CN104409171B - A kind of method preparing transparency conductive electrode based on 3D printing technique - Google Patents

A kind of method preparing transparency conductive electrode based on 3D printing technique Download PDF

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CN104409171B
CN104409171B CN201410237606.7A CN201410237606A CN104409171B CN 104409171 B CN104409171 B CN 104409171B CN 201410237606 A CN201410237606 A CN 201410237606A CN 104409171 B CN104409171 B CN 104409171B
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conductive electrode
transparency conductive
colloidal sol
printhead
method preparing
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CN104409171A (en
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叶芸
郭太良
胡利勤
胡海龙
刘玉会
陈丽雯
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Guangdong Juhua Printing Display Technology Co Ltd
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Fuzhou University
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Abstract

The present invention relates to a kind of method preparing transparency conductive electrode based on 3D printing technique, it is characterized in that, comprise the following steps: 1) a 3D printing equipment is provided, described 3D printing equipment includes that colloidal sol generation chamber, 3D printhead and laser printing head, described colloidal sol generation chamber include that colloidal sol generates cavity and stirring rod;2) modeling, utilizes the model of computer modeling software design transparency conductive electrode, the software instruction of this model is converted into the mechanical order that 3D prints;3) configuration colloidal sol, is added sequentially to inorganic metal compound or organo-metallic compound A and organic solvent B in colloidal sol generation chamber, generates the colloidal sol for preparing transparency conductive electrode;4) 3D printing equipment is utilized to print transparency conductive electrode.The present invention effectively simplifies prior art and prepares the loaded down with trivial details technique of transparency conductive electrode, improves quality product rate and the precision of transparency conductive electrode, reduces cost of manufacture.

Description

A kind of method preparing transparency conductive electrode based on 3D printing technique
Technical field
The present invention relates to the manufacture field of transparency conductive electrode, particularly relate to a kind of method preparing transparency conductive electrode based on 3D printing technique.
Background technology
Transparency conductive electrode is widely used in the fields such as FPD, tiny display, solar cell and photo-detector, is the key component of photoelectric device.At present, conventional transparency conductive electrode includes: In2O3Film and doping system, SnO2Film and doping system, SnO film and doping system thereof and Cd2O4Thin film system etc..
The main method of preparation transparency conductive electrode is physical vacuum method and chemical method.Wherein, physical vacuum method is primarily referred to as magnetron sputtering method, the nesa coating that the method can prepare dense uniform, physical adhesion is good, but instrument and equipment and growing environment are required height.And chemical method is mainly sol-gel process, the advantage of the method is that production equipment is simple, easily realizes the Uniform Doped of multicomponent, but, between conducting film and substrate, physical adhesion difference and high-temperature process make the substrate of transparency conductive electrode be restricted.And for the preparation of patterned transparent conductive electrode, the PROCESS FOR TREATMENT such as loaded down with trivial details etching, development need to be carried out.
Transparency conductive electrode has one-shot forming, processing step is simple, physical adhesion good, precision advantages of higher to use 3D printing technique based on sol method to prepare.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, combine the advantage that 3D prints, it is provided that a kind of method preparing transparency conductive electrode based on 3D printing technique.
Technical program of the present invention lies in:
A kind of method preparing transparency conductive electrode based on 3D printing technique, it is characterised in that comprise the following steps:
1) colloidal sol generation chamber, 3D printhead and laser printing head, described colloidal sol generation chamber include that colloidal sol generates cavity and stirring rod to provide a 3D printing equipment, described 3D printing equipment to include;
2) modeling, utilizes the model of computer modeling software design transparency conductive electrode, the software instruction of this model is converted into the mechanical order that 3D prints, thus controls the motion path data of 3D printhead and laser printing head, and control the time of laser printing head;
3) configuration colloidal sol, is added sequentially to inorganic metal compound or organo-metallic compound A and organic solvent B in colloidal sol generation chamber, and stirs by the stirring rod in chamber, generates the colloidal sol for preparing transparency conductive electrode;
4) 3D printing equipment is utilized to print transparency conductive electrode, colloidal sol is made to be ejected on the substrate of transparency conductive electrode from 3D printhead, the colloidal sol being ejected on substrate is irradiated subsequently so that it is rapid dehydration forms the metal oxide of transparency conductive electrode, thus generates transparency conductive electrode with laser printing head.
Wherein, described inorganic metal compound or organo-metallic compound A are a kind of metallic compounds or are to include the metallic compound for doping;Described inorganic metal compound is specially nitrate, sulfate, chlorate, fluoride salt and other inorganic salts, and described organic salt is specially carboxylate, alkoxide, alkynes salt and other organic salt, and the concentration of described metallic compound is 0.05 mol/L-1 mol/L.
Described organic solvent B can concurrently give birth to hydrolysis with metallic ion coordination in A.
Described 3D printhead and laser printing head are single printhead, wire printhead, planar printhead or array printing head, depending on the motion path of the described printhead shape according to required transparency conductive electrode.Control moving up and down of printhead by software, print the transparency conductive electrode of suitable thickness and shape.
Described transparency conductive electrode is tin ash and doping film, indium sesquioxide and doping film thereof, zinc oxide and doping film thereof, cadmium sulfate and doping film thereof or other metal oxides and doping film thereof, and the mol ratio of described doping film is 1000:1-2:1.
It is an advantage of the current invention that:
The present invention effectively simplifies prior art and prepares the loaded down with trivial details technique of transparency conductive electrode, improves quality product rate and the precision of transparency conductive electrode, reduces cost of manufacture.
Accompanying drawing explanation
Fig. 1 is the schematic diagram using 3D printing technique to prepare transparent conductive electrode.
Fig. 2 is 3D printing equipment schematic diagram.
Detailed description of the invention
For the features described above of the present invention and advantage can be become apparent, special embodiment below, it is described in detail below in conjunction with accompanying drawing.
Hereinafter by specific embodiment, the present invention will be described in further detail.
The present invention relates to a kind of method preparing transparency conductive electrode based on 3D printing technique, comprise the following steps:
1) colloidal sol generation chamber, 3D printhead and laser printing head, described colloidal sol generation chamber include that colloidal sol generates cavity and stirring rod to provide a 3D printing equipment, described 3D printing equipment to include;
2) modeling, utilizes the model of computer modeling software design transparency conductive electrode, the software instruction of this model is converted into the mechanical order that 3D prints, thus controls the motion path data of 3D printhead and laser printing head, and control the time of laser printing head;
3) configuration colloidal sol, is added sequentially to inorganic metal compound or organo-metallic compound A and organic solvent B in colloidal sol generation chamber, and stirs by the stirring rod in chamber, generates the colloidal sol for preparing transparency conductive electrode;
4) 3D printing equipment is utilized to print transparency conductive electrode, colloidal sol is made to be ejected on the substrate of transparency conductive electrode from 3D printhead, the colloidal sol being ejected on substrate is irradiated subsequently so that it is rapid dehydration forms the metal oxide of transparency conductive electrode, thus generates transparency conductive electrode with laser printing head.
Above-mentioned inorganic metal compound or organo-metallic compound A are a kind of metallic compounds or are to include the metallic compound for doping;Described inorganic metal compound is specially nitrate, sulfate, chlorate, fluoride salt and other inorganic salts, and described organic salt is specially carboxylate, alkoxide, alkynes salt and other organic salt, and the concentration of described metallic compound is 0.05 mol/L-1 mol/L.
Above-mentioned organic solvent B can concurrently give birth to hydrolysis with metallic ion coordination in A.
Above-mentioned 3D printhead and laser printing head are single printhead, wire printhead, planar printhead or array printing head, depending on the motion path of the described printhead shape according to required transparency conductive electrode.Control moving up and down of printhead by software, print the transparency conductive electrode of suitable thickness and shape.
Described transparency conductive electrode is tin ash and doping film, indium sesquioxide and doping film thereof, zinc oxide and doping film thereof, cadmium sulfate and doping film thereof or other metal oxides and doping film thereof, and the mol ratio of described doping film is 1000:1-2:1.
Embodiment
Refering to Fig. 1 and Fig. 2.This embodiment is illustrated as a example by preparing the indium oxide transparency conductive electrode of tin dope, i.e. tin indium oxide (ITO) transparency conductive electrode with 3D printing technique.
Described transparent conductive electrode includes 11 glass substrates and 21ITO film.Described 3D printing equipment includes that 31 colloidal sol generation chambers, 323D printhead and 33 laser printing heads, 31 concrete colloidal sol generation chambers include that 31a colloidal sol generates cavity and 31b stirring rod.
The concrete configuration method of the described colloidal sol for generating ito thin film is: inidum chloride, stannic chloride and ethanol are proportionally added into 31a colloidal sol and generate in cavity, then stirred by solution by the 31b stirring rod in colloidal sol chamber, generate colloidal sol.It is characterized in that: the molar concentration of inidum chloride is 0.15mol/L, the concentration of inidum chloride and stannic chloride is than for 9:1.
The present invention is through the following steps that realize:
1) modeling
Utilize the model of computer software design transparent conductive electrode, including the figure of ito thin film, width,
Thickness and length etc., and software parameter is set as controlling the mechanical order of 3D printing equipment, thus thus control 323D printhead and the motion path data of 33 laser printing heads, and control the time of laser printing head.
2) configuration colloidal sol
Inidum chloride, stannic chloride and ethanol are joined 31a colloidal sol and generates in cavity, with in 31a colloidal sol cavity
Solution is stirred by 31b stirring rod, generates colloidal sol.It is characterized in that: the molar concentration of inidum chloride is 0.15mol/L, the concentration of inidum chloride and stannic chloride is than for 9:1.
3) 3D printing equipment is utilized to print transparent conductive electrode
Control colloidal sol to be ejected in from 323D printhead on 11 glass substrates, make specific wavelength and intensity subsequently
Laser shoot out from 33 laser printing hairs, irradiate the colloidal sol on 11 glass substrates so that it is rapid dehydration generate tin dope indium oxide film, i.e. ito thin film.
Described 323D printhead and 33 laser printing heads can be single printhead, wire printhead, planar printhead or array printing head, and the motion path of described printhead is by software control.
The foregoing is only presently preferred embodiments of the present invention, all impartial changes done according to scope of the present invention patent and modification, all should belong to the covering scope of the present invention.

Claims (5)

1. the method preparing transparency conductive electrode based on 3D printing technique, it is characterised in that comprise the following steps:
1) colloidal sol generation chamber, 3D printhead and laser printing head, described colloidal sol generation chamber include that colloidal sol generates cavity and stirring rod to provide a 3D printing equipment, described 3D printing equipment to include;
2) modeling, utilizes the model of computer modeling software design transparency conductive electrode, the software instruction of this model is converted into the mechanical order that 3D prints, thus controls the motion path data of 3D printhead and laser printing head, and control the time of laser printing head;
3) configuration colloidal sol, is added sequentially to inorganic metal compound or organo-metallic compound A and organic solvent B in colloidal sol generation chamber, and stirs by the stirring rod in chamber, generates the colloidal sol for preparing transparency conductive electrode;
4) 3D printing equipment is utilized to print transparency conductive electrode, colloidal sol is made to be ejected on the substrate of transparency conductive electrode from 3D printhead, the colloidal sol being ejected on substrate is irradiated subsequently so that it is rapid dehydration forms the metal oxide of transparency conductive electrode, thus generates transparency conductive electrode with laser printing head.
A kind of a kind of method preparing transparency conductive electrode based on 3D printing technique, it is characterised in that described inorganic metal compound or organo-metallic compound A are metallic compounds or are to include the metallic compound for doping;Described inorganic metal compound includes that nitrate, sulfate, chlorate and fluoride salt, described organo-metallic compound include carboxylate, alkoxide and alkynes salt, and the concentration of described metallic compound is 0.05 mol/L-1mol/L.
A kind of method preparing transparency conductive electrode based on 3D printing technique, it is characterised in that described organic solvent B can concurrently give birth to hydrolysis with metallic ion coordination in A.
A kind of method preparing transparency conductive electrode based on 3D printing technique, it is characterized in that, described 3D printhead and laser printing head are single printhead, wire printhead, planar printhead or array printing head, depending on the motion path of the described printhead shape according to required transparency conductive electrode;
Control moving up and down of printhead by software, print the transparency conductive electrode of suitable thickness and shape.
A kind of method preparing transparency conductive electrode based on 3D printing technique, it is characterized in that, described transparency conductive electrode includes tin ash and doping film, indium sesquioxide and doping film thereof, zinc oxide and doping film thereof and cadmium sulfate and doping film thereof.
CN201410237606.7A 2014-05-31 2014-05-31 A kind of method preparing transparency conductive electrode based on 3D printing technique Active CN104409171B (en)

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CN106024212B (en) * 2016-06-08 2017-12-12 高丽英 A kind of manufacture method of power engineering high temperature-resistant cable using 3D printing technique
CN106784043B (en) * 2016-12-02 2019-01-11 南京理工大学 The method of photoelectric device electrode is quickly prepared under a kind of normal temperature and pressure
CN107473570A (en) * 2017-08-11 2017-12-15 西安工业大学 Colloidal sol prepares device of optical element and preparation method thereof
CN107768458B (en) * 2017-10-30 2019-10-11 河南科技大学 A kind of preparation method of semiconductor devices
CN107768483B (en) * 2017-10-30 2019-10-11 河南科技大学 A kind of preparation method of full printing zinc oxide ultraviolet detector
CN109655084B (en) * 2018-12-10 2020-06-02 上海交通大学 Preparation method of drivable nerve photoelectrode array

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