CN104418328B - polysilicon cold hydrogenation washing system - Google Patents
polysilicon cold hydrogenation washing system Download PDFInfo
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- CN104418328B CN104418328B CN201310372363.3A CN201310372363A CN104418328B CN 104418328 B CN104418328 B CN 104418328B CN 201310372363 A CN201310372363 A CN 201310372363A CN 104418328 B CN104418328 B CN 104418328B
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- scrubbing tower
- venturi
- washing system
- circulating pump
- venturi scrubber
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Abstract
A kind of polysilicon cold hydrogenation washing system, it includes for receiving the Venturi scrubber of charging, scrubbing tower, the knockout drum being connected with Venturi scrubber and scrubbing tower, be connected with Venturi scrubber and scrubbing tower and by cleaning mixture venturi circulating pump from scrubbing tower suction Venturi scrubber and scrubbing tower and by the condenser of the gas condensation in scrubbing tower and by the detergent circulator of drip washing material in liquid suction scrubbing tower in condenser.Polysilicon cold hydrogenation washing system also includes connecting detergent circulator and the safety line of Venturi scrubber.Above-mentioned polysilicon cold hydrogenation washing system, if venturi circulating pump breaks down and does not works, in causing scrubbing tower, pressure constantly raises, safety line is open-minded, a part of cleaning mixture of detergent circulator extraction can be directly entered Venturi scrubber, separated tank, to cycles of washing in scrubbing tower, keeps the pressure stability in scrubbing tower, prevents quick-fried tower.
Description
Technical field
The present invention relates to a kind of washing system, be specifically related to a kind of polysilicon cold hydrogenation washing system.
Background technology
Current polysilicon cold hydrogenation washing system is provided power to do material in Venturi scrubber by venturi circulating pump and cleans for the first time, thered is provided power that material carries out in scrubbing tower second time by detergent circulator to wash, but, existence due to silica flour solid particle, venturi circulating pump is susceptible to fault and causes cycle interruption, in scrubbing tower, pressure constantly raises, and even results in quick-fried tower accident, and potential safety hazard is very big.
Summary of the invention
For above-mentioned existing problem, it is an object of the invention to provide a kind of safer reliable polysilicon cold hydrogenation washing system.
For reaching above-mentioned technique effect, the technical solution used in the present invention is: a kind of polysilicon cold hydrogenation washing system, and it includes for receiving the Venturi scrubber of charging, scrubbing tower, the knockout drum being connected with Venturi scrubber and scrubbing tower, be connected with Venturi scrubber and scrubbing tower and by cleaning mixture venturi circulating pump from scrubbing tower suction Venturi scrubber and scrubbing tower and by the condenser of the gas condensation in scrubbing tower and by the detergent circulator of drip washing material in liquid suction scrubbing tower in condenser.Polysilicon cold hydrogenation washing system also includes connecting detergent circulator and the safety line of Venturi scrubber.
Above-mentioned polysilicon cold hydrogenation washing system, if venturi circulating pump breaks down and does not works, in causing scrubbing tower, pressure constantly raises, safety line is open-minded, a part of cleaning mixture of detergent circulator extraction can be directly entered Venturi scrubber, separated tank, to cycles of washing in scrubbing tower, keeps the pressure stability in scrubbing tower, prevents quick-fried tower.
Accompanying drawing explanation
Fig. 1 is the principle schematic of polysilicon cold of the present invention hydrogenation washing system.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.
As it is shown in figure 1, the polysilicon cold hydrogenation washing system of the present invention includes Venturi scrubber 21, knockout drum 22, scrubbing tower 23, condenser 24, middle condensate tank 25, venturi circulating pump 26, detergent circulator 27 and filter 28.Wherein, Venturi scrubber 21 one end is for charging and carries out washing for the first time, i.e. receive material to be cleaned and carry out cleaning for the first time in Venturi scrubber 21, this material is the material after polysilicon hydrogenation system, for carrying the chlorosilane of the gaseous state of silicon powder particle, hydrogen etc., the other end is connected with knockout drum 22, for being exported in knockout drum 22 by material, and realizes gas-liquid separation in knockout drum 22.Knockout drum about 22 two ends are all connected with scrubbing tower 23, and the gas-liquid after separation enters in scrubbing tower 23 at knockout drum about 22 two ends by pipeline respectively, carry out spray washing in scrubbing tower 23.Scrubbing tower 23 upper end is connected with condenser 24, and lower end is connected with incomplete tube road, and material is in scrubbing tower 23 after spray washing, and silicon powder particle becomes residual liquid together with wash liquid, is directly entered incomplete tube road and carries out arranging residual recycling.Gas is then passed through condenser 24 through scrubbing tower 23 upper end.Condenser 24 is connected with middle condensate tank 25, and gas is becoming cleaning mixture (predominantly Silicon chloride. and the liquid of trichlorosilane) after three grades of condensations condenser 24 in, then it is temporary to be passed through centre condensate tank 25.Middle condensate tank 25 is connected to detergent circulator 27, detergent circulator 27 is connected with scrubbing tower 23 simultaneously, detergent circulator 27 extracts the cleaning mixture in middle condensate tank 25, it is transmitted back to spray washing in scrubbing tower 23 and enters the material of scrubbing tower 23, between scrubbing tower 23, condenser 24 and middle condensate tank 25, form circulation washing, processed by the discharge together with residual liquid of incomplete tube road after silicon powder particle washes away from gas the most at last.Detergent circulator 27 is extracted the liquid of circulation, is the cleaning mixture that formed by condensation of the gas of scrubbing tower 23, and intermediate particle impurity is few, the purest, and the service life of detergent circulator 27 is general the longest.Venturi circulating pump 26 is simultaneously connected with scrubbing tower 23 and Venturi scrubber 21 by pipeline, supernatant liquid in scrubbing tower 23 is extracted and is transported to Venturi scrubber 21 as cleaning mixture and washs the material entered in Venturi scrubber 21, material is lowered the temperature and from gas, washes away silicon powder particle, gas after washing and the cleaning mixture separated tank 22 containing silica flour enter scrubbing tower 23 after separating and circulate, while charging in the case of maintaining scrubbing tower 23 pressure balance, the portion washes liquid containing silica flour is recycled from residual preparation of incomplete tube road row.In order to protect venturi circulating pump 26, filter 28 is arranged on the pipeline between scrubbing tower 23 and venturi circulating pump 26, filters off part silica flour, reduces the silica flour impact on venturi circulating pump 26.So, under the dynamic action of venturi circulating pump 26, partial material washes away silica flour entrance incomplete tube road row after can circulating washing between Venturi scrubber 21, knockout drum 22, scrubbing tower 23 residual, can simultaneously be effectively keep the pressure balance in scrubbing tower 23, it is to avoid the generation of the dangerous situations such as blast.
Due to venturi circulating pump 26 from scrubbing tower 23 directly draw liquid as cleaning mixture, these cleaning mixture include part silicon powder particle, affect venturi circulating pump 26 and work, cause venturi circulating pump 26 fault.In order to be further ensured that safety, polysilicon cold hydrogenation washing system is additionally provided with safety line 29, safety line 29 one end is connected in the intermediate duct of detergent circulator 27 and scrubbing tower, and the other end is connected on the pipeline between venturi circulating pump 26 and Venturi scrubber 21.The guarantee valve 291 for switching pipeline it is additionally provided with in safety line 29.Under naturalness, ensure valve 291 can close, polysilicon cold hydrogenation washing system work as procedure described above, to feed separation, washing the most residual.If venturi circulating pump 26 breaks down and does not works, in causing scrubbing tower 23, pressure constantly raises, then open and ensure valve 291, by open-minded for safety line 29, a part of cleaning mixture of detergent circulator 27 extraction can be directly entered Venturi scrubber 21, separated tank 22, to cycles of washing in scrubbing tower 23, keeps the pressure stability in scrubbing tower 23, prevents quick-fried tower.
In order to better ensure that the safety of system, pressure sensitive device it is additionally provided with on scrubbing tower 23, this pressure sensitive device is connected with scattered control system (DCS), the pressure condition of monitor wash tower 23, if scrubbing tower 23 has pressure anomaly to raise and the situation of superpressure, then start warning, Field Force start the guarantee valve 291 in safety line 29, prevent quick-fried tower.Scattered control system can also monitor venturi circulating pump 26 simultaneously and control to ensure valve 291, when venturi circulating pump 26 quits work and pressure in scrubbing tower 23 raises, automatically control guarantee valve 291 to open, safety line 29 is used to devote oneself to work, then and point out Field Force to keep in repair venturi circulating pump 26 in the suitable moment generation that can automatically avoid quick-fried tower dangerous is got involved, without Field Force.The working condition of all right monitor wash liquid circulating pump 27 simultaneously of scattered control system, when detergent circulator 27 quits work, alarm sounds Field Force's on-call maintenance.
In order to ensure the offer of power, detergent circulator 27 can use double pump structure, even if in venturi circulating pump 26 fault, when safety line 29 is devoted oneself to work, double pump mechanism can ensure that the circulation power of whole system, maintains effectively operating.
The above; preferable case study on implementation for the present invention; not the present invention is imposed any restrictions, every any simple modification, change and equivalent structure change above example made according to the technology of the present invention essence, all still fall within the protection domain of technical solution of the present invention.
Claims (8)
1. a polysilicon cold hydrogenation washing system, it includes the Venturi scrubber for receiving charging, scrubbing tower, the knockout drum being connected with Venturi scrubber and scrubbing tower, it is connected with Venturi scrubber and scrubbing tower and by cleaning mixture venturi circulating pump from scrubbing tower suction Venturi scrubber, it is connected with scrubbing tower and by the condenser of the gas condensation in scrubbing tower and by the detergent circulator of drip washing material in liquid suction scrubbing tower in condenser, it is characterized in that: also include connecting detergent circulator and the safety line of Venturi scrubber, this safety line one end is connected on the pipeline between detergent circulator and scrubbing tower, other end is connected on the pipeline between venturi circulating pump and Venturi scrubber.
Polysilicon cold the most according to claim 1 hydrogenation washing system, it is characterised in that be provided with the guarantee valve of this safety corridor of opening and closing on this safety corridor.
Polysilicon cold the most according to claim 1 hydrogenation washing system, it is characterised in that also include arranging the filter on the pipeline connecting venturi circulating pump and scrubbing tower.
Polysilicon cold the most according to claim 1 hydrogenation washing system, it is characterised in that this detergent circulator is double pump structure.
Polysilicon cold the most according to claim 1 hydrogenation washing system, it is characterised in that be provided with the intermediate condensation liquid bath for keeping in the liquid that condenser is condensed out between this condenser and detergent circulator.
Polysilicon cold the most according to claim 2 hydrogenation washing system, it is characterised in that also include the pressure sensitive device being arranged on scrubbing tower and be connected and in the scattered control system of scrubbing tower superpressure alarm with this pressure sensitive device.
Polysilicon cold the most according to claim 6 hydrogenation washing system, it is characterised in that this scattered control system monitoring venturi circulating pump also controls to ensure that guarantee valve opened by valve when venturi circulating pump quits work.
Polysilicon cold the most according to claim 7 hydrogenation washing system, it is characterised in that this scattered control system monitor wash liquid circulating pump also quits work alarm in detergent circulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310372363.3A CN104418328B (en) | 2013-08-24 | 2013-08-24 | polysilicon cold hydrogenation washing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310372363.3A CN104418328B (en) | 2013-08-24 | 2013-08-24 | polysilicon cold hydrogenation washing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104418328A CN104418328A (en) | 2015-03-18 |
| CN104418328B true CN104418328B (en) | 2016-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310372363.3A Active CN104418328B (en) | 2013-08-24 | 2013-08-24 | polysilicon cold hydrogenation washing system |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113019036A (en) * | 2021-03-29 | 2021-06-25 | 中国恩菲工程技术有限公司 | Wet dust removal system for trichlorosilane production |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102249187A (en) * | 2011-05-20 | 2011-11-23 | 四川亚连科技有限责任公司 | System and process for recovering pure hydrogen and liquid HCl through polysilicon tail gas treatment |
| CN102849745A (en) * | 2012-09-24 | 2013-01-02 | 华陆工程科技有限责任公司 | Dust removal process and system for trichlorosilane production |
| CN103170200A (en) * | 2011-12-20 | 2013-06-26 | 西安航天远征流体控制股份有限公司 | Cold hydrogenation wet dust collection unit |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10056722A1 (en) * | 2000-11-15 | 2002-06-06 | Solarworld Ag | Process for the inertization of dust-like silicon-metal residues of trichlorosilane synthesis in a fluidized bed |
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2013
- 2013-08-24 CN CN201310372363.3A patent/CN104418328B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102249187A (en) * | 2011-05-20 | 2011-11-23 | 四川亚连科技有限责任公司 | System and process for recovering pure hydrogen and liquid HCl through polysilicon tail gas treatment |
| CN103170200A (en) * | 2011-12-20 | 2013-06-26 | 西安航天远征流体控制股份有限公司 | Cold hydrogenation wet dust collection unit |
| CN102849745A (en) * | 2012-09-24 | 2013-01-02 | 华陆工程科技有限责任公司 | Dust removal process and system for trichlorosilane production |
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| CN104418328A (en) | 2015-03-18 |
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Effective date of registration: 20201117 Address after: 015543 southeast of the intersection of jingsan road and Weisi Road, Qingshan Industrial Park, wulatehouqi, Bayannur City, Inner Mongolia Autonomous Region Patentee after: Bayannur concentrated Silicon Industry Co., Ltd Address before: 015543 the Inner Mongolia Autonomous Region Bayannaoer wulatehouqi Qingshan Industrial Park Patentee before: INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |
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