CN104343687A - Scroll vacuum pump with magnetofluid horizontal moving sliding thrust bearing and sealing structure - Google Patents
Scroll vacuum pump with magnetofluid horizontal moving sliding thrust bearing and sealing structure Download PDFInfo
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- CN104343687A CN104343687A CN201310330740.7A CN201310330740A CN104343687A CN 104343687 A CN104343687 A CN 104343687A CN 201310330740 A CN201310330740 A CN 201310330740A CN 104343687 A CN104343687 A CN 104343687A
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- Prior art keywords
- rear support
- scrollwork
- vacuum pump
- magnetic
- face
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
Abstract
The invention discloses a scroll vacuum pump with a magnetofluid horizontal moving sliding thrust bearing and a sealing structure. The pump comprises a magnetofluid sealing device; the magnetofluid sealing device comprises a permanent magnet and a magnetizer; the permanent magnet is placed inside a piston rear support; the magnetizer is placed inside a thrust plate; meanwhile, magnetic flow liquid is injected into a gap between the magnetizer and the radial end face of the piston rear support. By the adoption of the pump, the magnetofluid sealing device is adopted in the winding end face of the vacuum pump; when a crank rotates, a piston front support and the piston rear support are driven to do radial winding relative to the thrust plate, and a closed magnetic field is generated between the permanent magnet and the magnetizer; the magnetic flow liquid forms a plurality of layers of closed magnetofluid O-shaped rings between a groove and the magnetizer; the magnetic flow liquid is utilized for achieving sealing of the scroll vacuum pump in the radial winding direction. Meanwhile, when the thrust plate is in contact with two planes of the piston rear support, the magnetic flow liquid can generate sliding thrust action under the action of a magnetic field, and therefore the effect is approximate to that of the sliding thrust bearing.
Description
Technical field
The present invention relates to a kind of technical field of vacuum pump, particularly relate to a kind of technical field with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration.
Background technique
At present, it is gas-insulated that Magneticfluid Seal Technique has been used in axial rotation, for replacing traditional mechanical sealing element in vacuum pump; Magneticfluid Seal Technique develops on the basis of magnetic fluid.When magnetic current liquid injects the gap in magnetic field, it can be full of whole gap, is formed a kind of " the O RunddichtringO of liquid ".The function of device for sealing magnetic fluid is that rotary motion is delivered in seal container, but by the gap seals between running shaft and bearing, is usually used in vacuum seal.Fig. 1 is a kind of schematic diagram adopting device for sealing magnetic fluid, shown in Figure 1.Comprise axle 11 and be positioned at the housing 15 on axle 11, some seal grooves 12 are offered on the axle surface of axle 11, housing 15 is equipped with two annular magnetic poles 13, two annular magnetic poles 13 are corresponding with seal groove 12, and between two annular magnetic poles 13, permanent magnet 14 is housed, meanwhile, magnetic current liquid (not shown) is marked with between two annular magnetic poles 13 and the axle surface of axle 11.Device for sealing magnetic fluid, under the effect of uniform steady magnetic field, makes magnetic current liquid riddle in the space of setting, namely between two magnetic poles and axle surface, sets up multistage " O RunddichtringO ", thus reaches the effect of sealing.Every grade of seal ring generally can bear and be greater than 0.15 to 0.2 atmospheric pressure reduction.Total pressure-bearing is pressure reduction sums at different levels, is generally designed to 2.5 barometric pressure, meets vacuum-packed needs completely.
Device for sealing magnetic fluid is in this sealing component, and sealing material " magnetic current liquid " used is a kind of liquid material, only has the contact between " liquid " and solid, do not have the friction between in conventional seals and solid matter, wear problem in rotating member.Thus can ensure that the reliable and stable of sealability and long lifetime are run.And magnetic current liquid is that the magnetic force produced by permanent magnet is fixed in sealing, does not need to improve sealability by increasing external force, therefore not needing the power additionally considering that magnetic fluid seal driving device consumes, there is excellent torque transmitting characteristic.Meanwhile, device for sealing magnetic fluid has high-performance and almost leak free feature.Such as to the sealing of helium, tested by Static and dynamic, at standard temperature and pressure, measuring limit degree of vacuum 10
-6pa, leakage rate is less than 1 × 10
-12pam
3/ s, is close to as " zero leakage ".
Fig. 2 is the schematic diagram of a kind of magnetic fluid seal structure for driving-axle of the patent No. 02223660.0, shown in Figure 2.Be made up of transmission shaft 24, support housing 21 and magnet fluid sealing assembly 25, it is characterized in that on the top of the interval L of the magnet fluid sealing of the magnet fluid sealing assembly 25 be made up of permanent magnet 26, pole shoe 27 and magnetic liquid, near vacuum chamber side, an additional magnet ring 23 be housed; On the downside of the interval L of magnet fluid sealing, a bearing 22 is respectively set with additional magnet ring 23 top.The splashing that the magnetic current liquid effectively can eliminating spilling rotates with the axis and produces, thus the reliability improving magnet fluid sealing further.Magnetic fluid sealing structure shown in Fig. 2 is also the application occasion of existing conventional magnetic fluid sealing structure.
Fig. 3 be the improvement of the patent No. ZL200610121150.3 authorizing the present inventor there is the comprehensive schematic diagram complying with the scroll fluid displacement device of suspension swirl, comprising: at least one moving scrollwork 300,
300 ', there is the first end plate 310,310 ', at the first end plate 310, the basal plane of 310 ' is fixedly connected the sidewall of the first screw type, the first end plate 310, has the peripheral part 320a that three substantially uniform on 310 ', 320a ', wherein 320b, 320b ', 320c, 320c ' not shown; At least one fixed scroll 330,330 ', the basal plane of the second end plate 340,340 ' is fixedly connected the sidewall of the second screw type, and the first screw type sidewall of the second described screw type sidewall and described moving scrollwork 300,300 ' intermeshes; A rotating driveshaft 350, can drive described moving scrollwork 300,300 ', makes it to do the orbiting relative to described fixed scroll 330,330 '; Casing 360,360 ', described casing 360, fixed scroll 330,330 ' described in 360 ' support, 360 of casing, rotating driveshaft 350 described in 360 ' middle body supporting, this casing 360,360 ' has three peripheral part 370a, 370a ', wherein 370b, 370b ', 370c, 370c ' not shown, with above-mentioned moving scrollwork 300, first end plate 310 of 300 ', three peripheral part 320a on 310 ', 320a ' is corresponding; Three substantially uniform periphery crank 380a, 380a ', wherein 380b, 380b ', 380c, 380c ' and not shown, respectively supported by corresponding three peripheral part 370a, one of 370a ' of described casing 360,360 ', and can rotate.In order to make crank joint keep synchronous, synchronizer 390 is by synchronizer bearing 391a, 391b and 391c and periphery crank pin 381a, 381b with 381c is connected, and wherein, 391b, 391c, 381b and 381c are not shown.The orbiting similar to moving scrollwork done by synchronizer 390, again three periphery crank pins kept a leg-of-mutton position relationship simultaneously, namely keeps synchronous.This invention is by the motion of moving between moving scrollwork and fixed scroll, and---arthrodia is in conjunction with periphery crank pin---swinging connection mechanism provides radial and axial ability of complying with motion for moving scrollwork by a center driven crankshaft.
In order to make to realize air exclusion and the long lifetime use of degree of vacuum at vacuum pump at moving end face, traditional kinetic friction auxiliary structure does not reach seal request, simultaneously, friction pair also needs machine oil to carry out Cooling and Lubricator, oil-free dry pump is caused to bring problem on oil sealing, and only have device for sealing magnetic fluid can realize seal request at present, meanwhile, magnetic fluid sealing structure did not also use on such device.
Summary of the invention
The object of the present invention is to provide the scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, device for sealing magnetic fluid technology is applied on vacuum pump, utilize magnetic current liquid to realize the moving direction sealing of scroll vacuum pump, solve with this problem that existing vacuum pump does not reach seal request.Meanwhile, realized the effect of slope thrust by magnetic current liquid, make effect be similar to slide thrust bearing.
To achieve these goals, according to the difference of device for sealing magnetic fluid riding position, the technological scheme that the present invention takes is divided into two kinds of modes:
One, device for sealing magnetic fluid is placed between piston rear support and thrust plate.Two, device for sealing magnetic fluid is placed between moving scrollwork and scrollwork pedestal.
Have the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration, described vacuum pump comprises: a fixed scroll; One relatively described fixed scroll does the moving scrollwork of moving motion; One is positioned at the scrollwork pedestal outside described fixed scroll; One thrust plate be connected with described scrollwork seat surface opposite, and the central authorities of described thrust plate offer emptiness avoiding hole; One bent axle, the eccentric segment of described bent axle runs through the emptiness avoiding hole of described thrust plate and is connected with the back side of described moving scrollwork; And a bent axle pedestal, described bent axle is positioned on described bent axle pedestal, and described bent axle pedestal is fixedly connected with described scrollwork pedestal with described thrust plate; Wherein, described vacuum pump also comprises: a piston rear support, described piston rear support is connected to the eccentric shaft section surface of described bent axle near the side of described thrust plate by bearing, the central annular boss of described piston rear support can run through to moving the emptiness avoiding hole of described thrust plate, and is connected with the back side of described moving scrollwork by bearing before a piston; The remaining part of described piston rear support and the radial end face of described thrust plate close to each other, and described piston rear support just offers some equally spaced first ring connected in stars to the radial end face of described thrust plate; One device for sealing magnetic fluid, described device for sealing magnetic fluid comprises permanent magnet and magnet case; Described permanent magnet is placed in the inside of described piston rear support, and just to some described first ring connected in stars; Described magnet case is placed in the inside of described thrust plate, and just to described permanent magnet; Meanwhile, magnetic current liquid is marked with in the gap between the radial end face of described magnet case and described piston rear support.
There is the encapsulating method of the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration: wherein, when described crank rotation, described piston secondary piston rear support described thrust plate relative to described piston rear support is driven to do radial moving, magnetic confining field is produced between described permanent magnet and described magnet case, described magnetic current liquid is full of in the radial end face of described piston rear support and the gap of described thrust plate, with this formed between described first ring connected in star and magnet case play seal action multilayer close " magnetic fluid O type circle "; Meanwhile, when two planes of described thrust plate and described piston rear support contact with each other, the magnetic current liquid under magnetic fields can produce the effect of slope thrust.
Have the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration, described vacuum pump comprises: a fixed scroll; One relatively described fixed scroll does the moving scrollwork of moving motion; One is positioned at the scrollwork pedestal outside described fixed scroll; One thrust plate be connected with described scrollwork seat surface opposite, and the central authorities of described thrust plate offer emptiness avoiding hole; One bent axle, the eccentric segment of described bent axle runs through the emptiness avoiding hole of described thrust plate and is connected with the back side of described moving scrollwork; And a bent axle pedestal, described bent axle is positioned on described bent axle pedestal, and described bent axle pedestal is fixedly connected with described scrollwork pedestal with described thrust plate; Wherein, described vacuum pump also comprises: a piston rear support, described piston rear support is connected to the eccentric shaft section surface of described bent axle near the side of described thrust plate by bearing, the central annular boss of described piston rear support can run through to moving the emptiness avoiding hole of described thrust plate, and is connected with the back side of described moving scrollwork by bearing before a piston; The remaining part of described piston rear support and the radial end face of described thrust plate close to each other; Described moving scrollwork just offers some equally spaced second annular grooves to the radial end face of described scrollwork pedestal; One device for sealing magnetic fluid, described device for sealing magnetic fluid comprises permanent magnet and magnet case; Described permanent magnet is placed in the inside of described moving scrollwork, and just to some described second annular grooves; Described magnet case is placed in the inside of described scrollwork pedestal, and just to described permanent magnet; Meanwhile, magnetic current liquid is marked with in the gap between the radial end face of described magnet case and described moving scrollwork.
There is the encapsulating method of the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration: wherein, when described crank rotation, described crank rotation drives the relatively described fixed scroll of described moving scrollwork and described scrollwork pedestal to do moving motion, magnetic confining field is produced between described permanent magnet and described magnet case, described magnetic current liquid is full of in the radial end face of described moving scrollwork and the gap of described scrollwork pedestal, with this formed between described second annular groove and described magnet case play seal action multilayer close " magnetic fluid O type circle ".
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, described magnet case near the end face coating of described magnetic current liquid play converge the effect of magnetic current liquid detest magnetic current liquid coating, described in detest magnetic current liquid coating be teflon.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, the sectional shape of the bulge loop described in adjacent two between first ring connected in star is rectangle; Or the head of the bulge loop described in adjacent two between first ring connected in star is fillet; Or the sectional shape of the bulge loop described in adjacent two between first ring connected in star is triangle; Or the sectional shape of the bulge loop described in adjacent two between second annular groove is rectangle; Or the head of the bulge loop described in adjacent two between second annular groove is fillet; Or the sectional shape of the bulge loop described in adjacent two between second annular groove is triangle.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, described in each, the degree of depth of first ring connected in star is all identical with width; Or the degree of depth of the second annular groove is all identical with width described in each.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, on the radial end face of described piston rear support, outwardly convex forms one first annular retaining ring, and some described first ring connected in stars are positioned within described first annular retaining ring; Or on the radial end face of described moving scrollwork, outwardly convex forms one second annular retaining ring, and some described second annular grooves are positioned at described second annular retaining ring.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, the height of described first annular retaining ring is lower than the gap between described magnet case and the radial end face of described piston rear support; The height of described second annular retaining ring is lower than the gap between described magnet case and the radial end face of described moving scrollwork.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, described fixed scroll has a first end plate structure, described first end plate structure is fixed and stretches out to be provided with one first structure of scroll; Described moving scrollwork has one second tip plate configurations, described second tip plate configurations is fixed and stretches out to be provided with one second structure of scroll; Meanwhile, the described first end plate structure of described fixed scroll and described second tip plate configurations of described moving scrollwork close to each other face-to-face.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, assembles a synchronizing ring (also known as synchronizer) between described thrust plate and described moving scrollwork.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, before the central annular boss of described piston rear support and described piston bearing joint between be provided with an O RunddichtringO.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, described bent axle connects needle bearing and angular contact bearing away from the non-eccentric segment surface of axle of the side of described moving scrollwork.
The above-mentioned scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration, wherein, described piston rear support is connected with the eccentric shaft section surface of described bent axle by angular contact bearing.
The present invention is owing to have employed above-mentioned technology, and the good effect making it compared with prior art to have is:
Device for sealing magnetic fluid is adopted by the moving end face at vacuum pump, when the crank shaft rotates, before driving piston, bearing and piston rear support relative force plate do radial moving, magnetic confining field is produced between permanent magnet and magnet case, under the influence of a magnetic field, when magnetic current liquid injects the gap in magnetic field, namely in the radial end face of piston rear support and the gap of thrust plate, magnetic current liquid is full of whole gap, forms multilayer closed " magnetic fluid O type circle " with this between first ring connected in star and magnet case.Simultaneously, the relative fixed scroll of moving scrollwork and scrollwork pedestal can be driven when the crank shaft rotates to do moving motion, magnetic confining field is produced between permanent magnet and magnet case, under the influence of a magnetic field, when magnetic current liquid injects the gap in magnetic field, namely in the radial end face of moving scrollwork and the gap of scrollwork pedestal, magnetic current liquid is full of whole gap, forms with this " magnetic fluid O type circle " that multilayer closes between the second annular groove and magnet case.Utilize magnetic current liquid to realize the sealing in the radial moving direction of scroll vacuum pump, what make to realize on the contact surface between sealing surface is contactless, gas-insulated without consume, realizes the seal request of vacuum pump.Meanwhile, when two planes of thrust plate and piston rear support contact with each other, the magnetic current liquid under magnetic fields can produce the effect of slope thrust, makes effect be similar to slide thrust bearing.
Accompanying drawing explanation
Fig. 1 is a kind of schematic diagram adopting device for sealing magnetic fluid;
Fig. 2 is the schematic diagram of a kind of magnetic fluid seal structure for driving-axle of the patent No. 02223660.0;
Fig. 3 be the improvement of patent No. ZL200610121150.3 there is the comprehensive schematic diagram complying with the scroll fluid displacement device of suspension swirl;
Fig. 4 is the schematic diagram with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration of the present invention;
Fig. 5 is the enlarged view at A place in Fig. 4;
Fig. 6 is the piston rear support of Fig. 4 intermediate pump and the schematic diagram of thrust plate;
Fig. 7 is the moving magnetic current liquid sealing schematic diagram with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration of the present invention;
Fig. 8 is the first scheme schematic diagram of the groove of piston rear support radial end face in Fig. 5;
Fig. 9 is the first scheme schematic diagram of the groove of piston rear support radial end face in Fig. 5;
Figure 10 is the third scheme schematic diagram of the groove of piston rear support radial end face in Fig. 5;
Figure 11 is that in Fig. 4, device for sealing magnetic fluid is placed in the schematic diagram between moving scrollwork and scrollwork pedestal.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, but not as limiting to the invention.
One, device for sealing magnetic fluid is placed between piston rear support and thrust plate.
Fig. 4 is the schematic diagram with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration of the present invention, Fig. 5 is the enlarged view at A place in Fig. 4, Fig. 6 is the piston rear support of Fig. 4 intermediate pump and the schematic diagram of thrust plate, Fig. 7 is the moving magnetic current liquid sealing schematic diagram with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration of the present invention, refers to shown in Fig. 4 to Fig. 7.The scroll vacuum pump with magnetic fluid translation slide thrust bearing and sealing configuration of the present invention, this vacuum pump includes a fixed scroll 40, one is positioned at the scrollwork pedestal 43 outside this fixed scroll 40, fixed scroll 40 has a first end plate structure 41, this first end plate structure 41 is fixed with the first structure of scroll 42, and this first structure of scroll 42 is fixed thereon and stretches out thus.One moving scrollwork 50, this moving scrollwork 50 has one second tip plate configurations 51, and this second tip plate configurations 51 is fixed with the second structure of scroll 52, and this second structure of scroll 52 is fixed thereon; Simultaneously, the first end plate structure 41 being provided with the first structure of scroll 42 is close to each other with the second tip plate configurations 51 being provided with the second structure of scroll 52, make to engage each other formation linear contact lay between the molded line side of the molded line side of the first structure of scroll 42 and the second structure of scroll 52, and the end face of the end face of the first structure of scroll 42 and the second structure of scroll 52 is butted in the second tip plate configurations 51 and first end plate structure 41 respectively, and keep the phase angle displacement of 180 ° and the radial displacement equaling moving radius R or.One thrust plate 53, this thrust plate 53 is connected face-to-face with scrollwork pedestal 43.An emptiness avoiding hole 54 is offered in the central authorities of thrust plate 53.One bent axle 6, the eccentric segment of this bent axle 6 runs through the emptiness avoiding hole 54 of thrust plate 53 and is connected with the back side of moving scrollwork 50, produces moving driving force to moving scrollwork 50 by this bent axle 6.One bent axle pedestal 61, bent axle 6 is positioned on this bent axle pedestal 61, and bent axle pedestal 61 is mutually permanently connected with thrust plate 53 and scrollwork pedestal 43 respectively.Also include a piston rear support 9, this piston rear support 9 is connected to bent axle 6 on the eccentric shaft section surface of the side of thrust plate 53 by bearing, the central annular boss of piston rear support 9 runs through the emptiness avoiding hole 54 of thrust plate 53, make piston rear support 9 central annular boss can in the emptiness avoiding hole 54 of thrust plate 53 moving, simultaneously, the central annular boss of piston rear support 9 is connected (similar cylinder) by O RunddichtringO with the back side of moving scrollwork 50 by bearing 95 before piston, and keep constant space, the radial end face of the remaining part of piston rear support 9 and the radial end face of thrust plate 53 close to each other and keep micro-gap, and on the radial end face of piston rear support 9 just to thrust plate 53, offer some mutual equally spaced first ring connected in stars 91, this first ring connected in star 91 designs around the radial end face annular concentric of piston rear support 9, gap clearance between each first ring connected in star 91 carries out respective design according to magnetic field magnetic strength line strength.Vacuum pump also includes a device for sealing magnetic fluid, this device for sealing magnetic fluid includes permanent magnet 71 and magnet case 72, this permanent magnet 71 is placed in the inside of piston rear support 9, and permanent magnet 71 is just to some first ring connected in stars 91, or permanent magnet 71 annular is placed in the inside of piston rear support 9, make permanent magnet 71 can just to some first ring connected in stars 91 with this.Magnet case 72 annular is placed in the inside of thrust plate 53, and magnet case 72 is just to permanent magnet 71.Meanwhile, magnetic current liquid (not shown) is marked with in the gap between the radial end face of magnet case 72 and piston rear support 9.When bent axle 6 rotates, before driving piston, bearing 95 and piston rear support 9 relative force plate 53 do radial moving, magnetic confining field is produced between permanent magnet 71 and magnet case 72, when magnetic current liquid injects the gap in magnetic field, magnetic current liquid is full of in the radial end face of piston rear support 9 and the gap of thrust plate 53, with this formed between first ring connected in star 91 and magnet case 72 play seal action multilayer close " magnetic fluid O type circle ", realize the seal request of vacuum pump.Meanwhile, when two planes of thrust plate 53 and piston rear support 9 contact with each other, the magnetic current liquid under magnetic fields can produce the effect of slope thrust, makes effect of magnetic current liquid be similar to slide thrust bearing.
The present invention also has following mode of execution on above-mentioned basis:
In further embodiment of the present invention, refer to shown in Fig. 4 to Fig. 7.Magnet case 72 is coated with one deck near the end face of magnetic current liquid and detests magnetic current liquid coating 73, this material detesting magnetic current liquid coating 73 is mainly teflon, by detesting magnetic current liquid coating 73 to play the effect of converging magnetic current liquid, thus improve crushing resistance and tightness, and reduce resistance, reduce the loss of magnetic current liquid.
In further embodiment of the present invention, Fig. 8 is the first scheme schematic diagram of the groove of piston rear support radial end face in Fig. 5, shown in Figure 8.The sectional shape of the bulge loop 92 between the adjacent two first ring connected in stars 91 being arranged on piston rear support 9 radial end face is rectangle.
In further embodiment of the present invention, Fig. 9 is the first scheme schematic diagram of the groove of piston rear support radial end face in Fig. 5, shown in Figure 9.The sectional shape of the bulge loop 92 between the adjacent two first ring connected in stars 91 being arranged on piston rear support 9 radial end face is rectangle, and the head of each bulge loop 92 is fillet.
In further embodiment of the present invention, Figure 10 is the third scheme schematic diagram of the groove of piston rear support radial end face in Fig. 5, shown in Figure 10.The sectional shape of the bulge loop 92 between the adjacent two first ring connected in stars 91 being arranged on piston rear support 9 radial end face is triangle.
The shape of the first ring connected in star 91 formed by the bulge loop 92 of different cross section shape changes magnet fluid sealing, thus the anti-pressure ability produced in various degree and sealability.
In further embodiment of the present invention, please continue see shown in Fig. 8 to Figure 10.The degree of depth of each first ring connected in star 91 is all identical with width.
In further embodiment of the present invention, on the radial end face of piston rear support 9, outwardly convex forms one first annular retaining ring 93, and some first ring connected in stars 91 are positioned within the first annular retaining ring 93.By the use of the first annular retaining ring 93, before preventing bent axle 6, piston rear support 9 and piston, magnetic current liquid outwards splashes by bearing 95 in the process of rotating.
In further embodiment of the present invention, the height of the first annular retaining ring 93 is lower than the gap between magnet case 72 and the radial end face of piston rear support 9, concrete, the height of the first annular retaining ring 93 is lower than the gap between magnet case 72 magnetic current liquid coating 73 and the radial end face of piston rear support 9, in the process that before avoiding bent axle 6, piston rear support 9 and piston with this, bearing 95 rotates, the first annular retaining ring 93 touches magnet case 72.
In further embodiment of the present invention, be provided with a synchronizing ring 55(between thrust plate 53 and moving scrollwork 50 also known as synchronizer), by synchronizing ring 55 to guarantee that moving scrollwork 50 carries out radial moving by expection setting requirement.
In further embodiment of the present invention, before the central annular boss of piston rear support 9 and piston bearing 95 joint between an O RunddichtringO 94 is housed.
In further embodiment of the present invention, bent axle 6 also connects needle bearing 81 and angular contact bearing 82 away from the non-eccentric segment surface of axle of the side of moving scrollwork 50, is convenient to bent axle 6 and rotates in bent axle pedestal 61.
In further embodiment of the present invention, piston rear support 9 is connected to bent axle 6 on the eccentric shaft section surface of the side of thrust plate 53 by angular contact bearing 83.
In sum, when the crank shaft rotates, before driving piston, bearing and piston rear support relative force plate do radial moving, magnetic confining field is produced between permanent magnet and magnet case, under the influence of a magnetic field, when magnetic current liquid injects the gap in magnetic field, namely in the radial end face of piston rear support and the gap of thrust plate, magnetic current liquid is full of whole gap, between first ring connected in star and magnet case, multilayer closed " magnetic fluid O type circle " is formed with this, magnetic current liquid is utilized to realize the sealing in the radial moving direction of scroll vacuum pump, what make to realize on the contact surface between sealing surface is contactless, gas-insulated without what consume, realize the seal request of vacuum pump.Meanwhile, when two planes of thrust plate and piston rear support contact with each other, the magnetic current liquid under magnetic fields can produce the effect of slope thrust, makes effect be similar to slide thrust bearing.
Two, device for sealing magnetic fluid is placed between moving scrollwork and scrollwork pedestal.
This kind of mounting type is identical with principle with the structure of the first above-mentioned device for sealing magnetic fluid mounting type, and the running mechanism of vacuum pump is identical.Therefore present embodiment need be implemented in conjunction with the first mounting type above.
Figure 11 is that in Fig. 4, device for sealing magnetic fluid is placed in the schematic diagram between moving scrollwork and scrollwork pedestal, refers to shown in Fig. 4 and Figure 11.Moving scrollwork 50 just offers some equally spaced second annular grooves 57 to the radial end face of scrollwork pedestal 43, this second annular groove 57 designs around the radial end face annular concentric of moving scrollwork 50, and the gap clearance between each second annular groove 57 carries out respective design according to magnetic field magnetic strength line strength.The permanent magnet 56 of device for sealing magnetic fluid is placed in the second tip plate configurations 51 of moving scrollwork 50, and permanent magnet 56 is just to some second annular grooves 57.It is inner that magnet case 58 is placed in scrollwork pedestal 43, and magnet case 58 is just to permanent magnet 56.Meanwhile, between the radial end face of magnet case 58 and moving scrollwork 50, keep constant clearance, when moving scrollwork 50 operates, in gap, be marked with magnetic current liquid (not shown).When bent axle 6 rotates, the moving relative fixed scroll 40 of scrollwork 50 and scrollwork pedestal 43 is driven to do moving motion, magnetic confining field is produced between permanent magnet 56 and magnet case 58, magnetic current liquid is full of in the radial end face of moving scrollwork 50 and the gap of scrollwork pedestal 43, with this formed between the second annular groove 57 and magnet case 58 play seal action multilayer close " magnetic fluid O type circle ".
In further embodiment of the present invention, refer to shown in Fig. 4, Figure 11 and the enforcement of the first mounting type above.Magnet case 58 is coated with one deck near the end face of magnetic current liquid and detests magnetic current liquid coating (not shown).
In further embodiment of the present invention, the sectional shape of the bulge loop between adjacent two second annular grooves 57 being arranged on moving scrollwork 50 radial end face is rectangle.
In further embodiment of the present invention, the sectional shape of the bulge loop between adjacent two second annular grooves 57 being arranged on moving scrollwork 50 radial end face is rectangle, and the head of each bulge loop is fillet.
In further embodiment of the present invention, the sectional shape of the bulge loop between adjacent two second annular grooves 57 being arranged on moving scrollwork 50 radial end face is triangle.
In further embodiment of the present invention, on the radial end face of moving scrollwork 50, outwardly convex forms one second annular retaining ring (not shown), and some second annular grooves 57 are positioned within the second annular retaining ring.
In further embodiment of the present invention, the height of the second annular retaining ring is lower than the gap between magnet case 58 and the radial end face of moving scrollwork 50.
Also can device for sealing magnetic fluid be placed in respectively between piston rear support and thrust plate and between moving scrollwork and scrollwork pedestal simultaneously.
In sum, the present invention is used to adopt device for sealing magnetic fluid by the moving end face at vacuum pump, when the crank shaft rotates, before driving piston, bearing and piston rear support relative force plate do radial moving, magnetic confining field is produced between permanent magnet and magnet case, under the influence of a magnetic field, when magnetic current liquid injects the gap in magnetic field, namely in the radial end face of piston rear support and the gap of thrust plate, magnetic current liquid is full of whole gap, forms multilayer closed " magnetic fluid O type circle " with this between first ring connected in star and magnet case.And crank rotation drives the relative fixed scroll of moving scrollwork and scrollwork pedestal to do moving motion, magnetic confining field is produced between permanent magnet and magnet case, magnetic current liquid is full of in the radial end face of moving scrollwork and the gap of scrollwork pedestal, with this formed between the second annular groove and magnet case play seal action multilayer close " magnetic fluid O type circle ".Utilize magnetic current liquid to realize the sealing in the radial moving direction of scroll vacuum pump, what make to realize on the contact surface between sealing surface is contactless, gas-insulated without consume, realizes the seal request of vacuum pump.Meanwhile, when two planes of thrust plate and piston rear support contact with each other, the magnetic current liquid under magnetic fields can produce the effect of slope thrust, makes effect be similar to slide thrust bearing.
The foregoing is only preferred embodiment of the present invention; not thereby embodiments of the present invention and protection domain is limited; to those skilled in the art; should recognize and all should be included in the scheme that equivalent replacement done by all utilizations specification of the present invention and diagramatic content and apparent change obtain in protection scope of the present invention.
Claims (10)
1. have a scroll vacuum pump for magnetic fluid translation slide thrust bearing and sealing configuration, described vacuum pump comprises:
One fixed scroll;
One relatively described fixed scroll does the moving scrollwork of moving motion;
One is positioned at the scrollwork pedestal outside described fixed scroll;
One thrust plate be connected with described scrollwork seat surface opposite, and the central authorities of described thrust plate offer emptiness avoiding hole;
One bent axle, the eccentric segment of described bent axle runs through the emptiness avoiding hole of described thrust plate and is connected with the back side of described moving scrollwork; And
One bent axle pedestal, described bent axle is positioned on described bent axle pedestal, and described bent axle pedestal is fixedly connected with described scrollwork pedestal with described thrust plate; It is characterized in that, described vacuum pump also comprises:
One piston rear support, described piston rear support is connected to the eccentric shaft section surface of described bent axle near the side of described thrust plate by bearing, the central annular boss of described piston rear support can run through to moving the emptiness avoiding hole of described thrust plate, and is connected with the back side of described moving scrollwork by bearing before a piston; The remaining part of described piston rear support and the radial end face of described thrust plate close to each other, and described piston rear support just offers some equally spaced first ring connected in stars to the radial end face of described thrust plate;
One device for sealing magnetic fluid, described device for sealing magnetic fluid comprises permanent magnet and magnet case; Described permanent magnet is placed in the inside of described piston rear support, and just to some described first ring connected in stars; Described magnet case is placed in the inside of described thrust plate, and just to described permanent magnet; Meanwhile, magnetic current liquid is marked with in the gap between the radial end face of described magnet case and described piston rear support;
Preferably, described magnet case near the end face coating of described magnetic current liquid play converge the effect of magnetic current liquid detest magnetic current liquid coating, described in detest magnetic current liquid coating be teflon.
2. have a scroll vacuum pump for magnetic fluid translation slide thrust bearing and sealing configuration, described vacuum pump comprises:
One fixed scroll;
One relatively described fixed scroll does the moving scrollwork of moving motion;
One is positioned at the scrollwork pedestal outside described fixed scroll;
One thrust plate be connected with described scrollwork seat surface opposite, and the central authorities of described thrust plate offer emptiness avoiding hole;
One bent axle, the eccentric segment of described bent axle runs through the emptiness avoiding hole of described thrust plate and is connected with the back side of described moving scrollwork; And
One bent axle pedestal, described bent axle is positioned on described bent axle pedestal, and described bent axle pedestal is fixedly connected with described scrollwork pedestal with described thrust plate; It is characterized in that, described vacuum pump also comprises:
One piston rear support, described piston rear support is connected to the eccentric shaft section surface of described bent axle near the side of described thrust plate by bearing, the central annular boss of described piston rear support can run through to moving the emptiness avoiding hole of described thrust plate, and is connected with the back side of described moving scrollwork by bearing before a piston; The remaining part of described piston rear support and the radial end face of described thrust plate close to each other;
Described moving scrollwork just offers some equally spaced second annular grooves to the radial end face of described scrollwork pedestal; One device for sealing magnetic fluid, described device for sealing magnetic fluid comprises permanent magnet and magnet case; Described permanent magnet is placed in the inside of described moving scrollwork, and just to some described second annular grooves; Described magnet case is placed in the inside of described scrollwork pedestal, and just to described permanent magnet; Meanwhile, magnetic current liquid is marked with in the gap between the radial end face of described magnet case and described moving scrollwork;
Preferably, described magnet case near the end face coating of described magnetic current liquid play converge the effect of magnetic current liquid detest magnetic current liquid coating, described in detest magnetic current liquid coating be teflon.
3. according to the scroll vacuum pump described in any one in claim 1 or 2 with magnetic fluid translation slide thrust bearing and sealing configuration, it is characterized in that, the sectional shape of the bulge loop described in adjacent two between first ring connected in star is rectangle; Or the head of the bulge loop described in adjacent two between first ring connected in star is fillet; Or the sectional shape of the bulge loop described in adjacent two between first ring connected in star is triangle; Or the sectional shape of the bulge loop described in adjacent two between second annular groove is rectangle; Or the head of the bulge loop described in adjacent two between second annular groove is fillet; Or the sectional shape of the bulge loop described in adjacent two between second annular groove is triangle.
4. according to the scroll vacuum pump described in any one in claim 1 or 2 with magnetic fluid translation slide thrust bearing and sealing configuration, it is characterized in that, described in each, the degree of depth of first ring connected in star is all identical with width; Or the degree of depth of the second annular groove is all identical with width described in each.
5. according to the scroll vacuum pump described in any one in claim 1 or 2 with magnetic fluid translation slide thrust bearing and sealing configuration, it is characterized in that, on the radial end face of described piston rear support, outwardly convex forms one first annular retaining ring, and some described first ring connected in stars are positioned within described first annular retaining ring; Or on the radial end face of described moving scrollwork, outwardly convex forms one second annular retaining ring, and some described second annular grooves are positioned at described second annular retaining ring.
6. have the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration according to claim 5, it is characterized in that, the height of described first annular retaining ring is lower than the gap between described magnet case and the radial end face of described piston rear support; The height of described second annular retaining ring is lower than the gap between described magnet case and the radial end face of described moving scrollwork.
7. according to the scroll vacuum pump described in any one in claim 1 or 2 with magnetic fluid translation slide thrust bearing and sealing configuration, it is characterized in that, described fixed scroll has a first end plate structure, described first end plate structure is fixed and stretches out to be provided with one first structure of scroll; Described moving scrollwork has one second tip plate configurations, described second tip plate configurations is fixed and stretches out to be provided with one second structure of scroll; Meanwhile, the described first end plate structure of described fixed scroll and described second tip plate configurations of described moving scrollwork close to each other face-to-face.
8. according to the scroll vacuum pump described in any one in claim 1 or 2 with magnetic fluid translation slide thrust bearing and sealing configuration, it is characterized in that, between described thrust plate and described moving scrollwork, assemble a synchronizing ring.
9. according to the scroll vacuum pump described in any one in claim 1 or 2 with magnetic fluid translation slide thrust bearing and sealing configuration, it is characterized in that, before the central annular boss of described piston rear support and described piston bearing joint between be provided with an O RunddichtringO.
10. one kind for the encapsulating method with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration in claim 1 or 2 described in any one: it is characterized in that, for the encapsulating method with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration according to claim 1, when described crank rotation, described piston secondary piston rear support described thrust plate relative to described piston rear support is driven to do radial moving, magnetic confining field is produced between described permanent magnet and described magnet case, described magnetic current liquid is full of in the radial end face of described piston rear support and the gap of described thrust plate, with this formed between described first ring connected in star and magnet case play seal action multilayer close " magnetic fluid O type circle ", meanwhile, when two planes of described thrust plate and described piston rear support contact with each other, the magnetic current liquid under magnetic fields can produce the effect of slope thrust, for the encapsulating method with the scroll vacuum pump of magnetic fluid translation slide thrust bearing and sealing configuration according to claim 2, described crank rotation drives the relatively described fixed scroll of described moving scrollwork and described scrollwork pedestal to do moving motion, magnetic confining field is produced between described permanent magnet and described magnet case, described magnetic current liquid is full of in the radial end face of described moving scrollwork and the gap of described scrollwork pedestal, with this formed between described second annular groove and described magnet case play seal action multilayer close " magnetic fluid O type circle ".
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| CN201310330740.7A CN104343687B (en) | 2013-07-31 | 2013-07-31 | There is magnetic fluid translation slide thrust bearing and seal the scroll vacuum pump of structure |
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| CN201310330740.7A CN104343687B (en) | 2013-07-31 | 2013-07-31 | There is magnetic fluid translation slide thrust bearing and seal the scroll vacuum pump of structure |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11324944A (en) * | 1998-05-20 | 1999-11-26 | Sharp Corp | Scroll compressor |
| JP2003254261A (en) * | 2002-02-26 | 2003-09-10 | Ebara Corp | Scroll type fluid machinery |
| CN101509489A (en) * | 2009-03-24 | 2009-08-19 | 浙江惟思特科技有限公司 | Straightly-connecting explosion suppression swirl vacuum compressor without lubricant |
| CN201795050U (en) * | 2010-07-26 | 2011-04-13 | 甘肃广播电视大学 | Magnetic fluid seal structure for thrust bearing of mixed-flow turbine |
| CN202091517U (en) * | 2011-05-09 | 2011-12-28 | 埃慕迪磁电科技(上海)有限公司 | Improved structure of magnetic fluid sealing device |
| CN102817841A (en) * | 2011-06-07 | 2012-12-12 | 思科涡旋科技(杭州)有限公司 | Scroll-type volume displacement device with bidirectional thrust bearings |
| CN203796567U (en) * | 2013-07-31 | 2014-08-27 | 思科涡旋科技(杭州)有限公司 | Vortex vacuum pump with translational magnetic fluid sliding thrust bearing and sealing structure |
-
2013
- 2013-07-31 CN CN201310330740.7A patent/CN104343687B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11324944A (en) * | 1998-05-20 | 1999-11-26 | Sharp Corp | Scroll compressor |
| JP2003254261A (en) * | 2002-02-26 | 2003-09-10 | Ebara Corp | Scroll type fluid machinery |
| CN101509489A (en) * | 2009-03-24 | 2009-08-19 | 浙江惟思特科技有限公司 | Straightly-connecting explosion suppression swirl vacuum compressor without lubricant |
| CN201795050U (en) * | 2010-07-26 | 2011-04-13 | 甘肃广播电视大学 | Magnetic fluid seal structure for thrust bearing of mixed-flow turbine |
| CN202091517U (en) * | 2011-05-09 | 2011-12-28 | 埃慕迪磁电科技(上海)有限公司 | Improved structure of magnetic fluid sealing device |
| CN102817841A (en) * | 2011-06-07 | 2012-12-12 | 思科涡旋科技(杭州)有限公司 | Scroll-type volume displacement device with bidirectional thrust bearings |
| CN203796567U (en) * | 2013-07-31 | 2014-08-27 | 思科涡旋科技(杭州)有限公司 | Vortex vacuum pump with translational magnetic fluid sliding thrust bearing and sealing structure |
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| CN104343687B (en) | 2016-12-28 |
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Effective date of registration: 20190809 Address after: Room 1801, Floor 18, Room 6, Yinhu Innovation Center, No. 9 Fuxian Road, Yinhu Street, Fuyang District, Hangzhou City, Zhejiang Province Patentee after: Hangzhou Sixuan Technology Co., Ltd. Address before: 310051, Hangzhou, Binjiang District, Jiangling Road, No. 6, building 88, building 2 Patentee before: Scroll Laboratories, Inc. |
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