CN104471466A - Optical modulator and optical transmitter - Google Patents
Optical modulator and optical transmitter Download PDFInfo
- Publication number
- CN104471466A CN104471466A CN201280074666.0A CN201280074666A CN104471466A CN 104471466 A CN104471466 A CN 104471466A CN 201280074666 A CN201280074666 A CN 201280074666A CN 104471466 A CN104471466 A CN 104471466A
- Authority
- CN
- China
- Prior art keywords
- optical waveguide
- pair
- light
- narrow width
- photomodulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
- H04B10/503—Laser transmitters
- H04B10/505—Laser transmitters using external modulation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/05—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 multimode
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Signal Processing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Electromagnetism (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
An optical modulator comprises: a substrate on which an optical waveguide is formed, said optical waveguide including a branch section for branching input light, a pair of arms through which each of the light branched by the branch section is propagated, and a multiplexer for multiplexing the light output from the pair of arms; and one or more electrodes which partially overlap the optical waveguide on the substrate and generate an electric field in the optical waveguide on the basis of an applied voltage. The optical waveguide is provided with a narrow width section having a width narrower than other sections so as not to overlap the one or more electrodes.
Description
Technical field
The present invention relates to photomodulator and optical transmitter.
Background technology
There will be a known LiNbO
3(LN) substrate, LiTaO
2substrates etc. adopt the optical waveguide device of electric light crystallization.Such as, optical waveguide is formed by making it carry out thermal diffusion after form the metal films such as titanium in a part for substrate surface.Or, form optical waveguide by implementing proton exchange after the composition (patterning) of the enterprising row metal film of substrate in benzoic acid (benzoic acid).In addition, optical waveguide device is provided with the electrode controlled near optical waveguide.As such optical waveguide device, such as, can enumerate mach zhender (Mach-Zehnder) type (following, to be expressed as " MZ type ") photomodulator.
MZ type photomodulator is used for, in the optical devices such as optical transmitter, carrying out intensity modulated and generate light signal to the light inputted from external light source.The guided wave road of MZ type photomodulator has: branch, and the light inputted from light source is carried out branch by it; A pair arm, they propagate the light of branch respectively; And coupling part, it makes the light propagated in arm again merge.
MZ type photomodulator by producing electric field to the electrode application voltage being arranged at top, guided wave road, and utilizes Pockels effect (Pockels effect) control the refractive index of the light in guided wave road and modulate.By this control, MZ type photomodulator merge in coupling part two only same phase time become light wave strengthen merge after the on-state (on-state) that exports, on the other hand, MZ type photomodulator becomes light wave and cancels out each other and the off state (off-state) not exporting light when both are opposite phase (that is, phase differential are the state of π).
The ratio of the output light intensity of on-state and off state is called extinction ratio, and it is known as one of parameter relevant to communication quality.Extinction ratio is infinitely great under ideal conditions, but in fact becomes finite value due to the impact of the ratio of power of light propagated in a pair arm and the light of higher order mode etc.
About MZ type photomodulator, such as, Patent Document 1 discloses the technology utilizing Voltage Cortrol to make the power equalization of the light propagated in each arm.The output guided wave road that Patent Document 2 discloses by arranging higher order mode in the rear class of coupling part prevents from exporting in light the technology that the pattern that is mixed into does not mate light.Patent Document 3 discloses and make the branching ratio of branch become the technology of 50 (%) by arranging the low position of refractive index ratio other parts on branch.
In addition, Patent Document 4 discloses following technology: by arranging the position slowly broadened after width slowly narrows in a part for arm, being absorbed in the stress that produces in guided wave road when guided wave road is made and offsetting birefringence.Patent Document 5 discloses following technology: the width position wider than other parts being set on the opposing party by arranging width narrow position more local than other on a side of a pair arm, compensating the width on guided wave road and the error of angle that produce in manufacturing process.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2009-80189 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2010-237376 publication
Patent documentation 3: Japanese Unexamined Patent Publication 2011-257634 publication
Patent documentation 4: Japanese Unexamined Patent Publication 7-281041 publication
Patent documentation 5: Japanese Unexamined Patent Publication 2011-118055 publication
Summary of the invention
Invent problem to be solved
Popularizing along with high speed optical communication network, replace binary modulated mode, the many-valued modulation system of DQPSK (DifferentialQuadrature Phase Shift Keying: differential quadrature phase keying (DQPSK)) etc. is frequently adopted.Therefore, the extinction ratio improving MZ type photomodulator is expected.
Such as, when arm is multimode guided wave road, even if the light power equalization of branch also comprises the light of higher order mode in branch.The light of higher order mode is because the degree of modulation of electric field that produces of electrode is different from the light of basic model, so the phase differential of the light propagated in two arms is not in the off case π and as noise light output, result makes extinction ratio reduce.In addition, even if the light that the technology hypothesis disclosed in patent documentation 3 can remove the higher order mode produced in coupling part also cannot remove propagation in arm and the light of the higher order mode be combined with the light of basic model in coupling part.
Therefore, the application makes in view of above-mentioned problem, its objective is the photomodulator and optical transmitter that provide and effectively improve extinction ratio.
The means of dealing with problems
Photomodulator described in this instructions possesses: substrate, it is formed with optical waveguide, and this optical waveguide comprises the branch light of input being carried out branch, the coupling part propagating the light exported from above-mentioned a pair arm by a pair arm of the light of above-mentioned branch branch and merging respectively; With more than 1 electrode, they are overlapping with a part for above-mentioned optical waveguide on aforesaid substrate, and in above-mentioned optical waveguide, producing electric field according to applied voltage, above-mentioned optical waveguide is set to, and has the width narrow width part narrower than other parts not overlapping with the electrode of above-mentioned more than 1.
Invention effect
Photomodulator described in this instructions and optical transmitter can play and effectively improve the such effect of extinction ratio.
Accompanying drawing explanation
Fig. 1 is the vertical view of the photomodulator of comparative example.
Fig. 2 is the cut-open view in the cross section of the II-II line illustrated based on Fig. 1.
Fig. 3 is the figure of the spectrum of each several part of the optical waveguide illustrated under on-state.
Fig. 4 is the figure of the spectrum of each several part of the optical waveguide illustrated under off state.
Fig. 5 is the vertical view of the photomodulator of the 1st embodiment.
Fig. 6 is the vertical view of the photomodulator of the 2nd embodiment.
Fig. 7 is the vertical view of the optical waveguide that narrow width part is shown enlargedly.
Fig. 8 is the vertical view of the photomodulator of the 3rd embodiment.
Fig. 9 is the vertical view of the photomodulator of the 4th embodiment.
Figure 10 is the vertical view of the photomodulator of the 5th embodiment.
Figure 11 is the vertical view of the photomodulator of the 6th embodiment.
Figure 12 is the structural drawing of the structure that optical transmitter is shown.
Embodiment
(comparative example)
Fig. 1 is the vertical view of the photomodulator of comparative example.Photomodulator 1 has the substrate 10 being formed with optical waveguide 2; Ground-electrode 31,33; Signal electrode 32; Bias electrode (bias electrode) 34,35; Signal source 41; Terminal resistance 42 and direct supply 43,44.In addition, in FIG, electrode 31 ~ 35 is formed on the plate face of substrate 10, therefore utilizes dotted line to represent to carry out distinguishing with the shape of optical waveguide 2.
Photomodulator 1 is modulated the light Lin that the entrance 20 from optical waveguide 2 inputs, and exports from outlet 29 as output light Lout.Export light Lout and there is on-state and off state, calculate the ratio of the luminous power of each state as extinction ratio.
Substrate 10 is LN substrate and LiTaO
2the electric light crystallization of substrate etc., has rectangular-shaped plate face.Form MZ type optical waveguide 2 on the substrate 10.That is, optical waveguide 2 comprises: branch 21, and it carries out branch to inputted light; A pair arm 22,33, it propagates the light by branch 21 branch respectively; And coupling part 24, it merges the light from a pair arm 22,33 output.In addition, in FIG, the border of each several part 21 ~ 24 is represented by the dotted line extended in Y direction on optical waveguide 2.In addition, in explanation afterwards, being " length " by the dimension definitions of X-direction, is " wide " direction by the dimension definitions of Y direction, is " thickness " by the dimension definitions of Z-direction.
A pair arm 22,33 is the guided wave roads of the linearity extended in parallel.Branch 21 comprises a pair input guided wave road 211,212, and this pair input guided wave road 211,212 has Y shape shape and the take-off point P1 carrying out branch from light respectively extends to a pair arm 22,33.In addition, coupling part 24 comprises a pair output guided wave road 241,242, exports guided wave road 241,242 for this pair and has Y shape shape and extend to from a pair arm 22,33 the merging point P2 that light carries out merging respectively.Input guided wave road 211,212 for a pair and export the bending guided wave road that guided wave road 241,242 is the curves such as with S shape for a pair.
Optical waveguide 2 is multimode guided wave road (multimode waveguide), so the light carrying out not only comprising in the light of branched power basic model in branch 21 also comprises the light of higher order mode.The communication mode of this light decides according to the incident angle of carrying out the light be totally reflected on optical waveguide 2 and the border as the outside of covering as core.
Fig. 2 illustrates the cross section of the II-II line based on Fig. 1.Optical waveguide 2 (being arm 22,33 here) has the cross section of semicircle shape, such as, by form the metal films such as titanium in the part on substrate 10 surface after, make it carry out thermal diffusion to be formed.In addition, optical waveguide 2 is not limited only to this, such as by carry out metal film on the substrate 10 composition after carry out proton exchange to be formed in benzoic acid.
Sequentially laminated with cushion 11 and electrode 31 ~ 33 on substrate 10.Cushion 11 is such as by SiO
2formed, there is the thickness of 0.2 ~ 2.0 (μm).Cushion 11 prevent the light propagated respectively in arm 22,33 by signal electrode 32 and ground-electrode 31,33 absorb.
The electrode 31 ~ 35 formed by electric conductors such as gold is set on cushion 11.When substrate 10 is the substrates cut along the Z of the Z-direction of crystal optics axle, in order to utilize the electric field of Z-direction, directly over optical waveguide 2, be provided with signal electrode 32 and bias electrode 34,35.
Signal electrode 32 and bias electrode 34,35 overlapping with a part for optical waveguide 2 on the substrate 10, in optical waveguide 2, produce electric field according to applied voltage.Thus, the light carrying out propagating in optical waveguide 2 produces 1 rank electrooptical effect and Pockels effect, carries out phase-modulation by variations in refractive index.
As shown in Figure 1, signal electrode 32 be formed as along an arm 23 extend and with the partly overlapping of being connected from branch 21 in this arm 23.The two ends of signal electrode 32 bend to the sidepiece of substrate 10.
Bias electrode 34,35 be formed as along a pair arm 22,33 extend respectively and with the partly overlapping of being connected from coupling part 24 in this arm 22,33.One end of bias electrode 34,35 is to the lateral curvature of substrate 10.
In addition, ground-electrode 31,33 is applied in earthing potential.Ground-electrode 31 is formed as extending along a sidepiece of substrate 10, and its part partly overlaps with being connected from branch 21 in arm 22.The both ends of ground-electrode 31 are bending to the other side of substrate 10.Another ground-electrode 31 is formed as rectangular-shaped along the sidepiece of the substrate 10 with ground-electrode 31 opposition side.That is, ground-electrode 31,33 is set to clamp signal electrode 32 on the substrate 10.In addition, each electrode 31 ~ 35 has the electrode structure of coplanar (coplanar) line type.
Signal electrode 32 is traveling wave electrodes, is transfused to from signal source 41 for the modulation signal S modulated light.Modulation signal S is electrical radio-frequency signal (microwave), and it is transfused to the neighbouring part of input end in signal electrode 32, arm 23, and the direction of propagation along light is transmitted, and near the output terminal of arm 23, part is output to terminal resistance 42.One end of terminal resistance 42 is connected with arm 23, other end ground connection.In addition, the resistance value of terminal resistance 42 decides according to the electrical specification of signal source 41 and signal electrode 32 etc.
Thus, the refractive index of a pair arm 22,33 such as according to becoming+Δ Na, the mode of-Δ Nb changes, and produces phase differential in the light propagated respectively in each arm 22,33.Further, when the light propagated respectively merges in coupling part 24, produce Mach Zehnder interferometry in each arm 22,33, and export the output light Lout of on-state or off state according to above-mentioned phase differential.In addition, modulation signal S utilizes the cross sectional shape of control signal electrode 32 to adjust the execution refractive index of arm 23, carries out the speeds match with the light wave propagated in arm 23 thus, so photomodulator 1 has the wide action frequency band of more than such as 10 (GHz).
Bias electrode 34,35 is connected respectively with direct supply 44,43.Direct supply 44,43 in order to compensate the displacement of the operating point in the characteristic of the modulation signal S caused due to temperature variation etc., and applies bias voltage Eb1, Eb2 to bias electrode 34,35.Such as, bias voltage Eb1, Eb2 is decided according to the level of the output light Lout obtained by photodiode etc.In addition, in this example, although bias electrode 34,35 and signal electrode 32 are provided separately, also can adopt bias voltage T circuit that bias electrode 34,35 is set to the electrode common with signal electrode 32.
In addition, in order to separately carry out controlling for a pair arm 22,33 and be respectively arranged with bias electrode 34,35.In addition, a bias electrode 35 is arranged at intervals with at the terminal side part of the top of arm 23 and signal electrode 32 across certain.
Then, the light carrying out propagating in the optical waveguide 2 of the modulator 1 of this example is described.Fig. 3 illustrates the spectrum of each several part of the optical waveguide 2 under on-state.
Curve map G10 is the spectrum of the light inputing to branch 21.The light of input carries out branched power by branch 21, in a pair arm 22,33, become the light shown in curve map G11 ~ G14.
The light of basic model (0 pattern) in an arm 22 shown in propagation curve figure G11 and the light of the higher order mode shown in curve map G12.The light of the basic model shown in propagation curve figure G12 and the light of the higher order mode shown in curve map G14 in another arm 23.The light producing higher order mode is in this wise because optical waveguide 2 is the causes on multimode guided wave road as mentioned above.
In an on state, signal electrode 32 is applied in the voltage of modulation signal S, to make the phase differential of the light propagated in arm 22,33 for 0.For this reason, the light propagated in arm 22,33 is transfused to coupling part 24 under the state keeping same phase place.The spectrum of basic model is now shown in curve map G15, G16, and the spectrum of higher order mode is shown in curve map G17, G18.
The light merged in coupling part 24, because be same phase place, is output so strengthen after ground merging power becomes the light of the basic model shown in curve map G19.Now, the light (light of G16, G18) of the higher order mode propagated in arm 22,33 becomes the light of basic model due to interference, is combined with output light.
On the other hand, Fig. 4 illustrates the spectrum of each several part of the optical waveguide 2 under off state.Curve map G20 represents the spectrum of the light inputing to branch 21.In addition, curve map G21, G23 represent the spectrum by the basic model of the light of branch 21 branch, and curve map G21, G23 represent the spectrum of higher order mode.
In the off case, signal electrode 32 is applied in the voltage of modulation signal S, becomes π to make the phase differential of the light propagated in arm 22,33.Therefore, as shown in curve map G25, G27, the light of the basic model propagated in arm 22,33 becomes phase place positive and is input to coupling part 24 on the contrary.Therefore, the light merged becomes the light of the higher order mode shown in curve map G29 and is radiated to outside.That is, the light shown in curve map G25, G27 is cancelled in coupling part 24.
On the other hand, the difference due to the light of higher order mode and the light of basic model is the closure to optical waveguide 2, so different based on the degree of modulation (that is, the applying efficiency of electric field) of electric field.That is, the voltage of the modulation signal S of π is become for the phase differential of the light making the higher order mode shown in curve map G26, G28 different from the light of the basic model shown in curve map G25, G27.
Therefore, the light of the higher order mode shown in curve map G26, G28 is not cancelled and remains in coupling part 24, and is output to outside as the noise light of the basic model shown in curve map G30 from outlet 29.This noise light becomes the reason that extinction ratio is worsened.Therefore, in the embodiment of following description, the narrow width part with the width narrower than other parts is set on optical waveguide 2 in order to remove the light of higher order mode.
(the 1st embodiment)
Fig. 5 is the vertical view of the photomodulator 1 of the 1st embodiment.In Figure 5, the structure mark prosign identical to the comparative example shown in function with Fig. 1, and the description thereof will be omitted.
In the present embodiment, a pair arm 25,26 is arranged respectively the narrow width part 251,261 with the width narrower than other parts.The narrow width part 261 of an arm 26 is arranged between the part overlapping with signal electrode 32 and the part overlapping with bias electrode 35.The narrow width part 251 of another arm 25 is arranged in the longitudinal direction and in the position identical with above-mentioned narrow width part 261.
Narrow width part 251,261 acts on according to the mode making the closure of light in arm 25,26 weaken.This is because when width is narrow, in arm 25,26, the concentration of the impurity of diffusion reduces, and saturated index reduces thus.Therefore, in narrow width part 251,261, the light of higher order mode is radiated to outside, and only the luminous energy of basic model is by narrow width part 251,261.That is, narrow width part 251,261 plays function as the single-mode guided wave road of filtering multimodal light.
The multimodal only basis of narrow width part 251,261 removal is utilized to be confirmed by light in optical waveguide 2.Such as, in entrance 20 connecting fiber of optical waveguide 2, from light source input light, on the other hand, arrange at outlet 29 place of optical waveguide 2 for observing the camera exporting light Lout.Further, when the optical fiber of mobile entrance 20, as long as the observed image of the output light Lout obtained from camera does not change, just can confirm to utilize narrow width part 251,261 to eliminate multimodal light.
In addition, narrow width part 251,261 is avoided the part overlapping with signal electrode 32 in arm 25,26 and the part overlapping with bias electrode 35 and is arranged.Therefore, the closure of the light of part that the electric field intensity in optical waveguide 2 is higher (part that electric field line is concentrated) can be avoided to reduce.Suppose when narrow width part 251,261 is arranged on the part overlapping with signal electrode 32 and the part overlapping with bias electrode 35, because the closure of light reduces, the modulation efficiency based on modulation signal S reduces.
This tendency is more remarkable when the closure of light is more weak as the LN modulator of this example.When modulation efficiency reduces, because the driving voltage of signal source 41 increases, so power consumption and thermal value increase.In addition, when extending the length of the length of signal electrode 32 and bias electrode 35 or extension arm 25,26 when the reduction in order to Compensation Modulation efficiency, photomodulator 1 is caused to maximize.
Like this, narrow width part 251,261 is set by the part that the electric field intensity in selective light waveguide 2 is weak, increases without the need to the driving voltage and size making photomodulator 1, just can remove the light of higher order mode from optical waveguide 2.When the example of Fig. 3 and Fig. 4, narrow width part 251,261 is utilized to remove the light of the higher order mode shown in curve map G12, G14, G22, G24.Therefore, do not produce the noise light shown in curve map G30, the extinction ratio of photomodulator 1 can be improved.Extinction ratio that the numerical simulation that this point is undertaken by inventor obtains, comparative example is-24.6 (dB) and the extinction ratio of the present embodiment is that the such result of-35.2 (dB) also can be understood on the other hand.In addition, in the present embodiment, the both sides of a pair arm 25,26 are provided with narrow width part 251,261, even but when only arranging narrow width part on a side of arm 25,26, also noise light can be reduced, so same action effect can be obtained.
(the 2nd embodiment)
In the 1st embodiment, consider the interval due to signal electrode 32 and bias electrode 35 and cause the width in narrow width part 251,261 to change suddenly and produce the situation of the scattering loss of light.Here, the width that the photomodulator 1 of the 2nd embodiment shown in Fig. 6 is configured to optical waveguide 2 slowly narrows to narrow width part 252,262.In addition, in figure 6, the structure mark prosign identical to the comparative example shown in function with Fig. 1, and the description thereof will be omitted.
In the present embodiment, a pair arm 25,26 is respectively arranged with narrow width part 252,262.Optical waveguide 2 becomes and attenuates with wedge-like towards narrow width part 252,262.
In an arm 26, in order to avoid the reduction of above-mentioned modulation efficiency, and the position being started by width to change is set as avoiding the part overlapping with signal electrode 32 and the part overlapping with bias electrode 35.In addition, in another arm 25, in order to avoid the reduction of above-mentioned modulation efficiency, and position width being started change is set as avoiding the higher part of the electric field intensity of ground-electrode 31 and the part overlapping with bias electrode 34.
Like this, by making the width of optical waveguide 2 slowly change towards narrow width part 252,262, the scattering loss of above-mentioned light can either be suppressed, can extinction ratio be improved again.In addition, in the present embodiment, be not only narrow width part 252,262, the part that width changes towards narrow width part 252,262 and above-mentioned wedge portion also assist in removing the light of higher order mode, so more effectively can improve extinction ratio.In addition, list the mode that width changes with wedge-like in the present embodiment, but be not limited thereto, such as, also can in the following way: become stairstepping by making the sidepiece of part near narrow width part 252,262 and make width towards the steps change of narrow width part 252,262.
In addition, by making the size etc. of narrow width part 252,262 be formed as identical size, producible loss in narrow width part 252,262 is reduced in further.Such as, in the enlarged drawing of the narrow width part 252,262 shown in Fig. 7, the width W 1 of narrow width part 252,262, W2 can be made identical.In addition, can make to distinguish identical with the length L11 of the wedge portion that narrow width part 252,262 connects, L12, L21, L22.Here, length L11, the L12 of wedge portion are position x11, x12 each length to narrow width part 252 of change from width respectively.In addition, length L21, the L22 of wedge portion are position x21, x22 each length to narrow width part 262 of change from width respectively.
(the 3rd embodiment)
In the 2nd embodiment, be set to avoid the part overlapping with signal electrode 32 and the part overlapping with bias electrode 35 by with the wedge portion that narrow width part 262 connects, but be not limited only to this.The example of the photomodulator 1 formed in the following manner shown in Figure 8: the width of optical waveguide 2 slowly narrows towards narrow width part 263 from the part overlapping with signal electrode 32 and the part overlapping with bias electrode 35.In fig. 8, the structure mark prosign identical to the comparative example shown in function with Fig. 1, and the description thereof will be omitted.
In the example shown in Fig. 8, be also same about another narrow width part 253, the width of its optical waveguide 2 slowly narrows towards narrow width part 253 from the part overlapping with bias electrode 34.That is, by with the position that the width of the wedge portion that narrow width part 253,263 connects starts to change be set as the part overlapping with signal electrode 32 and with bias electrode 35,34 overlapping parts.
According to this structure, due to the length dimension of the wedge portion of wide variety can be increased, so can extinction ratio be improved in small-sized photomodulator 1.In addition, the position that the width of the wedge portion connected with narrow width part 263 starts to change is not limited to the part overlapping with signal electrode 32 and the part both sides overlapping with bias electrode 35, can be any one party.
In addition, in such a configuration, because the width of optical waveguide 2 narrows, so the modulation efficiency of light can be affected from the part overlapping with signal electrode 32 and with bias electrode 34,35 overlapping parts.Especially, when changing the width of the part overlapping with signal electrode 32, because the modulation efficiency of light changes, thus also can affect modulation band, and being not only driving voltage.The value that this modulation band obtains according to carrying out integration to modulation efficiency in arm 26 decides.
Modulation efficiency depends on the frequency of modulation signal S, but also changes according to the position in optical waveguide 2.Because the loss of the higher then microwave of frequency is larger, so the modulation efficiency compared with the input part of modulation signal S of the efferent in arm 26 reduces.
In the present embodiment, the width of optical waveguide 2 slowly narrows to narrow width part 263 from the part overlapping with the terminal side part 321 of modulation signal S in signal electrode 32.Here, the part 321 of the end side of so-called modulation signal S refer in signal electrode 32 with the link position of terminal resistance 42 near part.
According to this structure, in the part 321 of the natively low efferent of arm 26 of modulation efficiency and the end side of modulation signal S, the narrowed width of optical waveguide 2, so the impact that can reduce on above-mentioned modulation band.
(the 4th embodiment)
In 1st ~ 3 embodiments, although a pair arm 25,26 is respectively arranged with narrow width part 251 ~ 253,261 ~ 263, be not limited only to this.The example being respectively arranged with the photomodulator 1 of narrow width part 2711,2721 on a pair input guided wave road 271,272 of branch 27 shown in Figure 9.In fig .9, the structure identical to the comparative example shown in function with Fig. 1 marks identical symbol, and the description thereof will be omitted.
In the present embodiment, the width on a pair input guided wave road 271,272 slowly narrows towards narrow width part 2711,2721.That is, optical waveguide 2 attenuates towards narrow width part 2711,2721 with wedge-like.Here, the position that the width of optical waveguide 2 starts to change also can be overlapping with signal electrode 32.
According to the present embodiment, because the width of the optical waveguide 2 be connected with narrow width part 2711,2721 slowly narrows, so the action effect identical with the above-mentioned 2nd and the 3rd embodiment can be obtained.In addition, in the present embodiment, due to a pair arm 22,33 not arranging narrow width part 2711,2721, so the length of arm 22,33 can be shortened.Therefore, according to the present embodiment, extinction ratio can be improved in small-sized photomodulator 1.
(the 5th embodiment)
In the 4th embodiment, although narrow width part 2711,2721 is arranged on branch 271, be not limited only to this, also can be arranged in coupling part 24.Narrow width part 2811,2821 shown in Figure 10 is separately positioned on the example exporting the photomodulator 1 on guided wave road 281,282 for a pair of coupling part 28.In Fig. 10, the structure mark prosign identical to the comparative example shown in function with Fig. 1, and the description thereof will be omitted.
In the present embodiment, the width exporting guided wave road 281,282 for a pair slowly narrows towards narrow width part 2811,2821.That is, optical waveguide 2 attenuates to narrow width part 2811,2821 with wedge-like.Here, the width of optical waveguide 2 start the position that changes also can with bias electrode 34,35 overlapping.
According to the present embodiment, because the width of the optical waveguide 2 be connected with narrow width part 2811,2821 slowly narrows, so the action effect same with the above-mentioned 2nd and the 3rd embodiment can be obtained.In addition, according to the present embodiment, a pair arm 22,33 does not arrange narrow width part 2811,2821, so the action effect same with the 4th embodiment can be obtained.In addition, in embodiment described before, narrow width part is arranged in any one party of branch 27, a pair arm 25,26 and coupling part 28, but is not limited only to this, also can be arranged in multiple part.
(the 6th embodiment)
Figure 11 illustrates the example of the photomodulator 1 used in the many-valued modulation systems such as the DQPSK of high speed optical communication.The optical waveguide 7 of photomodulator 1 is formed in the multimode guided wave road on substrate 6.Optical waveguide 7 comprises the 1st branch 70, antithetical phrase guided wave road 7a, 7b and the 1st coupling part 79.In addition, utilize in fig. 11 on optical waveguide 7 with Width extend dotted line to represent the border in each portion 70 ~ 79.
1st branch 70 has Y shape shape, and imports antithetical phrase guided wave road 7a, a 7b after carrying out branch to inputted light.One antithetical phrase guided wave road 7a, 7b is same MZ type guided wave road, comprise respectively the 2nd branch 71,72, a pair arm 73 ~ 76 and 2-in-1 ripple portion 77,78.That is, antithetical phrase guided wave road 7a, a 7b has the structure identical with the optical waveguide 2 of above-described embodiment respectively.
2nd branch 71,72 has Y shape shape, and imports a pair arm 73 ~ 76 respectively after carrying out branch to the light inputted from the 1st branch 70.A pair arm 73 ~ 76 propagates the light of the 2nd branch 71,72 branches respectively.A pair arm 73 ~ 76 imports light into 2-in-1 ripple portion 77,78 respectively.
2-in-1 ripple portion 77,78 has Y shape shape, and merges the light from a pair arm 73 ~ 76 output respectively, then imports the 1st coupling part 79.1st coupling part 79 has Y shape shape, its by export from antithetical phrase guided wave road 7a, a 7b i.e. the 2-in-1 ripple portion 77,78 photosynthetic and after output to outside.Therefore, when globality observe time, the optical waveguide 7 in the present embodiment forms MZ type guided wave road.In addition, the 1st and the 2nd branch 70 ~ 72 branch and the 1st and the branch in 2-in-1 ripple portion 77 ~ 79 are the bending guided wave roads of the curve such as with S shape.
In addition, photomodulator 1 have the 1st and the 2nd signal electrode 82,83, ground-electrode the 80,811,812 and the 1st ~ 6th bias electrode 84 ~ 89.By the 1st and the 2nd signal electrode 82,83, ground-electrode 80 and the 1st ~ 6th bias electrode 84 ~ 89 be arranged to partly overlap with optical waveguide 7 on substrate 6.Same as the previously described embodiments, substrate 6 is laminated with each electrode 80 ~ 89,811,812 across cushion.
1st and the 2nd signal electrode 82,83 produces electric field in a pair arm 73 ~ 76, is used for the modulation signal of light modulated from signal source input.1st and the 2nd signal electrode 82,83 is formed respectively in the mode extended along arm 73,76, and with the partly overlapping of being connected from the 2nd branch 71,72 in this arm 73,76.The two ends of the 1st and the 2nd signal electrode 82,83 bend to the sidepiece of substrate 6.
1st ~ 6th bias electrode 84 ~ 89 is connected respectively with direct supply, in order to compensate the displacement of the operating point in the characteristic of the modulation signal caused due to temperature variation etc., and applies bias voltage.1st ~ 6th bias electrode 84 ~ 89 is formed in the mode extended along arm 73 ~ 76, and with the partly overlapping of being connected from 2-in-1 ripple portion 77,78 in this arm 73 ~ 76.One end of 1st ~ 6th bias electrode 84 ~ 89 bends to the sidepiece of substrate 6.
In addition, ground-electrode 80,811,812 is applied in earthing potential.Ground-electrode 80 partly overlaps with being connected respectively from the 2nd branch 71,72 in arm 74,75.The both ends of ground-electrode 80 are to the lateral curvature of substrate 6.
Ground-electrode 811,812 is formed as rectangular-shaped along the sidepiece of substrate 6.Ground-electrode 80,811,812 is arranged on substrate 6 clamping the 1st and the 2nd signal electrode 82,83.In addition, each electrode 80 ~ 89,811,812 has the electrode structure of coplanar (coplanar) line type.
Optical waveguide 7 is provided with the width narrow width part narrower than other parts 710,711,730,740,750,760.Narrow width part 710,711,730,740,750,760 is set to not overlapping with the 1st and the 2nd signal electrode the 82,83 and the 1st ~ 6th bias electrode 84 ~ 89.
Narrow width part 710,711 is separately positioned on border that is in the 2nd branch 71,72 and the 1st branch 70 and carries out between take-off point P11, P21 of branch to light.The width of the 2nd branch 71,72 slowly narrows towards narrow width part 710,711.More particularly, the 2nd branch 71,72 attenuates to narrow width part 710,711 with wedge-like.Narrow width part 710,711 removes the light of the higher order mode produced in the 1st branch 70.
Arm 73,76 is with the 1st and the 2nd signal electrode 82,83 overlapping parts be respectively arranged with narrow width part 730,760 with between bias electrode 84,87 overlapping parts.The width of arm 73,76 slowly narrows towards narrow width part 730,760.More particularly, arm 73,76 attenuates to narrow width part 730,760 with wedge-like.
The width of optical waveguide 7a, 7b slowly can narrow from the 1st and the 2nd signal electrode the 82,83 and the 1st and the 4th bias electrode 84,87 overlapping parts to narrow width part 730,760.That is, for the wedge portion be connected with narrow width part 730,760, the position that its width starts to change can be in the part of the 1st and the 2nd signal electrode the 82,83 and the 1st and the 4th bias electrode 84,87 overlap.
In the longitudinal direction, the narrow width part 740,750 of another arm 74,75 is being respectively arranged with above-mentioned narrow width part 730,760 identical positions.The width of arm 74,75 slowly narrows towards narrow width part 730,760.More particularly, arm 74,75 attenuates to narrow width part 740,750 with wedge-like.
The width of optical waveguide 7a, 7b also slowly can narrow from the 2nd and the 5th bias electrode 85,88 overlapping parts towards narrow width part 740,750.That is, for the wedge portion be connected with narrow width part 740,750, the position that its width starts to change can be in and the 2nd and the 5th bias electrode 85,88 overlapping parts.In addition, in a pair arm 73 ~ 76, the width of narrow width part 730,760 and equal with the length of the wedge portion that narrow width part 730,760 connects.
Narrow width part 730,740 removes the light of the higher order mode produced in the 2nd branch 71.In addition, narrow width part 750,760 removes the light of the higher order mode produced in the 2nd branch 72.
According to above-mentioned structure, the extinction ratio of the photomodulator 1 used in the many-valued modulation systems such as DQPSK effectively can be improved.In addition, in the present embodiment, the position being provided with narrow width part is not limited.Such as, narrow width part only can be arranged on a side of a pair arm 73 ~ 76, in addition, also can be arranged on the 1st branch 70 or the 1st and 2-in-1 ripple portion 77 ~ 79 etc.
(embodiment of optical transmitter)
Then, to adopting the optical transmitter of above-mentioned photomodulator 1 to be described.Figure 12 illustrates the structure example of optical transmitter.
Optical transmitter 9 comprises photomodulator 1, light source 90 and data generating section 91.Light source 90 is such as laser diode, exports the light without modulated continuous wave (CW:Continuous Wave) to photomodulator 1 via optical fiber.In addition, connecting photomodulator 1 and the optical fiber of light source 90 can be any one in single mode fibers and multimode optical fiber.
In addition, data generating section 91 generates drive singal according to the data as object output, and exports photomodulator 1 to.Photomodulator 1 generates modulation signal S according to drive singal, modulates and exports after light source 90 inputs to the light of optical waveguide 2,7.The light exported is output to outside via the optical fiber 5 be connected with the outlet 29 of optical waveguide 2,7.
Optical transmitter 9 is because comprise above-mentioned photomodulator 1, so play the action effect described.In addition, optical transmitter 9 can be configured to single module together with the optical receiver of receiving optical signals.
Above, specifically illustrate content of the present invention with reference to preferred embodiment, it is evident that, those skilled in the art can adopt the mode of various distortion according to basic fundamental thought of the present invention and teaching.
Symbol description
1 photomodulator
10 substrates
2,7 optical waveguides
21,27 branches
22,33,25,26 a pair arm
24,28 coupling part
32 signal electrodes
31,33 ground-electrodes
34,35 bias electrodes
251 ~ 253,261 ~ 263 narrow width parts
211,212,271,272 a pair input guided wave road
241,242,281,282 guided wave road is exported a pair
2711,2721,2811,2821 narrow width parts
7a, 7b guided wave road
70 the 1st branches
71,72 the 2nd branches
73 ~ 76 a pair arm
79 the 1st coupling part
77,78 2-in-1 ripple portions
710,711,730,740,750,760 narrow width parts
82 the 1st signal electrodes
83 the 2nd signal electrodes
80,811,812 ground-electrodes
84 ~ 89 the 1st ~ 6th bias electrodes
9 optical transmitters
90 light sources
Claims (19)
1. a photomodulator, is characterized in that, this photomodulator possesses:
Substrate, it is formed with optical waveguide, and this optical waveguide comprises the branch light of input being carried out branch, the coupling part propagating the light exported from described a pair arm by a pair arm of the light of described branch branch and merging respectively; With
The electrode of more than 1, they are overlapping with a part for described optical waveguide on the substrate, and in described optical waveguide, produce electric field according to applied voltage,
Described optical waveguide is set to, and the width narrow width part narrower than other parts is not overlapping with the electrode of described more than 1.
2. photomodulator according to claim 1, is characterized in that,
Described narrow width part is arranged on one or both of described a pair arm.
3. photomodulator according to claim 2, is characterized in that,
The electrode of described more than 1 comprises the signal electrode being input for the modulation signal modulating described light and the bias electrode being applied in bias voltage,
One side of described a pair arm is provided with described narrow width part between the part overlapping with described signal electrode and the part overlapping with described bias electrode.
4. photomodulator according to claim 3, is characterized in that,
The width of described optical waveguide slowly narrows towards the described narrow width part being arranged at described a pair arm.
5. photomodulator according to claim 4, is characterized in that,
The width of described optical waveguide slowly narrows towards the described narrow width part being arranged at described a pair arm from least one party in the part overlapping with described signal electrode and the part overlapping with described bias electrode.
6. photomodulator according to claim 5, is characterized in that,
The width of described optical waveguide from described signal electrode with the partly overlapping part of the end side of described modulation signal slowly narrow towards the described narrow width part being arranged at described a pair arm.
7., according to the photomodulator in claim 4 to 6 described in any one, it is characterized in that,
Described optical waveguide attenuates towards the described narrow width part being arranged at described a pair arm with wedge-like.
8. photomodulator according to claim 7, is characterized in that,
Equal with the length of the wedge portion that the described narrow width part being arranged at described a pair arm respectively connects.
9. photomodulator as claimed in any of claims 2 to 8, is characterized in that,
The width being arranged at the described narrow width part of described a pair arm is respectively equal.
10. photomodulator as claimed in any of claims 1 to 9, is characterized in that,
Described branch comprises the take-off point carrying out branch from light and extends to a pair input guided wave road till described a pair arm respectively,
Described narrow width part be arranged on described a pair input guided wave road one or both.
11. photomodulators according to claim 10, is characterized in that,
The width of described optical waveguide slowly narrows towards the described narrow width part being arranged at described a pair input guided wave road.
12. photomodulators according to claim 11, is characterized in that,
The width of described optical waveguide slowly narrows from the part that the electrode with described more than 1 is overlapping towards being arranged at the described described narrow width part inputting guided wave road for a pair.
13. photomodulators according to claim 11 or 12, is characterized in that,
Described optical waveguide attenuates towards the described narrow width part being arranged at described a pair input guided wave road with wedge-like.
14., according to the photomodulator in claim 1 to 13 described in any one, is characterized in that,
Described coupling part comprise extend to respectively till the merging point that light carries out merging from described a pair arm export guided wave road a pair,
Described narrow width part is arranged on described a pair and exports one or both of guided wave road.
15. photomodulators according to claim 14, is characterized in that,
The width of described optical waveguide slowly narrows towards being arranged at the described described narrow width part exporting guided wave road for a pair.
16. photomodulators according to claim 15, is characterized in that,
Slowly narrow towards being arranged at the described described narrow width part exporting guided wave road for a pair the part that the width of described optical waveguide is overlapping from the electrode with described more than 1.
17. photomodulators according to claim 15 or 16, is characterized in that,
Described optical waveguide attenuates towards being arranged at the described described narrow width part exporting guided wave road for a pair with wedge-like.
18., according to the photomodulator in claim 1 to 17 described in any one, is characterized in that,
Described substrate is formed with optical waveguide described in a pair,
Be imported into optical waveguide described in a pair after the optical branch of input, export respectively and merged from optical waveguide described in a pair.
19. 1 kinds of optical transmitters, is characterized in that having:
Light source; And
Photomodulator in claim 1 to 18 described in any one,
Described photomodulator modulates rear output to the light inputing to described guided wave road from described light source.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2012/069010 WO2014016940A1 (en) | 2012-07-26 | 2012-07-26 | Optical modulator and optical transmitter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104471466A true CN104471466A (en) | 2015-03-25 |
Family
ID=49996774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280074666.0A Pending CN104471466A (en) | 2012-07-26 | 2012-07-26 | Optical modulator and optical transmitter |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9557624B2 (en) |
| JP (1) | JP6131954B2 (en) |
| CN (1) | CN104471466A (en) |
| WO (1) | WO2014016940A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023045845A1 (en) * | 2021-09-22 | 2023-03-30 | 华为技术有限公司 | Optical signal sending apparatus |
| WO2024007677A1 (en) * | 2022-07-06 | 2024-01-11 | 苏州极刻光核科技有限公司 | Electro-optic modulator |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10018888B2 (en) * | 2012-06-06 | 2018-07-10 | Eospace, Inc. | Advanced techniques for improving high-efficiency optical modulators |
| JPWO2017159044A1 (en) * | 2016-03-14 | 2018-12-20 | 日本電気株式会社 | Optical branch circuit |
| JP6778154B2 (en) * | 2017-06-28 | 2020-10-28 | 日本電信電話株式会社 | Interferometer waveguide |
| JP2020166100A (en) * | 2019-03-29 | 2020-10-08 | Tdk株式会社 | Electro-optical device |
| US10534130B1 (en) * | 2019-05-21 | 2020-01-14 | Psiquantum, Corp. | Interferometer filters with compensation structure |
| US11101880B1 (en) * | 2020-03-16 | 2021-08-24 | Amazon Technologies, Inc. | Wide/multiband waveguide adapter for communications systems |
| US11609392B1 (en) * | 2022-02-24 | 2023-03-21 | X Development Llc | Photonic coupler |
| WO2023199441A1 (en) * | 2022-04-13 | 2023-10-19 | 日本電信電話株式会社 | Optical circuit |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6360432A (en) * | 1986-08-30 | 1988-03-16 | Fujitsu Ltd | Waveguide light phase modulator |
| CN1221118A (en) * | 1997-12-08 | 1999-06-30 | 三星电子株式会社 | Optical modulator using isolator and optical transmitter including the same |
| CN101292190A (en) * | 2005-08-19 | 2008-10-22 | 安立股份有限公司 | Optical modulator |
| US20100027936A1 (en) * | 2006-06-14 | 2010-02-04 | John Heaton | Tuneable electro-optic modulator |
| US20110305412A1 (en) * | 2010-06-10 | 2011-12-15 | Fujitsu Optical Components Limited | Optical waveguide, optical modulator and optical coupler |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3102874B2 (en) | 1990-11-05 | 2000-10-23 | 日本板硝子株式会社 | Y-branch optical circuit |
| JPH0593891A (en) * | 1991-10-01 | 1993-04-16 | Nec Corp | Waveguide type optical modulator and its driving method |
| JPH07281041A (en) | 1994-04-07 | 1995-10-27 | Hitachi Cable Ltd | Waveguide and mach-zehnder type optical circuit using it |
| JPH1073791A (en) * | 1996-08-30 | 1998-03-17 | Hitachi Ltd | Semiconductor mach-zehnder type optical modulator optical modulator module and optical transmission device |
| WO2007080950A1 (en) * | 2006-01-13 | 2007-07-19 | Matsushita Electric Industrial Co., Ltd. | Angle modulation device |
| JP5061817B2 (en) | 2007-09-25 | 2012-10-31 | 住友大阪セメント株式会社 | Light modulator |
| JP4745415B2 (en) | 2009-03-31 | 2011-08-10 | 住友大阪セメント株式会社 | Light modulator |
| JP5310511B2 (en) | 2009-12-01 | 2013-10-09 | 富士通株式会社 | Optical device, optical hybrid circuit, optical receiver |
| JP5071542B2 (en) | 2010-09-30 | 2012-11-14 | 住友大阪セメント株式会社 | Optical waveguide device |
-
2012
- 2012-07-26 CN CN201280074666.0A patent/CN104471466A/en active Pending
- 2012-07-26 JP JP2014526672A patent/JP6131954B2/en active Active
- 2012-07-26 WO PCT/JP2012/069010 patent/WO2014016940A1/en active Application Filing
-
2015
- 2015-01-02 US US14/588,684 patent/US9557624B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6360432A (en) * | 1986-08-30 | 1988-03-16 | Fujitsu Ltd | Waveguide light phase modulator |
| CN1221118A (en) * | 1997-12-08 | 1999-06-30 | 三星电子株式会社 | Optical modulator using isolator and optical transmitter including the same |
| CN101292190A (en) * | 2005-08-19 | 2008-10-22 | 安立股份有限公司 | Optical modulator |
| US20100027936A1 (en) * | 2006-06-14 | 2010-02-04 | John Heaton | Tuneable electro-optic modulator |
| US20110305412A1 (en) * | 2010-06-10 | 2011-12-15 | Fujitsu Optical Components Limited | Optical waveguide, optical modulator and optical coupler |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023045845A1 (en) * | 2021-09-22 | 2023-03-30 | 华为技术有限公司 | Optical signal sending apparatus |
| WO2024007677A1 (en) * | 2022-07-06 | 2024-01-11 | 苏州极刻光核科技有限公司 | Electro-optic modulator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6131954B2 (en) | 2017-05-24 |
| WO2014016940A1 (en) | 2014-01-30 |
| US9557624B2 (en) | 2017-01-31 |
| US20150117867A1 (en) | 2015-04-30 |
| JPWO2014016940A1 (en) | 2016-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104471466A (en) | Optical modulator and optical transmitter | |
| JP5120341B2 (en) | Optical device | |
| US8374467B2 (en) | Optical device having a plurality of Mach-Zehnder modulators | |
| JP5092573B2 (en) | Optical waveguide device | |
| US9568801B2 (en) | Optical modulator | |
| JP5439838B2 (en) | Light modulator | |
| US7826689B2 (en) | Optical device which outputs independently modulated light beams in respective TE and TM polarization modes | |
| JP6020555B2 (en) | Light modulator | |
| US8755641B2 (en) | Optical modulator | |
| JP2014112171A (en) | Optical modulator | |
| JP5320042B2 (en) | Light modulator | |
| US8098997B2 (en) | Optical modulator and optical transmitter | |
| US11892743B2 (en) | Optical modulation element and optical modulation module | |
| JP2010152306A (en) | Optical modulator | |
| US20220308286A1 (en) | Optical waveguide element, optical modulator, optical modulation module, and optical transmission device | |
| US7289686B2 (en) | Optical modulator | |
| JP6597052B2 (en) | Light modulator | |
| JP4701428B2 (en) | Driving circuit for traveling wave electrode, optical modulation system using the same, optical information communication system, and driving method for traveling wave electrode | |
| JP5001310B2 (en) | Light modulator | |
| JP5239610B2 (en) | Mach-Zehnder optical modulator | |
| JP2011133741A (en) | Optical modulator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150325 |
|
| WD01 | Invention patent application deemed withdrawn after publication |