CN104362108A - Photoelectric testing device - Google Patents
Photoelectric testing device Download PDFInfo
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- CN104362108A CN104362108A CN201410492234.2A CN201410492234A CN104362108A CN 104362108 A CN104362108 A CN 104362108A CN 201410492234 A CN201410492234 A CN 201410492234A CN 104362108 A CN104362108 A CN 104362108A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
Abstract
An embodiment of the invention provides a photoelectric testing device comprising a support structure, a sample carrier, at least two optical microscopes and at least two photoelectric probes. The optical microscopes connected with the support structure are used for observing at least two points on the surface of a test sample at the same time. The photoelectric probes connected with the support structure are used for testing the at least two points on the surface of the test sample at the same time. According to the photoelectric testing device, the at least two optical microscopes are used to observe the at least two points on the surface of the test sample, the at least two photoelectric probes are used to test the observed points at the same time, and optical performances and/or electrical performances of devices corresponding to the test points on the surface of the test sample can be obtained; the test points on the surface of the test sample are observed and tested at the same time, and testing efficiency can be improved accordingly.
Description
Technical field
The embodiment of the present invention relates to measuring technology, particularly relates to a kind of opto-electronic testing apparatus.
Background technology
For wafer, the manufacture process of integrated circuit, can be divided into wafer manufacturing, wafer sort, encapsulation and last test usually.Before encapsulation, usually need to carry out performance test to the device on wafer, such as, electric property and/or optical performance test are carried out to devices such as the detector on wafer, modulator, fiber waveguide and gratings.
Existing opto-electronic testing apparatus, generally comprises supporting construction, sample plummer, light microscope and photoelectric probe.Supporting construction is for supporting the miscellaneous part in testing apparatus; Sample plummer can be fixed on the support structure, for placing the device under tests such as wafer; Light microscope is fixedly connected in supporting construction, for observing device in detection process; Photoelectric probe, also can be connected in supporting construction, carry out various detection to the device on wafer.Based on above-mentioned opto-electronic testing apparatus, need after the performance testing the device being positioned at crystal column surface, mobile wafer to be tested or testing apparatus, test is positioned at the performance of the device of other positions of crystal column surface.
The defect of existing opto-electronic testing apparatus is, in test process, needs constantly to observe, moves, detects, and repeats operation and detects each device.But because the size of device is small, so position fixing process is complicated, and movement causes setting accuracy to decline, and thus testing efficiency is low.
Summary of the invention
The embodiment of the present invention provides a kind of opto-electronic testing apparatus, to improve testing efficiency.
Embodiments provide a kind of opto-electronic testing apparatus, comprise supporting construction, sample plummer, light microscope and photoelectric probe; Wherein,
The quantity of described light microscope is at least two, is connected with described supporting construction, for observing 2 points of sample surfaces to be tested simultaneously;
The quantity of described photoelectric probe is at least two, is connected with described supporting construction, tests for 2 for the treatment of test sample surface simultaneously.
The opto-electronic testing apparatus that the embodiment of the present invention provides, observed 2 points of sample surfaces to be tested by least two light microscopes simultaneously, and the point observed is tested by least two photoelectric probe simultaneously, optical property and/or the electric property of device corresponding to multiple test points on sample to be tested product surface can be obtained, because the multiple test points treating test sample surface carry out observing and testing simultaneously, therefore, it is possible to improve testing efficiency.
Accompanying drawing explanation
In order to be illustrated more clearly in the present invention, introduce doing one to the accompanying drawing used required in the present invention simply below, apparently, accompanying drawing in the following describes is some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The end view of a kind of opto-electronic testing apparatus that Fig. 1 a provides for the embodiment of the present invention one;
Fig. 1 b is the front view of the opto-electronic testing apparatus shown in Fig. 1 a;
The structural representation of a kind of opto-electronic testing apparatus that Fig. 2 provides for the embodiment of the present invention two;
The structural representation of a kind of opto-electronic testing apparatus that Fig. 3 a provides for the embodiment of the present invention three;
Fig. 3 b is the front view of fibre-optical probe in the opto-electronic testing apparatus shown in Fig. 3 a;
Fig. 3 c is the end view of the fibre-optical probe shown in Fig. 3 b;
Fig. 3 d is the top view of the fibre-optical probe shown in Fig. 3 b;
The structural representation of sample plummer in a kind of opto-electronic testing apparatus that Fig. 4 provides for the embodiment of the present invention four.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly, be described in further detail the technical scheme in the embodiment of the present invention below in conjunction with accompanying drawing, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Be understandable that; specific embodiment described herein is only for explaining the present invention; but not limitation of the invention; based on the embodiment in the present invention; those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.It also should be noted that, for convenience of description, illustrate only part related to the present invention in accompanying drawing but not full content.
The embodiment of the present invention provides a kind of opto-electronic testing apparatus, and described testing apparatus comprises: supporting construction, sample plummer, light microscope and photoelectric probe.
Described supporting construction, for supporting the miscellaneous part in described opto-electronic testing apparatus, specifically may be used for the miscellaneous part in described opto-electronic testing apparatus to be supported on test platform.
Described sample plummer can be fixed on the support structure, for placing the sample to be tested product such as wafer; Light microscope is fixedly connected in supporting construction, for observing the device on sample to be tested in detection process; Photoelectric probe, also can be connected in supporting construction, the device on sample to be tested product be carried out to the detection of optical property and/or electric property.
In this opto-electronic testing apparatus, the quantity of described light microscope is at least two, is connected with described supporting construction, for observing 2 points of sample surfaces to be tested simultaneously.
The quantity of described photoelectric probe is at least two, is connected with described supporting construction, tests for 2 for the treatment of test sample surface simultaneously.
It should be noted that, the arrangement of described light microscope can have numerous embodiments: described light microscope can be positioned at the same side of sample to be tested, and described light microscope also can be positioned at the not homonymy of sample to be tested.Wherein, when described light microscope is positioned at the not homonymy of sample to be tested, described light microscope can adopt upper and lower arrangement mode, also left and right arrangement mode can be adopted, also other arrangement modes can be adopted, the present embodiment does not limit this, as long as can observe at 2 of sample surfaces to be tested simultaneously.
Wherein, when described microscope is positioned at the same side of sample to be tested, the 2 points on the same surface of sample to be tested can be observed simultaneously, and auxiliary described photoelectric probe navigates at least two pilots to be measured observed, thus simultaneously corresponding to multiple test points of the same surperficial diverse location of sample to be tested product device carries out optical property and/or electric property is tested, and improves testing efficiency.
Wherein, when described microscope is positioned at the not homonymy of sample to be tested, 2 points of the different surfaces of sample to be tested can be observed simultaneously, and auxiliary described photoelectric probe navigates at least two pilots to be measured observed, thus simultaneously corresponding to multiple test points of the different surfaces of sample to be tested product device carries out optical property and/or electric property is tested, and improves testing efficiency.
It should be noted that, the quantity of described light microscope is more, the test point of the sample to be tested simultaneously observed is more, adopt the photoelectric probe identical with described light microscope quantity, each photoelectric probe tests corresponding test point respectively, is also, by increasing the quantity of light microscope, and coordinate the photoelectric probe of respective numbers, can test the multiple spot of sample to be tested product simultaneously, thus testing efficiency can be improved further.
Also it should be noted that, photoelectric probe specifically comprises fibre-optical probe or electricity probe, and concrete employing fibre-optical probe or electricity probe, depend on the type of device of the pilot to be measured observed of sample to be tested.In other words, if the type of device of pilot to be measured is optics, such as, fiber waveguide or grating etc., then need to adopt fibre-optical probe; If the type of device of pilot to be measured needs to introduce or export the signal of telecommunication, such as, modulator, photodetector etc., then need to adopt electricity probe.
The technical scheme of the present embodiment, observed 2 points of sample surfaces to be tested by least two light microscopes simultaneously, and the point observed is tested by least two photoelectric probe simultaneously, optical property and/or the electric property of device corresponding to multiple test points on sample to be tested product surface can be obtained, because the multiple test points treating test sample surface carry out observing and testing simultaneously, therefore, it is possible to improve testing efficiency.
In the present embodiment, sample to be tested can be integrated with the sample of optics and/or electricity device for single or double, typical in wafer.
Embodiment one
Refer to the end view of a kind of opto-electronic testing apparatus that Fig. 1 a and Fig. 1 b, Fig. 1 a provides for the embodiment of the present invention one, Fig. 1 b is the front view of the opto-electronic testing apparatus shown in Fig. 1 a.Described testing apparatus comprises: supporting construction, sample plummer, light microscope and photoelectric probe (not shown).
Described supporting construction, for supporting described opto-electronic testing apparatus, specifically may be used for described opto-electronic testing apparatus to be supported on test platform S1.
In the present embodiment, described light microscope comprises the first light microscope 131 and the second light microscope 132; Side belonging to the first surface that described first light microscope 131 is positioned at sample 121 to be tested, side belonging to the second surface that described second light microscope 132 is positioned at sample 121 to be tested, described second surface is the surface relative with described first surface.
In the present embodiment, described first surface is the upper surface of sample 121 to be tested, and described second surface is the lower surface of sample 121 to be tested.As shown in Figure 1a, the first light microscope 131 and the second light microscope 132 lay respectively at the upper and lower surface of sample 121 to be tested.
Wherein, described first light microscope 131 comprises: the first object lens 1311 and the first eyepiece 1312, and wherein said first object lens 1311 are positioned at the one end close to sample 121 to be tested, and described first eyepiece 1312 is positioned at the other end away from sample 121 to be tested; Described second light microscope 132 comprises: the second object lens 1321 and the second eyepiece 1322, and wherein said second object lens 1321 are positioned at the one end close to sample 121 to be tested, and described second eyepiece 1322 is positioned at the other end away from sample 121 to be tested.
It should be noted that, at the first eyepiece 1312 place of described first light microscope 131, the first video camera can be set, described first video camera is used for the position that subtest personnel regulate the first light microscope 131, accurately to navigate to the test point on first surface; Can arrange the second video camera at the second eyepiece 1322 place of described second light microscope 132, described second video camera is used for the position that subtest personnel regulate the second light microscope 132, accurately to navigate to the test point on second surface.
Described opto-electronic testing apparatus also comprises: the first conveyer 14 and the second conveyer 15.
Wherein, described first conveyer 14 is connected with described first light microscope 131, for the first light microscope 131 described in three orthogonal direction translations; Second conveyer 15 is connected with described second light microscope 132, for the second light microscope 132 described in three orthogonal direction translations.Described three orthogonal directions can comprise: all around is with upper and lower.
Described supporting construction can comprise: the first supporting bracket 111, second supporting bracket 112 and the 3rd supporting bracket 113 and bracing frame 114.
Wherein, the first supporting bracket 111 is connected with described first conveyer 14; Second supporting bracket 112 is connected with the second conveyer 15; 3rd supporting bracket 113 is connected respectively with described first supporting bracket 111 and the second supporting bracket 112, and bracing frame 114 is connected with described 3rd supporting bracket 113, for described first light microscope 131 and described second light microscope 132 are supported in test platform S1.
In the present embodiment, the quantity of described photoelectric probe is two, and one of them photoelectric probe navigates to a test point of the upper surface being positioned at sample 121 to be tested, and another photoelectric probe navigates to a test point of the lower surface being positioned at sample 121 to be tested.
The technical scheme of the present embodiment, observe a test point of sample upper surface to be tested and a test point of lower surface by two light microscopes simultaneously, and two test points observed are tested by two photoelectric probe simultaneously, optical property and/or the electric property of device corresponding to the test point of the test point of sample to be tested product upper surface and lower surface can be obtained, because the device two-sided to sample to be tested product is observed and test simultaneously, therefore, it is possible to improve testing efficiency.In test process, the position of the first light microscope can be regulated by the first conveyer, and the position of the second light microscope can be regulated by the second conveyer, improve flexibility and the convenience of test.
Embodiment two
Referring to Fig. 2, is the structural representation of a kind of opto-electronic testing apparatus that the embodiment of the present invention two provides.As shown in Figure 2, described opto-electronic testing apparatus comprises: supporting construction (not shown), sample plummer, light microscope and photoelectric probe.
Described light microscope comprises the first light microscope 231 and the second light microscope 232; Side belonging to the first surface that described first light microscope 231 is positioned at sample 221 to be tested, side belonging to the second surface that described second light microscope 232 is positioned at sample 221 to be tested, described second surface is the surface relative with described first surface.
In the present embodiment, described first surface is the upper surface of sample 221 to be tested, and described second surface is the lower surface of sample 221 to be tested.
In the present embodiment, described opto-electronic testing apparatus also comprises at least one searchlighting source, and the irradiation penetration depth in described searchlighting source is greater than the thickness of described sample to be tested 221, for the surface from the side surface irradiation of described sample 221 to be tested to opposite side.
Described photoelectric probe comprises: infrared photography camera lens, fibre-optical probe 241, electricity probe 242, fibre-optical probe clamping device 243, fibre-optical probe conveyer 244, electricity probe clamp 245 and electricity probe conveyer 246.
Be described to adopt a searchlighting source below in conjunction with Fig. 2.
Side belonging to the upper surface that described first light microscope 231 is positioned at sample 221 to be tested, for observing the pilot to be measured of the B position of sample 221 upper surface to be tested; Side belonging to the lower surface that described second light microscope 232 is positioned at sample 221 to be tested, for observing the pilot to be measured of sample 221 upper surface A position to be tested.
The irradiation penetration depth in described searchlighting source is greater than the thickness of described sample to be tested 221, side belonging to the lower surface that described searchlighting source is positioned at sample 221 to be tested, described searchlighting source is used for exposing to upper surface from the lower surface of the A position of described sample 221 to be tested, with the test point making described second light microscope 232 observe sample 221 upper surface A position to be tested.
Wherein, described infrared photography camera lens is for observing the optics to be tested on sample to be tested 221 1 surfaces; Described fibre-optical probe 241 transfers to outside Optical Properties equipment, to obtain the performance parameter of described optics to be tested after being coupled by the optical signalling of described optics to be tested;
It should be noted that, the wave band of described first light microscope 231 and the response of the second light microscope 232 is visible light wave range; The wave band of described infrared photography camera lens response is infrared band.
In the present embodiment, described infrared photography camera lens coordinates with described searchlighting source, for observing the optics to be tested of sample 221 upper surface A position to be tested.
Be positioned at lower surface corresponding to the A position of surveying sample 221 to be tested for described infrared photography camera lens, described searchlighting source role is described.When not adopting described searchlighting source, the tested device at the test point place of the lower surface that described infrared photography camera lens can only observe the A position of sample 221 to be tested corresponding; When adopting described searchlighting source, because described searchlighting source exposes to upper surface from the lower surface of the A position of described sample 221 to be tested, thus described infrared photography camera lens can observe the tested device at the test point place of sample 221 upper surface A position to be tested.
Described electricity probe 242 transfers to electrical performance testing equipment for the test signal of the electricity device to be tested by B position, to obtain the performance parameter of described electricity device to be measured;
Described fibre-optical probe clamping device 243 is for clamping described fibre-optical probe 241.
Described fibre-optical probe conveyer 244 is connected with described fibre-optical probe clamping device 243, move upward at least one degree of freedom side following for driving described fibre-optical probe clamping device 243, the described degree of freedom comprises: three orthogonal translation directions, yaw axes rotation direction, rolling axis rotation direction and pitch axis rotation directions, also for supporting described fibre-optical probe clamping device 243.
Described electricity probe clamp 245 is for clamping described electricity probe 242;
Described electricity probe conveyer 246 is connected with described electricity probe clamp 245, move upward at least one degree of freedom side following for driving described electricity probe clamp 245, the described degree of freedom comprises: three orthogonal translation directions, yaw axes rotation direction, rolling axis rotation direction and pitch axis rotation directions, also for supporting described electricity probe clamp 245.
The technical scheme of the present embodiment, by being positioned at a test point of the first optical microscope inspection sample upper surface to be tested of side belonging to sample upper surface to be tested, and by electricity probe, this test point is tested, the electric property of device corresponding to this test point can be obtained; By arranging the searchlighting source irradiated penetration depth and be greater than thickness of sample to be tested in the second light microscope side, make the second light microscope can observe another test point of sample upper surface to be tested, and by fibre-optical probe, this test point is tested, the optical property of device corresponding to this test point can be obtained.Owing to observing the device of sample to be tested product one side surface diverse location and testing simultaneously, therefore, it is possible to improve testing efficiency.In test process, the position of electricity probe can be regulated by electricity probe conveyer, and the position of fibre-optical probe can be regulated by fibre-optical probe conveyer, improve flexibility and the convenience of test.In addition, in test process, electricity probe can be monitored at any time by the first light microscope and whether accurately navigate to pilot to be measured, fibre-optical probe can be monitored at any time by the second light microscope and whether accurately navigate to another pilot to be measured, improve the accuracy of test.
The present embodiment only with the first light microscope of side belonging to the upper surface being positioned at sample to be tested and be positioned at sample to be tested lower surface belonging to the device of the second light microscope to upper surface two diverse locations of sample to be tested product of side observe simultaneously, adopt electricity probe and the device of fibre-optical probe to described two diverse locations to test this scene for example simultaneously and the opto-electronic testing apparatus that the embodiment of the present invention provides be described.The opto-electronic testing apparatus that the present embodiment provides, can also be applied to following several scenes:
First light microscope of side belonging to the upper surface being positioned at sample to be tested and be positioned at sample to be tested lower surface belonging to the device of the second light microscope to lower surface two diverse locations of sample to be tested product of side observe simultaneously, wherein, the searchlighting source irradiated penetration depth and be greater than thickness of sample to be tested is set in the first light microscope side;
Arrange in the first light microscope side and irradiate penetration depth and be greater than the first searchlighting source of thickness of sample to be tested, belonging to the upper surface being positioned at sample to be tested, the test point of the first light microscope to sample to be tested product lower surface of side is tested; Arrange in the second light microscope side and irradiate penetration depth and be greater than the second searchlighting source of thickness of sample to be tested, belonging to the lower surface being positioned at sample to be tested, the test point of the second light microscope to sample to be tested product upper surface of side is tested;
Wherein, different test positions specifically adopts fibre-optical probe or electricity probe, depends on the type of device of the pilot to be measured observed of sample to be tested.
Embodiment three
Refer to Fig. 3 a-Fig. 3 d.The present embodiment, on the basis of above-described embodiment, optimizes fibre-optical probe further.Described fibre-optical probe 341 comprises: optical fiber 31, first substrate 32 and second substrate 33.
Wherein, at least two optical fiber ducts 321 are established in described first substrate 32, each optical fiber duct fixes an optical fiber for accommodating, and each optical fiber duct is positioned at straight line for making the fibre core 311 of each optical fiber 31, the center distance of described adjacent fiber groove is consistent with the spacing of the optics to be tested on sample surface to be tested; Described second substrate 33, for coordinating with described first substrate 32, fixes the optical fiber 31 in described optical fiber duct 321.
The shape of described optical fiber duct 321 can be back taper.
It should be noted that, when adopting monomode fiber, because the tolerance of single mode fiber optical coupling is low, therefore, it is consistent with the spacing of the optics to be tested on sample surface to be tested by the center distance of adjacent fiber groove is set to, and make the fibre core of each monomode fiber be positioned at straight line, be conducive to making the batch of the monomode fiber in each optical fiber duct to aim at optics multiple to be tested on sample surface to be tested.
The opto-electronic testing apparatus that the present embodiment provides, it is consistent with the spacing of the optics to be tested on sample surface to be tested by the center distance of adjacent fiber groove is set to, after by optical microscope inspection to test point, can test the optics to be tested of optics to be tested corresponding to this test point and this test point periphery simultaneously, further increase testing efficiency.Because the fibre core of each optical fiber is positioned at straight line, ensure that the consistency between each optical fiber and stability.
In such scheme, described Electro-Optical Sensor Set preferably includes further: fibre-optical probe clamping device 343 and fibre-optical probe conveyer 344.
Wherein, described fibre-optical probe clamping device 343 comprises: the 3rd substrate 3431.
Described 3rd substrate 3431 is provided with vacuum chamber 3432, first endoporus 3433 and the first exit orifice 3434 that connect successively from inside to outside, described first substrate 32 covers described vacuum chamber 3432, described 3rd substrate 3431 is for when the first exit orifice 3434 is connected with vacuum source, by described first endoporus 3433, described vacuum chamber 3432 is vacuumized, with fibre-optical probe described in vacuum chuck;
Described fibre-optical probe conveyer 344 is connected with described 3rd substrate 3431, for driving described 3rd substrate 3431 to move upward at least one degree of freedom side following, the described degree of freedom comprises: three orthogonal translation directions, yaw axes rotation direction, rolling axis rotation direction and pitch axis rotation directions; Can also be used for supporting described 3rd substrate 3431.
Present embodiment, adopt vacuum suction mode to clamp described fibre-optical probe, compared to mechanical grip mode, vacuum suction mode can avoid the mechanical damage on fibre-optical probe surface.
Described fibre-optical probe clamping device preferably includes further: side scotch 3435 and afterbody scotch 3436.
Wherein, described side scotch 3435 is fixed on the side of the first surface of the 3rd substrate 3431, the first surface of described 3rd substrate 3431 is the face that described 3rd substrate 3431 contacts with described first substrate 32, for when described first substrate 32 touches described side scotch 3435, make described fibre-optical probe stop;
Afterbody scotch 3436 is positioned at the first surface of described 3rd substrate 3431, and vertically with described side scotch 3435 arranges, and for when described first substrate 32 touches described afterbody scotch 3436, makes described fibre-optical probe stop.
Present embodiment, side scotch and afterbody scotch is adopted to be conducive to making fibre-optical probe clamping device navigate to desired location fast, accurately, especially when adopting monomode fiber, because the tolerance of single mode fiber optical coupling is low, being quick and precisely positioned with of fibre-optical probe clamping device is beneficial to and makes the batch of the monomode fiber in each optical fiber duct aim at optics multiple to be tested on sample surface to be tested.
Embodiment four
Referring to Fig. 4, is the structural representation of sample plummer in a kind of opto-electronic testing apparatus that the embodiment of the present invention four provides.The present embodiment, on the basis of the various embodiments described above, optimizes sample plummer further.
Described sample plummer comprises: sample clamp 41, kinematics base 42a, 42b and 42c and translation and rotating platform 43 (as shown in Figure 1a).Sample clamp 41, kinematics base 42a, 42b and 42c and translation and rotating platform 43 are for carrying sample, expose the test surfaces of described sample to be tested, the opto-electronic testing apparatus provided to make foregoing embodiments carries out optical property and/or electrical performance testing to the device on the test surfaces of sample to be tested product.
Sample clamp on the right side of composition graphs 2 is described.Sample clamp 41 is for fixing described sample to be tested by the absorption of vacuum suction structure; Kinematics base 42b is connected with described sample clamp 41; Translation is connected with described kinematics base 42b with rotating platform 43, for driving described kinematics base 42b to move upward at least one degree of freedom side following, the described degree of freedom comprises: three orthogonal translation directions, yaw axes rotation direction, rolling axis rotation direction and pitch axis rotation directions; Translation and rotating platform 43 are also for being supported in example platform S2 (as shown in Figure 1a) by described sample clamp 41.
Wherein, described example platform S2 and test platform S1 can be same platform, also can be different platforms, and also, described example platform S2 is independent of described test platform S1.
Further, the middle part of described sample clamp 41 is preferably provided with through hole 411, the described sample to be tested of edge carrying of described through hole 411, and exposes the test surfaces of described sample to be tested;
Described through hole 411 edge corresponds to the overlay area of sample to be tested, is formed with ring vaccum chamber 412;
Described ring vaccum chamber 412 is communicated with aspirating hole 413 by described through hole 411, for adsorbing described sample to be tested.
Any one can passing through in mechanical interface a, mechanical interface b or mechanical interface c of sample clamp is connected with described kinematics base 42b.
It should be noted that, merely illustrate the structural representation of the sample clamp 41 be connected with kinematics base 42b in Fig. 2, the sample clamp connected with kinematics base 42a and 42c also has identical structure, repeats no more herein.
The sample plummer that the present embodiment provides, adopt vacuum suction mode to adsorb fixing sample to be tested, compared to mechanical grip mode, vacuum suction mode can avoid the mechanical damage of sample surfaces to be tested.
The sample plummer that the present embodiment provides is applicable in foregoing embodiments, by the through hole arranged in the middle part of sample, and the ring vaccum chamber that through hole edge is formed, vacuum suction can fix sample to be tested, and expose the test surfaces of described sample to be tested, the opto-electronic testing apparatus provided to make foregoing embodiments tests optical property and/or the electric property of device corresponding to multiple test points on described test surfaces, because the multiple test points treating test sample surface carry out observing and testing simultaneously, therefore, it is possible to improve testing efficiency.
Last it is noted that above each embodiment is only for illustration of technical scheme of the present invention, but not be limited; In embodiment preferred embodiment, be not limited, to those skilled in the art, the present invention can have various change and change.All do within spirit of the present invention and principle any amendment, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. an opto-electronic testing apparatus, comprises supporting construction, sample plummer, light microscope and photoelectric probe, it is characterized in that:
The quantity of described light microscope is at least two, is connected with described supporting construction, for observing 2 points of sample surfaces to be tested simultaneously;
The quantity of described photoelectric probe is at least two, is connected with described supporting construction, tests for 2 for the treatment of test sample surface simultaneously.
2. device according to claim 1, is characterized in that:
Described light microscope comprises the first light microscope and the second light microscope;
Side belonging to the first surface that described first light microscope is positioned at sample to be tested, side belonging to the second surface that described second light microscope is positioned at sample to be tested, described second surface is the surface relative with described first surface.
3. device according to claim 1, is characterized in that, also comprises:
At least one searchlighting source, the irradiation penetration depth in described searchlighting source is greater than the thickness of described sample to be tested, for the surface from the side surface irradiation of described sample to be tested to opposite side.
4. device according to claim 1, is characterized in that, described photoelectric probe is fibre-optical probe, and described fibre-optical probe comprises:
Optical fiber;
First substrate, inside establish at least two optical fiber ducts, each optical fiber duct fixes an optical fiber for accommodating, and each optical fiber duct is positioned at straight line for making the fibre core of each optical fiber, and the center distance of described adjacent fiber groove is consistent with the spacing of the optics to be tested on sample surface to be tested;
Second substrate, for coordinating with described first substrate, the optical fiber in fixing described optical fiber duct.
5. device according to claim 4, is characterized in that, described device also comprises fibre-optical probe clamping device and fibre-optical probe conveyer;
Described fibre-optical probe clamping device comprises:
3rd substrate, be provided with the vacuum chamber, the first endoporus and the first exit orifice that connect successively from inside to outside, described first substrate covers described vacuum chamber, described 3rd substrate is used for when the first exit orifice is connected with vacuum source, described vacuum chamber is vacuumized, with fibre-optical probe described in vacuum chuck by described first endoporus;
Fibre-optical probe conveyer, be connected with described 3rd substrate, for driving described 3rd substrate to move upward at least one degree of freedom side following, the described degree of freedom comprises: three orthogonal translation directions, yaw axes rotation direction, rolling axis rotation direction and pitch axis rotation directions; Also for supporting described 3rd substrate.
6. device according to claim 5, is characterized in that, described fibre-optical probe clamping device also comprises:
Side scotch, be fixed on the side of the first surface of the 3rd substrate, the first surface of described 3rd substrate is the face that described 3rd substrate contacts with described first substrate, for when described first substrate touches described side scotch, makes described fibre-optical probe stop;
Afterbody scotch, is positioned at the first surface of described 3rd substrate, and vertically with described side scotch arranges, and for when described first substrate touches described afterbody scotch, makes described fibre-optical probe stop.
7., according to the arbitrary described device of claim 1-6, it is characterized in that, also comprise:
First conveyer, is connected with described first light microscope, for the first light microscope described in three orthogonal direction translations;
Second conveyer, is connected with described second light microscope, for the second light microscope described in three orthogonal direction translations.
8., according to the arbitrary described device of claim 1-6, it is characterized in that:
Described photoelectric probe comprises: infrared photography camera lens and fibre-optical probe;
Wherein, described infrared photography camera lens is for observing the optics to be tested on sample to be tested surface;
Described fibre-optical probe transfers to outside Optical Properties equipment, to obtain the performance parameter of described optics to be tested after being used for the optical signalling of described optics to be tested to be coupled;
Described photoelectric probe also comprises:
Electricity probe, for the test signal of electricity device to be tested is transferred to electrical performance testing equipment, to obtain the performance parameter of described electricity device to be measured;
Electricity probe clamp, for clamping described electricity probe;
Electricity probe conveyer, be connected with described electricity probe clamp, move upward at least one degree of freedom side following for driving described electricity probe clamp, the described degree of freedom comprises: three orthogonal translation directions, yaw axes rotation direction, rolling axis rotation direction and pitch axis rotation directions, also for supporting described electricity probe clamp.
9., according to the arbitrary described device of claim 1-6, it is characterized in that, described sample plummer comprises:
Sample clamp, for fixing described sample to be tested by the absorption of vacuum suction structure;
Kinematics base, is connected with described sample clamp;
Translation and rotating platform, be connected with described kinematics base, for driving described kinematics base to move upward at least one degree of freedom side following, the described degree of freedom comprises: three orthogonal translation directions, yaw axes rotation direction, rolling axis rotation direction and pitch axis rotation directions; Translation and rotating platform are also for being supported in example platform by described sample clamp.
10. device according to claim 9, is characterized in that:
The middle part of described sample clamp is provided with through hole, the described sample to be tested of edge carrying of described through hole, and exposes the test surfaces of described sample to be tested;
Described through hole edge corresponds to the overlay area of sample to be tested, is formed with ring vaccum chamber;
Described ring vaccum chamber is communicated with aspirating hole, for adsorbing described sample to be tested by described through hole.
Priority Applications (1)
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| CN108369193A (en) * | 2015-12-08 | 2018-08-03 | 伊雷克托科学工业股份有限公司 | Movable sensor coordinate detection system |
| CN110579699A (en) * | 2019-09-20 | 2019-12-17 | 武汉电信器件有限公司 | Chip testing device |
| CN112665827A (en) * | 2019-10-16 | 2021-04-16 | 北极光电(深圳)有限公司 | Test method of MT-FA product |
| CN113125935A (en) * | 2019-12-30 | 2021-07-16 | 瞻博网络公司 | Compact photoelectric detector |
| CN114486205A (en) * | 2022-02-21 | 2022-05-13 | 上海天马微电子有限公司 | Optical testing device and method |
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| CN114486205A (en) * | 2022-02-21 | 2022-05-13 | 上海天马微电子有限公司 | Optical testing device and method |
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