CN104409313A - Ion mass analysis device - Google Patents
Ion mass analysis device Download PDFInfo
- Publication number
- CN104409313A CN104409313A CN201410806707.1A CN201410806707A CN104409313A CN 104409313 A CN104409313 A CN 104409313A CN 201410806707 A CN201410806707 A CN 201410806707A CN 104409313 A CN104409313 A CN 104409313A
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- magnetic pole
- water
- vacuum cavity
- pole plate
- mass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses an ion mass analysis device which comprises an analysis magnet module, a bunch vacuum module and two electrified coil modules, wherein the analysis magnet module comprises an upper magnetic pole plate and a lower magnetic pole plate; a hollow magnet yoke is fixed between the upper magnetic pole plate and the lower magnetic pole plate; an upper magnetic pole and a lower magnetic pole are fixed on the lower surface of the upper magnetic pole plate and the upper surface of the lower magnetic pole plate inside the hollow magnet yoke, respectively; each electrified coil module comprises three water-cooled assemblies with through holes in middle; the three water-cooled assemblies in each electrified coil module are sequentially superposed with one another; an electrified coil is arranged between every two adjacent water-cooled assemblies; and the two electrified coil modules are arranged on the upper magnetic pole and the lower magnetic pole in a sleeving manner by virtue of the through holes. The ion mass analysis device disclosed by the invention can have high resolution ratio and wide mass number range.
Description
Technical field
The present invention relates to semiconductor device manufacturing control system, particularly a kind of mass of ion analytical equipment.
Background technology
Along with the raising of integrated circuit processing technique, ion implantation device is had higher requirement, the kind of ion implantation element is more, the range of application of ion implantation device is wider, it can be applicable to various material modification, semiconductor device manufacture and high power device as fields such as SiC electronic device manufactures, and require that ion implantation device automaticity is higher, and simple to operation, working stability.
Existing mass of ion analytical equipment can inject the elementary gas such as boron, phosphorus, hydrogen, nitrogen, xenon, but cannot realize the injection of the metallic elements such as nickel, molybdenum, zirconium.
Summary of the invention
Technical problem to be solved by this invention is, not enough for prior art, and provide a kind of mass number scope large, the mass of ion analytical equipment that resolution is high, both can inject the elementary gas such as boron, phosphorus, hydrogen, nitrogen, xenon, and can inject the metallic elements such as nickel, molybdenum, zirconium again.
For solving the problems of the technologies described above, the technical solution adopted in the present invention is: a kind of mass of ion analytical equipment, comprises analyzing magnet module and bunch vacuum module, and described analyzing magnet module comprises magnetic pole plate and lower magnetic pole plate; Hollow yoke is fixed with between upper magnetic pole plate and lower magnetic pole plate; Upper magnetic pole plate lower surface and the lower magnetic pole plate upper surface of described hollow yoke inside are fixed with magnetic pole and lower magnetic pole respectively; Described hollow yoke offers installing hole; Described bunch vacuum module comprises the vacuum cavity of a both ends open; Described vacuum cavity inwall offers water-cooling groove, in described water-cooling groove, water cooling tube is installed; An openend extenal fixation of described vacuum cavity has analyzes light hurdle, and another openend of described vacuum cavity is connected with described yoke by described installing hole; Also comprise two hot-wire coil modules; Described hot-wire coil module comprises the water-cooled assembly that three middle parts offer through hole, and described three water-cooled assemblies superpose successively, and is provided with hot-wire coil between adjacent two water-cooled assemblies; Described two hot-wire coil modules are enclosed within described upper magnetic pole and lower magnetic pole respectively by described through hole.
Described water-cooled assembly comprises cooled plate, offers water-cooling groove in described cooled plate, is provided with water cooling tube in described water-cooling groove.
Described vacuum cavity internal fixtion has the graphite cake with described vacuum cavity form fit, because contacting with the metal inner surface of vacuum cavity the pollution produced when can prevent ion implantation.
Described vacuum cavity is arranged in described installing hole by mounting flange, for convenience detach, convenient for installation and maintenance.
Compared with prior art, the beneficial effect that the present invention has is: compact conformation of the present invention, and dismounting is easy to maintenance; Hot-wire coil module installation water-cooled assembly, cooled plate has been installed in the upper and lower both sides of each coil, can guarantee that coil is by big current situation, hot-wire coil module still has good cooling effect, ensure that mass of ion analytical equipment has higher resolution and larger mass number scope, both can inject the elementary gas such as boron, phosphorus, hydrogen, nitrogen, xenon, and the metallic elements such as nickel, molybdenum, zirconium can be injected again, stable performance, perfect in shape and function.
Accompanying drawing explanation
Fig. 1 is one embodiment of the invention structural representation;
Fig. 2 is magnet bunch analysis chart;
Fig. 3 is one embodiment of the invention analyzing magnet modular structure schematic diagram;
Fig. 4 is one embodiment of the invention hot-wire coil module front view;
Fig. 5 is one embodiment of the invention cooled plate cutaway view;
Fig. 6 is the A-A face cutaway view of Fig. 5;
Fig. 7 is one embodiment of the invention bunch vacuum module front view;
Fig. 8 is one embodiment of the invention bunch vacuum module cutaway view.
Embodiment
As shown in Figure 1, one embodiment of the invention comprises analyzing magnet module 1, two hot-wire coil modules 2, bunch vacuum modules 3.
This mass of ion analytical equipment adopts uniform magnetic field to analyze.Ion is under the effect of Lorentz force, and movement locus produces bending, and the ion of different quality and speed all can have oneself different deflected trajectory, thus reaches the object of sorting ion.The resolution capability of quality analysis apparatus directly has influence on purity, the bunch adjustment capability of ion, also directly has influence on the key parameters such as the efficiency of transmission of bunch.In order to meet Specific Ion implanter process requirements, the resolution capability of this mass of ion analytical equipment is greater than 100, its deflection angle 90 °; Deflection radius 350mm.Fig. 2 is the bunch analysis chart of this quality analysis apparatus magnet.
As shown in Figure 3, analyzing magnet module comprises magnetic pole 13, lower magnetic pole 14, upper magnetic pole plate 11, lower magnetic pole plate 12, hollow yoke 15, hollow yoke 15 is offered installing hole 16, upper magnetic pole 13, lower magnetic pole 14 adopts C shape structure, ion mass resolution is high, desirable magnetic field can be produced between magnetic pole, sorting can be carried out to different kinds of ions element, its deflection angle is 90 °, deflection radius is 350mm, analyzing focus point to exit facet distance is 350mm, pole pitch is 50mm, ion mass resolution > 100, sorting can be carried out to the multiple Specific Ion such as gaseous state and metal ion.
As shown in Figure 7,8, bunch vacuum module 3 comprises the vacuum cavity 31 of a both ends open; Vacuum cavity 31 inwall offers water-cooling groove, water cooling tube 32 is installed in water-cooling groove; The ion entrance end of vacuum cavity is fixed with analyzes light hurdle 33, and another openend of vacuum cavity is connected with yoke 15 by installing hole 16.
As shown in Fig. 4 ~ Fig. 6, hot-wire coil module 2 comprises water-cooled assembly 21, three water-cooled assemblies 21 that three middle parts offer through hole 22 and superposes successively, and is provided with hot-wire coil 24 between adjacent two water-cooled assemblies 21; Two hot-wire coil modules 2 are enclosed within upper magnetic pole 13 and lower magnetic pole 14 respectively by through hole 22.Water-cooled assembly 21 comprises cooled plate, offers water-cooling groove 23 in described cooled plate, is provided with water cooling tube in described water-cooling groove.
Vacuum cavity is fixed in yoke by mounting flange 36, and such vacuum cavity can independently from mass of ion analytical equipment be extracted out, is easy to handling and safeguards.Water cooling tube is embedded in the water-cooling groove of vacuum cavity both sides, improves the cooling effect of vacuum cavity; Analyze light hurdle and be arranged on ion beam porch, and analysis diaphragm board can be changed as required, thus it is controlled to realize ion beam line glancing incidence subtended angle; Vacuum cavity is embedded in high purity graphite plate, can reduce the pollution of overall bunch system.Bunch vacuum module can provide vacuum environment for mass of ion sorting, improves ion implantation quality.
Claims (6)
1. a mass of ion analytical equipment, comprises analyzing magnet module (1) and bunch vacuum module (3), and described analyzing magnet module (1) comprises magnetic pole plate (11) and lower magnetic pole plate (12); Hollow yoke (15) is fixed with between upper magnetic pole plate (11) and lower magnetic pole plate (12); Upper magnetic pole plate (11) lower surface that described hollow yoke (15) is inner and lower magnetic pole plate (12) upper surface are fixed with magnetic pole (13) and lower magnetic pole (14) respectively; Described hollow yoke (15) offers installing hole (16); Described bunch vacuum module (3) comprises the vacuum cavity (31) of a both ends open; Described vacuum cavity (31) inwall offers water-cooling groove, water cooling tube (32) is installed in described water-cooling groove; An openend extenal fixation of described vacuum cavity has analyzes light hurdle (33), and another openend of described vacuum cavity is connected with described yoke (15) by described installing hole (16); It is characterized in that, also comprise two hot-wire coil modules (2); Described hot-wire coil module (2) comprises the water-cooled assembly (21) that three middle parts offer through hole (22), and described three water-cooled assemblies (21) superpose successively, and are provided with hot-wire coil (24) between adjacent two water-cooled assemblies (21); Described two hot-wire coil modules (2) are enclosed within described upper magnetic pole (13) and lower magnetic pole (14) respectively by described through hole (22).
2. mass of ion analytical equipment according to claim 1, is characterized in that, described water-cooled assembly (21) comprises cooled plate, offers water-cooling groove (23), be provided with water cooling tube in described water-cooling groove in described cooled plate.
3. mass of ion analytical equipment according to claim 1 and 2, is characterized in that, described vacuum cavity (31) internal fixtion has the graphite cake (34) with described vacuum cavity (31) form fit.
4. mass of ion analytical equipment according to claim 3, is characterized in that, described vacuum cavity (31) is arranged in described installing hole (16) by mounting flange (36).
5. mass of ion analytical equipment according to claim 4, is characterized in that, described upper magnetic pole (13) and lower magnetic pole (14) are C shape structure.
6. mass of ion analytical equipment according to claim 5, is characterized in that, described vacuum cavity (31) overcoat has cover plate (35).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410806707.1A CN104409313B (en) | 2014-12-22 | 2014-12-22 | A kind of mass of ion analytical equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410806707.1A CN104409313B (en) | 2014-12-22 | 2014-12-22 | A kind of mass of ion analytical equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104409313A true CN104409313A (en) | 2015-03-11 |
| CN104409313B CN104409313B (en) | 2016-08-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201410806707.1A Active CN104409313B (en) | 2014-12-22 | 2014-12-22 | A kind of mass of ion analytical equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN104409313B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111755301A (en) * | 2019-03-27 | 2020-10-09 | 日新离子机器株式会社 | Mass separator |
| CN112837885A (en) * | 2020-12-30 | 2021-05-25 | 四川红华实业有限公司 | Pole shoe wire inclusion in mass spectrometer electromagnet and forming method |
Citations (7)
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|---|---|---|---|---|
| JPH0765784A (en) * | 1993-08-24 | 1995-03-10 | Jeol Ltd | Magnetic field of mass spectrograph |
| US6182831B1 (en) * | 1997-10-07 | 2001-02-06 | University Of Washington | Magnetic separator for linear dispersion and method for producing the same |
| JP2008084679A (en) * | 2006-09-27 | 2008-04-10 | Nissin Ion Equipment Co Ltd | Electromagnet for analysis, control method therefor, and ion implantation apparatus |
| CN101467217A (en) * | 2006-06-13 | 2009-06-24 | 山米奎普公司 | Ion beam apparatus and method for ion implantation |
| CN101692369A (en) * | 2009-07-23 | 2010-04-07 | 胡新平 | Mass analyzing magnet for broadband ion beam and implanter system |
| CN102203914A (en) * | 2008-11-13 | 2011-09-28 | 瓦里安半导体设备公司 | Mass analysis magnet for a ribbon beam |
| CN103377865A (en) * | 2012-04-20 | 2013-10-30 | 北京中科信电子装备有限公司 | Broadband ion beam transmission method and ion implanter |
-
2014
- 2014-12-22 CN CN201410806707.1A patent/CN104409313B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0765784A (en) * | 1993-08-24 | 1995-03-10 | Jeol Ltd | Magnetic field of mass spectrograph |
| US6182831B1 (en) * | 1997-10-07 | 2001-02-06 | University Of Washington | Magnetic separator for linear dispersion and method for producing the same |
| CN101467217A (en) * | 2006-06-13 | 2009-06-24 | 山米奎普公司 | Ion beam apparatus and method for ion implantation |
| JP2008084679A (en) * | 2006-09-27 | 2008-04-10 | Nissin Ion Equipment Co Ltd | Electromagnet for analysis, control method therefor, and ion implantation apparatus |
| CN102203914A (en) * | 2008-11-13 | 2011-09-28 | 瓦里安半导体设备公司 | Mass analysis magnet for a ribbon beam |
| CN101692369A (en) * | 2009-07-23 | 2010-04-07 | 胡新平 | Mass analyzing magnet for broadband ion beam and implanter system |
| CN103377865A (en) * | 2012-04-20 | 2013-10-30 | 北京中科信电子装备有限公司 | Broadband ion beam transmission method and ion implanter |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111755301A (en) * | 2019-03-27 | 2020-10-09 | 日新离子机器株式会社 | Mass separator |
| CN111755301B (en) * | 2019-03-27 | 2023-05-30 | 日新离子机器株式会社 | Mass separator |
| CN112837885A (en) * | 2020-12-30 | 2021-05-25 | 四川红华实业有限公司 | Pole shoe wire inclusion in mass spectrometer electromagnet and forming method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104409313B (en) | 2016-08-17 |
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