CN104459230A - Probe protection device - Google Patents
Probe protection device Download PDFInfo
- Publication number
- CN104459230A CN104459230A CN201410697344.2A CN201410697344A CN104459230A CN 104459230 A CN104459230 A CN 104459230A CN 201410697344 A CN201410697344 A CN 201410697344A CN 104459230 A CN104459230 A CN 104459230A
- Authority
- CN
- China
- Prior art keywords
- probe
- sensor
- silicon chip
- distance
- protection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention relates to semiconductor integration circuits and the manufacturing field of the semiconductor integration circuits, in particular to a probe protection device. A distance sensor is arranged on a probe card, when a probe excessively approaches a silicon wafer, an alarm is sent through an alarm device to remind a probe operator to stop moving the probe, and therefore the situation that the probe descends excessively and makes contact with the silicon wafer and consequently the probe is deformed or pressed and broken is avoided.
Description
Technical field
The present invention relates to the integrated single channel of semiconductor and manufacture field thereof, particularly relate to a kind of probe protection device.
Background technology
Existing manual probe platform probe does not limit the effective measures of probe falling head or chuck lifting height, and when can not prevent maloperation, probe bumps against silicon chip surface.In the case, if probe declines excessively or chuck rises excessively, just likely there is probe and bump against silicon chip surface, cause the situation that probe tip flexural deformation and silicon chip occur compared with deep surface cut.
Chinese patent (CN103616008A) describes a kind of surface roughometer probe protection device, relates to surface roughometer.Be provided with support frame structure, buffering end emits structure, probe tips structure; Support frame structure is provided with bracing frame, electromagnet and control and draws spring; The bracing frame left and right sides is provided with coil, and coil is connected with electromagnet; Electromagnet is arranged on support frame base; Control position spring fitting is in the central upper portion position of bracing frame; Buffering end cap configuration is provided with buffering end cap, small rack; Buffering end cap is provided with butterfly grooved rail and small rack attachment cap; Connected by control position spring between buffering end cap and bracing frame; Small rack is provided with feet, and small rack is arranged on the small rack attachment cap on buffering end cap, is spirally connected between small rack and small rack attachment cap; Probe tips structure is provided with micro slide rail, detector, nut, spacer, axis, probe, and axis two ends are provided with screw thread; Axis is arranged on detector, and spacer, miniature pulley, nut are installed in the axis left and right sides.
Summary of the invention
For the problems referred to above, the present invention relates to a kind of probe, it is characterized in that, be applied in the technique of testing the silicon chip be placed on plummer, described probe comprises:
Needle stand;
Probe, is fixed on described needle stand;
Sensor, is fixedly installed on described needle stand, to obtain the real-time distance between this sensor and described silicon chip;
Warning device, is connected with described sensor;
Wherein, in described sensor, be also pre-stored with a safe distance, and when described real-time distance is less than or equal to described safe distance time, trigger described warning device and report to the police.
Above-mentioned probe protection device, is characterized in that, described alarm device carries out alarm by sound or signal lamp.
Above-mentioned probe protection device, is characterized in that, described sensor is range sensor.
Above-mentioned probe protection device, is characterized in that, described sensor is by sending radiated wave and receiving the distance that the mistiming reflecting radiated wave calculates probe and silicon chip surface.
Above-mentioned probe protection device, is characterized in that, probe and silicon chip surface distance computing formula are
wherein υ is the aerial velocity of propagation of radiated wave, and Δ t is that sensor sends radiated wave and the mistiming receiving radiated wave.
Above-mentioned probe card protecting device, is characterized in that, described alarm device is hummer.
Above-mentioned probe card protecting device, is characterized in that, described alarm device is LED light emitting diode.
In sum; owing to have employed technique scheme; a kind of probe protection device that the present invention proposes; range sensor is set on the probe card; alarm is sent with the action reminding probe operation person to stop probe movement by alarm device when probe is excessively near silicon chip; to avoid, because probe declines excessively, causing probe to encounter silicon chip and making probe deformations or break.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
Often can there is maloperation for current manual probe platform, cause probe to collide silicon chip surface, cause the situation that probe tip flexural deformation and silicon chip occur compared with deep surface cut.The present invention relates to a kind of probe protection device; mainly on probe station crossbeam, a sensor is installed; when probe declines time; sensor is by sending radiated wave and receiving the distance that the mistiming reflecting radiated wave calculates probe and silicon chip surface; when the distance that sensor detects be less than or equal to the safe distance preset time will give the alarm, remind operator.
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described.
Be illustrated in figure 1 a kind of manual probe platform, comprise needle stand 5, crossbeam 4, probe 2. the present invention is a kind of probe protection device, probe station crossbeam 4 arranges a sensor 3, when probe 2 excessively near silicon chip 1 time give the alarm, certainly, the necessary alarm device (not shown) that also arranges is connected with sensor 3 communication, preset the safe distance on a probe 2 and silicon chip 1 surface, when probe 2 declines time, sensor 3 is by the distance real time contrast of probe 2 with silicon chip 1 surface, once distance is less than or equal to safe distance in real time, namely alarm device reports to the police, remind operator, avoid maloperation occurs, thus make probe 2 collide silicon chip 1 surface, by silicon chip 1 surface tear and the flexural deformation of probe 2 needle point.
Warning message to be transferred out by sound or signal lamp and reports to the police by this warning device, wherein sensor 3 is range sensor, this range sensor is by sending radiated wave and receiving the distance that the mistiming reflecting radiated wave calculates probe and silicon chip surface, and the computing formula of probe and silicon chip surface distance is
wherein υ is the aerial velocity of propagation of radiated wave, and Δ t is that sensor sends radiated wave and the mistiming receiving radiated wave.The real-time distance detected at probe 2 like this carries out real time contrast with the safe distance preset, and the comparing result obtained is analyzed, whether by Signal transmissions to warning device, report to the police.Alarm can be set to hummer or LED light emitting diode.
Wherein, needle stand 5 also arranges a data processing equipment (not shown), this data processing equipment comprises data storage cell, comparing unit and data processing unit, range sensor by real-time Data Transmission to data processing unit, data processing unit goes out real-time distance according to formulae discovery, the safe distance prestored in the data store is sent into Data Comparison unit with the real-time distance that calculates contrast simultaneously, be confirmed whether to give the alarm data to warning device according to comparing result.And this real-time distance is the real-time distance between range sensor and silicon chip, on the moving direction of probe to silicon chip, range sensor and probe have the first distance, and the safe distance of setting is more than or equal to length (along described probe to the length on the described silicon chip moving direction) sum of the first distance and probe.
In sum; owing to have employed technique scheme; a kind of probe protection device that the present invention proposes; range sensor is set on the probe card; alarm is sent with the action reminding probe operation person to stop probe movement by alarm device when probe is excessively near silicon chip; to avoid, because probe declines excessively, causing probe to encounter silicon chip and making probe deformations or break.
By illustrating and accompanying drawing, giving the exemplary embodiments of the ad hoc structure of embodiment, based on the present invention's spirit, also can do other conversion.Although foregoing invention proposes existing preferred embodiment, but these contents are not as limitation.
For a person skilled in the art, after reading above-mentioned explanation, various changes and modifications undoubtedly will be apparent.Therefore, appending claims should regard the whole change and correction of containing true intention of the present invention and scope as.In Claims scope, the scope of any and all equivalences and content, all should think and still belong to the intent and scope of the invention.
Claims (7)
1. a probe, is characterized in that, be applied in the technique of testing the silicon chip be placed on plummer, described probe comprises:
Needle stand;
Probe, is fixed on described needle stand;
Sensor, is fixedly installed on described needle stand, to obtain the real-time distance between this sensor and described silicon chip;
Warning device, is connected with described sensor;
Wherein, in described sensor, be also pre-stored with a safe distance, and when described real-time distance is less than or equal to described safe distance time, trigger described warning device and report to the police.
2. probe protection device according to claim 1, is characterized in that, described alarm device carries out alarm by sound or signal lamp.
3. probe protection device according to claim 1, is characterized in that, described sensor is range sensor.
4. probe protection device according to claim 1, is characterized in that, described sensor is by sending radiated wave and receiving the distance that the mistiming reflecting radiated wave calculates probe and silicon chip surface.
5. probe protection device according to claim 1, is characterized in that, probe and silicon chip surface distance computing formula are
wherein υ is the aerial velocity of propagation of radiated wave, and Δ t is that sensor sends radiated wave and the mistiming receiving radiated wave.
6. probe card protecting device according to claim 2, is characterized in that, described alarm device is hummer.
7. probe card protecting device according to claim 2, is characterized in that, described alarm device is LED light emitting diode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410697344.2A CN104459230A (en) | 2014-11-26 | 2014-11-26 | Probe protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410697344.2A CN104459230A (en) | 2014-11-26 | 2014-11-26 | Probe protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104459230A true CN104459230A (en) | 2015-03-25 |
Family
ID=52905613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410697344.2A Pending CN104459230A (en) | 2014-11-26 | 2014-11-26 | Probe protection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104459230A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105785260A (en) * | 2016-05-25 | 2016-07-20 | 上海华岭集成电路技术股份有限公司 | Device and method for preventing wafer test probe station from pin collision |
| CN110045269A (en) * | 2019-05-09 | 2019-07-23 | 肇庆学院 | A kind of apparatus for testing chip and method |
| CN111856091A (en) * | 2020-08-04 | 2020-10-30 | 河南大学 | Method for accurately propelling probe |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1236091A (en) * | 1998-05-19 | 1999-11-24 | 摩托罗拉公司 | Method of probing substrate |
| JP2002158264A (en) * | 2000-11-17 | 2002-05-31 | Ando Electric Co Ltd | Probe card and its manufacturing method |
| CN1782716A (en) * | 2004-11-29 | 2006-06-07 | 冲电气工业株式会社 | Probe card, testing method using it and semiconductor device tested by the same |
| CN101551231A (en) * | 2008-04-02 | 2009-10-07 | 东京毅力科创株式会社 | Calibration method, tip position detection device, and probe device |
| CN101581733A (en) * | 2008-05-15 | 2009-11-18 | 东京毅力科创株式会社 | Probe apparatus and method for correcting contact position |
| CN102637340A (en) * | 2012-03-14 | 2012-08-15 | 上海华力微电子有限公司 | Method for preventing microscope on Cascade probe station from striking probe |
-
2014
- 2014-11-26 CN CN201410697344.2A patent/CN104459230A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1236091A (en) * | 1998-05-19 | 1999-11-24 | 摩托罗拉公司 | Method of probing substrate |
| JP2002158264A (en) * | 2000-11-17 | 2002-05-31 | Ando Electric Co Ltd | Probe card and its manufacturing method |
| CN1782716A (en) * | 2004-11-29 | 2006-06-07 | 冲电气工业株式会社 | Probe card, testing method using it and semiconductor device tested by the same |
| CN101551231A (en) * | 2008-04-02 | 2009-10-07 | 东京毅力科创株式会社 | Calibration method, tip position detection device, and probe device |
| CN101581733A (en) * | 2008-05-15 | 2009-11-18 | 东京毅力科创株式会社 | Probe apparatus and method for correcting contact position |
| CN102637340A (en) * | 2012-03-14 | 2012-08-15 | 上海华力微电子有限公司 | Method for preventing microscope on Cascade probe station from striking probe |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105785260A (en) * | 2016-05-25 | 2016-07-20 | 上海华岭集成电路技术股份有限公司 | Device and method for preventing wafer test probe station from pin collision |
| CN110045269A (en) * | 2019-05-09 | 2019-07-23 | 肇庆学院 | A kind of apparatus for testing chip and method |
| CN111856091A (en) * | 2020-08-04 | 2020-10-30 | 河南大学 | Method for accurately propelling probe |
| CN111856091B (en) * | 2020-08-04 | 2021-09-24 | 河南大学 | Method for accurately propelling probe |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104459230A (en) | Probe protection device | |
| CN204101135U (en) | Automatic liquid level alarm | |
| EP2902748A3 (en) | Vehicle position calibration method and corresponding apparatus | |
| EP3923593A3 (en) | Zone recognition | |
| EP3435698A8 (en) | Method and device for wirelessly accessing service | |
| WO2014106056A3 (en) | Systems for locating and interacting with medicament delivery devices | |
| JP6363583B2 (en) | Display device | |
| CN208409919U (en) | A kind of robot collision detecting device and robot | |
| CN205140936U (en) | Unusual monitoring devices of wafer conveying | |
| US8248251B2 (en) | Personal water safety device | |
| CN203241044U (en) | Non-contact printing circuit board flattening and detecting device | |
| CN104555538A (en) | Alarm of coiling device | |
| CN102637340A (en) | Method for preventing microscope on Cascade probe station from striking probe | |
| CN205156908U (en) | Laser ranging module | |
| CN204176141U (en) | Wire harness fixing button | |
| CN105863348A (en) | Anti-inclination device for vehicle loading board for mechanical parking equipment | |
| CN203333244U (en) | Forklift device without of operation dead angle and cpabale of locating accurately | |
| CN204338768U (en) | A kind of novel electronic devices and components fixture | |
| CN204215527U (en) | A kind of breaking alarm device of belt lace | |
| CN105791468A (en) | Falling prevention mobile phone device | |
| CN104495293A (en) | Belt breakage prevention catching device of belt conveyor | |
| CN203786225U (en) | Detector for two-pole electronic component | |
| CN204265160U (en) | A kind of elevator rope breakage protection device | |
| CN203811820U (en) | Device for measuring acceleration of gravity | |
| CN101876702A (en) | Wireless visual distance measuring system for crane arm |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150325 |