CN104418328A - Polysilicon cold hydrogenation scrubbing system - Google Patents
Polysilicon cold hydrogenation scrubbing system Download PDFInfo
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- CN104418328A CN104418328A CN201310372363.3A CN201310372363A CN104418328A CN 104418328 A CN104418328 A CN 104418328A CN 201310372363 A CN201310372363 A CN 201310372363A CN 104418328 A CN104418328 A CN 104418328A
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- venturi
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Abstract
A polysilicon cold hydrogenation scrubbing system includes a Venturi scrubber for receiving a fed material, a scrubbing tower, a separation tank connected with the Venturi scrubber and the scrubbing tower, a Venturi circulating pump connected with the Venturi scrubber and the scrubbing tower and used for pumping a scrubbing solution from the scrubbing tower into the Venturi scrubber, a condenser connected with the scrubbing tower and used for condensing a gas in the scrubbing tower, and a scrubbing solution circulating pump used for pumping a liquid in the condenser into the scrubbing tower in order to leach the material. The polysilicon cold hydrogenation scrubbing system also includes a safety pipeline for connecting the scrubbing solution circulating pump with the Venturi scrubber. If the Venturi circulating pump does not work due to faults, the pressure in the scrubbing tower continuously rises, the safety pipeline is open, and the scrubbing solution pumped by the scrubbing solution circulating pump directly enters the Venturi scrubber, goes through the separation tank and enters the scrubbing tower for scrubbing circulation, so the stability of the pressure in the scrubbing tower is guaranteed, and tower explosion is prevented.
Description
Technical field
The present invention relates to a kind of washing system, be specifically related to a kind of polysilicon cold hydrogenation washing system.
Background technology
Current polysilicon cold hydrogenation washing system provides power in Venturi scrubber, to do first time cleaning to material by Venturi recycle pump, there is provided power in washing tower, to carry out second time to material by detergent circulator to wash, but, due to the existence of silica flour solid particulate, Venturi recycle pump easily breaks down and causes cycle interruption, washing tower internal pressure constantly raises, and even cause quick-fried tower accident, potential safety hazard is very big.
Summary of the invention
For above-mentioned existing problem, the object of this invention is to provide a kind of safer reliable polysilicon cold hydrogenation washing system.
For reaching above-mentioned technique effect, the technical solution used in the present invention is: a kind of polysilicon cold hydrogenation washing system, and it comprises Venturi scrubber for receiving charging, washing tower, the separating tank be connected with washing tower with Venturi scrubber, to be connected with washing tower with Venturi scrubber and by washings from the Venturi recycle pump washing tower suction Venturi scrubber, with washing tower and by the condenser of the condensation of gas in washing tower and by the detergent circulator of drip washing material in liquid suction washing tower in condenser.Polysilicon cold hydrogenation washing system also comprises the safety line connecting detergent circulator and Venturi scrubber.
Above-mentioned polysilicon cold hydrogenation washing system, if Venturi recycle pump breaks down and does not work, washing tower internal pressure is caused constantly to raise, safety line is open-minded, a part of washings that detergent circulator extracts directly can enter Venturi scrubber, cycles of washing in separating tank to washing tower, keeps the pressure-stabilisation in washing tower, prevents quick-fried tower.
Accompanying drawing explanation
Fig. 1 is the principle schematic of polysilicon cold hydrogenation washing system of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1, polysilicon cold hydrogenation washing system of the present invention comprises Venturi scrubber 21, separating tank 22, washing tower 23, condenser 24, middle condensate tank 25, Venturi recycle pump 26, detergent circulator 27 and strainer 28.Wherein, Venturi scrubber 21 one end is used for charging and carries out first time washing, namely receive material to be cleaned and in Venturi scrubber 21, carry out first time cleaning, this material is the material after polysilicon hydrogenation system, for carrying the chlorosilane, hydrogen etc. of the gaseous state of silicon powder particle, the other end is connected with separating tank 22, for being outputted in separating tank 22 by material, and realizes gas-liquid separation in separating tank 22.Separating tank about 22 two ends are all connected with washing tower 23, and the gas-liquid after separation enters into washing tower 23 at separating tank about 22 two ends by pipeline respectively, in washing tower 23, carry out spray washing.Washing tower 23 upper end is connected with condenser 24, and lower end is connected with incomplete tube road, and material is in washing tower 23 after spray washing, and silicon powder particle becomes raffinate together with washing liq, directly enters incomplete tube road and carries out arranging residual recycling.Gas then passes into condenser 24 through washing tower 23 upper end.Condenser 24 is connected with middle condensate tank 25, and gas becoming washings (being mainly the liquid of silicon tetrachloride and trichlorosilane) in condenser 24 after three grades of condensations, then passes into middle condensate tank 25 and keeps in.Middle condensate tank 25 is connected to detergent circulator 27, detergent circulator 27 is connected with washing tower 23 simultaneously, detergent circulator 27 extracts the washings in middle condensate tank 25, be transmitted back to spray washing in washing tower 23 and enter the material of washing tower 23, at washing tower 23, form circulation cleaning between condenser 24 and middle condensate tank 25, silicon powder particle discharges process by incomplete tube road after washing away from gas together with raffinate the most at last.Detergent circulator 27 extract the liquid of circulation, be the washings that the gas of washing tower 23 is formed by condensation, intermediate particle impurity is few, comparatively pure, and work-ing life of detergent circulator 27 is general longer.Venturi recycle pump 26 connects washing tower 23 and Venturi scrubber 21 by pipeline simultaneously, supernatant liquid in washing tower 23 is extracted and is transported to Venturi scrubber 21 as washings and washs the material entered in Venturi scrubber 21, material is lowered the temperature and wash away silicon powder particle from gas, gas after washing and the washings containing silica flour enter washing tower 23 and circulate after separating tank 22 is separated, charging on one side in the pressure balanced situation of maintenance washing tower 23, recycles the portion washes liquid containing silica flour from the residual preparation of row of incomplete tube road.In order to protect Venturi recycle pump 26, strainer 28 is arranged on the pipeline between washing tower 23 and Venturi recycle pump 26, elimination part silica flour, reduces silica flour to the impact of Venturi recycle pump 26.Like this, under the dynamic action of Venturi recycle pump 26, partial material can wash away after circulation cleaning between Venturi scrubber 21, separating tank 22, washing tower 23 silica flour enter incomplete tube road row residual, effectively can keep the pressure equilibrium in washing tower 23 simultaneously, avoid the generation of the hazardous conditions such as blast.
Because Venturi recycle pump 26 direct imbitition from washing tower 23, as washings, includes part silicon powder particle in these washingss, affect Venturi recycle pump 26 and work, cause Venturi recycle pump 26 fault.In order to ensure safety further, polysilicon cold hydrogenation washing system is also provided with safety line 29, safety line 29 one end is connected to detergent circulator 27 with in the intermediate duct of washing tower, and the other end is connected on the pipeline between Venturi recycle pump 26 and Venturi scrubber 21.Safety line 29 is also provided with the guarantee valve 291 for switch pipeline.Under state of nature, ensure valve 291 can close, polysilicon cold hydrogenation washing system according to said process work, to feed separation, washing residual side by side.If Venturi recycle pump 26 breaks down and does not work, washing tower 23 internal pressure is caused constantly to raise, then open and ensure valve 291, by open-minded for safety line 29, a part of washings that detergent circulator 27 extracts can directly enter Venturi scrubber 21, cycles of washing in separating tank 22 to washing tower 23, keeps the pressure-stabilisation in washing tower 23, prevents quick-fried tower.
In order to ensure the security of system better, washing tower 23 is also provided with pressure sensitive device, this pressure sensitive device is connected with dispersing control system (DCS), the pressure condition of monitor wash tower 23, if washing tower 23 has pressure anomaly to raise and the situation of superpressure, then start warning, started the guarantee valve 291 in safety line 29 by field staff, prevent quick-fried tower.Dispersing control system can also be monitored Venturi recycle pump 26 simultaneously and control to ensure valve 291, when Venturi recycle pump 26 quits work and pressure in washing tower 23 raises, automatic control ensures that valve 291 is opened, use safety pipeline 29 is devoted oneself to work, then and point out field staff at maintenance of suitable moment Venturi recycle pump 26 get involved without the need to field staff and automatically can avoid the generation of quick-fried tower danger.The working condition of dispersing control system all right monitor wash liquid simultaneously recycle pump 27, when detergent circulator 27 quits work, alarm sounds field staff on-call maintenance.
In order to ensure providing of power, detergent circulator 27 can adopt double pump structure, even if in Venturi recycle pump 26 fault, when safety line 29 is devoted oneself to work, double pump mechanism can ensure the circulation power of whole system, maintains and effectively operates.
The above; for better case study on implementation of the present invention; not the present invention is imposed any restrictions, every above embodiment is done according to the technology of the present invention essence any simple modification, change and equivalent structure change, all still belong in the protection domain of technical solution of the present invention.
Claims (9)
1. a polysilicon cold hydrogenation washing system, it comprises Venturi scrubber for receiving charging, washing tower, the separating tank be connected with washing tower with Venturi scrubber, to be connected with washing tower with Venturi scrubber and by the condenser of the condensation of gas in washing tower and by the detergent circulator of drip washing material in liquid suction washing tower in condenser, to be it is characterized in that from the Venturi recycle pump washing tower suction Venturi scrubber, with washing tower by washings: also comprise the safety line connecting detergent circulator and Venturi scrubber.
2. polysilicon cold hydrogenation washing system according to claim 1, it is characterized in that, this safety line one end is connected on the pipeline between detergent circulator and washing tower, and one end is connected on the pipeline between Venturi recycle pump and Venturi scrubber in addition.
3. polysilicon cold hydrogenation washing system according to claim 1, is characterized in that, this safety corridor is provided with the guarantee valve of this safety corridor of opening and closing.
4. polysilicon cold hydrogenation washing system according to claim 1, is characterized in that, also comprises the strainer arranged on the pipeline connecting Venturi recycle pump and washing tower.
5. polysilicon cold hydrogenation washing system according to claim 1, is characterized in that, this detergent circulator is double pump structure.
6. polysilicon cold hydrogenation washing system according to claim 1, is characterized in that, is provided with the intermediate condensation liquid bath of the liquid gone out for temporary condenser condenses between this condenser and detergent circulator.
7. polysilicon cold hydrogenation washing system according to claim 3, is characterized in that, also comprise the pressure sensitive device that is arranged on washing tower and be connected with this pressure sensitive device and with the dispersing control system of washing tower superpressure alarm.
8. polysilicon cold hydrogenation washing system according to claim 7, is characterized in that, this dispersing control system monitoring Venturi recycle pump also controls to ensure that guarantee valve opened by valve when Venturi recycle pump quits work.
9. polysilicon cold hydrogenation washing system according to claim 8, is characterized in that, this dispersing control system monitor wash liquid recycle pump also to quit work alarm in detergent circulator.
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CN201310372363.3A CN104418328B (en) | 2013-08-24 | 2013-08-24 | polysilicon cold hydrogenation washing system |
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CN201310372363.3A CN104418328B (en) | 2013-08-24 | 2013-08-24 | polysilicon cold hydrogenation washing system |
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CN104418328B CN104418328B (en) | 2016-09-28 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113019036A (en) * | 2021-03-29 | 2021-06-25 | 中国恩菲工程技术有限公司 | Wet dust removal system for trichlorosilane production |
Citations (4)
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US20040025637A1 (en) * | 2000-11-15 | 2004-02-12 | Jorg Werkmeister | Method for rendering inert dust residue containing silicon metal |
CN102249187A (en) * | 2011-05-20 | 2011-11-23 | 四川亚连科技有限责任公司 | System and process for recovering pure hydrogen and liquid HCl through polysilicon tail gas treatment |
CN102849745A (en) * | 2012-09-24 | 2013-01-02 | 华陆工程科技有限责任公司 | Dust removal process and system for trichlorosilane production |
CN103170200A (en) * | 2011-12-20 | 2013-06-26 | 西安航天远征流体控制股份有限公司 | Cold hydrogenation wet dust collection unit |
-
2013
- 2013-08-24 CN CN201310372363.3A patent/CN104418328B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040025637A1 (en) * | 2000-11-15 | 2004-02-12 | Jorg Werkmeister | Method for rendering inert dust residue containing silicon metal |
CN102249187A (en) * | 2011-05-20 | 2011-11-23 | 四川亚连科技有限责任公司 | System and process for recovering pure hydrogen and liquid HCl through polysilicon tail gas treatment |
CN103170200A (en) * | 2011-12-20 | 2013-06-26 | 西安航天远征流体控制股份有限公司 | Cold hydrogenation wet dust collection unit |
CN102849745A (en) * | 2012-09-24 | 2013-01-02 | 华陆工程科技有限责任公司 | Dust removal process and system for trichlorosilane production |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113019036A (en) * | 2021-03-29 | 2021-06-25 | 中国恩菲工程技术有限公司 | Wet dust removal system for trichlorosilane production |
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Effective date of registration: 20201117 Address after: 015543 southeast of the intersection of jingsan road and Weisi Road, Qingshan Industrial Park, wulatehouqi, Bayannur City, Inner Mongolia Autonomous Region Patentee after: Bayannur concentrated Silicon Industry Co., Ltd Address before: 015543 the Inner Mongolia Autonomous Region Bayannaoer wulatehouqi Qingshan Industrial Park Patentee before: INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |