29 | 2014-12-29 | Suspended power supply for integrated circuit testing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410842821.XA CN104502636B (en) | 2014-12-29 | 2014-12-29 | Suspended power supply for integrated circuit testing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104502636A CN104502636A (en) | 2015-04-08 |
| CN104502636B true CN104502636B (en) | 2017-10-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410842821.XA Active CN104502636B (en) | 2014-12-29 | 2014-12-29 | Suspended power supply for integrated circuit testing |
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Citations (5)
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|---|---|---|---|---|
| JP2000209847A (en) * | 1999-01-07 | 2000-07-28 | Matsushita Electric Ind Co Ltd | Semiconductor integrated circuit |
| CN101860080A (en) * | 2010-05-18 | 2010-10-13 | 武汉国测科技股份有限公司 | Distribution network metering and protection integral device suspended at high-voltage side |
| CN101895278A (en) * | 2010-07-16 | 2010-11-24 | 中国兵器工业第二○六研究所 | General thick film type floating plate modulator |
| CN102435799A (en) * | 2011-04-15 | 2012-05-02 | 北京博电新力电气股份有限公司 | Precise large current generation device and generation method thereof |
| CN204389531U (en) * | 2014-12-29 | 2015-06-10 | 杭州士兰微电子股份有限公司 | For the suspended power supply of integrated circuit testing |
-
2014
- 2014-12-29 CN CN201410842821.XA patent/CN104502636B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000209847A (en) * | 1999-01-07 | 2000-07-28 | Matsushita Electric Ind Co Ltd | Semiconductor integrated circuit |
| CN101860080A (en) * | 2010-05-18 | 2010-10-13 | 武汉国测科技股份有限公司 | Distribution network metering and protection integral device suspended at high-voltage side |
| CN101895278A (en) * | 2010-07-16 | 2010-11-24 | 中国兵器工业第二○六研究所 | General thick film type floating plate modulator |
| CN102435799A (en) * | 2011-04-15 | 2012-05-02 | 北京博电新力电气股份有限公司 | Precise large current generation device and generation method thereof |
| CN204389531U (en) * | 2014-12-29 | 2015-06-10 | 杭州士兰微电子股份有限公司 | For the suspended power supply of integrated circuit testing |
Non-Patent Citations (2)
| Title |
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| 基于单片机的数字控制电源系统设计;刘玉斌;《信息系统工程》;20141120(第11期);说明书第31页第1栏，图1 * |
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| CN104502636A (en) | 2015-04-08 |
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