CN104360465A - Zooming telecentric lens - Google Patents

Zooming telecentric lens Download PDF

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Publication number
CN104360465A
CN104360465A CN201410556145.XA CN201410556145A CN104360465A CN 104360465 A CN104360465 A CN 104360465A CN 201410556145 A CN201410556145 A CN 201410556145A CN 104360465 A CN104360465 A CN 104360465A
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China
Prior art keywords
lens
combination
lens combination
object plane
zoom
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CN201410556145.XA
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CN104360465B (en
Inventor
周峰
黄芳林
杜勇刚
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Dongguan Pumisi Precision Instrument Co Ltd
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Dongguan Pumisi Precision Instrument Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00Optical objectives with means for varying the magnification
    • G02B15/14Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
    • G02B15/16Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group
    • G02B15/163Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group having a first movable lens or lens group and a second movable lens or lens group, both in front of a fixed lens or lens group
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/22Telecentric objectives or lens systems

Abstract

The invention discloses a zooming telecentric lens and relates to optical techniques. The zooming telecentric lens sequentially comprises a first lens group with positive refraction index focal power, a second lens group with positive refraction index focal power, a third lens group with negative refraction index focal power, a fourth lens group with positive refraction index focal power and a fifth lens group with positive refraction index focal power from an object plane to an image plane; the first lens group, the third lens group and the fifth lens group are fixed groups, and the second lens group and the fourth group are moving groups; when the zooming telecentric lens zooms from low power to high power, the second lens group is close to the first lens group, and the fourth lens group is close to the third lens group; during zooming, the spot position is adjusted and changed independently. The zooming telecentric lens is high in zoom ratio, and object space resolution can reach up to 4.7 micrometers; conjugate distance is kept unchanged during zooming, zooming positions adopt telecentric object space design, and accuracy of measured data and repeatability of the measured data at different depth-of-field locations are guaranteed; distortion of TV is less than 0.05%.

Description

A kind of zoom telecentric lens
Technical field
The present invention relates to optical technology, espespecially a kind of zoom telecentric lens, its conjugate distance immobilizes, and the object space heart far away, is applicable to accurate radiographic measurement.
Background technology
The sophisticated manufacturing fields such as electronics widely use optical imaging lens testing product quality.Along with the quality requirements of sophisticated manufacturing is more and more higher, Precision measurement industry presents following trend: 1, Product checking turns to full inspection from sampling observation; 2, offline inspection turns to on-line checkingi; 3, accuracy of detection turns to micron order by 0.01mm rank; 4, semi-automatic measuring turns to a key automatically to measure.This just requires that used checkout equipment must have high-level efficiency, the convenience of high accuracy and operation, and the optical imaging lens that certainly will use checkout equipment requires to become high.
In prior art, the camera lens measured for product mainly contains following three classes:
One, fixed telecentric lens doubly, can realize the large visual field and detect, accuracy of detection also can be guaranteed.But in time using same measuring system to carry out measurements different wisp greatly, will go wrong, such as the object that measurement one is smaller, user wishes to use larger multiple to detect the (sensing range that large multiple is corresponding less, precision can better be ensured simultaneously), otherwise need again when measuring larger object to use little multiple to detect (sensing range that little multiple is corresponding larger, the larger multiple of precision is poor, but can ensure).But because measuring system itself can not convert multiple, so bring very large inconvenience to user.
Its two, continuous zoom lens, the detection visual field of camera lens is less, and because its optical system is not real telecentric system, when the diverse location of testee in camera lens field depth can be caused to measure, measured value mutually between there is deviation; When same position measurement also can there is deviation in measured value and standard value simultaneously, accuracy of detection is greatly affected, can not reaches micron order;
They are three years old, the telecentric lens of several multiple combination, can zoom to fixing several multiples, but can not continuous zoom be realized, some degree solves the problem that above two type camera lenses run into, but multiple is very limited, be generally no more than 4 fixing multiples, use still faces great limitation and inconvenience.
Summary of the invention
The technical issues that need to address of the present invention overcome that existing fixed times telecentric lens can not convert multiple, continuous zoom lens detects the very limited deficiency of visual field telecentric lens multiple change that is less and several multiple combination, releases a kind of zoom telecentric lens.This camera lens: 1, conjugate distance immobilizes, operating distance do not change because of the change of multiple; 2, object space heart design far away, fundamentally solves the problem occurring measured deviation in field depth; 3, realize continuous zoom, user can choose at random most suitable multiple in use between minimum and maximum multiple, meets the most suitable detection visual field simultaneously.
For this reason, a kind of zoom telecentric lens of the present invention adopts following technical proposals:
A kind of zoom telecentric lens, play image planes from object plane and comprise successively: first lens combination with positive refracting power focal power, second lens combination with positive refracting power focal power, have negative index focal power the 3rd lens combination, there is the 4th lens combination of positive refracting power focal power and there is the 5th lens combination of positive refracting power focal power; Wherein, first lens combination, the 3rd lens combination and the 5th lens combination are for being fixedly installed, and the second lens combination and the 4th lens combination are mobile group, when zoom telecentric lens is from low power to high power zoom, second lens combination is close to the first lens combination, and the 4th lens combination is close to the 3rd lens combination; When described zoom telecentric lens is from high power to low power zoom, the second lens combination is close to the 3rd lens combination, and the 4th lens combination is close to the 5th lens combination.
Technique scheme is further elaborated:
Above-mentioned a kind of zoom telecentric lens, also meets following any conditional, or any two conditionals below, or meets following three conditionals simultaneously:
Formula one, 0.2<D0/F1<0.5
Formula two, 1<D22/F22<5
Formula three, 1<|L4|/| L2|<4
Wherein D0 is the distance of object plane to the first lens apex of the first lens combination, F1 is the focal length of the first lens combination, | L2|, | L4| is respectively the absolute value of the second lens combination, the maximum amount of movement of the 4th lens combination from low power to high power, D22 is the distance of the first lens near the side of object plane in each zoom position to image planes of the second lens combination, and F22 is the second lens combination to the combined focal length of the 5th lens combination in each zoom position.
First lens combination comprises from object plane to the first lens, the second lens, the 3rd lens and the 4th lens that image planes are arranged in order, first lens are a biconvex lens, second lens are the meniscus convex surface facing object plane, 3rd lens are biconvex lens, 4th lens are biconcave lens, the radius-of-curvature of 3rd lens near the surface of image planes side is identical with the radius-of-curvature of the 4th lens near the surface of object plane side, and the 3rd lens and the 4th lens glue are combined formation balsaming lens.
Second lens combination comprises from object plane to the 5th lens, the 6th lens and the 7th lens that image planes are arranged in order, 5th lens are the meniscus convex surface facing object plane, 6th lens are biconvex lens, 7th lens are biconvex lens, the radius-of-curvature of 5th lens near the surface of image planes side is identical with the radius-of-curvature of the 6th lens near the surface of object plane side, and the 5th lens and the 6th lens glue are combined formation balsaming lens.
3rd lens combination comprises from object plane to the 8th lens, the 9th lens and the tenth lens that image planes are arranged in order, 8th lens are biconcave lens, 9th lens are a biconcave lens, tenth lens are the meniscus convex surface facing object plane, the radius-of-curvature of 9th lens near the surface of image planes side is identical with the radius-of-curvature of the tenth lens near the surface of object plane side, and the 9th lens and the tenth lens glue are combined formation balsaming lens.
4th lens combination comprises from object plane to the 11 lens, the 12 lens and the 13 lens that image planes are arranged in order, 11 lens are a biconvex lens, 12 lens are the meniscus convex surface facing object plane, 13 lens are the meniscus convex surface facing object plane, the radius-of-curvature of 12 lens near the surface of image planes side is identical with the radius-of-curvature of the 13 lens near the surface of object plane side, and the 12 lens and the 13 lens glue are combined formation balsaming lens.
5th lens combination comprises from object plane to the 14 lens, the 15 lens and the 16 lens that image planes are arranged in order, 14 lens are the concave-convex lens convex surface facing image planes, 15 lens are the meniscus convex surface facing object plane, and the 16 lens are biconvex lens.
The diaphragm of this zoom telecentric lens is between the 3rd lens combination and the 4th lens combination, and in zoom process, stop position is also independently adjusting variation.
Working mechanism of the present invention is, functionally, the second lens combination and the 4th lens combination are zoom group, and the 5th lens combination is that zoom compensates and rear Jiao's adjustment group.Because the first lens combination, the 3rd lens combination and the 5th lens combination are fixedly installed, second lens combination and the 4th lens combination are mobile group, when the second lens combination is close to the first lens combination, the 4th lens combination is close to the 3rd lens combination, just can realize zoom telecentric lens from low power to the zoom of high power; When the second lens combination is close to the 3rd lens combination, the 4th lens combination is close to the 5th lens combination, just can realize the zoom from high power to low power.In order to reduce telecentricity and the distortion of each zoom position system, each zoom position of diaphragm is variable by system.
In whole zooming procedure, object plane is constant all the time to the distance of image planes, and the first lens are constant to the distance of object plane near the surface of object plane side, and the 16 lens are constant to the distance of image planes near the surface of image planes side.
Compared with prior art, advantage of the present invention is:
One, have high zoom ratio, zoom is from 0.2X to 2X;
Its two, in zoom process, conjugate distance remains unchanged, just can blur-free imaging continuously without the need to adjusting object distance or image distance in different multiplying position;
Its three, each zoom position all adopts the design of the object space heart far away, ensure measurement data accuracy and
The repeatability of measurement data during different depth of field position;
Its four, be less than the extra small TV distortion of 0.05%, the shape of true reduction testee;
Its five, picture imaging uniform-illumination;
Its six, be up to the measurement depth of field of 12mm, meet the needs that user measures differing heights object or Special-shaped object;
Its seven, 1inch large target surface design;
Its eight, ultrahigh resolution design, object space resolution is up to 4.7 μm.
Accompanying drawing explanation
Fig. 1 is lens combination schematic cross-section of the present invention;
Fig. 2 be lens combination of the present invention and from low power to high power change time each lens motion track figure;
Fig. 3 is the image optics simulation spherical aberration data plot of the present invention at low power end;
Fig. 4 is that the present invention is at the bent data plot of the image optics simulation yard of low power end;
Fig. 5 is the image optics simulation distortion data figure of the present invention at low power end;
Fig. 6 is the image optics simulation spherical aberration data plot of the present invention at high power end;
Fig. 7 is that the present invention is at the bent data plot of the image optics simulation yard of high power end;
Fig. 8 is the image optics simulation distortion data figure of the present invention at high power end.
In figure: G1, the first lens combination; G2, the second lens combination; G3, the 3rd lens combination; G4, the 4th lens combination; G5, the 5th lens combination; OP, object plane; S, diaphragm; IP, image planes; 1, the first lens; 2, the second lens; 3, the 3rd lens; 4, the 4th lens; 5, the 5th lens; 6, the 6th lens; 7, the 7th lens; 8, the 8th lens; 9, the 9th lens; 10, the tenth lens; 11, the 11 lens; 12, the 12 lens; 13, the 13 lens; 14, the 14 lens; 15, the 15 lens; 16, the 16 lens.
Embodiment
The specific embodiment of the present invention is introduced below in conjunction with accompanying drawing.
As shown in Figures 1 and 2, a kind of zoom telecentric lens, play image planes IP from object plane OP and comprise successively: the first lens combination G1 with positive refracting power focal power, the second lens combination G2 with positive refracting power focal power, have negative index focal power the 3rd lens combination G3, there is the 4th lens combination G4 of positive refracting power focal power and there is the 5th lens combination G5 of positive refracting power focal power; Wherein, first lens combination G1, the 3rd lens combination G3 and the 5th lens combination G5 are for being fixedly installed, second lens combination G2 and the 4th lens combination G4 is mobile group, when zoom telecentric lens is from low power to high power zoom, second lens combination G2 is close to the first lens combination G1, and the 4th lens combination G4 is close to the 3rd lens combination G3; When described zoom telecentric lens is from high power to low power zoom, the second lens combination G2 is close to the 3rd lens combination G3, and the 4th lens combination G4 is close to the 5th lens combination G5.
Above-mentioned a kind of zoom telecentric lens, also meets following any conditional, or any two conditionals below, or meets following three conditionals simultaneously:
Formula one, 0.2<D0/F1<0.5
Formula two, 1<D22/F22<5
Formula three, 1<|L4|/| L2|<4
Wherein D0 is the distance on first lens 1 summit of object plane OP to the first lens combination G1, F1 is the focal length of the first lens combination G1, | L2|, | L4| is respectively the absolute value of the second lens combination G2, the maximum amount of movement of the 4th lens combination G4 from low power to high power, D22 is the distance of the first lens 5 near the side of object plane OP in each zoom position to image planes IP of the second lens combination G2, and F22 is the combined focal length of the second lens combination G2 to the 5th lens combination G5 in each zoom position.
First lens combination G1 comprises from object plane OP to the first lens 1, second lens 2, the 3rd lens 3 and the 4th lens 4 that image planes IP is arranged in order, first lens 1 are a biconvex lens, second lens 2 are the meniscus convex surface facing object plane, 3rd lens 3 are biconvex lens, 4th lens 4 are biconcave lens, the radius-of-curvature of 3rd lens 3 near the surface of image planes side is identical with the radius-of-curvature of the 4th lens 4 near the surface of object plane side, the 3rd lens 3 and the 4th lens 4 formation balsaming lens glued together.
Second lens combination G2 comprises from object plane OP to the 5th lens 5, the 6th lens 6 and the 7th lens 7 that image planes IP is arranged in order, 5th lens 5 are the meniscus convex surface facing object plane, 6th lens 6 are biconvex lens, 7th lens 7 are biconvex lens, the radius-of-curvature of 5th lens 5 near the surface of image planes side is identical with the radius-of-curvature of the 6th lens 6 near the surface of object plane side, the 5th lens 5 and the 6th lens 6 formation balsaming lens glued together.
3rd lens combination G3 comprises from object plane OP to the 8th lens 8, the 9th lens 9 and the tenth lens 10 that image planes IP is arranged in order, 8th lens 8 are biconcave lens, 9th lens 9 are a biconcave lens, tenth lens 10 are the meniscus convex surface facing object plane, the radius-of-curvature of 9th lens 9 near the surface of image planes IP side is identical with the radius-of-curvature of the tenth lens 10 near the surface of object plane OP side, and the 9th lens and the tenth lens glue are combined formation balsaming lens.
4th lens combination G4 comprises from object plane OP to the 11 lens the 11, the 12 lens the 12 and the 13 lens 13 that image planes IP is arranged in order, 11 lens 11 are a biconvex lens, 12 lens 12 are the meniscus convex surface facing object plane, 13 lens 13 are the meniscus convex surface facing object plane, the radius-of-curvature of 12 lens 12 near the surface of image planes side is identical with the radius-of-curvature of the 13 lens 13 near the surface of object plane side, the 12 lens the 12 and the 13 lens 13 formation balsaming lens glued together.
5th lens combination G5 comprises from object plane 0P to the 14 lens the 14, the 15 lens the 15 and the 16 lens 16 that image planes IP is arranged in order, 14 lens 14 are the concave-convex lens convex surface facing image planes, 15 lens 15 are the meniscus convex surface facing object plane, and the 16 lens 16 are biconvex lens.
The diaphragm S of this zoom telecentric lens is between the 3rd lens combination G3 and the 4th lens combination G4, and in zoom process, diaphragm S position is also independently adjusting variation.
At work, the second lens combination G2 and the 4th lens combination G4 is zoom group, and the 5th lens combination G5 is that zoom compensates and rear Jiao's adjustment group.Because the first lens combination G1, the 3rd lens combination G3 and the 5th lens combination G5 are fixedly installed, second lens combination G2 and the 4th lens combination G4 is mobile group, when the second lens combination G2 is close to the first lens combination G1,4th lens combination G4 is close to the 3rd lens combination G3, just can realize zoom telecentric lens from low power to the zoom of high power; When the second lens combination G2 is close to the 3rd lens combination G3, the 4th lens combination G4 is close to the 5th lens combination G5, just can realize the zoom from high power to low power.In order to reduce telecentricity and the distortion of each zoom position system, each zoom position of diaphragm S is variable by system.
Fig. 3, Fig. 4 and Fig. 5 are the present invention in the simulated data of the spherical aberration of low power end, the curvature of field and distortion.Fig. 6, Fig. 7 and Fig. 8 are the present invention in the simulated data of the spherical aberration of high power end, the curvature of field and distortion.Therefrom known, the present invention is best in quality, especially distorts very little.
Above content is only preferred embodiment of the present invention, and for those of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, this description should not be construed as limitation of the present invention.

Claims (10)

1. a zoom telecentric lens, is characterized in that: play image planes from object plane and comprise successively: first lens combination with positive refracting power focal power, second lens combination with positive refracting power focal power, have negative index focal power the 3rd lens combination, there is the 4th lens combination of positive refracting power focal power and there is the 5th lens combination of positive refracting power focal power; Wherein, first lens combination, the 3rd lens combination and the 5th lens combination are for being fixedly installed, and the second lens combination and the 4th lens combination are mobile group, when zoom telecentric lens is from low power to high power zoom, second lens combination is close to the first lens combination, and the 4th lens combination is close to the 3rd lens combination; When described zoom telecentric lens is from high power to low power zoom, the second lens combination is close to the 3rd lens combination, and the 4th lens combination is close to the 5th lens combination.
2. a kind of zoom telecentric lens according to claim 1, is characterized in that, also meets following any conditional:
Formula one, 0.2<D0/F1<0.5
Formula two, 1<D22/F22<5
Formula three, 1<|L4|/| L2|<4
Wherein D0 is the distance of object plane to the first lens apex of the first lens combination, F1 is the focal length of the first lens combination, | L2|, | L4| is respectively the absolute value of the second lens combination, the maximum amount of movement of the 4th lens combination from low power to high power, D22 is the distance of the first lens near the side of object plane in each zoom position to image planes of the second lens combination, and F22 is the second lens combination to the combined focal length of the 5th lens combination in each zoom position.
3. a kind of zoom telecentric lens according to claim 1, is characterized in that, also meets following any two conditionals:
Formula one, 0.2<D0/F1<0.5
Formula two, 1<D22/F22<5
Formula three, 1<|L4|/| L2|<4
Wherein D0 is the distance of object plane to the first lens apex of the first lens combination, F1 is the focal length of the first lens combination, | L2|, | L4| is respectively the absolute value of the second lens combination, the maximum amount of movement of the 4th lens combination from low power to high power, D22 is the distance of the first lens near the side of object plane in each zoom position to image planes of the second lens combination, and F22 is the second lens combination to the combined focal length of the 5th lens combination in each zoom position.
4. a kind of zoom telecentric lens according to claim 1, is characterized in that, also meets following three conditionals:
Formula one, 0.2<D0/F1<0.5
Formula two, 1<D22/F22<5
Formula three, 1<|L4|/| L2|<4
Wherein D0 is the distance of object plane to the first lens apex of the first lens combination, F1 is the focal length of the first lens combination, | L2|, | L4| is respectively the absolute value of the second lens combination, the maximum amount of movement of the 4th lens combination from low power to high power, D22 is the distance of the first lens near the side of object plane in each zoom position to image planes of the second lens combination, and F22 is the second lens combination to the combined focal length of the 5th lens combination in each zoom position.
5. a kind of zoom telecentric lens according to claim 1 or 2 or 3 or 4, it is characterized in that: the first lens combination comprises from object plane to the first lens that image planes are arranged in order, second lens, 3rd lens and the 4th lens, first lens are a biconvex lens, second lens are the meniscus convex surface facing object plane, 3rd lens are biconvex lens, 4th lens are biconcave lens, the radius-of-curvature of 3rd lens near the surface of image planes side is identical with the radius-of-curvature of the 4th lens near the surface of object plane side, 3rd lens and the 4th lens glue are combined formation balsaming lens.
6. a kind of zoom telecentric lens according to claim 1 or 2 or 3 or 4, it is characterized in that: the second lens combination comprises from object plane to the 5th lens, the 6th lens and the 7th lens that image planes are arranged in order, 5th lens are the meniscus convex surface facing object plane, 6th lens are biconvex lens, 7th lens are biconvex lens, the radius-of-curvature of 5th lens near the surface of image planes side is identical with the radius-of-curvature of the 6th lens near the surface of object plane side, and the 5th lens and the 6th lens glue are combined formation balsaming lens.
7. a kind of zoom telecentric lens according to claim 1 or 2 or 3 or 4, it is characterized in that: the 3rd lens combination comprises from object plane to the 8th lens, the 9th lens and the tenth lens that image planes are arranged in order, 8th lens are biconcave lens, 9th lens are a biconcave lens, tenth lens are the meniscus convex surface facing object plane, the radius-of-curvature of 9th lens near the surface of image planes side is identical with the radius-of-curvature of the tenth lens near the surface of object plane side, and the 9th lens and the tenth lens glue are combined formation balsaming lens.
8. a kind of zoom telecentric lens according to claim 1 or 2 or 3 or 4, it is characterized in that: the 4th lens combination comprises from object plane to the 11 lens that image planes are arranged in order, 12 lens and the 13 lens, 11 lens are a biconvex lens, 12 lens are the meniscus convex surface facing object plane, 13 lens are the meniscus convex surface facing object plane, the radius-of-curvature of 12 lens near the surface of image planes side is identical with the radius-of-curvature of the 13 lens near the surface of object plane side, 12 lens and the 13 lens glue are combined formation balsaming lens.
9. a kind of zoom telecentric lens according to claim 1 or 2 or 3 or 4, it is characterized in that: the 5th lens combination comprises from object plane to the 14 lens, the 15 lens and the 16 lens that image planes are arranged in order, 14 lens are the concave-convex lens convex surface facing image planes, 15 lens are the meniscus convex surface facing object plane, and the 16 lens are biconvex lens.
10. a kind of zoom telecentric lens according to claim 1 or 2 or 3 or 4, is characterized in that: the diaphragm of this zoom telecentric lens is between the 3rd lens combination and the 4th lens combination, and in zoom process, stop position is also independently adjusting variation.
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CN107329352A (en) * 2017-08-09 2017-11-07 深圳市安华光电技术有限公司 A kind of projection lens and optical projection system
CN109164559A (en) * 2018-10-11 2019-01-08 佛山科学技术学院 A kind of large-numerical aperture near-infrared image bilateral telecentric optical system
CN109633875A (en) * 2019-01-14 2019-04-16 广东奥普特科技股份有限公司 It is a kind of can continuous zoom telecentric lens
CN109975962A (en) * 2019-04-16 2019-07-05 佛山科学技术学院 A kind of bilateral telecentric optical system with long reach
CN110196487A (en) * 2019-06-17 2019-09-03 上海帆声图像科技有限公司 A kind of telecentric lens
CN110849266A (en) * 2019-11-28 2020-02-28 江西瑞普德测量设备有限公司 Telecentric lens telecentricity debugging method of image measuring instrument
CN110989137A (en) * 2019-12-20 2020-04-10 东莞市普密斯精密仪器有限公司 Double-telecentric lens
US10670842B2 (en) 2017-01-26 2020-06-02 Navitar, Inc. High Etendue zoom lens having five lens groups
CN115657283A (en) * 2022-12-12 2023-01-31 图湃(北京)医疗科技有限公司 Operation microscope continuous zoom system and operation microscope

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