CN104399648B - A kind of flexible scraper coating method for solwution method film preparation - Google Patents

A kind of flexible scraper coating method for solwution method film preparation Download PDF

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Publication number
CN104399648B
CN104399648B CN201410634863.4A CN201410634863A CN104399648B CN 104399648 B CN104399648 B CN 104399648B CN 201410634863 A CN201410634863 A CN 201410634863A CN 104399648 B CN104399648 B CN 104399648B
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CN
China
Prior art keywords
scraper
flexible scraper
flexible
sample
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201410634863.4A
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Chinese (zh)
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CN104399648A (en
Inventor
武倩
冯林润
赵浩乾
赵家庆
边惠
郭小军
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Hangzhou Lingzhi Technology Co ltd
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NANJING HUAYIN SEMICONDUCTOR Co Ltd
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Priority to CN201410634863.4A priority Critical patent/CN104399648B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/06Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length by rubbing contact, e.g. by brushes, by pads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/04Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
    • B05C11/048Scrapers, i.e. metering blades having their edge oriented in the upstream direction in order to provide a reverse angle of attack

Landscapes

  • Thin Film Transistor (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Electroluminescent Light Sources (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

A kind of flexible scraper coating method for film preparation, using flexible scraper (13), scraper fixing device (14) and displacement platform (15);The sample to be coated is located on displacement platform (15) plane;The scraper fixing device (14) is located between flexible scraper (13) and displacement platform (15) does not allow it to come off with fixing flexible scraper (13);Institute's translation stage (15) connection flexible scraper (13) and ensure scraper horizontal direction it is parallel with sample plane, by the flexible scraper (13) by self gravitation on sample with sample surfaces gentle touchdown;By preparing one layer of barrier layer, by the surface on barrier layer and flexible scraper contact so as to go to control the thickness of required film using the thickness on barrier layer;Barrier layer is dispensed when preparing ultrathin film material.

Description

A kind of flexible scraper coating method for solwution method film preparation
Technical field
The present invention is a kind of flexible scraper coating process for solwution method film preparation, belongs to printed electronics neck A kind of domain, and in particular to novel low-cost film coated technique.
Background technology
Printed electronic by its low cost, it is flexible and can large area the advantage such as prepare and have been achieved for extensive concern, Showing that the fields such as backboard, health care achieve practical application in sensing unit, radiofrequency markers identification label, Electronic Paper.Have Machine photoelectric device is the important component of printed electronic, including organic field effect tube (OTFT), organic electroluminescence The various functions device such as part (OLED) and organic photovoltaic devices (OPV).As people are inexpensive and portable for electronic product Ever-increasing requirement, the ecology potential of organic electro-optic device must obtain bigger promotion and attention.
The chief component of organic electro-optic device is thin-film material (such as insulating barrier, semiconductor layer, encapsulated layer and conductive layer Etc.), and at this stage often there is waste of material (such as spin coating), equipment cost height in the solwution method technique for film processed material The shortcomings of (such as slot coated).No matter for industrial point of view or scientific research angle, a kind of energy large area processing, energy are needed badly now Automated production, low cost, low consumption, easy-operating technique produce the film needed for organic electro-optic device.
The content of the invention
The present invention seeks in view of the shortcomings of the prior art, there is provided a kind of new flexible scraper for film preparation Coating process, by dosage (the 1-2 μ L/cm for reducing coating material2) and reduce process complexity to reduce cost.Can be simple By increase the size of flexible scraper realize large area process.This method has more preferable processing compatibility and redundancy Degree, and the processing of different materials can be carried out simply by flexible scraper is changed, there is the versatility having very much and process compatible Property.
The present invention is achieved by the following technical solutions:A kind of flexible scraper coating method for film preparation, bag Include using following equipment:Flexible scraper (13), scraper fixing device (14), displacement platform (15);The sample to be coated is located at position Move on platform (15) plane;The scraper fixing device (14) is located between flexible scraper (13) and displacement platform (15) with solid Determining flexible scraper (13) does not allow it to come off;Institute's translation stage (15) connection flexible scraper (13) and ensure scraper horizontal direction with Sample plane is parallel, by the flexible scraper (13) by self gravitation on sample with sample surfaces gentle touchdown.
By preparing one layer of barrier layer, by the surface on barrier layer and flexible scraper contact so that the thickness using barrier layer Remove the thickness of film needed for controlling.Barrier layer is dispensed when preparing ultrathin film material.
The barrier layer is to have certain thickness any materials insoluble in solution used in following process.It is suitable by selecting Flexible scraper, control the size of flexible scraper, realize the large area processing of organic electro-optic device (sample) film;Change flexible The material of scraper, operation is coated to it to adapt to a variety of materials.
Flexible scraper is put down gently in sample surfaces, ensures flexible scraper surface with sample by scraper Action of Gravity Field gentle touchdown.
By selecting the parameter of suitable displacement platform, solvent volatilization and the life of film are controlled by the movement of scraper It is long.Institute's translation stage translational speed is controllable, moving direction is controllable.
The film of the organic electro-optic device includes:Insulating barrier, organic semiconductor layer, encapsulated layer and conductive layer etc. are various thin Membrane material.
The scraper fixing device is any sticky stuff that can be fixed on flexible scraper on displacement platform or had The fixation bayonet socket design of said function.
Methods described includes:Institute's translation stage (15) connects flexible scraper (13) and ensures that its horizontal direction is put down with sample OK;In displacement platform upper blade fixing device by the fixation of the flexible scraper one end made, ensure that flexible scraper will not fall off;
Appropriate solution is dripped in the line that sample contacts with flexible scraper, is scraped using the control device movement flexibility of displacement platform Knife, adjust direction and speed;
With the movement of scraper and the continuous volatilization of solvent, it can be formed and the thin of thickness is determined by barrier layer and solution solid content Membrane material.
Beneficial effects of the present invention:The flexible scraper coating process of the film preparation of offer, there is advantages below:
1. a technique can use minimal amount of material (1-2 μ L/cm2) to complete the making to film, material is effectively reduced Cost.
2. can realize that large area is processed by increasing the size of flexible scraper in a technique, can be scraped by changing flexibility Knife carries out the processing of different materials, effectively reduces equipment cost and consumables cost.
3. in this technique process, using flexible light weight scraper, make flexible scraper and sample using itself Action of Gravity Field Product surface gentle touchdown and be unlikely to destroy surface, suitable for the device film preparation of various structures, there is good universality.
4. a technological operation is simple, cost of labor can be effectively reduced.
Brief description of the drawings
Fig. 1 is that the flexible scraper technique for the film preparation that the present invention is implemented is coated with the schematic diagram of certain thickness material;
Fig. 2 is the schematic diagram of the flexible scraper technique coating ultra-thin materials for the film preparation that the present invention is implemented.
Embodiment
Embodiment of the present invention is described more fully below in conjunction with the accompanying drawings.
The flexible scraper technique of film preparation provided by the invention is coated with schematic diagram such as Fig. 1 institutes of certain thickness material Show, the barrier layer (11) is covered on sample (10), and the film (12) of the organic electro-optic device is covered on sample;Institute State flexible scraper (13) by self gravitation on sample with sample surfaces gentle touchdown;The scraper fixing device (14) is located at With fixing flexible scraper (13) between flexible scraper (13) and displacement platform (15);Institute's translation stage (15) connects flexible scraper (13) and ensure that its horizontal direction is parallel with sample 10.By the volatilization of the mobile control solvent of scraper, so as to generate needs Thin-film material, film thickness are together decided on by the thickness on barrier layer and the solid content of solution.It is thin with organic polymer insulating materials Exemplified by film coating, benzene class organic solvent can be generally used, scraper speed can use 1cm/s.
The schematic diagram of the flexible scraper technique coating ultra-thin materials of film preparation provided by the invention is as shown in Fig. 2 when painting When cloth ultra-thin materials (such as semiconductor layer, interface-modifying layer), can simply dispense barrier layer (11), remaining keep with it is upper State unanimously, due in the absence of barrier layer, contact printing can be completed so as to realize the coating of ultra-thin materials.With organic molecule half Exemplified by the coating of conductor material film, benzene class organic solvent can be generally used, scraper translational speed can use 5mm/s.

Claims (5)

  1. A kind of 1. flexible scraper coating method for film preparation, it is characterized in that using following equipment:Flexible scraper (13), scrape Knife fixing device (14), displacement platform (15);Sample to be coated is located on displacement platform (15) plane;The scraper fixing device (14) it is not allowed to come off with fixing flexible scraper (13) between flexible scraper (13) and displacement platform (15);The displacement is put down Platform (15) connects flexible scraper (13) and ensures that scraper horizontal direction is parallel with sample plane, by the flexible scraper (13) by certainly Body gravity on sample with sample surfaces gentle touchdown;Prepare one layer of barrier layer, surface and flexible scraper by barrier layer Contact using the thickness on barrier layer so as to go to control the thickness of required film;The barrier layer is insoluble in molten used in following process Liquid has certain thickness any materials;For scraper using gravity sag in sample surfaces to be coated, scraper is the wide triangle in bottom Or trapezoidal shape;The surfacing of coated thin film in order to ensure, flexible scraper cutting edge are linear pattern or saw-toothed shape; Sample surfaces put down flexible scraper gently, ensure flexible scraper surface with sample by scraper Action of Gravity Field gentle touchdown;By selecting to close The parameter of suitable displacement platform, solvent volatilization and the growth of film are controlled by the movement of scraper;Institute's translation stage movement Speed is controllable, moving direction is controllable;Wherein the translational speed scope of scraper is 1 mm/s to 10cm/s.
  2. 2. the flexible scraper coating method according to claim 1 for film preparation, it is characterized in that ultra-thin thin when preparing Barrier layer is dispensed during membrane material.
  3. 3. the flexible scraper coating method according to claim 1 for film preparation, it is characterized in that sample to be coated is to have Machine photoelectric device, the film of the organic electro-optic device include following one kind:Insulating barrier, organic semiconductor layer, encapsulated layer and lead Electric layer.
  4. 4. the flexible scraper coating method according to claim 1 for film preparation, it is characterized in that the scraper is fixed Device is any sticky stuff that can be fixed on flexible scraper on displacement platform or the fixation bayonet socket for having said function.
  5. 5. the flexible scraper coating method according to claim 1 for film preparation, it is characterized in that institute's translation stage (15) connect flexible scraper (13) and ensure that its horizontal direction is parallel with sample;It will be made in displacement platform upper blade fixing device The fixation of good flexible scraper one end, ensures that flexible scraper will not fall off;Dripped in the line that sample contacts with flexible scraper appropriate Solution, flexible scraper is moved using the control device of displacement platform, adjusts direction and speed;Movement and solvent with scraper Continuous volatilization, the thin-film material that thickness is determined by barrier layer and solution solid content can be formed.
CN201410634863.4A 2014-11-12 2014-11-12 A kind of flexible scraper coating method for solwution method film preparation Withdrawn - After Issue CN104399648B (en)

Priority Applications (1)

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CN201410634863.4A CN104399648B (en) 2014-11-12 2014-11-12 A kind of flexible scraper coating method for solwution method film preparation

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Application Number Priority Date Filing Date Title
CN201410634863.4A CN104399648B (en) 2014-11-12 2014-11-12 A kind of flexible scraper coating method for solwution method film preparation

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CN104399648B true CN104399648B (en) 2017-11-24

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110069158A (en) * 2019-03-06 2019-07-30 苏州蓝沛光电科技有限公司 The knife coating procedure of slurry
CN113070169B (en) * 2021-04-19 2022-08-05 深圳市弘德胜自动化设备有限公司 Electronic paper coating equipment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074568B2 (en) * 1988-06-07 1995-01-25 富士写真フイルム株式会社 Application method
DE3837828A1 (en) * 1988-11-08 1990-05-10 Nokia Unterhaltungselektronik METHOD AND DEVICE FOR COATING A SUBSTRATE PLATE FOR A FLAT DISPLAY SCREEN
JP3084339B2 (en) * 1993-05-31 2000-09-04 東京エレクトロン株式会社 Coating method and apparatus
JP3813954B2 (en) * 2003-09-29 2006-08-23 株式会社ヒビ Coating film forming device
JP2009165932A (en) * 2008-01-15 2009-07-30 Seiko Epson Corp Method and apparatus for applying adhesive, and method and apparatus for transferring adhesive
CN201239704Y (en) * 2008-07-23 2009-05-20 比亚迪股份有限公司 Coating apparatus
CN103611658B (en) * 2013-11-20 2015-11-18 广州中国科学院先进技术研究所 A kind of thickness device for precision regulating of flat membrane casting equipment

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Address after: 430000 China (Hubei) free trade zone, Wuhan area, Zuo Ling Town, Zuo Ling Road, No. 117, Op. Electronic Industrial Park, phase 1 workshop No. two, No. 207.

Patentee after: Wuhan Xinqu Chuangrou Optoelectronics Technology Co.,Ltd.

Address before: 210046 Jiangsu Nanjing economic and Technological Development Zone Xingke Road 12 purple gold Xingang (Nancy) ke Chuang base 101-3 room.

Patentee before: NANJING HUAYIN SEMICONDUCTOR Co.,Ltd.

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Patentee after: Wuhan Lingzhi Technology Co.,Ltd.

Address before: No. 117 Zuoling Road, Zuoling Town, Wuhan Zone, China (Hubei) Free Trade Zone

Patentee before: Wuhan Xinqu Chuangrou Optoelectronics Technology Co.,Ltd.

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Address after: Room 819-821, 8 / F, building 1, Haizhi center, Cangqian street, Yuhang District, Hangzhou City, Zhejiang Province

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