CN104393199B - A kind of mask plate and use the display device method for packing of this mask plate - Google Patents

A kind of mask plate and use the display device method for packing of this mask plate Download PDF

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Publication number
CN104393199B
CN104393199B CN201410655092.7A CN201410655092A CN104393199B CN 104393199 B CN104393199 B CN 104393199B CN 201410655092 A CN201410655092 A CN 201410655092A CN 104393199 B CN104393199 B CN 104393199B
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China
Prior art keywords
laser head
region
open area
display device
mask plate
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CN201410655092.7A
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CN104393199A (en
Inventor
吴海东
马群
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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Publication of CN104393199A publication Critical patent/CN104393199A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/88Dummy elements, i.e. elements having non-functional features
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/302Details of OLEDs of OLED structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present invention provides a kind of mask plate and uses the display device method for packing of this mask plate, described mask plate includes lightproof area, open area and dark slide, the different predetermined section regions that this dark slide can be arranged on described open area, and shelter from described predetermined section region.In the present invention, when using laser head to irradiate fluid sealant, control laser head to be in during acceleration or deceleration in the predetermined section region being blocked the open area that plate shelters from, ensure as far as possible to be at the uniform velocity mobile status when laser head irradiates fluid sealant, the glass cement making each region is irradiated to identical laser energy, the problem different to solve sealing glue solidifying degree, improves the packaging effect of display device.

Description

A kind of mask plate and use the display device method for packing of this mask plate
Technical field
The present invention relates to encapsulation technology field, particularly relate to a kind of mask plate and use the display device of this mask plate to encapsulate Method.
Background technology
In preparing Organic Light Emitting Diode (OLED) device process, encapsulation is a critically important processing step, encapsulation Quality directly affects service life of OLED.Because the organic material used during preparation OLED, it is all Material highstrung for water oxygen, i.e. can lose its original characteristic with water oxygen after once contacting, so that OLED Lost efficacy.
At present, in small-medium size OLED, optimal method for packing is glass cement (Frit) package method, this encapsulation The characteristic that method intercepts for water oxygen is the best.But, the technological requirement of glass cement package method is higher, and the shortcoming of any technique is all May result in the failure of encapsulation.
At present glass cement package method all can use laser (laser) mask plate, the structural representation of laser-mask version As it is shown in figure 1, described mask plate includes lightproof area 101 and open area 102.
Use laser-mask version that the method for packing of OLED is included: the packaging area in OLED coats glass cement Afterwards, the open area 102 using laser-mask version is needed glass cement to be irradiated, with curing glass glue.Optimal encapsulation Technological parameter is that laser head at the uniform velocity moves around the open area 102 of mask plate so that the glass cement in each region is irradiated to identical Laser energy.But, owing to laser head translational speed has a stage accelerated and slow down (as in figure 2 it is shown, in Fig. 2 Stain represents the irradiation position of laser), thus cause and (slow down in the starting position (accelerating region) that laser head irradiates and end position District) the overlapping irradiated region of place's generation, the glass cement of overlapping irradiated region is different from the laser energy that the glass cement in other region accepts, and makes Obtain glass cement state of cure different.This situation can cause the generation of stress and micro-crack, thus reduces glass cement for water oxygen Barrier properties so that packaging effect be deteriorated.
Summary of the invention
In view of this, the present invention provides a kind of mask plate and uses the display device method for packing of this mask plate, to solve The problem that when using existing laser-mask version to solidify glass cement, the glass cement state of cure in each region is different.
For solving above-mentioned technical problem, the present invention provides a kind of mask plate, including: described mask plate include lightproof area and Open area, also includes: a dark slide, it is possible to the different predetermined section regions being arranged on described open area, and blocks residence State predetermined section region.
Preferably, described open area is annular.
Preferably, described lightproof area includes the first shading graph surrounded by described open area and surrounds described opening Second shading graph in region.
Preferably, described dark slide includes shading body and is fixed on the slide block of described shading body bottom portion, described cunning Block is arranged in described open area, it is possible to slide along described open area.
Preferably, described mask plate is laser-mask plate.
The present invention also provides for a kind of display device method for packing, including:
There is provided a display device, described display device to include a packaging area, described packaging area is coated with fluid sealant;
One above-mentioned mask plate is provided;
Thering is provided a laser head, described laser head produces one for irradiating the laser beam of described fluid sealant;
Control described laser head to detour along described open area according to predetermined direction of circling, accelerate at described laser head or subtract During speed, described laser head is in the predetermined section region of the described open area sheltered from by described dark slide.
Preferably, described predetermined section region includes that end region is irradiated in an irradiation initiation region and, and described irradiation initiates Region is adjacent with described irradiation end region, and on the predetermined direction of circling detoured along described open area, described irradiation terminates After region is in described irradiation initiation region;
The described laser head of described control detours along described open area according to predetermined direction of circling, accelerates at described laser head Or in moderating process, described laser head is in the step in the predetermined section region of the described open area sheltered from by described dark slide Suddenly specifically include:
Control described dark slide and shelter from described irradiation initiation region;
Control described laser head by the predetermined starting point of described irradiation initiation region according to described predetermined direction of circling edge Described open area is accelerated mobile, until after described laser head reaches predetermined speed, controlling described laser head and at the uniform velocity move;Its In, before described laser head reaches described predetermined speed, it is in described irradiation initiation region;
After described laser head removes described irradiation end region, control described dark slide and shelter from described irradiation end zone Territory;
When described laser head is moved again to described irradiation end region, controls described laser head and slow down, until described Before laser head stops moving, it is in described irradiation end region.
Preferably, described irradiation initiation region and described irradiation end region length on described predetermined direction of circling with The length of described dark slide is identical.
Preferably, when described laser head accelerates to be moved to described predetermined speed, described laser head is in described irradiation and rises The centre position in beginning region.
Preferably, described laser head slows down mobile to when stopping, and described laser head is in described irradiation end region Between position.
Preferably, described display device is organic light emitting diodde desplay device, and described fluid sealant is glass cement, or, Described display device is liquid crystal display device, and described fluid sealant is sealed plastic box.
Having the beneficial effect that of the technique scheme of the present invention:
In the present invention, use laser head irradiate fluid sealant time, control laser head be in during acceleration or deceleration by In the predetermined section region of the open area that dark slide shelters from, ensure that laser head is in when irradiating fluid sealant as far as possible and at the uniform velocity move State so that the glass cement in each region is irradiated to identical laser energy, the problem different to solve sealing glue solidifying degree, Improve the packaging effect of display device.
Accompanying drawing explanation
Fig. 1 is the structural representation of laser-mask version of the prior art.
Fig. 2 is to use the existing laser-mask version method for packing schematic diagram to Organic Light Emitting Diode.
Fig. 3 is the structural representation of the mask plate of the embodiment of the present invention.
Fig. 4 is the cross-sectional view of the mask plate of the embodiment of the present invention.
Fig. 5-1 to 5-4 is the mask plate using the embodiment of the present invention schematic flow sheet to the method for packing of display device.
Fig. 6 is the structural representation of the display device of the method for packing encapsulation using the embodiment of the present invention.
Detailed description of the invention
For making the technical problem to be solved in the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and tool Body embodiment is described in detail.
The embodiment of the present invention provides a kind of mask plate, refer to Fig. 3, and described mask plate includes lightproof area 101, open region Territory 102 and a dark slide 103, this dark slide 103 can be arranged at the different predetermined section regions on described open area 102, And shelter from described predetermined section region.
In the present embodiment, described open area 102 is annular, and described open area 102 is transmission region.
Described lightproof area 101 includes the first shading graph surrounded by described open area 102 and surrounds described opening Second shading graph in region 102.
Described dark slide 103 can use the material identical with described lightproof area 101 to make.Described dark slide 103 is permissible With the detachable setting in described open area 102, i.e. when needs use described dark slide 103, described dark slide 103 is arranged at On the predetermined section region of described open area 102, shelter from described predetermined section region, when need not described dark slide 103, can Remove from described open area 102 with described dark slide 103.
Described dark slide 103 can also be slidably secured in described open area 102.Preferably, refer to Fig. 4, Described dark slide 103 can include shading body 1031 and be fixed on the slide block 1032 bottom described shading body 1031, institute State slide block 1032 to be arranged in described open area 102, it is possible to slide along described open area 102.By said structure, permissible Dark slide 103 is slidably secured in described open area 102.
Preferably, described mask plate is laser-mask plate.
The embodiment of the present invention also provides for a kind of display device method for packing, and described method includes:
Step one: provide a display device, described display device to include a packaging area, described packaging area is coated with Fluid sealant;
Step 2: providing a mask plate, described mask plate is the mask plate in above-described embodiment;
Step 3: provide a laser head, described laser head produces one for irradiating the laser beam of described fluid sealant;
Step 4: control described laser head and detour along described open area according to predetermined direction of circling, at described laser head During acceleration or deceleration, described laser head is in the predetermined section region of the described open area sheltered from by described dark slide In.
Described predetermined section region can be acceleration region or the decelerating area of laser head, in the present invention, is using laser head When irradiating fluid sealant, control laser head during acceleration or deceleration, be in the predetermined section being blocked the open area that plate shelters from In region, ensure as far as possible to be at the uniform velocity mobile status when laser head irradiates fluid sealant so that the glass cement in each region irradiates To identical laser energy, the problem different to solve sealing glue solidifying degree, improve the packaging effect of display device.
Preferably, described predetermined section region includes that end region is irradiated in an irradiation initiation region and, and described irradiation initiates Region is adjacent with described irradiation end region, and on the predetermined direction of circling detoured along described open area, described irradiation terminates After region is in described irradiation initiation region;
Above-mentioned steps four can specifically include:
Step S51: refer to Fig. 5-1, controls described dark slide 103 and shelters from described irradiation initiation region 301 (i.e. laser Head acceleration region);
Step S52: refer to Fig. 5-1, controls described laser head by the predetermined starting point of described irradiation initiation region 301 Accelerate mobile along described open area 102 according to predetermined direction of circling (the arrow direction in figure split shed region), until After described laser head reaches predetermined speed, control described laser head and at the uniform velocity move that (refer to Fig. 5-2, in figure, stain represents laser Irradiation position);Wherein, before described laser head reaches described predetermined speed, it is in described irradiation initiation region 301; In the present embodiment, predetermined direction of circling is that counterclockwise in other embodiments of the invention, predetermined direction of circling can also For clockwise.
Step S53: refer to Fig. 5-3, after described laser head removes described irradiation end region 302, controls described screening Tabula rasa 103 shelters from described irradiation end region 302;
Step S54: refer to Fig. 5-4, when described laser head is moved again to described irradiation end region 302, controls Described laser head slows down, until before described laser head stops moving, being in described irradiation end region 302.
The method provided by above-described embodiment, can by dark slide stop laser head accelerate and the decelerating phase swash Light energy so that be positioned at and irradiate initiation region 301 and irradiate the fluid sealant of end region 302, it is also possible to obtain the even of laser head Speed is mobile irradiates so that the fluid sealant in whole open area 102 all can be irradiated to identical laser energy, reaches identical State of cure, eliminates the stress or micro-crack caused due to sealing glue solidifying degree difference in existing packaging technology, improves aobvious Show the packaging effect of device.
Preferably, described irradiation initiation region 301 and described irradiation end region 302 are on described predetermined direction of circling Length is identical with the length of described dark slide 103.
In order to improve stability, it is preferable that when described laser head accelerates to be moved to described predetermined speed, described laser head It is in the centre position of described irradiation initiation region 301, or, as long as being not at described irradiation initiation region 301 near described Irradiate the marginal area of end region 302 side.
Preferably, described laser head slows down mobile to when stopping, and described laser head is in described irradiation end region 302 Centre position, or, as long as being not at the described irradiation end region 301 edge away from side, described irradiation initiation region 301 Region.
Refer to the structural representation of the display device that Fig. 6, Fig. 6 are the method for packing encapsulation using the embodiment of the present invention Figure, wherein, 401 is the viewing area of display device, and 402 is fluid sealant, wherein, the width of fluid sealant and the open region of mask plate The width in territory is consistent.
In above-described embodiment, described display device can be organic light emitting diodde desplay device, and described fluid sealant is glass Glass glue, or, described display device can also be liquid crystal display device, and described fluid sealant is sealed plastic box.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art For, on the premise of without departing from principle of the present invention, it is also possible to make some improvements and modifications, these improvements and modifications are also Should be regarded as protection scope of the present invention.

Claims (11)

1. a mask plate, described mask plate includes lightproof area and open area, it is characterised in that also include: a dark slide, The different predetermined section regions can being arranged on described open area, and shelter from described predetermined section region, described predetermined section district Territory includes that end region is irradiated in an irradiation initiation region and, and described irradiation initiation region is adjacent with described irradiation end region, On the predetermined direction of circling that laser head detours along described open area, described irradiation end region is in described irradiation sintering After territory, during described laser head acceleration or deceleration, described laser head be in by described dark slide shelter from described in open In the predetermined section region of port area.
Mask plate the most according to claim 1, it is characterised in that described open area is annular.
Mask plate the most according to claim 2, it is characterised in that described lightproof area includes being surrounded by described open area The first shading graph and surround described open area the second shading graph.
Mask plate the most according to claim 1, it is characterised in that described dark slide includes shading body and is fixed on institute Stating the slide block of shading body bottom portion, described slide block is arranged in described open area, it is possible to slide along described open area.
Mask plate the most according to claim 1, it is characterised in that described mask plate is laser-mask version.
6. a display device method for packing, it is characterised in that including:
There is provided a display device, described display device to include a packaging area, described packaging area is coated with fluid sealant;
There is provided just like the mask plate described in any one of claim 1-5;
Thering is provided a laser head, described laser head produces one for irradiating the laser beam of described fluid sealant;
Control described laser head to detour along described open area according to predetermined direction of circling, in described laser head acceleration or deceleration mistake Cheng Zhong, described laser head is in the predetermined section region of the described open area sheltered from by described dark slide, described predetermined section Region includes that end region, described irradiation initiation region and described irradiation end region phase are irradiated in an irradiation initiation region and Neighbour, on the predetermined direction of circling detoured along described open area, described irradiation end region is in described irradiation initiation region Afterwards.
Display device method for packing the most according to claim 6, it is characterised in that
The described laser head of described control detours along described open area according to predetermined direction of circling, accelerates at described laser head or subtracts During speed, the step that described laser head is in the predetermined section region of the described open area sheltered from by described dark slide has Body includes:
Control described dark slide and shelter from described irradiation initiation region;
Control described laser head by the predetermined starting point of described irradiation initiation region according to described predetermined direction of circling along described Open area is accelerated mobile, until after described laser head reaches predetermined speed, controlling described laser head and at the uniform velocity move;Wherein, exist Before described laser head reaches described predetermined speed, it is in described irradiation initiation region;
After described laser head removes described irradiation end region, control described dark slide and shelter from described irradiation end region;
When described laser head is moved again to described irradiation end region, controls described laser head and slow down, until described laser Before head stops moving, it is in described irradiation end region.
Display device method for packing the most according to claim 7, it is characterised in that described irradiation initiation region and described photograph Penetrate end region length on described predetermined direction of circling identical with the length of described dark slide.
Display device method for packing the most according to claim 7, it is characterised in that described laser head accelerates to be moved to institute When stating predetermined speed, described laser head is in the centre position of described irradiation initiation region.
Display device method for packing the most according to claim 7, it is characterised in that described laser head slows down mobile to stopping Time only, described laser head is in the centre position of described irradiation end region.
11. according to the display device method for packing described in any one of claim 6-10, it is characterised in that described display device is Organic light emitting diodde desplay device, described fluid sealant is glass cement, or, described display device is liquid crystal display device, institute Stating fluid sealant is sealed plastic box.
CN201410655092.7A 2014-11-17 2014-11-17 A kind of mask plate and use the display device method for packing of this mask plate Active CN104393199B (en)

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CN105206644A (en) * 2015-08-28 2015-12-30 京东方科技集团股份有限公司 Transparent display assembly and display device
CN105172324B (en) * 2015-09-24 2017-11-07 京东方科技集团股份有限公司 A kind of printing process of printing screen plate and sealant
CN109119358B (en) * 2017-06-22 2020-09-11 上海微电子装备(集团)股份有限公司 Laser packaging structure and method
CN108281569B (en) * 2018-02-08 2020-02-14 信利(惠州)智能显示有限公司 Organic light emitting display device and method of fabricating the same
CN109748235B (en) * 2018-12-29 2022-01-07 深迪半导体(绍兴)有限公司 Semiconductor device, manufacturing process of sealed cavity of semiconductor device and pattern transfer plate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101095247A (en) * 2004-10-20 2007-12-26 康宁股份有限公司 Optimization of parameters for sealing organic emitting light diode(oled) displays
CN202453614U (en) * 2012-03-05 2012-09-26 北京京东方光电科技有限公司 Liquid crystal screen light shielding plate in frame sealing adhesive UV (Ultraviolet) curing process
JP2013004454A (en) * 2011-06-21 2013-01-07 Panasonic Corp Manufacturing method of bonded substrate, manufacturing apparatus of bonded substrate, and light-transmission amount adjustment mask

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101135538B1 (en) * 2009-11-16 2012-04-13 삼성모바일디스플레이주식회사 Display device and method for menufacturing display device
KR101729717B1 (en) * 2010-08-31 2017-04-25 삼성디스플레이 주식회사 A mask for sealant hardening and the flat display device manufacturing method using the same
KR101722026B1 (en) * 2010-10-22 2017-04-12 삼성디스플레이 주식회사 A flat display panel, a mother substrate for the flat display panel, and a method for manufacturing the flat display panel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101095247A (en) * 2004-10-20 2007-12-26 康宁股份有限公司 Optimization of parameters for sealing organic emitting light diode(oled) displays
JP2013004454A (en) * 2011-06-21 2013-01-07 Panasonic Corp Manufacturing method of bonded substrate, manufacturing apparatus of bonded substrate, and light-transmission amount adjustment mask
CN202453614U (en) * 2012-03-05 2012-09-26 北京京东方光电科技有限公司 Liquid crystal screen light shielding plate in frame sealing adhesive UV (Ultraviolet) curing process

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