CN104451866A - Weighing self-unloading device of kyropoulos method sapphire automatic crystal growth equipment - Google Patents
Weighing self-unloading device of kyropoulos method sapphire automatic crystal growth equipment Download PDFInfo
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- CN104451866A CN104451866A CN201510006476.0A CN201510006476A CN104451866A CN 104451866 A CN104451866 A CN 104451866A CN 201510006476 A CN201510006476 A CN 201510006476A CN 104451866 A CN104451866 A CN 104451866A
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- China
- Prior art keywords
- seed rod
- load cells
- weighing
- rod support
- cavity volume
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- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 36
- 239000010980 sapphire Substances 0.000 title claims abstract description 36
- 238000005303 weighing Methods 0.000 title claims abstract description 29
- 239000013078 crystal Substances 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000012010 growth Effects 0.000 title claims abstract description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052742 iron Inorganic materials 0.000 claims abstract description 12
- 238000010899 nucleation Methods 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000004308 accommodation Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241001062009 Indigofera Species 0.000 description 1
- 241001025261 Neoraja caerulea Species 0.000 description 1
- 230000003698 anagen phase Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
The invention discloses a weighing self-unloading device of kyropoulos method sapphire automatic crystal growth equipment. A containing cavity and a top cover are arranged, a sucking device is arranged on the bottom face of the top cover, and a weighing sensor is arranged beneath the sucking device. The weighing sensor is connected with a seed rod support, the seed rod support is connected with a seed rod, and the seed rod penetrates through a through hole in the bottom of the containing cavity. The sucking device is provided with an electromagnet which can generate magnetic force when being powered up and an iron block. The electromagnet is fixed on the bottom face of the top cover through a special-shaped bolt, and the head of the special-shaped bolt extends to be a cylindrical head. At least two circular holes are formed in the two ends of the iron block, penetrate through the cylindrical head of the special-shaped bolt and can move up and down. The weighing sensor is fixedly connected with the iron block through a bolt. The gap between the seed rod support and the bottom of the containing cavity is arranged to be 2-3 mm, and the size of the bottom of the seed rod support is larger than the diameter of the through hole in the bottom of the containing cavity.
Description
Technical field
The present invention relates to kyropoulos sapphire crystal and manufacture field, particularly relate to the self unloader of weighing that brilliant equipment grown automatically by a kind of kyropoulos sapphire, be applicable to other similar field simultaneously.
Background technology
It is very wide that optics due to sapphire crystal penetrates band, all has good light transmission from near-ultraviolet light (190nm) to middle infrared (Mid-IR), is therefore used in a large number on optical element, infrared facility, high intensity laser beam lens materials and mask material.Current super brightness is white/and the quality of blue-ray LED depends on the material quality of epitaxy of gallium nitride (GaN), and the sapphire substrate surface working quality of epitaxy of gallium nitride quality then with used is closely bound up, sapphire (monocrystalline Al
2o
3) lattice constant mismatch rate between the race's deposit film of C face III-V and II-VI is little, meet resistant to elevated temperatures requirement in GaN epitaxy technique simultaneously, make sapphire wafer become the critical material making white/indigo plant/green light LED.
The technology of at present the most ripe growing large-size low-stress zero defect sapphire crystal still or kyropoulos.The weight of current kyropoulos growing sapphire crystal is increasing, from 35kg level, develops into 60kg level, 80kg level, 100kg level, even arrives 120kg level.And crystal weight embodies the important parameter of growth state of crystal, but along with the increase of crystal weight, the weight grade of the sensor adopted is also in continuous increase, the distinguishable minimum weight of LOAD CELLS is also in continuous increase simultaneously, finally causes the weighing data of these low precision to lose reference value.
Summary of the invention
(1) technical problem that will solve
Main purpose of the present invention is to provide a kind of kyropoulos sapphire automatically to grow the self unloader of weighing of brilliant equipment, for kyropoulos sapphire crystallization equipment provides high-precision weighing data in the seeding stage, and has nothing to do with the weight of sapphire crystal.
(2) technical scheme
For achieving the above object, the invention provides the self unloader of weighing that brilliant equipment grown automatically by a kind of kyropoulos sapphire, the cavity volume playing accommodation effect is set, described cavity volume top arranges the top cover playing sealing function, the bottom surface of described top cover arranges attracting device, below described attracting device, LOAD CELLS is set, described LOAD CELLS connects seed rod support, described seed rod support connects seed rod, described seed rod is through the through hole bottom described cavity volume, described seed rod lower end connects seed chuck, described seed chuck connects seed crystal, described seeded growth goes out sapphire crystal, the working process of described self unloader of weighing comprises:
1) in seeding process, described attracting device is in running order, by described LOAD CELLS adhesive, sapphire crystal by described seed rod load-bearing in described LOAD CELLS;
2) after seeding terminates, described attracting device is deactivated state, and described LOAD CELLS moves down, and holds described seed rod support bottom described cavity volume, described LOAD CELLS unloading.
Described attracting device is set to electro-magnet and the iron block that energising produces adhesive magnetic force.
Described electro-magnet is fixed on the bottom surface of described top cover by special shaped screw bolt, the head of described special shaped screw bolt extends into cylindrical head, the two ends of described iron block arrange at least 2 circular holes, and pass the cylindrical head of described different row bolt, and can freely up and down move, described LOAD CELLS and described iron block are bolted.
Described LOAD CELLS is set to small-range, high-precision LOAD CELLS.
Described seed rod support is fixed by bolt and described LOAD CELLS.
Gap bottom described seed rod support and described cavity volume is set to 2-3mm.
The bottom size of described seed rod support is set to the diameter of the bottom through-hole being greater than described cavity volume.
(3) beneficial effect
As can be seen from technique scheme, this patent has following beneficial effect:
1, the seeding stage, LOAD CELLS carries, and obtains high-precision weighing data;
2, after seeding terminates, LOAD CELLS unloads, and avoids sapphire crystal to damage LOAD CELLS when growing up.
Accompanying drawing explanation
Fig. 1 is the appearance schematic diagram that brilliant equipment grown automatically by kyropoulos sapphire;
Fig. 2 is the structural representation of self unloader of weighing.
Embodiment
Below in conjunction with concrete embodiment, this patent is further expanded description, but it is pointed out that the present invention's structure required for protection is not limited to the concrete structure in embodiment and Figure of description.For other structure formations that those of ordinary skill in the art can know by inference, also belong within the present invention's scope required for protection.
Refer to Fig. 1, Fig. 2, the self unloader of weighing of brilliant equipment grown automatically by a kind of kyropoulos sapphire, be arranged on the top that the burner hearth 11 of brilliant equipment grown automatically by kyropoulos sapphire, comprise the cavity volume 1 playing accommodation effect, described cavity volume 1 top arranges the top cover 2 playing sealing function, described top cover 2 is provided with the perforate of band sealing-ring, wire can be provided for the device of described cavity volume 1 inside.
The bottom surface of described top cover 2 arranges attracting device, LOAD CELLS 5 is set below described attracting device, described attracting device can realize the LOAD CELLS 5 described in adhesive, also can unclamp described LOAD CELLS 5, and described LOAD CELLS 5 is for providing weighing data.
Described LOAD CELLS 5 connects seed rod support 6, described seed rod support 6 is fixed by bolt and described LOAD CELLS 5, described seed rod support 6 connects seed rod 7, described seed rod 7 is through the through hole bottom described cavity volume 1, and input described in burner hearth 11 in, described seed rod 7 lower end connects seed chuck, and described seed chuck connects seed crystal, and described seeded growth goes out sapphire crystal.Therefore, the weighing data of described LOAD CELLS 5, include the weight of described seed rod support 6, seed rod 7, seed chuck and sapphire crystal, and the weight of described seed rod support 6, seed rod 7 and seed chuck is fixing, therefore, sapphire crystal weight can be calculated.Meanwhile, described LOAD CELLS 5 is set to small-range, high-precision LOAD CELLS, therefore can provide the weighing data that precision is very high.
The working process of described self unloader of weighing comprises:
1) in seeding process, described attracting device is in running order, by described LOAD CELLS 5 adhesive, sapphire crystal by described seed rod 7 load-bearing in described LOAD CELLS 5;
In this stage, sapphire crystal growth weight is little, needs accurate weighing data to judge crystal growth phase, and does not exceed the range ability of described LOAD CELLS 5.
2), after seeding terminates, described attracting device is deactivated state, and described LOAD CELLS 5 moves down, and holds described seed rod support 6 bottom described cavity volume 1, and described LOAD CELLS 5 unloads.
In this stage, sapphire crystal grows into certain phase, does not need the weighing data of high precision, and can exceed the range ability of described LOAD CELLS 5.
Described attracting device can be set to electro-magnet 3 and the iron block 4 that energising produces adhesive magnetic force, produces electromagnetic force, realize adhesive action by electric current.
Described electro-magnet 3 is fixed on the bottom surface of described top cover 2 by special shaped screw bolt 8, the head of described special shaped screw bolt 8 extends into cylindrical head, the two ends of described iron block 4 arrange at least 2 circular holes 9, and pass the cylindrical head of described different row bolt, and can freely up and down move, described LOAD CELLS 5 is bolted with described iron block 4.
And described seed rod support 6 and the gap bottom described cavity volume 1 are set to 2-3mm, and the bottom size of described seed rod support 6 is set to the diameter of the bottom through-hole being greater than described cavity volume 1.So just can ensure in uninstall process, can not great impact be produced.
In sum, this device achieves the high-acruracy survey in the seeding stage, and after seeding terminates, realizes unloading operation, protects LOAD CELLS.
Claims (7)
1. the self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire, the cavity volume playing accommodation effect is set, described cavity volume top arranges the top cover playing sealing function, it is characterized in that: the bottom surface of described top cover arranges attracting device, below described attracting device, LOAD CELLS is set, described LOAD CELLS connects seed rod support, described seed rod support connects seed rod, described seed rod is through the through hole bottom described cavity volume, described seed rod lower end connects seed chuck, described seed chuck connects seed crystal, described seeded growth goes out sapphire crystal, the working process of described self unloader of weighing comprises:
1) in seeding process, described attracting device is in running order, by described LOAD CELLS adhesive, sapphire crystal by described seed rod load-bearing in described LOAD CELLS;
2) after seeding terminates, described attracting device is deactivated state, and described LOAD CELLS moves down, and holds described seed rod support bottom described cavity volume, described LOAD CELLS unloading.
2. the self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire according to claim 1, it is characterized in that: described attracting device is set to electro-magnet and the iron block that energising produces adhesive magnetic force.
3. the self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire according to claim 2, it is characterized in that: described electro-magnet is fixed on the bottom surface of described top cover by special shaped screw bolt, the head of described special shaped screw bolt extends into cylindrical head, the two ends of described iron block arrange at least 2 circular holes, and pass the cylindrical head of described different row bolt, and can freely up and down move, described LOAD CELLS and described iron block are bolted.
4. the self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire according to claim 1, it is characterized in that: described LOAD CELLS is set to small-range, high-precision LOAD CELLS.
5. the self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire according to claim 1, it is characterized in that: described seed rod support is fixed by bolt and described LOAD CELLS.
6. the self unloader of weighing of kyropoulos sapphire according to claim 1 long brilliant equipment automatically, is characterized in that: the gap bottom described seed rod support and described cavity volume is set to 2-3mm.
7. the self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire according to claim 1, it is characterized in that: the bottom size of described seed rod support is set to the diameter of the bottom through-hole being greater than described cavity volume.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510006476.0A CN104451866B (en) | 2015-01-07 | 2015-01-07 | Weighing self-unloading device of kyropoulos method sapphire automatic crystal growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510006476.0A CN104451866B (en) | 2015-01-07 | 2015-01-07 | Weighing self-unloading device of kyropoulos method sapphire automatic crystal growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104451866A true CN104451866A (en) | 2015-03-25 |
| CN104451866B CN104451866B (en) | 2017-01-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510006476.0A Active CN104451866B (en) | 2015-01-07 | 2015-01-07 | Weighing self-unloading device of kyropoulos method sapphire automatic crystal growth equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109252211A (en) * | 2018-11-26 | 2019-01-22 | 北京雷生强式科技有限责任公司 | A kind of grower and method of laser crystal |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| JP2013147387A (en) * | 2012-01-20 | 2013-08-01 | Nippon Steel & Sumikin Fine Technology Co Ltd | Single crystal manufacturing apparatus |
| CN203222630U (en) * | 2013-04-08 | 2013-10-02 | 上海昀丰光电技术有限公司 | Weighing structure for sapphire furnace |
| CN103911655A (en) * | 2014-04-09 | 2014-07-09 | 中山大学 | Crystal drawing device |
| CN204385318U (en) * | 2015-01-07 | 2015-06-10 | 杭州晶一智能科技有限公司 | The self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire |
-
2015
- 2015-01-07 CN CN201510006476.0A patent/CN104451866B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| JP2013147387A (en) * | 2012-01-20 | 2013-08-01 | Nippon Steel & Sumikin Fine Technology Co Ltd | Single crystal manufacturing apparatus |
| CN203222630U (en) * | 2013-04-08 | 2013-10-02 | 上海昀丰光电技术有限公司 | Weighing structure for sapphire furnace |
| CN103911655A (en) * | 2014-04-09 | 2014-07-09 | 中山大学 | Crystal drawing device |
| CN204385318U (en) * | 2015-01-07 | 2015-06-10 | 杭州晶一智能科技有限公司 | The self unloader of weighing of brilliant equipment grown automatically by kyropoulos sapphire |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109252211A (en) * | 2018-11-26 | 2019-01-22 | 北京雷生强式科技有限责任公司 | A kind of grower and method of laser crystal |
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| Publication number | Publication date |
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| CN104451866B (en) | 2017-01-18 |
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Effective date of registration: 20161010 Address after: Kandun Street Dachang road Cixi city Zhejiang province 315300 Ningbo City No. 398 Applicant after: Ningbo Jing Gong crystal Science and Technology Ltd. Address before: 310013 Xihu District, Hangzhou, Wensanlu Road, No. venture building, room 199, room 1402 Applicant before: HANGZHOU JINGYI INTELLIGENT TECHNOLOGY CO., LTD. |
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Effective date of registration: 20180403 Address after: 102600, No. 3, building 2, building 4, Paradise Road, Beijing, Daxing District, 1, unit 317 Patentee after: Beijing informed investment home intellectual property rights Operation Co., Ltd. Address before: Kandun Street Dachang road Cixi city Zhejiang province 315300 Ningbo City No. 398 Patentee before: Ningbo Jing Gong crystal Science and Technology Ltd. |
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Effective date of registration: 20191011 Address after: 314500, building 288, 2 Avenue, Indus street, Tongxiang, Zhejiang, Jiaxing Patentee after: Zhejiang harvest Network Technology Co., Ltd. Address before: 102600 Unit 317, Unit 1, Building 3, No. 2, Yueyuan Road, Daxing District, Beijing Patentee before: Beijing informed investment home intellectual property rights Operation Co., Ltd. |
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Effective date of registration: 20191022 Address after: 314500 No. xd701-6, No. 1, Gongnong Road, Nanmen, Chongfu Town, Tongxiang City, Jiaxing City, Zhejiang Province Patentee after: Jiaxing Cauline Electronic Commerce Co., Ltd. Address before: 314500, building 288, 2 Avenue, Indus street, Tongxiang, Zhejiang, Jiaxing Patentee before: Zhejiang harvest Network Technology Co., Ltd. |
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Effective date of registration: 20201231 Address after: 236200 Yingshang County Industrial Park, Fuyang, Anhui Patentee after: FUYANG WANRUISI ELECTRONIC LOCK Co.,Ltd. Address before: No. xd701-6, Nanmen Gongnong Road, Chongfu Town, Tongxiang City, Jiaxing City, Zhejiang Province Patentee before: JIAXING LONGLIE ELECTRONIC COMMERCE Co.,Ltd. |
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