CN104311038B - A kind of preparation method of AlON coating AlN ceramic substrate - Google Patents

A kind of preparation method of AlON coating AlN ceramic substrate Download PDF

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Publication number
CN104311038B
CN104311038B CN201410557386.6A CN201410557386A CN104311038B CN 104311038 B CN104311038 B CN 104311038B CN 201410557386 A CN201410557386 A CN 201410557386A CN 104311038 B CN104311038 B CN 104311038B
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CN
China
Prior art keywords
ceramic substrate
aln ceramic
alon
aln
coating
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Expired - Fee Related
Application number
CN201410557386.6A
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Chinese (zh)
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CN104311038A (en
Inventor
唐竹兴
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Shandong University of Technology
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Shandong University of Technology
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Priority to CN201410557386.6A priority Critical patent/CN104311038B/en
Publication of CN104311038A publication Critical patent/CN104311038A/en
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Publication of CN104311038B publication Critical patent/CN104311038B/en
Expired - Fee Related legal-status Critical Current
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated

Abstract

A preparation method for AlON coating AlN ceramic substrate, is characterized in that: adopt Al 2o 3colloidal sol atomizing spraying, on AlN ceramic substrate, after drying, is made AlON layer and is formed AlON coating AlN ceramic substrate under nitrogen atmosphere medium and high temperature on the surface of AlN ceramic substrate.AlON coating AlN ceramic substrate prepared by the present invention forms AlN-Al at aln surface 2o 3sosoloid Al xo yn zduring coating copper electrode, the Al-O key forming micro-Cu-O key and AlON coating AlN ceramic substrate surface due to copper electrode surface oxidation is combined closely, make aluminium nitride ceramic substrate and metallic copper electrode ohmic contact, its resistivity is reduced, the use properties of encapsulating electronic components can be increased substantially.

Description

A kind of preparation method of AlON coating AlN ceramic substrate
Technical field
The present invention relates to a kind of AlON coating AlN ceramic substrate, belong to structural ceramics preparing technical field.
Background technology
When covering electrodes, usually there is non-ohmic contact between metallic copper and aluminium nitride ceramic substrate in aluminium nitride ceramic substrate, causes contact resistance to increase.
Summary of the invention
The object of the present invention is to provide a kind of can overcome above-mentioned defect, ornamental performance excellent preparation method.Its technical scheme is:
A preparation method for AlON coating AlN ceramic substrate, by Al 2o 3content be 5 ~ 30wt% Alumina gel with weight percent be make mixing solutions after the aqueous ethanolic solution Homogeneous phase mixing of 10 ~ 20wt% and 30 ~ 70wt% and atomizing spraying on AlN ceramic substrate, after drying, in nitrogen atmosphere, temperature is 1500 ~ 1900 DEG C, make thickness under the insulation condition of 20 ~ 60 minutes on the surface of AlN ceramic substrate is 10 ~ 100 μm of thick AlON layers, makes AlON coating AlN ceramic substrate.
Compared with prior art, its advantage is in the present invention:
1, the AlON coating AlN ceramic substrate uniform microstructure prepared of the present invention, intensity is high, and global reliability is high;
2, the AlON coating AlN ceramic substrate prepared of the present invention, forms AlN-Al at aln surface 2o 3sosoloid Al xo yn zduring coating copper electrode, the Al-O key forming micro-Cu-O key and AlON coating AlN ceramic substrate surface due to copper electrode surface oxidation is combined closely, make aluminium nitride ceramic substrate and metallic copper electrode ohmic contact, its resistivity is reduced, the use properties of encapsulating electronic components can be increased substantially.
Embodiment
embodiment 1
By Al 2o 3content to be 5wt% Alumina gel with weight percent be make mixing solutions after the aqueous ethanolic solution Homogeneous phase mixing of 10wt% and 30wt% and atomizing spraying on AlN ceramic substrate, after drying, in nitrogen atmosphere, temperature is 1500 DEG C, make thickness under the insulation condition of 20 minutes on the surface of AlN ceramic substrate is 10 μm of thick AlON layers, makes AlON coating AlN ceramic substrate.
The purity of testing proportion material used is technical pure.
embodiment 2
By Al 2o 3content to be 20wt% Alumina gel with weight percent be make mixing solutions after the aqueous ethanolic solution Homogeneous phase mixing of 15wt% and 50wt% and atomizing spraying on AlN ceramic substrate, after drying, in nitrogen atmosphere, temperature is 1700 DEG C, make thickness under the insulation condition of 40 minutes on the surface of AlN ceramic substrate is 50 μm of thick AlON layers, makes AlON coating AlN ceramic substrate.
The purity of testing proportion material used is technical pure.
embodiment 3
By Al 2o 3content to be 30wt% Alumina gel with weight percent be make mixing solutions after the aqueous ethanolic solution Homogeneous phase mixing of 20wt% and 70wt% and atomizing spraying on AlN ceramic substrate, after drying, in nitrogen atmosphere, temperature is 1900 DEG C, make thickness under the insulation condition of 60 minutes on the surface of AlN ceramic substrate is 100 μm of thick AlON layers, makes AlON coating AlN ceramic substrate.
The purity of testing proportion material used is industry.

Claims (1)

1. a preparation method for AlON coating AlN ceramic substrate, is characterized in that: by Al 2o 3content be 5 ~ 30wt% Alumina gel with weight percent be make mixing solutions after the aqueous ethanolic solution Homogeneous phase mixing of 10 ~ 20wt% and 30 ~ 70wt% and atomizing spraying on AlN ceramic substrate, after drying, in nitrogen atmosphere, temperature is 1500 ~ 1900 DEG C, make thickness under the insulation condition of 20 ~ 60 minutes on the surface of AlN ceramic substrate is 10 ~ 100 μm of thick AlON layers, makes AlON coating AlN ceramic substrate.
CN201410557386.6A 2014-10-21 2014-10-21 A kind of preparation method of AlON coating AlN ceramic substrate Expired - Fee Related CN104311038B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410557386.6A CN104311038B (en) 2014-10-21 2014-10-21 A kind of preparation method of AlON coating AlN ceramic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410557386.6A CN104311038B (en) 2014-10-21 2014-10-21 A kind of preparation method of AlON coating AlN ceramic substrate

Publications (2)

Publication Number Publication Date
CN104311038A CN104311038A (en) 2015-01-28
CN104311038B true CN104311038B (en) 2015-12-09

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410557386.6A Expired - Fee Related CN104311038B (en) 2014-10-21 2014-10-21 A kind of preparation method of AlON coating AlN ceramic substrate

Country Status (1)

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CN (1) CN104311038B (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1923508A (en) * 2006-09-21 2007-03-07 上海交通大学 TiN/AlON nano multilayer coating for cutting tool
CN102208371B (en) * 2010-03-31 2012-11-21 比亚迪股份有限公司 Aluminium nitride ceramic copper-clad substrate and preparation method thereof
KR20120098118A (en) * 2011-02-28 2012-09-05 영남대학교 산학협력단 Manufacturing method of polycrystalline aluminum oxynitride with improved transparency

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CN104311038A (en) 2015-01-28

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Granted publication date: 20151209

Termination date: 20171021