CN104330418A - Device and method for detecting etched patterns in flexible light-transmitting object - Google Patents

Device and method for detecting etched patterns in flexible light-transmitting object Download PDF

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Publication number
CN104330418A
CN104330418A CN201410612880.8A CN201410612880A CN104330418A CN 104330418 A CN104330418 A CN 104330418A CN 201410612880 A CN201410612880 A CN 201410612880A CN 104330418 A CN104330418 A CN 104330418A
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support plate
glass support
area source
transverse width
described glass
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CN201410612880.8A
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Chinese (zh)
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CN104330418B (en
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邹美芳
姚毅
张利飞
华旭东
周尧
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Hefei Jiuchuan Intelligent Equipment Co ltd
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Beijing Luster LightTech Co Ltd
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  • Surface Treatment Of Glass (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The embodiment of the invention discloses a device and method for detecting etched patterns in a flexible light-transmitting object. The device for detecting the etched patterns in the flexible light-transmitting object comprises a glass support plate transversely arranged and an area light source arranged below the glass support plate and used for emitting diffused light, wherein a plurality of mutually-communicated grooves are formed in the upper surface of the glass support plate; the bottom of one groove has a through hole communicated with the outer part of the glass support plate, the through hole is communicated with an air suction device at the outer part of the glass support plate, an image acquiring device is arranged above the glass support plate; the center of an irradiating area formed by the diffused light provided by the area light source to each groove and on the glass support plate and the center of each corresponding groove are in the same perpendicular line, the transverse width of the irradiating area and the transverse width of the corresponding groove are in a set proportion so that the diffused light enters the glass support plate and enters a receiver of the image acquiring device after ejecting from the edge of each corresponding groove. The device disclosed by the invention is capable of greatly reducing the false drop rate of a to-be-detected object.

Description

The pick-up unit of etched pattern and method in soft printing opacity object
Technical field
The present invention relates to Electrooptical devices detection field, be specifically related to pick-up unit and the method for etched pattern in a kind of soft printing opacity object.
Background technology
For the detection of the upper etched pattern of printing opacity object (as the film etc.), the checkout equipment shown in Fig. 1 is usually adopted to detect.This checkout equipment comprises the back light 01, glass support plate 02 and the image capture device 03 that are arranged at fixed position.Detected material 04 lies against the upper surface of glass supports.The scattered light that back light 01 sends is through glass vertical irradiation detected material.Light is absorbed when arriving the figure place detected on thing, when arriving the blank space beyond figure, penetrates through after detected material, and therefore the figure detected on thing can imaging in image capture device.
When softer detected material is flat on glass support plate, its surrounding or other parts easily there will be warpage, and then affect the image acquisition of pattern on detected material.For avoiding softer detected material to occur warpage in glass support plane, realize the flattening of detected material by fluting on glass support plate.Fig. 2 shows the checkout equipment figure with fluting on glass support plate.As shown in Figure 2, the upper surface of glass support plate 02 has many grooves be interconnected 05.After detected material 04 lies against the upper surface of glass support plate 02, the air between detected material 04 and glass support plate 02 upper surface is taken away by the space in groove 05 by blower fan, and detected material 04 will be inhaled and be posted on glass support plate 02 upper surface, realizes flattening.
The present inventor finds, glass support plate is offered the flattening that groove can realize detected material preferably, but the groove simultaneously on glass support plate brings other problems again.As shown in Figure 3, the angle of the incident ray and normal of vertically injecting glass support plate is a, and because light injects air by glass, refraction angle b is greater than incident angle, and emergent ray changes transmission direction and cannot enter the shooting area of image capture device.And the shooting area of image capture device can be entered without the light at fluting position after glass support plate, therefore formed by being recessed in image capture device, image is black lines compared to the image of other parts of glass support plate, if the picture registration of pattern in image capture device that this black lines and detected material etch, then cannot judge that whether the pattern that detected material etches is qualified.Intersect if the image of pattern in image capture device that this black lines and detected material etch has or partially overlap, then determine that detected material is substandard product, thus cause a large amount of flase drops.
Summary of the invention
The pick-up unit that goal of the invention of the present invention is to provide a kind of suppression to be recessed at imaging in image collecting device and method, avoid due to glass support plate being recessed at the imaging in image collecting device and the flase drop caused.
According to an aspect of the present invention, The embodiment provides the pick-up unit of etched pattern in a kind of soft printing opacity object, comprising: the glass support plate of horizontally set, the upper surface of described glass support plate has many grooves be interconnected; Wherein the bottom of a groove is provided with the through hole with glass support plate ft connection, and described through hole is communicated with the air intake device of described glass support plate outside, and the top of described glass support plate arranges image collecting device, and,
To be arranged at below described glass support plate and to launch the area source of diffused light; The center of the irradiation area that the diffused light that described area source provides for every bar groove is formed on described glass support plate and the center of every bar respective slot are on same vertical line, and the transverse width of described irradiation area becomes setting ratio with the transverse width of respective slot, enter described glass support plate to make described diffused light and enter the receiver of described image capture device after being penetrated by every bar recess edge.
Wherein, the transverse width of irradiation area that described area source is formed for diffused light that every bar groove provides on described glass support plate is 5 ~ 10:1 with the ratio of the transverse width of respective slot.
Further, also comprise scatter plate between described area source and described glass support plate, described scatter plate is parallel with described glass support plate, and the center of the center of described scatter plate and described area source is on same vertical curve;
The lateral length of described scatter plate is more than or equal to the maximum length that many grooves extend in a lateral direction, and the longitudinal length of described scatter plate is more than or equal to the maximum length that many grooves extend in a longitudinal direction.
Preferably, described area source comprises multiple LED particle, and multiple LED particle is the arrangement of uniform dot matrix.
According to a further aspect in the invention, additionally provide the pick-up unit of etched pattern in a kind of soft printing opacity object, comprise the glass support plate of horizontally set, the bottom that the upper surface of described glass support plate has many grooves be interconnected a wherein groove is provided with the through hole with glass support plate ft connection, described through hole is communicated with the air intake device of described glass support plate outside, and
The image collecting device of movement, is located at the top of described glass support plate, and transversely linear sweep is carried out by a side of described detected material successively to another side in direction;
The area source of movement, to be located at below described glass support plate and synchronous with the movement of described image collecting device, diffused light launched by described area source, the transverse width of the irradiation area that described area source is formed on described glass support plate becomes setting ratio with the transverse width in described image collecting device single pass region, and the center of irradiation area that formed on described glass support plate of described area source and the center superposition in described image collecting device single pass region, enter described glass support plate to make described diffused light and enter the receiver of described image collecting device after being penetrated by every bar recess edge.
Wherein, the transverse width of irradiation area that formed on described glass support plate of described area source be 5 ~ 10:1 by the ratio of the transverse width of scanning area.
Further, between described area source and described glass support plate, also comprise scatter plate, described scatter plate parallel with described glass support plate and with described area source synchronizing moving;
The center of described scatter plate and the center of described area source are on same vertical curve.
Preferably, described area source comprises multiple LED particle, and multiple LED particle is the arrangement of uniform dot matrix.
In accordance with a further aspect of the present invention, additionally provide etched pattern detection method in a kind of soft printing opacity object, comprising:
Horizontal placing glass back up pad, detected material is positioned over the upper surface of glass support plate, the air that the air intake device that many grooves had with described glass support plate upper surface are communicated with is drawn between described detected material and described glass support plate upper surface makes described detected material flatten;
The area source launching diffused light is set below described glass support plate, the center of the irradiation area that the diffused light that described area source provides for every bar groove is formed on described glass support plate and the center of every bar respective slot are on same vertical line, and the transverse width of described irradiation area becomes setting ratio with the transverse width of respective slot, enter described glass support plate to make described diffused light and enter in the receiver of the image collecting device arranged above described glass support plate by after every bar recess edge injection.
According to another aspect of the invention, additionally provide etched pattern detection method in a kind of soft printing opacity object, comprising:
Horizontal placing glass back up pad, detected material is positioned over the upper surface of described glass support plate, the air that the air intake device that many grooves had with described glass support plate upper surface are communicated with is drawn between described detected material and described glass support plate upper surface makes described detected material flatten;
Image collecting device above transverse shifting glass support plate, carries out linear sweep by a side of described detected material successively to another side;
Area source below glass support plate described in transverse shifting is also synchronous with the movement of described image collecting device, described area source is made to launch diffused light, and the transverse width of irradiation area that described area source is formed on described glass support plate becomes setting ratio with the transverse width in described image collecting device single pass region, and the center superposition in the center of the irradiation area that described area source is formed on described glass support plate and described image collecting device single pass region, enter described glass support plate to make described diffused light and enter the receiver of described image collecting device after being penetrated by every bar recess edge.
From above technical scheme, in the present invention, pick-up unit adopts the area source launching diffused light, and the transverse width of irradiation area that can realize at glass support plate lower surface is adjusted in the position of area source distance glass support plate become in the position range of setting ratio with the transverse width of respective slot, make most of diffused light enter glass in the mode converged, and enter the scope of image capture device receiver after every bar recess edge injection.Light formed image in image capture device of the groove outgoing of thus offering on glass support plate is no longer black lines, thus effectively suppress the image of groove in image capture device to the interference of the image of the pattern that detected material etches in image capture device, and then significantly reduce the false drop rate of detected material.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the pick-up unit of etched pattern in the soft printing opacity object of existing detection;
Fig. 2 shows the checkout equipment figure with fluting on glass support plate;
Fig. 3 is for vertically injecting the index path of the light of glass support plate when utilizing checkout equipment shown in Fig. 2 to detect;
Fig. 4 is the structural representation of the pick-up unit of etched pattern in the soft printing opacity object according to a preferred embodiment;
Fig. 5 shows diffused light in Fig. 4 and enters index path after glass support plate again after a recess edge injection;
Fig. 6 is the structural representation of the pick-up unit of etched pattern in the soft printing opacity object according to another preferred embodiment.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, carry out clear, complete description to the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Fig. 4 is the structural representation of the pick-up unit of etched pattern in the soft printing opacity object according to a preferred embodiment.As shown in Figure 4, in soft printing opacity object the pick-up unit of etched pattern comprise horizontally set glass support plate 1, be arranged at area source 2 below glass support plate 1, be arranged at image collecting device 3 above glass support plate 1 and air intake device (not shown).Image collecting device 3 is the position that image collecting device 3 can collect image clearly relative to the rational height of glass support plate 1.Transverse direction described in the application is the direction that the glass support plate 1 kept flat in Fig. 4 extends to the right from left side, and direction vertical with transverse direction in same level is longitudinally.In the application, be laterally and longitudinally for convenience of description, be not intended to limit glass support plate 1 and be only applicable to this direction.
The upper surface of glass support plate 1 has many grooves be interconnected, and the bottom of groove is provided with the through hole with glass support plate 1 ft connection, and this through hole is communicated with the air intake device of glass support plate 1 outside.
Diffused light launched by area source 2.As the preferred embodiment in each embodiment, the area source 2 in the application comprises multiple LED particle, and multiple LED particle is the arrangement of uniform dot matrix.Certainly, area source 2 adopts LED particle to be exemplary, and every light source can launching diffused light all falls into protection scope of the present invention.
In this application, the diffused light that area source 2 provides for every bar groove is at the center of irradiation area that glass support plate 1 lower surface is formed and the center of respective slot on same vertical line, and the ratio that the transverse width of irradiation area becomes with the transverse width of every bar respective slot is 5 ~ 10:1.The setting position of area source 2 below glass support plate 1 is in the position range of the ratio become with the transverse width of every bar respective slot with the transverse width realizing irradiation area between 5:1 to 10:1.
It should be noted that, the groove that glass support plate upper surface is offered has the shapes such as netted, groined type, and for each groove forming these shapes, the transverse width described in the application refers to that every bar groove is by after longitudinal profile, namely shown in Fig. 5, the length in groove topmost transversely direction.Correspondingly, the transverse width of irradiation area that formed at glass support plate lower surface of the diffused light that provides for groove of area source namely with the length of this groove equidirectional.
In the position range of the ratio that the transverse width that area source 2 is arranged on the transverse width and groove that realize irradiation area becomes between 5:1 to 10:1, the diffused light that area source 2 is launched mainly enters glass support plate 1 with direction shown in Fig. 4, after light injects glass by air, refraction angle is greater than incident angle, and light deflects.Fig. 5 shows diffused light in Fig. 4 and enters index path after glass support plate again after recess edge injection.As shown in Figure 5, when light is in glass to air outgoing outside recess edge, the angle of emergent ray and normal is c, because be inject air from glass, refraction angle is greater than incident angle, and refraction angle is d, and emergent ray outgoing is in the scope of imaging acquisition equipment receiver.
Emergent ray due to each position of recess edge mainly enters the scope of image capture device receiver, light formed image in image capture device of the groove outgoing of thus offering on glass support plate 1 is no longer black lines, thus effectively suppress the image of groove in image capture device to the interference of the image of the pattern that detected material etches in image capture device, and then significantly reduce the false drop rate of detected material.
Further, for the light enabling area source 2 send meets the transverse width of irradiation area and the requirement of the ratio of the transverse width of groove formed at glass support plate 1 lower surface, between area source 2 and glass support plate 1, also scatter plate is comprised.Wherein, scatter plate is parallel with glass support plate 1, and the center of the center of scatter plate and area source 2 is on same vertical curve.The lateral length of scatter plate is more than or equal to the maximum length that many grooves 5 extend in a lateral direction, and the longitudinal length of scatter plate is more than or equal to the maximum length that many grooves 5 extend in a longitudinal direction.In addition, the scatter plate diffused light that area source 2 can also be made to send is more even when incident glass support plate 1.
The concrete steps utilizing above-mentioned detection device to detect soft printing opacity object to be detected are as follows:
S101: horizontal placing glass back up pad, detected material 4 is positioned over the upper surface of glass support plate, the air intake device that many grooves had with glass support plate upper surface the are communicated with air drawn between detected material and glass support plate upper surface makes detected material flatten.
S102: install the area source 2 launching diffused light below glass support plate.Opening face light source 2, and adjust the position of area source 2, until the center of irradiation area that formed on glass support plate of the diffused light adjusted to area source 2 and can provide for every bar groove and the center of respective slot are on same vertical line, and the transverse width of irradiation area becomes the position of 5:1 to 10:1 ratio with the transverse width of respective slot.
S103: open image collecting device 3 and carry out image acquisition, and the image collected and standard picture are contrasted, and comparing result is exported.
Fig. 6 is the structural representation of the pick-up unit of etched pattern in the soft printing opacity object according to another preferred embodiment.As shown in Figure 6, in soft printing opacity object in this embodiment, the pick-up unit of etched pattern is substantially identical with the structure of pick-up unit in a upper embodiment, includes horizontally set and the upper surface glass support plate 1, the area source 2 that is arranged at the image collecting device 3 above glass support plate 1 and is arranged at below glass support plate 1 that have the groove that many are interconnected.Unlike, the image collecting device 3 in the present embodiment and area source 2 need move.
In the present embodiment, image collecting device 3 transversely carries out linear sweep by a side of detected material to another side in direction successively.Area source 2 is synchronous with the movement of image collecting device 3, diffused light launched by area source 2, the transverse width of the irradiation area that area source 2 is formed on glass support plate 1 becomes setting ratio with the transverse width in image collecting device 3 single pass region, and the center of irradiation area that formed on glass support plate 1 of area source 2 with by the center superposition of scanning area.As preferred embodiment, the transverse width of the irradiation area that area source 2 is formed on glass support plate 1 be 5 ~ 10:1 by the ratio of the transverse width of scanning area.
In the present embodiment, same as the previously described embodiments for the image interference principle to etched pattern image in image capture device of groove in image capture device suppressing glass support plate 1 has, repeat no more herein.In the present embodiment, setting position and the setting direction of many grooves are unimportant, article one, the groove in scanning area, as long as the irradiation area that area source 2 is formed in glass support plate 1 bottom surface is 5 ~ 10:1 with the ratio of the transverse width of scanning area, the equal major part of the light after being penetrated by recess edge enters the receiver of image collecting device 3.
Further, for making the light that in the present embodiment, area source 2 sends also can meet the transverse width of irradiation area and the requirement of the ratio of the transverse width of groove that are formed at glass support plate 1 lower surface, between area source 2 and glass support plate 1, also scatter plate is comprised.Wherein, scatter plate is synchronous with the movement of area source 2, and the center of the center of scatter plate and area source 2 is on same vertical curve.The diffused light that scatter plate can make area source 2 send is more even when incident glass support plate 1.
The concrete steps utilizing the pick-up unit in the present embodiment to detect soft printing opacity object to be detected are as follows:
S201: horizontal placing glass back up pad, detected material is positioned over the upper surface of glass support plate, the air intake device that many grooves had with glass support plate upper surface the are communicated with air drawn between detected material and glass support plate upper surface makes detected material flatten.
S202: open image collecting device 3, determine the transverse width in image collecting device 3 single pass region.
S203: opening face light source 2, and the position adjusting area source 2, until the transverse width of the transverse width and image collecting device 3 single pass region of adjusting to the irradiation area that area source 2 is formed on glass support plate reaches setting ratio.
S204: the position of area source 2 adjustment after, synchronizing moving image collecting device 3 and area source 2, and the center of the irradiation area that area source 2 is formed on glass support plate with by the center superposition of scanning area.Image collecting device 3 carries out image acquisition and the image collected and standard picture is contrasted, and is exported by comparing result.
Soft printing opacity object in the present invention includes but not limited to the film etc.
From above technical scheme, in the present invention, pick-up unit adopts the area source launching diffused light, and the transverse width of irradiation area that can realize at glass support plate lower surface is adjusted in the position of area source distance glass support plate become in the position range of setting ratio with the transverse width of respective slot, make most of diffused light enter glass in the mode converged, and enter the scope of image capture device receiver after every bar recess edge injection.Light formed image in image capture device of the groove outgoing of thus offering on glass support plate is no longer black lines, thus effectively suppress the image of groove in image capture device to the interference of the image of the pattern that detected material etches in image capture device, and then significantly reduce the false drop rate of detected material.
Should be understood that, the present invention is not limited to precision architecture described above and illustrated in the accompanying drawings, and can carry out various amendment and change not departing from its scope.Scope of the present invention is only limited by appended claim.

Claims (10)

1. the pick-up unit of etched pattern in soft printing opacity object, comprise the glass support plate of horizontally set, the upper surface of described glass support plate has many grooves be interconnected; Wherein the bottom of a groove is provided with the through hole with glass support plate ft connection, described through hole is communicated with the air intake device of described glass support plate outside, the top of described glass support plate arranges image collecting device, it is characterized in that, described pick-up unit also comprises:
To be arranged at below described glass support plate and to launch the area source of diffused light; The center of the irradiation area that the diffused light that described area source provides for every bar groove is formed on described glass support plate and the center of every bar respective slot are on same vertical line, and the transverse width of described irradiation area becomes setting ratio with the transverse width of respective slot, enter described glass support plate to make described diffused light and enter the receiver of described image capture device after being penetrated by every bar recess edge.
2. pick-up unit according to claim 1, is characterized in that, the transverse width of irradiation area that the diffused light that described area source provides for every bar groove is formed on described glass support plate is 5 ~ 10:1 with the ratio of the transverse width of respective slot.
3. pick-up unit according to claim 1 and 2, it is characterized in that, also comprise scatter plate between described area source and described glass support plate, described scatter plate is parallel with described glass support plate, and the center of the center of described scatter plate and described area source is on same vertical curve;
The lateral length of described scatter plate is more than or equal to the maximum length that many grooves extend in a lateral direction, and the longitudinal length of described scatter plate is more than or equal to the maximum length that many grooves extend in a longitudinal direction.
4. pick-up unit according to claim 1 and 2, is characterized in that, described area source comprises multiple LED particle, and multiple LED particle is the arrangement of uniform dot matrix.
5. the pick-up unit of etched pattern in a soft printing opacity object, comprise the glass support plate of horizontally set, the bottom that the upper surface of described glass support plate has many grooves be interconnected a wherein groove is provided with the through hole with glass support plate ft connection, described through hole is communicated with the air intake device of described glass support plate outside, it is characterized in that, described pick-up unit also comprises:
The image collecting device of movement, is located at the top of described glass support plate, and transversely linear sweep is carried out by a side of described detected material successively to another side in direction;
The area source of movement, to be located at below described glass support plate and synchronous with the movement of described image collecting device, diffused light launched by described area source, the transverse width of the irradiation area that described area source is formed on described glass support plate becomes setting ratio with the transverse width in described image collecting device single pass region, and the center of irradiation area that formed on described glass support plate of described area source and the center superposition in described image collecting device single pass region, enter described glass support plate to make described diffused light and enter the receiver of described image collecting device after being penetrated by every bar recess edge.
6. pick-up unit according to claim 5, is characterized in that, the transverse width of the irradiation area that described area source is formed on described glass support plate be 5 ~ 10:1 by the ratio of the transverse width of scanning area.
7. the pick-up unit according to claim 5 or 6, is characterized in that, also comprises scatter plate between described area source and described glass support plate, described scatter plate parallel with described glass support plate and with described area source synchronizing moving;
The center of described scatter plate and the center of described area source are on same vertical curve.
8. pick-up unit according to claim 5, is characterized in that, described area source comprises multiple LED particle, and multiple LED particle is the arrangement of uniform dot matrix.
9. an etched pattern detection method in soft printing opacity object, is characterized in that, comprising:
Horizontal placing glass back up pad, detected material is positioned over the upper surface of glass support plate, the air that the air intake device that many grooves had with described glass support plate upper surface are communicated with is drawn between described detected material and described glass support plate upper surface makes described detected material flatten;
The area source launching diffused light is set below described glass support plate, the center of the irradiation area that the diffused light that described area source provides for every bar groove is formed on described glass support plate and the center of every bar respective slot are on same vertical line, and the transverse width of described irradiation area becomes setting ratio with the transverse width of respective slot, enter described glass support plate to make described diffused light and enter in the receiver of the image collecting device arranged above described glass support plate by after every bar recess edge injection.
10. an etched pattern detection method in soft printing opacity object, is characterized in that, comprising:
Horizontal placing glass back up pad, detected material is positioned over the upper surface of described glass support plate, the air that the air intake device that many grooves had with described glass support plate upper surface are communicated with is drawn between described detected material and described glass support plate upper surface makes described detected material flatten;
Image collecting device above transverse shifting glass support plate, carries out linear sweep by a side of described detected material successively to another side;
Area source below glass support plate described in transverse shifting is also synchronous with the movement of described image collecting device, described area source is made to launch diffused light, and the transverse width of irradiation area that described area source is formed on described glass support plate becomes setting ratio with the transverse width in described image collecting device single pass region, and the center superposition in the center of the irradiation area that described area source is formed on described glass support plate and described image collecting device single pass region, enter described glass support plate to make described diffused light and enter the receiver of described image collecting device after being penetrated by every bar recess edge.
CN201410612880.8A 2014-11-04 2014-11-04 The detection means and method of etched pattern in soft printing opacity object Active CN104330418B (en)

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Publication number Priority date Publication date Assignee Title
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US20090219531A1 (en) * 2008-03-03 2009-09-03 Kum-Mi Oh Detecting device and method for detecting unevenness of a glass substrate
CN202159023U (en) * 2011-04-27 2012-03-07 苏州工业园区天势科技有限公司 Inspecting device of films
CN103115754A (en) * 2013-02-04 2013-05-22 宏茂光电(苏州)有限公司 Inspection bench for reflectors
CN203799178U (en) * 2014-04-30 2014-08-27 遂宁市维海电子科技有限公司 FPC board positioning exposure device with vacuum pressure monitoring function

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1573280A (en) * 2003-05-21 2005-02-02 优志旺电机株式会社 Figure checking device
US20090219531A1 (en) * 2008-03-03 2009-09-03 Kum-Mi Oh Detecting device and method for detecting unevenness of a glass substrate
CN202159023U (en) * 2011-04-27 2012-03-07 苏州工业园区天势科技有限公司 Inspecting device of films
CN103115754A (en) * 2013-02-04 2013-05-22 宏茂光电(苏州)有限公司 Inspection bench for reflectors
CN203799178U (en) * 2014-04-30 2014-08-27 遂宁市维海电子科技有限公司 FPC board positioning exposure device with vacuum pressure monitoring function

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