CN104406702B - A kind of inspection of collimated light beam method - Google Patents
A kind of inspection of collimated light beam method Download PDFInfo
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- CN104406702B CN104406702B CN201410655245.8A CN201410655245A CN104406702B CN 104406702 B CN104406702 B CN 104406702B CN 201410655245 A CN201410655245 A CN 201410655245A CN 104406702 B CN104406702 B CN 104406702B
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Abstract
A kind of inspection of collimated light beam method, this method includes the extraction of pure Moire fringe, the acquisition of one-dimensional stripe information, wavelet transformation, fringe period calculating and beam divergence angle and calculates 5 steps.The present invention has stronger noise inhibiting ability, when in the double helix Moire fringe image that ccd video camera is gathered containing compared with very noisy, remains able to realize that high precision light beam collimation is quantitatively detected.
Description
Technical field
The present invention relates to optical detecting method, especially a kind of inspection of collimated light beam method.
Background technology
Collimated light beam is widely used in optical measurement.Because the collimating error of light beam can be transmitted and run up to measurement error
In, so the degree of collimation of light beam has a strong impact on measurement accuracy.Inspection of collimated light beam is the premise for realizing beam collimation.Light beam
Collimation detection is typically based on Taibo (Talbot) self-imaging and Moire fringe technology.Wherein, based on double helix More's bar
The inspection of collimated light beam method of line is due to having the advantages that accuracy of detection is high, simple and easy to apply and visual phenomenon has obtained more wide
General concern.
Inspection of collimated light beam method based on double helix Moire fringe (fold by first technology 1, Huang Lei, Su Xianyu, double helix
Grizzly bar line detect beam collimation two methods, Acta Optica, 27 (4), 609-615,2007) in, and frequency striped cycle
There is corresponding relation between the angle of divergence of tested light beam, by detecting that the cycle with frequency striped can realize that beam collimation degree is examined
Survey.First technology 1 proposes two kinds of methods for calculating Moire fringe and frequency fringe period, and a kind of is pole successively to different polar diameters
The method that angular direction striped carries out Fourier transformation, another is to utilize more than 3 polar angle position radially stripe information
Spatial phase shift method.The essence of two methods is the average value for obtaining Moire fringe whole audience trend, with a relatively high precision.But
The noise inhibiting ability of two methods is weaker in first technology 1, and its inspection of collimated light beam precision is by Moire fringe noise level
Influence it is larger.
The content of the invention
It is an object of the invention to provide a kind of inspection of collimated light beam method having compared with very noisy rejection ability.When
When in the double helix Moire fringe image of CCD collections containing compared with very noisy, remain able to realize that high precision light beam collimation is detected.
The technical solution of the present invention is as follows：
A kind of inspection of collimated light beam method.The detecting system that methods described is utilized includes：First spiral grating, the second spiral shell
Optically-active grid, film viewing screen, ccd video camera, computer.Tested beam orthogonal illuminates the first spiral grating, the second spiral grating be with
The first spiral grating that spiral screen periods are equal, direction of rotation is opposite, the second spiral grating is located at the Thailand of the first spiral grating
Uncle is from image-forming range position, and film viewing screen presses close to the rear surface of the second spiral grating, and ccd video camera is calculated at the rear of film viewing screen
Machine is connected with ccd video camera.
Methods described comprises the following steps：
1. pure Moire fringe is extracted：
Computer control ccd video camera collection Moire fringe image is simultaneously stored；Computer is opened Moire fringe image
Square computing obtains optical field distribution；Then the frequency spectrum that two-dimensional Fourier transform obtains Moire fringe image is done to optical field distribution；Pass through
Low pass filter carries out LPF to frequency spectrum, filters out fundamental frequency and difference frequency component；Two dimension is made to remaining spectrum component after filtering
Inverse Fourier transform obtains pure Moire fringe.
2. one-dimensional stripe information is obtained：
Select the radius on any one polar angle direction of pure Moire fringe；Extract the pure Moire fringe intensity along the radius
Information, and uniform interpolation is carried out, obtain one-dimensional stripe information f (r).
3. wavelet transformation：
Continuous wavelet transform is carried out to f (r),
Wherein, W (a, b) is wavelet conversion coefficient matrix, ψa,b(r) it is multiple sub- wavelet function, a is scale factor, and b is flat
The factor is moved, " * " represents conjugate operation.
4. fringe period is calculated：
Search the wavelet conversion coefficient of amplitude maximum at the b of position；The small echo of amplitude maximum becomes at one-dimensional striped diverse location
Change coefficient and be expressed as Wr(b)；W is solved using arctan functionr(b) argument, that is, obtained one-dimensional striped blocks phase；It is right
Block phase and carry out phase unwrapping (referring to first technology 2, D.C.Ghiglia and M.D.Pritt, Two-dimensional
phase unwrapping:Theory, Algorithms and Software.Wiley, 1998.) obtain continuously distributed phase
Position information φ (r)；Then, fringe period is：
5. beam divergence angle is calculated：
Determined during actually detected by the method for experiment the Taibo of the first spiral grating where the second spiral grating away from
Off normal and put corresponding Taibo from imaging level m.
Beam divergence angle is calculated according to following equation：
Realize that beam collimation is quantitatively detected.
Compared with first technology, the present invention has advantages below：
Inspection of collimated light beam method of the present invention, when CCD gather double helix Moire fringe image in contain compared with very noisy
When, remain able to realize that high precision light beam collimation is quantitatively detected.
Brief description of the drawings
Fig. 1 is the detecting system structural representation that the inventive method is used；
Fig. 2 is the Noise double helix Moire fringe schematic diagram that ccd video camera is collected；
Fig. 3 is the flow chart of the inventive method.
Embodiment
With reference to embodiment and accompanying drawing, the invention will be further described, but should not limit the present invention's with this embodiment
Protection domain.
First referring to Fig. 1, Fig. 1 is inspection of collimated light beam system structure diagram of the present invention.The system bag
Include：First spiral grating 1, the second spiral grating 2, film viewing screen 3, ccd video camera 4, computer 5.Tested beam orthogonal illumination the
One spiral grating 1.Second spiral grating 2 is spiral grating equal with the cycle of the first spiral grating 1 and opposite direction of rotation.The
Two spiral gratings 2 are located at the Taibo of the first spiral grating 1 from image-forming range position.Film viewing screen 3 is pressed close to after the second spiral grating 2
Surface, ccd video camera 4 is connected in the rear of film viewing screen 3, computer 5 with ccd video camera 4.
The first spiral of divergent beams vertical illumination grating 1 by 632.8nm of wavelength.Second spiral grating 2 is positioned over
M=1 grades of Taibos of one spiral grating 1 are from image-forming range position.
The method flow of inspection of collimated light beam is carried out as shown in figure 3, comprising the following steps using said system：
1. pure Moire fringe is extracted：
The control ccd video camera 4 collection Moire fringe image of computer 5 is simultaneously stored.Fig. 2 show ccd video camera 3 and collected
Double helix Moire fringe, contain compared with very noisy in bar graph.Computer 5 enters the Moire fringe image that ccd video camera 4 is gathered
Row extracting operation obtains optical field distribution, and two-dimensional Fourier transform is then done to optical field distribution and obtains its frequency spectrum, passes through LPF
Device carries out LPF to frequency spectrum, filters out fundamental frequency and difference frequency component.It is inverse that computer makees two dimension to remaining spectrum component after filtering
Fourier transformation obtains pure Moire fringe.
2. one-dimensional stripe information is obtained：
Select the radius on pure 0 ° of polar angle direction of Moire fringe.The pure Moire fringe strength information along the radius is extracted,
And uniform interpolation is carried out, obtain one-dimensional stripe information f (r).
3. wavelet transformation：
It is that 180, last item is the equal difference that 230, tolerance is 0.1 that wavelet transform dimension factor a span, which is set, as first term
Ordered series of numbers, the multiple morlet small echos of selection are female wave function, and continuous wavelet transform is carried out to f (r),
Wherein, W (a, b) is wavelet conversion coefficient, ψa,b(r) it is the small marble wavelet functions of multiple morlet, b is shift factor,
" * " represents conjugate operation.
4. fringe period is calculated：
Search the wavelet conversion coefficient of amplitude maximum at the b of position；The small echo of amplitude maximum becomes at one-dimensional striped diverse location
Change coefficient and be expressed as Wr(b)；W is solved using arctan functionr(b) argument, that is, obtained one-dimensional striped blocks phase；It is right
Block phase and carry out phase unwrapping (referring to first technology 2, D.C.Ghiglia and M.D.Pritt, Two-dimensional
phase unwrapping:Theory, Algorithms and Software.Wiley, 1998.) obtain continuously distributed phase
Position information φ (r).According to following equation
Calculating obtains fringe period for -2.0977 millimeters, and wherein "-" number represents that the direction of rotation of spiral Moire fringe is suitable
Hour hands.Contrast its theoretical value (- 2.1 millimeters) to know, this method is 0.1% to the detection error of fringe period.
5. beam divergence angle is calculated：
According to following beam divergence angle calculation formula,
Beam divergence angle is calculated for Θ=1.5 × 10-4Radian, realizes that beam collimation is quantitatively detected.
Claims (1)
1. a kind of inspection of collimated light beam method, the detecting system that methods described is utilized includes：First spiral grating (1), second
Spiral grating (2), film viewing screen (3), ccd video camera (4), computer (5)；Tested beam orthogonal illuminates the first spiral grating (1),
Second spiral grating (2) is and the first spiral grating that spiral grating (1) cycle is equal, direction of rotation is opposite, the second spiral light
Grid (2) are located at the Taibo of the first spiral grating (1) from image-forming range position, and film viewing screen (3) is pressed close to after the second spiral grating (2)
Surface, ccd video camera (4) is connected in the rear of film viewing screen (3), computer (5) with ccd video camera (4), it is characterised in that described
Method comprises the following steps：
1. pure Moire fringe is extracted：
Computer (5) control ccd video camera (4) collection Moire fringe image is simultaneously stored；Computer carries out Moire fringe image
Extracting operation obtains optical field distribution；Then the frequency spectrum that two-dimensional Fourier transform obtains Moire fringe image is done to optical field distribution；It is logical
Cross low pass filter and LPF is carried out to frequency spectrum, filter out fundamental frequency and difference frequency component；Two are made to remaining spectrum component after filtering
Dimension inverse Fourier transform obtains pure Moire fringe；
2. one-dimensional stripe information is obtained：
Select the radius on any one polar angle direction of pure Moire fringe；Extract and believe along the pure Moire fringe intensity of the radius
Breath, and uniform interpolation is carried out, obtain one-dimensional stripe information f (r)；
3. wavelet transformation：
Continuous wavelet transform is carried out to f (r),
<mrow>
<mi>W</mi>
<mrow>
<mo>(</mo>
<mi>a</mi>
<mo>,</mo>
<mi>b</mi>
<mo>)</mo>
</mrow>
<mo>=</mo>
<msubsup>
<mo>&Integral;</mo>
<mrow>
<mo>-</mo>
<mo>&infin;</mo>
</mrow>
<mo>&infin;</mo>
</msubsup>
<mi>f</mi>
<mrow>
<mo>(</mo>
<mi>r</mi>
<mo>)</mo>
</mrow>
<msubsup>
<mi>&psi;</mi>
<mrow>
<mi>a</mi>
<mo>,</mo>
<mi>b</mi>
</mrow>
<mo>*</mo>
</msubsup>
<mrow>
<mo>(</mo>
<mi>r</mi>
<mo>)</mo>
</mrow>
<mi>dr</mi>
<mo>,</mo>
</mrow>
Wherein, W (a, b) is wavelet conversion coefficient matrix, ψa,b(r) be multiple sub- wavelet function, a is scale factor, b for translation because
Son, " * " represents conjugate operation；
4. fringe period is calculated：
Search the wavelet conversion coefficient of amplitude maximum at the b of position；The wavelet transformation system of amplitude maximum at one-dimensional striped diverse location
Number is expressed as Wr(b)；W is solved using arctan functionr(b) argument, that is, obtained one-dimensional striped blocks phase；To blocking
Phase carries out phase unwrapping and obtains continuously distributed phase information φ (r)；Then, fringe period is：
<mrow>
<mi>p</mi>
<mo>=</mo>
<mn>2</mn>
<mi>&pi;</mi>
<mrow>
<mo>(</mo>
<mfrac>
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<mo>&PartialD;</mo>
<mi>&phi;</mi>
<mrow>
<mo>(</mo>
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<mo>&PartialD;</mo>
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</mfrac>
<mo>)</mo>
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5. beam divergence angle is calculated：
The talbot distance position of first spiral grating where determining the second spiral grating by the method for experiment during actually detected
Corresponding Taibo is put from imaging level m；
Beam divergence angle is calculated according to following equation：
<mrow>
<mi>&Theta;</mi>
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<mi>&lambda;</mi>
<mrow>
<mn>2</mn>
<mi>mp</mi>
</mrow>
</mfrac>
<mo>,</mo>
</mrow>
Realize that beam collimation is quantitatively detected.
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| CN201410655245.8A CN104406702B (en) | 2014-11-18 | 2014-11-18 | A kind of inspection of collimated light beam method |
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| CN201410655245.8A CN104406702B (en) | 2014-11-18 | 2014-11-18 | A kind of inspection of collimated light beam method |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105606039B (en) * | 2015-12-22 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of method and device of precise measuring source collimation |
| CN113409417B (en) * | 2021-07-15 | 2023-05-30 | 南京信息工程大学 | Moire fringe information extraction method based on wavelet transformation |
| CN114708316B (en) * | 2022-04-07 | 2023-05-05 | 四川大学 | Structured light three-dimensional reconstruction method and device based on circular stripes and electronic equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063413A (en) * | 2012-12-24 | 2013-04-24 | 南京理工大学 | Integrated long-focus measuring device based on Talbot-moire technology |
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2014
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063413A (en) * | 2012-12-24 | 2013-04-24 | 南京理工大学 | Integrated long-focus measuring device based on Talbot-moire technology |
Non-Patent Citations (5)
| Title |
|---|
| Collimation method that uses spiral gratings and Talbot interferometry;Chon-Wen et al.;《Optics Letters》;19911115;第16卷(第22期);第1783-1784页 * |
| Collimation Method Using Fourier Imaging and Moire Techniques;S.Yokozeki et al.;《Optics Communications》;19750831;第14卷(第4期);第401-405页 * |
| Research of Image Compression Based on Optical Wavelet Transform;Wang Tao et al.;《2006 9th international Conference on Control》;20061231;1-5页 * |
| 双螺旋叠栅条纹检测光束准直性的两种方法;黄磊等;《光学学报》;20070430;第27卷(第4期);第2部分-第5部分，附图1 * |
| 基于小波变换和双螺旋莫尔条纹的光束准直性检测方法;李思坤等;《第十五届全国光学测试学术交流会论文摘要集》;20141026;第2段 * |
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