CN104317117A - Electronic control liquid crystal Fresnel infrared beaming micro-lens chip - Google Patents

Electronic control liquid crystal Fresnel infrared beaming micro-lens chip Download PDF

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Publication number
CN104317117A
CN104317117A CN201410576830.9A CN201410576830A CN104317117A CN 104317117 A CN104317117 A CN 104317117A CN 201410576830 A CN201410576830 A CN 201410576830A CN 104317117 A CN104317117 A CN 104317117A
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liquid crystal
fresnel
infrared
control signal
pack
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CN201410576830.9A
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CN104317117B (en
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张新宇
雷宇
佟庆
罗俊
桑红石
谢长生
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/13306Circuit arrangements or driving methods for the control of single liquid crystal cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134318Electrodes characterised by their geometrical arrangement having a patterned common electrode

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Geometry (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention discloses an electronic control liquid crystal Fresnel infrared beaming micro-lens chip. The electronic control liquid crystal Fresnel infrared beaming micro-lens chip comprises a first driving control signal inputting port, a second driving control signal inputting port and a Fresnel liquid crystal beaming micro-lens, wherein the Fresnel infrared beaming micro-lens is provided with an m-level diffraction phase ring; the Fresnel liquid crystal beaming micro-lens has a liquid crystal sandwich structure; an infrared anti-reflection film system, a first substrate, a top surface patterning electrode, a first electrical isolation layer, a first liquid crystal orientation layer, a liquid crystal layer, a second liquid crystal orientation layer, a second electrical isolation layer, a top layer patterning electrode, an inter-electrode electric insulating layer, a common electrode and a second substrate are sequentially arranged between an upper layer and a lower layer; and the top surface patterning electrode and the common electrode are respectively manufactured on the first substrate and the second substrate. The electronic control liquid crystal Fresnel infrared beaming micro-lens chip has the advantages that the beaming efficiency is high, the axial configuration, the point spread function, the wave front and the like of beaming light spots can be adjusted and changed in an electronic control manner, and the micro-lens chip is easily coupled with the conventional infrared optical photoelectric mechanical structure, and is high in environmental suitability.

Description

A kind of electrically-controlled liquid crystal Fresnel infrared pack lenticule chip
Technical field
The invention belongs to infrared waves precision measurement and control technology field, more specifically, relate to a kind of electrically-controlled liquid crystal Fresnel infrared pack lenticule chip.
Background technology
Lens are for transformation beam transmission form as the basic optical element of typical converged light or diverging light etc., are the basic structural units forming optical system.Typical refractor changes direction of beam propagation and space distribution form thereof based on light in the bending effect of interface, and volume mass is relatively large, under specific materials and topographical profiles constraint, present fixing optical beam transformation usefulness.Typical diffraction lens then changes transmission light wave phase based on the embossment phase pattern be distributed on smooth or curved surface, perform based on wavefront transform wave beam pattern and can stream transport form variation operation, present larger physical dimension and quality equally, produce relatively limited phase delay or wavefront change based on set phase structure.In the last few years, conventional refraction, diffraction lens and the wave beam based on lens convert and image optics framework, just towards miniaturization even chip future development.What make refractor possess sphere or aspherical profile can modulation ability, makes diffraction lens possess adjustable reflection or transmission capacity mutually, and can the demand such as self-adaptation school toning difference and aberration, promotes the sustained and rapid development of lens and optical system technology.
At present, realize as the wave beam mapping function such as typical zoom and modulation wavefront, usually carry out based on the mechanical translation between lens or rotating manner, its defect main manifestations is in the following areas: (one) optical system is made up of the lens of multiple specific morphology structure, carrys out modulation Beam Wave-Front by changing lens position shape and can transport form by stream; (2) optical system builds based on the diffraction lens with particular surface embossment phase pattern, carrys out modulation wavefront equally based on the position deformation between lens; (3) regulate and control wavefront by configuring moveable specific pattern form diffractive phase structure in conventional optical system and reduce aberration and aberration; (4) it is large to there is inertia in the mechanical movable relied on, low-response, any incision that can not perform optical states that the intrinsic continuity of mechanical motion retrains and saltus step, and power consumption is large, auxiliary driving-controlling device relative complex; (5) due to reasons such as volume, quality and mode of operations, to be difficult in the little microminiaturized light path of flexible access or with other micronano optical photoelectric mechanical structure Couplings; (6) wave beam that is comparatively complicated or specific form cannot be used for build and the dynamic modulation of wavefront etc.To be wet by electricity or the profile pattern of other mode modulation optical function structures realizes the lens arrangement of refraction usefulness variation, there is power consumption equally large, low-response, the variation of profile pattern need be carried out and the defect such as very limited continuously.Since entering the new century, research and development can the chip control light technology of modulation wave beam pattern and energy transport form fast, has become the important directions and focus that develop advanced optical precision measurement and control technology.
In the last few years, carrying out wave beam based on electrically-controlled liquid crystal micro optical structure and convert this technology and obtain remarkable break-throughs, providing a new way for developing ultra-thin, multi-functional, optical property dynamic modulation, the even integrated lens technologies that is easy to be coupled.The major function possessed at present comprises: (one) applies electricity and drives control signal on array liquid crystal structure, the convergence of light beam, disperses or proper phase conversion etc., can launch, solidifies or modulation under any wave beam state; (2) the optical beam transformation effect of electrically-controlled liquid crystal microstructure is by the constraint of priori or beam treatment result, intervention or guiding, has intelligent feature; (3) based on the micro-nano patterned electrodes of coupling, stacked or telescopiform, the galvano conversion under sequential or space-variant pattern, wavefront construction and modulation can be carried out; (4) its time response constant of micron order thickness electrically-controlled liquid crystal material performing the operation of control light has reached sub-Millisecond, laboratory-scale fast to Microsecond grade at present, can meet conventional dynamically control light demand.Based on above-mentioned situation, how to build chip lens by the electrically-controlled liquid crystal control photo structure of little microminiaturization, realization transmission its wave beam pattern of light wave and energy stream transport automatically controlled structure and the modulation of form, become lens and optical system technology to continue to develop the nuclear problem faced, in the urgent need to new breakthrough.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of electrically-controlled liquid crystal Fresnel infrared pack lenticule chip, its object is to, realize based on concentric circular type radial diffractive phase structure transform infrared incident wave beam, light vector homophaseization vibration pack on chip optical axis direction, and the automatically controlled modulation of burnt long, point spread function and wavefront etc. and meticulous adjustment, and there is the advantage of frivolous smooth, easy and other infrared optics photoelectric mechanical structure Coupling of structure, good environmental adaptability.
For achieving the above object, according to one aspect of the present invention, provide a kind of electrically-controlled liquid crystal Fresnel infrared pack lenticule chip, comprise: first drives control signal input port, second drives control signal input port, and Fresnel liquid crystal pack lenticule, the infrared pack lenticule of Fresnel has m order diffraction phase loop, m is 1 integer be greater than, Fresnel liquid crystal pack lenticule adopts sandwiching liquid crystal structure, and be provided with infrared anti-reflection film system in turn between levels, first substrate, end face patterned electrodes, first electricity isolated layer, first liquid crystal alignment layer, liquid crystal layer, second liquid crystal alignment layer, second electricity isolated layer, top layer pattern polarizing electrode, electric insulation layer between electrode, public electrode, and second substrate, end face patterned electrodes and public electrode are produced on the first substrate and the second substrate, end face patterned electrodes and top layer pattern polarizing electrode all have m level annular diffraction phase ring, a contact conductor is extended respectively from end face patterned electrodes and top layer pattern polarizing electrode, and access first drive control signal input port and second drive control signal input port one end, two contact conductors are extended respectively from public electrode, and access first drive control signal input port and second drive control signal input port the other end, first drives control signal input port and second drives the electrode pair that control signal input port is respectively end face patterned electrodes and public electrode formation, and the electrode pair that forms of top layer pattern polarizing electrode and public electrode loads the first voltage and drives control signal V and the second voltage drives control signal V.
Preferably, after infrared waves enters Fresnel liquid crystal pack lenticule, under the multilevel Fresnel diffraction phase loop effect formed under loaded two-way voltage drives the excitation of control signal, the diffracted beam with π difference of multilevel is become by discrete adjustment, and form homophase light vibration in the direction of the optical axis, there is through synthesis formation further the sharpening focal spot of high beam degree of collecting.
Preferably, described chip also comprises chip housing, Fresnel liquid crystal pack lenticule is positioned at chip housing and is connected with it, the lenticular light entrance face of the infrared pack of Fresnel and light-emitting face are windowed out exposed by the end face of chip housing and bottom surface, first drives control signal input port and second drives control signal input port and is arranged on chip housing, and outside exposed by the lateral opening hole of chip housing.
Preferably, the first liquid crystal alignment layer and the second liquid crystal alignment layer are made by polyimide.
Preferably, the first electricity isolated layer and the second electricity isolated layer are by the SiO of submicrometer-thick 2make.
Preferably, the first substrate and the second substrate have identical material.
Preferably, the light entrance face of the first substrate and the light-emitting face of the second substrate are all shaped with the infrared anti-reflection film system of identical material.
In general, the above technical scheme conceived by the present invention compared with prior art, can obtain following beneficial effect:
1, drive control by two-way electric signal and form Fresnel pack lenticule: by independent loads two-way voltage signal on two electrode pairs of mutual intussusception, in liquid crystal material, encourage the refractive index spatial distributional pattern with Fresnel type refraction contour feature, realize the automatically controlled sharpening pack of high-energy utilization factor and the modulation of infrared incident wave beam.
2, two-way voltage signal modulation bunching parameter is mated: by flexible configuration and adjustment two-way voltage signal, automatically controlled structure is carried out to the pack form of infrared waves on chip optical axis direction, and meticulous focusing/zooming length, point spread function and wavefront etc.
3, intelligent: the infrared light field pack operation implemented by coupling and modulation two-way voltage signal, in constraint, the intervention of priori or wave beam treatment efficiency or can launch under guiding, there is intelligent feature.
4, the flexible precision of control mode is high: owing to adopting two-way voltage signal to drive control system, by flexible configuration and adjustment two-way voltage signal, can carry out meticulous pack operation, have the advantage that control mode is versatile and flexible and control accuracy is high to infrared wave beam.
5, easy to use: control optical chip of the present invention has biplane end face, its main body is the Fresnel liquid crystal pack lenticule of the multilevel annular electrically-controlled liquid crystal diffraction phase based on 2 π difference adjustments, in infrared light path, configuration is convenient, easily mates with other infrared optics physical constructions etc. and is coupled.
Accompanying drawing explanation
Fig. 1 is the structural representation of electrically-controlled liquid crystal Fresnel of the present invention infrared pack lenticule chip;
Fig. 2 is the lenticular structural representation of Fresnel liquid crystal pack of the present invention;
Fig. 3 is the optical beam transformation schematic diagram of electrically-controlled liquid crystal Fresnel of the present invention infrared pack lenticule chip.
In all of the figs, identical Reference numeral is used for representing identical element or structure, wherein:
1-first drives control signal input port, and 2-second drives control signal input port, 3-Fresnel liquid crystal pack lenticule, 4-chip housing.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
As shown in Figure 1, electrically-controlled liquid crystal Fresnel of the present invention infrared pack lenticule chip comprises: first drives control signal input port 1, second drives control signal input port 2, the Fresnel liquid crystal pack lenticule 3 be made up of the electrically-controlled liquid crystal diffraction phase ring differing adjustment based on multilevel 2 π and chip housing 4.
Fresnel liquid crystal pack lenticule 3 is positioned at chip housing 4 and is connected with it.
The light entrance face of Fresnel infrared pack lenticule 3 and light-emitting face are windowed out exposed by the end face of chip housing 4 and bottom surface.
First drives control signal input port 1 and second drives control signal input port 2 and is arranged on chip housing 4, and outside exposed by the lateral opening hole of chip housing 4.
The infrared pack lenticule 3 of Fresnel has m order diffraction phase loop, m be greater than 1 integer.Each round loop electrode pattern in the end face patterned electrodes of Fresnel infrared pack lenticule 3 and each round loop electrode pattern in top layer pattern polarizing electrode are all synchronously powered up.
After infrared waves enters Fresnel liquid crystal pack lenticule, under the multilevel Fresnel diffraction phase loop effect formed under loaded two-way voltage drives the excitation of control signal, the diffracted beam with 2 π differences of multilevel is become by discrete adjustment, and form homophase light vibration in the direction of the optical axis, there is through synthesis formation further the sharpening focal spot of high beam degree of collecting.The two-way voltage of flexible configuration and adjustment institute independent loads drives control signal, can carry out meticulous adjustment to Jiao's length of pack focal spot, form, energy state and wavefront etc.
As shown in Figure 2, Fresnel liquid crystal pack lenticule of the present invention adopts sandwiching liquid crystal structure, and is provided with electric insulation layer, public electrode and the second substrate between infrared anti-reflection film system, the first substrate, end face patterned electrodes, the first electricity isolated layer, the first liquid crystal alignment layer, liquid crystal layer, the second liquid crystal alignment layer, the second electricity isolated layer, top layer pattern polarizing electrode, electrode between levels in turn.
End face patterned electrodes and public electrode are produced on the first substrate and the second substrate.
First substrate and the second substrate have identical material.
First and second liquid crystal alignment layers are made by polyimide, but should understand alignment layer material and be not limited thereto, and also can be that other can form the channel material of the nanoscale degree of depth and width.
First and second electricity isolated layers are by the SiO of submicrometer-thick 2making, but should understand electricity isolated layer material and be not limited thereto, also can be that other can form the material of electrical isolation.
The light entrance face of the first substrate and the light-emitting face of the second substrate are all shaped with the infrared anti-reflection film system of identical material.
End face patterned electrodes and top layer pattern polarizing electrode all have m level annular diffraction phase ring.
A contact conductor is extended respectively from end face patterned electrodes and top layer pattern polarizing electrode, and access first drive control signal input port 1 and second drive control signal input port 2 one end, from public electrode, extend two contact conductors respectively, and access first drive control signal input port 1 and second drive control signal input port 2 the other end.
First drives control signal input port 1 and second drives control signal input port 2 and is respectively electrode pair and top layer pattern polarizing electrode that end face patterned electrodes and public electrode form and the electrode pair that public electrode is formed and loads the first voltage and drive control signal V 1control signal V is driven with the second voltage 2.
As shown in Figure 3, electrically-controlled liquid crystal Fresnel of the present invention infrared pack lenticule chip is by mate and adjustment is carried in the lenticular two-way voltage signal of Fresnel liquid crystal pack, control and regulate the sharpness of infrared pack wave beam, burnt length, depth of focus and wavefront, this operation is equivalent to modulation and has the crown height of the conventional Fresnel refractive micro lenses of similar smooth pack usefulness and the bending degree on smooth serrate phase structure surface with it, as the conventional convex refraction profile of equivalence of illustrated dotted line mark.The infrared outgoing pack wave beam obtained operates by the modulation of its frequency of two-way voltage signal or amplitude, is set in specific modality or is tuned to predetermined form.
For making those skilled in the art understand the present invention better, the principle of work of electrically-controlled liquid crystal Fresnel of the present invention infrared pack lenticule chip is described below in conjunction with Fig. 1 to Fig. 3.
Electrically-controlled liquid crystal Fresnel infrared pack lenticule chip is placed in optical system for testing, or the focal plane place being placed in the infrared optical system be made up of primary mirror also can weak out of focus configuration.
Two-way is driven control signal wire access first drive control signal input port and second drive control signal input port, by voltage signal input and be carried on Fresnel liquid crystal pack lenticule.
After infrared beam enters the Fresnel liquid crystal pack lenticule in chip, encourage the lower liquid crystal molecule with specific refractive index space distribution form built to interact with controlled electrical field and in height pack state, chip optical axis direction form sharpening focal spot.The refractive index spatial distributional pattern formed, the Fresnel refractive micro lenses equivalence of the smooth saw-toothed profile of multilevel of available routine.By mating flexibly and regulating the two-way independent voltage signal be carried on lenticule two telescopiform electrodes, to the position of axial pack hot spot, form, energy state and wavefront etc., automatically controlled structure and meticulous modulation can be carried out.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.

Claims (7)

1. an electrically-controlled liquid crystal Fresnel infrared pack lenticule chip, comprising: first drives control signal input port, second drives control signal input port and Fresnel liquid crystal pack lenticule, it is characterized in that,
The infrared pack lenticule of Fresnel has m order diffraction phase loop, and m is 1 integer be greater than;
Fresnel liquid crystal pack lenticule adopts sandwiching liquid crystal structure, and is provided with electric insulation layer, public electrode and the second substrate between infrared anti-reflection film system, the first substrate, end face patterned electrodes, the first electricity isolated layer, the first liquid crystal alignment layer, liquid crystal layer, the second liquid crystal alignment layer, the second electricity isolated layer, top layer pattern polarizing electrode, electrode between levels in turn;
End face patterned electrodes and public electrode are produced on the first substrate and the second substrate;
End face patterned electrodes and top layer pattern polarizing electrode all have m level annular diffraction phase ring;
A contact conductor is extended respectively from end face patterned electrodes and top layer pattern polarizing electrode, and access first drive control signal input port and second drive control signal input port one end, from public electrode, extend two contact conductors respectively, and access first drive control signal input port and second drive control signal input port the other end;
First drives control signal input port and second drives control signal input port and is respectively electrode pair and top layer pattern polarizing electrode that end face patterned electrodes and public electrode form and the electrode pair that public electrode is formed and loads the first voltage and drive control signal V and the second voltage drives control signal V.
2. electrically-controlled liquid crystal Fresnel according to claim 1 infrared pack lenticule chip, it is characterized in that, after infrared waves enters Fresnel liquid crystal pack lenticule, under the multilevel Fresnel diffraction phase loop effect formed under loaded two-way voltage drives the excitation of control signal, the diffracted beam with π difference of multilevel is become by discrete adjustment, and form homophase light vibration in the direction of the optical axis, there is through synthesis formation further the sharpening focal spot of high beam degree of collecting.
3. electrically-controlled liquid crystal Fresnel according to claim 1 infrared pack lenticule chip, is characterized in that,
Described chip also comprises chip housing;
Fresnel liquid crystal pack lenticule is positioned at chip housing and is connected with it;
The lenticular light entrance face of the infrared pack of Fresnel and light-emitting face are windowed out exposed by the end face of chip housing and bottom surface;
First drives control signal input port and second drives control signal input port and is arranged on chip housing, and outside exposed by the lateral opening hole of chip housing.
4. electrically-controlled liquid crystal Fresnel according to claim 1 infrared pack lenticule chip, is characterized in that, the first liquid crystal alignment layer and the second liquid crystal alignment layer are made by polyimide.
5. electrically-controlled liquid crystal Fresnel according to claim 1 infrared pack lenticule chip, is characterized in that, the first electricity isolated layer and the second electricity isolated layer are by the SiO of submicrometer-thick 2make.
6. electrically-controlled liquid crystal Fresnel according to claim 1 infrared pack lenticule chip, is characterized in that, the first substrate and the second substrate have identical material.
7. electrically-controlled liquid crystal Fresnel according to claim 1 infrared pack lenticule chip, is characterized in that, the light entrance face of the first substrate and the light-emitting face of the second substrate are all shaped with the infrared anti-reflection film system of identical material.
CN201410576830.9A 2014-10-24 A kind of electrically-controlled liquid crystal Fresnel infrared pack lenticule chip Active CN104317117B (en)

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CN104317117B CN104317117B (en) 2017-01-04

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CN109445146A (en) * 2018-12-29 2019-03-08 南京奥谱依电子科技有限公司 A kind of electrically-controlled liquid crystal planar diffraction micro mirror and preparation method thereof
CN109445146B (en) * 2018-12-29 2021-05-07 南京奥谱依电子科技有限公司 Electric control liquid crystal plane diffraction micro-mirror and preparation method thereof
CN110032010A (en) * 2019-04-23 2019-07-19 南京奥谱依电子科技有限公司 The bionical imaging micro mirror of electrically-controlled liquid crystal, preparation method and optical microscopy

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