CN104328388A - Three-dimensional printing method and system of refractory metal component - Google Patents
Three-dimensional printing method and system of refractory metal component Download PDFInfo
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- CN104328388A CN104328388A CN201410607317.1A CN201410607317A CN104328388A CN 104328388 A CN104328388 A CN 104328388A CN 201410607317 A CN201410607317 A CN 201410607317A CN 104328388 A CN104328388 A CN 104328388A
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- refractory metal
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
- C23C16/14—Deposition of only one other metal element
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Powder Metallurgy (AREA)
Abstract
The invention relates to a three-dimensional printing method and a system of a refractory metal component. The method comprises the following steps: S1, building a three-dimensional model of the component, generating a multilayer sliced file and inputting the multilayer sliced file into a computer; S2, starting a chemical gaseous phase reaction device, feeding a precursor containing refractory metal elements into a high-temperature plane base station through a nozzle under the action of a carrier gas, wherein the precursor is decomposed under the action of the high temperature plane base station, and the refractory metal is deposited on the high temperature plane base station; S3, controlling the high temperature plane base station to move by the computer according to the multilayer sliced file, thereby realizing the dispersion-deposition of the refractory metal and forming the refractory metal component. The system comprises the chemical gaseous phase reaction device, the high temperature plane base station, a carrier gas input device, the nozzle and the computer which controls the high temperature plane base station to move according to the multilayer sliced file of the refractory metal; the chemical gaseous phase reaction device is communicated with the carrier gas input device and is connected with the nozzle, and the nozzle faces the high temperature plane base station. The method and the system are low in energy consumption and are suitable for producing the refractory metal components in various complex shapes.
Description
Technical field
The present invention relates to 3D printing technique, particularly relate to a kind of 3D Method of printing and system of refractory metal parts.
Background technology
It is the one of Rapid Prototyping technique that 3D prints, and it is based on digital model file, is carried out the technology of constructed object by the mode of successively piling up material.3D prints common materials and comprises macromolecular material, metal and pottery etc.Wherein, macromolecular material, because fusing point is low or photocurable, is the material the most easily realizing 3D printing.For metal, the realization of successively piling up requires metal powder can be melted or sinter, and the metal that usual fusing point is lower is easier to carry out 3D printing, such as aluminium alloy.Titanium alloy, stainless steel etc., the metal of fusing point more than 1500 DEG C then needs to adopt the laser beam of very high power density or electron beam could realize 3D and prints.And there is the refractory metal of high-melting-point (>1800 DEG C), such as zirconium, molybdenum, tungsten, rhenium etc., be then difficult to realize 3D and print.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, provides a kind of energy consumption is low, be applicable to the refractory metal parts manufacturing various complicated shape 3D Method of printing and system.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A 3D Method of printing for refractory metal parts, comprises the following steps:
S1: set up three-dimensional part model, generates multilayer wall file by slicing treatment software by described three-dimensional part model, and by described multilayer wall file input computer;
S2: start chemical gas phase reaction device, to the gaseous state precursor of refractory metal elements be comprised under the effect of carrier gas, deliver to high-temperature plane base station by nozzle, gaseous state precursor issues solution estranged in the effect of high-temperature plane base station, and refractory metal is deposited on high-temperature plane base station;
S3: described computer moves according to multilayer wall document control high-temperature plane base station, realizes the discrete dynamics models of refractory metal, the required refractory metal parts of final formation.
Further improvement as technique scheme:
When carrying out step S2, first refractory metal powder is heated to generate muriatic temperature with chlorine reaction, then passes into chlorine reaction generation muriate, and make the gaseous state precursor comprising refractory metal elements described in muriate distillation formation.
When carrying out step S2, the organism containing refractory metal being heated to sublimation temperature, described in formation, comprising the gaseous state precursor of refractory metal elements.
Described carrier gas is rare gas element.
The temperature of described high-temperature plane base station is make gaseous state precursor that the temperature of decomposing occur.
The flow that passes into of described gaseous state precursor is 10ml/min ~ 200ml/min, described carrier gas pass into 2 ~ 10 times that flow is gaseous state precursor flow.
A kind of 3D print system of the refractory metal parts for realizing aforesaid method, comprise the computer of chemical gas phase reaction device, high-temperature plane base station, carrier gas input unit, nozzle and the multilayer wall document control high-temperature plane base station movement according to described refractory metal parts, be connected with nozzle after described chemical gas phase reaction device output terminal and carrier gas input unit output terminal are communicated with, described nozzle is fixedly installed towards high-temperature plane base station.
Further improvement as technique scheme:
Described chemical gas phase reaction device comprises precursor raw material input device and sublimation apparatus, and described precursor raw material input device is communicated with sublimation apparatus, is connected after described sublimation apparatus output terminal and carrier gas input unit output terminal are communicated with nozzle.
Described 3D print system also comprises closed forming cavity and emission-control equipment, and described high-temperature plane base station, nozzle and sublimation apparatus are all located in forming cavity, and described emission-control equipment is communicated with forming cavity.
Described 3D print system also comprises heating control apparatus, and described heating control apparatus is connected with high-temperature plane base station and sublimation apparatus.
Compared with prior art, the invention has the advantages that:
The 3D Method of printing of refractory metal parts of the present invention, can realize the stack shaping of refractory metal, and without the need to high power laser or electron-beam generator, energy consumption is low under the lesser temps far below refractory metal fusing point; Can directly make required refractory metal parts, near-net-shape, without the need to middle-chain, and be applicable to the part manufacturing various complicated shape, especially, when the complicated refractory metal parts manufacturing inside and have Complex Different Shape structure (as cavity), cannot manufacture as chemical Vapor deposition process or electrodip process by traditional method, more its advantage can be highlighted; Experiment proves, more than 99.5% of obtained refractory metal parts density accessibility theory density.The 3D print system of refractory metal parts of the present invention, its structure is simple, can the 3D Method of printing of smooth execution refractory metal parts of the present invention.
Accompanying drawing explanation
Fig. 1 is the schema of the 3D Method of printing of refractory metal parts of the present invention.
Fig. 2 is the structural representation of the 3D print system of refractory metal parts of the present invention.
In figure, each label represents:
1, computer; 2, chemical gas phase reaction device; 21, precursor raw material input device; 22, sublimation apparatus; 3, high-temperature plane base station; 4, carrier gas input unit; 5, nozzle; 6, forming cavity; 7, emission-control equipment; 8, heating control apparatus.
Embodiment
Fig. 1 shows the 3D Method of printing flow process of a kind of refractory metal parts of the present invention, and the method comprises the following steps:
S1: set up three-dimensional part model, generates multilayer wall file by slicing treatment software by three-dimensional part model, and by multilayer wall file input computer 1;
S2: start chemical gas phase reaction device 2, to the gaseous state precursor of refractory metal elements be comprised under the effect of carrier gas, deliver to high-temperature plane base station 3 by nozzle 5, gaseous state precursor issues solution estranged in the effect of high-temperature plane base station 3, and refractory metal is deposited on high-temperature plane base station 3;
S3: computer 1 moves according to multilayer wall document control high-temperature plane base station 3, realizes the discrete dynamics models of refractory metal, the required refractory metal parts of final formation.
Further, when carrying out step S2, first refractory metal powder is heated to generate muriatic temperature with chlorine reaction, then passes into chlorine reaction generation muriate, and make muriate distillation form the gaseous state precursor comprising refractory metal elements; Also when carrying out step S2, the organism containing refractory metal can be heated to sublimation temperature, form the gaseous state precursor comprising refractory metal elements.
Further, carrier gas is rare gas element, the temperature of high-temperature plane base station 3 be make gaseous state precursor occur decompose temperature, the flow that passes into of gaseous state precursor is 10ml/min ~ 200ml/min, carrier gas pass into 2 ~ 10 times that flow is gaseous state precursor flow.
The 3D Method of printing of refractory metal parts of the present invention, can realize the stack shaping of refractory metal, and without the need to high power laser or electron-beam generator, energy consumption is low under the lesser temps far below refractory metal fusing point; Can directly make required refractory metal parts, near-net-shape, without the need to middle-chain, and be applicable to the part manufacturing various complicated shape, especially, when the complicated refractory metal parts manufacturing inside and have Complex Different Shape structure (as cavity), cannot manufacture as chemical Vapor deposition process or electrodip process by traditional method, more its advantage can be highlighted; Experiment proves, more than 99.5% of obtained refractory metal parts density accessibility theory density.
Fig. 2 shows the 3D print system embodiment of a kind of refractory metal parts of the present invention, this 3D print system comprises the computer 1 of chemical gas phase reaction device 2, high-temperature plane base station 3, carrier gas input unit 4, nozzle 5 and multilayer wall document control high-temperature plane base station 3 movement according to refractory metal parts, be connected with nozzle 5 after chemical gas phase reaction device 2 output terminal and carrier gas input unit 4 output terminal are communicated with, nozzle 5 is fixedly installed towards high-temperature plane base station 3, its structure is simple, can the 3D Method of printing of smooth execution refractory metal parts of the present invention.
In the present embodiment, chemical gas phase reaction device 2 comprises precursor raw material input device 21 and sublimation apparatus 22, precursor raw material input device 21 is communicated with sublimation apparatus 22, be connected with nozzle 5 after sublimation apparatus 22 output terminal and carrier gas input unit 4 output terminal are communicated with, 3D print system also comprises closed forming cavity 6 and emission-control equipment 7, high-temperature plane base station 3, nozzle 5 and sublimation apparatus 22 are all located in forming cavity 6, emission-control equipment 7 is communicated with forming cavity 6, 3D print system also comprises heating control apparatus 8, heating control apparatus 8 is connected with high-temperature plane base station 3 and sublimation apparatus 22.
Below the embodiment manufacturing rhenium part with the 3D Method of printing of refractory metal parts of the present invention and device:
S1: the three-dimensional model setting up required part with 3D sculpting software, then by slicing treatment software, the three-dimensional model of required part is generated multilayer wall file, and by multilayer wall file input computer 1;
S2: start chemical gas phase reaction device 2, rhenium powder is added at sublimation apparatus 22, by heating control apparatus 8, rhenium powder is heated to 750 DEG C, chlorine is passed into sublimation apparatus 22 by precursor raw material input device 21, it is 150ml/min that chlorine passes into flow, chlorine and rhenium powder react and generate rhenium pentachloride, and make rhenium pentachloride distillation form gaseous state precursor, it is 60ml/min that the rhenium pentachloride gaseous state precursor of distillation passes into flow, carrier gas input unit 4 passes into argon gas as carrier gas, it is 500 ml/min that argon gas passes into flow, high-temperature plane base station 3 is delivered to through nozzle 5 after the rhenium pentachloride gaseous state precursor distilled mixes with argon gas, pass through heating control apparatus 8 by the heating temperatures of high-temperature plane base station 3 to 1300 DEG C simultaneously, rhenium pentachloride gaseous state precursor issues solution estranged in the effect of high-temperature plane base station 3, rhenium is made to start to deposit on high-temperature plane base station 3, pass into gas that the gas of forming cavity 6 and rhenium pentachloride decomposite constantly by emission-control equipment 7 collection and treatment simultaneously,
S3: computer 1 moves according to multilayer wall document control high-temperature plane base station 3, realizes the discrete dynamics models of rhenium, the required rhenium part of final formation.
Below the embodiment manufacturing iridium part with the 3D Method of printing of refractory metal parts of the present invention and device:
S1: the three-dimensional model setting up required part with 3D sculpting software, then by slicing treatment software, the three-dimensional model of required part is generated multilayer wall file, and by multilayer wall file input computer 1;
S2: start chemical gas phase reaction device 2, methyl ethyl diketone iridium is added at sublimation apparatus 22, by heating control apparatus 8, methyl ethyl diketone iridium is heated to 210 DEG C of distillations, form gaseous state precursor, it is 10ml/min that the methyl ethyl diketone iridium gaseous state precursor of distillation passes into flow, carrier gas input unit 4 passes into argon gas as carrier gas, it is 50ml/min that argon gas passes into flow, high-temperature plane base station 3 is delivered to through nozzle 5 after the methyl ethyl diketone iridium distilled mixes with argon gas, pass through heating control apparatus 8 by the heating temperatures of high-temperature plane base station 3 to 700 DEG C simultaneously, methyl ethyl diketone iridium issues solution estranged in the effect of high-temperature plane base station 3, iridium is made to start to deposit on high-temperature plane base station 3, pass into the impurity reaction that the gas of forming cavity 6 and methyl ethyl diketone iridium decomposite simultaneously, and constantly by emission-control equipment 7 collection and treatment,
S3: computer 1 moves according to multilayer wall document control high-temperature plane base station 3, realizes the discrete dynamics models of iridium, the required iridium part of final formation.
Although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention.Any those of ordinary skill in the art, when not departing from technical solution of the present invention scope, can utilize the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or being revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments, equivalent variations and modification, all should drop in the scope of technical solution of the present invention protection.
Claims (10)
1. a 3D Method of printing for refractory metal parts, is characterized in that: comprise the following steps:
S1: set up three-dimensional part model, generates multilayer wall file by slicing treatment software by described three-dimensional part model, and by described multilayer wall file input computer (1);
S2: start chemical gas phase reaction device (2), to the gaseous state precursor of refractory metal elements be comprised under the effect of carrier gas, high-temperature plane base station (3) is delivered to by nozzle (5), gaseous state precursor issues solution estranged in the effect of high-temperature plane base station (3), makes refractory metal in the upper deposition of high-temperature plane base station (3);
S3: described computer (1) is mobile according to multilayer wall document control high-temperature plane base station (3), realizes the discrete dynamics models of refractory metal, the required refractory metal parts of final formation.
2. the 3D Method of printing of refractory metal parts according to claim 1, it is characterized in that: when carrying out step S2, first refractory metal powder is heated to generate muriatic temperature with chlorine reaction, pass into chlorine reaction again and generate muriate, and make the gaseous state precursor comprising refractory metal elements described in muriate distillation formation.
3. the 3D Method of printing of refractory metal parts according to claim 1, is characterized in that: when carrying out step S2, the organism containing refractory metal is heated to sublimation temperature, comprises the gaseous state precursor of refractory metal elements described in formation.
4. the 3D Method of printing of refractory metal parts according to any one of claim 1 to 3, is characterized in that: described carrier gas is rare gas element.
5. the 3D Method of printing of refractory metal parts according to any one of claim 1 to 3, is characterized in that: the temperature of described high-temperature plane base station (3) is make gaseous state precursor that the temperature of decomposing occur.
6. the 3D Method of printing of refractory metal parts according to any one of claim 1 to 3, is characterized in that: the flow that passes into of described gaseous state precursor is 10ml/min ~ 200ml/min, described carrier gas pass into 2 ~ 10 times that flow is gaseous state precursor flow.
7. one kind for realizing the 3D print system of the refractory metal parts of method according to any one of claim 1 to 6, it is characterized in that: comprise chemical gas phase reaction device (2), high-temperature plane base station (3), carrier gas input unit (4), the computer (1) of nozzle (5) and multilayer wall document control high-temperature plane base station (3) movement according to described refractory metal parts, be connected with nozzle (5) after described chemical gas phase reaction device (2) output terminal and carrier gas input unit (4) output terminal are communicated with, described nozzle (5) is fixedly installed towards high-temperature plane base station (3).
8. the 3D print system of refractory metal parts according to claim 7, it is characterized in that: described chemical gas phase reaction device (2) comprises precursor raw material input device (21) and sublimation apparatus (22), described precursor raw material input device (21) is communicated with sublimation apparatus (22), is connected after described sublimation apparatus (22) output terminal and carrier gas input unit (4) output terminal are communicated with nozzle (5).
9. the 3D print system of refractory metal parts according to claim 8, it is characterized in that: described 3D print system also comprises closed forming cavity (6) and emission-control equipment (7), described high-temperature plane base station (3), nozzle (5) and sublimation apparatus (22) are all located in forming cavity (6), and described emission-control equipment (7) is communicated with forming cavity (6).
10. the 3D print system of refractory metal parts according to claim 9, is characterized in that: described 3D print system also comprises heating control apparatus (8), and described heating control apparatus (8) is connected with high-temperature plane base station (3) and sublimation apparatus (22).
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| CN201410607317.1A CN104328388B (en) | 2014-11-03 | 2014-11-03 | Three-dimensional printing method and system of refractory metal component |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105034378A (en) * | 2015-08-27 | 2015-11-11 | 中国科学院广州能源研究所 | Gas atmosphere-type 3D (Three Dimensional) printing box |
| CN105729127A (en) * | 2016-05-05 | 2016-07-06 | 安徽中科镭泰激光科技有限公司 | Laser manufacture teaching machine |
| CN109179510A (en) * | 2018-09-28 | 2019-01-11 | 航天材料及工艺研究所 | A kind of device preparing rhenium pentachloride |
| CN110512193A (en) * | 2019-09-11 | 2019-11-29 | 张家港博发纳米材料科技有限公司 | Micro-nano 3 D-printing method and device based on laser chemical vapor deposition |
| CN110814351A (en) * | 2019-12-20 | 2020-02-21 | 河北工程大学 | 3D printing device based on pointing type CVD technology |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105034378A (en) * | 2015-08-27 | 2015-11-11 | 中国科学院广州能源研究所 | Gas atmosphere-type 3D (Three Dimensional) printing box |
| CN105729127A (en) * | 2016-05-05 | 2016-07-06 | 安徽中科镭泰激光科技有限公司 | Laser manufacture teaching machine |
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| CN109179510B (en) * | 2018-09-28 | 2020-12-18 | 航天材料及工艺研究所 | Device for preparing rhenium pentachloride |
| CN110512193A (en) * | 2019-09-11 | 2019-11-29 | 张家港博发纳米材料科技有限公司 | Micro-nano 3 D-printing method and device based on laser chemical vapor deposition |
| CN110814351A (en) * | 2019-12-20 | 2020-02-21 | 河北工程大学 | 3D printing device based on pointing type CVD technology |
| CN110814351B (en) * | 2019-12-20 | 2024-04-26 | 河北工程大学 | 3D printing device based on CVD technology |
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