CN104315972B - Interferometer outgoing wavefront detecting method based on rotating translation absolute detection - Google Patents
Interferometer outgoing wavefront detecting method based on rotating translation absolute detection Download PDFInfo
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Abstract
An interferometer outgoing wavefront detecting method based on rotating translation absolute detection belongs to the field of optical detection and comprises the following steps: defining a coordinate system; arranging a reflector at the cat eye position; filling a CCD with an interferometer image; determining the central position of the cat eye position; measuring the data of , and of the cat eye position through profile measurement software; adjusting an inclined angle of the reflector around the X axis and the Y axis or translating the reflector in the X direction and the Y direction, and obtaining the inclining amount and or the translation amount and , wherein = - ; = - (dx, 0), dx= * *PD, dx=2* /PR, = - (0,dy), dy= * *PD, and dy=2* /PR; by means of the , the and the , calculating transmitted wavefront by computer program software through the rotating translational shear absolute detection technology.
Description
Technical field
The invention belongs to field of optical detection, it is related to a kind of interferometer emerging wavefront inspection based on rotation translation absolute sense
Survey method.
Background technology
Feisuo interferometer is that the field of optical detection such as current high-precision surface shape detection and the detection of high accuracy wave aberration mainly should
One of instrument, why the detection of Feisuo interferometer is capable of high accuracy, is primarily due to the feature of its common light path, that is, joins
Examining light path and tested light path is common light path inside interferometer, can eliminate most of systematic error.But completely it is total to light
Road is a kind of ideal situation, and any interferometer system all can have certain wavefront error, and leads to hysterisis error (retrace
Error), so understanding and stellar interferometer, the transmission wavefront particularly in the case of mounting spherical standard mirror are for high accuracy
Detection is very important, and pass through measurement can also be in the compensation to a certain degree carrying out down hysterisis error, thus improving survey simultaneously
Accuracy of measurement.
The emerging wavefront measurement of General System generally requires this system to be placed in interferometer light path and measures, using light
Bundle to measure through the change of this system wavefront.Because cannot in subsystem rank direct measurement interferometer emerging wavefront,
Can only be calculated by interferometer measurement data.And carry out interferometer wavefront measurement using Hartmann wave front sensor
Need to build other light path and carry out shrink beam, and the light path built needs to be demarcated, complex operation.
Content of the invention
In order to solve problems of the prior art, the invention provides a kind of dry based on rotation translation absolute sense
Interferometer emerging wavefront detection method, the method solves interferometer emerging wavefront measurement complexity, and certainty of measurement influence factor is more
Problem, makes measuring method simple to operate, accuracy of detection is higher.
The technical scheme that present invention solution technical problem is adopted is as follows：
A kind of interferometer emerging wavefront detection method based on rotation translation absolute sense, the method comprises the steps：
Step one：Definition optical axis direction is Z axis, and vertical optical axis direction is X/Y plane, in the wavefront focus of sphericity interferometer
Position holding plane reflecting mirror forms opal position perpendicular to Z axis；Or in flat interferometer, corner reflection is placed in tested surface position
Mirror forms opal position measurement perpendicular to Z axis；
Step 2：After treating each several part working environment of interferometer stably, adjust plane reflection by observing interference fringe
Around the inclination of X, Y or corner reflector in X, the translation of Y-direction makes interferogram be full of whole CCD to mirror as far as possible；For sphere
The Power item of interferometer measurement opal position, the Z-direction position of adjustment plane mirror makes Power item be less than 2 stripeds；
Step 3：The measured value of opal rotates the difference of 180 degree for interferometer transmission wavefront, and center of rotation is designated as
The center of opal data；Center of rotation is determined by the method finding circular interferogram center；Or by sharp shaped material respectively
Block interferogram in X-direction and Y-direction, then center of rotation is determined by the image space of sharp shaped material；
Step 4：Surface shape measurement software using interferometer measures opal position data W0；Do not consider plane of reference face shape by mistake
On the premise of difference, W0For interferometer transmission wavefront WgAnd WgRotation 180 degree Wg' between difference；W0=Wg-Wg'=2 × (Wg-Ws),
Wherein WsFor rotating 180 degree not variable, the item being 2 θ including rotationally symmetrical item and angular frequency, center of rotation is (cx,cy)；
Step 5：Adjustment plane mirror around the inclination of Y-axis or corner reflector X-direction translation it is assumed that recording
The tilt quantity of reflecting mirror is tx1Or the translational movement of corner reflector is trx1, then measure opal position data W again1；W1=Wg-
Wg' (dx, 0), wherein (dx, 0) expression data translates dx pixel on CCD, and dx ≈ tx1×F#× PD, or dx=2 ×
trx1/ PR, wherein F#For the F number of sphere standard mirror, PD is the unified pixel count accounting for CCD of standard mirror, and PR is flat interferometer
The physical length that each pixel represents；
Step 6：Adjustment plane mirror is around the inclination of X-axis or corner reflector translation in the Y direction it is assumed that surveying
The tilt quantity of reflecting mirror is ty1Or the translational movement of corner reflector is try1, then measure opal position data W again2；W2=Wg-
Wg' (0, dy), and dy ≈ ty1×F#× PD, or dy=2 × try1/PR；
Step 7：Using W0, W1, W2Three data and dx, dy, are calculated by rotation translation shearing absolute sense technology
Machine making software calculates transmission wavefront Wg.
The invention has the beneficial effects as follows：The present invention directly utilizes the measurement function of interferometer itself, anti-using one piece of plane
Penetrate mirror or corner reflector just can complete the measurement of interferometer emerging wavefront, simple to operate.
Brief description
A kind of interferometer emerging wavefront detection method sphericity interferometer cat based on rotation translation absolute sense of Fig. 1 present invention
Eye position measurement schematic diagram.
A kind of interferometer emerging wavefront detection method flat interferometer class based on rotation translation absolute sense of Fig. 2 present invention
Opal position measurement schematic diagram
Fig. 3 flat interferometer of the present invention emerging wavefront measurement data forms schematic diagram
In figure：1st, sphericity interferometer, 2, plane mirror, 3, computer, 4, flat interferometer, 5, corner reflector.
Specific embodiment
With reference to the accompanying drawings and examples the present invention is described in further details.
A kind of interferometer emerging wavefront detection method based on rotation translation absolute sense, the device that the method is applied removes
Interferometer only need in itself a small-bore reflecting mirror or with measurement wavefront with bore corner reflector, the method includes as follows
Step：
Step one：Definition optical axis direction is Z axis, and vertical optical axis direction is X/Y plane, as shown in figure 1, in sphericity interferometer 1
Wavefront focal position holding plane reflecting mirror 2 forms opal position perpendicular to Z axis；Sphericity interferometer 1 parameter wherein used is：Ball
Face etalon F number：1.6, interferometer is unified to account for detector pixel number：1000 or as shown in Fig. 2 in flat interferometer 4, quilt
Survey face position is placed corner reflector 5 and is formed opal position measurement perpendicular to Z axis；Wherein plane interference instrument parameter is：Bore is
100mm, each pixel represents physical length 0.102mm
Step 2：After treating each several part working environment of interferometer stably, adjust plane reflection by observing interference fringe
Around the inclination of X, Y or corner reflector in X, the translation of Y-direction makes interferogram be full of whole CCD to mirror as far as possible；For sphere
Interferometer 1 measures the Power item of opal position, and the Z-direction position of adjustment plane mirror 2 makes Power item be less than 2 stripeds；
Step 3：The measured value of opal rotates the difference of 180 degree for interferometer transmission wavefront, and center of rotation is designated as
The center of opal data；Center of rotation is determined by the method finding circular interferogram center；Or by sharp shaped material respectively
Block interferogram in X-direction and Y-direction, then center of rotation is determined by the image space of sharp shaped material；Above two method
More accurately center is obtained by the multiple method determining levelling average；The center determining is designated as (cx,cy).
Step 4：Surface shape measurement software using interferometer measures opal position data W0；Do not consider plane of reference face shape by mistake
On the premise of difference, W0For interferometer transmission wavefront WgAnd WgRotation 180 degree Wg' between difference；W0=Wg-Wg'=2 × (Wg-Ws),
Wherein WsFor rotating 180 degree not variable, the item being 2 θ including rotationally symmetrical item and angular frequency, center of rotation is (cx,cy)；
Step 5：As shown in figure 3, adjustment plane mirror 2 is flat in X-direction around the inclination of Y-axis or corner reflector 5
Move it is assumed that the tilt quantity recording plane mirror 2 is tx1Or the translational movement of corner reflector 5 is trx1, then measure opal again
Position data W1；W1=Wg-Wg' (dx, 0), wherein (dx, 0) expression data translates dx pixel on CCD, and dx ≈ tx1×F#
× PD, unit is radian, or dx=2 × trx1/ PR, wherein F#For the F number of sphere standard mirror, PD is that standard mirror is unified to be accounted for
The pixel count of CCD, PR is the physical length of each pixel representative of flat interferometer 4；Move on the detector before obtaining echo
Dynamic pixel count dx ≈ tx1× 1.6 × 1000 or dx=2 × trx1/0.102；
Step 6：Adjustment plane mirror 2 around X-axis inclination or corner reflector 5 translation in the Y direction it is assumed that surveying
Plane mirror 2 tilt quantity be ty1Or the translational movement of corner reflector 5 is try1, then measure opal position data again
W2；W2=Wg-Wg' (0, dy), and dy ≈ ty1×F#× PD, or dy=2 × try1/PR；Obtain before echo on the detector
The pixel count dy ≈ t of movementy1× 1.6 × 1000 or dx=2 × try1/0.102；
Step 7：Using W0, W1, W2Three data and dx, dy, are calculated by rotation translation shearing absolute sense technology
Machine 3 making software calculates transmission wavefront Wg.
G × X=W, wherein, X is interferometer emerging wavefront WgFit to the zernike coefficient group after zernike polynomial
The length becoming is the column vector of n.W is W0, W1, W2In all m valid pixels end value composition length be 3m row to
Amount.
G=[Wz-Wzrot180；
Wz-Wzrot180_translateX；
Wz-Wzrot180_translateY], it is the matrix of 3m × n size；Wherein,
Wz=[Z4(x1,y1)Z5(x1,y1)…Zn(x1,y1)；
Z4(x2,y2)Z5(x2,y2)…Zn(x2,y2)；
…
Z4(xm,ym)Z5(xm,ym)…Zn(xm,ym)], it is value on pixel for the zernike polynomial, be m × n size
Matrix；Wzrot180For WzThe value of the zernike polynomial of correspondence position after rotation 180 degree；Wzrot180_translateXFor WzRotation
Then 180 degree translates pxThe value of the zernike polynomial of correspondence position afterwards；Wzrot180_translateYFor WzRotation 180 degree is then flat
Move pyThe value of the zernike polynomial of correspondence position afterwards；M is the number of valid pixel, and n is the item of taken zernike polynomial
Number.
Resolved by least square and obtain X, i.e. the zernike coefficient of interferometer emerging wavefront.
Claims (2)
1. a kind of interferometer emerging wavefront detection method based on rotation translation absolute sense is it is characterised in that the method includes
Following steps：
Step one：Definition optical axis direction is Z axis, and vertical optical axis direction is X/Y plane, in the wavefront focal position of sphericity interferometer
Holding plane reflecting mirror forms opal position perpendicular to Z axis；Or in flat interferometer, tested surface position is placed corner reflector and is hung down
Directly form opal position measurement in Z axis；
Step 2：After treating each several part working environment of interferometer stably, by observe interference fringe adjust plane mirror around
The inclination of X, Y or corner reflector in X, the translation of Y-direction makes interferogram be full of whole CCD as far as possible；For spherical interference
Instrument measures the Power item of opal position, and the Z-direction position of adjustment plane mirror makes Power item be less than 2 stripeds；
Step 3：The measured value of opal rotates the difference of 180 degree for interferometer transmission wavefront, and center of rotation is designated as opal
The center of data；Center of rotation is determined by the method finding circular interferogram center；Or by sharp shaped material respectively in X side
Block interferogram to Y-direction, then center of rotation is determined by the image space of sharp shaped material；
Step 4：Surface shape measurement software using interferometer measures opal position data W0；Before not considering plane of reference face shape error
Put, W0For interferometer transmission wavefront WgAnd WgRotation 180 degree Wg' between difference；W0=Wg-Wg'=2 × (Wg-Ws), wherein Ws
For rotating 180 degree not variable, the item being 2 θ including rotationally symmetrical item and angular frequency, center of rotation is (cx,cy)；
Step 5：Adjustment plane mirror around the inclination of Y-axis or corner reflector X-direction translation it is assumed that recording reflection
The tilt quantity of mirror is tx1Or the translational movement of corner reflector is trx1, then measure opal position data W again1；W1=Wg-Wg’
(dx, 0), wherein (dx, 0) represent that data translates dx pixel on CCD, and dx ≈ tx1×F#× PD, or dx=2 × trx1/
PR, wherein F#For the F number of sphere standard mirror, PD is the unified pixel count accounting for CCD of standard mirror, and PR is each of flat interferometer
The physical length that pixel represents；
Step 6：Adjustment plane mirror is around the inclination of X-axis or corner reflector translation in the Y direction it is assumed that the reflection surveyed
The tilt quantity of mirror is ty1Or the translational movement of corner reflector is try1, then measure opal position data W again2；W2=Wg-Wg’
(0, dy), and dy ≈ ty1×F#× PD, or dy=2 × try1/PR；
Step 7：Using W0, W1, W2Three data and dx, dy, are compiled by rotation translation shearing absolute sense technology computer
Computed in software processed goes out transmission wavefront Wg.
2. a kind of interferometer emerging wavefront detection method based on rotation translation absolute sense according to claim 1, its
Be characterised by, in described step 3, above two method by the multiple method determining levelling average to obtain more accurately in
The heart；The center determining is designated as (cx,cy).
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| CN112525099B (en) * | 2020-11-16 | 2022-09-06 | 南京理工大学 | Device and method for absolute inspection of large-caliber planar interferometer by using rotation translation method |
| CN113049228B (en) * | 2021-03-22 | 2023-03-24 | 中国科学院上海光学精密机械研究所 | Objective wave aberration detection device and detection method |
| CN114858089B (en) * | 2022-04-22 | 2023-02-14 | 中国科学院光电技术研究所 | Method for realizing POWER of translation and rotation absolute detection plane measurement by using double stripes |
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Effective date of registration: 20190829 Address after: Room 601-10, 6th floor, No. 2, Jingyuan Beijie, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |