CN104459430B - Ultrasonic lead key connection loses line detector and method - Google Patents
Ultrasonic lead key connection loses line detector and method Download PDFInfo
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- CN104459430B CN104459430B CN201410436383.7A CN201410436383A CN104459430B CN 104459430 B CN104459430 B CN 104459430B CN 201410436383 A CN201410436383 A CN 201410436383A CN 104459430 B CN104459430 B CN 104459430B
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Abstract
The invention discloses a kind of ultrasonic lead key connection to lose line detector, including the host computer that the parameter of operating personnel's para-linkage is configured with losing the parameter of line detection；Realize the real-time Data Transmission with host computer, alarm signal is transmitted to the communication interface of host computer in time when detecting and losing line failure；Be connected decoding, the generation instruction of drive signal, the processing of collection signal and the main control module for losing line detection determination methods being used for realization to host computer with communication interface（STM32）；With the main control module（STM32）The signal generation module and signal acquisition module being connected：The ultrasonic transducer being connected with the signal generation module and signal acquisition module.The method of the present invention is by being detected the impedance signal during ultrasonic lead key connection, and the more existing detection method of detection speed is faster, it is possible to achieve the effect detected in real time, and the efficiency of normal bonding work is not influenced.
Description
Technical field
The present invention relates to microelectronics Packaging quality detection technology, and in particular to a kind of ultrasonic lead key connection quality loses line detection
Device and detection method.
Background technology
Ultrasonic lead key connection is one of most important technology in IC chip interconnection；Pin is mutual between offer chip and substrate
Even；It refers under normal temperature environment, by the ultrasonic vibration of PZT (piezoelectric transducer) generation and the effect of bonding tool pressure, by lead
（Spun gold or aluminium wire）It is bonded on the pad of chip bottom, so that by the technology together with being electrically connected to of chip and substrate.Bonding
The quality of point mass will directly affect the performance of IC chip, and a small bonding point failure would potentially result in whole IC chip and lose
Effect.Due to pulling the detection that line is too quickly, wire clamp failure and other reasons cause lead to wreck during ultrasonic lead key connection.Therefore, it is guarantor
Card bonding point mass, it is necessary to which para-linkage quality is detected.Bonding quality detection mainly by offline and online two approach into
OK.Offline inspection is to obtain the image of bonding point after bonding is completed by CCD systems, then the figure with computer to acquisition
As being handled, situations such as being bonded dot shape, position, root deformation is analyzed, so as to fulfill the detection of para-linkage quality.It is this from
Line detection cannot feed back the fault message in relation to bonding system in time.By high-power microscope, whether to visually observe lead
Broken string, there are the problem of be to need a large amount of manpowers to check the course of work, and can only Fixed Time Interval sampling check, hair
Existing failure not in time, and wastes a large amount of manpowers, of high cost.
Rotary encoder measure the lead amount of feeding by way of, there are the problem of be due to lead the amount of feeding change very
Small, consequently found that broken string is bonded 40 times or so again not in time, after generally breaking just can detect broken string, detection speed is slow.It is logical
Cross the method for computer vision butt welding point batch identification there are the problem of be, it is necessary first to meet unified inspection after bonding certain amount
Survey, find failure not in time, secondarily in bonding point failure the reason for it is very much, differentiate failure cause whether lose line inaccuracy.
The content of the invention
It is an object of the invention to：For the drawbacks described above of the prior art, there is provided a kind of ultrasonic lead key connection loses line detection
Device, para-linkage state can be detected, be more suitably applied to actual production in real time.
A kind of ultrasonic lead key connection is provided and loses line detector, including the parameter of operating personnel's para-linkage with losing line detection
The host computer that parameter is configured；The real-time Data Transmission with host computer is realized, in time by alarm signal when detecting mistake line failure
Number it is transmitted to the communication interface of host computer；Be connected decoding, the life of drive signal being used for realization to host computer with communication interface
Into instruction, the processing of collection signal and the main control module for losing line detection determination methods（STM32）；With the main control module
（STM32）The signal generation module and signal acquisition module being connected：With the signal generation module and signal acquisition module phase
The ultrasonic transducer of connection.
In above-mentioned ultrasonic lead key connection loses line detector, the signal generation module includes the sinusoidal drive of high-frequency ultrasonic
Dynamic signal generating circuit and high frequency sinusoidal signal amplification, filtering, the power amplification circuit of output.
In above-mentioned ultrasonic lead key connection loses line detector, the signal acquisition module includes the ultrasonic wave to collecting
The electric signal at transducer both ends is filtered the signal processing circuit of processing and the sinusoidal signal to collecting carries out virtual value
The signaling conversion circuit of processing.
In above-mentioned ultrasonic lead key connection loses line detector, the ultrasonic transducer is operated in resonance and phase locked state
Under, equipped with sinusoidal signal shaping become square-wave signal Schmidt's comparator, Schmidt's comparator is by the voltage after shaping
Square-wave signal and current square-wave signal input chip d type flip flop, chip d type flip flop is by the signal output after triggering to main control module
（STM32）.
Signal acquisition module in the present invention is broadly divided into signal processing and conversion circuit two parts, Part I are main
Function is that the electric signal at the ultrasonic transducer both ends to collecting is filtered processing, removes noise contribution to sampled data
Interference.Part II is signaling conversion circuit, and it acts as the sinusoidal signal to collecting to carry out virtual value processing, convenient
The signal acquisition of STM32, so can suitably reduce for the acquisition speed of SMT32, it is easier to realizes, and it is more accurate
Really.
Impedance during resonance point is operated in due to the transducer that the detection method in the present invention predominantly detects, in work
The working status of ultrasonic transducer is locked using phase locking technique, it is zero point to lock its phase.Specific method is to gather
Square wave is converted to by sine wave to voltage and current signal；
Chip in circuit is connected as Schmidt's comparator, its function of realizing is to believe sinusoidal signal shaping as square wave
Number, then the voltage square wave signal after shaping and current square-wave signal are inputted into chip d type flip flop, judgement voltage signal is reached with this
The purpose that phase is advanced or current signal phase is advanced, can be real according to level height by the signal output after triggering to STM32
Now obtain control transducer whether the signal of resonance.
Voltage and current signal are shaped as square wave through comparator, then via d type flip flop signal are arranged to obtain phase
Signal, according to lead relationship after voltage and current hysteresis, can analyze sequence diagram under different conditions.It can be found by contrast, module
Output signal timing diagram in, when voltage signal leading current signal, module output high level, conversely then export low level.
Pass through the output of judgment module, you can realization makes transducer be operated in resonant condition by way of judging phase difference.By with
Upper structure is the purpose that can be achieved to gather the impedance signal signal during ultrasonic lead key connection in real time.
The present invention is by being detected the impedance signal during ultrasonic lead key connection, the more existing detection of detection speed
Method is faster, it is possible to achieve the effect detected in real time, and the efficiency of normal bonding work is not influenced；The present invention is real according to characteristic value
The characteristic distributions on border are trained, and have the characteristics that to select alarm threshold value automatically according to demand, and user's operation is simple, and from reality
Situation is set out, and adaptability is stronger；The present invention makes characteristic value from the reason for causing rate of false alarm by the method for Kalman filtering
Distribution more concentrate, be more stable, so as to effectively reduce the rate of false alarm of detection process, make the more existing method of detection more accurate
Really；The present invention can by adjust wherein forgetting factor size can be according to actual feelings come the detection sensitivity of regulating system, user
Condition is adjusted, and disclosure satisfy that the requirement of more users.
Brief description of the drawings
Fig. 1 is apparatus of the present invention block diagram.
Fig. 2 is signal generation inside modules structure diagram in Fig. 1 shown devices.
Fig. 3 is signal acquisition module internal structure schematic diagram in Fig. 1 shown devices.
Fig. 4 is ultrasonic transducer internal circuit principle schematic in Fig. 1 shown devices.
Fig. 5 is ultrasonic transducer electrical principle connection principle schematic diagram in Fig. 1 shown devices.
Fig. 6, Fig. 7 are trigger sequence diagrams under different conditions.
Fig. 8 is normal bonding with losing change in impedance value figure during line failure.
Fig. 9 is the probability variation diagram of normal state and broken string state characteristic value.
Figure 10 is flow chart when Fig. 1 shown devices are detected.
Figure 11 is probability density distribution comparison diagram.
Figure 12 is system model figure.
Embodiment
With reference to shown in Fig. 1：Mainly 6 modules form apparatus of the present invention shown in figure 1 above：The signal detected is super
Impedance signal in sound wire bonding process.Therefore, hardware above structure is needed to carry out the impedance signal in the course of work real-time
Collection.The function that wherein each module is completed is as follows：
1. host computer：Human-computer interaction interface, the parameter of operating personnel's para-linkage are configured with losing the parameter of line detection.
2. communication interface：Realize the real-time Data Transmission of slave computer and host computer, in time will report when detecting and losing line failure
Signal transmission is warned to host computer.
3. main control module：Acp chip is STM32, realizes decoding, generation instruction, the collection of drive signal to host computer
The processing of signal and the realization for losing line detection determination methods.
4. signal generation module：Two piths are broadly divided into signal generation module, as shown in Fig. 2, Part I
For signal generation part, its function is generation high-frequency ultrasonic sinusoidal drive signals.Part II is power amplifying part, its work(
It can be high frequency sinusoidal signal amplification, the filtering to generation, make the high-frequency driving signal of output pure, stable.
Signal acquisition module is broadly divided into signal processing and conversion circuit two parts, and Part I major function is to adopting
The electric signal at the ultrasonic transducer both ends collected is filtered processing, removes interference of the noise contribution to sampled data.Second
Part is signaling conversion circuit, it acts as virtual value processing is carried out to the sinusoidal signal collected, facilitates the signal of STM32 to adopt
Collection, so can suitably reduce for the acquisition speed of SMT32, it is easier to realizes, and it is more accurate, as shown in Figure 3.
The transducer that the present invention predominantly detects is operated in impedance during resonance point, therefore uses phase locking technique to ultrasound in working
The working status of wave transducer is locked, and it is zero point to lock its phase.Specific method is that will collect voltage and current signal
Square wave is converted to by sine wave, its circuit structure is as shown in Figure 4.
Chip in circuit is connected as Schmidt's comparator, its function of realizing is to believe sinusoidal signal shaping as square wave
Number, then the voltage square wave signal after shaping and current square-wave signal are inputted into chip d type flip flop, judgement voltage signal is reached with this
The purpose that phase is advanced or current signal phase is advanced, can be real according to level height by the signal output after triggering to STM32
Now obtain control transducer whether the signal of resonance, its electrical connection diagram is as shown in Figure 5.
Voltage and current signal are shaped as square wave through comparator, then via d type flip flop signal are arranged to obtain phase
Signal, according to lead relationship after voltage and current hysteresis, can analyze sequence diagram under different conditions and distinguish as shown in Figures 6 and 7.It is logical
Crossing contrast can find, in the output signal timing diagram of module, when voltage signal leading current signal, and module output high level,
It is opposite then export low level.Pass through the output of judgment module, you can realization makes transducer work by way of judging phase difference
In resonant condition.
Above is the hardware configuration and realization principle of the method for the present invention pair, can draw ultrasound realization by above structure
The purpose that impedance signal signal during line bonding gathers in real time.In the methods of the invention, by many experiments, obtaining just
When often bonding is with losing line failure there is fixed difference as shown in figure 8, by experimental verification, in 1ms to 5ms in its change in impedance value
Between difference in section there is generality, it corresponds to the 5th to the 25th impedance sampled point, thus using the impedance information in this stage as
The characteristic value S of line detection is lost, impedance value summation in stage to this, i.e.,：
Found through research experiment, the distribution of characteristic value has a certain regularity, and feature Distribution value during normal bonding is universal
Feature Distribution value during less than broken string.Therefore the testing principle of the method for the present invention is according to normal condition and spy during broken string state
Value indicative respectively obtain normally with break state probability density function, specific method for normal work before, normal condition with
Broken string state is bonded 500 training process respectively, obtains the expectation normally with the characteristic value that breaks、With variance、.So as to establish the probability density function of normal condition and the state characteristic value that breaks、
It is as shown in Figure 9 to obtain its probability density distribution；
Appropriate alarm threshold value is chosen further according to its probability density, work as characteristic valueWhen, then it is judged as detecting
Disconnection fault, it is on the contrary then working properly.Choose should between the characteristic value of normal condition and disconnection fault state expectation between,
Selection principle is that Normal Alarm rate is as far as possible high in the case where meeting to have relatively low rate of false alarm.
Normal Alarm rate refers to the probability that disconnection fault system alarm occurs, and false alarm rate refers to as disconnection fault but system occurs
The probability of alarm.
The specific method of selected characteristic value is：According to the design standard of system requirements, it should meet rate of false alarm requirement first,
Secondly make Normal Alarm rate highest on this basis, therefore set require rate of false alarm as（）, frequency of training, marked through inquiry
Understand to work as independent variable after quasi normal distribution tableWhen system rate of false alarm be.Changed by Standard Normal Distribution special
Point, determines that alarm threshold value is
Testing process when system works is as shown in Figure 10：
Found by studying, directly carrying out judgement in this way can cause system rate of false alarm higher, and cause rate of false alarm
The reason for high is wired in Fig. 9 and part of radio characteristics value aliasing, therefore is the stability of raising system, reduces detection wrong report
Rate, is handled system acquisition to characteristic value using the Kalman filtering algorithm with forgetting factor,Arrived for actual acquisition
Characteristic value,For the characteristic value after processing, it is as shown in figure 12 to establish system model；
By the characteristic value after processing compared with the alarm threshold value that training obtains, if characteristic value is more than alarm threshold value,
Alarm to host computer, and stop being bonded work.
Its iterative formula is：
By the characteristic value after processing compared with the alarm threshold value that training obtains, if characteristic value is more than alarm threshold value,
Alarm to host computer, and stop being bonded work.The probability density distribution contrast of characteristic value is as shown in figure 11 after algorithm process；It is logical
Cross Figure 11 it can be found that using the method for the present invention effectively reduce normally with broken string state characteristic value in aliased portion so that
The rate of false alarm of detecting system is reduced, improves the accuracy of this detection method.In the method for the present inventionWill for manually basis
The detection parameters forgetting factor of setting is sought, by varyingSize can adjust the susceptibility of detection method,It is more big, examine
It is more timely to measure mistake line failure, but rate of false alarm may be caused to increase, is adjusted according to actual requirement.
The feature predominantly detected in this method is operated under resonance and phase locked state for transducer, the resistance in its course of work
Resistance, para-linkage state can be detected, be more suitably applied to actual production in real time.
For the method for the present invention by being detected to the impedance signal during ultrasonic lead key connection, detection speed is more existing
Detection method is faster, it is possible to achieve the effect detected in real time, and the efficiency of normal bonding work is not influenced.It is actual according to characteristic value
Characteristic distributions be trained, have the characteristics that to select alarm threshold value automatically according to demand, user's operation is simple, and from actual feelings
Condition is set out, and adaptability is stronger.The present invention makes characteristic value from the reason for causing rate of false alarm by the method for Kalman filtering
Distribution more concentrates, is more stable, so as to effectively reduce the rate of false alarm of detection process, makes the more existing method of detection more accurate.
The present invention can by adjust wherein forgetting factor size can be according to actual conditions come the detection sensitivity of regulating system, user
It is adjusted, disclosure satisfy that the requirement of more users.
Claims (4)
1. a kind of ultrasonic lead key connection loses line detector, it is characterised in that：Parameter including operating personnel's para-linkage is with losing line
The host computer that the parameter of detection is configured；Realize the real-time Data Transmission with host computer, in time will when detecting and losing line failure
Alarm signal is transmitted to the communication interface of host computer；Decoding, the driving being used for realization to host computer that be connected with communication interface are believed
Number generation instruction, collection signal processing and lose line detection determination methods main control module；It is connected with the main control module
Signal generation module and signal acquisition module：The ultrasonic waves being connected with the signal generation module and signal acquisition module
Can device；
The ultrasonic transducer is operated under resonance and phase locked state, close equipped with sinusoidal signal shaping is applied as square-wave signal
Voltage square wave signal after shaping and current square-wave signal are inputted chip d type flip flop by special comparator, Schmidt's comparator,
Chip d type flip flop is by the signal output after triggering to main control module.
2. ultrasonic lead key connection according to claim 1 loses line detector, it is characterised in that：The signal generation module
Including high-frequency ultrasonic sinusoidal drive signals generative circuit and high frequency sinusoidal signal amplification, filtering, the power amplification circuit of output.
3. ultrasonic lead key connection according to claim 1 loses line detector, it is characterised in that：The signal acquisition module
Electric signal including the ultrasonic transducer both ends to collecting is filtered the signal processing circuit of processing and to collecting
Sinusoidal signal carry out virtual value processing signaling conversion circuit.
4. a kind of ultrasonic lead key connection loses line detecting method, it is characterised in that：Include the following steps：
1) system model is established：Appropriate alarm threshold value D is chosen according to probability densitys, as characteristic value S ＞ DsWhen, then it is judged as examining
Disconnection fault is measured, it is on the contrary then working properlyChoose and should it is expected between the characteristic value of normal condition and disconnection fault state
Between；
The specific method of selected characteristic value is：According to the design standard of system requirements, it should meet rate of false alarm requirement first, secondly
Normal Alarm rate highest is made on this basis, therefore is set and required rate of false alarm as a (a ＜ 1), frequency of training k, through query criteria just
Understand to work as independent variable t=t after state distribution table0When system rate of false alarm be a；By Standard Normal Distribution salient feature, really
Determining alarm threshold value is：
It is the variance for collecting or training sample value,It is the mathematical expectation for collecting or training sample value；
2) open ultrasonic lead key connection and lose line detector；Host computer is initialized；
3) ultrasonic transducer is operated under resonance and phase locked state, immediately to the impedance signal during ultrasonic lead key connection into
Row detection；
4) sinusoidal signal shaping is become square-wave signal feeding chip d type flip flop by ultrasonic transducer, and chip d type flip flop will trigger
Signal output afterwards to main control module is handled；
5) by the characteristic value after processing compared with the alarm threshold value that training obtains, if characteristic value is more than alarm threshold value, to
Host computer is alarmed, and stops being bonded work.
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| CN104785918B (en) * | 2015-04-13 | 2017-04-12 | 龙人义 | Method and system for monitoring welding parameters in real time |
| CN107126639A (en) * | 2017-06-27 | 2017-09-05 | 哈尔滨工业大学深圳研究生院 | High-frequency high-precision ultrasound physiotherapy generator |
| CN109557146B (en) * | 2019-01-11 | 2024-02-13 | 南京工程学院 | Diamond wire breakage detection device and breakage prediction method thereof |
| CN110726888B (en) * | 2019-09-23 | 2021-11-16 | 深圳市开玖自动化设备有限公司 | Ultrasonic anomaly detection method and device of ultrasonic lead bonding equipment |
| CN110736938A (en) * | 2019-10-23 | 2020-01-31 | 中国电子科技集团公司第四十四研究所 | detection structure and method for judging whether wire bonding is short-circuited |
| CN112618972B (en) * | 2020-12-28 | 2022-06-03 | 中聚科技股份有限公司 | Ultrasonic transducer driving method, storage medium, system and device |
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