CN104471355A - Chip-type magnetic sensor - Google Patents
Chip-type magnetic sensor Download PDFInfo
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- CN104471355A CN104471355A CN201380036192.5A CN201380036192A CN104471355A CN 104471355 A CN104471355 A CN 104471355A CN 201380036192 A CN201380036192 A CN 201380036192A CN 104471355 A CN104471355 A CN 104471355A
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- magnetic
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- magnetic sensor
- chip type
- wiring board
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/007—Environmental aspects, e.g. temperature variations, radiation, stray fields
- G01R33/0076—Protection, e.g. with housings against stray fields
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/025—Compensating stray fields
Abstract
A chip-type magnetic sensor comprises a chip (12) and a circuit board (13). The chip (12) is used for generating a differential signal based on a sensed magnetic signal of an anti-counterfeiting identifier in an object under detection; and the chip (12) is fixed to the circuit board (13), and the output end of the chip (12) is electrically connected to the wiring arranged on the circuit board (13). The chip-type magnetic sensor also comprises an anti-interference device (14) on which a magnetic vacuum area is arranged. The chip (12) is arranged in the magnetic vacuum area, and the sensing surface of the chip (12) is directed toward the object under detection. The chip-type magnetic sensor has a high signal-to-noise ratio and sensitivity and a small volume, and is easy to integrate.
Description
Chip type magnetic sensor technologies field
The invention belongs to microelectronics technology, and in particular to a kind of chip type Magnetic Sensor for being used to detect anti-counterfeiting mark.Background technology
The change of the extraneous factors such as electric current, ess-strain, temperature and light can produce magnetic field, and this magnetic field can cause the magnetic property of magneto sensor to change.The magnetic property variable quantity of magneto sensor is converted into electric signal, the electric signal is measured and would know that tested region with the presence or absence of electric current, ess-strain, temperature or the light in magnetic field etc. can be produced.Magnetic Sensor is the measurement apparatus grown up using the above-mentioned characteristic of magneto sensor, is widely used in finance, Aeronautics and Astronautics, microelectronics, the field such as geological exploration, medical imaging, information gathering and military affairs.
In industrial circle, most widely used Magnetic Sensor is coil-type magnetic sensor, i.e., using coil as magneto sensor.Fig. 1 is the structure chart for the Magnetic Sensor that current financial field is used.As shown in figure 1, Magnetic Sensor includes shell 101, coil 109 and printed circuit board 113, on the top of shell 101 provided with an opening 103.In magnetic core] 05a, 105b neck end middle position be provided with a narrow and small magnetic gap 107, magnetic core 105a, 105b are fixed in shell 101 by support 111, and its top is stretched out from the opening 103 of shell 101.Multiturn coil is wound with magnetic core 105a, 105b bottom, coil 109 is connected with printed circuit board 113, printed circuit board 113 is connected by capillary 114a, 114 with other parts outside shielding shell 101.During Yan Banknote, streak on banknote magnetic oil ink-stick or magnetic metal bar from magnetic core 105a, 105b top, magnetic gap 107 to produce induced electromotive force corresponding with banknote magnetic oil ink-stick or magnetic metal bar magnetic field intensity ratio in coil 109, is the true and false of the wonderful tickets of distinguishable Do according to the induced electromotive force.
With the change of the market demand, Magnetic Sensor is gradually to miniaturization and integrated development.Coil-type magnetic sensor volume is big, weight weight, and low-response, resolution ratio are low, sensitivity is low and poor reliability.More
Importantly, the poor anti jamming capability of coil-type magnetic sensor, is easily disturbed by extraneous other magnetic fields, reduces the reliability of Magnetic Sensor.In other words, existing coil-type magnetic sensor can not meet the demand of market to Magnetic Sensor, thus be badly in need of a kind of strong antijamming capability of exploitation, small volume, Magnetic Sensor easy of integration and high sensitivity.The content of the invention
The present invention will solve technical problem that determines aiming at drawbacks described above present in Magnetic Sensor there is provided a kind of chip type Magnetic Sensor and preparation method thereof, its strong antijamming capability, and small volume, sensitivity are high>It is easily integrated.
Therefore, the present invention provides a kind of chip type Magnetic Sensor, including:
Chip, differential signal is produced for the magnetic signal based on the anti-counterfeiting mark in the testee sensed；
Wiring board, the chip is fixed on the wiring board, and the output end of the chip is electrically connected with the wiring located at the wiring board；
Means for anti-jamming, is configured with magnetic vacuum region on the means for anti-jamming, and the chip is placed in the magnetic vacuum region, and the chip sensitive surface towards the testee.
Wherein, the means for anti-jamming includes the permanent magnetism body that permanent-magnet material makes, multiple convex portions are configured with the permanent magnetism body, the multiple convex portion extends along the circumferentially distributed of the permanent magnetism body and from the permanent magnetism body towards the measured object side, and the magnetic vacuum region is formed between the convex portion.
Wherein, circumference of multiple convex portions along the permanent magnetism body is evenly distributed.
Wherein, circumferentially continuous distribution of the convex portion along the permanent magnetism body.
Wherein, the opposite side in the HJ portions is provided with multiple teeth portion, and the multiple teeth portion is arranged at intervals, and magnetic vacuum subregion is formed between two adjacent teeth portion.
Wherein, film layer is provided with the surface of the recess and the teeth portion, the film layer is formed using metal, nonmetallic or gas.
Wherein, the magnetic vacuum subregion that the chip and the wiring board are placed between the convex portion.Wherein, provided with the wiring board through hole being engaged with the convex portion on the wiring board, the convex portion is stretched out from the side of the wiring board through the wiring board through hole and from the opposite side of the wiring board, the sensitive surface of the sensitive surface of the top of the convex portion and the chip flush or above the chip.
Wherein, described anti-thousand, which disturb device, includes the permanent magnetism body that permanent-magnet material makes, permanent magnetism body through-holes are provided with the permanent magnetism body, the magnetic vacuum region is formed in the permanent magnetism body through-holes, one end of the permanent magnetism body through-holes is relative with the testee, and the chip and the wiring board are placed in the surface of the permanent magnetism body.
Wherein, the permanent magnetism body is made using ferrite, permalloy or silicon steel sheet；Or, the permanent magnetism body is made using neodymium iron boron, SmCo or aluminium nickel cobalt, or is made using metal material, nonmetallic materials, and increases the coating of ferronickel or permalloy in its outer surface.
Wherein, the means for anti-jamming includes winding and power supply, and the power supply provides electric energy for the winding, and the magnetic vacuum region is formed at the inner side of the winding, and the end of the winding is relative with the testee.
Wherein, the means for anti-jamming includes field generating unit and magnetic conduction unit, and the field generating unit is used to produce magnetic field；The magnetic conduction unit is arranged in the magnetic field range that the field generating unit is produced, and the magnetic vacuum region is formed in the magnetic conduction unit.
Wherein, the magnetic conduction unit includes the magnetic conduction body that permeability magnetic material makes, multiple convex portions are provided with the magnetic conduction body, the multiple convex portion extends along the circumferentially distributed of the magnetic conduction body and from the magnetic conduction body towards the measured object side, and the magnetic vacuum region is formed between the convex portion.
Wherein, two convex portions being oppositely arranged are configured with the magnetic conduction body, the chip is placed between described two convex portions.
Wherein, circumferentially continuous distribution of the convex portion along the magnetic conduction body.
Wherein, the chip and the wiring board are placed between the convex portion.
Wherein, provided with the wiring board through hole being engaged with the convex portion on the wiring board, the convex portion of the magnetic conduction unit is stretched out from the side of the wiring board through the wiring board through hole and from the opposite side of the wiring board, the sensitive surface of the sensitive surface of the top of the convex portion and the chip flush or above the chip.
Wherein, the magnetic conduction unit includes the magnetic conduction body that permeability magnetic material makes, magnetic conduction body through-holes are provided with the magnetic conduction body, the magnetic vacuum region is formed in the magnetic conduction body through-holes, one end of the magnetic conduction body through-holes is relative with the testee, and the chip and the wiring board are placed in the through-hole surfaces.
Wherein, the field generating unit is the permanent magnet made using ferrite, permalloy or silicon steel sheet.
Wherein, the field generating unit includes winding and power supply, and the power supply provides electric energy for the winding；The magnetic conduction unit is located at the inside of the winding or the end of the winding.
Wherein, the gas containing magnetic particle is filled with the magnetic vacuum region, the gas containing magnetic particle flows to form magnetic vortex in the magnetic vacuum region.
Wherein, the chip includes at least one pair of magnetic sensitive film and the chip bonding pad electrically connected with the magnetic sensitive film, and at least one pair of described magnetic sensitive film constitutes wheatstone bridge circuits by the wiring on the chip bonding pad and the wiring board.
Wherein, provided with the n suppression units for being used to be segmented the demagnetizing field for suppressing the magnetic sensitive film on the length direction of the magnetic sensitive film, the suppression unit interval is arranged at the surface and/or inside of the magnetic sensitive film, wherein, 11 are>2 integer.
Wherein, the suppression unit is to be made using conductive material.
Wherein, the magnetic sensitive film is Hall effect film, anisotropic magnetoresistance film giant magnet resistance film, tunnel magneto resistance film, giant magnetoresistance films or giant Hall effect film.
Wherein, chip type Magnetic Sensor also includes housing, processing unit and capillary, wherein, the processing unit is used to recognize the anti-counterfeiting mark according to the differential signal；
The chip and the wiring board are in the housing；The processing unit is in the housing or outside the housing；
The capillary is electrically connected with the wiring on the wiring board, and the capillary is used for the transmission of signal and supports the housing.
Wherein, the wiring board is hard resin matrix of materials wiring board or flexible matrix wiring board.Wherein, on the housing provided with magnetic conductive hole, the chip is relative with the magnetic conductive hole.
Wherein, the housing uses copper, iron or plastic production.
Wherein, the housing is made using permalloy, ferrite or western steel disc；Or, made using metal material or nonmetallic materials, and the coating of ferronickel or permalloy is set in its outer surface.
The invention has the advantages that：
The chip type Magnetic Sensor that the present invention is provided, it, which is included, can form the means for anti-jamming in magnetic vacuum region, chip is placed in the magnetic vacuum region of means for anti-jamming, and the anti-counterfeiting mark that the sensitive surface of chip is carried towards testee, so, the magnetic line of force only perpendicular or close to the sensitive surface perpendicular to chip can enter magnetic vacuum region and be sensed by chip, the magnetic line of force in other directions is then blocked in the outside in magnetic vacuum region, so as in the case where not losing sensitivity, can effectively it suppress, the noises thousand such as electric signal or magnetic signal in surrounding environment are even eliminated to disturb, and then signal to noise ratio and the sensitivity of Magnetic Sensor can be improved.In addition, by the use of chip as magnetic susceptibility part, its small volume, it is easily integrated, and sensitivity is high, it so the volume of the Magnetic Sensor comprising the magnetic susceptibility part is reduced and is easily integrated, but also the sensitivity of Magnetic Sensor can be improved.Brief description of the drawings
Of the invention above-mentioned and/or additional aspect and advantage will be apparent and are readily appreciated that from the following description of the accompanying drawings of embodiments, wherein：
Fig. 1 is the structure chart for the Magnetic Sensor that current financial field is used；
Fig. 2 a are the structure chart for the chip type hereby sensor that the embodiment of the present invention one is provided；
Fig. 2 b are the exploded view of the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 2 c are the structure chart of the chip employed in the chip type Magnetic Sensor shown in Fig. 2 a；Fig. 2 d are the processing unit and the electric connecting relation figure of chip in chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 3 is the structure chart for the first means for anti-jamming that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 4 is the analogous diagram of the Distribution of Magnetic Field of the first means for anti-jamming shown in Fig. 3；
Fig. 5 a are that second can be applied in the chip type Magnetic Sensor shown in Fig. 2 a resists thousand structure charts for disturbing device；
Fig. 5 b are the third anti-thousand structure chart for disturbing device that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 5 c are the structure chart of the anti-thousand ^ L devices of the 4th kind can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 5 d are the structure chart for the 5th kind of means for anti-jamming that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 5 e are the structure chart for the 6th kind of means for anti-jamming that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 5 f are the structure chart for the 7th kind of means for anti-jamming that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 5 g are the 8th kind anti-thousand can be applied in the chip type Magnetic Sensor shown in Fig. 2 a and disturb the structure chart of device；
Fig. 6 a are the structure chart for the 9th kind of means for anti-jamming that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 6 b are the anti-thousand ^ structure drawing of device of the tenth kind can be applied in the chip type Magnetic Sensor shown in Fig. 2 a；
Fig. 7 a are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention two is provided；Fig. 7 b are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention three is provided；
Fig. 7 c are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention four is provided；Fig. 7 d are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention five is provided；Fig. 8 a are the stereogram of the part-structure for the chip type Magnetic Sensor that the embodiment of the present invention six is provided；Fig. 8 b are the top view of chip type Magnetic Sensor shown in Fig. 8 a；
Fig. 8 c are the sectional view in Fig. 8 b along A A lines；
Fig. 9 is the sectional view for the chip type Magnetic Sensor that the embodiment of the present invention seven is provided；
Figure 10 is the exploded view for the chip type Magnetic Sensor that the embodiment of the present invention eight is provided；
Figure 11 a are the stereogram for the chip type Magnetic Sensor that the embodiment of the present invention nine is provided；
Scheme the exploded view that l ib are the chip type Magnetic Sensor that the embodiment of the present invention nine is provided；
Figure 12 is the schematic diagram for the detection mode for showing chip type Magnetic Sensor provided in an embodiment of the present invention.Embodiment
To make those skilled in the art more fully understand technical scheme, the chip type Magnetic Sensor that the present invention is provided is described in detail below in conjunction with the accompanying drawings.
Fig. 2 a are the structure chart for the chip type Magnetic Sensor that the embodiment of the present invention one is provided;Fig. 2 b are the exploded view of the chip type Magnetic Sensor shown in Fig. 2 a.As shown in Figure 2 a and 2 b, chip type Magnetic Sensor includes housing 11, chip 12, wiring board 13, means for anti-jamming 14, capillary 15 and processing unit（Not shown in figure）.Wherein, chip 12 is used to sense the anti-counterfeiting mark in testee, and it is fixed on wiring board 13.It is provided with magnetic vacuum region on means for anti-jamming 14, chip 12 is placed in the sensitive surface of magnetic vacuum region and chip 12 towards testee.Chip 12, wiring board 13 and anti-dry #u devices 14 are arranged in housing 11, and are connected by capillary 15 with other parts outside housing 11.Earth terminal 18 can also be set on housing 11, and housing 11 is grounded by earth terminal 18.Housing 11 is using copper, iron or plastic production.
Fig. 2 c are the structure chart of the chip employed in the chip type Magnetic Sensor shown in Fig. 2 a.As shown in Fig. 2 c, chip 12 includes a pair of magnetic sensitive films 411 and the chip electrically connected with magnetic sensitive film 411
Pad 412, include two magnetic sensitive films 411, chip bonding pad 412 is arranged on the end of magnetic sensitive film 411, chip bonding pad 412 is to be electrically connected for the ease of magnetic sensitive film 411 with the wiring on wiring board 13, and magnetic sensitive film 411 is linked to be into favour stone half-bridge circuit by chip bonding pad 412 and wiring.Favour stone half-bridge circuit can sense the influence of extraneous magnetic signal, and produce differential voltage signal（Hereinafter referred to as " differential signal "）.Certainly, chip 12 can also include two pairs or more to magnetic sensitive film 411, and magnetic sensitive film 411 is connected into favour stone half-bridge circuit or favour stone full-bridge circuit.In other words, chip 12 includes at least one pair of magnetic sensitive film 411, as long as magnetic sensitive film 411 is connected into favour stone half-bridge or favour stone full-bridge circuit.Wherein, magnetic sensitive film 411 can be Hall effect film, anisotropic magnetoresistance film, giant magnet resistance film, tunnel magneto resistance film, giant magnetoresistance films or giant Hall effect film.
N suppression unit can also be arranged at intervals on the length direction of each magnetic sensitive film 411, suppresses the demagnetizing field of magnetic sensitive film 411 for being segmented, wherein, 11 are>2 integer.Suppress unit to make using conductive material, it is located at the surface and/or inside of magnetic sensitive film 411, make to form short circuit in magnetic sensitive film 411, so as to suppress the demagnetizing field of magnetic sensitive film 411.The measurement accuracy of chip 12 can be improved by suppressing unit, and then improve sensitivity and the precision of chip type Magnetic Sensor.
Wiring board 13 uses printed wiring board, and wiring board 13 is electrically connected with chip 12, the differential signal for conveying the acquisition of chip 12.Wiring board 13 can be hard resin matrix of materials wiring board or flexible matrix wiring board.In the present embodiment, wiring board 13 uses hard resin matrix of materials wiring board, and chip 12 is fixed on wiring board 13, and chip 12 and wiring board 13 are in housing 11.
Processing unit is used for the just blunt differential signal produced according to chip 12 and recognizes anti-counterfeiting mark, such as the magnetic field size that can recognize whether anti-counterfeiting mark, the size of anti-counterfeiting mark or anti-counterfeiting mark.Processing unit can be arranged in housing 11, such as set assist side 13;The outside of housing 11 can also be arranged on.The noise in differential signal to filter out the output of chip 12, processing unit can include filter circuit, and the input of filter circuit is connected the signal output part of chip 12, so that the purpose of the noise in realizing the differential signal that filtrating chip 12 is exported, as shown in Figure 2 d.
Capillary 15 is electrically connected with wiring board 13, for differential signal transmission and support housing 11.
Fig. 3 is the structure chart for the first means for anti-jamming that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a.As shown in figure 3, means for anti-jamming 14 includes the permanent magnetism body 31 that permanent-magnet material makes, permanent-magnet material can be ferrite, permalloy or silicon steel sheet.A convex portion 32 is respectively provided with two opposite ends of permanent magnetism body 31, convex portion 32 causes the Distribution of Magnetic Field that permanent magnetism body 31 is produced to change, i.e., the magnetic line of force for producing permanent magnetism body 31 is assembled to convex portion 32, so that forming magnetic vacuum region between two convex portions 32, the magnetic field in magnetic vacuum region is weaker relative to the magnetic field around it, or even close to zero.Therefore, magnetic vacuum region is also considered as zero magnetic area.Chip 12 is arranged between two convex portions 32, and chip 12 sensitive surface towards testee.Preferably, the sensitive surface of chip 12 is less than or is flush to the top of convex portion 32, the magnetic signal shielding of the sensitive surface of chip 12 can will be so not orthogonal to as much as possible, so as to improve the antijamming capability of chip type sensor, and then improve the reliability of chip type sensor.
The magnetic field that the present embodiment magnetic vacuum region is produced by permanent magnetism body 31 is surrounded, and only the magnetic line of force perpendicular to recess 33 can enter magnetic vacuum region.As shown in Figure 4, due to being influenceed by the magnetic field that permanent magnetism body 31 is produced, in the magnetic line of force produced by external magnetic field S, the magnetic line of force only perpendicular to recess 33 can enter magnetic vacuum region Z, and the magnetic line of force in other directions is by permanent magnetism body 3] magnetic field that produces influenceed and parallel with the magnetic line of force of permanent magnetism body 31, that is, the magnetic field shielding that the magnetic line of force in the other directions for being not orthogonal to recess 33 that external magnetic field S is produced is produced by permanent magnetism body 31.Magnetic vacuum region in the present embodiment make it that the magnetosensitive direction and the magnetic field of permanent magnetism body 31 of sensor are perpendicular or parallel, so as to suppressing, the interference of the noise such as the electric signal and magnetic signal that even eliminate in external environment, anti-thousand disturb ability and signal to noise ratio so as to improve chip type Magnetic Sensor.
In the present embodiment, permanent magnetism body 31 is configured with two convex portions 32, but the invention is not limited in this.More convex portions 32 can be configured with permanent magnetism body 31, multiple convex portions 32 are formed between convex portion 32 along the circumferentially distributed of permanent magnetism body 31, magnetic vacuum region.Preferably, circumference of multiple convex portions 32 along permanent magnetism body 31 is evenly distributed, and is extended from permanent magnetism body 31 towards measured object side, to obtain the magnetic vacuum region of ideal form, can so reduce anti-thousand volumes for disturbing device 14.As shown in Figure 5 a, in second of means for anti-jamming in can be applied to the chip type Magnetic Sensor shown in Fig. 2 a, four convex portions 32 evenly and symmetrically are configured with the circumference of permanent magnetism body 31, four convex portions 32 can influence
The distribution for the magnetic line of force that permanent magnetism body 31 is produced, and the formation magnetic vacuum region between four convex portions 32.In use, permanent magnetism body 31 is arranged in housing 11, convex portion 32 is towards testee;The magnetic vacuum region that chip 12 is placed between convex portion 32, and chip 12 sensitive surface towards testee.
Fig. 5 b are the structure chart for the third means for anti-jamming that can be applied in the chip type Magnetic Sensor shown in Fig. 2 a.As shown in Figure 5 b, means for anti-jamming includes the permanent magnetism body 31 that permanent magnetism material trembles making, is provided with recess 33 on the surface of permanent magnetism body 31, that is, make convex portion in the circumferentially continuous of permanent magnetism body.The magnetic line of force that permanent magnetism body 31 is produced is assembled towards convex portion, so that in the formation magnetic vacuum of recess 33 region.In use, permanent magnetism body 31 is arranged in housing 11, and recess 33 is towards testee.Chip 12 is placed in recess 33, and chip 12 sensitive surface towards testee.Preferably, the sensitive surface of chip 12 is less than or the upper surface flush with permanent magnetism body 31, with the magnetic signal shielding for the sensitive surface that will be not orthogonal to chip 12 as much as possible, so that improving anti-the thousand of chip type sensor disturbs ability, and then the reliability of chip type sensor is improved.
In the above-described embodiments, the profile of permanent magnetism body 31 is cuboid, and the lateral cross section of recess 33 is shaped as cylinder and square.But the invention is not limited in this.The profile of permanent magnetism body 31 can also be square, cylinder, cone, the assembly of two or more spherical or above-mentioned any shape.In the lateral cross section of permanent magnetism body 31, the shape of recess 33 can also be the assembly of circular, square, taper or any two kinds or two kinds shapes.On the longitudinal cross-section of permanent magnetism body 31, the shape of recess 33 can also be circular, square, taper or the assembly for any two kinds of shapes in circular, square, taper.It should be noted that the lateral cross section of permanent magnetism body 31 refers to the horizontal cross-section of permanent magnetism body 31, the longitudinal cross-section of permanent magnetism body 31 refers to the vertical section of permanent magnetism body 31.
As shown in Figure 5 c, means for anti-jamming 14 includes the permanent magnetism body 31 that permanent-magnet material makes, the profile of permanent magnetism body 31 is cylindric, in the lateral cross section of permanent magnetism body 31, and recess 33 is shaped as circle；On the longitudinal cross-section of permanent magnetism body 31, being shaped as recess 33 is square.In a word, no matter permanent magnetism body 31 and recess 33 are using which kind of shape, protection scope of the present invention can be belonged in the formation magnetic vacuum of recess 33 region.
As fig 5d, means for anti-jamming 14 includes the permanent magnetism body 31 that permanent-magnet material makes, forever
Upper and lower two end faces of magnetic body 31 are respectively provided with a recess 33, and two magnetic vacuum regions can be so formed on permanent magnetism body 31, and chip 12 is generally arranged at close to the magnetic vacuum region of testee side.
As depicted in fig. 5e, anti- thousand, which disturb device 14, includes the permanent magnetism body 31 that permanent-magnet material makes, a recess 33 is provided with permanent magnetism body 31, eight teeth portion 34 are additionally provided with recess 33, and setting facing each other, i.e. the two opposite sides in recess 33 are respectively arranged with four teeth portion 34, four teeth portion 34 are arranged at intervals, so that recess 33 is divided into five sub-regions.The magnetic line of force of permanent magnetism body 31 forms the very sub- dummy section of multiple magnetic through the formation of teeth portion 34 magnetic field comb in recess 33.In use, chip 12 is arranged at into the region relative with teeth portion 34 of teeth portion 34, or it is placed between two adjacent teeth portion 34.
Teeth portion 34 can be obtained in the following manner：First, directly processing teeth portion 34 in permanent magnetism body 31, at this moment, teeth portion 34 and permanent magnetism body 31 are structure as a whole.Secondly, first process teeth portion 34, then by teeth portion 34 by welding or other be fixedly connected with means and be fixed in recess 33, teeth portion 34 can be made using metal, metal oxide, nonmetallic, nonmetal oxide or the additional coating of nonmetal oxide, and coating can be made using gold, silver, copper, iron, tin or its oxide；Or in the additional coating in surface of teeth portion 34.Third, teeth portion 34 can be formed by gas, i.e. using gas in recess 33 rotational flow and formed magnetic vortex so that formed as the shape of teeth portion 34 magnetic field comb, gas can be air or the gas containing magnetic particle.
In the present embodiment, when teeth portion 34 is obtained using non-gaseous materials, film layer is additionally provided with the surface in portion 33 and teeth portion 34（Not shown in figure）, film layer formed using metal, nonmetallic or gas.Film layer is to improve the Distribution of Magnetic Field in magnetic vacuum region and weak magnetic region, so as to form preferable magnetic vacuum region in recess 33, and then in the case where not influenceing sensitivity, the noise signals such as external electric signal and magnetic signal are effectively shielded, improve the reliability of chip type Magnetic Sensor.
The structure chart for the 7th kind of anti-dry 4 outstanding devices that Fig. 5 f can be applied in the chip type Magnetic Sensor shown in Fig. 2 a.As shown in figure 5f, means for anti-jamming 14 includes the permanent magnetism body 31 that permanent-magnet material makes, permanent magnetism body through-holes 35 are configured with permanent magnetism body 31, the magnetic line of force of permanent magnetism body 31 is passed through from the permanent magnetism body 31 around permanent magnetism body through-holes 35, so as to form magnetic vacuum region in permanent magnetism body through-holes 35.Permanent magnetism body through-holes 35 can be longitudinally through permanent magnetism body 31, as shown in figure 5f.Permanent magnetism body through-holes 35
Also Ke Yi Transverse are to through permanent magnetism body 31.In use, making one end of permanent magnetism body through-holes 35 relative with testee, chip 12 is fixed in permanent magnetism body through-holes 35, and close proximity to testee.Preferably, the sensitive surface of chip 12 is less than the top of permanent magnetism body 31, the magnetic signal for being not orthogonal to the sensitive surface of chip 12 can be so shielded as much as possible, so as to improve the antijamming capability of chip type sensor, and then improve the reliability of chip type sensor.
As the modification of means for anti-jamming shown in Fig. 5 f, means for anti-jamming 14 includes the permanent magnetism body 31 that permanent-magnet material makes, and permanent magnetism body 31 is shaped as ring-type, and the centre position of permanent magnetism body 31 is magnetic vacuum region.In use, chip 12 is nested in the centre of permanent magnetism body 31, such as Fig. 5 g.
Fig. 6 a are the 9th kind anti-thousand can be applied in the chip type Magnetic Sensor shown in Fig. 2 a and disturb the structure chart of device.As shown in Figure 6 a, means for anti-jamming 14 includes winding 61 and power supply（Not shown in figure）, power supply is that winding 61 provides electric energy, so that winding 61 produces Induced magnetic field.It is just blunt according to ampere's rule, there is toroidal magnetic field around electrified wire, the toroidal magnetic field is distributed along Circular Winding 61 and in approximate vortex shape, therefore, in the inner side of Circular Winding 61（That is, in region circular Huan Xing Rao Group 61, the central axis region of such as Circular Winding 61）Form magnetic vacuum region.In use, chip 12 to be arranged on to the central area of Circular Winding 61, testee is arranged on the end of Circular Winding 61.Because the Induced magnetic field of the formation of Circular Winding 61 can effectively suppress electrical noise and/or magnetic noise in surrounding environment, so as to improve sensitivity and the signal to noise ratio of chip type Magnetic Sensor.It should be noted that the end of Circular Winding 61 refers to the end face perpendicular with the central axis of Circular Winding 61 in Circular Winding 61.
In the present embodiment, Circular Winding 61 be using solid conductor in a spiral manner same plane coiling planar structure coil, the coil of the coiling can be a circle, as shown in Figure 6 a；It can certainly be multiturn.Winding 61 can also be using multiple conducting wires in a spiral manner same plane coiling planar structure coil, as shown in Figure 6 b.Certainly, winding 61 can also be the stereochemical structure using solid conductor coiling in a spiral manner（Three-dimensional structure）Coil；Or for using the coil of the multiple conducting wires stereochemical structure of coiling in a spiral manner.
In the present embodiment, iron core can also be set in coil（Not shown in figure）, iron core can be using neodymium iron boron, SmCo, aluminium nickel cobalt or ferrite making.The shape of iron core can use such as above-mentioned embodiment
The shape of the permanent magnetism body, will not be repeated here.Iron core can not only optimize the distribution of the magnetic line of force of winding 61, set up a stable magnetic vacuum region, improve the antijamming capability of chip type Magnetic Sensor；And for supporting chip 12, be conducive to the assembling of chip type Magnetic Sensor.In use, chip 12 can be arranged at the recess or through hole of iron core, or it is arranged between two convex portions, and surface of the sensitive surface less than iron core of chip 12, to shield the magnetic signal for the sensitive surface for being not orthogonal to chip 12 as much as possible；So as to improve the antijamming capability of chip type sensor, and then improve the reliability of chip type sensor.
Fig. 7 a are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention two is provided.As shown in Fig. 7 a, means for anti-jamming 14 includes field generating unit 71 and magnetic conduction unit 72, and field generating unit 71 is used to produce magnetic field:Magnetic conduction unit 72 is stacked and placed on the top of field generating unit 71.Preferably, magnetic conduction unit 72 is arranged on the stronger region in the magnetic field of field generating unit 71, but in actual applications, as long as magnetic conduction unit 72 is arranged in the magnetic field range that field generating unit 71 is produced.Magnetic vacuum region is formed in magnetic conduction unit 72.
Field generating unit 71 is the permanent magnet that ferrite, permalloy or silicon steel sheet make.Magnetic conduction unit 72 includes the magnetic conduction body 74 that permeability magnetic material makes, convex portion 73 is provided with 74 liang of opposite ends of magnetic conduction body, convex portion 73 causes the magnetic line of force distribution of magnetic conduction body 74 to change, i.e., the magnetic line of force that magnetic conduction body 74 is produced passes through the region of convex portion 73, so that forming magnetic vacuum between two convex portions 73, the magnetic field in magnetic vacuum region is weaker relative to the magnetic field of surrounding, or even close to zero.Therefore, magnetic vacuum region is also considered as zero magnetic area.
In use, chip 12 and wiring board 13 are arranged between two convex portions 73, and chip 12 sensitive surface towards testee.Preferably, the sensitive surface of chip 12 is set to be less than the top of convex portion 73, the magnetic signal for being not orthogonal to the sensitive surface of chip 12 can be so shielded as much as possible, so as to improve the antijamming capability of chip type sensor, and then improve the reliability of chip type sensor.
In the present embodiment, two opposite ends of magnetic conduction body 74 are respectively configured with a convex portion 73, but the invention is not limited in this.Multiple convex portions 73 can be configured with magnetic conduction body 74, multiple convex portions 73 are formed between convex portion 73.In use, one end of convex portion 73 is set towards testee, chip 12
And wiring board 13 is located between convex portion 73.
Fig. 7 b are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention three is provided.As shown in Figure 7b, means for anti-jamming includes field generating unit 71 and magnetic conduction unit 72, wherein, field generating unit 71 is the permanent magnet made using ferrite, permalloy or silicon steel sheet.Magnetic conduction unit 72 includes the magnetic conduction body 74 that permeability magnetic material makes, and has recess 75 in the surface structure of magnetic conduction body 74, i.e. convex portion is in the circumferentially continuous distribution of magnetic conduction body 74, and magnetic vacuum region is formed at recess 75.In use, magnetic conduction body 74 is placed in the top of field generating unit 71, and recess 75 is towards testee.Chip 12 is placed in the plane at the place of recess 75, it is preferred that the sensitive surface of chip 12 is less than the upper surface of magnetic conduction body 74, the magnetic signal for the sensitive surface for being not orthogonal to chip 12 can be so shielded as much as possible, ability is disturbed so as to improve anti-the thousand of chip type sensor, and then improves the reliability of chip type sensor.
Fig. 7 c are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention four is provided.As shown in Fig. 7 c, magnetic conduction unit 72 includes the magnetic conduction body 74 that permeability magnetic material makes, and magnetic conduction body through-holes 76 is provided with magnetic conduction body 74, magnetic vacuum region is formed in magnetic conduction body through-holes 76.When using, one end of magnetic conduction body through-holes 76 is relative with testee, chip 12 is placed in magnetic conduction body through-holes 76, preferably, the sensitive surface of chip 12 is less than the upper surface of magnetic conduction body 74, so the magnetic signal for the sensitive surface for being not orthogonal to chip 12 can be shielded as much as possible, so as to improve the antijamming capability of chip type sensor, and then improve the reliability of chip type sensor.
Fig. 7 d are the part-structure figure for the chip type Magnetic Sensor that the embodiment of the present invention five is provided.As shown in Fig. 7 d, chip type Magnetic Sensor includes field generating unit 71 and magnetic conduction unit 72, wherein, field generating unit 71 is the permanent magnet made using ferrite, permalloy or silicon steel sheet；Magnetic conduction unit 72 includes the magnetic conduction body 74 that permeability magnetic material makes, and convex portion 73 is provided with 74 liang of opposite ends of magnetic conduction body.The present embodiment and the difference of the embodiment shown in Fig. 7 a are：The outside peripheral dimension of field generating unit 71 is equal with the outside peripheral dimension of magnetic conduction unit 72, so that the magnetic field of field generating unit 71 is concentrated mainly on the underface of magnetic conduction unit 72, can reduce the magnetic field intensity on the periphery of magnetic conduction unit 72.Certainly, the magnetic field intensity of single perimeter occurs for magnetic field.So the magnetic line of force of field generating unit 71 by magnetic conduction unit 72 as much as possible about
Beam can reduce influence of the field generating unit 71 to the sensitivity of chip 12 in the corresponding position in convex portion 73.Therefore, in actual applications, it is preferable that the outside peripheral dimension of field generating unit 71 is less than or equal to the chip type Magnetic Sensor of the outside peripheral dimension of magnetic conduction unit 72.
In the above-described embodiments, chip 12 and wiring board 13 are arranged at the recess area of magnetic conduction unit 72.In another embodiment, chip 12 is only arranged to the recess area of magnetic conduction unit 72.
Specifically, Fig. 8 a are the stereogram of the part-structure for the chip type Magnetic Sensor that the embodiment of the present invention six is provided, and Fig. 8 b are the top view of chip type Magnetic Sensor shown in Fig. 8 a, and Fig. 8 c are the sectional view in Fig. 8 b along A A lines.As shown in Fig. 8 a, Fig. 8 b, Fig. 8 c, chip type Magnetic Sensor includes chip 12, wiring board 13 and means for anti-jamming 14, means for anti-jamming 14 includes field generating unit 71 and magnetic conduction unit 72, wherein, field generating unit 71 is the permanent magnet made using ferrite, permalloy or silicon steel sheet;Magnetic conduction unit 72 includes the magnetic conduction body 74 that permeability magnetic material makes, and convex portion 73 is provided with 74 liang of opposite ends of magnetic conduction body.Chip 12 is arranged at the surface of wiring board 13.Assist side 13 is provided with the wiring board through hole 415 closed with the matching size of convex portion 73, and wiring board through hole 415 is located at the both sides of chip 12, wiring board through hole 4] the distance between 5 matched with the distance between convex portion 73.Wiring board through hole 415 is inserted in convex portion 73 from the lower section of wiring board 13, and makes the top of convex portion 73 and the upper surface flush of wiring board 13, so that chip 12 is placed between two convex portions 73.The chip type Magnetic Sensor it is simple in construction, can be with the processing technology of facilitating chip formula Magnetic Sensor, furthermore, it is possible to reduce the volume of means for anti-jamming 14, so as to reduce the manufacturing cost of chip type Magnetic Sensor.
It can be appreciated that anti-the thousand of the present embodiment are disturbed device 14 shape of magnetic conduction unit 72 can also be directly processed into using permanent-magnet material, the purpose of the present invention can be equally realized.That is, in actual applications, anti-thousand disturb device 14 can be using the structure that field generating unit 71 and magnetic conduction unit 72 stack together, as shown in Fig. 7 a, Fig. 7 b, Fig. 7 c, Fig. 7 d, Fig. 8 a, Fig. 8 b and Fig. 8 c；Fig. 3, Fig. 5 a, Fig. 5 b, Fig. 5 c, Fig. 5 d, Fig. 5 e or Fig. 5 c shapes directly can also be processed into using permanent-magnet material.It is preferable to employ the former, i.e., constrained the distribution of the magnetic line of force using magnetic conduction unit 72, make the magnetic field of field generating unit 71 perpendicular to the detection faces of testee, so as to more effectively reduce extraneous other magnetic fields into magnetic vacuum region.
Fig. 9 is the sectional view for the chip type Magnetic Sensor that the embodiment of the present invention seven is provided.As shown in figure 9, chip type Magnetic Sensor includes housing 11, chip 12, wiring board 13 and means for anti-jamming 14, chip 12, wiring board 13 and anti-thousand disturb device 14 and are placed in housing 11.
Means for anti-jamming 14 includes field generating unit 71 and magnetic conduction unit 72.Wherein, field generating unit includes winding 711 and power supply（Not shown in figure）, power supply is that winding 711 provides electric energy, so that winding 711 produces Induced magnetic field.According to ampere's rule, there is toroidal magnetic field around electrified wire, the toroidal magnetic field is distributed along Circular Winding 711 and in approximate vortex shape, magnetic vacuum region will be formed in the central axis region of Circular Winding 711.Magnetic conduction unit 72 is that U-shaped structure, i.e. magnetic conduction unit 72 include magnetic conduction body 721 and convex portion 722, and two convex portions 722 are oppositely disposed at the two ends of magnetic conduction body 721.Winding 711 is wrapped in the convex portion 722 of magnetic conduction unit 72, moreover, winding a winding 711 on each convex portion 722.
In the present embodiment, three or more convex portions 722 can also be configured with magnetic conduction body 721, multiple convex portions 722 are distributed in the edge of magnetic conduction body 721 with hooking.Each convex portion 722 set a winding 711, can also wherein two or more positional symmetry convex portion 722 set winding 711.
In addition, magnetic conduction unit 72 can also be arranged in the recess of magnetic conduction unit 72 using Fig. 7 a, Fig. 7 b, the structure shown in Fig. 7 c, field generating unit 71, or magnetic conduction unit 72 is arranged on to the end of winding 711.The end of winding 711 refers to the end of the axial direction of winding 711.Gas containing magnetic particle flows to form magnetic vortex in recess, and magnetic vortex can optimize the distribution of the magnetic line of force, so that improve chip type Magnetic Sensor anti-thousand disturb ability.
Figure 10 is the exploded view for the chip type Magnetic Sensor that the embodiment of the present invention eight is provided.As shown in Figure 10, chip type Magnetic Sensor includes housing 11, chip 12, wiring board 13, means for anti-jamming 14 and capillary 15, chip 12, wiring board 13 and means for anti-jamming 14 are arranged in housing 11, and capillary 15 is electrically connected by wiring board 13 with chip 12.Chip 12, wiring board 13, means for anti-jamming 14 and capillary 15 structure it is same as described above, difference is the structure and material of housing 11.
In the present embodiment, housing 11 is made using permalloy, ferrite or steel disc, or,
Made using other metal materials such as copper, aluminium or nonmetallic materials, and increase the coating of ferronickel or permalloy in its outer surface.Magnetic conductive hole 111 is additionally provided with housing 11, when chip 12 is placed in housing 11, the sensitive surface of chip 12 is relative with magnetic conductive hole 111, is sensed after the external magnetic field including anti-counterfeiting mark passes through magnetic conductive hole 111 by chip 12.
In the present embodiment, housing 1] it can be made using unmasked material, such as copper, iron or plastics, it would however also be possible to employ shielding material makes, such as permalloy, ferrite or selenium steel disc.The housing that shielding material makes has good shielding properties, still, in actual use, and its magnetic field to anti-counterfeiting mark is also adversely affected.Therefore, when making housing 11 according to unmasked material, magnetic conductive hole can not be set on housing 11；Housing 11 is made according to shielding material, then magnetic conductive hole 111 must be set on housing 11.
Figure 11 a are the stereogram for the chip type Magnetic Sensor that the embodiment of the present invention nine is provided, and figure lib is the exploded view for the chip type Magnetic Sensor that the embodiment of the present invention nine is provided.As shown in Figure 11 a and lib, chip type Magnetic Sensor includes housing 11, chip 12, wiring board 13, means for anti-jamming 14 and processing unit（Not shown in figure）, chip 12, means for anti-jamming 14 and processing unit support by wiring board 13, and assist side 13 is provided with circuit pads 414, and wiring board melt disk 414 is connected with capillary 15, for electrically connecting wiring board 13 and chip 12.Chip 12 is used for the magnetic variation for obtaining testee, and means for anti-jamming 14 is used for the antijamming capability and signal to noise ratio for improving chip 12, so as to improve the measurement sensitivity of chip 12.
Provided with an introducing face 461 on housing 11 ,-individual contact induction face 462 and a trailing face 463 are additionally provided with a magnetic conductive hole 111 on contact induction face 462, chip 12 is relative with the position of magnetic conductive hole 111.The earth terminal 18 for ground connection is additionally provided with housing 11.
Anti- thousand disturb device 14 for annular structural part, magnetic vacuum region can be formed in the inner side of annular structural part, chip 12 is arranged on the inner side of annular structural part, moreover, the sensitive surface of chip 12 is less than the upper surface of annular structural part.
Figure 12 is the detection mode figure for the chip type Magnetic Sensor that the embodiment of the present invention two is provided to embodiment five.As shown in figure 12, in use, the surface of shell of testee 50 from chip type Magnetic Sensor is slipped over, magnetic conduction unit 72 optimizes the distribution of the magnetic line of force of field generating unit 71, and the magnetic line of force is constrained in led
Two convex portions of magnetic cell 72, make the magnetic line of force vertical or approximately perpendicular to the convex portion of magnetic conduction unit 72, influenceed by the convex portion magnetic line of force, the magnetic line of force only perpendicular to chip 12 can enter magnetic vacuum region, the magnetic field of the magnetic mark 51 relative i.e. only with the recess of magnetic conduction unit 72 can enter recess, and the magnetic line of force in other directions is by the magnetic field shielding positioned at convex portion.Therefore, the anti-counterfeiting mark 51 only perpendicular to chip 12 can be sensed by chip 12.Chip] 2 sensing testees in anti-counterfeiting mark 51 and obtain differential signal, differential signal is transmitted to processing unit by wiring board 13, and processing unit discerns whether the magnetic field intensity and/or the size of anti-counterfeiting mark 51 that there is anti-counterfeiting mark 51 and anti-counterfeiting mark 51 according to differential signal.
The present embodiment chip type Magnetic Sensor, it is provided with the means for anti-jamming in magnetic vacuum region, chip is placed in the magnetic vacuum region of means for anti-jamming, and, the sensitive surface of the chip is towards the anti-counterfeiting mark, the magnetic line of force only vertical or near perpendicular to chip sensitive surface can enter magnetic vacuum region and be sensed by chip, the magnetic line of force in other directions is blocked in the outside in magnetic vacuum region, so as in the case where not losing sensitivity, can effectively it suppress, the noise such as electric signal or magnetic signal in surrounding environment is even eliminated to do #u and then signal to noise ratio and the sensitivity of Magnetic Sensor can be improved.Another sunset is foretold, using chip as magnetic susceptibility part, its small volume, is easily integrated, and sensitivity is high, so as to reduce the volume of Magnetic Sensor so that Magnetic Sensor is easier to integrated, and improves the sensitivity of Magnetic Sensor.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the illustrative embodiments that use, but the invention is not limited in this.For those skilled in the art, without departing from the spirit and substance in the present invention, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.
Claims (26)
- Claims1st, a kind of chip type Magnetic Sensor, including：Chip, differential signal is produced for the magnetic signal based on the anti-counterfeiting mark in the testee sensed；Wiring board, the chip is fixed on the wiring board, and the output end of the chip is electrically connected with the wiring located at the wiring board；Characterized in that, also including means for anti-jamming, be configured with magnetic vacuum region on the means for anti-jamming, the chip is placed in the magnetic vacuum region, and the chip sensitive surface towards the testee.2nd, chip type Magnetic Sensor according to claim 1, it is characterized in that, described anti-thousand, which disturb device, includes the permanent magnetism body that permanent-magnet material makes, and multiple measured object side extensions is configured with the permanent magnetism body, the magnetic vacuum region is formed between the convex portion.3rd, chip type Magnetic Sensor according to claim 2, it is characterised in that circumference of the multiple convex portion along the permanent magnetism body is distributed with hooking.4th, chip type Magnetic Sensor according to claim 2, it is characterised in that circumferentially continuous distribution of the convex portion along the permanent magnetism body.5th, chip type Magnetic Sensor according to claim 4, it is characterised in that the opposite side in the portion is provided with multiple teeth portion, the multiple teeth portion is arranged at intervals, and magnetic vacuum subregion is formed between two adjacent teeth portion.6th, chip type Magnetic Sensor according to claim 5, it is characterised in that be provided with film layer in the portion and the surface of the teeth portion, the film layer is formed using metal, nonmetallic or gas.7th, chip type Magnetic Sensor according to claim 2, it is characterised in that the core The magnetic vacuum region that piece and the wiring board are placed between the convex portion.8th, chip type Magnetic Sensor according to claim 2, it is characterized in that, provided with the wiring board through hole being engaged with the convex portion on the wiring board, the convex portion is stretched out from the side of the wiring board through the wiring board through hole and from the opposite side of the wiring board, the sensitive surface of the sensitive surface of the top of the convex portion and the chip flush or above the chip.9th, chip type Magnetic Sensor according to claim 1, it is characterized in that, the means for anti-jamming includes the permanent magnetism body that permanent-magnet material makes, permanent magnetism body through-holes are provided with the permanent magnetism body, the magnetic vacuum region is formed in the permanent magnetism body through-holes, one end of the permanent magnetism body through-holes is relative with the testee, and the chip and the wiring board are placed in the surface of this permanent magnetism of permanent magnetism body.10th, the chip type Magnetic Sensor according to any one of claim 2- 9, it is characterised in that the permanent magnetism body is made using ferrite, permalloy or silicon steel sheet；Or, the permanent magnetism body is made using neodymium iron boron, SmCo or aluminium nickel cobalt, or is made using metal material, nonmetallic materials, and increases the coating of ferronickel or permalloy in its outer surface.11st, chip type Magnetic Sensor according to claim 1, it is characterized in that, the means for anti-jamming includes winding and power supply, the power supply provides electric energy for the winding, the magnetic vacuum region is formed at the inner side of the winding, and the end of the winding is relative with the testee.12nd, chip type Magnetic Sensor according to claim 1, it is characterised in that the means for anti-jamming includes field generating unit and magnetic conduction unit, the field generating unit is formed in the magnetic conduction unit for producing magnetic vacuum region.13rd, chip type Magnetic Sensor according to claim 12, it is characterised in that the magnetic conduction unit includes the magnetic conduction body that permeability magnetic material makes, provided with multiple convex on the magnetic conduction body The extension of measured object side is stated, the magnetic vacuum region is formed between the convex portion.14th, chip type Magnetic Sensor according to claim 13, it is characterised in that two convex portions being oppositely arranged are configured with the magnetic conduction body, the chip is placed between described two convex portions.15th, chip type Magnetic Sensor according to claim 13, it is characterised in that circumferentially continuous distribution of the convex portion along the magnetic conduction body,.16th, chip type Magnetic Sensor according to claim 13, it is characterised in that the chip and the wiring board are placed between the convex portion.17th, chip type Magnetic Sensor according to claim 13, it is characterized in that, provided with the wiring board through hole being engaged with the convex portion on the wiring board, the convex portion of the magnetic conduction unit is stretched out from the side of the wiring board through the wiring board through hole and from the opposite side of the wiring board, the sensitive surface of the sensitive surface of the top of the convex portion and the chip flush or above the chip.18th, chip type Magnetic Sensor according to claim 12, it is characterized in that, the magnetic conduction unit includes the magnetic conduction body that permeability magnetic material makes, magnetic conduction body through-holes are provided with the magnetic conduction body, the magnetic vacuum region is formed in the magnetic conduction body through-holes, one end of the magnetic conduction body through-holes is relative with the testee, and the chip and the wiring board are placed in the surface of the through hole body.19th, chip type Magnetic Sensor according to claim 12, it is characterised in that the field generating unit is the permanent magnet made using ferrite, permalloy or silicon steel sheet.20th, chip type Magnetic Sensor according to claim 12, it is characterised in that the field generating unit includes winding and power supply, the power supply provides electric energy for the winding；The magnetic conduction unit is located at the inside of the winding or the end of the winding. 21, chip type Magnetic Sensor according to claim 1, it is characterised in that the gas containing magnetic particle is filled with the magnetic vacuum region, the gas containing magnetic particle flows to form magnetic vortex in the true work area domain of the magnetic.22nd, chip type Magnetic Sensor according to claim 1, it is characterised in that the chip includes at least one pair of magnetic sensitive film and the chip bonding pad that is electrically connected with the magnetic sensitive film, it is described at least-into wheatstone bridge circuits,23, chip type Magnetic Sensor according to claim 22, it is characterised in that be provided with the length direction of the magnetic sensitive filmnThe individual suppression unit for being used to be segmented the demagnetizing field for suppressing the magnetic sensitive film, the suppression unit interval is arranged at the surface and wherein of the magnetic sensitive film, and n is>2 integer.24th, chip type Magnetic Sensor according to claim 23, it is characterised in that the suppression unit is to be made using conductive material.25th, chip type Magnetic Sensor according to claim 22, characterized in that, the magnetic sensitive film is Hall effect film, anisotropic magnetoresistance film, giant magnet resistance film, tunnel magneto resistance film, giant magnetoresistance films or giant Hall effect film.26th, chip type Magnetic Sensor according to claim 1, it is characterised in that including housing, processing unit and capillary, wherein,The processing unit is used for the anti-counterfeiting mark according to the differential signal Shi Do；The chip and the wiring board are in the housing；The processing unit is in the housing or outside the housing；The capillary is electrically connected with the wiring on the wiring board, and the capillary is used for the transmission of signal and supports the housing.27th, chip type Magnetic Sensor according to claim 26, it is characterised in that described Wiring board is hard resin matrix of materials wiring board or flexible base shield wiring board.28th, chip type Magnetic Sensor according to claim 26, it is characterised in that on the housing provided with magnetic conductive hole, the chip is relative with the magnetic conductive hole.29th, chip type Magnetic Sensor according to claim 26, it is characterised in that the housing uses copper, iron or plastic production.30th, chip type Magnetic Sensor according to claim 26, it is characterised in that the housing is made using permalloy, ferrite or Independence steel discs；Or, made using metal material or nonmetallic materials, and the coating of ferronickel or permalloy is set in its outer surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201380036192.5A CN104471355B (en) | 2012-07-06 | 2013-02-08 | Chip type magnetic sensor |
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| CN201210232306 | 2012-07-06 | ||
| CN2012102323060 | 2012-07-06 | ||
| PCT/CN2013/071561 WO2014005431A1 (en) | 2012-07-06 | 2013-02-08 | Chip-type magnetic sensor |
| CN201380036192.5A CN104471355B (en) | 2012-07-06 | 2013-02-08 | Chip type magnetic sensor |
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| CN104471355A true CN104471355A (en) | 2015-03-25 |
| CN104471355B CN104471355B (en) | 2016-12-14 |
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| CN201380036192.5A Expired - Fee Related CN104471355B (en) | 2012-07-06 | 2013-02-08 | Chip type magnetic sensor |
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| WO (1) | WO2014005431A1 (en) |
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| CN113393609A (en) * | 2021-07-22 | 2021-09-14 | 深圳粤宝电子科技有限公司 | Currency detection magnetic head |
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| FR3111737B1 (en) * | 2020-06-19 | 2022-07-08 | Commissariat Energie Atomique | CHIP OR BOX-SYSTEM PROTECTION USING THE GMI EFFECT |
| CN113189655A (en) * | 2021-04-30 | 2021-07-30 | 上海领先仪器有限公司 | High anti-interference multichannel metal detection instrument |
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Also Published As
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| CN104471355B (en) | 2016-12-14 |
| WO2014005431A1 (en) | 2014-01-09 |
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