CN104332438B - Solar silicon chip transmission rectification mechanism - Google Patents
Solar silicon chip transmission rectification mechanism Download PDFInfo
- Publication number
- CN104332438B CN104332438B CN201410449597.8A CN201410449597A CN104332438B CN 104332438 B CN104332438 B CN 104332438B CN 201410449597 A CN201410449597 A CN 201410449597A CN 104332438 B CN104332438 B CN 104332438B
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- CN
- China
- Prior art keywords
- silicon chip
- shape
- rocker
- guide rail
- chip transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 106
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 104
- 239000010703 silicon Substances 0.000 title claims abstract description 104
- 230000005540 biological transmission Effects 0.000 title claims abstract description 50
- 235000012431 wafers Nutrition 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 3
- 230000007423 decrease Effects 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001020 rhythmical effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67793—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with orientating and positioning by means of a vibratory bowl or track
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a solar silicon chip transmission rectification mechanism, for solving the problems of easy wearing of a guide bar and slow rectification frequency of a silicon chip in the prior art. The solar silicon chip transmission rectification mechanism comprises a base plate (1). The base plate (1) is fixedly provided with a silicon chip transmission support guide rail (2) in a left-right direction, the silicon chip transmission support guide rail (2) is provided with a transmitted silicon chip (4), a silicon chip transmission rectification assembly is arranged right below the central portion of the silicon chip transmission support guide rail (2), and an extension assembly (5) is fixedly arranged on the base plate (1) right below the right end of the silicon chip transmission support guide rail (2). The silicon chip transmission rectification assembly is composed of an L-shaped front rocker (14), an L-shaped rear rocker (13) and a rotation disc (17), the rotation disc (17) is arranged between the L-shaped front rocker (14) and the L-shaped rear rocker (13), and the distance between two rows of silicon chip rectification pulleys decreases in a silicon chip transmission direction so as to gradually rectify the position of the silicon chip. According to the invention, the guiding demand for high-speed silicon chip transmission is satisfied.
Description
Technical field
The present invention relates to a kind of transmission straightening mechanism of solar silicon wafers, particularly to one kind in full-automatic silicon wafer loading machine
Used in transmit straightening mechanism, for the rectification of solar silicon wafers position in transmit process.
Background technology
Increasingly paid close attention to by people with photovoltaic industry, the production equipment of solaode has also obtained swift and violent sending out
Exhibition.At present, generally all employ silicon chip transmission straightening mechanism in the equipment such as the charging & discharging machine of solar silicon wafers, loader, existing
Silicon chip transmission straightening mechanism have two kinds of forms, a kind of is fixed straightening mechanism, the gib block of wedge shape will be fixed on silicon chip
The both sides of transmission line, guide to silicon chip transmission.Another kind of is dynamic straightening mechanism, controls gib block to promote silicon by cylinder
Piece, corrects position on feed belt for the silicon chip.Both the above transmission straightening mechanism all has its limitation and defect, fixed strong
Positive mechanism is that rigidity guides, and has that gib block is easy to wear, and replacement frequency is high and has pollution to silicon chip.Dynamic straightening mechanism passes through gas
Cylinder controls gib block to move back and forth, and there is silicon chip and corrects frequency slowly, and is difficult to adjust it is impossible to meet leading under silicon chip High Speed Transfer
To demand.
Content of the invention
The invention provides a kind of solar silicon wafers transmit straightening mechanism, the gib block solving prior art presence easily grinds
Damage and silicon chip is corrected frequency slowly and is difficult the technical problem adjusting.
The present invention is to solve above technical problem by the following technical programs:
A kind of solar silicon wafers transmit straightening mechanism, including base plate, are fixedly installed the silicon on left and right directions on base plate
Piece transmits support guide, is provided with silicon chip feed belt, is provided with silicon chip feed belt on silicon chip transmission support guide
By transmission rail piece, the rectification group on fore-and-aft direction is fixedly installed on the base plate immediately below the middle part of silicon chip transmission support guide
Part guide rail, is respectively arranged with left front slide block and left back slide block, in corrective component guide rail in the left rail of corrective component guide rail
Right rail on be respectively arranged with right front-slider and right rear slider, in the upper surface of the upper surface of left front slide block and right front-slider
Between be fixedly installed rocker before l shape, be fixedly installed l shape between the upper surface of the upper surface of left back slide block and right rear slider
Rocker afterwards, is provided with left bullet between the left end bottom inside face of rocker after the left end bottom inside face of rocker and l shape before l shape
Spring, is provided with right spring, in l between the right-hand member bottom inside face of rocker after the right-hand member bottom inside face of rocker and l shape before l shape
Pulley, the top parallel cantilever top of rocker after l shape is corrected before silicon chip is evenly equipped with the top parallel cantilever top surface of rocker before shape
It is evenly equipped with face and corrects pulley after silicon chip, after rocker and l shape before l shape, between rocker, be provided with silicon chip transmission support guide,
On silicon chip feed belt, the rail piece that transmitted of setting is provided in correcting between pulley after rectification pulley and silicon chip before silicon chip;?
Silicon chip transmit the left rail of corrective component guide rail and the corrective component guide rail below the middle part of support guide right rail it
Between base plate on be provided with rotating circular disk central rotating shaft, the lower end of rotating circular disk central rotating shaft is connected with rotating circular disk and drives electricity
Machine, is connected with the rotating circular disk in horizontal direction in the upper end of rotating circular disk central rotating shaft, at cylindrical first-class of rotating circular disk
Be provided with six Cam Followers arc degree, six Cam Followers during rotating with rotating circular disk successively respectively with
Together with before l shape, the medial surface of rocker is abutted against with the medial surface activity of rocker after l shape.
On the left and right directions being fixedly installed extension assembly on the base plate immediately below the right-hand member of silicon chip transmission support guide
Extension assembly guide rail, extension assembly slide block is provided with extension assembly guide rail, extension assembly slide block is fixedly installed
Extension assembly connecting plate, is provided with l shape silicon chip transmission pawl, the base plate on rear side of extension assembly guide rail on extension assembly connecting plate
On be fixedly installed l shape silicon chip transmission pawl driving cylinder, l shape silicon chip transmit pawl driving cylinder output shaft be connected with extension assembly
Plate links together.
After rocker and l shape before l shape, rocker is to transmit axis on the left and right directions of support guide as axis of symmetry with silicon chip
And draw setting in along direction from left to right, after rocker and l shape before l shape, the angle between rocker is 2 degree.
The present invention drives the rotating circular disk in horizontal direction to rotate by servomotor, and then controls chip transmission belt two
The l shape rocker of side moves back and forth along the longitudinal direction, thus realizing the aligning of silicon chip, correcting frequency and greatly improving, may be used simultaneously
With the rotating speed by plc programme-control servomotor, thus controlling rectification frequency, there is simple to operate and quick regulation and regulation
The big feature of scope.The directive wheel installed on l shape rocker replaces conventional gib block, it is to avoid produce static friction, guiding with silicon chip
Wheel is not easy to wear, reduces the pollution to silicon chip.
Brief description
Fig. 1 is the structural representation of the present invention;
Fig. 2 is the structural representation of the corrective component of the present invention;
Fig. 3 is the structural representation in overlook direction for the corrective component of the present invention;
Fig. 4 is the structural representation of the extension assembly of the present invention.
Specific embodiment
The present invention is described in detail below in conjunction with the accompanying drawings:
A kind of solar silicon wafers transmit straightening mechanism, including base plate 1, are fixedly installed on left and right directions on base plate 1
Silicon chip transmits support guide 2, transmits in silicon chip and is provided with silicon chip feed belt 3 on support guide 2, on silicon chip feed belt 3
It is provided with by transmission rail piece 4, the base plate 1 immediately below the middle part of silicon chip transmission support guide 2 is fixedly installed fore-and-aft direction
On corrective component guide rail 6, left front slide block 10 and left back slide block are respectively arranged with the left rail of corrective component guide rail 6
11, right front-slider 7 and right rear slider 8 are respectively arranged with the right rail of corrective component guide rail 6, upper in left front slide block 10
It is fixedly installed rocker 14 before l shape between the upper surface of end face and right front-slider 7, sliding behind the upper surface of left back slide block 11 with the right side
It is fixedly installed rocker 13 after l shape, rocker after the left end bottom inside face of rocker 14 and l shape before l shape between the upper surface of block 8
It is provided with left spring 12, rocker after the right-hand member bottom inside face of rocker 14 and l shape before l shape between 13 left end bottom inside face
It is provided with right spring 9 between 13 right-hand member bottom inside face, before l shape, be evenly equipped with silicon on the top parallel cantilever top surface of rocker 14
Correct pulley 16 before piece, correct pulley 15 after the top parallel cantilever top surface of rocker 13 after l shape is evenly equipped with silicon chip, in l shape
It is provided with silicon chip transmission support guide 2 between rocker 13, setting is passed on silicon chip feed belt 3 after front rocker 14 and l shape
Rail piece 4 is sent to correct between pulley 15 after correcting pulley 16 and silicon chip before being provided in silicon chip;Transmit support guide 2 in silicon chip
It is provided with base plate 1 between the left rail of corrective component guide rail 6 of middle part lower section and the right rail of corrective component guide rail 6
Rotating circular disk central rotating shaft 18, the lower end of rotating circular disk central rotating shaft 18 is connected with rotating circular disk motor 20, in rotational circle
The upper end of disk center's rotating shaft 18 is connected with the rotating circular disk 17 in horizontal direction, rotating circular disk 17 cylindrical on radian at equal intervals
Be provided with six Cam Followers 19, six Cam Followers 19 during with rotating circular disk 17 rotation successively respectively with
Together with before l shape, the medial surface of rocker 14 is abutted against with the medial surface activity of rocker 13 after l shape.When rotating circular disk 17 rotates, its
On six Cam Followers 19 during rotating constant duration ground rocker before both direction outwards struts l shape forwards, backwards
Rocker 13 after 14 and l shapes, after rocker 14 and l shape before l shape rocker 13 after Cam Follower 19 turns round, and in left spring 12 He
Along the longitudinal direction to contract in the presence of right spring 9, two row's silicon chips are corrected pulley and are strutted to by transmission the rhythmical of rail piece 4
With close up, realize to by transmission rail piece 4 transmission in rectification.
The left and right directions of extension assembly 5 is fixedly installed on the base plate 1 immediately below the right-hand member of silicon chip transmission support guide 2
On extension assembly guide rail 21, extension assembly slide block 22 is provided with extension assembly guide rail 21, on extension assembly slide block 22
It is fixedly installed extension assembly connecting plate 23, l shape silicon chip transmission pawl 24 is provided with extension assembly connecting plate 23, is stretching out group
L shape silicon chip transmission pawl driving cylinder 25 is fixedly installed on the base plate 1 of part guide rail 21 rear side, l shape silicon chip transmits pawl driving cylinder
25 output shaft is linked together with extension assembly connecting plate 23.
After rocker 14 and l shape before l shape, rocker 13 is to transmit the axis on the left and right directions of support guide 2 with silicon chip to be
Axis of symmetry and draw setting in along direction from left to right, after rocker 14 and l shape before l shape, the angle between rocker 13 is 2 degree.
Described extension assembly 5 is arranged on silicon chip and transmits immediately below the right-hand member of support guide 2, during transmission silicon chip, l shape
, simultaneously in silicon chip transmission support guide 2 direction motion, l shape silicon chip transmits pawl for silicon chip transmission pawl 24 and part mounted thereon
24 enter special basket tool, and silicon chip is sent into basket tool.Corrective component is arranged on the underface that silicon chip transmits support guide 2 middle part, and l
After rocker 14 and l shape before shape, rocker 13 is located at the both sides that silicon chip transmits support guide 2, the top flat of rocker 14 before l shape respectively
Correct pulley 16 before silicon chip is evenly equipped with row cantilever top surface, after l shape, be evenly equipped with silicon on the top parallel cantilever top surface of rocker 13
Correct pulley 15 after piece, the distance that two row's silicon chips correct pulley narrows from the width on silicon chip direction of transfer, progressively correct silicon chip
Position.
Claims (2)
1. a kind of solar silicon wafers transmit straightening mechanism, including base plate (1), are fixedly installed on left and right directions on base plate (1)
Silicon chip transmission support guide (2), silicon chip transmission support guide (2) is provided with silicon chip feed belt (3), in silicon chip transmission
It is provided with belt (3) by transmission silicon chip (4) it is characterised in that transmitting the bottom immediately below the middle part of support guide (2) in silicon chip
Corrective component guide rail (6) on fore-and-aft direction is fixedly installed on plate (1), the left rail of corrective component guide rail (6) is divided
It is not provided with left front slide block (10) and left back slide block (11), the right rail of corrective component guide rail (6) is respectively arranged with the right side
Front-slider (7) and right rear slider (8), fixation between the upper surface of the upper surface of left front slide block (10) and right front-slider (7) sets
It is equipped with rocker (14) before l shape, between the upper surface of the upper surface of left back slide block (11) and right rear slider (8), be fixedly installed l
Rocker (13) after shape, after the left end bottom inside face of rocker (14) and l shape before l shape the left end bottom inside face of rocker (13) it
Between be provided with left spring (12), in the right-hand member bottom of rocker (13) after the right-hand member bottom inside face of rocker (14) and l shape before l shape
It is provided with right spring (9) between side, correct before the top parallel cantilever top surface of rocker (14) before l shape is evenly equipped with silicon chip and slide
Wheel (16), corrects pulley (15) after the top parallel cantilever top surface of rocker (13) after l shape is evenly equipped with silicon chip, in l shape forward swing
It is provided with silicon chip transmission support guide (2) between rocker (13), in the upper setting of silicon chip feed belt (3) after frame (14) and l shape
It is provided in before silicon chip correcting by transmission silicon chip (4) and correct between pulley (15) after pulley (16) and silicon chip;In silicon chip transmission
The right rail of the left rail of corrective component guide rail (6) below the middle part of support guide (2) and corrective component guide rail (6) it
Between base plate (1) on be provided with rotating circular disk central rotating shaft (18), the lower end of rotating circular disk central rotating shaft (18) is connected with rotation
Disk motor (20), is connected with the rotating circular disk (17) in horizontal direction in the upper end of rotating circular disk central rotating shaft (18),
Rotating circular disk (17) cylindrical on be provided with six Cam Followers (19), six Cam Followers (19) at equal intervals radian
During with rotating circular disk (17) rotation successively respectively with l shape before the medial surface of rocker (14) and rocker (13) after l shape
Medial surface activity is abutted against together.
2. a kind of solar silicon wafers transmission straightening mechanism according to claim 1 is it is characterised in that transmit support in silicon chip
Extension assembly guide rail on the left and right directions of extension assembly (5) is fixedly installed on the base plate (1) immediately below the right-hand member of guide rail (2)
(21), extension assembly slide block (22) is provided with extension assembly guide rail (21), is fixedly installed on extension assembly slide block (22)
There is extension assembly connecting plate (23), l shape silicon chip transmission pawl (24) is provided with extension assembly connecting plate (23), in extension assembly
L shape silicon chip transmission pawl driving cylinder (25) is fixedly installed on the base plate (1) on rear side of guide rail (21), l shape silicon chip transmission pawl drives
The output shaft of cylinder (25) is linked together with extension assembly connecting plate (23).
3. a kind of solar silicon wafers transmission straightening mechanism according to claim 1 is it is characterised in that rocker (14) before l shape
It is with the axis on the left and right directions of silicon chip transmission support guide (2) as axis of symmetry and along from left-hand with rocker (13) after l shape
Setting is drawn in right direction in, and after rocker (14) and l shape before l shape, the angle between rocker (13) is 2 degree.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410449597.8A CN104332438B (en) | 2014-09-05 | 2014-09-05 | Solar silicon chip transmission rectification mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410449597.8A CN104332438B (en) | 2014-09-05 | 2014-09-05 | Solar silicon chip transmission rectification mechanism |
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CN104332438A CN104332438A (en) | 2015-02-04 |
CN104332438B true CN104332438B (en) | 2017-01-25 |
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CN201410449597.8A Active CN104332438B (en) | 2014-09-05 | 2014-09-05 | Solar silicon chip transmission rectification mechanism |
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CN (1) | CN104332438B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107424949B (en) * | 2017-08-21 | 2023-10-31 | 罗博特科智能科技股份有限公司 | Silicon wafer device |
CN107546166A (en) * | 2017-09-29 | 2018-01-05 | 四川英发太阳能科技有限公司 | Etching automation blanking guider |
CN108847404B (en) * | 2018-05-22 | 2020-05-26 | 中国电子科技集团公司第二研究所 | Single-wafer conveying double-wafer basket entering device and method in automatic silicon wafer conveying system |
CN115255857B (en) * | 2022-08-03 | 2024-05-03 | 江苏松田电子科技有限公司 | Flexible assembly workstation of both hands arm robot |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102259756A (en) * | 2011-07-30 | 2011-11-30 | 太原风华信息装备股份有限公司 | Linear motor type silicon wafer conveying mechanism |
CN203682602U (en) * | 2013-12-05 | 2014-07-02 | 中国电子科技集团公司第四十八研究所 | Silicon chip feeding and discharging device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI425204B (en) * | 2010-07-16 | 2014-02-01 | Chroma Ate Inc | Solar wafer inspection machine with the spacing adjustment system and the system with the machine |
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2014
- 2014-09-05 CN CN201410449597.8A patent/CN104332438B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102259756A (en) * | 2011-07-30 | 2011-11-30 | 太原风华信息装备股份有限公司 | Linear motor type silicon wafer conveying mechanism |
CN203682602U (en) * | 2013-12-05 | 2014-07-02 | 中国电子科技集团公司第四十八研究所 | Silicon chip feeding and discharging device |
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