CN104375231B - Simple manufacturing method for optical waveguide - Google Patents
Simple manufacturing method for optical waveguide Download PDFInfo
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- CN104375231B CN104375231B CN201410598388.XA CN201410598388A CN104375231B CN 104375231 B CN104375231 B CN 104375231B CN 201410598388 A CN201410598388 A CN 201410598388A CN 104375231 B CN104375231 B CN 104375231B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0065—Manufacturing aspects; Material aspects
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0013—Means for improving the coupling-in of light from the light source into the light guide
Abstract
The invention discloses a simple manufacturing method for an optical waveguide. The method comprises the steps that a groove is formed in one surface of one substrate in the length direction, then two substrates are stacked in order, the surface, with the groove, of one substrate is made to be opposite to one surface of the other substrate, a pair of flat tongs is used for adjusting the gap between the two substrates, spot welding is carried out on aligned spot welding end faces of the two substrates, then the two substrates welded together are placed into an inner cavity of a quartz glass tube, low-melting-point glass raw materials are poured into the inner cavity of the quartz glass tube, the inner cavity of the quartz glass tube is vacuumized, the quartz glass tube is sealed, stepped heating is carried out on the sealed quartz glass tube, the glass raw materials are molten, the indoor temperature is obtained through stepped cooling, and therefore the optical waveguide is obtained. The simple manufacturing method has the advantages that the technological process is simple and controllable, and operation equipment is low in cost.
Description
Technical field
The present invention relates to a kind of waveguide technology of preparing, more particularly, to a kind of simple method for preparing of fiber waveguide.
Background technology
With the continuous lifting that the information age requires, the development of optics is from traditional discrete optical device development
The integrated optical device stage up till now.Fiber waveguide is the important basic part of various integrated optical devices, and it can be by light
Ripple confinement is transmitted radiationlessly in the medium of optical wavelength magnitude size.
Existing optical waveguide preparation method is complex, and general optical waveguide preparation method is all in method for manufacturing thin film
On the basis of, realized by the technique of series of complex.Existing optical waveguide preparation method mainly has photoetching process, stripping method and swashs
Light direct write method etc., the apparatus expensive that these preparation methoies are used, and there is loaded down with trivial details technical process in etching thin-film process
And the technological parameter of complexity, this just brings very big difficulty to the preparation of fiber waveguide.
The content of the invention
The technical problem to be solved is to provide a kind of simple method for preparing of fiber waveguide, its technical process letter
It is single, controllable, and the equipment cost for using is low.
The present invention solve the technical scheme that adopted of above-mentioned technical problem for：A kind of simple method for preparing of fiber waveguide, its
It is characterised by comprising the following steps：
1. the dystectic substrate of two block size size identicals is chosen, two surfaces of every piece of substrate are optical level
Face, and using the symmetrical two of which side of every piece of substrate as coupling end face, two other symmetrical side as spot welding end face；
2. wherein a groove is opened up along its length on a surface of one piece of substrate；
3. two pieces of substrates are stacked neatly, and makes the reeded surface of tool and the one of another piece of substrate of one of substrate
Individual surface is relative, then clamps two pieces of substrates with flat-nose pliers, then by adjusting the pressure that flat-nose pliers applies to two pieces of substrates, and
The gap observed between two pieces of substrates under super depth-of-field microscope, completes the adjustment to the gap between two pieces of substrates；
4. flat-nose pliers is fixed after the gap between two pieces of substrates is adjusted, the point welding end that then two pieces of substrates align
Face carries out spot welding；Here, not interfering with the effect in the gap that follow-up vitreous humour is immersed between two pieces of substrates using spot welding；
5. the two pieces of substrates for having welded together are removed from flat-nose pliers, then two pieces of substrates to having welded together enter
Row cleaning, is dried after cleaning up, and then welded together two pieces of substrates of drying is put into into quartz glass tube
Inner chamber in, backward quartz glass tube inner chamber in pour into the glass raw material of low melting point, then the inner chamber to quartz glass tube
Evacuation is carried out, finally tube sealing is carried out to quartz glass tube；
6. ladder-elevating temperature heating is carried out to the quartz glass tube of tube sealing, is higher than 80 DEG C of the fusing point of glass raw material in temperature
Constant temperature more than 24 hours after～150 DEG C, afterwards ladder is cooled to room temperature；
7. the fiber waveguide with substrate for having prepared is taken out from quartz glass tube, between two pieces of substrates of fiber waveguide
For glass film layers, the refractive index of the refractive index of substrate less than glass film layers.
Described step 2. in groove be rectangular recess, the longitudinal centre line of described rectangular recess and the surface of substrate
Length direction centerline parallel；Here, on the one hand, the groove for arranging on a surface of one piece of substrate wherein is rectangle
Groove, or other shapes of groove, can make what is finally prepared to meet single mode transport by the groove for arranging different
The structure of the fiber waveguide of condition is different, can thus meet the groove according to raw material designed, designed different size and structure,
So as to prepare the fiber waveguide of different size and structure；On the other hand, the longitudinal centre line and substrate of groove are typically required
The centerline parallel of the length direction on surface, this is because whether both centerline parallels can affect the fiber waveguide for preparing
The shape of end face, and then the coupling effect of the fiber waveguide that can affect to prepare.
Before 3. described step performs, first two pieces of respective two surfaces of substrate and two coupling end faces are polished
Process, to strengthen two coupling efficiencies for coupling end face of fiber waveguide test phase light wave and substrate.
Before 3. described step performs, and two pieces of respective two surfaces of substrate and two coupling end faces are being thrown
After optical processing, two pieces of substrates are cleaned, then two pieces of substrates to cleaning up are dried.
Described step is cleaned before 3. performing to two pieces of substrates, and then two pieces of substrates to cleaning up dry
Dry detailed process is：3. -1, two pieces of substrates are immersed in acetone, and is cleaned with ultrasound wave 15～25 minutes；3. -2, first
After the completion of secondary cleaning, take out from acetone after two pieces of substrates and immerse in methanol, and cleaned with ultrasound wave 3～7 minutes；3. -3, exist
After the completion of second is cleaned, take out from methanol after two pieces of substrates and immerse in isopropanol, and cleaned with ultrasound wave 3～7 minutes；
3. -4, clean up two pieces of substrates are put in baking box, are toasted 15～25 minutes with 110 DEG C～130 DEG C constant temperature；Here,
Two pieces of substrates are carried out with three cleanings, in order to go the removal of impurity to pollute completely, with ensure two pieces of substrates stack it is neat after its
In one piece of substrate the reeded surface of tool and a surface of another piece of substrate be that two superposed surfaces are clean.
Described step 4. in flat-nose pliers adopt manual precision flatnosed pliers；Here, flat using manually adjustable precision
Brank, it is convenient to apply pressure to realize the adjustment to the gap between two pieces of substrates, and Adjustment precision to two pieces of substrates
It is high.
Gap of the described step 4. between two pieces of substrates of middle adjustment is 1.6 μm～2.4 μm；Between actually two pieces substrates
Gap be to be adjusted according to the actual requirement of user oneself, that is, the thickness of the glass film layers in the fiber waveguide for preparing
It is user according to voluntarily needing setting.
Described step 5. in two pieces of substrates having welded together are cleaned, dried after cleaning up
Detailed process is：5. -1, welded together two pieces of substrates are immersed in acetone, and is cleaned with ultrasound wave 15～25 minutes；
5. -2, after the completion of first time cleans, take out from acetone and immersed in methanol after the two pieces of substrates for having welded together, and with surpassing
Sound wave is cleaned 3～7 minutes；5. after the completion of -3, cleaning at second, after the two pieces of substrates for having welded together are taken out from methanol
In immersion isopropanol, and cleaned with ultrasound wave 3～7 minutes；5. -4, clean up welded together two pieces of substrates are put
In entering baking box, toasted 15～25 minutes with 110 DEG C～130 DEG C constant temperature；Here, the spot welding end face aligned due to two pieces of substrates
Substrate can be polluted during spot welding, therefore strict cleaning need to be carried out to the substrate of a postwelding, to ensure each face of substrate
It is clean.
Described step 5. in the amount of glass raw material that pours into in the inner chamber of quartz glass tube be in glass raw material
It is fused into vitreous humour after vitreous humour and can be totally submerged two pieces of substrates and is defined；Described step 5. in inner chamber to quartz glass tube
Carry out being evacuated to 7.0 × 10-2Stop during pa；Can rule of thumb estimate to pour into certain glass raw material during practical operation, one
As somewhat can pour into more, but had better not be excessive, if cross vitreous humour after at most glass raw material fusing can be completely covered
Substrate, can so increase the difficulty for taking out the fiber waveguide for preparing；10 are at least extracted in practical operation-2Below pa, if
Can be lower, more preferably, purpose is intended merely to exclude impact of the air to the performance of the fiber waveguide of preparation.
Described step 6. in ladder-elevating temperature and ladder cooling gradient be more than 50 DEG C and less than 100 DEG C；Actual behaviour
The gradient that ladder-elevating temperature and ladder are lowered the temperature when making is not more than 100 DEG C just can be if gradient is too big, can cause to firing equipment
Bad impact.
Compared with prior art, it is an advantage of the current invention that：
1）The technological process of the inventive method is simple, controllable, and process costs are low, and without the need for expensive equipment, it is suitable to promote.
2）The inventive method is placed the substrate in the vitreous humour of melting, and makes vitreous humour enter two pieces of substrates by long-time
Between gap in, the homogeneity of component in prepared fiber waveguide can be significantly increased, fiber waveguide is ensure that well
Quality, it is to avoid unnecessary optical loss.
3）When preparing fiber waveguide using the inventive method, different thickness can be prepared by adjusting the gap between two pieces of substrates
The fiber waveguide of degree, can prepare the fiber waveguide of different structure by the different glass raw material of selection and substrat structure.
Description of the drawings
Fig. 1 is the structural representation for opening up reeded substrate；
Fig. 2 is the structural representation of the fiber waveguide for preparing；
Fig. 3 is the cross section structure diagram of Fig. 2.
Specific embodiment
The present invention is described in further detail below in conjunction with accompanying drawing embodiment.
A kind of simple method for preparing of fiber waveguide proposed by the present invention, it is comprised the following steps：
1. the dystectic substrate of two block size size identicals is chosen, two surfaces of every piece of substrate are optical level
Face, and using the symmetrical two of which side of every piece of substrate as coupling end face, two other symmetrical side as spot welding end face.
In the present embodiment, substrate adopts piezoid, and it is two pieces of a height of 1mm of a width of 8mm of 30mm that can such as choose two block lengths
Piezoid.
Can be using two sides of length × high as spot welding end face, and using two wide × high sides as coupling during actual treatment
Close end face, it is also possible to using two wide × high sides as spot welding end face, and two sides that will be long × high are used as coupling end face,
Different sides are chosen as coupling end face, the length of the fiber waveguide for preparing is also just different, generally by it is wide ×
Two high sides are used as coupling end face, and the length of fiber waveguide for being prepared obtaining is relatively long.Wide × high two in Fig. 2
Side is coupling end face.
2. as shown in figure 1, opening up a groove along its length on a surface of one piece of substrate wherein, 1 refers in Fig. 1
Groove is referred to for substrate, 11.
In the present embodiment, groove can be rectangular recess, or other shapes of groove；Using rectangular recess
When, in order to be sufficiently accurate it may be desired to the centerline parallel of the length direction on the longitudinal centre line of rectangular recess and the surface of substrate.
3. first respective two surfaces of two pieces of substrates and two coupling end faces are processed by shot blasting, to strengthen fiber waveguide survey
Two coupling efficiencies for coupling end face of examination stage light wave and substrate, as shown in Figure 2；Then two pieces of substrates are cleaned, then
Two pieces of substrates to cleaning up are dried；Then two pieces of substrates of drying are stacked neatly, and makes one of substrate
Has reeded surface（The surface of a width of 8mm of i.e. a length of 30mm）With a surface of the same size of another piece of substrate（It is i.e. a length of
The surface of a width of 8mm of 30mm）Relatively, then with peace and quiet manual precision flatnosed pliers two pieces of substrates is clamped and the super depth of field is put in and shown
Under micro mirror, then the gap observed between two pieces of substrates by super depth-of-field microscope, and manual precision flatnosed pliers is slowly adjusted to two
The pressure that block substrate applies, completes the adjustment to the gap between two pieces of substrates, can be by between two pieces of substrates in actually adjustment
Gap be adjusted to 1.6 μm～2.4 μm and be such as adjusted to 2 μm.
In the present embodiment, step 3. in two pieces of substrates are cleaned, then two pieces of substrates to cleaning up are carried out
The detailed process of drying is：3. -1, two pieces of substrates are immersed in acetone, and cleans with ultrasound wave 15～25 minutes, such as it is actual clearly
20 minutes capable of washing when washing；3. -2, after the completion of first time cleans, take out from acetone after two pieces of substrates and immerse in methanol, and
Cleaned with ultrasound wave 3～7 minutes, 5 minutes capable of washing when such as reality is cleaned；3. after the completion of -3, cleaning at second, from methanol
Take out and immersed in isopropanol after two pieces of substrates, and cleaned with ultrasound wave 3～7 minutes, 5 minutes capable of washing when such as reality is cleaned；③-
4th, clean up two pieces of substrates are put in baking box, are toasted 15～25 minutes with 110 DEG C～130 DEG C constant temperature, such as actual behaviour
Can be toasted 20 minutes with 120 DEG C of constant temperature when making.
4. the fixed manual precision flatnosed pliers after the gap between two pieces of substrates is adjusted, then in acetylene, oxygen flame gun
In the presence of the spot welding end face that two pieces of substrates aligned using glass fiber carry out many places spot welding firmly, as shown in Figure 2.
5. the two pieces of substrates for having welded together are removed from manual precision flatnosed pliers, then to welded together two
Block substrate is cleaned, and is dried after cleaning up, and is then put into welded together two pieces of substrates of drying
In processing the inner chamber of clean quartz glass tube, backward quartz glass tube inner chamber in pour into the glass raw material of low melting point such as
Chalcogenide glass, then the inner chamber of quartz glass tube is carried out being evacuated to 7.0 × 10-2Stop during pa, finally quartz glass tube is entered
Row tube sealing, to ensure that the heating environment in quartz glass tube is anoxybiotic state.
In the present embodiment, step 5. in two pieces of substrates having welded together are cleaned, it is laggard cleaning up
Row drying detailed process be：5. -1, welded together two pieces of substrates are immersed in acetone, and clean 15 with ultrasound wave～
25 minutes, 20 minutes capable of washing when such as reality is cleaned；5. -2, after the completion of first time cleans, take out from acetone and be welded on
Immerse in methanol after two pieces of substrates together, and cleaned with ultrasound wave 3～7 minutes, 5 minutes capable of washing when such as reality is cleaned；⑤-
3rd, after the completion of cleaning second, take out from methanol and immersed in isopropanol after the two pieces of substrates for having welded together, and with surpassing
Sound wave is cleaned 3～7 minutes, 5 minutes capable of washing when such as reality is cleaned；5. -4, by clean up welded together two pieces
Substrate is put in baking box, and with 110 DEG C～130 DEG C constant temperature 15～25 minutes are toasted, such as practical operation when can be dried with 120 DEG C of constant temperature
It is roasting 20 minutes.
In the present embodiment, the amount of the glass raw material for pouring into in the inner chamber of quartz glass tube is molten in glass raw material
Vitreous humour can be totally submerged two pieces of substrates and be defined after chemical conversion vitreous humour.
6. the quartz glass tube of tube sealing is put in heating furnace, ladder-elevating temperature is carried out to the quartz glass tube in heating furnace
Heating, is higher than 80 DEG C～150 DEG C of the fusing point of glass raw material in temperature（Such as 100 DEG C）Constant temperature more than 24 hours afterwards, such as in temperature
For 400 DEG C when constant temperature more than 24 hours, afterwards ladder is cooled to room temperature.Here, maintaining 24 hours when glass raw material is heated
More than, in order to ensure that vitreous humour can be entered sufficiently in the gap between two pieces of substrates, vitreous humour is equably filled out
Gap between full two pieces of substrates；Ladder-elevating temperature and the gradient of ladder cooling are more than 50 DEG C and less than 100 DEG C, generally less than
100 DEG C.
7. the fiber waveguide with substrate for having prepared is taken out from quartz glass tube, can be gently broken into pieces during actual treatment
Quartz glass tube and be attached to the frit of substrate surface, take out the fiber waveguide for preparing, structure such as Fig. 2 of fiber waveguide with
It is glass film layers between two pieces of substrates of fiber waveguide shown in Fig. 3, the refractive index of substrate is less than the refractive index of glass film layers.In Fig. 2
In Fig. 3,1 refers to substrate, and 11 refer to groove, and 2 refer to glass film layers, and 3 refer to the solder joint of spot welding formation.
When fiber waveguide is prepared using the inventive method, it should be noted that the substrate of selection should be dystectic material, selection
Glass raw material should be the glass material of low melting point, and the refractive index of substrate must not be higher than the refractive index of the glass film layers for being formed.
The preparation method of fiber waveguide proposed by the present invention, is not only limited to based on above-mentioned glass raw material and substrate, the system
Preparation Method can equally be well applied to the preparation of planar light waveguide, and what unique difference was that it selects is the structureless lining of two panels identical
Bottom.
Claims (10)
1. a kind of simple method for preparing of fiber waveguide, it is characterised in that comprise the following steps：
1. the dystectic substrate of two block size size identicals is chosen, two surfaces of every piece of substrate are optical level face, and
Using the symmetrical two of which side of every piece of substrate as coupling end face, two other symmetrical side as spot welding end face；
2. wherein a groove is opened up along its length on a surface of one piece of substrate；
3. two pieces of substrates are stacked neatly, and makes the reeded surface of tool of one of substrate and a table of another piece of substrate
Face is relative, then clamps two pieces of substrates with flat-nose pliers, then by adjusting the pressure that flat-nose pliers applies to two pieces of substrates, and super
The gap observed between two pieces of substrates under depth-of-field microscope, completes the adjustment to the gap between two pieces of substrates；
4. flat-nose pliers is fixed after the gap between two pieces of substrates is adjusted, the spot welding end face that then two pieces of substrates align enters
Row spot welding；
5. the two pieces of substrates for having welded together are removed from flat-nose pliers, then two pieces of substrates to having welded together are carried out clearly
Wash, dried after cleaning up, then welded together two pieces of substrates of drying are put in quartz glass tube
In chamber, backward quartz glass tube inner chamber in pour into the glass raw material of low melting point, then the inner chamber of quartz glass tube is carried out
Evacuation, finally carries out tube sealing to quartz glass tube；
6. ladder-elevating temperature heating is carried out to the quartz glass tube of tube sealing, temperature higher than glass raw material 80 DEG C of fusing point～
Constant temperature more than 24 hours after 150 DEG C, afterwards ladder is cooled to room temperature；
7. the fiber waveguide with substrate for having prepared is taken out from quartz glass tube, is glass between two pieces of substrates of fiber waveguide
Glass film layer, the refractive index of substrate is less than the refractive index of glass film layers.
2. the simple method for preparing of a kind of fiber waveguide according to claim 1, it is characterised in that described step 2. in
Groove is rectangular recess, the centerline parallel of the longitudinal centre line of described rectangular recess and the length direction on the surface of substrate.
3. the simple method for preparing of a kind of fiber waveguide according to claim 1 and 2, it is characterised in that 3. described step is held
Before row, first two pieces of respective two surfaces of substrate and two coupling end faces are processed by shot blasting, to strengthen fiber waveguide test
Two coupling efficiencies for coupling end face of stage light wave and substrate.
4. the simple method for preparing of a kind of fiber waveguide according to claim 3, it is characterised in that 3. described step performs
Before, and after being processed by shot blasting to two pieces of respective two surfaces of substrate and two coupling end faces, two pieces of substrates are carried out
Cleaning, then two pieces of substrates to cleaning up are dried.
5. the simple method for preparing of a kind of fiber waveguide according to claim 4, it is characterised in that 3. described step performs
Two pieces of substrates are cleaned before, is then to the detailed process that the two pieces of substrates for cleaning up are dried：3. -1, by two
In block substrate immersion acetone, and cleaned with ultrasound wave 15～25 minutes；3. -2, after the completion of first time cleans, take from acetone
Go out after two pieces of substrates and immerse in methanol, and cleaned with ultrasound wave 3～7 minutes；3. after the completion of -3, cleaning at second, from methanol
Immerse in isopropanol after two pieces of substrates of middle taking-up, and cleaned with ultrasound wave 3～7 minutes；3. -4, by clean up two pieces of substrates
In being put into baking box, toasted 15～25 minutes with 110 DEG C～130 DEG C constant temperature.
6. the simple method for preparing of a kind of fiber waveguide according to claim 5, it is characterised in that described step 3. in
Flat-nose pliers adopts manual precision flatnosed pliers.
7. a kind of simple method for preparing of fiber waveguide according to claim 6, it is characterised in that described step 3. middle tune
Gap between whole two pieces of substrates is 1.6 μm～2.4 μm.
8. the simple method for preparing of a kind of fiber waveguide according to claim 7, it is characterised in that described step 5. in it is right
The two pieces of substrates for having welded together are cleaned, and the detailed process dried after cleaning up is：5. -1, will weld
In two pieces of substrates immersion acetone together, and cleaned with ultrasound wave 15～25 minutes；5. -2, after the completion of first time cleans,
Take out from acetone and immersed in methanol after the two pieces of substrates for having welded together, and cleaned with ultrasound wave 3～7 minutes；5. -3, exist
After the completion of second is cleaned, take out from methanol and immersed in isopropanol after the two pieces of substrates for having welded together, and use ultrasound wave
Cleaning 3～7 minutes；5. -4, clean up welded together two pieces of substrates are put in baking box, with 110 DEG C～130
DEG C constant temperature is toasted 15～25 minutes.
9. the simple method for preparing of a kind of fiber waveguide according to claim 8, it is characterised in that described step 5. in
The amount of the glass raw material poured in the inner chamber of quartz glass tube is that vitreous humour can after glass raw material is fused into vitreous humour
It is totally submerged two pieces of substrates to be defined；Described step 5. in the inner chamber of quartz glass tube is carried out being evacuated to 7.0 × 10-2During pa
Stop.
10. the simple method for preparing of a kind of fiber waveguide according to claim 9, it is characterised in that described step 6. in
Ladder-elevating temperature and the gradient of ladder cooling are more than 50 DEG C and less than 100 DEG C.
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| CN201410598388.XA CN104375231B (en) | 2014-10-30 | 2014-10-30 | Simple manufacturing method for optical waveguide |
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|---|---|---|---|
| CN201410598388.XA CN104375231B (en) | 2014-10-30 | 2014-10-30 | Simple manufacturing method for optical waveguide |
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| CN104375231B true CN104375231B (en) | 2017-05-10 |
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| DE102020211441B3 (en) * | 2020-09-11 | 2022-01-05 | Siemens Healthcare Gmbh | Optical fiber for generating ultrasonic waves |
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Non-Patent Citations (2)
| Title |
|---|
| Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography;Ting Han,Steve Madden,Douglas Bulla and Barry Luther Davies;《OPTICS EXPRESS》;20100830;第18卷(第18期);全文 * |
| 硫系玻璃光波导研究进展;陈煜、沈祥、徐铁峰等;《激光与光电子学进展》;20111013;第48卷;全文 * |
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