CN104362058A - Curved surface film forming method for dynode of electron multiplier - Google Patents
Curved surface film forming method for dynode of electron multiplier Download PDFInfo
- Publication number
- CN104362058A CN104362058A CN201410541534.5A CN201410541534A CN104362058A CN 104362058 A CN104362058 A CN 104362058A CN 201410541534 A CN201410541534 A CN 201410541534A CN 104362058 A CN104362058 A CN 104362058A
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- China
- Prior art keywords
- curved surface
- inner lining
- lining plate
- electron multiplier
- dynode
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention discloses a curved surface film forming method for a dynode of an electron multiplier and effectively solves the problems of stability and uniformity in coating of films onto specific curved surfaces of dynodes of electron multipliers. The method includes: processing a curved surface liner with to-be-bent areas at two ends according to the size and radian of a to-be-coated inner surface of a dynode shell of the electron multiplier, wherein one of the to-be-bent areas is reversely folded by 180 degrees towards the outside of the curved surface to form a folded portion, and the other to-be-bent area is cut to form n rectangular toothed fasteners; coating a film onto the curved surface liner; mounting the coated curved surface liner on the inner surface of the dynode shell of the electron multiplier, and fixing with the folded portion and the rectangular toothed fasteners.
Description
Technical field
The present invention relates to the fabricating technology field of electron multiplier dynode, be specifically related to a kind of electron multiplier dynode curved surface film build method.
Background technology
The performance of electron multiplier decides the useful life of atomic clock, and dynode curved surface plated film is the core technology of electron multiplier.Fig. 1 is the structural representation of electron multiplier dynode shell, its face to be plated is arc-shaped inner surface, for this special curved surface of electron multiplier dynode, directly at dynode inner surface of outer cover plated film, because of dynode shell two side walls and curved surface design at a right angle, coating process can be made to be inconvenient to implement, to cause inner surface film forming uneven, directly affects electron multiplier stability.
Therefore, for this special curved surface, directly can not meet electron multiplier secondary function film at its surface coating and be coated with requirement.
Summary of the invention
In view of this, the invention provides a kind of electron multiplier dynode curved surface film build method, in the mode of indirect plated film, effectively solve electron multiplier dynode particular curvature and be coated with the problem such as uniformity of film and stability.
For solving the problem, technical scheme of the present invention is as follows:
A kind of electron multiplier dynode curved surface film build method, comprising:
Step 1, according to the size of electron multiplier dynode shell inner surface to be coated and radian, the curved surface inner lining plate treating bent area is left at processing two ends; Wherein one end treat that bent area is to reflexed outside curved surface 180 °, formed folded up portion; The other end treat that bent area cutting-type becomes n rectangle teeth buckle; N be more than or equal to 3 integer;
Step 2, secondary function film is carried out to the negative camber of curved surface inner lining plate be coated with;
Step 3, the curved surface inner lining plate after plated film is placed in electron multiplier dynode inner surface of outer cover, and is fixed by folded up portion and rectangle teeth buckle and electron multiplier dynode shell.
Preferably, described folded up portion length is 0.5mm.
Preferably, when processing curve inner lining plate, by described rectangle teeth buckle to reflexed certain angle outside curved surface, make rectangle teeth buckle parallel with folded up portion.
Described step 2 specifically comprises:
(1) clean: curved surface inner lining plate step 1 obtained puts into clean vessel, rinse well with water, again respectively with analyzing pure acetone and analyzing each Ultrasonic Cleaning of absolute alcohol 10 minutes ~ 30 minutes, then rinse well by the pure volatile organic solution of analysis, with the wiping of chipless cleansing tissue to surperficial no marking, scratch and drop remaining trace;
(2) plated film: the curved surface inner lining plate after cleaning is put into vacuum chamber, open mechanical pump to take out in advance, by vacuum chamber to 1Pa, then while mechanical pump maintenance work, molecular pump is opened, the switch of bleeding of molecular pump is opened, by vacuum chamber to 3.0 × 10 after molecular pump smooth running
-5pa, then heats curved surface inner lining plate to temperature required rear insulation, the negative camber of curved surface inner lining plate carries out secondary thin film deposition.
Preferably, before the curved surface inner lining plate after cleaning is put into vacuum chamber, first clean vacuum chambers, concrete steps comprise: remove the pollutant in the rete and air come off in vacuum chamber, then dip in absolute ethyl alcohol wiped clean vacuum chamber inwall with absorbent gauze.
Beneficial effect
The present invention is first coated with secondary function film on the stainless steel curved surface inner lining plate of certain radian, then is installed to electron multiplier dynode.Owing to being plated film on curved surface inner lining plate, effectively can solving in dynode curved surface plated film and become the problem such as film uniformity, stability, therefore can meet the plated film requirement of electron multiplier dynode curved substrate according to this film build method.
It is complete folded up portion that the present invention designs curved surface inner lining plate one end, and the other end is treated to buckle, thus is convenient to, when installing curved surface inner lining plate, make three buckles better fit as impetus and dynode.And compared with bending with entirety, the bending of point is more prone to process.
Accompanying drawing explanation
Fig. 1 is the structure chart of electron multiplier dynode shell.；
Fig. 2 is the three-view diagram of the structure chart of curved surface inner lining plate of the present invention; Upper left is vertical view, and lower-left is front view (curved interior surface), and bottom right is end view.1-folded up portion, 2-rectangle teeth buckle.
Embodiment
Below with reference to accompanying drawings embodiments of the invention are described.
The present invention is directed to electron multiplier dynode curved surface coating defects problem, in order to meet the requirement of dynode curved surface plated film, a kind of brand-new film forming thinking need be adopted: on the stainless steel curved surface inner lining plate of certain radian, be first coated with secondary function film, then be installed to electron multiplier dynode.Because plated film can ensure plated film uniformity on curved surface inner lining plate, therefore the requirement of electron multiplier dynode curved substrate plated film can be met according to this film build method.
The implementation step of this electron multiplier dynode curved surface film build method is as follows:
Step 1, curved surface inner lining plate are processed:
With reference to figure 2, according to size and the radian of electron multiplier dynode shell inner surface to be coated, the curved surface inner lining plate treating bent area is left at processing two ends, and the radian of curved surface inner lining plate is identical with the radian of inner surface to be coated, length be inner surface length to be coated add two ends treat bent area.The material of curved surface inner lining plate is No. 304 stainless steels, and thickness is 0.1mm.Curved surface inner lining plate wherein one end treat that bent area is to reflexed outside curved surface 180 °, form folded up portion 1, thus be pre-formed the fixed structure of one end, the length of folded up portion 1 is 0.5mm; The other end treat that bent area cutting-type becomes n (>=3) individual rectangle teeth buckle 2, n=3 in the present embodiment, by being bent to form the fixed structure of the other end further when these teeth are buckled in subsequent installation.
It is complete folded up portion that the present invention designs curved surface inner lining plate one end, and the other end is treated to buckle, thus is convenient to, when installing curved surface inner lining plate, make three buckles better fit as impetus and dynode.And compared with bending with entirety, the bending of point is more prone to process.
In order to be convenient to plated film and follow-up installation further, can, adding man-hour by rectangle teeth buckle to reflexed certain angle outside curved surface, make rectangle teeth buckle parallel with folded up portion, as shown in the view of Fig. 2 lower right side.
Step 2, curved surface inner lining plate plated film:
(1) curved surface inner lining plate is cleaned: No. 304 stainless steel curved surface inner lining plates are put into clean vessel, clean with deionized water rinsing, again No. 304 stainless steel curved surface inner lining plates are used respectively and analyze pure acetone and analyze each Ultrasonic Cleaning of absolute alcohol 15 minutes, then rinse well with the pure absolute ethyl alcohol of analysis, with the wiping of chipless cleansing tissue to surperficial no marking, scratch and drop remaining trace.
(2) clean vacuum room: open vacuum chamber, removes the pollutant in the rete and air come off in vacuum chamber, then dips in absolute ethyl alcohol wiped clean vacuum chamber inwall with absorbent gauze.
(3) vacuum chamber: No. 304 stainless steel curved surface inner lining plates after cleaning are put in the substrate frame of vacuum chamber, open mechanical pump to take out in advance, by vacuum chamber to 1Pa, then molecular pump is opened when mechanical pump works on, after molecular pump smooth running, open the switch of bleeding of molecular pump, vacuum chamber is evacuated to 3.0 × 10
-5pa, then insulation 1 hour after heated substrate frame to 400 DEG C.
(4) secondary thin film deposition: be coated with magnesia film on No. 304 stainless steel curved surface inner lining plates, thickness is 100nm, terminates rete and is coated with.
Step 3, installation curved surface inner lining plate:
Curved surface inner lining plate after plated film is placed in electron multiplier dynode inner surface of outer cover, curved surface inner lining plate one end folded up portion is enclosed within electron multiplier dynode shell one end, the rectangle teeth buckle of the curved surface inner lining plate other end is bent outside curved surface, to snap onto the other one end of electron multiplier dynode shell, make curved surface inner lining plate secure fit at electron multiplier dynode inner surface of outer cover.
In sum, these are only preferred embodiment of the present invention, be not intended to limit protection scope of the present invention.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. an electron multiplier dynode curved surface film build method, it is characterized in that, the method comprises:
Step 1, according to the size of electron multiplier dynode shell inner surface to be coated and radian, the curved surface inner lining plate treating bent area is left at processing two ends; Wherein one end treat that bent area is to reflexed outside curved surface 180 °, formed folded up portion; The other end treat that bent area cutting-type becomes n rectangle teeth buckle; N be more than or equal to 3 integer;
Step 2, secondary function film is carried out to the negative camber of curved surface inner lining plate be coated with;
Step 3, the curved surface inner lining plate after plated film is placed in electron multiplier dynode inner surface of outer cover, and is fixed by folded up portion and rectangle teeth buckle and electron multiplier dynode shell.
2. film build method as claimed in claim 1, it is characterized in that, described folded up portion length is 0.5mm.
3. film build method as claimed in claim 1, is characterized in that, when processing curve inner lining plate, by described rectangle teeth buckle to reflexed certain angle outside curved surface, make rectangle teeth buckle parallel with folded up portion.
4. film build method as claimed in claim 1, it is characterized in that, described step 2 specifically comprises:
(1) clean: curved surface inner lining plate step 1 obtained puts into clean vessel, rinse well with water, again respectively with analyzing pure acetone and analyzing each Ultrasonic Cleaning of absolute alcohol 10 minutes ~ 30 minutes, then rinse well by the pure volatile organic solution of analysis, with the wiping of chipless cleansing tissue to surperficial no marking, scratch and drop remaining trace;
(2) plated film: the curved surface inner lining plate after cleaning is put into vacuum chamber, open mechanical pump to take out in advance, by vacuum chamber to 1Pa, then while mechanical pump maintenance work, molecular pump is opened, the switch of bleeding of molecular pump is opened, by vacuum chamber to 3.0 × 10 after molecular pump smooth running
-5pa, then heats curved surface inner lining plate to temperature required rear insulation, the negative camber of curved surface inner lining plate carries out secondary thin film deposition.
5. film build method as claimed in claim 4, it is characterized in that, before curved surface inner lining plate after cleaning is put into vacuum chamber, first clean vacuum chambers, concrete steps comprise: remove the pollutant in the rete and air come off in vacuum chamber, then dip in absolute ethyl alcohol wiped clean vacuum chamber inwall with absorbent gauze.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410541534.5A CN104362058A (en) | 2014-10-15 | 2014-10-15 | Curved surface film forming method for dynode of electron multiplier |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410541534.5A CN104362058A (en) | 2014-10-15 | 2014-10-15 | Curved surface film forming method for dynode of electron multiplier |
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| CN104362058A true CN104362058A (en) | 2015-02-18 |
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| CN201410541534.5A Pending CN104362058A (en) | 2014-10-15 | 2014-10-15 | Curved surface film forming method for dynode of electron multiplier |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105206486A (en) * | 2015-09-11 | 2015-12-30 | 兰州空间技术物理研究所 | Production technology for dynode shell |
| CN105349968A (en) * | 2015-11-19 | 2016-02-24 | 西安交通大学 | Dynode film structure and electron multiplier based on dynode film structure |
| CN105470092A (en) * | 2015-11-19 | 2016-04-06 | 西安交通大学 | Dynode structure and arc dynode electron multiplier based on the same |
| CN112782547A (en) * | 2020-12-11 | 2021-05-11 | 兰州空间技术物理研究所 | Method for predicting service life of electron multiplier of cesium atomic clock |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3119038A (en) * | 1959-05-21 | 1964-01-21 | Bush And Rank Cintel Ltd | Electron multiplier |
| JPH02291654A (en) * | 1989-04-28 | 1990-12-03 | Hamamatsu Photonics Kk | Photo-electron multiplier |
| CN1444769A (en) * | 2000-07-27 | 2003-09-24 | 滨松光子学株式会社 | Photomultiplier |
| CN103215543A (en) * | 2013-04-22 | 2013-07-24 | 兰州空间技术物理研究所 | Method for preparing film system with secondary electron emission function |
-
2014
- 2014-10-15 CN CN201410541534.5A patent/CN104362058A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3119038A (en) * | 1959-05-21 | 1964-01-21 | Bush And Rank Cintel Ltd | Electron multiplier |
| JPH02291654A (en) * | 1989-04-28 | 1990-12-03 | Hamamatsu Photonics Kk | Photo-electron multiplier |
| CN1444769A (en) * | 2000-07-27 | 2003-09-24 | 滨松光子学株式会社 | Photomultiplier |
| CN103215543A (en) * | 2013-04-22 | 2013-07-24 | 兰州空间技术物理研究所 | Method for preparing film system with secondary electron emission function |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105206486A (en) * | 2015-09-11 | 2015-12-30 | 兰州空间技术物理研究所 | Production technology for dynode shell |
| CN105349968A (en) * | 2015-11-19 | 2016-02-24 | 西安交通大学 | Dynode film structure and electron multiplier based on dynode film structure |
| CN105470092A (en) * | 2015-11-19 | 2016-04-06 | 西安交通大学 | Dynode structure and arc dynode electron multiplier based on the same |
| CN112782547A (en) * | 2020-12-11 | 2021-05-11 | 兰州空间技术物理研究所 | Method for predicting service life of electron multiplier of cesium atomic clock |
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Application publication date: 20150218 |