CN104328487A - Dual-substrate groove liquid phase epitaxial graphite boat possessing mother liquor purifying function - Google Patents
Dual-substrate groove liquid phase epitaxial graphite boat possessing mother liquor purifying function Download PDFInfo
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- CN104328487A CN104328487A CN201410546778.2A CN201410546778A CN104328487A CN 104328487 A CN104328487 A CN 104328487A CN 201410546778 A CN201410546778 A CN 201410546778A CN 104328487 A CN104328487 A CN 104328487A
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- mother liquor
- substrate groove
- substrate
- slide plate
- groove
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Abstract
The invention discloses a dual-substrate groove liquid phase epitaxial graphite boat possessing mother liquor purifying function, the epitaxial graphite boat comprises a cover plate, a mother liquor groove, a dual-substrate groove slide plate and a main body groove, a substrate groove A and a substrate groove B which are adjacent are arranged on the dual-substrate groove slide plate, according to movement direction of the slide plate, a sacrificial plate is placed in a front substrate groove A, a growth plate is placed in a rear substrate groove B, the sacrificial plate is used for purifying mother liquor, and the growth plate is used for growing epitaxial film, The dual-substrate groove liquid phase epitaxial graphite boat has the advantages that the by means of mother liquor purifying through the sacrificial plate by the unique dual-substrate groove graphite boat, influence of impurity in the mother liquor to the epitaxial film can be effectively reduced, carrier concentration in the epitaxial film can be reduced, and the electricity performance of the epitaxial film can be increased.
Description
Technical field
Century of the present invention a kind of graphite boat, be specifically related to a kind of two substrate groove liquid extension graphite boats with purification mother liquor function, it is applied to the semiconductor material purification techniques in infrared eye and opto-electronic conversion field and the growth of high quality epitaxial material.
Background technology
Liquid phase epitaxial technique (LPE technique) is a kind of Semiconductor Film Growth technology of maturation.The advantages such as relative to molecular beam epitaxy homepitaxy technology, LPE has simple to operate, and growth cycle is short, and the epitaxial film defect that low and its near-thermal equilibrium state growth pattern of epitaxy expense obtains is few.But the impurity unavoidably carried in mother liquor will affect the quality of epitaxial film.For InAs iso-epitaxy, in rich In mother liquor, there is the background impurities element that Si and S two kinds is main, in addition also have the impurity such as Se, C, Te and O.These impurity or serve as alms giver or for acceptor, result in carrier concentration in epitaxial film too high.Through our investigation, solution mainly contains three kinds: (1), in atmosphere of hydrogen, long-time high bake volatilizees to impurity.But the method is introduced hydrogen and is had certain danger, and required time is oversize, within 50 hours, impurity concentration can be dropped to 2x10
6cm
-3[1].(2) replacing graphite boat with quartz boat, utilize quartz boat purity higher than the feature of graphite boat purity, replacing graphite boat to reducing the impurity [2] in epitaxial film with quartz boat.But the method can occur seriously to glue boat phenomenon [3], and namely mother liquor and quartz boat infiltrate, cause mother liquor to be sticky on quartz boat and be difficult to remove down.(3) in mother liquor, rare earth element is added: by the distinctive activity of rare earth element, the impurity of disperse in suction mother liquor, thus purification mother liquor [4], but mixing of rare earth element causes epitaxial film bad appearance [5] sometimes.Method now used is generally the mother liquor with graphite boat carrying doped with rare-earth elements, and toasts under an atmosphere of hydrogen, to reduce the impurity in mother liquor as much as possible.But such mode still Shortcomings: rare earth element can form the stable compound being insoluble to rich In mother liquor with the impurity of disperse in mother liquor, and the surface [6] of mother liquor can be accumulated in, and these insoluble compounds can grow on sheet by preferential deposition in the process of epitaxial film growth, the serious growth affecting epitaxial film, makes the electric property of epitaxial film be deteriorated.The present invention is exactly in order to removing accumulates in the impurity on mother liquor surface, to improve the electric property of epitaxial film as much as possible.
The reference related in literary composition is as follows:
[1]Harrison R J and Houston P A,J.Crystal Growth,78(1986)257
[2] high radix polygonati officinalis, Gong Xiuying etc., optoelectronic laser, 16 (2005) 11
[3] Wu Jisen, Zou Yuanxi, not Baconic, applied science journal, 2 (1984) 1
[4]M.C.Wu,E.H.Chen,T.S.Chin,and Y.K.Tu,Jpn.J.Appl.Phys.30(1991),2679
[5]Bantien F,Bauser E and Weber,J.Appl.Phys.61(1987)2803
[6]Gao W,Berger P R,Ervin M H,Pamulapati J,Lareau R Tand Schauer S,J.Appl.Phys.80(1996)7094
Summary of the invention
The object of this invention is to provide a kind of two substrate groove rheotaxy graphite boats carrying out purification mother liquor by sacrificing sheet, with this alleviate in mother liquor, add rare earth element after formed stable be insoluble to mother liquor and accumulate in the surface of mother liquor compound can preferential deposition on growth sheet, seriously affect the quality of epitaxial film, make the problem that the electric property of epitaxial film is deteriorated.
This graphite boat it comprise cover plate 1, mother liquor tank 2, two substrate groove slide plate 3 and base 4, wherein:
Described base 4 is a kind of flat " U " type grooves in order to place two substrate groove slide plates and fixing mother liquor tank;
Described two substrate groove slide plates 3 have two adjacent substrate grooves on its slide plate, namely the substrate groove A3.1 of sheet and the substrate groove B3.2 for placing epitaxy sheet is sacrificed for placing, by slide plate travel direction, previous is substrate groove A3.1, latter one is substrate groove B3.2, and its intervening gaps is consistent with the spacing of two liquid baths 2.1 adjacent in mother liquor tank 2;
Described mother liquor tank 2 be one piece can the rectangular parallelepiped graphite block of inserted base, it has n rectangular through slot and liquid bath, in order to hold mother liquor, the mother liquor species number of n needed for crystal growth determines;
Two substrate groove slide plate 3 lies against the bottom of " U " type groove on base 4, can slidably reciprocate, mother liquor tank 2 is positioned on two substrate groove slide plate, graphite cylinder is fixed on base through the through hole 2.2 of the through hole 4.1 on base and mother liquor tank, and cover plate 1 covers mother liquor tank 2 and prevents the mother liquor in liquid bath from volatilizing.
The advantage of this graphite boat is: two substrate groove slide plate has two adjacent substrate groove A3.1 and B3.2, and two liquid baths 2.1 that its adjacent spaces is adjacent with mother liquor tank are consistent.By slide plate travel direction, previous substrate groove A3.1 places and sacrifices sheet, preferentially can contact mother liquor, thus make the insoluble compound accumulating in mother liquor surface be deposited on sacrifice sheet as far as possible, so the growth sheet being placed on substrate groove B3.2 just can contact with relatively pure fresh mother liquor, so that grow high-quality epitaxial film.
Accompanying drawing explanation
Fig. 1 is the principle schematic of rare earth purification mother liquor.
Fig. 2 is the principle schematic accumulating in the insoluble compound on mother liquor surface formed after utilizing two substrate groove slide plate minimizing to add rare earth in mother liquor.Fig. 2-1 is the schematic diagram before slide plate moves; Fig. 2-2 is schematic diagram that mother liquor contacts with sacrifice sheet; Fig. 2-3 is schematic diagram that mother liquor contacts with growth sheet; Fig. 2-4 is schematic diagram of slide plate mobile end; Fig. 2-5 is film schematic diagram that growth terminates rear growth sheet and sacrifices on sheet.
Fig. 3 is the structural representation of mother liquor tank.Fig. 3-1 is vertical view; Fig. 3-2 is left pseudosections.2.1-liquid bath, 2.2-mother liquor tank through hole.
Fig. 4 is the structural representation of two substrate groove slide plate.Fig. 4-1 is vertical view; Fig. 4-2 is main pseudosections.3.1-sacrifice film trap, 3.2-growth film trap, 3.3-push rod jack.
Fig. 5 is the structural representation of base.Fig. 5-1 is vertical view; Fig. 5-2 is left views.4.1-base plate through holes.
Fig. 6 is graphite boat one-piece construction schematic diagram.Fig. 6-1 is overall main pseudosection; 6-2 is that profile is looked on a left side.1-cover plate, 2-mother liquor tank, 3-bis-substrate groove slide plate, 3.4-push rod, 4-base.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail:
To grow InAs iso-epitaxy:
1 weighs: take a certain amount of In and InAs according to phasor, then take appropriate rare earth Gd.
2 assembling graphite boats: the bottom two substrate groove slide plate being lain in the groove of base, then by the groove of mother liquor tank inserted base, justify align, and in the through hole of base side, insert graphite stub with fixing mother liquor tank.Drag two substrate groove slide plate and adjust its position, by slide plate travel direction, growth film trap is just covered by mother liquor tank rear end completely.Finally load weighted In and InAs is put into the liquid bath of mother liquor tank, cover cover plate.In this enforcement example, tank dimension is 12x10x14mm, has 6, in order to grow film or the multilayer film of differing materials.
Graphite boat is loaded LPE equipment by 3, and then push rod is inserted the push rod jack on two substrate groove slide plate, open system after sealing, sets program and vacuumize.
4 are heated to 650 DEG C under an atmosphere of hydrogen, and constant temperature 2h, In and InAs is mixed, then cools.
5 take out graphite boat, in the mother liquor of cooling, add load weighted rare earth Gd, repeating step 3 and 4.
6 prepare two pieces of InAs substrates, and sheet is sacrificed in one piece of conduct, and one piece as growth sheet.Pre-treatment (cleaning, corrosion etc.) is carried out to substrate, after decomposing graphite boat, is respectively charged into corresponding substrate groove.In this enforcement example, substrate groove is of a size of 12x12x0.5mm.
The mother liquor of cooling is loaded corresponding liquid bath by 7, assembles graphite boat.Graphite boat is loaded LPE equipment, insert push rod, open system after sealing, sets program and vacuumizes.Then 650 DEG C are heated under an atmosphere of hydrogen, and constant temperature 2h, then carry out by setup program, dragging skateboard makes sacrifice sheet contact with mother liquor, waits for that several minutes enables as much as possible being deposited on of the impurity in mother liquor sacrifice on sheet.
8 again dragging skateboard mother liquor to be left sacrifice after sheet rapidly with grow sheet and contact and start the growth of epitaxial film.Adjustment growth time can obtain the film of different thickness (tens nanometers are to several micron).
9 complete epitaxial film growth after cool fast immediately, last closing device.
Claims (1)
1. have two substrate groove liquid extension graphite boats for purification mother liquor function, it comprises cover plate (1), mother liquor tank (2), two substrate groove slide plate (3) and base (4), it is characterized in that:
Described base (4) is a kind of flat " U " type groove in order to place two substrate groove slide plates and fixing mother liquor tank;
Described two substrate groove slide plates (3) have two adjacent substrate grooves on its slide plate, namely the substrate groove A (3.1) of sheet and the substrate groove B (3.2) for placing epitaxy sheet is sacrificed for placing, by slide plate travel direction, previous is substrate groove A (3.1), latter one is substrate groove B (3.2), and its intervening gaps is consistent with the spacing of two liquid baths (2.1) adjacent in mother liquor tank (2);
Described mother liquor tank (2) be one piece can the rectangular parallelepiped graphite block of inserted base, it has n rectangular through slot and liquid bath, in order to hold mother liquor, the mother liquor species number of n needed for crystal growth determines;
Two substrate groove slide plate (3) lies against the bottom of " U " type groove on base (4), can slidably reciprocate, mother liquor tank (2) is positioned on two substrate groove slide plate, graphite cylinder is fixed on base through the through hole (2.2) of the through hole (4.1) on base and mother liquor tank, and the cover plate (1) preventing the mother liquor in liquid bath from volatilizing covers mother liquor tank (2).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410546778.2A CN104328487A (en) | 2014-10-16 | 2014-10-16 | Dual-substrate groove liquid phase epitaxial graphite boat possessing mother liquor purifying function |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410546778.2A CN104328487A (en) | 2014-10-16 | 2014-10-16 | Dual-substrate groove liquid phase epitaxial graphite boat possessing mother liquor purifying function |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5930797A (en) * | 1982-08-16 | 1984-02-18 | Shin Etsu Handotai Co Ltd | Liquid phase epitaxial growth method |
| CN88201086U (en) * | 1988-02-05 | 1988-08-24 | 清华大学 | Horizontal sliding graphite boat |
| CN102995115A (en) * | 2012-12-27 | 2013-03-27 | 中国电子科技集团公司第十一研究所 | Graphite boat for liquid phase epitaxy growth and liquid phase epitaxy growth method |
| CN103882527A (en) * | 2014-01-17 | 2014-06-25 | 中国科学院上海技术物理研究所 | Growing device for reducing mucus on surface of HgCdTe liquid-phase epitaxial material |
| CN204224738U (en) * | 2014-10-16 | 2015-03-25 | 中国科学院上海技术物理研究所 | There are two substrate groove liquid extension graphite boats of purification mother liquor function |
-
2014
- 2014-10-16 CN CN201410546778.2A patent/CN104328487A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5930797A (en) * | 1982-08-16 | 1984-02-18 | Shin Etsu Handotai Co Ltd | Liquid phase epitaxial growth method |
| CN88201086U (en) * | 1988-02-05 | 1988-08-24 | 清华大学 | Horizontal sliding graphite boat |
| CN102995115A (en) * | 2012-12-27 | 2013-03-27 | 中国电子科技集团公司第十一研究所 | Graphite boat for liquid phase epitaxy growth and liquid phase epitaxy growth method |
| CN103882527A (en) * | 2014-01-17 | 2014-06-25 | 中国科学院上海技术物理研究所 | Growing device for reducing mucus on surface of HgCdTe liquid-phase epitaxial material |
| CN204224738U (en) * | 2014-10-16 | 2015-03-25 | 中国科学院上海技术物理研究所 | There are two substrate groove liquid extension graphite boats of purification mother liquor function |
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