CN104344849A - Semiconductor measuring device - Google Patents
Semiconductor measuring device Download PDFInfo
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- CN104344849A CN104344849A CN201310312631.2A CN201310312631A CN104344849A CN 104344849 A CN104344849 A CN 104344849A CN 201310312631 A CN201310312631 A CN 201310312631A CN 104344849 A CN104344849 A CN 104344849A
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Abstract
The invention relates to a semiconductor measuring device. The semiconductor measuring device comprises at least one sensor for detecting onsite parameters, and a microcontroller in communication connection with the at least one sensor, wherein the microcontroller supports a wireless communication protocol, and the sensor communicates with the microcontroller through the wireless communication protocol so as to acquire sensor data at each position of the sensor measuring device. According to the invention, the semiconductor measuring device employs the wireless communication protocol to replace a conventional wired cable, such that the structural complexity of the semiconductor measuring device is greatly reduced, networking is facilitated, replacement of a fault component can be realized in a quite simple manner in case that a fault is generated at a certain sensor, and the complex wiring problem does not have to be involved.
Description
Technical field
The present invention relates to field of measuring technique, more specifically, relate to a kind of Measurement of Semiconductors equipment of the wireless sensor technology based on wireless communication technology.
Background technology
Need in Measurement of Semiconductors equipment to measure multiple environmental parameter, as multiple sensors such as temperature, humidity, differential pressure, vacuum, compression pressure, flows, sensor location, all takes cable to connect in Measurement of Semiconductors equipment everywhere at present.And in existing design, in Measurement of Semiconductors equipment everywhere, cable is numerous for sensor location, tens more than, cabling is numerous and diverse, installs inconvenience, if break down, is difficult to investigation, changes.Measurement of Semiconductors equipment downtime maintenance spended time is long, with high costs.
On the other hand, Measurement of Semiconductors equipment reduces along with process node, and measuring accuracy is more and more higher, more and more harsher to the requirement of the inner microenvironment of semiconductor measuring equipment.Need the moment to monitor the parameters such as the multichannel temperature in many places, humidity, air pressure difference whether to be in normal range.The many places physical quantity such as vacuum, compression pressure, flow of the device interior of Measurement of Semiconductors simultaneously also needs the moment to monitor, to avoid abnormal situation on the impact of measurement result.
Summary of the invention
The problem that the present invention solves is that the cable that Measurement of Semiconductors equipment brings the inner many places multiple sensors measurement of semiconductor measuring equipment is numerous, cabling is difficult, be difficult to the problems such as installation, fault diagnosis and maintenance.
In view of the understanding to background technology and wherein existing problem, namely similar devices is not had to adopt wireless sensor network at present, if each sensor a kind of embedded microcontroller collection by support of wireless communication agreement in installation site can be provided, pass through wireless technology, such as ZigBee technology etc. are networked, and transfer data to main frame.Make environment collection not need cable completely, and malfunction elimination is extremely convenient, only needs to replace problematic sensor assembly, greatly reduce the time that Measurement of Semiconductors equipment downtime is safeguarded, that will be Worth Expecting.
In order to reach above-mentioned effect, according to an aspect of the present invention, providing a kind of Measurement of Semiconductors equipment, it is characterized in that, described Measurement of Semiconductors equipment comprises:
For at least one sensor of Test Field parameter;
Microcontroller, it is connected with at least one sensor communication ground described,
Wherein, described microcontroller support of wireless communication agreement and described sensor are communicated by wireless communication protocol with described microcontroller, to gather described Measurement of Semiconductors equipment sensing data everywhere.
Wireless communication protocol is adopted to instead of traditional wire cable according to Measurement of Semiconductors equipment of the present invention, thus greatly reduce the structural complexity of Measurement of Semiconductors equipment, be convenient to networking, also can be fairly simple when certain sensor failure realize the replacing of fault components and parts, and without the need to relating to complicated wiring problem.
In foundation one embodiment of the present of invention, described wireless communication protocol is Zigbee wireless communication protocol.
According in one embodiment of the present of invention, it is at least one or more that described on-site parameters comprises in the following:
-temperature;
-humidity;
-pressure reduction;
-vacuum pressure;
-compressed air pressure;
-gas flow; And/or
-fluid flow.
In foundation one embodiment of the present of invention, at least one sensor described utilizes wireless communication protocol networking, to form the wireless measurement LAN (Local Area Network) not needing cable.
In foundation one embodiment of the present of invention, at least one sensor described adopts super low-power consumption signals collecting and conversion circuit.By this way, thus reduce the energy resource consumption of at least one sensor described, thus improve efficiency of energy utilization, and provide favourable condition for follow-up energy source optimization.
In foundation one embodiment of the present of invention, described microcontroller adopts the circuit of the support of wireless communication agreement of super low-power consumption.By this way, thus reduce the energy resource consumption of at least one sensor described, thus improve efficiency of energy utilization, and provide favourable condition for follow-up energy source optimization.
In foundation one embodiment of the present of invention, described microcontroller adopts powered battery.Wherein, described battery can be lithium battery.
In foundation one embodiment of the present of invention, at least one sensor described adopts powered battery.By this way, make at least one sensor described also without the need to the support of the power cable of complexity, and only need battery to power, thus further simplify the structure according to Measurement of Semiconductors equipment of the present invention.
Decrease the cable in semiconductor equipment according to Measurement of Semiconductors equipment of the present invention, be convenient to install, safeguard.Each sensor assembly uses lithium battery power supply, adopts the microcontroller collection of the band home control network communication protocol of super low-power consumption and is sent on device Host.Single charge can support more than 1 year.
In addition, each sensor assembly does not need cable, saves the device space, reduces Measurement of Semiconductors equipment size.Convenient installation, is easy to fault diagnosis and maintenance, reduces Measurement of Semiconductors equipment downtime maintenance time.Improve Measurement of Semiconductors capacity utilization.
Owing to have employed technique scheme, compared with prior art, the present invention has the following advantages:
1, numerous sensor assemblies of device interior dispersion no longer need cable to connect, and need slot milling for the difficulty of cable wiring when avoiding Measurement of Semiconductors equipment de-sign.Reduce Measurement of Semiconductors equipment size, save Measurement of Semiconductors occupation area of equipment, FAB factory floor space is with high costs, reduces floor area and reduces user cost exactly.
2, sensor assembly is convenient installs, and is easy to fault diagnosis maintenance.If main frame can't accept data; only need directly to replace fault sensor module; do not need to go investigation trouble spot to be sensor itself or cable causes in numerous control, power cable, greatly reduce the Measurement of Semiconductors equipment downtime that breakdown maintenance causes.Semiconductor equipment is expensive, and shutdown maintenance is huge to the loss of FAB factory.Mean the utilization factor that greatly can improve Measurement of Semiconductors equipment the servicing time significantly reduced.
Specific embodiment part is hereinafter set forth by above characteristic of the present invention and other characteristics clearly.
Accompanying drawing explanation
Read the following detailed description to non-limiting example by referring to accompanying drawing, more easily can understand features, objects and advantages of the invention.Wherein, same or analogous Reference numeral represents same or analogous device.
Fig. 1 is Measurement of Semiconductors device interior wireless sensor network schematic diagram;
Fig. 2 is wireless sensor module circuit diagram.
In the accompanying drawings, identical or corresponding label represents identical or corresponding part.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.But, should be appreciated that discussed specific embodiment only exemplarily illustrates and implement and use ad hoc fashion of the present invention, but not limit the scope of the invention.
Fig. 1 shows Measurement of Semiconductors device interior wireless sensor network and illustrates Figure 100.It utilizes the microcontroller of support of wireless communication agreement, gather Measurement of Semiconductors device distribution in Measurement of Semiconductors device interior sensing data everywhere, by Zigbee wireless protocols, by numerous sensors composition LAN, master control Measurement of Semiconductors equipment computer will be transferred to by sensing data everywhere.As can be seen from the figure, multiple sensor assembly composition Zigbee LAN, by one piece of microcontroller circuit as route, communicates with host computer, various sensor measurement is passed to host computer.This Measurement of Semiconductors equipment comprises multiple wireless senser, these sensors are arranged on the particular location needing to measure corresponding parameter, wherein, these sensors can be the various sensors being adapted to demand, the such as sensor of temperature, pressure, air pressure, flow velocity etc., thus measure various parameter, be transferred to microcontroller by wireless communication protocol after these parameters are detected, thus make microcontroller can obtain desired sensing data.Particularly, comprise according to Measurement of Semiconductors equipment of the present invention: at least one sensor of Test Field parameter; Microcontroller, it is connected with at least one sensor communication ground, and wherein, microcontroller support of wireless communication agreement and sensor are communicated by wireless communication protocol with microcontroller, to gather Measurement of Semiconductors equipment sensing data everywhere.
Wireless communication protocol is adopted to instead of traditional wire cable according to Measurement of Semiconductors equipment of the present invention, thus greatly reduce the structural complexity of Measurement of Semiconductors equipment, be convenient to networking, also can be fairly simple when certain sensor failure realize the replacing of fault components and parts, and without the need to relating to complicated wiring problem.
In foundation one embodiment of the present of invention, wireless communication protocol is Zigbee wireless communication protocol.
Alternatively, what on-site parameters comprised in the following is at least one or more: temperature, humidity, pressure reduction, vacuum pressure, compressed air pressure, gas flow and/or fluid flow.
Preferably, at least one sensor utilizes wireless communication protocol networking, to form the wireless measurement LAN (Local Area Network) not needing cable.
Preferably, at least one sensor adopts super low-power consumption signals collecting and conversion circuit.By this way, thus reduce the energy resource consumption of at least one sensor, thus improve efficiency of energy utilization, and provide favourable condition for follow-up energy source optimization.
Particularly preferably, microcontroller adopts the circuit of the support of wireless communication agreement of super low-power consumption.By this way, thus reduce the energy resource consumption of at least one sensor, thus improve efficiency of energy utilization, and provide favourable condition for follow-up energy source optimization.
Preferably, microcontroller adopts powered battery.Wherein, battery can be lithium battery.
Advantageously, at least one sensor adopts powered battery.By this way, make at least one sensor also without the need to the support of the power cable of complexity, and only need battery to power, thus further simplify the structure according to Measurement of Semiconductors equipment of the present invention.
Decrease the cable in semiconductor equipment according to Measurement of Semiconductors equipment of the present invention, be convenient to install, safeguard.Each sensor assembly uses lithium battery power supply, adopts the microcontroller collection of the band home control network communication protocol of super low-power consumption and is sent on device Host.Single charge can support more than 1 year.
In addition, each sensor assembly does not need cable, saves the device space, reduces Measurement of Semiconductors equipment size.Convenient installation, is easy to fault diagnosis and maintenance, reduces Measurement of Semiconductors equipment downtime maintenance time.Improve Measurement of Semiconductors capacity utilization.
Owing to have employed technique scheme, compared with prior art, the present invention has the following advantages:
First, numerous sensor assemblies of device interior dispersion no longer need cable to connect, and need slot milling for the difficulty of cable wiring when avoiding Measurement of Semiconductors equipment de-sign.Reduce Measurement of Semiconductors equipment size, save Measurement of Semiconductors occupation area of equipment, FAB factory floor space is with high costs, reduces floor area and reduces user cost exactly.
Secondly, sensor assembly is convenient to be installed, and is easy to fault diagnosis maintenance.If main frame can't accept data; only need directly to replace fault sensor module; do not need to go investigation trouble spot to be sensor itself or cable causes in numerous control, power cable, greatly reduce the Measurement of Semiconductors equipment downtime that breakdown maintenance causes.Semiconductor equipment is expensive, and shutdown maintenance is huge to the loss of FAB factory.Mean the utilization factor that greatly can improve Measurement of Semiconductors equipment the servicing time significantly reduced.
Fig. 2 shows the schematic diagram of single wireless sensor module 200, as can be seen from the figure, each sensor assembly includes the sensor 210 generating sensor signal, and this sensor signal is changed 220 by signal subsequently and is converted to digital signal, to facilitate follow-up process; Next, send via radio communication circuit 240 after treatment in microcontroller 230.Wherein, all battery-powered circuit 250 of whole wireless sensor module 200 is powered, and so just makes to change the support of wireless sensor module without the need to the cable of complexity, easy to use.
Single-sensor module is made up of circuit such as sensor, signal conversion, microcontroller, radio communication, powered battery.Sensor has temperature, humidity, differential pressure, vacuum pressure, compression pressure, gas flow etc. multiple.Signal conversion converts sensor signal to digital signal, is responsible for collection by microcontroller, and microcontroller is the embedded microcontroller supporting Zigbee, and battery circuit is responsible for module for power supply.Whole module adopts low power dissipation design, and the battery altering cycle is 1 year or longer.Microcontroller gathers cell voltage simultaneously and sends to host computer, if desired changes battery and then on software interface, provides prompting by host computer.
Although describe the present invention with reference to some embodiments, should be appreciated that, the present invention is not limited to disclosed embodiment.The present invention is intended to contain the interior included various amendment of spirit and scope and the equivalent arrangements of claims.The scope of claims meets the most wide in range explanation, thus comprises all such amendments and equivalent structure and function.
Claims (8)
1. a Measurement of Semiconductors equipment, is characterized in that, described Measurement of Semiconductors equipment comprises:
For at least one sensor of Test Field parameter;
Microcontroller, it is connected with at least one sensor communication ground described,
Wherein, described microcontroller support of wireless communication agreement and described sensor are communicated by wireless communication protocol with described microcontroller, to gather described Measurement of Semiconductors equipment sensing data everywhere.
2. Measurement of Semiconductors equipment according to claim 1, is characterized in that, described wireless communication protocol is Zigbee wireless communication protocol.
3. Measurement of Semiconductors equipment according to claim 1, is characterized in that, it is at least one or more that described on-site parameters comprises in the following:
-temperature;
-humidity;
-pressure reduction;
-vacuum pressure;
-compressed air pressure;
-gas flow; And/or
-fluid flow.
4. Measurement of Semiconductors equipment according to claim 1, is characterized in that, at least one sensor described utilizes wireless communication protocol networking, to form the wireless measurement LAN (Local Area Network) not needing cable.
5. Measurement of Semiconductors equipment according to claim 1, is characterized in that, at least one sensor described adopts super low-power consumption signals collecting and conversion circuit.
6. Measurement of Semiconductors equipment according to claim 1, is characterized in that, described microcontroller adopts the circuit of the support of wireless communication agreement of super low-power consumption.
7. Measurement of Semiconductors equipment according to claim 6, is characterized in that, described microcontroller adopts powered battery.
8. according to Measurement of Semiconductors equipment in any one of the preceding claims wherein, it is characterized in that, at least one sensor described adopts powered battery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310312631.2A CN104344849A (en) | 2013-07-23 | 2013-07-23 | Semiconductor measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310312631.2A CN104344849A (en) | 2013-07-23 | 2013-07-23 | Semiconductor measuring device |
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| CN104344849A true CN104344849A (en) | 2015-02-11 |
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| CN201310312631.2A Pending CN104344849A (en) | 2013-07-23 | 2013-07-23 | Semiconductor measuring device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104777190A (en) * | 2015-04-13 | 2015-07-15 | 南京祥源动力供应有限公司 | Online detection device for compressed air humidity |
-
2013
- 2013-07-23 CN CN201310312631.2A patent/CN104344849A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104777190A (en) * | 2015-04-13 | 2015-07-15 | 南京祥源动力供应有限公司 | Online detection device for compressed air humidity |
| CN104777190B (en) * | 2015-04-13 | 2017-08-29 | 南京祥源动力供应有限公司 | A kind of on-line water flushing device of compressed air humidity |
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Application publication date: 20150211 |