CN104502000B - Shallow-type micro temperature calibration furnace and calibration method - Google Patents

Shallow-type micro temperature calibration furnace and calibration method Download PDF

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Publication number
CN104502000B
CN104502000B CN201410838546.4A CN201410838546A CN104502000B CN 104502000 B CN104502000 B CN 104502000B CN 201410838546 A CN201410838546 A CN 201410838546A CN 104502000 B CN104502000 B CN 104502000B
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temperature
combustion chamber
calibration
small
heating tube
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CN104502000A (en
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朱晨彬
姚丽芳
朱欣赟
陈宇
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Shanghai Institute of Measurement and Testing Technology
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Shanghai Institute of Measurement and Testing Technology
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Abstract

The invention relates to temperature measurement element calibration, in particular to a shallow-type micro temperature calibration furnace and belongs to the field of measurement calibration. The shallow-type micro temperature calibration furnace is characterized by comprising a cylindrical furnace core, insertion holes used for mounting to-be-calibrated temperature measurement elements are arranged in the furnace core, temperature equalizing blocks are around the insertion holes, a ceramic electric heating tube sleeves the external circumference of the furnace core in a surrounding manner, the ceramic electric heating tube is sleeved with an annular hearth, multiple small heating rods are arranged around the furnace core and in the hearth evenly, the hearth is wrapped with an insulation layer, a monitoring temperature sensor mounting plate is further arranged under the furnace core and the hearth and used for mounting an armored platinum resistor used for temperature control, a temperature control hole is arranged in the furnace core from bottom to top, the armored platinum resistor extends into the temperature control hole of the furnace core from bottom to top, a furnace casing is arranged outside the insulation layer, a top cover is arranged on the upside of the furnace casing, a bottom cover is mounted under the platinum resistor mounting plate, an air hole is formed in the middle of the bottom cover, a furnace base is arranged under the bottom cover, and a fan is arranged in the furnace base.

Description

A kind of shallow type temperature checking stove and method of calibration of declining
Technical field
The present invention relates to detector unit calibration, more particularly to a kind of shallow type temperature checking stove and method of calibration of declining.
Background technology
With the continuous improvement of industrial production automation degree, commercial production enterprise is aobvious prominent to the demand day of field calibration Go out.Live thermometric calibrating installation is increasingly used for industrial temperature field calibration.Need to enter temperature in many industries Row Detection & Controling.Conventional detector unit is platinum resistance, thermocouple thermometer, and water-bath is usually used during calibrating/calibration Or the temperature chamber such as oil bath, used as constant temperature field, the preferable degree of stability of temperature homogeneity of this kind of temperature chamber is high, is affected little by ambient temperature, But the volume of this kind of temperature chamber is all huger, and temperature stabilization times are longer, it is impossible to meet the needs of live rapid verification or calibration.
At present, foreign countries have succeeded in developing for the quickly calibrated all kinds of stem body temperature checking stoves in scene.Temperature checking stove master To include several big types such as high accuracy dry-well checker, industrial dry-well checker, thermocouple checker.Its temperature test model Enclose from -45 DEG C to 1200 DEG C;Generally ± 0.1 DEG C or so of thermal field accuracy;Generally ± 0.01 DEG C or so of thermal field fluctuation degree;Temperature Generally ± 0.05 DEG C or so of field uniformity.It is small volume, lightweight therefore more and more using air as calibration medium Be applied to field calibration work.
But, field-checking has the temperature sensor of some special sizes, the platinum resistance or heat of such as short (40-50) mm Thermocouple sensor, and short or the thermistor temperature sensor etc. at right angle cannot all use temperature checking stove as calibration Corollary equipment using because now all of temperature checking stove is substantially and for temperature-controlled precision to be maintained at stove heart bottom.Only Tested temperature sensor can be inserted into temperature checking furnace bottom, just can guarantee that the accuracy of metering.And current minimum in the world The well depth of temperature checking stove is 102mm, when the length of tested temperature sensor is less than 102mm, at present just cannot be to the sensing Device carries out the calibration of scene temperature.
Oil opening/the closed mouth flash point tester of such as current on-line testing, automatic distillation instrument, condensation instrument, air-conditioning reality Platform, laboratory and workshop condition system for detecting temperature are tested, or even including aircraft engine experiment porch and the temperature of nuclear power projects Degree sensor is all that size is very short, and the PT100 or thermocouple of specification special (some are right angles), these sensors are all assembled On equipment, it is impossible to dismantle, on-line calibration can only be carried out to its sensing head.Particularly oil opening/closed mouth flash point tester, Belong to the instrument having a large capacity and a wide range, the production and detection enterprise related to oil is provided with the flash point tester of at least two, this kind of instrument Device is that, by the Precision measurement to temperature, igniting interval time scans to measure the flash-point of fluid.Its temperature sensor size is short, Most long only 60mm, therefore we cannot carry out accurately and easily in-site measurement to this kind of instrument with existing equipment.Also still So flash point tester is detected using reference fluid sample, but this kind of method uncertainty of measurement is at a relatively high, and temperature spot is fixed, nothing Method is calibrated to flash point tester using temperature gamut, and reference fluid sample is not easy to maintain, extremely short (general using effect duration Only one-year age).
The content of the invention
The technical problem to be solved is to provide a kind of shallow decline type temperature checking stove and method of calibration, solves existing All huger in the volume of temperature chamber, temperature stabilization times are longer, it is impossible to meet the needs of live rapid verification or calibration, and warm Degree verification stove temperature-controlled precision is in stove heart bottom and well depth is fixed, it is impossible to the defect that some special temperature elements are verified.
Technical scheme
A kind of shallow type temperature checking stove that declines, it is characterised in that:Including cylinder combustion chamber, installation is provided with combustion chamber to be measured The patchhole of detector unit, is block around patchhole, and around combustion chamber excircle ceramic electrical heating tube is set with, described Ceramic electrical heating tube is slightly longer than combustion chamber, and section bottom encases combustion chamber, and outside the ceramic electrical heating tube annular furnace is set with, in the stove Multiple small-sized heating rods are evenly arranged with around combustion chamber in thorax, the burner hearth outer wrapping heat-insulation layer, in the combustion chamber and burner hearth Lower section is additionally provided with monitoring temperature sensor installing plate, for installing the proof armored platinum resistor as monitoring temperature sensor, There is temperature-control hole from the bottom up in combustion chamber, the proof armored platinum resistor is arranged on monitoring with temperature sensor installing plate, from bottom Up extend in the temperature-control hole of combustion chamber, the heat-insulation layer it is outer with body of heater shell by combustion chamber from the inside to the outside, ceramic electrical heating tube, Burner hearth and heat-insulation layer are wrapped up, and lid is provided with above, and platinum resistance installing plate lower section is provided with lower cover, there is wind in the middle of lower cover Hole, lower cover lower section is base of furnace body, and in the base of furnace body fan is provided with.
The combustion chamber is inserted into the well depth in hole less than or equal to 60mm, and the well depth of the temperature-control hole is more than or equal to 40mm.
The block is made combustion chamber be inserted into hole and is had multiple diameter, block using the replaceable block splicing of polylith Made using red copper material.
The power of the ceramic electrical heating tube is 500W, and the power of the small-sized heating rod is 25W, the small-sized heating rod with The central point of combustion chamber is angularly configured with 6 for the center of circle, and by the putting hole of the heating rod, nearly burner hearth home position also sets up There is the wind guide tank from top to bottom of semicircle.
The ceramic electrical heating tube, small-sized heating rod and fan are electrically connected by high temperature wire with temperature controller, described Proof armored platinum resistor is also electrically connected with temperature controller, and temperature controller receives the temperature signal of proof armored platinum resistor transmission, control pottery Porcelain electrothermal tube, small-sized heating rod and fan make the temperature in combustion chamber be rapidly achieved and maintain in the temperature of needs.
The temperature controller includes the temperature setting module and temperature control module for setting detection calibration temperature spot, described Temperature control module adopts PID control, is controlled respectively according to the real time temperature change of the calibration temperature and proof armored platinum resistor transmission of setting The heating power of the ceramic electrical heating tube of connection or/and small-sized heating rod, and cooling control module, control connection fan turn Speed.
A kind of method for carrying out detector unit verification using the above-mentioned shallow type temperature checking stove that declines, it is characterised in that Comprise the following steps:(1) detector unit to be measured is inserted into into inserting in the hole in the combustion chamber;(2) by an AA level PT100 proof armored platinum resistors are up extend in the temperature-control hole of combustion chamber as monitoring temperature sensor from bottom;(3) temperature According to the calibration temperature spot for setting, calibration temperature spot should be chosen controller in the range of 50-300 DEG C, no less than three temperature Degree point, the temperature control module of temperature controller is selected with the heating of small-sized heating rod, or ceramic electrical heating tube and small-sized heating rod are simultaneously Heating, while starting fan, with relatively low rotation speed operation;(4) when the real time temperature of proof armored platinum resistor transmission is close to calibration temperature During point, temperature control module reduces ceramic electrical heating tube output or small-sized heating rod and reduces heating power in real time, while ceramic electrical Heat pipe is heated with less output batch (-type), makes whole temperature control process steady;(5) after temperature reaches and stablizes, record respectively The show value of detector unit to be measured and the measured value of proof armored platinum resistor, the record time is no less than 10 minutes, and measuring speed is It is per minute once to be measured twice on each calibration point, when calibration point setting is changed, survey when design temperature rises Amount once, when dropping at a set temperature another one-shot measurement is carried out.
When calibrate temperature spot be set in 50-100 DEG C when, using small-sized heating rod heat, ceramic electrical heating tube stop or with compared with Little output discontinuity carries out heating work, when calibration temperature spot is set in 100-300 DEG C of operated within range, ceramic electrical Two kinds of mode of heatings of heat pipe and small-sized heating rod carry out real-time adjustment heating power simultaneously.
When verification stove is started shooting, fan will start, with relatively low rotation speed operation, when the real time measure of proof armored platinum resistor monitoring When temperature is excessive with the proportional difference of design temperature point, voltage is adjusted by Switching Power Supply, make fan full-speed operation, by forcing The mode of convective cooling, makes the rapid close correction value of actual temperature.
In the step 4, when calibration temperature spot temperature oscillation is close to, when vibration tends to design temperature point, temperature control mould Block reduces pid parameter value, reduces control intensity, reduces hyperharmonic vibration;When vibration deviates design temperature point, the ginseng of PID is increased Numerical value, strengthens control action, faster temperature is withdrawn into into calibration temperature spot.
Beneficial effect
The shallow of the present invention declines type temperature checking stove and method of calibration with two kinds of structure of controlling temperature combinations and stagewise temperature control side Method, and lowered the temperature using multi gear fan control, can make when well depth is less than or equal to 60mm, the thermal field that verification furnace interior is made quickly reaches Balance, is convenient for test, improves measuring accuracy, can be used not only for the online school of calibration and scene of short temperature detection sensor Standard, and the precision calibrated is very high;Using the block design that can be changed, in combustion chamber upper and lower covers are increased up and down, can be to spy The temperature sensor of different size is replaced verification.
Description of the drawings
Fig. 1 is the internal structure schematic diagram of the shallow type temperature correction stove that declines of the present invention.
Fig. 2 is the schematic top plan view of the combustion chamber of the present invention.
Fig. 3 is the schematic top plan view of the burner hearth of the present invention.
Fig. 4 is the A-A cross-sectional schematics of Fig. 3 burner hearths.
Fig. 5 is that the control block diagram of the present invention is illustrated.
Fig. 6 is the circuit connection diagram of the present invention.
Wherein:1- combustion chambers, 2- patchholes, 3- ceramic electrical heating tubes, 4- burner hearths, 5- heat-insulation layers, 6- monitoring temperature sensors Installing plate, 7- temperature-control holes, 8- body of heater shells are covered, 10- lower covers, 11- bases, the small-sized heating rod installing holes of 12-, 13- wind-guidings on 9- Groove, 14- installing holes.
Specific embodiment
With reference to specific embodiments and the drawings, the present invention is expanded on further.
Now compact temperature verifies stove substantially by the way of bottom-heated, and for the platinum electricity of short (40-50) mm Resistance or thermocouple sensor need the combustion chamber depth of detection check to have 45mm or so, therefore complete by the way of bottom-heated Temperature control accuracy and the fluctuation degree requirement of needs cannot be reached.
In R&D process, the heater strip of 500W is arranged in block circle by the mode of heating for having used for reference high-temperature temperature verification stove Circumferential direction, but, it is found through experiments that temperature control effect is undesirable, temperature fluctuation is very poor.Therefore 6 are uniformly made a call to again in burner hearth surrounding Individual hole, insert 2-6 root 25w heating rod, reduce temperature fluctuation, in effective control heating and cooling process occur temperature overshot or Cross the problem of drop.
The shallow type temperature checking stove that declines improved after design, including cylinder combustion chamber, are provided with installation and treat thermometric in combustion chamber The patchhole of degree detecting element, is block around patchhole, and around combustion chamber excircle ceramic electrical heating tube, the pottery are set with Porcelain electrothermal tube is slightly longer than combustion chamber, and section bottom encases combustion chamber, and outside the ceramic electrical heating tube annular furnace is set with, in the burner hearth Interior circular combustion chamber is evenly arranged with multiple small-sized heating rods, and the burner hearth outer wrapping heat-insulation layer, under the combustion chamber and burner hearth Side is additionally provided with monitoring temperature sensor installing plate, for installing the proof armored platinum resistor of temperature control, has from the bottom up in combustion chamber Temperature-control hole, the proof armored platinum resistor is arranged on the monitoring with temperature sensor installing plate, and from bottom combustion chamber is up extend into Temperature-control hole in, it is outer with body of heater shell that combustion chamber from the inside to the outside, ceramic electrical heating tube, burner hearth and heat-insulation layer is equal in the heat-insulation layer Wrap up, lid is provided with above, platinum resistance installing plate lower section is provided with lower cover, there is air holes in the middle of lower cover, lower cover lower section is Base of furnace body, in the base of furnace body fan is provided with.It is as shown in Figure 1 internal structure signal.
The combustion chamber is inserted into the well depth in hole less than or equal to 60mm, and 45mm is adopted in the constructive embodiment of accompanying drawing 1.Because existing During the verification temperature sensor of field, Jing often meets the different sensor of diameter, so the combustion chamber of the temperature checking stove of this Project design The diameter dimension in hole is inserted into from 3.2mm-6.5mm, sees that accompanying drawing 2 is illustrated, and samming can be changed soon, it is replaceable using polylith Block splices, and is made using red copper material.The power of the ceramic electrical heating tube is 500W, and the small-sized heating rod is with combustion chamber Central point be angularly configured with 6 for the center of circle, the power of each small-sized heating rod is 25W, in the putting hole of the heating rod The wind guide tank from top to bottom of semicircle is additionally provided with by home position, the air of fan blowout can pass through wind guide tank from bottom to top Combustion chamber is discharged, plays a part of convection current, accompanying drawing 3 and 4 is chamber structure signal.
It is to place temperature control temperature sensor in the bottom of block.In design just, by temperature control temperature sensor Insertion depth is set to 20mm, as a result finds that temperature control temperature has the difference of 3-4 degree with actual temperature.Found by repetition test:Cause For temperature control sensor, insertion depth is excessively shallow in block, with heat exchange with outside frequently, so the temperature for showing and actual temperature Degree greatly differs from each other.The insertion depth of temperature-control senser is adjusted to into 40mm in accompanying drawing 1, then temperature control detection temperature is several with actual temperature It coincide.
This temperature checking stove is that, using electrically heated electric furnace, electric furnace is relied on by Resistant heating during cooling Mode of the fan in combination with natural cooling, thus intensification shows completely different dynamic characteristic with temperature-fall period, this will Asking should also have corresponding unsymmetry on the control strategy for heating and cooling down.The ceramic electrical heating tube, small-sized heating rod and Fan is electrically connected with temperature controller, it is described installed in monitoring with the proof armored platinum resistor on temperature sensor installing plate also with temperature Degree controller electrical connection, temperature controller receives the temperature signal of proof armored platinum resistor transmission, control ceramic electrical heating tube, small-sized heating Rod and fan make the temperature in combustion chamber be rapidly achieved and maintain in the temperature of needs.
The temperature controller includes that temperature is used to set the setting module and temperature control module of detection calibration temperature spot, due to The present invention needs the temperature of the body of heater to verifying stove quickly and accurately to be controlled, so the control to overshoot and stabilization time System requirement is very high, therefore the temperature control module adopts PID fuzzy controls, is passed according to the calibration temperature spot and proof armored platinum resistor of setting The real time temperature change sent controls respectively the heating power of the ceramic electrical heating tube or/and small-sized heating rod for connecting, and cooling control Molding block, controls the rotating speed of the fan of connection.If accompanying drawing 5 is the signal of PID control block diagram, accompanying drawing 6 is circuit connection schematic diagram.
Follow the steps below when being verified:First detector unit to be measured is inserted into into inserting in the combustion chamber In entering hole;Then an AA levels PT100 proof armored platinum resistor is up extend into into combustion chamber as monitoring temperature sensor from bottom Temperature-control hole in;The temperature controller should enter according to the calibration temperature spot for setting, calibration temperature spot in the range of 50-300 DEG C Row is chosen, and no less than three temperature spots, the temperature control module of temperature controller is selected with the heating of small-sized heating rod, or ceramic electric heating Pipe and small-sized heating rod are heated simultaneously, while starting fan, with relatively low rotation speed operation;When calibration temperature spot is set in 50-100 DEG C when, using small-sized heating rod heat, ceramic electrical heating tube stop or heating work is carried out with less output discontinuity, when When calibration temperature spot is set in 100-300 DEG C of operated within range, two kinds of mode of heatings of ceramic electrical heating tube and small-sized heating rod are simultaneously Carry out real-time adjustment heating power;When the real time temperature of proof armored platinum resistor transmission is close to calibration temperature spot, temperature control module is reduced Ceramic electrical heating tube output or small-sized heating rod reduce in real time heating power, while ceramic electrical heating tube is with less output Batch (-type) is heated, and makes whole temperature control process steady;After temperature reaches and stablizes, the display of detector unit to be measured is recorded respectively Value and proof armored platinum resistor measured value, record the time be no less than 10 minutes, measuring speed for it is per minute once, each calibration Measured twice on point, when calibration point setting is changed, measured once when design temperature rises, when dropping at a set temperature Carry out another one-shot measurement.
When verification stove is started shooting, fan will start, and with relatively low rotation speed operation, can so increase thermal field uniformity and incite somebody to action Heat blows out from top, makes components and parts below burner hearth be unlikely to the too high damage of temperature, it is ensured that safety.When temperature of the measurement and setting When the proportional difference of temperature spot is excessive, voltage is adjusted by Switching Power Supply, make fan full-speed operation, lowered the temperature by forced convertion Mode, makes the rapid close correction value of actual temperature.
In traditional PID control system, larger overshoot is often produced, and with damped oscillation.Even if using integration Detached scheme can not improve well, and simply integrate partition method usually because coefficient chooses improper, reach product It is stable with regard to oneself before subregion, it is very difficult to achieve effective control.In dynamic continuously adjustabe control system development, vibration tends to design temperature point When, temperature change approaches set point.At this moment reduce pid parameter value, reduce control intensity, to reduce hyperharmonic vibration. When vibration deviates design temperature point, the change of temperature is remote from set point.At this moment the parameter value of PID is increased, strengthens its control Make of so as to the equilibrium point needed for faster temperature is withdrawn into, balance is reached as early as possible.
This heater calibration can be used not only for the field calibration of short temperature detection sensor, and through actual measurement and emulate, temperature Degree field is uniform, and the expanded uncertainty of the result of test can reach U=0.03 DEG C.

Claims (10)

1. a kind of shallow type temperature checking stove that declines, it is characterised in that:Including cylinder combustion chamber, installation is provided with combustion chamber and treats thermometric The patchhole of degree detecting element, is block around patchhole, and around combustion chamber excircle ceramic electrical heating tube, the pottery are set with Porcelain electrothermal tube is slightly longer than combustion chamber, and section bottom encases combustion chamber, and outside the ceramic electrical heating tube annular furnace is set with, in the burner hearth Interior circular combustion chamber is evenly arranged with multiple small-sized heating rods, and the burner hearth outer wrapping heat-insulation layer, with the heating of small-sized heating rod, or Person's ceramic electrical heating tube and small-sized heating rod are heated simultaneously, and monitoring temperature sensor is additionally provided with below the combustion chamber and burner hearth Installing plate, for installing the proof armored platinum resistor as monitoring temperature sensor, there is temperature-control hole from the bottom up in combustion chamber, described Proof armored platinum resistor is arranged on monitoring with temperature sensor installing plate, up extend in the temperature-control hole of combustion chamber from bottom, in institute State and wrapped up combustion chamber from the inside to the outside, ceramic electrical heating tube, burner hearth and heat-insulation layer with body of heater shell outside heat-insulation layer, set above Lid is equipped with, platinum resistance installing plate lower section is provided with lower cover, it is base of furnace body to have in the middle of lower cover below air holes, lower cover, the stove Fan is provided with body base.
2. the shallow type temperature checking stove that declines as claimed in claim 1, it is characterised in that:The well depth that the combustion chamber is inserted into hole is little It is more than or equal to 40mm in the well depth equal to 60mm, the temperature-control hole.
3. the shallow type temperature checking stove that declines as claimed in claim 1, it is characterised in that:The block is replaceable using polylith Block splices, and makes combustion chamber be inserted into hole and has multiple diameter, and block is made using red copper material.
4. the shallow type temperature checking stove that declines as claimed in claim 1, it is characterised in that:The power of the ceramic electrical heating tube is 500W, the power of the small-sized heating rod is 25W, and the small-sized heating rod is angularly configured with the central point of combustion chamber as the center of circle 6, by the putting hole of the heating rod, nearly home position is additionally provided with the wind guide tank from top to bottom of semicircle.
5. the shallow type temperature checking stove that declines as claimed in claim 1, it is characterised in that:The ceramic electrical heating tube, small-sized heating Rod and fan are electrically connected by high temperature wire with temperature controller, and the proof armored platinum resistor is also electrically connected with temperature controller, Temperature controller receives the temperature signal of proof armored platinum resistor transmission, and control ceramic electrical heating tube, small-sized heating rod and fan make combustion chamber Interior temperature is rapidly achieved and is maintained in the temperature of needs.
6. the shallow type temperature checking stove that declines as claimed in claim 5, it is characterised in that:The temperature controller is included for setting The temperature setting module and temperature control module of detection calibration temperature spot are determined, the temperature control module adopts PID control, according to the school of setting The real time temperature change of quasi- temperature spot and proof armored platinum resistor transmission controls respectively the ceramic electrical heating tube for connecting or/and small-sized heating rod Heating power, and cooling control module, control connection fan rotating speed.
7. the method that a kind of application shallow type temperature checking stove that declines as claimed in claim 5 carries out detector unit verification, It is characterized in that comprising the following steps:(1) detector unit to be measured is inserted into into inserting in the hole in the combustion chamber;(2) will A piece AA levels PT100 proof armored platinum resistor is up extend in the temperature-control hole of combustion chamber as monitoring temperature sensor from bottom;(3) The temperature controller should be chosen according to the calibration temperature spot for setting, calibration temperature spot in the range of 50~300 DEG C, much In three temperature spots, the temperature control module of temperature controller is selected with the heating of small-sized heating rod, or ceramic electrical heating tube and it is small-sized plus Hot pin is heated simultaneously, while starting fan, with relatively low rotation speed operation;(4) when the real time temperature of proof armored platinum resistor transmission is close to During calibration temperature spot, temperature control module reduces ceramic electrical heating tube output or small-sized heating rod and reduces heating power in real time, together When ceramic electrical heating tube heated with less output batch (-type), make whole temperature control process steady;(5) after temperature reaches and stablizes, The show value of detector unit to be measured and the measured value of proof armored platinum resistor are recorded respectively, and the record time is no less than 10 minutes, surveys Amount speed is once measured twice for per minute on each calibration point, when calibration point setting is changed, in design temperature Measurement during rising once, when dropping at a set temperature another one-shot measurement is carried out.
8. the method for carrying out detector unit verification as claimed in claim 7, it is characterised in that:When calibration temperature spot setting At 50~100 DEG C, heated using small-sized heating rod, ceramic electrical heating tube is stopped or carried out adding with less output discontinuity Thermal technology makees, and when calibration temperature spot is set in 100~300 DEG C of operated within range, two kinds of ceramic electrical heating tube and small-sized heating rod add Hot mode carries out real-time adjustment heating power simultaneously.
9. the method for carrying out detector unit verification as claimed in claim 7, it is characterised in that:When verification stove is started shooting, wind Fan will start, with relatively low rotation speed operation, when the real time measure temperature and the ratio of design temperature point of proof armored platinum resistor monitoring When difference is excessive, voltage is adjusted by Switching Power Supply, make fan full-speed operation, by way of forced convertion is lowered the temperature, make reality The rapid close correction value of temperature.
10. the method for carrying out detector unit verification as claimed in claim 7, it is characterised in that:In the step 4, When calibration temperature spot temperature oscillation is close to, when vibration tends to design temperature point, temperature control module reduces pid parameter value, reduces control Intensity processed, reduces hyperharmonic vibration;When vibration deviates design temperature point, the parameter value of PID is increased, strengthen control action, faster Temperature is withdrawn into calibration temperature spot.
CN201410838546.4A 2014-12-26 2014-12-26 Shallow-type micro temperature calibration furnace and calibration method Active CN104502000B (en)

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